CN106622891B - Ultraviolet irradiation assisted plasma polymerization surface coating device and method - Google Patents
Ultraviolet irradiation assisted plasma polymerization surface coating device and method Download PDFInfo
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- CN106622891B CN106622891B CN201611076332.3A CN201611076332A CN106622891B CN 106622891 B CN106622891 B CN 106622891B CN 201611076332 A CN201611076332 A CN 201611076332A CN 106622891 B CN106622891 B CN 106622891B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
- B05D3/061—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
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Abstract
The invention relates to a device and a method for polymerizing a surface coating by ultraviolet irradiation auxiliary plasma, which belong to the technical field of plasmas and are used for preparing a polymer coating on the surface of a substrate. In the device, a plasma source is arranged in a vacuum chamber, an array of ultraviolet light sources is arranged in the vacuum chamber, an outlet of a carrier gas pipeline is close to the plasma source, and an outlet of a monomer steam pipeline is 5-30cm away from the plasma source; the exhaust pipe is positioned at one side of the vacuum chamber far away from the plasma source, the carrier gas pipeline outlet and the monomer steam pipeline outlet; placing a substrate to be treated in a vacuum chamber, and introducing carrier gas and monomer steam into the vacuum chamber; generating plasma by discharging; turning on an ultraviolet light source; the monomer vapor is polymerized and deposited on the surface of the substrate to form a coating under the dual actions of plasma and ultraviolet irradiation. The coating prepared by the device and the method has the advantages of high energy and raw material utilization rate, high coating deposition rate, good coating uniformity and the like.
Description
Technical Field
The invention belongs to the technical field of plasmas, and relates to a plasma polymerization surface coating device and a method thereof.
Background
Plasma polymerized surface coating is an important material surface modification method. In the process of plasma polymerizing surface coating, a substrate to be treated is placed in a vacuum chamber, carrier gas and gaseous organic monomers are introduced, the organic gaseous monomers are plasmized through discharge to generate various active species, and an addition reaction is carried out between the active species or between the active species and the monomers to form a polymer, and the polymer is deposited on the surface of the substrate to form the coating. For example, document surface coating (CN 1190545C) discloses a hydrophobic and/or oleophobic substrate comprising a method for producing a polymeric surface coating by means of pulsed high frequency glow discharge to generate a plasma; document "method of applying conformal nanocoating by low pressure plasma process" (CN 201180015332.1) also relates to a method of preparing a polymeric surface coating using pulsed high frequency glow discharge. The existing plasma polymerization surface coating technology adopts a single plasma means, and because of the inherent non-uniformity of the plasma in the spatial distribution, the plasma density at the position close to the discharge area is different from the plasma density at the position far from the discharge area, the plasma density at the position far from the discharge area is lower, the plasma density at the sheath area is lower, the polymerization effect is different, and the coating is non-uniform; in addition, the polymerization reaction of the low-density plasma region and the sheath region is insufficient, the energy and raw material utilization rate is low, and the coating deposition rate is low.
Disclosure of Invention
The invention aims to solve the technical problems of low energy and raw material utilization rate, low coating deposition rate and uneven coating in the prior art by providing a method for polymerizing a surface coating by using ultraviolet irradiation assisted plasmas.
The technical scheme adopted by the invention is as follows:
an ultraviolet irradiation assisted plasma polymerization surface coating device is characterized in that: a plasma source is arranged in the vacuum chamber, an array of ultraviolet light sources is arranged in a region, far away from the plasma source, in the vacuum chamber, a carrier gas pipeline is connected to one side, close to the plasma source, of the vacuum chamber, the other end of the carrier gas pipeline is connected with the carrier gas source, and a monomer steam pipeline is connected to the front of the plasma source in the vacuum chamber; the other end of the monomer steam pipeline is connected with a monomer steam source, and the vacuum exhaust pipe is connected to one side of the vacuum chamber, which is far away from the plasma source; the other end of the vacuum exhaust pipe is connected to a vacuum pump, and the substrate to be treated is placed in the vacuum chamber.
The plasma source is one of an electrode, an induction coil or a microwave antenna, and the discharge power of the plasma source is 5-1000W.
The plasma source can continuously or intermittently work, and when the plasma source intermittently works, the discharge time is 2-100 mu s, and the discharge interruption time is 1-100ms.
