CN106710847A - Planar transformer and balance-unbalance converter structure - Google Patents
Planar transformer and balance-unbalance converter structure Download PDFInfo
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- CN106710847A CN106710847A CN201510415515.2A CN201510415515A CN106710847A CN 106710847 A CN106710847 A CN 106710847A CN 201510415515 A CN201510415515 A CN 201510415515A CN 106710847 A CN106710847 A CN 106710847A
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- 229910052751 metal Inorganic materials 0.000 claims description 106
- 125000004122 cyclic group Chemical group 0.000 claims description 65
- 230000005540 biological transmission Effects 0.000 claims description 43
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- 230000004224 protection Effects 0.000 claims description 5
- 238000005303 weighing Methods 0.000 claims description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
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- 125000002619 bicyclic group Chemical group 0.000 description 2
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Abstract
The invention discloses a planar transformer structure and balance-unbalance converter structure. A planar transformer structure and balance-unbalance converter comprises a first planar coil, a second planar coil and a third planar coil, the first planar coil comprises a first annular structure, a second annular structure and a connecting portion, the first annular structure and the second annular structure are connected through the connecting portion, range of the second planar coil and that of the first annular structure are overlapped by a part at least, and range of the third planar coil and that of the second annular structure are overlapped by a part at least. The first planar coil and the second planar coil or the third planar coil form a transformer.
Description
Technical field
The present invention is on transformer, especially with respect to plane type transformer and balun
Structure.
Background technology
Integrated circuit for RF signal receiving terminal often needs to use transformer to adjust the resistance of signal
Anti- matching.The transformer of integrated circuit nothing more than the coil comprising plane formula, using the number of turns ratio of coil
And coupled relation reaches the effect of impedance matching.In addition to impedance matching, connect for RF signal
The integrated circuit of receiving end may also need by signal common mode (common mode) pattern with it is differential
(differential) changed between pattern.This kind of conversion is often changed using a kind of balancedunbalanced
Device (balanced-to-unbalanced transformer), or be balun (BALUN).Balance is not
Balanced to unbalanced transformer belongs to a kind of application of transformer, is also in integrated circuits to be made up of coil.Cause
This, whether how transformer or balun, arrange its coil, has coil
Good coupling effect, qualitative factor (quality factor) Q high and magnetic field is avoided to scatter
(radiation) with protect other components turn into important problem.
The content of the invention
In view of the deficiency of prior art, a purpose of the invention be provide a kind of plane type transformer and
The structure of balun, is scattered with improving qualitative factor Q and reducing magnetic field.
Disclosed herein a kind of plane type transformer structure, comprising：One first plane formula coil, bag
Containing one first cyclic structure, one second cyclic structure and a connecting portion, first cyclic structure and this
Bicyclic structures are connected by the connecting portion；One second plane formula coil, its scope and first ring
The scope of shape structure is overlapped at least partially；And one the 3rd plane formula coil, its scope with this
The scope of bicyclic structures is overlapped at least partially；Wherein the first plane formula coil is second flat with this
Face formula coil or the 3rd plane formula coil constitute a transformer.
The present invention separately discloses a kind of plane formula balun structure, comprising：One first is flat
Face formula coil, comprising one first cyclic structure, one second cyclic structure and a connecting portion, first ring
Shape structure and second cyclic structure are connected by the connecting portion；One second plane formula coil, its model
Enclose overlap at least partially with the scope of first cyclic structure, with one first contact and one second
Contact；And one the 3rd plane formula coil, the scope at least of its scope and second cyclic structure
Ground is divided to overlap, with one the 3rd contact and one the 4th contact；Wherein, first contact connects with the 3rd
Point is connected, and second contact is connected with the 4th contact.
The structure of plane type transformer of the invention and balun, compared to existing skill
Art, improves symmetry and qualitative factor Q, and inductance value is easily adjusted therefore resistance is more easily achieved
The demand of anti-matching.Furthermore, structure of the invention also reduces the scattering in magnetic field to protect other components.
Feature for the present invention, implementation and effect, hereby coordinate schema to make preferred embodiment detailed description
It is as follows.
