CN106753733A - 纳米复合金刚石线锯切割液 - Google Patents
纳米复合金刚石线锯切割液 Download PDFInfo
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- CN106753733A CN106753733A CN201611192729.9A CN201611192729A CN106753733A CN 106753733 A CN106753733 A CN 106753733A CN 201611192729 A CN201611192729 A CN 201611192729A CN 106753733 A CN106753733 A CN 106753733A
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- cutting liquid
- diamond fretsaw
- nano combined
- defoamer
- combined diamond
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- 238000005520 cutting process Methods 0.000 title claims abstract description 51
- 239000007788 liquid Substances 0.000 title claims abstract description 40
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 37
- 239000010432 diamond Substances 0.000 title claims abstract description 37
- 239000000654 additive Substances 0.000 claims abstract description 18
- 230000000996 additive effect Effects 0.000 claims abstract description 18
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000013530 defoamer Substances 0.000 claims abstract description 14
- 239000008367 deionised water Substances 0.000 claims abstract description 12
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 12
- 239000002994 raw material Substances 0.000 claims abstract description 11
- -1 borate ester Chemical class 0.000 claims abstract description 8
- 239000000314 lubricant Substances 0.000 claims abstract description 7
- 239000003755 preservative agent Substances 0.000 claims abstract description 7
- 230000002335 preservative effect Effects 0.000 claims abstract description 7
- 239000003381 stabilizer Substances 0.000 claims abstract description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- BTBUEUYNUDRHOZ-UHFFFAOYSA-N Borate Chemical compound [O-]B([O-])[O-] BTBUEUYNUDRHOZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 6
- 125000000913 palmityl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 claims description 6
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 5
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 5
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 5
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000005642 Oleic acid Substances 0.000 claims description 5
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 5
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 5
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- WXMKPNITSTVMEF-UHFFFAOYSA-M sodium benzoate Chemical compound [Na+].[O-]C(=O)C1=CC=CC=C1 WXMKPNITSTVMEF-UHFFFAOYSA-M 0.000 claims description 4
- 235000010234 sodium benzoate Nutrition 0.000 claims description 4
- 239000004299 sodium benzoate Substances 0.000 claims description 4
- DQWPFSLDHJDLRL-UHFFFAOYSA-N triethyl phosphate Chemical compound CCOP(=O)(OCC)OCC DQWPFSLDHJDLRL-UHFFFAOYSA-N 0.000 claims description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 claims description 3
- 229920000193 polymethacrylate Polymers 0.000 claims description 3
- WHNWPMSKXPGLAX-UHFFFAOYSA-N N-Vinyl-2-pyrrolidone Chemical compound C=CN1CCCC1=O WHNWPMSKXPGLAX-UHFFFAOYSA-N 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 229920002545 silicone oil Polymers 0.000 claims description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims 1
- ZZVUWRFHKOJYTH-UHFFFAOYSA-N diphenhydramine Chemical compound C=1C=CC=CC=1C(OCCN(C)C)C1=CC=CC=C1 ZZVUWRFHKOJYTH-UHFFFAOYSA-N 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 22
