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CN106674892A - Highly heat-conducting epoxy resin composition for fully encapsulated semiconductor device - Google Patents

Highly heat-conducting epoxy resin composition for fully encapsulated semiconductor device Download PDF

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Publication number
CN106674892A
CN106674892A CN201510757420.9A CN201510757420A CN106674892A CN 106674892 A CN106674892 A CN 106674892A CN 201510757420 A CN201510757420 A CN 201510757420A CN 106674892 A CN106674892 A CN 106674892A
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China
Prior art keywords
epoxy resin
semiconductor device
heat conduction
high heat
conduction type
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Pending
Application number
CN201510757420.9A
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Chinese (zh)
Inventor
李海亮
李刚
王善学
卢绪奎
王冰冰
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BEIJING SHOUKEHUA MICRO-ELECTRONICS Co Ltd
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BEIJING SHOUKEHUA MICRO-ELECTRONICS Co Ltd
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Priority to CN201510757420.9A priority Critical patent/CN106674892A/en
Publication of CN106674892A publication Critical patent/CN106674892A/en
Pending legal-status Critical Current

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Abstract

The invention relates to epoxy resin compositions, and in particular to a highly heat-conducting epoxy resin composition for a fully encapsulated semiconductor device with the advantages of high thermal conductivity and excellent forming process performances. Spherical alumina powder is added into the highly heat-conducting epoxy resin composition for the fully encapsulated semiconductor device, so that the filling property of the highly heat-conducting epoxy resin composition is improved, and the requirement on the highly heat-conducting epoxy resin composition used by the fully encapsulated semiconductor device with a back thickness of less than 0.5mm, particularly 0.43mm, can be met. The highly heat-conducting epoxy resin composition is a material for semiconductor encapsulation with excellent filling property. The highly heat-conducting epoxy resin composition disclosed by the invention has the advantages of necessary fluidity, and high reliability and flame retardant property.

