CN106679570A - OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device - Google Patents
OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device Download PDFInfo
- Publication number
- CN106679570A CN106679570A CN201710100143.3A CN201710100143A CN106679570A CN 106679570 A CN106679570 A CN 106679570A CN 201710100143 A CN201710100143 A CN 201710100143A CN 106679570 A CN106679570 A CN 106679570A
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- China
- Prior art keywords
- control
- air
- axis
- full
- automatic coordinate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 title abstract description 15
- 239000000428 dust Substances 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 31
- 239000011521 glass Substances 0.000 claims description 8
- 230000004224 protection Effects 0.000 claims description 7
- 238000013016 damping Methods 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000000116 mitigating effect Effects 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000035939 shock Effects 0.000 abstract 2
- 239000006096 absorbing agent Substances 0.000 abstract 1
- 238000007605 air drying Methods 0.000 abstract 1
- 230000007774 longterm Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention discloses an OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device, comprising the following components: a device body used to measure the size of a product; an air drying machine to control the air temperature and air humidity of the supply device and to purify the air; a control box to collect the various electric parts and control parts and an illuminating device; a control console serving as the control part of the device and consisting of a PC body, a control panel, a control box and a touch display screen; and a desktop controller to control the X-axial, Y-axial and Z-axial movement of the device body. The ultra-precision full-automatic coordinate measurement device of the invention has the following advantages: with a size identical to an existing device, the detection scope of this device is enlarged to 2200*2500; with ultra-precision moving precision and reproducibility, the device achieves the heat-free and wear long-term stability; through the lens unit for high-speed focus, and through the image processing functions, the influence of dust and other external factors on the measurement error can be reduced; equipped with air shock absorbers, the external vibration and shock could be absorbed and the measurement accuracy is improved; through the settings of the manually measured measurement position, light volume adjustment, image processing, automatic high-precision measurement can be achieved.
Description
Technical field
The present invention relates to detection technique field, more particularly to a kind of OLED planes display line sparetime university size ultraprecise is full-automatic
Coordinate measure equipment.
Background technology
E measurement technology be one there is itself professional system, to cover various subjects, theoretical property and practicalness all very strong
Front line science.And know the ABC in terms of e measurement technology, then it is to grasp measurement technical ability, complete independently is to engineering goods geometry
The basis of parameter measurement.
There is following drawback in the full-automatic coordinate measure equipment of existing OLED planes display line sparetime university size ultraprecise：
1）Measuring speed is slow., in machinery, electrically, optics and image processing algorithm aspect have innovation, improve measurement for we
Speed.
2）Human-computer interaction is poor, and we show industry to the full-automatic coordinate amount of large scale ultraprecise according to emerging OLED planes
The demand of measurement equipment, has carried out software and human-computer interaction is easily innovated, make equipment preferably for OLED producers receive and
Operation.
3）Stability is poor.We set according to the full-automatic coordinate measure of existing OLED planes display line sparetime university size ultraprecise
The problem of standby stability difference, mechanically and electrically and software aspects are innovated.
The content of the invention
In order to overcome drawbacks described above, the invention provides a kind of OLED planes display line sparetime university size ultraprecise is automatically sat
Scalar measurement equipment.
The technical scheme that adopted to solve its technical problem of the present invention is：A kind of OLED planes display line sparetime university size
The full-automatic coordinate measure equipment of ultraprecise, it includes consisting of part：
Device body, for product size detection；
Dried-air drier, controls the air themperature and humidity of feedway, and purify air；
Control chamber, receives various electric parts and control part, and illuminator；
Control station, the control section of equipment is made up of PC bodies, control panel, control box and touch display screen；
Desktop control, the X, Y, Z axis motion of control device body；
Described device body is driven by substrate stage, lens unit, X-axis driver element, X-axis air slide block, Y-axis driver element, Y-axis
Movable slider is constituted, and the substrate stage is arranged in frame, and its top arranges lens unit, and the lens unit is driven by X-axis
Moving cell, X-axis air slide block, Y-axis driver element, Y-axis drive slide block that the essence of X and Y direction is realized above substrate stage
Level puts mobile adjustment.
As a further improvement on the present invention, the substrate stage is spliced using the tiling of some glass substrates, and is led to
Cross fixed screw to be fixed in frame, the air line for inhaling vacuum is mounted with substrate stage and glass substrate is fixed
Spray suction inlet.
As a further improvement on the present invention, the bottom of the substrate stage is provided with for mitigating exterior vibration to substrate
The air damping platform that table top affects.
