CN106918446B - Apparatus for measuring quality of laser beam and method based on the sampling of rotating cylinder spiral string holes - Google Patents
Apparatus for measuring quality of laser beam and method based on the sampling of rotating cylinder spiral string holes Download PDFInfo
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- CN106918446B CN106918446B CN201710132113.0A CN201710132113A CN106918446B CN 106918446 B CN106918446 B CN 106918446B CN 201710132113 A CN201710132113 A CN 201710132113A CN 106918446 B CN106918446 B CN 106918446B
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- 238000005070 sampling Methods 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000005259 measurement Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000000691 measurement method Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 5
- 230000001960 triggered effect Effects 0.000 description 5
- 230000002123 temporal effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000005622 photoelectricity Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of apparatus for measuring quality of laser beam and method based on the sampling of rotating cylinder spiral string holes, device includes rotating cylinder, photodetector and data acquisition process unit, rotating cylinder high speed rotation around the shaft, at least provided with one group along the shaft axis direction sampling hole that helically line is arranged on the barrel of rotating cylinder, the center line of sampling hole intersects vertically with shaft axis, laser beam to be measured is incident to the photodetector inside rotating cylinder along the axis direction perpendicular to shaft outside rotating cylinder, the aperture of sampling hole is less than the scale of laser beam to be measured, spacing of adjacent two sampling holes on rotating cylinder cross section is greater than the scale of laser beam to be measured.The position that the present invention passes through setting sampling hole, ensure that photodetector can only receive the signal of a sampling hole, so that within a light beam scan period, the light distribution and light intensity peak that entire light beam can be obtained simulate aperture and are finely tuned in a manner of obtaining at focal spot center power and measuring beam quality PIB along beam cross section.
Description
Technical field
The invention belongs to laser parameter measurement technical fields, and in particular to a kind of measuring device of laser beam quality parameter
And method.
Background technique
In laser parameter measurement, beam quality is an important parameter, indicates ability of the laser beam to far-field emission.
Common beam quality includes the M2 factor, β parameter and Power in the bucket (PIB) etc., and wherein PIB represents laser beam in the function in far field
Rate concentration degree and can focusing capability.
Existing PIB measurement method is arranged on optical adjusting bracket using the aperture of suitable dimension, behind aperture
Using light power meter probe measurement optical power, the position by finely tuning aperture makes the value of the optical power obtained maximum, as
The PIB value of the laser beam.The problem is that when the light beam of laser is unstable, the position of hot spot becomes this method
Change, leads to not capture laser intensity maximum value using aperture, therefore may be only available for the stable laser continuously exported.
Summary of the invention
The object of the present invention is to provide a kind of apparatus for measuring quality of laser beam based on the sampling of rotating cylinder spiral string holes and sides
Method is applicable not only to continuous-stable light source, other lasers not high for spatial alternation frequency are equally applicable.
Technical solution of the invention is as follows:
Based on the apparatus for measuring quality of laser beam of rotating cylinder spiral string holes sampling, it is characterized in that, including rotating cylinder, photoelectricity
Detector and data acquisition process unit, rotating cylinder high speed rotation around the shaft, at least provided with one group on the barrel of rotating cylinder
Along the shaft axis direction sampling hole that helically line is arranged, center line and the shaft axis of the sampling hole intersect vertically, to
Measurement laser beam is incident to photodetector inside rotating cylinder or to be measured along the axis direction perpendicular to shaft outside rotating cylinder
Amount laser beam edge is incident to the light behind rotating cylinder inside by setting inside rotating cylinder perpendicular to the axis direction of shaft outside rotating cylinder
It learns and is incident to photodetector after element is turned back, the aperture of the sampling hole is less than the scale of laser beam to be measured, described
Data acquisition process unit record and the output signal for handling photodetector.
To guarantee to measure quality, two hole center spacing of adjacent two sampling holes on rotating cylinder cross section are greater than to be measured sharp
The scale of light beam.
The preferred heavy caliber integrating sphere photodetector of above-mentioned photodetector；The optical element preferred mirror.
Above-mentioned laser beam scale to be measured is 0.1-10mm, and the aperture of sampling hole is 0.01-9mm.
The response time of above-mentioned photodetector preferred nanosecond or Microsecond grade.
Initial time is measured to determine, is also provided with location triggered unit in measuring device, goes to setting position in rotating cylinder
When setting, trigger position trigger unit exports trigger signal.
Above-mentioned location triggered unit includes infrared tube and anti-dazzling screen, and infrared tube is mounted on the rack, anti-dazzling screen setting
The position to match on installation rotating cylinder with infrared tube.
Alternatively, above-mentioned location triggered unit includes being separately positioned on the inside and outside positioned light source of rotating cylinder and photosensitive two pole
Pipe, when specific sampling hole turns to the position of setting, the output light of positioned light source is incident to photodiode.
