CN101192361A - High-positioning-precision image detection device and method applied to flat display panel - Google Patents

Abstract

The invention relates to a high positioning precision image detection device and a method thereof applied to a flat display panel, which is mainly characterized in that a plurality of positioning marks and a panel to be detected are arranged on a detection platform of the image detection device, wherein a group of positioning marks in pairs virtually forms a straight line which is overlapped with the panel to be detected, when the plurality of images of the panel to be detected arranged on the detection platform are captured, the images comprise positioning mark images, thus, the group of positioning marks in pairs can be used as a dividing line of an adjacent image overlapping area, when the image of the complete panel to be detected is recombined, a repeated area in the adjacent images can be accurately deleted, and the defect analysis carried out later can not have the problem of repeated analysis or incapability of detection.

Description

High positioning precision image detection device and method applied to flat display panel

technical field

The invention relates to a display detection device, especially an image detection device with high precision and high efficiency, which is applied to detect process defects of flat display panels.

Background technique

Since the structure formed in each process of semiconductor products is quite small (about a few hundred microns in terms of a single wire diameter), it is impossible to inspect its defects with human eyes, and it is necessary to confirm whether different process steps are correct during the process. There are defects, so the current panel manufacturers all have built-in digital image detection devices, as shown in Figure 5, the digital image detection device (50) includes:

A test platform (51) is for the panel to be tested (60) to be placed on it, wherein the panel to be tested is composed of a plurality of panel units;

Two shaft driving devices (52) are arranged on the side of the test platform (51) to drive the test platform (51) to move horizontally;

A control host (53) is electrically connected to the shaft driving device (52) to control the displacement and direction of movement of the shaft driving device (52);

A video camera (not shown in the figure) is located above the test platform (51) and is electrically connected to the control host (53). The control host (53) controls its shooting action and receives/stores its shooting images.

The above-mentioned shaft driving device (52) is a linear linear moving device mainly composed of a servo motor (521). The rotational speed of the servo motor (521) is controlled by the control host (53) to adjust the displacement of the test platform (51). In this way, the control host (53) automatically controls the test platform (51) to move with an equal amount of displacement for the camera to capture images of different areas of the flat display panel, as shown in Figure 6A, and then recombine a corresponding to the actual The image of the panel to be tested, as shown in FIG. 6B , is then analyzed for defect comparison to achieve the function of automatic detection.

However, the above-mentioned digital image detection device has the problem of inaccurate image detection, that is, when the control host controls the linear motion device composed of servo motors, the accumulated displacement error may be as high as 1000 microns, but the control host performs image calculations. When reorganizing the program, only the displacement driven by the shaft drive device will be adjusted according to the control, as the basis for reorganizing two adjacent areas. Due to the relationship between accumulated errors, there will be excessively overlapping areas, or areas that do not completely overlap, resulting in The final reconstructed image is inconsistent with the actual panel, as shown in Figure 6B. In this way, assuming that the defect size allowed for detection is about 200 microns, there will be accuracy deviation when the control host performs defect analysis on the reconstructed image As a result, defects will be repeatedly analyzed or cannot be detected, which will affect the subsequent manufacturing process and yield. Therefore, the current detection platform that uses a linear motion device with a servo motor is still not optimal and needs to be further improved.

Contents of the invention

The main purpose of the present invention is to provide an image detection device applied to a flat display panel, which has the functions of high alignment accuracy and high efficiency.

The main technical means used to achieve the above purpose is to make the image detection device applied to the flat display panel also include a detection platform, a shaft drive device, a control host and a camera; wherein the detection platform is marked and positioned The positioning mark of the point allows the control host to accurately divide the overlapping area of adjacent images through the imaginary straight line formed by two sets of positioning marks when the control host obtains the images of each area through the camera, and combines each image; thus The control host of the image detection device of the present invention obtains a complete image corresponding to the panel to be tested before the defect analysis can be performed, so that the accuracy and detection rate of the defect analysis results can be effectively improved.

