CN106756785A - Multi-element composite nano hard coating and preparation method thereof - Google Patents
Multi-element composite nano hard coating and preparation method thereof Download PDFInfo
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- 238000000576 coating method Methods 0.000 title claims abstract description 95
- 239000011248 coating agent Substances 0.000 title claims abstract description 90
- 239000002131 composite material Substances 0.000 title claims abstract description 18
- 238000002360 preparation method Methods 0.000 title claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 12
- 238000005520 cutting process Methods 0.000 claims abstract description 9
- 229910052796 boron Inorganic materials 0.000 claims abstract description 5
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 5
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 9
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 4
- 238000005238 degreasing Methods 0.000 claims description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims description 3
- 238000005488 sandblasting Methods 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 abstract description 6
- 238000007254 oxidation reaction Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 230000006872 improvement Effects 0.000 abstract description 2
- 230000009257 reactivity Effects 0.000 abstract description 2
- 238000007670 refining Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 45
- 238000005240 physical vapour deposition Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000004512 die casting Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000002103 nanocoating Substances 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 229910010060 TiBN Inorganic materials 0.000 description 1
- 229910008482 TiSiN Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 239000002114 nanocomposite Substances 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/08—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner applied by physical vapour deposition [PVD]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
- B23B2228/36—Multi-layered
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
本发明涉及一种用于切削刀具表面用多元复合纳米硬质涂层,所述涂层包括至少两层CrN和CrTiBN,其中CrN层的Cr与N的原子百分比为60:40至70:30,CrTiBN层中各原子的百分比为Cr 10‑25%、Ti 8‑30%、B 14‑29%、N 30‑60%。根据本发明的所述涂层中B元素具有细化晶粒的作用,大幅提高了涂层硬度,并且对涂层抗高温氧化性和抗化学反应性的提高也有一定作用,可以有效延长工具的使用寿命。The invention relates to a multi-component composite nano-hard coating for the surface of a cutting tool, the coating comprises at least two layers of CrN and CrTiBN, wherein the atomic percentage of Cr and N in the CrN layer is 60:40 to 70:30, The percentages of each atom in the CrTiBN layer are Cr 10-25%, Ti 8-30%, B 14-29%, and N 30-60%. According to the present invention, the B element in the coating has the effect of refining grains, which greatly improves the hardness of the coating, and also has a certain effect on the improvement of the high temperature oxidation resistance and chemical reactivity of the coating, which can effectively prolong the life of the tool. service life.
Description
技术领域technical field
本发明属于金属表面涂层技术领域,具体涉及采用一种物理气相沉积(PVD)技术对多元复合结构的纳米硬质涂层的制备。The invention belongs to the technical field of metal surface coatings, and in particular relates to the preparation of a multi-component composite structure nano hard coating by adopting a physical vapor deposition (PVD) technology.
背景技术Background technique
气相沉积技术主要包括CVD(化学气相沉积)和PVD(物理气相沉积),是当代真空技术和材料科学中最活跃的研究领域,也是目前刀具表面涂层技术的主流方向,它不仅可以用来制备各种特殊性能的薄膜涂层,而且还可以用来制备各种功能薄膜材料和装饰薄膜涂层以及沉积各种各样的化合物、非金属、半导体、陶瓷、塑料膜等。PVD技术与CVD技术相比,其沉积温度高;沉积速率快;沉积的涂层具有细微结构、抗裂纹扩展能力强;涂层表面光滑、摩擦系数低;涂层制备是在真空条件下,复合绿色制造的理念。目前PVD涂层已经扩展到了航空航天、机械加工、电子通讯、医疗器械、家电等行业,涂层类型也从最初的TiN、TiC单层涂层发展到了多层涂层、多元复合涂层、梯度涂层以及纳米涂层等。Vapor deposition technology mainly includes CVD (chemical vapor deposition) and PVD (physical vapor deposition), which is the most active research field in contemporary vacuum technology and material science, and is also the mainstream direction of tool surface coating technology. It can not only be used to prepare Film coatings with various special properties, and can also be used to prepare various functional film materials and decorative film coatings, and to deposit various compounds, non-metals, semiconductors, ceramics, plastic films, etc. Compared with CVD technology, PVD technology has a higher deposition temperature; faster deposition rate; the deposited coating has a fine structure and strong crack resistance; the coating surface is smooth and the friction coefficient is low; the coating is prepared under vacuum conditions. The concept of green manufacturing. At present, PVD coating has been extended to aerospace, mechanical processing, electronic communication, medical equipment, home appliances and other industries. Coatings and nano coatings, etc.