Laser beam quality measuring method based on the sampling of rotating cylinder spiral string holes, comprising the following steps:
1) laser beam to be measured pass through uniform rotation rotating cylinder barrel on it is one or more groups of along shaft axis direction helically
The sampling hole of line arrangement；The center line of the sampling hole intersects vertically with shaft axis, and the aperture of sampling hole is less than to be measured
The scale of laser beam；
2) photodetector carries out high-speed sampling measurement to the laser beam for passing through every sampling hole, obtains laser beam in difference
The performance number of sample location；
3) data acquisition process unit record and serial optical power value of the photodetector within a scan period is handled,
The positional relationship of sampling hole, obtains the Power in the bucket value in the period when being rotated according to acquisition time and plate.
To improve temporal resolution, same sampling hole can carry out overlapping sampling to laser beam in step 2).
The advantageous effects that the present invention has are as follows:
1, the present invention drives the sampling hole array of helically line distribution to carry out incoming laser beam by high speed rotation rotating cylinder
Whole beam spot scans, and light intensity signal is obtained using the photodetector unit of a large area, pass through setting sampling hole
Position, it is ensured that photodetector can only receive the signal of a sampling hole, so that can obtain within a light beam scan period
Obtain the light distribution and light intensity peak of entire light beam；By way of this scanning, simulates traditional aperture and cut along light beam
Fine tuning measures the mode of PIB to obtain focal spot center power on face.
2, the present invention is scanned by the high-space resolution that the position setting to sampling hole realizes entire light beam, due to sampling
In shaft axis direction, helically line is arranged in hole, and spacing of the two adjacent sampling holes on shaft axis direction can be set
Smaller, the simultaneous selection speed of response fast photodetector and data actuation can to obtain higher spatial resolution
Finely to depict the changes in spatial distribution of light intensity, and ensure that sampling hole can scan the point of maximum intensity i.e. light-beam position of focal spot.
3, the volume of rotating cylinder of the present invention and compact-sized, and can be by the way that a plurality of helix is arranged in same rotating cylinder
Sampling hole meets beam jitter frequency less than in the case of kHz so that the device can realize kHz grades of light beam scanning sampling
Beam quality sampling and measuring.
Detailed description of the invention
Fig. 1 is laser beam quality measuring method and apparatus schematic illustration of the present invention；
Fig. 2 is the principle of optimality figure of apparatus for measuring quality of laser beam of the present invention；
Fig. 3 is the top view of Fig. 1 of the present invention；
Fig. 4 is that sampling hole of the present invention scans schematic diagram to measuring beam；
Fig. 5 is that schematic diagram is arranged in laser beam of the present invention and sampling hole site；
Appended drawing reference are as follows: 1-laser beam；2-sampling holes；3-rotating cylinders；4-racks；5-shafts；6-photodetectors
7-sample beams；11-reflecting mirrors；12-integrating sphere photodetectors；17-positioned light sources；18-photodiodes.
Specific embodiment
As shown in Figs. 1-5, beam quality PIB measuring device of the invention includes rotating cylinder 3, photodetector 6 and for remembering
Record and handle the data acquisition process unit of photodetector output signal.Rotating cylinder 3 couples shaft 5 and around the shaft 5 by rack
High speed rotation, the cross section of rotating cylinder 3 be circle, and one group is provided on barrel, and along 5 axis direction of shaft, helically line arrangement is taken
Sample hole 2, the sampling hole can be one group of evenly arranged micropore of helix, can also increase scanning times and set on a rotating cylinder
Set the evenly arranged sampling hole of multiple groups helix.Sampling hole 2 is directed toward 5 axis of shaft, and the center of sampling hole is vertical with 5 axis of shaft
Intersection, laser beam 1 to be measured are incident to the photodetection inside rotating cylinder 3 along the axis direction perpendicular to shaft 5 outside rotating cylinder 3
Device 6.It is incident from 3 outside of rotating cylinder along the axis direction perpendicular to shaft 5 to be also possible to laser beam 1, by what is be arranged inside rotating cylinder 3
It turns back after optical element --- reflecting mirror 11 and is incident to photodetector 6.
As shown in figure 3, the aperture of sampling hole 2 is less than the scale of laser beam 1 to be measured, and adjacent two sampling holes 2 are turning
Spacing on 3 cross sections of cylinder, i.e. a in Fig. 3 are greater than the scale of laser beam 1 to be measured, can ensure that photoelectricity at any time in this way
Detector 6 can only receive the signal of the sample beam 7 by a sampling hole 2.
Photodetector 6 selects bigbore power meter, such as integrating sphere photodetector 12, it is ensured that can receive entire
Laser beam 1 to be measured.The scale of incoming laser beam 1 is 0.1-10mm, and the aperture of sampling hole 2 is then 0.01-9mm, is less than incidence
The scale of laser beam 1.
As shown in Figures 3 and 4, in order to improve the spatial resolution that scanning samples, adjacent two sampling holes 2 are along shaft axis side
The very little that upward spacing b can be set may insure measuring device spatial discrimination with higher in vertical direction in this way
Rate.The fast photodetector of the simultaneous selection speed of response and data actuation carry out high-speed signal acquisition, such as same sampling in Fig. 4
Hole is superimposed sampling on the different location of laser beam, to obtain higher spatial resolution in the horizontal direction, finally
The changes in spatial distribution of light intensity finely is depicted, and ensures that sampling hole can scan the light-beam position of point of maximum intensity, that is to say, that
It can ensure that each scan period captures maximum power peak i.e. focal spot center by fine spacescan.
