CN205201209U - Magnetostatic moves a magnetic current and becomes polishing mechanism test device - Google Patents

Abstract

The utility model relates to a static magnetic dynamic field magnetorheological polishing mechanism test device. The device of the utility model includes a magnetorheological abrasive semi-fixed flexible micro-grinding head generating device, a static magnetic dynamic field eccentric conversion device, and a polishing disc reverse rotation device. The magnetorheological abrasive semi-fixed flexible micro-grinding head generating device includes a base, a permanent Magnetic pole, fixed sleeve, turntable, polishing disc, static magnetic dynamic field eccentric conversion device includes gasket, eccentric sleeve, inner positioning ring, angular contact ball bearing, outer positioning ring, polishing disc reverse rotation device includes external gear, planetary gear , Internal gears, supports, fixed discs, deep groove ball bearings, mounting shafts, stationary parts. The utility model realizes high-efficiency ultra-smooth constant-pressure magnetorheological polishing on the workpiece without updating the magnetorheological fluid, and the obtained workpiece has good surface quality, high processing efficiency and precision, and no surface and subsurface damage , high degree of homogenization, less material consumption, low cost, and can be used in the processing of various optical components and semiconductor substrates.

Description

A static magnetodynamic field magnetorheological polishing mechanism test device

technical field

The utility model relates to a static magnetic dynamic field magneto-rheological polishing mechanism test device, in particular to a constant-pressure optical element and semiconductor substrate plane grinding and polishing device for real-time on-line trimming of an abrasive semi-fixed magnetorheological flexible micro-grinding head .

Background technique

With the development of microelectronics, optoelectronics, solar photovoltaic technology and the continuous integration of optics and electronics, the processing precision requirements for hard and brittle material components and optoelectronic components are getting higher and higher. Modern optical lenses, mirrors, functional optoelectronic devices, etc. Optical surfaces not only have surface shape accuracy requirements, but also need to achieve ultra-smooth surfaces and strictly control subsurface damage. With the development of the information industry and the optoelectronics industry, the processing cost of components is required to continue to decrease, and the diameter of optical components is getting larger and larger (for example, the processing of single crystal silicon wafers in the microelectronics industry has gradually changed from the current mainstream 8-inch silicon wafers to 12-inch silicon wafers. development), its surface

The ultra-smooth polishing has become a new challenge for ultra-precision machining technology.

Under the guidance of the development of the information industry and the optoelectronic industry, in order to solve the problem of high-efficiency and precise grinding and polishing of optical surfaces, in the early 1990s, many collaborators at the Optical Center of the University of Rochester combined electromagnetics, fluid dynamics, and analytical chemistry. A new optical component processing method - magnetorheological polishing technology (MRF). As a new type of optical surface processing method, this method has developed into a revolutionary optical surface ultra-precision processing method due to its advantages that traditional polishing does not have, such as good polishing effect, no sub-surface damage, and suitable for complex surface processing. . This technology has been greatly developed so far, especially the combination of magnetorheological polishing and chemical etching to improve the laser damage resistance threshold of optical components has broad application prospects. At present, when the magnetorheological polishing method is used to process flat workpieces, various types of magnetorheological machine tools developed by the American QED company are mainly used. The principle is that the processed workpiece is located above the polishing disc, and a gap is formed between the processed workpiece and the polishing disc. "Concave gap", a magnetic pole is arranged under the polishing disc, and a gradient magnetic field is formed in the narrow gap formed by the workpiece and the polishing disc. When the magnetorheological fluid moves with the polishing disc to the vicinity of the gap formed by the workpiece and the polishing disc, the gradient magnetic field makes it condense and harden, forming a ribbon protrusion and becoming a viscoplastic Bingham medium. When the Bingham medium with higher viscosity passes through the narrow gap, it will generate a certain shear force on the contact area of the workpiece surface, so that the surface material of the workpiece is removed, and the purpose of micro-removal is achieved.

However, when the above-mentioned magnetorheological processing method is used to process the workpiece, due to the different processing gaps, the gradient magnetic field is also different, resulting in different material removal rates in various parts of the processing spots. The processing efficiency is bound to be low, and at the same time, the volume of the electromagnetic field generating device is very large, so it is difficult to realize simultaneous processing of multiple magnetic poles.