Brief description of the drawings
Figure 1A to Fig. 1 D be according to one embodiment of the invention plane type transformer structure and its
Equivalent elements figure；
Fig. 2A and Fig. 2 B be according to another embodiment of the present invention plane type transformer structure with
Its equivalent elements figure；
Fig. 3 is the structure according to the plane type transformer of another embodiment of the present invention；
Fig. 4 is the structure according to the plane type transformer of another embodiment of the present invention；
Fig. 5 is the structure according to the plane type transformer of another embodiment of the present invention；
Fig. 6 is the structure according to the plane type transformer of another embodiment of the present invention；
Fig. 7 is the structure according to the balun of another embodiment of the present invention；
Fig. 8 is the structure according to the balun of another embodiment of the present invention；
Fig. 9 is the structure chart of an embodiment of the inductance value that the present invention increases plane formula coil；And
Figure 10 is cuing open for the semiconductor structure of correspondence transformer of the invention or balun
Face figure.
Specific embodiment
The technical terms of following description refers to the idiom of the art, such as this specification
Part term is illustrated or defined, the explanation system of the part term with the explanation of this specification or
Definition is defined.Knot of the disclosure of the invention comprising plane type transformer and balun
Structure, be embodied as it is possible under the premise of, the art tool usually intellectual can be according to this specification
Disclosure realize the present invention to select equivalent component, that is, implementation of the invention is not limited to
The embodiment chatted afterwards.By the structure institute of plane type transformer of the invention and balun
Comprising members it is independent for may be known tip assemblies, therefore do not influenceing the device invent fill
On the premise of dividing exposure and exploitativeness, below illustrate that for the details of known tip assemblies memorandum will be given.
Figure 1A to Fig. 1 D is referred to, it is according to the plane type transformer of one embodiment of the invention
Structure and its equivalent elements figure.Plane type transformer 100 shown in Figure 1A is by three plane formula coils
Composition.In order to understand the structure of illustrated planar formula transformer 100, its thin portion component is shown in Figure 1B
And Fig. 1 C.Figure 1B is a wherein plane formula coil 120, comprising cyclic structure 130, connecting portion 140
And cyclic structure 150.Connecting portion 140 connects cyclic structure 130 and cyclic structure 150.Ring-type knot
Structure 130 and each self-contained metal wire sections for surrounding into two circles of cyclic structure 150.Wherein different pattern
Metal wire sections represent different metal levels in semiconductor structure, and for example metal wire sections 132 are (with bar
Line is represented) and metal wire sections 134 (being represented with point-like) can be made in semiconductor structure respectively
Super thick metal (Ultra Thick Metal, UTM) layer and reroute layer (Re-Distribution Layer,
RDL), or conversely.The metal wire sections of different metal layer are with perpendicular to the semiconductor of the metal wire sections
Structure (being represented with black) is connected, for example attachment structure 136.Attachment structure 136 can be such as
It is guide hole (via) structure.Connecting portion 140 is a structure for cross-like (crossing), therefore
The big of cyclic structure 130 is flowed through with counterclockwise into the electric current of cyclic structure 130 by contact 138
After partial metal wire sections, cyclic structure 150 is entered by metal wire sections 142.Electric current is in ring-type knot
In structure 150 to flow through all metal wire sections clockwise after, then return to ring via metal wire sections 144
Shape structure 130, finally flows out plane formula coil 120 by contact 139.So design causes electric current
There is the different senses of current, therefore cyclic structure 130 and cyclic structure in two cyclic structures
150 magnetic fields for being generated can be mutually coupled, and magnetic field can be avoided to scatter everywhere.
Fig. 1 C display plane formulas coil 160 and plane formula coil 170.Plane formula coil 160 and flat
Each self-contained metal wire sections for surrounding into three circles of face formula coil 170.Likewise, the gold represented with grey
Category line segment (such as metal wire sections 166) and the metal wire sections (such as metal wire sections 168) represented with point-like
Different metal layer in semiconductor structure.In one embodiment, plane formula coil 160 with it is flat
The metal wire sections of grey make with the metal wire sections of striped in plane formula coil 120 in face formula coil 170
Same layer in semiconductor structure, may also be made in different layers in other embodiments.Plane formula
Coil 160 and one helical inductor of symmetrical expression of each self-forming of plane formula coil 170, and two electricity
The two ends of sense are respectively contact 162,164 and contact 172,174.