单层涂层在气相沉积技术发展的前十几年中一直被采用,典型的代表有TiC、TiN、Al2O3、CrN,其余的还有NbC、HfC、ZrC、ZrN、BN等。其中CrN涂层目前应用最为广泛,是被誉为最能替代TiN涂层的材料之一,并且由于其耐磨性优良,其主要用于塑料膜、冷镦冲头等模具,又根据其良好的抗粘结性和化学稳定性切削软材料如钛合金,钛、铜、铝等。Single-layer coatings have been used in the first ten years of the development of vapor deposition technology. Typical representatives include TiC, TiN, Al 2 O 3 , CrN, and others include NbC, HfC, ZrC, ZrN, BN, etc. Among them, CrN coating is currently the most widely used, and is known as one of the materials that can best replace TiN coating, and because of its excellent wear resistance, it is mainly used for molds such as plastic films and cold heading punches, and according to its good performance Anti-caking and chemical stability cutting soft materials such as titanium alloy, titanium, copper, aluminum and so on.
多层涂层与单层涂层相比能够有效的抑制粗大晶粒组织的生长,改善涂层组织状况,发挥出各层不同涂层材料的优点,有效的提高产品性能。最常用的多层涂层是2种涂层组合或者层数在3~7层之间的多层复合涂层。Compared with single-layer coating, multi-layer coating can effectively inhibit the growth of coarse grain structure, improve the coating structure, give full play to the advantages of different coating materials in each layer, and effectively improve product performance. The most commonly used multilayer coating is a combination of two coatings or a multilayer composite coating with 3 to 7 layers.
多元复合涂层是在单层涂层、多层涂层中加入如Cr、Zr、V、B、Hf等元素,能够提高抗氧化性和抗磨损性,并大大改善涂层与基材之间的结合力。目前,最常用的是TiCN和TiAlN,其余还有TiSiN、TiBN、TiAlSi、TiAlCN等。The multi-component composite coating is to add elements such as Cr, Zr, V, B, Hf and so on to the single-layer coating and multi-layer coating, which can improve the oxidation resistance and wear resistance, and greatly improve the relationship between the coating and the substrate. combination. At present, TiCN and TiAlN are the most commonly used, and there are TiSiN, TiBN, TiAlSi, TiAlCN and so on.
因此梯度涂层是对基材表面进行梯度化处理,使涂层基体表面一定深度区域形成碳化物和碳氮化物的韧性区,此区域的粘结剂含量一般高于涂层基体的名义粘结剂含量,当裂纹扩展到此区域时,由于此韧性区韧性优异,将有效的吸收裂纹扩展的能量,提高刀具的使用寿命。Therefore, the gradient coating is to perform gradient treatment on the surface of the substrate, so that a certain depth area on the surface of the coating substrate forms a tough zone of carbides and carbonitrides. The binder content in this area is generally higher than the nominal bond of the coating substrate. When the crack extends to this area, due to the excellent toughness of this tough zone, it will effectively absorb the energy of crack expansion and improve the service life of the tool.
纳米涂层以高硬度、高耐热性、相对较高的韧性以及在低成本和绿色加工的前提下有高的使用寿命等特点一经面世就引起了研究者的广泛关注。其主要分为纳米多层结构和纳米复合结构涂层两类。Nano-coatings have attracted extensive attention of researchers since their appearance due to their characteristics of high hardness, high heat resistance, relatively high toughness, and long service life under the premise of low cost and green processing. It is mainly divided into two types of nano-multilayer structure and nano-composite structure coating.