Patent CN200610132495.9 mentions the use of permanent magnets as the magnetic field generator, which can easily perform magnetorheological polishing, and it is easy to realize the array of multi-point magnetic poles to improve the processing efficiency. However, after long-term experimental verification, it was found that due to the inherent viscoelasticity of magnetorheological fluid, the micro-grinding head would be pressed down after the workpiece passed through the micro-grinding head and could not be recovered, thus losing the pressure on the workpiece and the polishing effect, and there was a serious loss. The problem of polishing pressure makes it difficult to guarantee the uniformity of the processed workpiece, and the processing principle and method still need a qualitative breakthrough.

Contents of the invention

The purpose of the utility model is to provide a static magnetic dynamic field magnetorheological polishing mechanism test device. The utility model can perform high-efficiency rough throwing, semi-fine throwing and fine throwing on the hard and brittle materials such as optical elements and semiconductor substrates without changing the processing device and magnetorheological fluid, and realizes the conversion and dynamic The recovery of the micro-grinding head under the magnetic field achieves constant pressure, homogenization, and ultra-smooth surface polishing on the workpiece. The utility model has the advantages of high efficiency, low cost, good surface quality of the obtained workpiece, no surface and sub-surface damage, and high homogenization degree.

The technical scheme of the utility model is: a static magnetodynamic field magnetorheological polishing mechanism test device of the utility model, including a magnetorheological abrasive semi-fixed flexible micro-grinding head generator, a static magnetodynamic field eccentric conversion device, a polishing disc Reverse rotation device, magnetorheological abrasive semi-fixed flexible micro-grinding head generating device includes base, permanent magnetic pole, fixed sleeve, turntable, polishing disc, static-magnetic dynamic field eccentric conversion device includes gasket, eccentric sleeve, inner positioning ring, Angular contact ball bearings, outer positioning rings, polishing disc reverse rotation device includes external gears, planetary gears, internal gears, support parts, fixed discs, deep groove ball bearings, installation shafts, stationary parts, and the base is clamped on the machine table , the turntable is set on the outside of the base, the fixed set is set on the upper part of the base, and the turntable and the fixed sleeve are connected with the base, the turntable and the fixed sleeve keep synchronously rotating axially with the base, and the eccentric sleeve is set in the inner hole set by the fixed sleeve. And the eccentric sleeve is connected with the fixed sleeve, the permanent magnetic pole is installed in the eccentric sleeve, the polishing disc is installed above the permanent magnetic pole; the gasket is installed between the base and the eccentric sleeve, and the inner positioning ring is set on the outside of the fixed sleeve, and it is connected with the fixed sleeve. The sleeves are fixed together, the angular contact ball bearing is set on the outer side of the inner positioning ring, the outer positioning ring is set on the outer side of the angular contact ball bearing, the movement of the polishing disc and the permanent magnet pole adopts the angular contact ball between the inner positioning ring and the outer positioning ring The outer gear, the three planetary wheels and the inner gear form a planetary motion, the support is installed on the top of the turntable, and the support is connected with the turntable, the inner gear is installed on the top of the support, and the inner gear and the support Connected together, the installation shaft is fixed in the inner hole of the planetary wheel through deep groove ball bearings, the outer gear is connected with the outer positioning ring, the fixed disc is set on the outside of the outer positioning ring, and the fixed disc is installed on the top of the installation shaft, the fixed disc and the The installation shafts are connected together, the fixed disc is locked with the stationary part, the stationary part is fixed on the machine base, and magnetorheological fluid needs to be provided above the polishing disc.

The magnetorheological fluid of the static magnetic dynamic field magnetorheological polishing mechanism test device of the present utility model is mixed with micron-sized carbonyl iron powder, micron-sized abrasive, glycerin or oleic acid in a certain proportion, and under the action of magnetic field and gravity, The magnetorheological fluid will quickly form a flexible micro-grinding head along the direction of the magnetic induction line. The static magnetic dynamic field magnetorheological polishing mechanism test device of the utility model converts the static magnetic field into a dynamic magnetic field by eccentrically rotating a small-sized permanent magnet, and the dynamic magnetic field promotes the recovery of the shape of the micro-grinding head and the renewal and self-sharpening of the abrasive, so as to realize the polishing of the flat surface. Constant pressure homogeneous polishing of the workpiece. The static magnetic dynamic field magneto-rheological polishing mechanism test device of the utility model adopts a planetary gear mechanism to realize that the rotation directions of the polishing disc and the permanent magnetic pole are opposite, and the angular contact ball is installed with a bearing so that the movement of the permanent magnetic pole and the polishing disc is relatively independent. When the planetary gear mechanism When the three planetary gears are kept stationary, the relative rotation direction of the internal gear and the external gear is opposite, thus, the direction of motion of the two can also be reversed under the drive of the internal gear and the external gear. The utility model realizes the whole process of rough polishing, semi-finish polishing and fine polishing on the workpiece without replacing the magnetorheological fluid. The device has high polishing efficiency, low cost, and the obtained workpiece has good surface quality and no surface And sub-surface damage, high degree of homogenization, the test device of the utility model can be used in the processing of various optical elements and semiconductor substrates.