By the plane formula coil 120 of Figure 1B and the plane formula coil 160 and plane formula coil of Fig. 1 C
After 170 combine, just as shown in the plane type transformer 100 of Figure 1A.Plane formula coil 160 with it is flat
Face formula coil 120 is not interconnected, likewise, plane formula coil 170 is with plane formula coil 120 also
Do not interconnect.The scope of plane formula coil 160 is heavy with scope at least a portion of cyclic structure 130
It is folded, likewise, the scope of plane formula coil 170 is heavy with scope at least a portion of cyclic structure 150
It is folded.The plane type transformer 100 of Figure 1A can utilize the component of Fig. 1 D to represent.The generation of coil 125
Table plane formula coil 120, coil 165 represents plane formula coil 160, and coil 175 represents plane formula
Coil 170.The contact 152 of the central corresponding diagram 1A of contact 152 of coil 125.This three coils
Realize the function of transformer.More particularly, coil 125 can form a transformer with coil 165,
Coil 125 can form another transformer with coil 175.In various embodiments, this three coils
Balun is can act also as to use.Three contacts of coil 125 can be uneven as balance
The balance transmission end (balanced terminals) of weighing apparatus converter；And the contact 162 of coil 165 can be with
First it is connected to form the first contact with the contact 174 of coil 175, the contact 164 of coil 165 can be with
First it is connected to form the second contact with the contact 172 of coil 175, the first contact and the second contact can be with
As the uneven transmission end (unbalanced terminals) of balun.That is,
When application of the present invention for balun, above-mentioned coil 165 is in coil 175
Parallel relationship.The benefit of this kind of annexation is, when cyclic structure 130 and plane formula coil 160
Number of turns difference less, and cyclic structure 150 and plane formula coil 170 number of turns difference it is little when, can
With by by plane formula coil 160 it is in parallel with plane formula coil 170 come adjust plane formula coil 120 with
The ratio of the inductance value of plane formula coil 160 and plane formula coil 170, to adjust impedance matching.Separately
Outward, can be in any group of input/output terminal one or more electric capacity in parallel, also adjustable impedance matching.
Fig. 2A and Fig. 2 B are referred to, it is according to the plane type transformer of another embodiment of the present invention
Structure and its equivalent elements figure.Plane type transformer 200 is equally made up of three plane formula coils,
Respectively there is the plane formula coil 220 of contact 238 and contact 239, with contact 262 and contact
264 plane formula coil 260 and the plane formula coil 270 with contact 272 and contact 274.
Similar with plane formula coil 120, plane formula coil 220 is by two cyclic structures and a connecting portion institute
Composition, connecting portion connects two cyclic structures.Connecting portion is similarly the structure of cross-like, therefore electric current
Direction in two cyclic structures is different, contributes to the magnetic field for reducing plane formula coil 220 outwards to dissipate
Penetrate.Plane formula coil 260 and plane formula coil 270 are similarly symmetrical expression helical inductor.Plane formula
Coil 260 also includes center tap (central tap) 266, and plane formula coil 270 is also comprising center
Tap 276.
The plane type transformer 200 of Fig. 2A can utilize the component of Fig. 2 B to represent.The generation of coil 225
Table plane formula coil 220, coil 265 represents plane formula coil 260, and coil 275 represents plane formula
Coil 270.This three coils are the function of realizing transformer.More particularly, coil 225 and line
Circle 265 can form a transformer, and coil 225 can form another transformer with coil 275.In difference
Embodiment in, this three coils can act also as balun and use.The two of coil 225
Individual contact can be as the uneven transmission end of balun；And the contact of coil 265
262nd, 264 and 266 first can be connected with the contact 274,272 and 276 of coil 275 respectively.