发明内容Contents of the invention
本发明目的是提供一种用于切削刀具表面用多元复合纳米硬质涂层,所述涂层包括至少两层CrN和CrTiBN,其中CrN层的Cr与N的原子百分比为60:40至70:30,优选为67:33,CrTiBN层中各原子的百分比为Cr 10-25%、Ti 8-30%、B 14-29%、N 30-60%,优选为Cr20%、Ti19%、B19%和N42%。The object of the present invention is to provide a kind of multi-component composite nano hard coating for cutting tool surface, said coating comprises at least two layers of CrN and CrTiBN, wherein the atomic percentage of Cr and N of CrN layer is 60:40 to 70: 30, preferably 67:33, the percentage of each atom in the CrTiBN layer is Cr 10-25%, Ti 8-30%, B 14-29%, N 30-60%, preferably Cr20%, Ti19%, B19% and N42%.
优选地,所述涂层包括多层CrN和CrTiBN,优选为2-200层,优选为4-50层,更优选为2至4层,所述CrN层和CrTiBN层交替排列,优选最内层为CrN层,最外层为CrTiBN层。Preferably, the coating comprises multiple layers of CrN and CrTiBN, preferably 2-200 layers, preferably 4-50 layers, more preferably 2 to 4 layers, the CrN layers and CrTiBN layers are arranged alternately, preferably the innermost layer is a CrN layer, and the outermost layer is a CrTiBN layer.
优选地,所述涂层中CrN层厚度为0.3~0.35μm和CrTiBN层厚度为2.5~3μm,进一步优选地,所述CrN层厚度为0.33μm和CrTiBN层厚度为2.8μm。Preferably, the thickness of the CrN layer in the coating is 0.3-0.35 μm and the thickness of the CrTiBN layer is 2.5-3 μm, further preferably, the thickness of the CrN layer is 0.33 μm and the thickness of the CrTiBN layer is 2.8 μm.
优选地,包括所述CrN层和CrTiBN层的涂层的总厚度约为3~8μm。Preferably, the total thickness of the coating including the CrN layer and the CrTiBN layer is about 3-8 μm.
根据本发明的包括所述CrN层和CrTiBN层的涂层的制备方法没有特别限制,可以利用本领域常规的PVD沉积方法制备所述各层。优选地,可以按照以下方法制备:The method for preparing the coating including the CrN layer and the CrTiBN layer according to the present invention is not particularly limited, and the layers can be prepared by conventional PVD deposition methods in the art. Preferably, it can be prepared according to the following method:
本发明另一个目的是提供一种所述多元复合纳米硬质涂层的制备方法,所述制备方法包括以下步骤:Another object of the present invention is to provide a kind of preparation method of described multi-component composite nano-hard coating, and described preparation method comprises the following steps:
步骤1)基材前处理:将基材放入清洗线超声槽依次进行除油、除锈等工序,进行粗洗;然后粗洗后对基材进行喷砂处理;最后将基材放入清洗线进行超声精洗,并烘干30min。Step 1) Substrate pre-treatment: put the substrate into the ultrasonic tank of the cleaning line to perform degreasing, rust removal and other processes in turn, and perform rough cleaning; then perform sandblasting on the substrate after rough cleaning; finally put the substrate into the cleaning The wires were ultrasonically cleaned and dried for 30 minutes.
步骤2)将基材固定在转架上,以3维方式转动,等炉腔真空度达到8.0×10-3Pa,温度达到400℃时,开始运行PVD涂层处理。Step 2) Fix the substrate on the turntable and rotate it in a 3-dimensional manner. When the vacuum degree of the furnace chamber reaches 8.0×10 -3 Pa and the temperature reaches 400° C., PVD coating treatment starts.
步骤3)通入氩气辉光40min后打开Cr靶进行Cr轰击;30min后通入氮气进行CrN层沉积,涂层时间10至20min,预计厚度0.3~0.35μm。Step 3) Open the Cr target for Cr bombing after 40 minutes of argon glow; 30 minutes later, nitrogen gas is injected for CrN layer deposition, the coating time is 10 to 20 minutes, and the expected thickness is 0.3 to 0.35 μm.
步骤4)打开Ti靶5min后再开B靶并保持Cr靶开启状态,沉积CrTiBN层40至60min,预计厚度2.5~3μm。Step 4) Open the Ti target for 5 minutes, then open the B target and keep the Cr target open, and deposit a CrTiBN layer for 40 to 60 minutes, with an expected thickness of 2.5-3 μm.
优选地,所述步骤3)和步骤4)可以交替进行多次,以交替形成多层CrN层和CrTiBN层。Preferably, the step 3) and step 4) can be alternately performed multiple times to alternately form multiple layers of CrN layers and CrTiBN layers.
