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CN106645029A - Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor - Google Patents

Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor Download PDF

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CN106645029A
CN106645029A CN201611118001.1A CN201611118001A CN106645029A CN 106645029 A CN106645029 A CN 106645029A CN 201611118001 A CN201611118001 A CN 201611118001A CN 106645029 A CN106645029 A CN 106645029A
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荆振国
宋鹏
彭伟
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Dalian University of Technology
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    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G01N2021/458Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/08Optical fibres; light guides
    • G01N2201/088Using a sensor fibre

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Abstract

本发明提供了一种熔接式的开腔光纤EFPI折射率传感器,属于光纤传感技术领域。传感器采用单模光纤‑毛细管‑单模光纤的熔接结构,两个端面构成双光束干涉。光纤熔接机用于单模光纤和石英毛细管的熔接。此处应用的是外径125um的熔融石英毛细管,毛细管外径和光纤外径是一样大小的,而其内部是中空的,空气层内径约在50‑65um,这层空气腔就是F‑P腔,腔长在1mm到1.5mm之间。利用光纤研磨纸将毛细管磨出一个缺口,从而使液体可以流入空腔内,通过测量F‑P干涉仪的有效腔长,利用相关解调就可以实现对待测液体折射率的绝对测量。传感器结构简单,易于制作,成本较低,应用灵活方便。可实现对折射率的绝对测量。

The invention provides a fusion-spliced open-cavity optical fiber EFPI refractive index sensor, which belongs to the technical field of optical fiber sensing. The sensor adopts a single-mode fiber-capillary-single-mode fiber fusion structure, and the two end faces form a double-beam interference. Optical fiber fusion splicer is used for fusion splicing of single-mode optical fiber and quartz capillary. The fused silica capillary with an outer diameter of 125um is used here. The outer diameter of the capillary is the same as the outer diameter of the optical fiber, and the inside is hollow. The inner diameter of the air layer is about 50-65um. This air cavity is the F-P cavity , the cavity length is between 1mm and 1.5mm. Grind a gap in the capillary with optical fiber grinding paper, so that the liquid can flow into the cavity. By measuring the effective cavity length of the F-P interferometer, the absolute measurement of the refractive index of the liquid to be measured can be realized by using correlation demodulation. The sensor is simple in structure, easy to manufacture, low in cost, and flexible and convenient in application. Absolute measurement of the refractive index can be achieved.

Description

一种熔接式的开腔光纤EFPI折射率传感器A fusion-spliced open-cavity optical fiber EFPI refractive index sensor

技术领域technical field

本发明属于光纤传感技术领域,涉及一种熔接式的开腔光纤EFPI折射率传感器。The invention belongs to the technical field of optical fiber sensing and relates to a fusion-spliced open-cavity optical fiber EFPI refractive index sensor.

背景技术Background technique

光纤传感器由于它结构紧凑、轻便和抗电磁干扰和腐蚀的优点,已经有了很深入的发展。其中相位调制光纤传感器由于采用的干涉技术而具有很高的检测灵敏度,而光纤传感器中光的干涉主要是通过各种光纤干涉仪来实现的。法布里-珀罗干涉仪结构的光纤传感器以其结构简单,体积小,高可靠性,高灵敏度,快时间响应,单光纤信号传输等优点得到了广泛的应用。现大多数研究的折射率传感器都需要标定,只能实现相对测量,本传感器利用信号相关处理算法可以实现折射率的绝对测量。Optical fiber sensor has been developed deeply due to its advantages of compact structure, light weight and resistance to electromagnetic interference and corrosion. Among them, the phase modulation optical fiber sensor has high detection sensitivity due to the interference technology adopted, and the interference of light in the optical fiber sensor is mainly realized by various optical fiber interferometers. The fiber optic sensor with Fabry-Perot interferometer structure has been widely used due to its simple structure, small size, high reliability, high sensitivity, fast time response, and single fiber signal transmission. Most of the refraction index sensors studied now need to be calibrated and can only achieve relative measurement. This sensor can realize absolute measurement of refraction index by using signal correlation processing algorithm.