Coil 265 turns into a coil in parallel with coil 275 after connection.Three of the coil in parallel connect
Point can be as the balance transmission end of balun.Likewise, by can by coils from parallel connection of coils
To adjust plane formula coil 220 with plane formula coil 260 and the ratio of the inductance value of plane formula coil 270
Example, further to adjust impedance matching.Additionally, the present embodiment also can be by plane formula coil 220
It is upper to set bridging metal wire sections to connect the cyclic structure in plane formula coil 220 (figure left side) respectively
Outer ring and inner ring, and another cyclic structure (figure right side) outer ring and inner ring, for example bridge gold
Category line segment 222 and bridging metal wire sections 224.With bridge metal wire sections connection Internal and external cycle after plane formula line
The inductance value of circle 220 will decline.That is, the present embodiment is entered by setting bridging metal wire sections
One successive step impedance matching.The two ends for bridging metal wire sections 222 or 224 connect plane formula coil respectively
The metal wire sections of 220 part, are connected by bridging metal wire sections 222 or bridging metal wire sections 224
Metal wire sections are substantially parallel to each other, and metal wire sections of the tundish containing other components.For example,
The metal wire sections being connected with bridging metal wire sections 222 two ends are the metal wire sections of plane formula coil 220,
And the metal wire sections of center section are the metal wire sections of plane formula coil 260.Plane formula coil 260
Metal wire sections of the metal wire sections not with bridging metal wire sections 222 and plane formula coil 220 are connected.
Note that and only explained as a example by bridging metal wire sections 222 and bridging metal wire sections 224 here, put down
Face formula coil 220 can be comprising bridging metal wire sections as shown in Figure 2 A or more.
Fig. 3 is referred to, it is the structure according to the plane type transformer of another embodiment of the present invention.
The structure of Fig. 3 is similar to Fig. 2A, and plane formula coil 320 is with two contacts, and plane formula coil
360 respectively have 3 contacts with plane formula coil 370.Therefore Fig. 3 structure equivalent elements figure with
Fig. 2 B are similar.When being applied to balun, plane formula coil 320 can equally be made
It is uneven transmission end, plane formula coil 360 and the in parallel of plane formula coil 370 is passed as balance
Defeated end.From unlike the embodiment of Fig. 2A, plane type transformer 300 does not bridge metal wire sections,
And (it is different from striped and metal level and the point-like gold belonging to grey metal line segment comprising third layer is made in
Metal level belonging to category line segment) metal wire sections, i.e. metal wire sections 322, metal wire sections 324 and gold
Category line segment 326.Additionally, in the embodiment of Fig. 2A, with three coils of end points (i.e. plane
Formula coil 260 and plane formula coil 270) outmost turns be located at the coils with two end points and (put down
Face formula coil 220) outmost turns within, but Fig. 3 A are another different implementation method.
Fig. 4 is referred to, it is the structure according to the plane type transformer of another embodiment of the present invention.
The plane formula coil 420 of plane type transformer 400, plane formula coil 460 and plane formula coil 470
Configuration it is similar to the embodiment of Fig. 3, but plane formula coil 420 without directly with its contact 438 and
Contact 439 is connected.Contact 438 and contact 439 are directly connected to connecting portion 440, then by connection
Portion 440 connects plane formula coil 420.Contact 438 and contact 439 are arranged at plane formula coil 420
Centre can improve the symmetry of plane formula coil 420, that is, two of plane formula coil 420
Cyclic structure is symmetrical axial symmetry with contact 438 and the online of contact 439.Connecting portion 440 is no longer
The structure of cross-like, but two Uncrossed metal wire sections.Electric current in two cyclic structures still with
Different direction flowings, so such plane formula coil 420 not only improves symmetry, and still has
The effect for avoiding magnetic field from outwards scattering.Learnt by experimental result, lifting symmetry helps raising plane formula
The qualitative factor Q of coil 420.
Fig. 5 is referred to, it is the structure according to the plane type transformer of another embodiment of the present invention.