Description of drawings

Fig. 1 is the three-dimensional schematic diagram of the utility model static magnetic dynamic field magnetorheological polishing mechanism test device;

Fig. 2 is the top view of the utility model static magnetic dynamic field magnetorheological polishing mechanism test device;

Fig. 3 is a full-section front view of the utility model static magnetic dynamic field magnetorheological polishing mechanism test device;

Fig. 4 is a working principle diagram of the utility model static magnetodynamic field magnetorheological polishing mechanism test device;

Fig. 5 is another structure diagram of the positioning ring and the eccentric sleeve in the test device of the static magnetodynamic field magnetorheological polishing mechanism of the utility model;

Fig. 6 is a schematic diagram of the magnetic lines of force when the permanent magnet poles of the utility model static magnetic dynamic field magnetorheological polishing mechanism test device are stationary;

Fig. 7 is a schematic diagram of the magnetic field lines when the permanent magnet poles rotate eccentrically in the static magnetodynamic field magnetorheological polishing mechanism test device of the present invention;

Fig. 8 is a schematic diagram of the positioning ring in the test device of the static magnetodynamic field magnetorheological polishing mechanism of the utility model;

In the figure: 1. screw, 2. lock nut, 3. polishing disc, 4. installation shaft, 5. planetary wheel, 6. support piece, 7. connecting screw, 8. base, 9. spacer, 10. flat Key, 11. External gear, 12. Turntable, 13. Connecting screw, 14. Fixing bolt, 15. Deep groove ball bearing, 16. Internal gear, 17. Fixed disc, 18. Stationary part, 19. Locking screw, 20 .Angular contact ball bearing, 21. Inner positioning ring, 22. Eccentric sleeve, 23. Permanent magnetic pole, 24. Fixed sleeve, 25. Outer positioning ring, 26. Fixing screw, 27. Set screw, 28, Eccentric distance, 29 , positioning step, 30, magnetorheological fluid, 31, workpiece, 32, main installation shaft, 33, flexible micro-grinding head, 34, thread, 35, notch.

detailed description:

The utility model will be further described below in conjunction with accompanying drawing and embodiment, but the embodiment of the utility model is not limited to this:

Example 1:

As shown in Figures 1 to 3, the test device for magnetostatic dynamic field magnetorheological polishing mechanism of the present invention includes a magnetorheological abrasive semi-fixed flexible micro-grinding device, a static magnetic dynamic field eccentric conversion device, and a polishing disc inverse The rotating device, the magnetorheological abrasive semi-fixed flexible micro-grinding device includes a base 8, a permanent magnet pole 23, a fixed sleeve 24, a turntable 12, and a polishing disc 3, and the magnetostatic dynamic field eccentric conversion device includes a gasket 9 and an eccentric sleeve 22. The inner positioning ring 21, the angular contact ball bearing 20, the outer positioning ring 25, the base 8 is clamped on the machine tool table, the turntable 12 is set on the outside of the base 8, the fixed sleeve 24 is installed on the upper part of the base 8, and the turntable 12 and the fixed sleeve 24 are connected with the base 8, the rotating disk 12 and the fixed sleeve 24 keep synchronously rotating axially with the base 8, the eccentric sleeve 22 is set in the inner hole provided by the fixed sleeve 24, and the eccentric sleeve 22 is connected with the fixed sleeve 24, The permanent magnetic pole 23 is installed in the eccentric sleeve 22, and the polishing disc 3 is installed above the permanent magnetic pole 23; the gasket 9 is installed between the base 8 and the eccentric sleeve 22, and the inner positioning ring 21 is sleeved on the outside of the fixed sleeve 24, and The fixed sleeve 24 is fixed together, the angular contact ball bearing 20 is set on the outside of the inner locating ring 21, the outer locating ring 25 is set on the outside of the angular contact ball bearing 20, the outer locating ring 25 is connected with the polishing disc 3, the polishing disc 3 and the permanent The movement of the magnetic pole 23 is separated by the angular contact ball bearing 20 between the inner positioning ring 21 and the outer positioning ring 25; 17. Deep groove ball bearing 15, installation shaft 4, stationary part 18, external gear 11, three planetary gears 5 and internal gear 16 form a planetary motion, support 6 is installed on the top of turntable 12, and support 6 and turntable 12 connection, the internal gear 16 is installed on the top of the support 6, and the internal gear 16 is connected with the support 6, the installation shaft 4 is fixed on the inner hole of the planetary wheel 5 through the deep groove ball bearing 15, the external gear 11 and the external The positioning ring 25 is connected, the fixed disc 17 is set on the outside of the outer positioning ring 25, and the fixed disc 17 is installed on the top of the installation shaft 4, the fixed disc 17 is connected with the installation shaft 4, and the fixed disc 17 is locked with the stationary part 18 , the stationary part 18 is fixed on the base of the machine tool, and a magnetorheological fluid 30 needs to be provided above the polishing disc 3 .