- 229910052710 silicon Inorganic materials 0.000 abstract description 22
- 239000010703 silicon Substances 0.000 abstract description 22
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 238000001816 cooling Methods 0.000 abstract description 3
- 238000005461 lubrication Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 231100000053 low toxicity Toxicity 0.000 abstract description 2
- 231100000252 nontoxic Toxicity 0.000 abstract description 2
- 230000003000 nontoxic effect Effects 0.000 abstract description 2
- 239000011241 protective layer Substances 0.000 abstract description 2
- 230000009467 reduction Effects 0.000 abstract description 2
- 239000005543 nano-size silicon particle Substances 0.000 description 8
- 238000003756 stirring Methods 0.000 description 8
- 238000002360 preparation method Methods 0.000 description 7
- ICLYJLBTOGPLMC-KVVVOXFISA-N (z)-octadec-9-enoate;tris(2-hydroxyethyl)azanium Chemical compound OCCN(CCO)CCO.CCCCCCCC\C=C/CCCCCCCC(O)=O ICLYJLBTOGPLMC-KVVVOXFISA-N 0.000 description 5
- HJVAFZMYQQSPHF-UHFFFAOYSA-N 2-[bis(2-hydroxyethyl)amino]ethanol;boric acid Chemical group OB(O)O.OCCN(CCO)CCO HJVAFZMYQQSPHF-UHFFFAOYSA-N 0.000 description 5
- 239000002202 Polyethylene glycol Substances 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- 229940117013 triethanolamine oleate Drugs 0.000 description 5
- 229940008099 dimethicone Drugs 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 4
- BEFDCLMNVWHSGT-UHFFFAOYSA-N ethenylcyclopentane Chemical compound C=CC1CCCC1 BEFDCLMNVWHSGT-UHFFFAOYSA-N 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 239000004334 sorbic acid Substances 0.000 description 4
- 235000010199 sorbic acid Nutrition 0.000 description 4
- 229940075582 sorbic acid Drugs 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XVVZSEXTAACTPS-UHFFFAOYSA-N 5-[hydroxy-(4-nitrophenoxy)phosphoryl]pentanoic acid Chemical compound OC(=O)CCCCP(O)(=O)OC1=CC=C([N+]([O-])=O)C=C1 XVVZSEXTAACTPS-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 241000220324 Pyrus Species 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WPKYZIPODULRBM-UHFFFAOYSA-N azane;prop-2-enoic acid Chemical compound N.OC(=O)C=C WPKYZIPODULRBM-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 235000021017 pears Nutrition 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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- C10M2201/10—Compounds containing silicon
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- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/121—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of seven or less carbon atoms
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- C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
- C10M2207/10—Carboxylix acids; Neutral salts thereof
- C10M2207/12—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2207/125—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids
- C10M2207/126—Carboxylix acids; Neutral salts thereof having carboxyl groups bound to acyclic or cycloaliphatic carbon atoms having hydrocarbon chains of eight up to twenty-nine carbon atoms, i.e. fatty acids monocarboxylic
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- C10M2207/28—Esters
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- C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
- C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