The plane formula coil 520 of plane type transformer 500, plane formula coil 560 and plane formula coil 570
Configuration it is similar to the embodiment of Fig. 4, the contact 538 and contact 539 of plane formula coil 520 are same
The center of plane formula coil 520 is arranged on to lift the symmetry and its matter of plane formula coil 520
Amount factor Q.Contact 538 is directly connected to one of cyclic structure of plane formula coil 520, contact
539 another cyclic structure for being directly connected to plane formula coil 520, rather than by connecting portion 540
Connection.Two cyclic structures of the present embodiment midplane formula coil 520 equally have different electric current sides
To avoid magnetic field from outwards scattering.Embodiment compared to Fig. 4, electric current enters flat by any contact
After face formula coil 520, the whole of in two cyclic structures can be first flowed through, then via connecting portion
540 flow to another cyclic structure.The time difference of this electric current causes the cyclic structure for first having current flowing
Produced magnetic field can successfully with the magnetic coupling produced by another cyclic structure.By experimental result
Learn, the magnetic coupling effect of plane formula coil 520 improves and helps lifting plane formula coil 560 and put down
The qualitative factor Q of face formula coil 570.Therefore compared with the embodiment of Fig. 4, the embodiment of Fig. 5 is not
Symmetry is only improved, qualitative factor Q is also lifted.
Fig. 6 is referred to, it is the structure according to the plane type transformer of another embodiment of the present invention.
Plane type transformer 600 includes plane formula coil 620, plane formula coil 660 and plane formula coil 670.
The contact 662 and contact 664 of plane formula coil 660 form transmission port 669, and plane formula coil
670 contact 672 and contact 674 forms transmission port 679.679 points of transmission port 669 and transmission port
The direction of connecting portion 640 is not directed away from.Transmission port 669 is symmetrical with the online formation of transmission port 679
Axle A-A ', plane formula coil 660 or plane formula coil 670 are symmetrical according to this symmetry axis A-A '.This
The advantage of sample design is that plane formula coil 660 and plane formula coil 670 have more preferable symmetry.More
Specifically, plane formula coil 660 and plane formula coil 670 are near the part of connecting portion 640
Magnetic coupling effect is obvious.No matter this coupling effect is for plane formula coil 660 or to plane formula
All it is symmetrical (being symmetrical in symmetry axis A-A ') for coil 670.Preferably symmetry helps lifting
Its qualitative factor Q.During this is implemented, though the contact 638 of plane formula coil 620 and contact 639 are set
In in one of cyclic structure of plane formula coil 620, but can also be as shown in Fig. 4 or Fig. 5
Embodiment it is general, contact 638 and contact 639 are arranged at the centre position of plane formula coil 620.
Fig. 7 is referred to, it is the knot according to the balun of another embodiment of the present invention
Structure.Balun 700 includes plane formula coil 720, plane formula coil 760 and plane
Formula coil 770.The transmission port 769 (being made up of two contact) of plane formula coil 760 and flat
The transmission port 779 (being made up of two contact) of face formula coil 770 is respectively facing connecting portion 740
(including metal wire sections 740-1 and metal wire sections 740-2).Similarly, transmission port 769 and transmission port
779 online formation symmetry axis (not shown), whether plane formula coil 760 or plane formula coil
770 are all symmetrical in this symmetry axis.One of contact of plane formula coil 760 and plane formula coil 770
One of contact be connected after formed contact 782, another contact of plane formula coil 760 with
Another contact of plane formula coil 770 forms contact 784 after being connected.In addition, plane formula coil
760 center tap 766 can also be connected with the center tap 776 of plane formula coil 770.Namely
Say under such setting, plane formula coil 760 is in parallel with the self-assembling formation of plane formula coil 770, makes
Obtaining plane formula coil 720 turns into the uneven transmission end of balun 700, plane formula line
The balance transmission end as balun 700 in parallel with plane formula coil 770 of circle 760.
Fig. 8 is referred to, it is the knot according to the balun of another embodiment of the present invention
Structure.Balun 800 includes plane formula coil 820, plane formula coil 860 and plane
Formula coil 870.The transmission port 869 (being made up of two contact) of plane formula coil 860 and flat
The transmission port 879 (being made up of two contact) of face formula coil 870 is respectively facing plane formula coil
820 connecting portion.From unlike the embodiment of Fig. 7, this connecting portion is a structure for cross-like.