发明内容Contents of the invention

本发明的目的是提供一种简单结构的熔接式光纤EFPI折射率传感器,该光纤传感器利用信号相关处理算法,可以实现液体折射率的绝对测量。和一般的传统EFPI传感器相比,此传感器具有大腔长,结构简单,制作工艺简易,应用灵活方便等优点。只需要单模光纤和石英毛细管即可,用光纤熔接机把两段单模光纤熔接到石英毛细管上。利用光纤研磨纸将毛细管磨出缺口,待测液体可以进入到毛细管中,从而实现待测液体的折射率测量。The object of the present invention is to provide a fusion-spliced optical fiber EFPI refractive index sensor with a simple structure, which can realize the absolute measurement of the liquid refractive index by using a signal correlation processing algorithm. Compared with the general traditional EFPI sensor, this sensor has the advantages of large cavity length, simple structure, simple manufacturing process, flexible and convenient application, etc. Only single-mode optical fiber and quartz capillary are needed, and two sections of single-mode optical fiber are fused to the quartz capillary with an optical fiber fusion splicer. Grinding the capillary with optical fiber polishing paper, the liquid to be tested can enter the capillary, thereby realizing the measurement of the refractive index of the liquid to be tested.

本发明的技术方案:Technical scheme of the present invention:

一种熔接式的开腔光纤EFPI折射率传感器,采用解调F-P腔长方式,实现待测液体的折射率测量;该开腔光纤EFPI折射率传感器由毛细管和单模光纤构成,将横向切割平整的两段单模光纤和毛细管焊接为整体,两段单模光纤分别焊接在毛细管的两端,利用单模光纤-毛细管-单模光纤两个端面构成双光束干涉结构,毛细管长度即为初始F-P腔长;将其整体弯曲固定,对毛细管的弯曲侧顶面研磨至出现一个缺口,使液体可流入毛细管的空气腔内。A fusion-spliced open-cavity optical fiber EFPI refractive index sensor adopts the method of demodulating the F-P cavity length to measure the refractive index of the liquid to be measured; the open-cavity optical fiber EFPI refractive index sensor is composed of a capillary and a single-mode optical fiber. A section of single-mode fiber and capillary are welded as a whole, and two sections of single-mode fiber are respectively welded at both ends of the capillary, using the two end faces of single-mode fiber-capillary-single-mode fiber to form a double-beam interference structure, and the length of the capillary is the initial F-P cavity length ; It is bent and fixed as a whole, and the top surface of the curved side of the capillary is ground until a gap appears, so that the liquid can flow into the air cavity of the capillary.

所述的毛细管外径为125um,毛细管外径和光纤外径相同,毛细管内径为50-100um,中空的F-P腔长为50um~2mm。The outer diameter of the capillary is 125um, the outer diameter of the capillary is the same as that of the optical fiber, the inner diameter of the capillary is 50-100um, and the length of the hollow F-P cavity is 50um-2mm.

一种熔接式的开腔光纤EFPI折射率传感器制备方法如下:A kind of preparation method of fusion-spliced open-cavity optical fiber EFPI refractive index sensor is as follows:

将光纤熔接机用于单模光纤和石英毛细管的熔接,需要经过不断的尝试设置、调整熔接参数,最终得到熔接效果良好的完整参数,熔接制作传感头。将传感头固定在磨具上,利用光纤研磨至毛细管出现一个缺口,从而使液体可以流入空腔内,利用相关解调就可以实现待测液体折射率的绝对测量。Using an optical fiber fusion splicer for the fusion of single-mode optical fiber and quartz capillary requires constant trial and error to set and adjust the fusion parameters, and finally obtain the complete parameters with good fusion effect, and then make the sensor head by fusion. The sensing head is fixed on the grinding tool, and the optical fiber is used to grind until a gap appears in the capillary, so that the liquid can flow into the cavity, and the absolute measurement of the refractive index of the liquid to be measured can be realized by correlation demodulation.

一个典型的F-P干涉仪的反射光强I主要受干涉仪的有效腔长nd的数值影响。反射光强可以由下面的公式来描述:The reflected light intensity I of a typical F-P interferometer is mainly affected by the value of the effective cavity length nd of the interferometer. The reflected light intensity can be described by the following formula:

式中,I是干涉频谱的总强度,A和B为常数,n为F-P干涉仪中空腔的折射率,d为F-P干涉仪的实际物理腔长,λ为自由空间光波长。where I is the total intensity of the interference spectrum, A and B are constants, n is the refractive index of the cavity in the F-P interferometer, d is the actual physical cavity length of the F-P interferometer, and λ is the wavelength of free-space light.