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- C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
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- C10M2215/00—Organic non-macromolecular compounds containing nitrogen as ingredients in lubricant Compositions
- C10M2215/02—Amines, e.g. polyalkylene polyamines; Quaternary amines
- C10M2215/04—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms
- C10M2215/042—Amines, e.g. polyalkylene polyamines; Quaternary amines having amino groups bound to acyclic or cycloaliphatic carbon atoms containing hydroxy groups; Alkoxylated derivatives thereof
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- C10M2217/024—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to an amido or imido group
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- C10M2217/00—Organic macromolecular compounds containing nitrogen as ingredients in lubricant compositions
- C10M2217/02—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds
- C10M2217/028—Macromolecular compounds obtained from nitrogen containing monomers by reactions only involving carbon-to-carbon unsaturated bonds containing monomers having an unsaturated radical bound to a nitrogen-containing hetero ring
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- C10M2217/06—Macromolecular compounds obtained by functionalisation op polymers with a nitrogen containing compound
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- C10M2223/00—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions
- C10M2223/02—Organic non-macromolecular compounds containing phosphorus as ingredients in lubricant compositions having no phosphorus-to-carbon bonds
- C10M2223/04—Phosphate esters
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- C10M2227/00—Organic non-macromolecular compounds containing atoms of elements not provided for in groups C10M2203/00, C10M2207/00, C10M2211/00, C10M2215/00, C10M2219/00 or C10M2223/00 as ingredients in lubricant compositions
- C10M2227/06—Organic compounds derived from inorganic acids or metal salts
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- C10M2227/00—Organic non-macromolecular compounds containing atoms of elements not provided for in groups C10M2203/00, C10M2207/00, C10M2211/00, C10M2215/00, C10M2219/00 or C10M2223/00 as ingredients in lubricant compositions
- C10M2227/06—Organic compounds derived from inorganic acids or metal salts
- C10M2227/061—Esters derived from boron
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- C10M2229/00—Organic macromolecular compounds containing atoms of elements not provided for in groups C10M2205/00, C10M2209/00, C10M2213/00, C10M2217/00, C10M2221/00 or C10M2225/00 as ingredients in lubricant compositions
- C10M2229/04—Siloxanes with specific structure
- C10M2229/041—Siloxanes with specific structure containing aliphatic substituents
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- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
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- C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
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Abstract
本发明公开了一种纳米复合金刚石线锯切割液，以重量百分比计，其制备原料包括：极压剂1～5%，润滑剂10～60%，稳定剂2～10%，消泡剂0.1～2%，防腐剂0.1～5%，纳米添加剂0.05～2%，余量为去离子水；极压剂为硼酸酯类极压剂；消泡剂为有机硅烷消泡剂；的纳米添加剂为水溶性纳米添加剂。本发明纳米复合金刚石线锯切割液具有良好的润滑、冷却、清洗性能；所用原料无毒或低毒、环保，符合绿色环保的生产要求；加入了纳米添加剂，该添加剂能够完全溶解到切割液中，在硅锭切割中能在硅锭表面与金刚石线锯之间形成保护层，起到减小摩擦、防止污片或划伤硅片，提高成品率。
Description
技术领域
本发明涉及金刚石线锯切割技术领域，具体涉及一种纳米复合金刚石线锯切割液。
