CN106737129A - The flat grinding device of adjustable rotating ratio - Google Patents

Abstract

The present invention relates to a kind of flat grinding device of adjustable rotating ratio, including：Outer grinding disk, interior abrasive disk, outer driving shaft, interior drive shaft, workpiece haftplatte, rocking arm and finishing ring, the interior abrasive disk is connected with the interior drive shaft, the outer grinding disk is arranged concentrically with the interior abrasive disk, the outer grinding disk is connected with the outer driving shaft, position between the lower section of the workpiece haftplatte and the outer grinding disk and the interior abrasive disk is used to place workpiece, the workpiece haftplatte is positioned in the finishing ring, and the finishing ring is in contact with the rocking arm.The flat grinding device of the adjustable rotating ratio that the present invention is provided can significantly improve processing efficiency and workpiece surface quality.

Description

Surface grinding device with adjustable speed ratio

technical field

The invention relates to the field of precision grinding, in particular to a plane grinding device with adjustable speed ratio.

Background technique

High-precision, low-damage surface quality is an important development direction in the field of abrasive processing. Plane grinding is one of the important means to obtain high-precision surfaces such as optical components, sapphire substrates, and single crystal silicon substrates. It is used in electronics, communications, Computers, lasers, aerospace and other technical fields have a wide range of applications. At present, the existing plane grinding equipment is divided into two categories, one is single-side grinding equipment, and the other is double-side grinding equipment, and the single-side grinding equipment can be divided into fixed eccentric type, indefinite eccentric type, Straight and swing. The distribution of the trajectory of the abrasive grains has an important impact on the processing quality of the workpiece. The uneven distribution of the trajectory of the abrasive grains leads to uneven removal of the workpiece material, which affects the flatness and surface roughness of the workpiece's processed surface. The existing plane grinding equipment has a single control mode, and all of them use a whole grinding disc. The adjustable part is limited to the speed of the whole grinding disc, the supply flow rate of the grinding liquid, etc. When grinding a workpiece with a large size, the grinding disc needs to be adjusted. The size is also large, and it is difficult to improve the flatness of the grinding disc, which also limits the difficulty in improving the flatness of the processed workpiece.

Contents of the invention

The invention aims to solve the problems in the prior art of the surface grinding device, such as the single movement track mode of the abrasive grains, the uneven distribution which cannot be controlled, the low efficiency of the plane grinding process, and the poor surface quality of the workpiece, and provides an abrasive grain movement track mode, distribution The uniformity is controllable, and it adopts a split type single-control grinding disc, which can significantly improve the processing efficiency and the surface quality of the workpiece.

The invention provides a plane grinding device with an adjustable rotational speed ratio, comprising: an outer grinding disc, an inner grinding disc, an outer drive shaft, an inner drive shaft, a workpiece sticking plate, a rocker arm and a dressing ring, the inner grinding disc and the The inner drive shaft is connected, the outer grinding disc is set concentrically with the inner grinding disc, the outer grinding disc is connected with the outer drive shaft, and the lower part of the workpiece bonding plate is connected to the outer grinding disc and the inner grinding disc. The position between the grinding discs is used to place workpieces, the workpiece sticking plate is placed in the trimming ring, and the trimming ring is in contact with the rocker arm. The workpiece bonding plate is installed on the outer grinding disc and the inner grinding disc, and the workpiece is bonded under the workpiece bonding plate. In some embodiments, the inner grinding disc and the outer grinding disc are respectively connected to the inner drive shaft and the outer drive shaft through pins, so that the grinding disc or the polishing disc can be easily replaced, so as to achieve both grinding and polishing. The process is completed on the same platform.

In some embodiments, the workpiece is bonded to the workpiece adhesive plate with wax. Further preferably, the workpiece is bonded to the lower part of the workpiece bonding plate through paraffin and placed in the center of the trimming ring.

In some embodiments, the trimming ring is circular, the trimming ring is arranged on the periphery of the workpiece bonding plate, and the bottom of the trimming ring is in contact with the inner grinding disc and the outer grinding disc . The trimming ring can trim the grinding disc to ensure the flatness of the grinding disc, thereby ensuring the flatness of the surface of the processed workpiece.

In some embodiments, grooves are provided on the surface of the dressing ring in contact with the inner grinding disc and the outer grinding disc. Further preferably, the number of the grooves is more than two, and the grooves are evenly distributed to ensure that the grinding fluid supplied to the grinding disc is evenly dispersed, thereby ensuring that the processed workpiece can be evenly removed.

In some embodiments, the rocker arm includes two rollers, the outer cylindrical surface of the dressing ring is in contact with the rollers of the rocker arm, the rocker arm is connected to the output shaft of the motor, and the inner grinding disc and During the rotation of the outer grinding disc, the trimming ring is brought into contact with the roller of the rocker arm, and the rocker arm is driven by the motor to swing and drive the trimming ring to swing. Further preferably, in order to ensure that the dressing ring and the roller of the rocker arm are constantly in contact with the outer drive shaft and fixed, the workpiece must be in contact with the inner and outer grinding discs at the same time.