Description

For the high heat conduction type composition epoxy resin of total incapsulation semiconductor device
Technical field
The present invention relates to composition epoxy resin, more particularly to highly thermally conductive performance, and moulded manufacturability The good high heat conduction type composition epoxy resin suitable for total incapsulation semiconductor device of energy.
Background technology
In recent years, total incapsulation discrete-semiconductor device is due to easy to assembly, relative to half encapsulating semiconductor device Part has obtained faster development, and for the total incapsulation epoxy resin of semiconductor packages is then required Material has high thermal conductivity and excellent building-up property, and with excellent fire resistance and energy Enough meet environmental requirement.Total incapsulation semiconductor device is mainly used for powerful electronic product, and by In the special structural requirement of total incapsulation semiconductor device, its encapsulation is a kind of typical asymmetric encapsulation.Entirely The back side (fin one side) of encapsulating semiconductor device is general relatively thin, is 0.5~0.7mm, if thickness More than 0.7mm, the thermal diffusivity of total incapsulation semiconductor device can be had a strong impact on.When radiating bad, contain Operationally, temperature can reach more than 70 DEG C to the electronic product of total incapsulation semiconductor device, and high temperature will be right The job stability of the audion of encapsulation produces strong influence, and then to the performance of whole electronic product Produce significant impact.Therefore, in order to improve thermal diffusivity, it is ensured that the functional reliability of electronic product, mesh The back side thickness of front total incapsulation semiconductor device is to slim development.Back side thickness most thin in the market is 0.43mm.After back side thickness reduces, narrow and small due to backside space, semiconductor device is being encapsulated When, can cause to pack resistance difference increase of the plastic packaging material used when its front and the back side are flowed, so as to make Also become big into flow velocity difference, easily cause plastic packaging material and overleaf form pore, or cause to fill discontented etc. Plastic package process defect.
In the middle of disclosed prior art, using silane coupler to composition epoxy resin in inorganic fill out Expect the content (for example, Japanese Unexamined Patent Publication 8-20673 publication) for being surface-treated and being increased inorganic filler, Low viscosity and high fluidity when this technical scheme can keep composition epoxy resin molding.However, should The molecular weight of the traditional silane coupler used in method, the adhesion between inorganic filler It is poor, certain toughening effect is not had, so that the melt viscosity of composition epoxy resin is little not enough, Therefore the technical scheme is required further improvement.A kind of epoxy is disclosed in Japanese Unexamined Patent Publication 2002-220515 Resin combination, amount of filler reaches 80%, and the melt viscosity of composition epoxy resin is higher, helical flow Length is relatively low, but the building-up property of the composition epoxy resin is bad, using the epoxy composite There is pore on the surface of the semiconductor device of thing (plastic packaging material) encapsulation.
The content of the invention
The purpose of the present invention is for the deficiencies in the prior art, so as to provide with highly thermally conductive performance, filling The good high heat conduction type epoxy resin group for total incapsulation semiconductor device of performance and building-up property Compound.
The present invention the high heat conduction type composition epoxy resin for total incapsulation semiconductor device component and Content is:
Used in the high heat conduction type composition epoxy resin for total incapsulation semiconductor device of the present invention Epoxy resin be monomer, oligomer or the polymer for having more than 2 epoxide groups in 1 epoxy molecule, Its molecular weight and molecular structure are not particularly limited.Above-mentioned epoxy resin can be selected from o-cresol formaldehyde asphalt mixtures modified by epoxy resin Fat, bisphenol A type epoxy resin, bisphenol f type epoxy resin, linear phenolic epoxy resin, biphenyl type ring Oxygen tree fat, dicyclopentadiene type epoxy resin, open chain aliphatic epoxy resin, cycloaliphatic epoxy resin, One or more in heterocyclic-type epoxy resin etc..
Used in the high heat conduction type composition epoxy resin for total incapsulation semiconductor device of the present invention Phenolic resin be monomer, oligomer or polymer that 1 phenolic aldehyde intramolecular has more than 2 hydroxyls, its Molecular weight and molecular structure are not particularly limited.Above-mentioned phenolic resin can be selected from phenol linear phenolic resin And its derivant (derivant such as phenol alkyl phenolic resin), phenyl methylcarbamate linear phenolic resin and its derivant, The condensation substance of monohydroxy or dihydroxy naphthlene phenolic resin and its derivant, xylol and phenol or naphthols, One or more in copolymer of dicyclopentadiene and phenol etc..
Used in the high heat conduction type composition epoxy resin for total incapsulation semiconductor device of the present invention Inorganic filler be highly thermally conductive inorganic filler.Described inorganic filler can be selected from crystal type titanium dioxide One kind or several in Si powder, angle-style aluminium sesquioxide powder, alpha-silicon nitride powders, aluminium nitride powder etc. Kind.Above-mentioned powdered quartz powder, angle-style aluminium sesquioxide powder, alpha-silicon nitride powders, nitridation Aluminium powder may be used alone or in combination.Additionally, the surface of described inorganic filler can use Silane coupler is surface-treated.
Described powdered quartz powder, angle-style aluminium sesquioxide powder, alpha-silicon nitride powders, nitrogen The meso-position radius (D50) for changing aluminium powder are all 10~40 microns.
The meso-position radius (D50) of described ball-aluminium oxide powder are 5~30 microns.
Described fire retardant is the fire retardant that brominated epoxy resin coordinates with antimony oxide, wherein, bromine It is 10 for the weight ratio of epoxy resin and antimony oxide:1.
Described curing accelerator, as long as the curing reaction of epoxy radicals and phenolic hydroxyl group, nothing can be promoted It is particularly limited to.Described curing accelerator can be selected from imidazolium compoundss, tertiary amine compound and organic phosphine One or more in compound etc..
Described imidazolium compoundss are selected from 2-methylimidazole, 2,4- methylimidazoles, 2- ethyl -4- methyl miaows One kind or several in azoles, 2- phenylimidazoles, 2- phenyl -4-methylimidazole and 2- (heptadecyl) imidazoles etc. Kind.
Described tertiary amine compound is selected from triethylamine benzyl group dimethylamine, Alpha-Methyl benzyl group dimethylamine, 2- (two Methylamine ylmethyl) phenol, 2,4,6- tri- (dimethylamino methyl) phenol and 1,8- diazabicyclo (5,4,0) One or more in endecatylene -7 etc..
Described organic phosphine compound selected from triphenylphosphine, trimethyl-phosphine, triethyl phosphine, tributylphosphine, One or more in three (p-methylphenyl) phosphines and three (nonyl phenyl) phosphines etc..