背景技术
近年来，随着晶硅片切割工艺的改进，使用金刚石线锯切割晶硅片的优势越来越来明显，其具有切割效率高、面形精度好和环境清洁等优点，受到越来越多的关注，并有望成为日后的主要切割方式。金刚石线锯切割分为电镀金刚线和树脂金刚线，均是利用钢线外层包有的金刚石与硅片摩擦进行切割，出片率比传统的切割方式高，其切割速度是钢线的2-3倍。由于金刚石线锯切割速度快，钢线与硅棒之间的摩擦剧烈会产生大量的热，如果不及时排除将会影响硅片的质量。因此，在硅棒切割过程中需要用到切割液。
切割液作为切割主要耗材之一，其性能直接影响着切割效率、切片质量甚至影响太阳能电池的转化效率，进而影响整个制造过程。目前市场上销售的切割液，其主要成分是水溶性的聚烷氧基化合物，并辅以各种功能的添加剂，其比热容低，对热的分散传导能力不强，且不能对硅片表面进行有效的保护影响硅片的质量。因此，急需一种比热容高、热传导能力强，能够有效保护硅片表面的切割液。
发明内容
本发明要解决的技术问题是提供一种冷却、传热性能好，且能对硅片表面进行有效保护的金刚石线锯切割液。
为解决上述技术问题，本发明采用如下技术方案：
设计一种纳米复合金刚石线锯切割液，以重量百分比计，其制备原料包括：极压剂1～5%，润滑剂10～60%，稳定剂2～10%，消泡剂0.1～2%，防腐剂0.1～5%，纳米添加剂0.05～2%，余量为去离子水；所述极压剂为硼酸酯类极压剂；所述消泡剂为有机硅烷消泡剂；所述的纳米添加剂为水溶性纳米添加剂。
本发明纳米复合金刚石线锯切割液，在切割液中加入了纳米添加剂，不仅能够起到减摩、润滑的作用，还能对硅片表面进行有效保护；提高硅片的合格率。
优选的，所述极压剂为三乙醇胺硼酸酯或十六烷基硼酸钙。硼酸酯类极压剂的极压抗磨效果好，使用寿命长，水溶性好。
优选的，所述润滑剂为聚乙二醇、磷酸三乙酯、油酸中的一种或两种及以上的混合物。
优选的，所述稳定剂为油酸三乙醇胺、聚乙烯吡咯啉酮、聚甲基丙烯酸铵中的一种或两种的混合物。
优选的，所述消泡剂为二甲基硅油、壬基酚聚氧乙烯醚、聚氧乙烯醚聚氧丙酮胺醚中的一种或两种的混合物。消泡剂的添加主要是为了抑制硅片切割中喷洗切割液过程中产生的气泡，防止泡沫过多聚集发生溢槽现象。
优选的，所述防腐剂为山梨酸、脱氢乙酸、十二烯基二丁酸二乙酰胺、苯甲酸钠中的一种或两种的混合物。
优选的，所述的纳米添加剂为水溶性纳米二氧化硅。
本发明纳米复合金刚石线锯切割液的制备方法为：首先按照上述配比选择制备原料：极压剂1～5%，润滑剂10～60%，稳定剂2～10%，消泡剂0.1～2%，防腐剂0.1～5%，纳米添加剂0.05～2%，余量为去离子水；然后在带有机械搅拌的容器中，一次加入上述去离子水、极压剂、润滑剂、稳定剂、消泡剂、防腐剂和纳米添加剂，在室温下搅拌1～3小时后既得到所述的纳米复合金刚石线锯切割液。
本发明的有益效果在于：
本发明纳米复合金刚石线锯切割液具有良好的润滑、冷却、清洗性能；所用原料无毒或低毒、环保，符合绿色环保的生产要求；加入了纳米添加剂，该添加剂能够完全溶解到切割液中，在硅锭切割中能在硅锭表面与金刚石线锯之间形成保护层，起到减小摩擦、防止污片或划伤硅片，提高成品率。
具体实施方式
下面结合实施例来说明本发明的具体实施方式，但以下实施例只是用来详细说明本发明，并不以任何方式限制本发明的范围。在以下实施例中所涉及的仪器设备如无特别说明，均为常规仪器设备；所涉及的工业原料如无特别说明，均为市售常规工业原料。
实施例1：一种纳米复合金刚石线锯切割液，其制备原料和制备过程为：分别精确称取三乙醇胺硼酸酯0.03Kg，聚乙二醇0.5Kg，油酸三乙醇胺0.05Kg，二甲基硅油0.01Kg，山梨酸 0.003Kg，纳米二氧化硅0.003Kg，去离子水0.404Kg；在带有机械搅拌的容器中加入去离子水，打开搅拌；然后依次添加所述的三乙醇胺硼酸酯，聚乙二醇，油酸三乙醇胺，二甲基硅油，山梨酸，纳米二氧化硅，继续搅拌2小时得到所述的纳米复合金刚石线锯切割液1.00Kg。
实施例2：一种纳米复合金刚石线锯切割液，其制备原料和制备过程为：分别精确称取三乙醇胺硼酸酯0.04Kg，磷酸三乙酯0.6Kg，聚甲基丙烯酸铵0.07Kg，壬基酚聚氧乙烯醚0.01Kg，苯甲酸钠0.004Kg，纳米二氧化硅0.003Kg，去离子水0.273Kg；在带有机械搅拌的容器中加入去离子水，打开搅拌；然后依次添加所述的三乙醇胺硼酸酯，磷酸三乙酯，聚甲基丙烯酸铵，壬基酚聚氧乙烯醚，苯甲酸钠，纳米二氧化硅，继续搅拌2小时得到所述的纳米复合金刚石线锯切割液1.00Kg。
实施例3：一种纳米复合金刚石线锯切割液，其制备原料和制备过程为：分别精确称取十六烷基硼酸钙0.03Kg，聚乙二醇0.6Kg，聚乙烯吡咯啉酮0.08Kg，二甲基硅油0.02Kg，脱氢乙酸0.002Kg，纳米二氧化硅0.003Kg，去离子水0.265Kg；在带有机械搅拌的容器中加入去离子水，打开搅拌；然后依次添加所述的十六烷基硼酸钙，聚乙二醇，聚乙烯吡咯啉酮，二甲基硅油，脱氢乙酸，纳米二氧化硅，继续搅拌2小时得到所述的纳米复合金刚石线锯切割液1.00Kg。
实施例4：一种纳米复合金刚石线锯切割液，其制备原料和制备过程为：分别精确称取十六烷基硼酸钙0.03Kg，油酸0.5Kg，油酸三乙醇胺0.10Kg，聚氧乙烯醚聚氧丙酮胺醚0.02Kg，山梨酸0.005Kg，纳米二氧化硅0.003Kg，去离子水0.342Kg；在带有机械搅拌的容器中加入去离子水，打开搅拌；然后依次添加所述的十六烷基硼酸钙，油酸，油酸三乙醇胺，聚氧乙烯醚聚氧丙酮胺醚，山梨酸，纳米二氧化硅，继续搅拌2小时得到所述的纳米复合金刚石线锯切割液1.00Kg。
将以上各实施例中配制的纳米复合金刚石线锯切割液与市售的切割液进行硅锭切割性能对比试验，试验结果如下表1所示。
表1给出了实施例1-4配制的纳米复合金刚石线锯切割液与市售切割液的硅锭切割性能对比试验数据，分别从成品率、污片率和TTV不良率（硅片最厚与最薄处的差值）三个性能指标进行了对比；从试验数据可以看出，本发明配制的纳米复合金刚石线锯切割液各项性能指标都优于市售切割液，具有良好的切割性能。
上面结合实施例对本发明作了详细的说明，但是，所属技术领域的技术人员能够理解，在不脱离本发明宗旨的前提下，还可以对上述实施例中的各个具体参数进行变更，形成多个具体的实施例，均为本发明的常见变化范围，在此不再一一详述。
Claims (7)
1.一种纳米复合金刚石线锯切割液，其特征在于，以重量百分比计，其制备原料包括：极压剂1～5%，润滑剂10～60%，稳定剂2～10%，消泡剂0.1～2%，防腐剂0.1～5%，纳米添加剂0.05～2%，余量为去离子水；
所述极压剂为硼酸酯类极压剂；
所述消泡剂为有机硅烷消泡剂；
所述的纳米添加剂为水溶性纳米添加剂。
2.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述极压剂为三乙醇胺硼酸酯或十六烷基硼酸钙。
3.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述润滑剂为聚乙二醇、磷酸三乙酯、油酸中的一种或两种及以上的混合物。
4.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述稳定剂为油酸三乙醇胺、聚乙烯吡咯啉酮、聚甲基丙烯酸铵中的一种或两种的混合物。
5.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述消泡剂为二甲基硅油、壬基酚聚氧乙烯醚、聚氧乙烯醚聚氧丙酮胺醚中的一种或两种的混合物。
6.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述防腐剂为山梨酸、脱氢乙酸、十二烯基二丁酸二乙酰胺、苯甲酸钠中的一种或两种的混合物。
7.根据权利要求1所述的纳米复合金刚石线锯切割液，其特征在于，所述的纳米添加剂为水溶性纳米二氧化硅。
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