The panel to be tested on the test platform of the image detection device of the present invention can also be provided with a positioning mark on it, which also allows the control host to obtain the image of the positioning mark through the camera, and then used to judge the defect detection of the flat display panel.

Description of drawings

Figure 1: It is a schematic top view of the first preferred embodiment of the present invention, but does not include a camera.

Figure 2: is a side view of Figure 1.

Fig. 3: is a schematic top view of the second preferred embodiment of the present invention, but does not include a camera.

4A to C are schematic diagrams of image segmentation and combination during image processing in the second preferred embodiment.

FIG. 5 is a schematic top view of an existing image detection device.

6A to B: are schematic diagrams of image combination during image processing in FIG. 5 .

Explanation of main component symbols

(10) Image detection device (10a) Image detection device

(11) Test platform (12) Shaft drive device

(121) Servo motor (13) Control host

(14) Camera (20) Panel to be tested

(30) Positioning mark (50) Image detection device

(51) Test platform (52) Shaft drive device

(521) Servo motor (53) Control host

(60) Panel to be tested

(61a)～(61e) overlapping area

Detailed ways

First please refer to Fig. 1 and Fig. 2, which is the first preferred embodiment of the image detection device (10) of the present invention, which includes:

a test platform (11), on which the panel to be tested (20) is placed;

Plural positioning marks (30) are arranged on the test platform (11), and the straight lines (L) formed by two pairs of positioning marks (30) are used for judging the image overlap of adjacent areas, as shown in Figure 4A , and each positioning mark (30) is a reflective material or a luminescent material;

The two-axis driving device (12) is arranged on both sides of the test platform (11) to drive the test platform (11) to move horizontally in the X or Y direction, and the shaft driving device (12) can be a A linear motion device comprising a servo motor (121);

A control host (13), which has a built-in image processing program and a motor driver, and is electrically connected to the servo motor (121) to control the displacement and direction of movement of the shaft drive device (12);

A video camera (not shown in the figure) is positioned on the top of the test platform (11), and is electrically connected with the control host (13), and is controlled by the control host (13) to shoot actions and receive/store its captured images.

Please cooperate as shown in Figure 3, which is another preferred embodiment of the image detection device (10a) of the present invention, most of which have the same structure as the above embodiment, except that the plurality of positioning marks (30) can be directly formed on the panel to be tested In (20), the imaginary straight lines (L) formed by pairs of two pairs are also used for judging the overlap of images in adjacent regions, and as the dividing lines for the control host to determine and shoot the images of each region of the panel to be tested (20). Because this preferred embodiment is to add the making of positioning mark (30) in the panel (20) manufacturing process to be tested, so can adopt chromium (Cr), aluminum (Al), aluminum alloy (AlNd), silver (Ag), Materials such as silver-platinum alloy (AP) and nickel (Ni) are reflective and commonly used in the flat panel display panel manufacturing process.

Please refer to Fig. 4A for reference, it is that the control host receives the camera to take pictures of the platform to be tested on the above-mentioned test platform, and the six images captured (the number of sheets depends on the shooting range and method of the camera, not necessarily), Since the camera is located above the platform to be tested, regardless of whether the positioning mark is set on the test platform or the panel to be tested, each image obtained by the control host will have an image of the positioning mark after being shot by the camera. , that is, the straight line (L) formed by two pairs of positioning marks can be used as the judgment of the overlapping range (61a-61e) of two adjacent image areas. Therefore, the control host can accurately judge the overlap by using the virtual straight line Areas (61a-61e), after deleting the overlapping areas (61a-61e), as shown in Figure 4B, form a complete picture corresponding to the panel to be tested, as shown in Figure 4C, and then perform defect comparison analysis , improve the efficiency of analysis and detection accuracy and detection rate.