The distance between the adjacent ultraviolet light sources is 10cm-50cm, and the distance between the adjacent ultraviolet light sources and the plasma source is 20cm-80cm.
The ultraviolet light source is one of an ultraviolet lamp or an ultraviolet light emitting diode.
The wavelength range of the ultraviolet light source is 180-380nm, and the power of the ultraviolet light source is 0.1-200W.
The ultraviolet light source can emit light continuously or intermittently, and when the ultraviolet light source emits light intermittently, the light emitting time is 1 mu s-1s, and the light emitting interruption time is 10 mu s-10s.
The distance between the monomer vapor pipeline and the plasma source is 5cm to 30cm.
A method for coating a surface by using the ultraviolet irradiation assisted plasma polymerization surface coating device, which is characterized in that: mainly comprises the following steps:
(1) Placing a substrate to be treated in a vacuum chamber, and starting a vacuum pump to pump the vacuum degree in the vacuum chamber to below 1 Pa;
(2) Introducing carrier gas and monomer steam, and maintaining the vacuum degree in the vacuum chamber at 2-30Pa;
(3) And starting a plasma source to discharge to generate plasma, starting an ultraviolet light source at the same time, and polymerizing monomer steam under the dual actions of the plasma and ultraviolet irradiation and depositing the monomer steam on the surface of the substrate to form a coating.
The carrier gas is one or a mixture of helium and argon.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the polymer coating prepared by the device and the method provided by the invention has the advantages that the ultraviolet irradiation is utilized to enable monomer polymerization reaction to occur in the weak plasma region, so that the inadequacy of the plasma polymerization reaction in the weak plasma region is overcome, the coating deposition rate in the weak plasma region is improved, the energy and raw material utilization rate is improved, and the coating uniformity is improved.
Drawings
FIG. 1 is a schematic diagram of an apparatus for carrying out the method of the present invention.
In the figure, 1, a vacuum chamber, 2, a plasma source, 3, an ultraviolet light source, 4, a carrier gas pipeline, 5,
Monomer steam pipeline, 6, blast pipe, 7, substrate.
Detailed Description
The invention is described in detail below with reference to the drawings and the specific embodiments, but the invention is not limited to the specific embodiments.
Example 1
As shown in fig. 1, a plasma source is installed in a vacuum chamber, the plasma source is an electrode, the discharge power of the plasma source is 5W, the plasma source can continuously or intermittently work, when the plasma source intermittently works, the discharge time is 2 mus, and the discharge interruption time is 1ms; an array of ultraviolet light sources is arranged in a region, far away from a plasma source, in a vacuum chamber, wherein the ultraviolet light sources are ultraviolet lamps, the distance between adjacent ultraviolet light sources is 10cm, the distance between the adjacent ultraviolet light sources is 20cm, the wavelength range of the ultraviolet light sources is 180nm, the power of the ultraviolet light sources is 0.1W, the ultraviolet light sources can continuously or intermittently emit light, when the ultraviolet light sources intermittently emit light, the light emitting time is 1 mu s, and the light emitting interruption time is 10 mu s; the carrier gas pipeline is connected to one side of the vacuum chamber, which is close to the plasma source, the other end of the carrier gas pipeline is connected with the carrier gas source, and the monomer steam pipeline is connected to the front of the plasma source in the vacuum chamber; the other end of the monomer vapor pipeline is connected with a monomer vapor source, and the distance between the monomer vapor pipeline and the plasma source is 5cm; the vacuum exhaust pipe is connected to one side of the vacuum chamber far away from the plasma source; the other end of the vacuum exhaust pipe is connected to a vacuum pump, and the substrate to be treated is placed in the vacuum chamber.
Example 2
A method of surface coating using the ultraviolet irradiation assisted plasma polymerization surface coating apparatus of example 1, characterized in that: mainly comprises the following steps:
(1) Placing a substrate to be treated in a vacuum chamber, and starting a vacuum pump to pump the vacuum degree in the vacuum chamber to below 1 Pa;
(2) Introducing carrier gas and monomer steam, wherein the carrier gas is a mixture of helium or argon, and maintaining the vacuum degree in the vacuum chamber to be 2Pa;
(3) And starting a plasma source to discharge to generate plasma, starting an ultraviolet light source at the same time, and polymerizing monomer steam under the dual actions of the plasma and ultraviolet irradiation and depositing the monomer steam on the surface of the substrate to form a coating.