The online formation symmetry axis (not shown) of transmission port 869 and transmission port 879, whether plane formula line
Circle 860 or plane formula coil 870 are all symmetrical in this symmetry axis.One of them of plane formula coil 860
Contact forms contact 882, plane formula line after being connected with one of contact of plane formula coil 870
Another contact of circle 860 forms contact after being connected with another contact of plane formula coil 870
884.In addition, the center tap 866 of plane formula coil 860 also can with plane formula coil 870 in
Centre tap 876 is connected.That is under such arrangement, plane formula coil 860 and plane formula line
Enclose 870 self-assembling formations in parallel so that plane formula coil 820 turns into balun 800
Uneven transmission end, plane formula coil 860 is in parallel with plane formula coil 870 to turn into balancedunbalanced
The balance transmission end of converter 800.
Whether transformer or balun, when the electricity of adjustment plane formula coil in need
When inductance value is come the demand for reaching impedance matching, can by by the metal wire sections of same plane formula coil simultaneously
Row, to increase the plane formula by the mutual inductance (mutual inductance) between metal wire sections is improved
The inductance value of coil.Fig. 9 is referred to, it is a reality of the inductance value that the present invention increases plane formula coil
The structure chart that Shi Fang shows.Fig. 9 shows two partial structurtes of plane formula coil, this two plane formula lines
Circle has least partially overlapped scope.It is flat that metal wire sections 910 and metal wire sections 940 belong to wherein one
Face formula coil, metal wire sections 920 and metal wire sections 930 belong to another plane formula coil.Metal wire sections
920 and the arranged adjacent of metal wire sections 930, metal wire sections of the centre not comprising other plane formula coils,
Therefore metal wire sections 920 have good mutual inductance effect with metal wire sections 930, help and are lifted belonging to it
Plane formula coil inductance value.Additionally, one end connection metal wire sections 910 of bridging metal wire sections 950
(by attachment structure 952), the other end connects metal wire sections 940 (by attachment structure 954), its
The metal wire sections of the middle plane formula coil coupled across non-category, that is, metal wire sections 920 with
Metal wire sections 930 are not connected with metal wire sections 910 or metal wire sections 940.By bridging metal wire
The connection of section 950, the inductance of the plane formula coil belonging to metal wire sections 910 and metal wire sections 940
Value can be reduced.By the design of Fig. 9, two inductance values of plane formula coil can be further improved
Ratio, thereby adjusts impedance matching.
Figure 10 is referred to, it is the semiconductor of correspondence transformer of the invention or balun
The profile of structure.It is oxide layer 1020 on substrate 1010.The tundish of oxide layer 1020 contains pattern
Ground protection layer (pattern-ground shielding) 1022 and metal level 1024.Oxide layer 1020
On be another metal level 1030.Metal level 1024 is, for example, the super thick metal level in manufacture of semiconductor,
Metal level 1030 is, for example, to reroute layer.In foregoing embodiment, with the gold that grey and striped are represented
Category line segment can be made in same metal level, and the metal wire sections represented with point-like (include bridging metal wire
Section) another metal level can be made in.Namely three most metal wire sections of plane formula coil are all
It is made in same metal level.In other embodiments, at least one of three plane formula coils
Different metal levels can be made in.Even if but by the plane formula coil of helical inductor and with two
The plane formula coil of cyclic structure is made in different metal levels, still substantially has between the two at least
The scope that a part is overlapped.Pattern ground protection layer 1022 can avoid plane formula coil and substrate
Substrate loss, substrate loss are produced between 1010 can decline the qualitative factor Q of plane formula coil.
The attachment structure of black portions in attachment structure 1040 i.e. 1~Fig. 9 of representative graph, such as attachment structure 136,
Attachment structure 952,954.Even if note that three plane formula coils be distributed in metal level 1024 and
Metal level 1030, the present invention still can using other the metal level (not shown) in oxide layer 1020 come
Make bridging metal wire sections.