所述步骤3)工艺参数为:真空度1.5Pa,氩气输入量20~25,氮气输入量240~250,偏压150V,温度380℃。The process parameters of the step 3) are: vacuum degree 1.5Pa, argon input volume 20-25, nitrogen input volume 240-250, bias voltage 150V, temperature 380°C.
步骤4)工艺参数为:真空度1.6Pa,氩气输入量7~10,氮气输入量260~270,偏压110V,温度380℃。Step 4) The process parameters are: vacuum degree 1.6Pa, argon input volume 7-10, nitrogen input volume 260-270, bias voltage 110V, temperature 380°C.
有益效果Beneficial effect
(1)涂层中B元素具有细化晶粒的作用,大幅提高了涂层硬度,并且对涂层抗高温氧化性和抗化学反应性的提高也有一定作用。(1) The B element in the coating has the effect of refining grains, greatly improving the hardness of the coating, and also has a certain effect on improving the high temperature oxidation resistance and chemical reactivity of the coating.
(2)涂层中Cr、N元素的含量较多,大幅提高了涂层的抗高温氧化性。(2) The content of Cr and N elements in the coating is relatively high, which greatly improves the high temperature oxidation resistance of the coating.
(3)涂层表面含有Ti和B元素,有效降低了涂层表面的摩擦系数,提高了耐磨性。(3) The coating surface contains Ti and B elements, which effectively reduces the friction coefficient of the coating surface and improves wear resistance.
(4)涂层采用CrN打底、多层分布的结构分布,减小了涂层内应力和涂层内部裂纹扩展,提高了膜基结合力,增加了涂层产品的使用寿命。(4) The coating adopts CrN primer and multi-layer structure distribution, which reduces the internal stress of the coating and the expansion of internal cracks in the coating, improves the bonding force of the film base, and increases the service life of the coating product.
根据本发明的包括所述CrN层和CrTiBN层的涂层有效解决高速干式切削刀具和热作模具加工条件苛刻的问题,延长工具的使用寿命。The coating comprising the CrN layer and the CrTiBN layer according to the present invention effectively solves the problem of harsh processing conditions of high-speed dry cutting tools and hot-working molds, and prolongs the service life of the tools.
附图说明Description of drawings
图1为CrN/CrTiBN多元复合纳米硬质涂层4层结构示意图Figure 1 is a schematic diagram of the 4-layer structure of CrN/CrTiBN multi-component composite nano-hard coating
图2为CrN/CrTiBN多元复合纳米硬质涂层制备过程流程图Figure 2 is a flow chart of the preparation process of CrN/CrTiBN multi-component composite nano hard coating
图3为实施例1滚齿刀CrN/CrTiBN涂层产品外观Fig. 3 is the appearance of the CrN/CrTiBN coating product of the gear hob in embodiment 1
图4为实施例2铝压铸模具CrN/CrTiBN涂层产品外观Fig. 4 is the appearance of the CrN/CrTiBN coating product of the aluminum die-casting mold of embodiment 2
具体实施方式detailed description
根据本发明所述涂层中CrN层为过渡层,其可以提高膜基结合力;CrTiBN层内部内应力小、抗裂纹扩展能力强;并且涂层表面含有B元素,能够有效降低摩擦系数、提高涂层抗摩擦磨损性。According to the present invention, the CrN layer in the coating is a transition layer, which can improve the bonding force of the film base; the internal stress of the CrTiBN layer is small, and the crack growth resistance is strong; and the surface of the coating contains B elements, which can effectively reduce the friction coefficient and improve Friction and wear resistance of the coating.
根据本发明的所述包括所述CrN层和CrTiBN层的涂层中,在CrTiBN层中引入了B元素,并且B元素的原子百分比控制在14-29%的范围内,优选为19%,本发明的发明人发现当在层中引入B元素并控制B元素的原子百分比在上述范围内时,可以非常显著的提高涂层的硬度和抗氧化温度。当B 元素的原子百分比在上述范围内时,则无法实现涂层硬度和抗氧化温度的提高。In the coating comprising the CrN layer and the CrTiBN layer according to the present invention, the B element is introduced into the CrTiBN layer, and the atomic percentage of the B element is controlled within the range of 14-29%, preferably 19%. The inventors of the invention found that when the B element is introduced into the layer and the atomic percentage of the B element is controlled within the above range, the hardness and oxidation resistance temperature of the coating can be significantly improved. When the atomic percentage of the B element is within the above range, the coating hardness and oxidation resistance temperature cannot be improved.