Described releasing agent can be selected from the one kind or several in Brazil wax, synthetic wax and mineral matter wax Kind.
Described inorganic ion scavenger is including but not limited to selected from hydrated metal oxide (such as Bi2O3·3H2O), acid metal salt is (such as:Zr(HPO4)2·H2O) and magnalium compound (such as: Mg6Al2(CO3)(OH)16·4H2O one or more in).
Described silane coupler can be selected from γ-glycidyl propyl ether trimethoxy silane, gamma-amino In propyl-triethoxysilicane, γ mercaptopropyitrimethoxy silane and γ-aminopropyltrimethoxysilane One or more.
Described coloring agent is white carbon black.
Described low stress modified dose is liquid silicone oil, silicone rubber powder or their mixture etc..
The preparation side of the high heat conduction type composition epoxy resin for total incapsulation semiconductor device of the present invention Method:The epoxy resin of 5~10wt% of the high heat conduction type composition epoxy resin total amount described in accounting for, The phenolic resin of 5~8wt%, the inorganic filler of 70~81wt%, the ball-aluminium oxide powder of 3~15wt%, The fire retardant of 1~1.5wt%, the curing accelerator of 0.05~0.1wt%, the releasing agent of 0.4~0.6wt%, The inorganic ion scavenger of 0.4~0.6wt%, the silane coupler of 0.4~0.6wt%, 0.4~0.6wt% Low stress modified dose of mix homogeneously of toner and 0.8~1wt%, be then in temperature by the mixture for obtaining Melting mixing is uniform on 70~100 DEG C of double roll mills, by the uniform material of melting mixing from double roller Natural cooling is removed on cylinder kneading machine, is crushed, obtain the described height for total incapsulation semiconductor device The powder-material of heat-conducting type composition epoxy resin;Biscuit is further pre-formed as, is obtained for total incapsulation The moulding material of the high heat conduction type composition epoxy resin of semiconductor device.
The present invention in for the high heat conduction type composition epoxy resin of total incapsulation semiconductor device by adding Plus spherical alumina powder, the filling capacity of high heat conduction type composition epoxy resin had both been improved, again can It is 0.43mm to meet the back side thickness to total incapsulation semiconductor device less than 0.5mm, particularly back side thickness The requirement of the high heat conduction type composition epoxy resin for being used, is a kind of excellent semiconductor packages of fillibility Use material.The high heat conduction type composition epoxy resin of the present invention has been also equipped with necessary mobility, height simultaneously Reliability, anti-flammability.
The present invention is further illustrated with reference to embodiments, but this is only citing, is not to the present invention's Limit.
Specific embodiment
Embodiment 1
O-cresol formaldehyde epoxy resin A1 (Japanese DIC Corporation systems " N-665 ") 10wt%
Phenol linear phenolic resin B1 (Japanese DIC Corporation systems " TD-2131 ") 5wt%
Powdered quartz powder D1 (d50 is 25 μm) 75.5wt%
Ball-aluminium oxide powder E1 (D50 is 5 microns) 5%wt%
Fire retardant brominated epoxy resin and antimony oxide (brominated epoxy resin and antimony oxide Weight ratio is 10:1) 1.5wt%
Curing accelerator 2-methylimidazole C 0.05wt%
Brazil wax 0.5wt%
Inorganic ion scavenger (Japanese TOAGOSEI Co., Ltd IXE500 (Bi2O3·3H2O)) 0.45wt%
γ-glycidyl propyl ether trimethoxy silane 0.5wt%
White carbon black 0.5wt%
Liquid silicone oil 0.5wt%
Silicone rubber powder 0.5wt% (d50 is 1 μm)
Weigh according to said ratio and after mix homogeneously, be again 70~100 DEG C in temperature by the mixture for obtaining Melting mixing is uniform on double roll mills of preheating, and the uniform material of melting mixing is mixed from double roller cylinder Natural cooling is removed in mill, is crushed, obtain the high heat conduction type epoxy for total incapsulation semiconductor device The powder-material of resin combination;Then biscuit is pre-formed as, is obtained for total incapsulation semiconductor device The moulding material of high heat conduction type composition epoxy resin.Using the following method to obtaining for total incapsulation half The moulding material of the high heat conduction type composition epoxy resin of conductor device is evaluated, and the results are shown in Table 1.
Gel time:Hot plate method, by electric hot plate 175 ± 1 DEG C are heated to, and take the above-mentioned forming materials of 0.3~0.5g The powder of material sample is placed on electric hot plate, and powder is terminal when gradually becoming colloidal state by fluid, reads institute Take time.
Spiral flow length:By EMMI-1-66 helical flow metal dies on transfer modling press Determine, briquetting pressure is 70 ± 2Kgf/cm2, mold temperature is 175 ± 2 DEG C, takes above-mentioned moulding material sample 20 ± the 5g of powder of product is tested.
Melt viscosity:The high heat conduction type epoxy for obtaining is determined using the heightization Flow Meter of Japanese Shimadzu Corporation The melt viscosity of resin combination moulding material.Test condition:Mouth mold is 0.5 × 1.0mm, and load is 10kg, temperature is 175 DEG C.
Heat conductivity:According to GB GB/T3139-82, the high heat conduction type ring for obtaining is determined using conductometer The heat conductivity of epoxy resin composition moulding material.
Anti-flammability:Above-mentioned moulding material sample is made 1/16 inch under the conditions of 175 DEG C/25Mpa The sample block of degree, then carries out solidify afterwards under conditions of 175 DEG C/6h, presses finally by vertical combustion Flame retardant test is carried out according to GB4609-84.
Building-up property:The high-power total incapsulation device TO-220F of plastic packaging (back side thickness is 0.43mm), Internal porosity is determined with ultrasonic scanning, and front step surface pore and back pore are estimated.Jing after inspection The number of elements of underproof high-power total incapsulation device TO-220F is fewer, shows that building-up property is better.
Embodiment 2~8
The composition of high heat conduction type composition epoxy resin is shown in Table 1, and preparation method is with embodiment 1, evaluation side With embodiment 1, evaluation result is shown in Table 1 to method.
Comparative example 1~4
The composition of composition epoxy resin is shown in Table 2, and, with embodiment 1, evaluation methodology is with enforcement for preparation method Example 1, evaluation result is shown in Table 2.
Adopt in embodiment 2~8, the composition epoxy resin of comparative example 1~4 beyond embodiment 1 Composition is as follows.
Dicyclopentadiene type epoxy Resin A 2 (Japanese DIC Corporation systems " HP-7200 ")
Phenol alkyl phenolic resin B2 (Mitsui Chemicals, Inc. system " XLC-4L ")
Angle-style aluminium sesquioxide powder D2 (d50 is 25 μm)
Ball-aluminium oxide powder E2 (D50 is 15 microns)
Ball-aluminium oxide powder E3 (D50 is 30 microns)
Table 1:The composition and evaluation result (by weight percentage) of example composition
Table 2:The composition and evaluation result (by weight percentage) of comparative example compositionss
Can be seen that by above-described embodiment and comparative example, comprising partly leading for total incapsulation for ball-aluminium oxide powder The filling capacity of the high heat conduction type composition epoxy resin of body device is substantially better than without ball-aluminium oxide powder Composition epoxy resin.