The power of the static magnetic dynamic field magnetorheological polishing mechanism test device of the present utility model only needs to drive the base 8 to move through a stepping motor, and the angular contact ball bearing 20 is positioned and installed by the inner ring 21 of the bearing inner ring, and by the outer positioning ring 25 The outer ring is positioned with the polishing disc 3, and the deep groove ball bearing 15 is positioned through the inner hole of the planetary wheel 5 to locate the outer ring. The outer gear 11, the inner gear 16 and the three evenly distributed planetary gears 5 mesh with each other to form a planetary gear system. In the fixed structure of the planetary gears, the deep groove ball bearing 15 is positioned in the inner hole of the inner gear 16, and the installation shaft 4 and the fixed disk 17 are fixed on the Together, the fixed disk 17 is locked on the stationary part 18 by the screw 19, so as to keep the three planetary gears 5 in a static state, so that the relative movement direction of the internal gear 16 and the external gear 11 is opposite, and the permanent magnet pole 23 and the base 8 are consistent in movement , the relative movement directions of the polishing disc 3 and the base 8 are opposite. The above-mentioned permanent magnet poles 23 are installed in the eccentric sleeve 22 to realize eccentric rotation, and the eccentric sleeve 22 can realize different eccentric distances 28 by changing the eccentric position of the hole.

In this embodiment, the above-mentioned turntable 12 is fixed together by connecting screws 13 and the support member 6 ; the turntable 12 and the fixing sleeve 24 are connected together with the base 8 by bolts 7 . The fixed disc 17 is connected with the installation shaft 4 through bolts and lock nuts 2 , and the outer positioning ring 25 is connected with the polishing disc 3 through screws 1 . The above-mentioned inner positioning ring 21 is installed together with the fixing sleeve 24 through the thread 34 .

In this embodiment, the above-mentioned internal gear 16 is installed together with the support member 6 through the fixing bolt 14 , and the external gear 11 is fixed together through the locking screw 26 and the outer positioning ring 25 .

In this embodiment, the above-mentioned eccentric sleeve 22 is connected with the fixed sleeve 24 through the flat key 10 . The fixed sleeve 24 drives the eccentric sleeve 22 and the permanent magnet pole 23 to rotate synchronously through the flat key 10 . The eccentric sleeve 22 and the fixed sleeve 24 are connected by the flat key 10, and the eccentric sleeve 22, the fixed sleeve 24, and the inner positioning ring 21 can be fixed together by changing the structure of the eccentric sleeve 22 and the fixed sleeve 24 to realize different Dimensions for the installation of permanent magnet poles 23.

In this embodiment, the upper end of the inner positioning ring 21 is provided with a notch 35. Since the inner positioning ring 21 and the fixing sleeve 24 are connected by threads, the notch 35 is provided for the convenience of installation and disassembly. In addition, the inner positioning ring 21 is also provided with a step 29 for positioning the inner ring of the angular contact ball bearing 20 , and the step 29 is arranged in the middle of the inner positioning ring 21 .

In this embodiment, the polishing disc 3 is concave in shape, and the polishing disc 3 is fixed with the outer positioning ring 25 by the screw 1 .

In this embodiment, the outer ring of the shaft end positioning deep groove ball bearing 15 is also installed on the lower part of the lock nut 2 and the installation shaft 4 .