As a further improvement on the present invention, described lens unit by high power camera lens, in times camera lens, low power lens, big
View lens, review camera lenses and illumination camera lens are arranged in the driving structure of Z axis after combining successively.
As a further improvement on the present invention, unit protection dust cover, unit protection are provided with the outside of described device body
Temperature sensor and pre-filtrating equipment are set in dust cover.
The invention has the beneficial effects as follows：The full-automatic coordinate measure equipment of ultraprecise of the present invention has advantages below：
1）With with conventional device identical size, but detection range is extended to 2200*2500mm；
2）With ultraprecise kinematic accuracy and repeatability, realize without heating and the long-time stability worn and torn；
3）High speed focusing is carried out by lens unit, and can reduce what the extraneous factors such as dust were caused by image processing function
Determine mistake；
4）Air damping platform is carried, the vibration and impact outside absorption improves measurement accuracy；
5）Manually determine locate, light quantity adjustment, the setting of image procossing, realize that the high accuracy that carries out automatically is surveyed
Amount.
Description of the drawings
Fig. 1 is overall structure diagram of the present invention；
Fig. 2 is apparatus of the present invention body construction schematic diagram；
Fig. 3 is substrate stage structural representation of the present invention；
Fig. 4 is the external structure schematic diagram of apparatus of the present invention body；
Indicate in figure：1- device bodies；2- dried-air driers；3- control chambers；4- control stations；5- desktop controls；6- protections are anti-
Dust hood；7- temperature sensors；8- pre-filtrating equipments；11- substrate stages；12- lens units；13- X-axis driver elements；14- X
Axle air slide block；15- Y-axis driver elements；16- Y-axis drives slide block；17- frames；18- air damping platforms；21- glass substrates；
22- fixed screws；23- air lines；24- sprays suction inlet；25- ejector pin mechanisms.
Specific embodiment
In order to deepen the understanding of the present invention, below in conjunction with embodiment and accompanying drawing, the invention will be further described, should
Embodiment is only used for the explanation present invention, does not constitute limiting the scope of the present invention.
Fig. 1-4 shows a kind of full-automatic coordinate measure equipment of OLED planes display line sparetime university size ultraprecise of the invention
A kind of embodiment, it includes consisting of part：
Device body 1, for product size detection；
Dried-air drier 2, controls the air themperature and humidity of feedway, and purify air；
Control chamber 3, receives various electric parts and control part, and illuminator；
Control station 4, the control section of equipment is made up of PC bodies, control panel, control box and touch display screen；
Desktop control 5, the X, Y, Z axis motion of control device body；
Described device body is driven single by substrate stage 11, lens unit 12, X-axis driver element 13, X-axis air slide block 14, Y-axis
Unit 15, Y-axis drives slide block 16 to constitute, and the substrate stage 11 is arranged in frame 17, and its top arranges lens unit 12, described
Lens unit 12 drives slide block 16 flat in substrate by X-axis driver element 13, X-axis air slide block 14, Y-axis driver element 15, Y-axis
Realize the elaborate position movement adjustment of X and Y direction in the top of platform 11.
The substrate stage 11 is spliced using the tiling of some glass substrates 21, and is fixed on machine by fixed screw 22
On frame 17, the spray suction inlet 24 of the air line 23 and fixed glass substrate for inhaling vacuum is mounted with substrate stage 11,
For adsorbing glass substrate and fixing, and it is mounted with for the ejector pin mechanism 25 of the vertical lift of control base board platform 11.
The bottom of the substrate stage 11 is provided with for mitigating the air damping platform that exterior vibration rings to Substrate table face
18。
Described lens unit 12 by high power camera lens, in times camera lens, low power lens, big view lens, rview camera lenses and
Illumination camera lens is arranged in the driving structure of Z axis after combining successively.
The outside of described device body 1 is provided with unit protection dust cover 6, unit protection dust cover 6 and arranges temperature sensing
Device 7 and pre-filtrating equipment 8.
Claims (5)
1. the full-automatic coordinate measure equipment of a kind of OLED planes display line sparetime university size ultraprecise, it is characterised in that：It include with
Lower ingredient：
Device body (1), for product size detection；
Dried-air drier (2), controls the air themperature and humidity of feedway, and purify air；
Control chamber (3), receives various electric parts and control part, and illuminator；
Control station (4), the control section of equipment is made up of PC bodies, control panel, control box and touch display screen；
Desktop control (5), the X, Y, Z axis motion of control device body；
Described device body is by substrate stage (11), lens unit (12), X-axis driver element (13), X-axis air slide block (14), Y
Axle driver element (15), Y-axis drive slide block (16) composition, and in frame (17), its top sets the substrate stage (11)
Lens unit (12) is put, the lens unit (12) drives single by X-axis driver element (13), X-axis air slide block (14), Y-axis
First (15), Y-axis drive slide block (16) that the elaborate position movement adjustment of X and Y direction is realized above substrate stage (11).