制作好的F-P干涉仪的实际距离是固定的,即实际物理腔长,而干涉仪的光学距离腔长直接取决于被测物质的折射率。该光学距离可以求出数值,实现被测物质折射率的绝对测量。入射光纤接的是如SM125光纤光栅解调仪等类型的波长扫描式光纤传感信号解调仪。利用交叉相关的信号处理方式,可以求出F-P干涉仪的绝对有效腔长nd,空气情况下折射率n约为1,测量得到的是毛细管空气腔的物理腔长,通入待测液体时nd变化,物理腔长d不变,二者相除即可得到待测液体的折射率,实现对折射率的绝对测量。The actual distance of the manufactured F-P interferometer is fixed, that is, the actual physical cavity length, and the optical distance cavity length of the interferometer directly depends on the refractive index of the measured substance. The optical distance can be calculated to realize the absolute measurement of the refractive index of the measured material. The incident fiber is connected to a wavelength-scanning optical fiber sensing signal demodulator such as the SM125 fiber grating demodulator. Using the cross-correlation signal processing method, the absolute effective cavity length nd of the F-P interferometer can be obtained. In the case of air, the refractive index n is about 1. What is measured is the physical cavity length of the capillary air cavity. Change, the physical cavity length d remains unchanged, the refractive index of the liquid to be measured can be obtained by dividing the two, and the absolute measurement of the refractive index can be realized.

本发明的有益效果:材料只需要单模光纤和石英毛细管即可,用光纤熔接机就可以把两段单模光纤熔接到石英毛细管上。传感器结构简单,易于制作,成本较低,应用灵活方便。可以实现对待测液体折射率的绝对测量,不需标定,计算数值即为折射率的真实值。Beneficial effects of the invention: only single-mode optical fiber and quartz capillary are needed as materials, and two sections of single-mode optical fiber can be welded to the quartz capillary by using an optical fiber fusion splicer. The sensor is simple in structure, easy to manufacture, low in cost, and flexible and convenient in application. The absolute measurement of the refractive index of the liquid to be measured can be realized without calibration, and the calculated value is the true value of the refractive index.

附图说明Description of drawings

图1是熔接式的开腔光纤EFPI折射率传感器示意图。Figure 1 is a schematic diagram of a fusion-spliced open-cavity optical fiber EFPI refractive index sensor.

图2是熔接式的开腔光纤EFPI折射率传感器制作流程图。Fig. 2 is a flow chart of making a fusion-spliced open-cavity optical fiber EFPI refractive index sensor.

图中:1单模光纤;2毛细管。In the figure: 1 single-mode fiber; 2 capillary.

具体实施方式detailed description

以下结合技术方案和附图详细叙述本发明的具体实施方式。The specific embodiments of the present invention will be described in detail below in conjunction with the technical solutions and accompanying drawings.

本发明以单模光纤-毛细管-单模光纤两个端面构成双光束干涉结构,制成全石英光纤EFPI折射率传感器。此处应用的是外径125um的熔融石英毛细管,毛细管外径和光纤外径是一样大小的,而其内部是中空的,空气层内径约为70um,这层空气腔就是F-P腔,腔长在50um-2mm之间。毛细管部分磨出缺口,形成一个开放的F-P腔,使得待测液体可以流入到空腔内,这时可能通过测量F-P干涉仪的有效腔长来得到液体折射率。In the invention, a double-beam interference structure is formed by two end surfaces of single-mode optical fiber-capillary-single-mode optical fiber, and an all-silica optical fiber EFPI refractive index sensor is made. The fused silica capillary with an outer diameter of 125um is used here. The outer diameter of the capillary is the same as the outer diameter of the optical fiber, and the inside is hollow. The inner diameter of the air layer is about 70um. This layer of air cavity is the F-P cavity, and the cavity length is at Between 50um-2mm. The capillary is partially ground to form an open F-P cavity, so that the liquid to be measured can flow into the cavity. At this time, the refractive index of the liquid may be obtained by measuring the effective cavity length of the F-P interferometer.

(1)将切割平整的毛细管和单模光纤放在熔接机上,图2左上图是纤芯对准后的图样(左端为单模光纤,右端为毛细管)。(2)放电熔接过程,毛细管和单模光纤接合在一起,两接触端面平齐,没有突起和皱缩。(3)在显微镜下切割毛细管,此步骤需要把前一步骤已经熔接好的部分从熔接机上拿到显微镜下。由于毛细管极易断裂,操作时尽量拿住光纤一端,用手托住毛细管部分即可。比照光纤外径,找到毛细管长度约为1mm的地方作为切口,用切割刀缓缓切下。(4)再次进行单模光纤和毛细管的熔接,至此两段单模光纤已经熔接到一段1mm左右的毛细管两端,传感头制作完成。(5)将熔接好的光纤毛细管结构固定到玻璃板上,将结构弯曲固定,方便研磨。(6)利用光纤研磨纸,研磨中间的毛细管,直至磨出缺口,使得液体可以进入毛细管当中。(1) Put the cut flat capillary and single-mode fiber on the fusion splicer. The upper left picture in Figure 2 is the pattern after the fiber core is aligned (the left end is the single-mode fiber, and the right end is the capillary). (2) During the discharge welding process, the capillary and the single-mode optical fiber are joined together, and the two contact end faces are flush without protrusions and shrinkage. (3) Cut the capillary under a microscope. This step requires taking the part that has been fused in the previous step from the fusion splicer to the microscope. Since the capillary is very easy to break, try to hold one end of the optical fiber during operation, and hold the capillary part with your hands. According to the outer diameter of the optical fiber, find the place where the capillary length is about 1mm as the incision, and cut it off slowly with a cutting knife. (4) Carry out fusion splicing of the single-mode optical fiber and the capillary again, so far two sections of single-mode optical fiber have been welded to both ends of a capillary of about 1 mm, and the sensor head is completed. (5) Fix the welded fiber capillary structure to the glass plate, and bend and fix the structure for convenient grinding. (6) Use optical fiber polishing paper to grind the capillary in the middle until a gap is formed so that the liquid can enter the capillary.