In this embodiment, the above-mentioned permanent magnetic pole 23 is a cylindrical permanent magnet with a diameter of 5-30mm, the magnetic induction intensity of the end surface is at least 1500GS, the distance from the upper end surface of the permanent magnetic pole 23 to the surface of the polishing disc is 0-5mm, and the eccentricity of the eccentric sleeve 22 is 0 ~6mm.

In this embodiment, the above-mentioned annular polishing disc 3, eccentric sleeve 22, fixed sleeve 24, inner positioning ring 21, gasket 9, outer positioning ring 25, base 8, and turntable 12 are all made of hard aluminum alloy.

The plane processing method of the static magnetic dynamic field magnetorheological polishing mechanism test device of the utility model comprises the following steps:

1) Install the static-magnetic-dynamic-field magnetorheological polishing mechanism test device on the CNC milling machine, install the workpiece on the main installation axis of the milling machine, and set the machining gap between the workpiece and the polishing disc at 0.8 mm to 1.4 mm through the CNC system;

2) Set the rotation speed of the workpiece and the speed of the stepping motor driving the base, start the stepping motor, add magnetorheological fluid to the top of the polishing disc, and the magnetorheological fluid will follow the direction of the magnetic induction line under the action of the magnetic field force Quickly form a flexible micro-grinding head;

3) Start the CNC milling machine, and generate a dynamic magnetic field under the action of the static-magnetic dynamic field conversion mechanism and the reverse rotation device of the polishing disc. Under the action of the dynamic magnetic field, the flexible micro-grinding head is restored, and the magnetic particles are redistributed and accumulated. Constant pressure polishing realizes rough polishing, semi-finish polishing and ultra-smooth fine polishing on the workpiece with high efficiency and uniform magneto-rheological effect.

As shown in Figure 6, when the utility model static magnetic dynamic field magneto-rheological polishing mechanism test device was not working, the permanent magnetic pole 23 produced a static magnetic field; as shown in Figure 7, when the above-mentioned test device worked, the permanent magnetic pole 23 produced a The dynamic magnetic field under the eccentric rotation of the permanent magnet pole 23.

A kind of static magnetic dynamic field magnetorheological polishing mechanism test device of the present utility model, when working, need to add magnetorheological fluid 30 on the top of polishing disk 3, the preparation method of magnetorheological fluid 30 is as follows:

In deionized water, add 2-20% by mass of micron abrasives, 15-40% by mass of micron-scale carbonyl iron powder, 1-10% by mass of glycerin or oleic acid and other stabilizers and 1-10% by mass 10% anti-rust agent, fully stirred and vibrated by ultrasonic wave for 5-30 minutes, after the magnetorheological fluid 30 enters the top of the annular polishing disc 3, under the action of magnetic field and gravity, it quickly forms a flexible microgrinding along the direction of the magnetic induction line Head 33.

In this embodiment, the utility model prepares the magnetorheological fluid 30 through the following method: add a certain concentration of 6-10% in deionized water, a diamond abrasive with a particle size of 1.5-7 microns, and a concentration of 16% of micron-sized carbonyl Iron powder, glycerin with a mass percentage of 2%, and a rust inhibitor with a concentration of 3% are fully stirred and vibrated by ultrasonic waves for 10 minutes. When the magnetorheological fluid 30 enters the top of the annular polishing disc 3 , under the action of the magnetic field and gravity, the flexible micro-grinding head 33 will be rapidly formed along the direction of the magnetic induction line.

As shown in Fig. 5, in the present embodiment, above-mentioned permanent magnetic pole 23 is the cylindrical permanent magnet that diameter is 25mm, and the end surface magnetic induction intensity is 3000GS, and the distance from the upper end surface of permanent magnetic pole 23 to the surface of the polishing disk is 5mm, and the eccentric distance of eccentric sleeve 22 is 1mm, the permanent magnet pole 23 is installed in the eccentric sleeve 22, the rotational speeds of the workpiece and the permanent magnet pole 23 are 600rpm and 400rpm respectively, and the workpiece (31) has no deflection along the X installation axis direction.