In some embodiments, the inner grinding disc and the outer grinding disc are cast iron discs, and more preferably, the inner grinding disc and the outer grinding disc are cerium oxide, copper discs, or composite metal discs. In some embodiments, the workpiece bonding plate is selected from one of ceramics, cast iron, and permanent magnetic chucks, and the workpiece bonding plate is provided with a handle.

In some embodiments, the inner grinding shaft is composed of a first cylinder and a second cylinder vertically, the cross section of the inner grinding shaft is T-shaped, the diameter of the first cylinder and the diameter of the inner grinding disc be consistent.

Compared with the prior art, the technical solution of the invention has the beneficial effect that: the plane grinding device with adjustable rotational speed ratio provided by the present invention can conveniently adjust the rotational speed ratio of the inner grinding disc and the outer grinding disc, and the rotation speed of the inner grinding disc and the outer grinding disc. The angle and speed of the steering and the swing of the rocker arm can improve the uniformity of the trajectory of the abrasive grains during the grinding process, which can significantly improve the processing efficiency and quality.

Description of drawings

Fig. 1 is the isometric view of the planar grinding device with adjustable rotational speed ratio of one embodiment of the present invention;

Fig. 2 represents the cross-sectional view of the plane grinding device of the adjustable speed ratio of an embodiment of the present invention;

Fig. 3 shows a top view of a plane grinding device with adjustable speed ratio according to an embodiment of the present invention.

In the figure, 100, plane grinding device with adjustable speed ratio, 1, outer drive shaft, 2, outer grinding disc, 3, rocker arm, 4, workpiece sticking plate, 5, dressing ring, 6, inner grinding disc, 7, Inner drive shaft, 8, workpiece.

detailed description

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

As shown in FIG. 1 , an embodiment of the present invention provides a plane grinding device 100 with adjustable speed ratio. The plane grinding device 100 of the adjustable rotational speed ratio comprises: the outer grinding disc 2, the inner grinding disc 6, the outer drive shaft 1, the inner drive shaft 7, the workpiece sticking plate 4, the rocking arm 3 and the dressing ring 5, the inner grinding disc The disc 6 is connected to the inner drive shaft 7, the outer grinding disc 2 is concentrically arranged with the inner grinding disc 6, the outer grinding disc 2 is connected to the outer drive shaft 1, and the workpiece sticking plate 4 is installed on On the outer grinding disc 2 and the inner grinding disc 6, the workpiece (not shown in FIG. 1 ) is bonded under the workpiece bonding plate 4, and the workpiece (not shown in FIG. 1 ) is connected to the outer grinding disc 6. The grinding disc 2 is in contact with the inner grinding disc 6 . The trimming ring 5 is disposed on the periphery of the workpiece bonding plate 4 and is in contact with the inner grinding disc 6 and the outer grinding disc 2 . The trimming ring 5 can trim the inner and outer grinding discs (2 and 6) to ensure the flatness of the inner and outer grinding discs (2 and 6), thereby ensuring the flatness of the surface of the processed workpiece. Further preferably, the rocker arm 3 also includes rollers, the rocker arm 3 is connected to the output shaft of the motor, and the inner grinding disc 6 and the outer grinding disc 2 drive the dressing ring 5 and the rocker arm during rotation. The rollers of 3 are in contact with each other, and the rocker arm 3 is driven by the motor to swing and drive the trimming ring 5 to swing.

In a specific embodiment, the inner grinding disc 6 may also have grooves.

With reference to Fig. 2 and Fig. 3, in this embodiment, described inner grinding disc 6 and described outer grinding disc 2 are respectively connected with described inner drive shaft 7 and described outer drive shaft 1 by pin, can replace grinding easily Disc or polishing disc, so that the two processes of grinding and polishing can be completed on the same platform.

Further, in this embodiment, the workpiece 8 is bonded to the workpiece bonding plate 4 through paraffin. Further preferably, the workpiece 8 is bonded under the workpiece bonding plate by paraffin wax and placed in the center of the trimming ring.

Further, in this embodiment, the surface of the dressing ring 5 in contact with the inner grinding disc 6 and the outer grinding disc 2 is provided with grooves. Further preferably, a certain number of grooves are evenly distributed on the surface of the dressing ring 5 in contact with the inner and outer grinding discs (2 and 6), so as to ensure that the grinding fluid supplied to the grinding discs is evenly dispersed, thereby ensuring that the processed workpiece can be evenly removed .