Although by taking quadrangle as an example, also having can for the above embodiments midplane formula coil and cyclic structure
Can be other polygons or circle.Additionally, the number of turns of plane formula coil is also not only restricted to above-mentioned reality
Apply example.Before take off icon, the shape of component, size and ratio etc. are only to illustrate, and are to supply this technology
Field tool usually intellectual understands the present invention and is used, and is not used to the limitation present invention.In addition, in implementation
Under the premise of possible, the art personage can disclosure under this invention and the demand of itself choosing
Implement to selecting property the part or all of technical characteristic of any embodiment, or optionally implement a plurality of
The combination of the part or all of technical characteristic of embodiment, thereby increases the elasticity when present invention is implemented.
Although embodiments of the invention as described above, but those embodiments not be used for limit this hair
Bright, the art tool usually intellectual can be according to the content expressed or imply of the invention to this hair
Bright technical characteristic imposes change, and the patent that all this kind change may belong to sought by the present invention is protected
Shield category, in other words, scope of patent protection of the invention must regard the claim institute of this specification
The person of defining is defined.
Symbol description
100th, 200,300,400,500,600 plane type transformer
120、160、170、220、260、270、320、360、370、420、460、470、
520th, 560,570,620,660,670,720,760,770,820,860,870 plane
Formula coil
125th, 165,175,225,265,275 coil
130th, 150 cyclic structure
132、134、142、144、166、168、322、324、326、910、920、930、
940 metal wire sections
136th, 952,954,1040 attachment structure
138、139、152、162、164、172、174、238、239、262、264、272、
274、438、439、538、539、638、639、662、664、672、674、782、784、
882nd, 884 contact
140th, 440,540,640,740 connecting portion
222nd, 224,950 bridging metal wire sections
266th, 276,766,776,866,876 center tap
669th, 679,769,779,869,879 transmission port
700th, 800 balun
1010 substrates
1020 oxide layers
1022 pattern ground protections layer
1024th, 1030 metal level
Claims (24)
1. a kind of plane type transformer structure, comprising：
One first plane formula coil, comprising one first cyclic structure, one second cyclic structure and
One connecting portion, first cyclic structure and second cyclic structure are connected by the connecting portion；
The scope at least one of one second plane formula coil, its scope and first cyclic structure
Ground is divided to overlap；And
The scope at least one of one the 3rd plane formula coil, its scope and second cyclic structure
Ground is divided to overlap；
Wherein, the first plane formula coil and the second plane formula coil or the 3rd plane formula
Coil constitutes a transformer.
2. plane type transformer structure according to claim 1, wherein, the first plane formula line
The outmost turns of circle are located at outside the second plane formula coil or the 3rd plane formula coil.
3. plane type transformer structure according to claim 1, wherein, the first plane formula line
The outmost turns of circle are located within the second plane formula coil or the 3rd plane formula coil.
4. plane type transformer structure according to claim 1, wherein, the first plane formula line
Circle has one first contact and one second contact, and first contact and second contact directly connect
Connect the connecting portion.
5. plane type transformer structure according to claim 1, wherein, the first plane formula line
Circle has one first contact and one second contact, and first contact and second contact are located at should
The center section of the first plane formula coil, first contact is directly connected to first cyclic structure,
Second contact is directly connected to second cyclic structure.
6. plane type transformer structure according to claim 1, wherein, the second plane formula line
Circle has one first contact and one second contact, and first contact and second contact constitute one
First transmission port, the 3rd plane formula coil has one the 3rd contact and one the 4th contact, should
3rd contact and the 4th contact constitute one second transmission port, the second plane formula coil and should
3rd plane formula coil is each with the online for symmetrical of first transmission port and second transmission port
Axial symmetry.
7. plane type transformer structure according to claim 6, wherein, first transmission port and
Second transmission port is directed away from the direction of the connecting portion.
8. plane type transformer structure according to claim 6, wherein, first transmission port and
Second transmission port is towards the connecting portion.
9. plane type transformer structure according to claim 1, wherein, the second plane formula line
Circle and the 3rd plane formula coil are generally aligned in the same plane with the first plane formula coil.
10. plane type transformer structure according to claim 1, wherein, the second plane formula line
At least one of circle and the 3rd plane formula coil are located at different from the first plane formula coil
Plane.