以下,将详细地描述本发明。在进行描述之前,应当理解的是,在本说明书和所附的权利要求书中使用的术语不应解释为限制于一般含义和字典含义,而应当在允许发明人适当定义术语以进行最佳解释的原则的基础上,根据与本发明的技术方面相应的含义和概念进行解释。因此,这里提出的描述仅仅是出于举例说明目的的优选实例,并非意图限制本发明的范围,从而应当理解的是,在不偏离本发明的精神和范围的情况下,可以由其获得其他等价方式或改进方式。Hereinafter, the present invention will be described in detail. Before proceeding with the description, it should be understood that the terms used in this specification and appended claims should not be construed as limited to ordinary and dictionary meanings, but should be best interpreted while allowing the inventor to properly define the terms On the basis of the principles of the present invention, explanations are made based on meanings and concepts corresponding to the technical aspects of the present invention. Accordingly, the descriptions set forth herein are preferred examples for illustrative purposes only and are not intended to limit the scope of the invention, so that it should be understood that other, etc. price or improvement.
在描述之前,应当了解在说明书和所附权利要求中使用的术语,并不应解释为局限于一般及辞典意义,而是应当基于允许发明人为最好的解释而适当定义术语的原则,基于对应于本发明技术层面的意义及概念进行解释。因此,在此的描述仅为说明目的的优选实例,而并非是意指限制本发明的范围,因而应当了解的是,在不偏离本发明的精神和范围下可以做出其他等同实施和修改。除非特别说明,以下实施例中使用的试剂和仪器均为市售可得产品。Before the description, it should be understood that the terms used in the specification and appended claims should not be construed as limited to the general and dictionary meanings, but should be based on the principle of allowing the inventor to define the terms appropriately for the best interpretation, based on the corresponding Explain the meaning and concept on the technical level of the present invention. Therefore, the description herein is only a preferred example for the purpose of illustration, not intended to limit the scope of the present invention, so it should be understood that other equivalent implementations and modifications can be made without departing from the spirit and scope of the present invention. Unless otherwise specified, the reagents and instruments used in the following examples are all commercially available products.
实施例1:滚齿刀表面CrN/CrTiBN硬质涂层的制备Embodiment 1: Preparation of CrN/CrTiBN hard coating on the surface of gear hob
所述滚齿刀基材为用于加工外啮合直齿和斜齿圆柱齿轮。The base material of the hob is used for machining external spur gears and helical spur gears.
步骤1)基材前处理:将滚齿刀放入清洗线超声槽依次进行除油、除锈等工序,进行粗洗;然后粗洗后对滚齿刀进行去毛刺,完成后进行喷砂处理;最后将滚齿刀放入清洗线进行超声精洗,并烘干30min。Step 1) Substrate pre-treatment: put the hob into the ultrasonic tank of the cleaning line to perform degreasing, rust removal and other processes in turn, and perform rough cleaning; then deburr the hob after rough cleaning, and perform sandblasting after completion ;Finally put the hobbing cutter into the cleaning line for ultrasonic fine cleaning, and dry for 30min.
步骤2)将滚齿刀固定在转架上,以3维方式转动,等炉腔真空度达到8.0×10-3Pa,温度达到400℃时,开始运行PVD涂层处理。Step 2) Fix the hobbing cutter on the turntable and rotate it in a 3-dimensional manner. When the vacuum degree of the furnace chamber reaches 8.0×10 -3 Pa and the temperature reaches 400° C., PVD coating treatment starts.
步骤3)通入氩气辉光40min后打开Cr靶进行Cr轰击;30min后通入氮气进行CrN层沉积,涂层时间15min,厚度0.33μm。Step 3) Open the Cr target for Cr bombing after 40 minutes of argon glow; 30 minutes after passing nitrogen gas for CrN layer deposition, the coating time is 15 minutes, and the thickness is 0.33 μm.