Further preferably, in order to ensure that the trimming ring 5 and the roller of the rocker arm 3 are always in contact with the outer drive shaft 1 to rotate and fix, the workpiece must be in contact with the inner and outer grinding discs at the same time.

In a specific embodiment, the inner grinding disc 6 and the outer grinding disc 2 are cast iron discs.

In a specific embodiment, the workpiece sticking plate 4 is selected from one of ceramics, cast iron, and permanent magnet chucks, and a handle is provided on the workpiece sticking plate.

In a specific embodiment, the inner grinding shaft 7 is composed of a first cylinder and a second cylinder vertically, the cross section of the inner grinding shaft 7 is T-shaped, and the diameter of the first cylinder and the diameter of the inner grinding The diameter of the disc remains the same.

In a specific embodiment, the number of the grooves is more than two, and the grooves are evenly distributed.

The beneficial effects of the present invention include: the adjustable rotational speed ratio plane grinding device provided by the present invention can easily adjust the rotational speed ratio of the inner grinding disc and the outer grinding disc, the steering of the inner grinding disc and the outer grinding disc, and the swing angle and Speed, so as to improve the uniformity of the trajectory of abrasive grains during the grinding process, which can significantly improve the processing efficiency and quality.

In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Back", "Left", "Right", "Vertical", "Horizontal", "Top", "Bottom", "Inner", "Outer", "Clockwise", "Counterclockwise", "Axial", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must be in a particular orientation, be constructed in a particular orientation, and operate in a particular orientation, and therefore should not be construed as limiting the invention.

In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include at least one of these features.

In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection" and "fixation" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , or integrated; it may be mechanically connected or electrically connected; it may be directly connected or indirectly connected through an intermediary, and it may be the internal communication of two components or the interaction relationship between two components, unless otherwise specified limit. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention according to specific situations.

In the present invention, unless otherwise clearly specified and limited, the first feature may be in direct contact with the first feature or the first and second feature indirectly through an intermediary. touch. Moreover, "above", "above" and "above" the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. "Below", "beneath" and "beneath" the first feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is less horizontally than the second feature.

In the description of this specification, descriptions referring to the terms "one embodiment", "some embodiments", "example", "specific examples", or "some examples" mean that specific features described in connection with the embodiment or example , structure, material or characteristic is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the described specific features, structures, materials or characteristics may be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without conflicting with each other.

Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, those skilled in the art can make the above-mentioned The embodiments are subject to changes, modifications, substitutions and variations.

What described in above-mentioned embodiment and description just illustrate the principle of the present invention and preferred embodiment, under the premise of not departing from the spirit and scope of the present invention, the present invention also can have various changes and improvements, and these changes and improvements all fall into within the scope of the claimed invention.

Claims (10)

1. a kind of flat grinding device of adjustable rotating ratio, including：Outer grinding disk, interior abrasive disk, outer driving shaft, interior drive shaft, Workpiece haftplatte, rocking arm and finishing ring, the interior abrasive disk is connected with the interior drive shaft, the outer grinding disk and the interior grinding Disk is arranged concentrically, and the outer grinding disk is connected with the outer driving shaft, the lower section of the workpiece haftplatte and the outer grinding disk and Position between the interior abrasive disk is used to place workpiece, and the workpiece haftplatte is positioned in the finishing ring, the finishing ring It is in contact with the rocking arm.

2. lapping device according to claim 1, it is characterised in that the interior abrasive disk and the outer grinding disk lead to respectively Pin is crossed to be connected with the interior drive shaft and the outer driving shaft.

3. lapping device according to claim 1, it is characterised in that workpiece is bonded by paraffin with the workpiece haftplatte.

4. lapping device according to claim 1, it is characterised in that the finishing ring is annular, the finishing ring sets Put in the periphery of the workpiece haftplatte, and the bottom of the finishing ring is in contact with the interior abrasive disk and the outer grinding disk.

5. lapping device according to claim 1, it is characterised in that the finishing ring and the interior abrasive disk and described outer The surface that abrasive disk is in contact is provided with groove.

6. lapping device according to claim 5, it is characterised in that the groove number is two or more, and the ditch Groove is centrosymmetric distribution.

7. lapping device according to claim 1, it is characterised in that the rocking arm includes two rollers, the finishing ring External cylindrical surface be in contact with the roller of the rocking arm.

8. lapping device according to claim 1, it is characterised in that the interior abrasive disk and outer grinding disk are cast iron plate.

9. lapping device according to claim 1, it is characterised in that the workpiece haftplatte is selected from ceramics, cast iron, permanent magnetism suction One kind in disk, handle is provided with the workpiece haftplatte.

10. lapping device according to claim 1, it is characterised in that the interior grinding shaft is justified by the first cylinder and second Post is vertically constituted, and the cross section of the interior grinding shaft is the diameter of T fonts, the diameter of first cylinder and the interior abrasive disk It is consistent.