11. plane type transformer structures according to claim 1, also include：
One bridging metal wire sections, its two ends connection belongs to first cyclic structure, second ring
One metal of one in shape structure, the second plane formula coil and the 3rd plane formula coil
Line segment, intermediate portion is across another metal wire sections not being connected with the metal wire sections.
12. plane type transformer structures according to claim 1, wherein, first cyclic structure,
One in second cyclic structure, the second plane formula coil and the 3rd plane formula coil
Metal wire sections a part of arranged adjacent, and do not wrapped between the metal wire sections of the arranged adjacent
Containing other metal wire sections.
13. plane type transformer structures according to claim 1, also include：
One substrate；And
One pattern ground protection layer, positioned at the substrate and the first plane formula coil, this second
Between plane formula coil and the 3rd plane formula coil.
14. plane type transformer structures according to claim 1, wherein, into first ring-type
The electric current of structure just leaves first ring after flowing through all metal wire sections of first cyclic structure
Shape structure.
A kind of 15. plane formula balun structures, comprising：
One first plane formula coil, comprising one first cyclic structure, one second cyclic structure and
One connecting portion, first cyclic structure and second cyclic structure are connected by the connecting portion；
The scope at least one of one second plane formula coil, its scope and first cyclic structure
Ground is divided to overlap, and with one first contact and one second contact；And
The scope at least one of one the 3rd plane formula coil, its scope and second cyclic structure
Ground is divided to overlap, and with one the 3rd contact and one the 4th contact；
Wherein, first contact is connected with the 3rd contact, second contact and the 4th
Contact is connected.
16. plane formula balun structures according to claim 15, wherein, this
One plane formula coil has one the 5th contact, one the 6th contact and one the 7th contact, the balance
The uneven transmission end of the one of imbalance converter structure includes first contact after being connected
With the 3rd contact and second contact and the 4th contact after being connected, the balance is not
One balance transmission end of balanced to unbalanced transformer structure is comprising the 5th contact, the 6th contact and is somebody's turn to do
7th contact.
17. plane formula balun structures according to claim 15, wherein, this
Two plane formula coils also include one the 5th contact, and the 3rd plane formula coil also includes one the 6th
Contact, the 5th contact is connected with the 6th contact, and the first plane formula coil has one
7th contact and one the 8th contact, a uneven transmission of the balun structure
End includes the 7th contact and the 8th contact, and the one of the balun structure is flat
Weighing apparatus transmission end includes first contact and the 3rd contact after being connected, be connected after this
Second contact and the 4th contact and the 5th contact and the 6th contact after being connected.
18. plane formula balun structures according to claim 15, wherein, this
One plane formula coil has one the 5th contact and one the 6th contact, the 5th contact and the 6th
Contact is directly connected to the connecting portion.
19. plane formula balun structures according to claim 15, wherein, this
One plane formula coil has one the 5th contact and one the 6th contact, the 5th contact and the 6th
Contact is located at the center section of the first plane formula coil, the 5th contact be directly connected to this
One cyclic structure, the 6th contact is directly connected to second cyclic structure.
20. plane formula balun structures according to claim 15, wherein, this
One contact and second contact constitute one first transmission port of the second plane formula coil, and this
Three contacts and the 4th contact constitute one second transmission port of the 3rd plane formula coil, and this
Two plane formula coils and the 3rd plane formula coil are each with first transmission port and second biography
The online of defeated port is symmetrical axial symmetry.
21. plane formula balun structures according to claim 20, wherein, this
One transmission port and second transmission port are directed away from the direction of the connecting portion.
22. plane formula balun structures according to claim 20, wherein, this
One transmission port and second transmission port are towards the connecting portion.
23. plane formula balun structures according to claim 15, wherein, enter
The electric current of first cyclic structure flow through after all metal wire sections of first cyclic structure just from
Open first cyclic structure.
24. plane formula balun structures according to claim 15, also include：
One bridging metal wire sections, its two ends connection belongs to first cyclic structure, second ring
One metal of one in shape structure, the second plane formula coil and the 3rd plane formula coil
Line segment, intermediate portion is across another metal wire sections not being connected with the metal wire sections.
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| CN201510415515.2A CN106710847B (en) | 2015-07-15 | 2015-07-15 | Plane type transformer and balun structure |
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