Claims (3)

1.一种熔接式的开腔光纤EFPI折射率传感器,其特征在于,采用解调F-P腔长方式,实现待测液体的折射率测量;该开腔光纤EFPI折射率传感器由毛细管和单模光纤构成,将横向切割平整的两段单模光纤和毛细管焊接为整体,两段单模光纤分别焊接在毛细管的两端,利用单模光纤-毛细管-单模光纤两个端面构成双光束干涉结构,毛细管长度即为初始F-P腔长;将其整体弯曲固定,对毛细管的弯曲侧顶面研磨至出现一个缺口,使液体可流入毛细管的空气腔内。1. an open-cavity optical fiber EFPI refractive index sensor of a fusion type is characterized in that, adopts the demodulation F-P cavity length mode, realizes the refractive index measurement of liquid to be measured; This open-cavity optical fiber EFPI refractive index sensor is made of capillary and single-mode optical fiber, Weld two sections of single-mode optical fiber and capillary that are horizontally cut and flat as a whole, and weld the two sections of single-mode optical fiber to the two ends of the capillary respectively, and use the two end faces of single-mode optical fiber-capillary-single-mode optical fiber to form a double-beam interference structure, the length of the capillary It is the length of the initial F-P cavity; it is bent and fixed as a whole, and the top surface of the curved side of the capillary is ground until a gap appears, so that the liquid can flow into the air cavity of the capillary. 2.根据权利要求1所述的开腔光纤EFPI折射率传感器,其特征在于,所述的毛细管外径为125um,毛细管外径和光纤外径相同,毛细管内径为50-100um。2. The open-cavity optical fiber EFPI refractive index sensor according to claim 1, wherein the outer diameter of the capillary is 125um, the outer diameter of the capillary is the same as that of the optical fiber, and the inner diameter of the capillary is 50-100um. 3.根据权利要求1或2所述的开腔光纤EFPI折射率传感器,其特征在于,所述的初始F-P腔长为50um~2mm。3. The open-cavity optical fiber EFPI refractive index sensor according to claim 1 or 2, wherein the initial F-P cavity length is 50um-2mm.
CN201611118001.1A 2016-12-07 2016-12-07 Weld type open-cavity optical fiber EFPI (extrinsic Farby-Perot interferometric) refractive index sensor Pending CN106645029A (en)

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CN108956534A (en) * 2018-08-23 2018-12-07 天津工业大学 A kind of refractive index measurement method based on open cavity Fabry Parot interferometer
CN110006846A (en) * 2019-04-19 2019-07-12 哈尔滨工程大学 A kind of V-type special optical fiber measuring device and preparation method of trace liquid refractive index
CN110501064A (en) * 2019-09-05 2019-11-26 西北大学 A reflective acoustic wave focusing device for diaphragmless optical acoustic wave sensor
CN111239063A (en) * 2020-02-21 2020-06-05 大连理工大学 A capillary-based fiber optic water quality monitoring probe structure
CN112384789A (en) * 2018-06-18 2021-02-19 信息技术有限公司 Interferometric optical fiber sensor, optical fiber probe and method for detecting chemical substances
CN112556595A (en) * 2020-12-01 2021-03-26 哈尔滨工业大学(深圳) Optical fiber FPI sensor, measuring device and measuring method
CN113049181A (en) * 2021-03-25 2021-06-29 大连理工大学 Method for manufacturing optical fiber Fabry-Perot vacuum gauge
CN113945542A (en) * 2021-09-10 2022-01-18 汕头大学 Optical fiber sensor, detection device based on optical fiber sensor and application thereof
CN116026789A (en) * 2022-12-22 2023-04-28 海南大学 A liquid refractive index sensor, liquid refractive index measurement method and preparation method

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Application publication date: 20170510