The working principle of the present utility model is as follows: as shown in Figure 4, the utility model static magnetic dynamic field magneto-rheological polishing mechanism test device only needs to drive the base 8 to drive the device through a motor, and when the test device works, the base 8 passes through the The connecting screw 7, the fixed sleeve 24, the flat key 10, and the eccentric sleeve 22 drive the permanent magnet pole 23 to perform synchronous eccentric rotation. The outer positioning ring 25 drives the polishing disc 3 to rotate, and since the three evenly distributed planetary wheels 5 remain stationary, the polishing disc 3 and the base 8 and the permanent magnetic pole 23 move in opposite directions, thereby converting the static magnetic field into a dynamic magnetic field , the dynamic magnetic field will promote the recovery of the shape of the flexible micro-grinding head 33 and the self-sharpening of the abrasive material. When the main installation shaft 32 of the machine tool drives the workpiece 31 to rotate, and the direction is opposite to that of the polishing disc 3, it can realize constant grinding of the workpiece 31. Pressure homogenization for efficient ultra-smooth polishing.

In the present embodiment, the above-mentioned static magnetodynamic field magnetorheological polishing mechanism test device carries out the method for plane processing of the workpiece as follows. In the present embodiment, the workpiece 31 is a single crystal 6H-SiC substrate:

1) Install the device on a CNC milling machine, install the workpiece on the main shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 0.8mm, and configure the diamond abrasive concentration as 10%. When the magnetorheological fluid 30 with a particle size of 7 microns is placed above the polishing disc 3, the magnetorheological fluid 30 will quickly form a flexible micro-grinding head 33 along the direction of the magnetic field under the action of a magnetic field, and the shape of the micro-grinding head will be It is pressed down during the processing, but under the action of the static magnetic dynamic field test device, a dynamic magnetic field will be generated. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the renewal and self-sharpening of the abrasive. After rough polishing for 30 minutes, a flat single crystal 6H-SiC substrate with Ra of about 30nm was obtained;

2) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1mm, and configure the diamond abrasive concentration to be 8%. The magnetorheological fluid 30 with a diameter of 3.5 microns is placed on the polishing disc 3, and the magnetorheological fluid (30) will quickly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of the magnetic field, and the shape of the micro-grinding head will be It is pressed down during the processing, but under the action of the static magnetic dynamic field test device, a dynamic magnetic field will be generated. The dynamic magnetic field will promote the shape recovery of the micro-grinding head and the renewal and self-sharpening of the abrasive. Change to semi-finish polishing for 40 minutes to obtain a smooth single crystal 6H-SiC substrate with Ra of about 10nm (except for the central region);

3) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1.2mm, and configure the diamond abrasive concentration to be 6%. When the magnetorheological fluid 30 with a particle size of 1.5 microns is placed above the polishing disc 3, the magnetorheological fluid 30 will quickly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the micro-grinding head will be It is pressed down during the processing, but under the action of the static magnetic dynamic field test device, a dynamic magnetic field will be generated. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. After high-efficiency magnetorheological fine polishing 50 Minutes later, an ultra-smooth single crystal 6H-SiC substrate with Ra of about 2nm (except the central region) was obtained.

Example 2:

The structure of the utility model is the same as that of embodiment 1, the difference is that the permanent magnetic pole 23 is a cylindrical permanent magnet with a diameter of 20mm, the magnetic induction intensity of the end face is 2500GS, the eccentric distance of the eccentric sleeve 22 is 2mm, and the rotating speed of the workpiece and the permanent magnetic pole 23 They are 800rpm and 300rpm respectively, and the workpiece 31 is deflected left and right by 15mm from the center position along the X installation axis direction.

The utility model prepares the magnetorheological fluid 30 through the following method: adding silicon carbide abrasives with a concentration of 4 to 8% and a particle size of 1 to 5 microns in deionized water, and micron-level carbonyl iron powder with a concentration of 18%, the mass percentage 3% glycerin, 4% anti-rust agent, fully stirred and vibrated by ultrasonic wave for 15 minutes. When the magnetorheological fluid 30 enters the top of the annular polishing disc 3 , under the action of the magnetic field and gravity, the flexible micro-grinding head 33 will be rapidly formed along the direction of the magnetic induction line.