Claims (10)

1. a kind of high heat conduction type composition epoxy resin for total incapsulation semiconductor device, is characterized in that, The component and content of described high heat conduction type composition epoxy resin be:
Described inorganic filler is selected from powdered quartz powder, angle-style aluminium sesquioxide powder, nitrogen One or more in SiClx powder, aluminium nitride powder.
2. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described epoxy resin is selected from o-cresol formaldehyde epoxy resin, bisphenol A-type ring It is oxygen tree fat, bisphenol f type epoxy resin, linear phenolic epoxy resin, biphenyl type epoxy resin, bicyclic Pentadiene type epoxy resin, open chain aliphatic epoxy resin, cycloaliphatic epoxy resin, heterocyclic type epoxy One or more in resin.
3. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described phenolic resin selected from phenol linear phenolic resin and its derivant, Phenyl methylcarbamate linear phenolic resin and its derivant, monohydroxy or dihydroxy naphthlene phenolic resin and its derivant, One kind in the copolymer of the condensation substance, dicyclopentadiene and phenol of xylol and phenol or naphthols or It is several.
4. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described powdered quartz powder, angle-style aluminium sesquioxide powder, Alpha-silicon nitride powders, the meso-position radius of aluminium nitride powder are all 10~40 microns;
The meso-position radius of described ball-aluminium oxide powder are 5~30 microns.
5. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described fire retardant is the resistance that brominated epoxy resin coordinates with antimony oxide Combustion agent, wherein, brominated epoxy resin is 10 with the weight ratio of antimony oxide:1.
6. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described curing accelerator is selected from imidazolium compoundss, tertiary amine compound and has One or more in machine phosphine compound.
7. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 6 Compositionss, is characterized in that:Described imidazolium compoundss selected from 2-methylimidazole, 2,4- methylimidazoles, 2-ethyl-4-methylimidazole, 2- phenylimidazoles, 2- phenyl -4-methylimidazole and 2- (heptadecyl) imidazoles In one or more;
Described tertiary amine compound is selected from triethylamine benzyl group dimethylamine, Alpha-Methyl benzyl group dimethylamine, 2- (two Methylamine ylmethyl) phenol, 2,4,6- tri- (dimethylamino methyl) phenol and 1,8- diazabicyclo (5,4,0) One or more in endecatylene -7;
Described organic phosphine compound selected from triphenylphosphine, trimethyl-phosphine, triethyl phosphine, tributylphosphine, One or more in three (p-methylphenyl) phosphines and three (nonyl phenyl) phosphines.
8. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described releasing agent is in Brazil wax, synthetic wax and mineral matter wax One or more;
Described silane coupler is selected from γ-glycidyl propyl ether trimethoxy silane, gamma-amino propyl group In triethoxysilane, γ mercaptopropyitrimethoxy silane and γ-aminopropyltrimethoxysilane one Plant or several;
Described coloring agent is white carbon black;
Described low stress modified dose is liquid silicone oil, silicone rubber powder or their mixture.
9. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 1 Compositionss, is characterized in that:Described inorganic ion scavenger is selected from hydrated metal oxide, acid gold One or more in the compound of category salt and magnalium.
10. the high heat conduction type epoxy resin for total incapsulation semiconductor device according to claim 9 Compositionss, is characterized in that:Described hydrated metal oxide is Bi2O3·3H2O, described acidity gold Category salt is Zr (HPO4)2·H2O, the compound of described magnalium is Mg6Al2(CO3)(OH)16·4H2O。
CN201510757420.9A 2015-11-09 2015-11-09 Highly heat-conducting epoxy resin composition for fully encapsulated semiconductor device Pending CN106674892A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107698936A (en) * 2017-08-21 2018-02-16 江苏中鹏新材料股份有限公司 Fire-retardant epoxy resin composition, fire-retardant epoxy resin material and preparation method thereof
CN108117724A (en) * 2017-12-25 2018-06-05 科化新材料泰州有限公司 It is a kind of for semiconductor-sealing-purpose can normal temperature storage type ring epoxy resin composition
CN108485186A (en) * 2018-03-19 2018-09-04 长兴电子材料(昆山)有限公司 A kind of high mould stream epoxy resin component of low smell and its application
CN109467881A (en) * 2018-10-31 2019-03-15 科化新材料泰州有限公司 A kind of super heat-resisting, high thermal conductivity epoxy-plastic packaging material of semiconductor-sealing-purpose
CN110396386A (en) * 2019-07-26 2019-11-01 上海本诺电子材料有限公司 A kind of chip sealing insulative glue and preparation method thereof with high thermal conductivity coefficient
CN116218143A (en) * 2023-03-30 2023-06-06 深圳先进电子材料国际创新研究院 High-heat-conductivity epoxy plastic package material and preparation method and application thereof
CN116606528A (en) * 2023-07-18 2023-08-18 成都上泰科技有限公司 Toughening modified epoxy resin high polymer for wide bandgap semiconductor packaging and preparation method thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104513462A (en) * 2014-12-22 2015-04-15 科化新材料泰州有限公司 High-thermal-conductivity environment-friendly type epoxy resin composition and preparation method thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104513462A (en) * 2014-12-22 2015-04-15 科化新材料泰州有限公司 High-thermal-conductivity environment-friendly type epoxy resin composition and preparation method thereof