步骤4)打开Ti靶5min后再开B靶并保持Cr靶开启状态,沉积CrTiBN层45min,预计厚度2.8μm。Step 4) Open the Ti target for 5 minutes, then open the B target and keep the Cr target open, deposit a CrTiBN layer for 45 minutes, with an estimated thickness of 2.8 μm.
所述步骤3)工艺参数为:工艺参数为:真空度1.5Pa,氩气输入量20~25,氮气输入量240~250,偏压150V;步骤4)工艺参数为:真空度1.6Pa,氩气输入量7~10,氮气输入量260~270,偏压110V,温度380℃。The process parameters of the step 3) are: process parameters are: vacuum degree 1.5Pa, argon input volume 20-25, nitrogen input volume 240-250, bias voltage 150V; step 4) process parameters are: vacuum degree 1.6Pa, argon The gas input volume is 7-10, the nitrogen gas input volume is 260-270, the bias voltage is 110V, and the temperature is 380°C.
获得涂层硬度为65.7GPa,涂层厚度3.13μm。1000℃下切削操作条件下,滚齿刀使用寿命提高4.17倍。The obtained coating has a hardness of 65.7 GPa and a coating thickness of 3.13 μm. Under the cutting operation condition of 1000℃, the service life of the gear hobbing cutter is increased by 4.17 times.
实施例2:铝压铸模具表面CrN/CrTiBN硬质涂层的制备Embodiment 2: Preparation of CrN/CrTiBN hard coating on the surface of aluminum die-casting mold
基材为铝压铸模具,模具基材H13为钢,经热处理和离子氮化,工作温度600℃。The base material is aluminum die-casting mold, the mold base material H13 is steel, after heat treatment and ion nitriding, the working temperature is 600°C.
除了将步骤3)和4)按顺序重复一次以外,按照实施例1相同的方式在基材为铝压铸模具表面上形成CrN/CrTiBN硬质涂层。Except that steps 3) and 4) were repeated once in order, a CrN/CrTiBN hard coating was formed on the surface of the aluminum die-casting mold in the same manner as in Example 1.
获得涂层硬度为63.1GPa,涂层厚度6.5μm。The obtained coating has a hardness of 63.1 GPa and a coating thickness of 6.5 μm.
对比实施例1Comparative Example 1
除了不形成CrTiBN层以外,按照实施例1相同的方式在滚齿刀表面仅形成CrN涂层。获得涂层硬度为35.2GPa,1000℃下切削操作条件下,滚齿刀使用寿命提高1.32倍。Only a CrN coating was formed on the surface of the hob in the same manner as in Example 1 except that no CrTiBN layer was formed. The hardness of the obtained coating is 35.2GPa, and the service life of the gear hob is increased by 1.32 times under the cutting operation condition of 1000°C.
对比实施例2Comparative Example 2
除了不形成CrN层以外,按照实施例1相同的方式在滚齿刀表面仅形成CrTiBN涂层。获得涂层硬度为40.2GPa,1000℃下切削操作条件下,滚齿刀使用寿命提高1.89倍。Only a CrTiBN coating was formed on the surface of the hob in the same manner as in Example 1 except that no CrN layer was formed. The hardness of the obtained coating is 40.2GPa, and the service life of the gear hob is increased by 1.89 times under the cutting operation condition of 1000°C.
对比实施例3Comparative Example 3
按照现有技术CN105839054A中记载的方法,在滚齿刀表面形成CrAlTiSiN涂层,所述涂层厚度为3.5μm。获得涂层硬度为40.8GPa,1000℃下切削操作条件下,滚齿刀使用寿命提高2.37倍。According to the method described in the prior art CN105839054A, a CrAlTiSiN coating is formed on the surface of the gear hob, and the thickness of the coating is 3.5 μm. The hardness of the obtained coating is 40.8GPa, and the service life of the gear hob is increased by 2.37 times under the cutting operation condition of 1000°C.
从实施例1和2与对比实施例1至3的实验数据可以看出,本发明的包含CrN/CrTiBN层的涂层可以有效地提高产品硬度,并显著提高产品使用寿命。From the experimental data of Examples 1 and 2 and Comparative Examples 1 to 3, it can be seen that the coating containing the CrN/CrTiBN layer of the present invention can effectively improve the hardness of the product and significantly increase the service life of the product.
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