2. the full-automatic coordinate measure equipment of OLED planes display line sparetime university according to claim 1 size ultraprecise, it is special
Levy and be：The substrate stage (11) is spliced using some glass substrates (21) tiling, and solid by fixed screw (22)
It is scheduled in frame (17), the air line (23) for inhaling vacuum is mounted with substrate stage (11) and glass substrate is fixed
Spray suction inlet (24), and be mounted with for the ejector pin mechanism (25) of control base board platform (11) vertical lift.
3. the full-automatic coordinate measure equipment of OLED planes display line sparetime university according to claim 2 size ultraprecise, it is special
Levy and be：The bottom of the substrate stage (11) is provided with for mitigating the air damping platform that exterior vibration rings to Substrate table face
(18)。
4. the full-automatic coordinate measure equipment of OLED planes display line sparetime university according to claim 1 size ultraprecise, it is special
Levy and be：Described lens unit (12) by high power camera lens, in times camera lens, low power lens, big view lens, rview camera lenses with
And illumination camera lens combine successively after be arranged on Z axis driving structure on.
5. the full-automatic coordinate measure equipment of OLED planes display line sparetime university according to claim 1 size ultraprecise, it is special
Levy and be：It is provided with the outside of described device body (1) in unit protection dust cover (6), unit protection dust cover (6) and temperature is set
Sensor (7) and pre-filtrating equipment (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100143.3A CN106679570A (en) | 2017-02-23 | 2017-02-23 | OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710100143.3A CN106679570A (en) | 2017-02-23 | 2017-02-23 | OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106679570A true CN106679570A (en) | 2017-05-17 |
Family
ID=58862376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710100143.3A Pending CN106679570A (en) | 2017-02-23 | 2017-02-23 | OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106679570A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1924513A (en) * | 2005-08-31 | 2007-03-07 | De&T株式会社 | Microcosmic checking device for glass panel |
| CN101192361A (en) * | 2006-11-21 | 2008-06-04 | 胜华科技股份有限公司 | High-positioning-precision image detection device and method applied to flat display panel |
| CN101561247A (en) * | 2008-04-18 | 2009-10-21 | 东捷科技股份有限公司 | Panel defect positioning mechanism |
| CN103292709A (en) * | 2013-05-24 | 2013-09-11 | 深圳市华星光电技术有限公司 | Method for routinely testing and automatically correcting length measuring machine |
| CN103907017A (en) * | 2011-11-02 | 2014-07-02 | 株式会社岛津制作所 | Liquid crystal array inspection device, and method for acquiring images captured by liquid crystal array inspection device |
| CN104677314A (en) * | 2015-03-02 | 2015-06-03 | 合肥京东方光电科技有限公司 | Device and method for detecting surface flatness of display panel |
| CN206583406U (en) * | 2017-02-23 | 2017-10-24 | 苏州坤镥光电科技有限公司 | The full-automatic coordinate measure equipment of OLED plane display lines sparetime university size ultraprecise |
-
2017
- 2017-02-23 CN CN201710100143.3A patent/CN106679570A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1924513A (en) * | 2005-08-31 | 2007-03-07 | De&T株式会社 | Microcosmic checking device for glass panel |
| CN101192361A (en) * | 2006-11-21 | 2008-06-04 | 胜华科技股份有限公司 | High-positioning-precision image detection device and method applied to flat display panel |
| CN101561247A (en) * | 2008-04-18 | 2009-10-21 | 东捷科技股份有限公司 | Panel defect positioning mechanism |
| CN103907017A (en) * | 2011-11-02 | 2014-07-02 | 株式会社岛津制作所 | Liquid crystal array inspection device, and method for acquiring images captured by liquid crystal array inspection device |
| CN103292709A (en) * | 2013-05-24 | 2013-09-11 | 深圳市华星光电技术有限公司 | Method for routinely testing and automatically correcting length measuring machine |
| CN104677314A (en) * | 2015-03-02 | 2015-06-03 | 合肥京东方光电科技有限公司 | Device and method for detecting surface flatness of display panel |
| CN206583406U (en) * | 2017-02-23 | 2017-10-24 | 苏州坤镥光电科技有限公司 | The full-automatic coordinate measure equipment of OLED plane display lines sparetime university size ultraprecise |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170517 |
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| WD01 | Invention patent application deemed withdrawn after publication |