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107698936A (en) * 2017-08-21 2018-02-16 江苏中鹏新材料股份有限公司 Fire-retardant epoxy resin composition, fire-retardant epoxy resin material and preparation method thereof
CN108117724A (en) * 2017-12-25 2018-06-05 科化新材料泰州有限公司 It is a kind of for semiconductor-sealing-purpose can normal temperature storage type ring epoxy resin composition
CN108485186A (en) * 2018-03-19 2018-09-04 长兴电子材料(昆山)有限公司 A kind of high mould stream epoxy resin component of low smell and its application
CN109467881A (en) * 2018-10-31 2019-03-15 科化新材料泰州有限公司 A kind of super heat-resisting, high thermal conductivity epoxy-plastic packaging material of semiconductor-sealing-purpose
CN109467881B (en) * 2018-10-31 2021-10-26 江苏科化新材料科技有限公司 Super-heat-resistant high-thermal-conductivity epoxy plastic packaging material for semiconductor packaging
CN110396386A (en) * 2019-07-26 2019-11-01 上海本诺电子材料有限公司 A kind of chip sealing insulative glue and preparation method thereof with high thermal conductivity coefficient
CN116218143A (en) * 2023-03-30 2023-06-06 深圳先进电子材料国际创新研究院 High-heat-conductivity epoxy plastic package material and preparation method and application thereof
CN116606528A (en) * 2023-07-18 2023-08-18 成都上泰科技有限公司 Toughening modified epoxy resin high polymer for wide bandgap semiconductor packaging and preparation method thereof
CN116606528B (en) * 2023-07-18 2023-09-29 成都上泰科技有限公司 Toughening modified epoxy resin high polymer for wide bandgap semiconductor packaging and preparation method thereof

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