The above-mentioned static magnetic dynamic field magnetorheological polishing mechanism test device is used for the plane processing method of single crystal silicon wafers as follows:

1) Install the device on a CNC milling machine, install the workpiece 31 on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 0.9mm, and configure the silicon carbide abrasive concentration to be 8 %, the magnetorheological fluid 30 with a particle size of 5 microns is placed above the polishing disc 3, and the magnetorheological fluid 30 will rapidly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the micro-rheological head It will be pressed down during the processing, but a dynamic magnetic field will be generated under the action of the static magnetic dynamic field test device. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. High-efficiency magnetorheological rough polishing for 20 minutes to obtain a flat single crystal silicon wafer with Ra of about 25nm;

2) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1.1mm, and configure the silicon carbide abrasive concentration to 6% , the magnetorheological fluid 30 with a particle size of 3 microns is placed above the polishing disc 3, and the magnetorheological fluid 30 will rapidly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the flexible micro-grinding head It will be pressed down during the processing, but a dynamic magnetic field will be generated under the action of the static magnetic dynamic field test device. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. High-efficiency magnetorheological semi-finish polishing for 30 minutes to obtain a smooth single crystal silicon wafer with Ra of about 10nm on the entire workpiece surface;

3) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1.3mm, and configure the silicon carbide abrasive concentration to 4% , the magnetorheological fluid 30 with a particle size of 1 micron is placed above the polishing disc 3, and the magnetorheological fluid 30 will quickly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the flexible micro-grinding head It will be pressed down during the processing, but under the action of the static magnetic dynamic field test device, a dynamic magnetic field will be generated. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. After rheological polishing for 30 minutes, an ultra-smooth single crystal silicon wafer with an Ra of about 1 nm on the entire workpiece surface was obtained.

Example 3:

The structure of the utility model is the same as that of embodiment 1, the difference is that the permanent magnetic pole 23 is a cylindrical permanent magnet with a diameter of 15mm, the magnetic induction intensity of the end face is 2000GS, the eccentric distance of the eccentric sleeve 22 is 3mm, and the rotating speed of the workpiece and the permanent magnetic pole 23 1000rpm and 200rpm respectively, the workpiece 31 is processed along the line cutting track.

The utility model prepares the magnetorheological fluid 30 through the following method: adding alumina abrasives with a concentration of 2 to 6% and a particle size of 1.5 to 5 microns in deionized water, and micron-level carbonyl iron powder with a concentration of 20%, the mass percentage 4% glycerin, 5% anti-rust agent, fully stirred and vibrated by ultrasonic wave for 20 minutes. When the magnetorheological fluid 30 enters the top of the annular polishing disc 3 , under the action of the magnetic field and gravity, the flexible micro-grinding head 33 will be rapidly formed along the direction of the magnetic induction line.

The method for planar processing of the strontium carbonate ceramic substrate by the above-mentioned static magnetic dynamic field magnetorheological polishing mechanism test device is as follows:

1) Install the device on a CNC milling machine, install the workpiece 31 on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece to 1mm through the CNC milling machine, and configure the concentration of alumina abrasive to 6% , the magnetorheological fluid 30 with a particle size of 5 microns is placed above the polishing disc 3, and the magnetorheological fluid 30 will quickly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field), and the shape of the flexible micro-grinding head It will be pressed down during the processing, but a dynamic magnetic field will be generated under the action of the static magnetic dynamic field test device. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. After processing the strontium carbonate ceramic substrate Perform high-efficiency magnetorheological rough polishing for 30 minutes to obtain a flat strontium carbonate ceramic substrate with Ra of about 20nm;

2) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1.2 mm, and configure the alumina abrasive concentration to 4% , the magnetorheological fluid 30 with a particle size of 3 microns is placed above the polishing disc 3, and the magnetorheological fluid 30 will rapidly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the flexible micro-grinding head It will be pressed down during the processing, but a dynamic magnetic field will be generated under the action of the static magnetic dynamic field test device. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. High-efficiency magnetorheological semi-finish polishing for 20 minutes to obtain a smooth strontium carbonate ceramic substrate with Ra of about 10nm on the entire workpiece surface;

3) Install the device on a CNC milling machine, install the workpiece on the main installation shaft of the milling machine, adjust the distance between the upper surface of the polishing disc 3 and the lower surface of the workpiece through the CNC milling machine to 1.4mm, and configure the alumina abrasive concentration to 2% , the particle size is 1.5 micron magnetorheological fluid 30 above the polishing disc 3, the magnetorheological fluid 30 will rapidly form a flexible micro-grinding head 33 along the direction of the magnetic field line under the action of a magnetic field, and the shape of the flexible micro-grinding head It will be pressed down during the processing, but under the action of the static magnetic dynamic field test device, a dynamic magnetic field will be generated. The dynamic magnetic field will promote the recovery of the shape of the micro-grinding head and the self-sharpening of the abrasive. After rheological polishing for 30 minutes, an ultra-smooth strontium carbonate ceramic substrate with an Ra of about 1.5 nm on the entire workpiece surface was obtained.