Furthermore in order to improve temporal resolution, 3 one weeks sampling holes of rotating cylinder can be a helix, be also possible to a plurality of
Helix, that is, rotating cylinder 3 often rotate a circle, can to laser beam 1 be repeated several times scan, the purpose is to meet sampling hole and
Under the premise of the size of spacing requires, raising temporal resolution obtains PIB parameter so that it is guaranteed that capturing focal spot center as far as possible.
As shown in figure 5, being provided with location triggered list in measuring device to provide position reference to scanning sampling mechanism
Member, trigger signal is exported when rotating cylinder 3 goes to setting position, and synchronous triggering data actuation either acquires the touching by data actuation
It signals, the image restoration for subsequent light beam light distribution.Location triggered unit can be using conventional infrared tube and screening
Mating plate, infrared tube are mounted on the rack, and anti-dazzling screen setting is on installation rotating cylinder 3.Positioning light as shown in Figure 5 can also be used
Source 17 and photodiode 18, wherein it is inside and outside to be separately positioned on rotating cylinder for positioned light source 17 and photodiode 18, are turning
In the most of the time of 3 rotation of cylinder, the light of positioned light source 17 is blocked, and the sampling hole of only certain height turns to the position of setting
When setting, the output light of positioned light source 17 is incident to photodiode 18 so that 18 output pulse signal of photodiode, acquisition and
The signal peak is extracted, trigger signal or reference signal can be provided for subsequent image restoration software.It is true by these designs
The light beam scanning sampling of kHz can be realized by protecting the device, meet beam jitter frequency less than the beam quality PIB in the case of kHz
Parameter measurement.
The measurement method of beam quality is carried out to laser beam using above-mentioned measuring device, comprising the following steps:
[1] optical path adjusting: according to as shown in the figures 1 and 2 light path arrangement incident laser and measuring device, manually rotation turn
Cylinder, so that laser beam to be measured is incident to sampling hole, and adjusts the position of photodetector, it is ensured that photodetector can obtain whole
A laser beam to be measured；
[2] rotating mechanism is opened, after rotating cylinder spin stabilization, opens photodetector and data acquisition process unit；
[3] laser beam is loaded, data acquisition process unit calculates the largest light intensity value obtained in each light beam scan period,
Power in the bucket value as in the period；
[4] data acquisition process unit is according to the geometric maps relationship of sampling hole and light beam, obtain laser beam intensity when
Empty distribution parameter.
Measuring device of the invention realizes the measurement of Series P IB value by replacing the plate of different sampling apertures, for example swashs
Beam diameter is d, and sampling hole selects 0.1d, 0.2d ... 0.9d series diameter, it is only necessary to which different plates, other devices are kept
It is constant, the measurement of laser beam Series P IB value can be realized.
Claims (1)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710132113.0A CN106918446B (en) | 2017-03-07 | 2017-03-07 | Apparatus for measuring quality of laser beam and method based on the sampling of rotating cylinder spiral string holes |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710132113.0A CN106918446B (en) | 2017-03-07 | 2017-03-07 | Apparatus for measuring quality of laser beam and method based on the sampling of rotating cylinder spiral string holes |
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| Publication Number | Publication Date |
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| CN106918446A CN106918446A (en) | 2017-07-04 |
| CN106918446B true CN106918446B (en) | 2019-06-07 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108917654B (en) * | 2018-06-28 | 2024-09-13 | 重庆天成集创科技有限公司 | Novel angle sensor and its measurement method |
| CN111024224B (en) * | 2019-12-02 | 2022-04-01 | 西北核技术研究院 | Method for measuring laser far-field beam quality PIB factor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076305A (en) * | 2012-12-28 | 2013-05-01 | 西北核技术研究所 | Device for measuring surface diffuse reflectivity of material |
| CN103575386A (en) * | 2013-10-28 | 2014-02-12 | 中国人民解放军国防科学技术大学 | Diffuse reflection hard light space-time sampling measuring method and device based on rotary blade |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010053323B3 (en) * | 2010-12-02 | 2012-05-24 | Xtreme Technologies Gmbh | Method for the spatially resolved measurement of parameters in a cross section of a beam of high-energy, high-intensity radiation |
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2017
- 2017-03-07 CN CN201710132113.0A patent/CN106918446B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076305A (en) * | 2012-12-28 | 2013-05-01 | 西北核技术研究所 | Device for measuring surface diffuse reflectivity of material |
| CN103575386A (en) * | 2013-10-28 | 2014-02-12 | 中国人民解放军国防科学技术大学 | Diffuse reflection hard light space-time sampling measuring method and device based on rotary blade |
Non-Patent Citations (1)
| Title |
|---|
| 转筒扫描法测量连续波激光器近场光强分布的研究;彭杨;《中国优秀硕士学位论文全文数据库 信息科技辑》;20090715(第07期);第22-23页第2.5节，第25-26页第3.1.1节以及图2.14、图3.1-图3.5、图3.8 |
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