As can be seen from the above description, the method for high positioning accuracy of the image analysis device of the present invention is to use a plurality of positioning marks on the test platform or the side panel to be tested, so that the straight line formed by two pairs of positioning marks overlaps the panel to be tested , so that each captured image area contains at least one pair of positioning marks. Therefore, when the control host controls the axis device to move the test platform to a certain point, it controls the camera to shoot to obtain multiple area images of the panel to be tested. By positioning and marking the positions of each area image, it is possible to accurately distinguish adjacent areas. The overlapping part of the image improves the accuracy of detection.

But although the present invention has been disclosed in the foregoing embodiments, it is not limited to the content mentioned in the foregoing embodiments. For example, only one shaft driving device (12) is provided to control one of the X or Y directions, or to locate Mark (30) can be various shapes, makes adjacent positioning marks (30) different in shape to distinguish the location when recombining images, and all the other changes and modifications made within the spirit and scope of the present invention are applicable. Belong to the protection scope of the present invention.

Claims (9)

1. A high positioning accuracy image detection device applied to a flat display panel, characterized in that it comprises: A test platform for placing a panel to be tested on it; Multiple positioning marks are set on the test platform and located on both sides of the panel to be tested; At least one shaft driving device is arranged on the side of the test platform to drive the test platform to move horizontally; a control host, electrically connected to the servo motor, to control the displacement and direction of movement of the shaft driving device; and A video camera is located above the test platform and is electrically connected to the control host, and the control host controls its shooting action and receives/stores its captured images; Wherein, the camera shoots the panel to be tested on the test platform to obtain a plurality of regional images of the panel to be tested, and each of the regional images includes at least one pair of corresponding positioning identification images, and the control host passes the A virtual straight line formed by the corresponding positioning mark is used for judging the overlapping area of images in adjacent areas. 2 . The image detection device with high positioning accuracy applied to a flat display panel as claimed in claim 1 , wherein each positioning mark is made of reflective material. 3 . 3 . The image detection device with high positioning accuracy applied to a flat display panel as claimed in claim 1 , wherein each positioning mark is a luminescent material. 4 . 4. An image detection device with high positioning accuracy applied to a flat display panel, characterized in that it comprises: a test platform; A flat display panel is arranged on the test platform; plural positioning marks are formed on the flat display panel; At least one shaft driving device is arranged on the side of the test platform to drive the test platform to move horizontally; A control host, electrically connected to the servo motor, to control the displacement and direction of the axis driving device; and A video camera is located above the test platform and is electrically connected to the control host, and the control host controls its shooting action and receives/stores its captured images; Wherein, the camera shoots the panel-to-be-tested on the test platform to obtain a plurality of regional images of the panel-to-be-tested, and each of the regional images includes at least one pair of corresponding positioning identification images, and the control host passes the A virtual straight line formed by the corresponding positioning mark is used for judging the overlapping area of images in adjacent areas. 5 . The image detection device with high positioning accuracy applied to a flat display panel as claimed in claim 4 , wherein each positioning mark is made of reflective material. 6 . 6 . The image detection device with high positioning accuracy applied to a flat display panel as claimed in claim 4 , wherein the reflective material is chromium, aluminum, aluminum alloy, silver, silver-platinum alloy, or nickel. 7. A method for improving the high positioning accuracy of an image detection device, which is applied to the image detection device as claimed in claim 1 or 4, characterized in that it comprises: Provide plural positioning identifiers; Make the positioning marks in pairs to form a straight line with imaginary; Overlap the imaginary straight line with the image of the panel to be tested as an area for judging the overlap of images in multiple areas; and Image processing for comparative analysis of defects in non-overlapping areas. 8. The method for improving the high positioning accuracy of an image detection device according to claim 7, wherein each positioning mark is made of a reflective material or a luminescent material. 9. The method for improving the high positioning accuracy of an image detection device as claimed in claim 8, wherein the reflective material is chromium, aluminum, aluminum alloy, silver, silver-platinum alloy, nickel.

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