Claims (10)

1. a magnetostatic dynamic field MRF mechanism experimental rig, is characterized in that comprising the flexible micro-bistrique generating means of magnetorheological abrasive material half set, the eccentric conversion equipment in magnetostatic dynamic field, polishing disk counter-rotating device, the flexible micro-bistrique generating means of magnetorheological abrasive material half set includes base (8), permanent-magnet pole (23), fixed cover (24), rotating disk (12), polishing disk (3), the eccentric conversion equipment in magnetostatic dynamic field includes pad (9), eccentric bushing (22), inner position ring (21), angular contact ball bearing (20), outer positioning ring (25), polishing disk counter-rotating device includes external gear (11), planetary gear (5), internal gear (16), support member (6), fixed disk (17), deep groove ball bearing (15), installation shaft (4), static element (18), base (8) clamping is on platen, rotating disk (12) is sleeved on the outside of base (8), fixed cover (24) is installed in the top of base (8), and rotating disk (12) and fixed cover (24) are connected with base (8), rotating disk (12) and fixed cover (24) keep synchronously carrying out axial-rotation with base (8), eccentric bushing (22) is sleeved on the endoporus set by fixed cover (24), and eccentric bushing (22) is connected with fixed cover (24), permanent-magnet pole (23) is arranged in eccentric bushing (22), and polishing disk (3) is installed in permanent-magnet pole (23) top, pad (9) is installed between base (8) and eccentric bushing (22), inner position ring (21) is sleeved on the outside of fixed cover (24), and be fixed together with fixed cover (24), angular contact ball bearing (20) is sleeved on the outside of inner position ring (21), outer positioning ring (25) is sleeved on the outside of angular contact ball bearing (20), and the motion of polishing disk (3) and permanent-magnet pole (23) adopts inner position ring (21) to be separated with the angular contact ball bearing (20) between outer positioning ring (25), external gear (11), three planetary gears (5) and internal gear (16) form planetary motion, support member (6) is installed in the top of rotating disk (12), and support member (6) is connected with rotating disk (12), internal gear (16) is installed in the top of support member (6), and internal gear (16) and support member (6) link together, installation shaft (4) is fixed on the endoporus of planetary gear (5) by deep groove ball bearing (15), external gear (11) is connected with outer positioning ring (25), fixed disk (17) is sleeved on the outside of outer positioning ring (25), and fixed disk (17) is installed in the top of installation shaft (4), fixed disk (17) and installation shaft (4) link together, fixed disk (17) and static element (18) are locked, static element (18) is fixed on lathe base, polishing disk (3) top needs to provide magnetic flow liquid (30).

2. magnetostatic dynamic field according to claim 1 MRF mechanism experimental rig, is characterized in that above-mentioned rotating disk (12) is fixed together by attachment screw (13) and support member (6); Rotating disk (12) and fixed cover (24) are linked together by bolt (7) and base (8).

3. magnetostatic dynamic field according to claim 1 MRF mechanism experimental rig, is characterized in that above-mentioned inner position ring (21) is installed together by screw thread (34) and fixed cover (24).

4. magnetostatic dynamic field according to claim 1 MRF mechanism experimental rig, together with it is characterized in that above-mentioned internal gear (16) to be installed in support member (6) by set bolt (14), external gear (11) is fixed together by lock-screw (26) and outer positioning ring (25).

5. magnetostatic dynamic field according to claim 1 MRF mechanism experimental rig, is characterized in that above-mentioned eccentric bushing (22) is connected with fixed cover (24) by flat key (10).

6. magnetostatic dynamic field according to claim 1 MRF mechanism experimental rig, is characterized in that above-mentioned fixed disk (17) is locked by lock-screw (19) and static element (18).

7. the magnetostatic dynamic field MRF mechanism experimental rig according to any one of claim 1 to 6, is characterized in that above-mentioned inner position ring (21) upper end has notch (35).

8. magnetostatic dynamic field according to claim 7 MRF mechanism experimental rig, is characterized in that above-mentioned inner position ring (21) is also provided with the step (29) for orientation angle contact ball bearing (20) inner ring.

9. magnetostatic dynamic field according to claim 7 MRF mechanism experimental rig, is characterized in that the shape of above-mentioned polishing disk (3) is spill.

10. magnetostatic dynamic field according to claim 7 MRF mechanism experimental rig, is characterized in that above-mentioned polishing disk (3) is fixed together by screw (1) and outer positioning ring (25).