Example 3
As shown in fig. 1, a plasma source is installed in a vacuum chamber, the plasma source is a microwave antenna, the discharge power of the plasma source is 1000W, the plasma source can continuously or intermittently work, when the plasma source intermittently works, the discharge time is 100 mu s, and the discharge interruption time is 100ms; an array of ultraviolet light sources is arranged in a region, far away from a plasma source, in a vacuum chamber, wherein the ultraviolet light sources are ultraviolet light emitting diodes, the distance between adjacent ultraviolet light sources is 150cm, the distance between the adjacent ultraviolet light sources is 80cm, the wavelength range of the ultraviolet light sources is 380nm, the power of the ultraviolet light sources is 200W, the ultraviolet light sources can emit light continuously or intermittently, when the ultraviolet light sources emit light intermittently, the light emitting time is 1s, and the light emitting interruption time is 10s; the carrier gas pipeline is connected to one side of the vacuum chamber, which is close to the plasma source, the other end of the carrier gas pipeline is connected with the carrier gas source, and the monomer steam pipeline is connected to the front of the plasma source in the vacuum chamber; the other end of the monomer vapor pipeline is connected with a monomer vapor source, and the distance between the monomer vapor pipeline and the plasma source is 30cm; the vacuum exhaust pipe is connected to one side of the vacuum chamber far away from the plasma source; the other end of the vacuum exhaust pipe is connected to a vacuum pump, and the substrate to be treated is placed in the vacuum chamber.
Example 4
A method of surface coating using the ultraviolet irradiation assisted plasma polymerization surface coating apparatus of example 1, characterized in that: mainly comprises the following steps:
(1) Placing a substrate to be treated in a vacuum chamber, and starting a vacuum pump to pump the vacuum degree in the vacuum chamber to below 1 Pa;
(2) Introducing carrier gas and monomer steam, wherein the carrier gas is helium, and maintaining the vacuum degree in the vacuum chamber to be 30Pa;
(3) And starting a plasma source to discharge to generate plasma, starting an ultraviolet light source at the same time, and polymerizing monomer steam under the dual actions of the plasma and ultraviolet irradiation and depositing the monomer steam on the surface of the substrate to form a coating.
Example 5
As shown in fig. 1, a plasma source is installed in a vacuum chamber, the plasma source is an induction coil, the discharge power of the plasma source is 500W, the plasma source can continuously or intermittently work, when the plasma source intermittently works, the discharge time is 40 mu s, and the discharge interruption time is 50ms; an array of ultraviolet light sources is arranged in a region, far away from a plasma source, in a vacuum chamber, wherein the ultraviolet light sources are ultraviolet lamps, the distance between adjacent ultraviolet light sources is 25cm, the distance between the adjacent ultraviolet light sources is 50cm, the wavelength range of the ultraviolet light sources is 380nm, the power of the ultraviolet light sources is 100W, the ultraviolet light sources can continuously or intermittently emit light, when the ultraviolet light sources intermittently emit light, the light emitting time is 10 mu s, and the light emitting interruption time is 50 mu s; the carrier gas pipeline is connected to one side of the vacuum chamber, which is close to the plasma source, the other end of the carrier gas pipeline is connected with the carrier gas source, and the monomer steam pipeline is connected to the front of the plasma source in the vacuum chamber; the other end of the monomer steam pipeline is connected with a monomer steam source, and the distance between the monomer steam pipeline and the plasma source is 10cm; the vacuum exhaust pipe is connected to one side of the vacuum chamber far away from the plasma source; the other end of the vacuum exhaust pipe is connected to a vacuum pump, and the substrate to be treated is placed in the vacuum chamber.
Example 6
A method of surface coating using the ultraviolet irradiation assisted plasma polymerization surface coating apparatus of example 1, characterized in that: mainly comprises the following steps:
(1) Placing a substrate to be treated in a vacuum chamber, and starting a vacuum pump to pump the vacuum degree in the vacuum chamber to below 1 Pa;
(2) Introducing carrier gas and monomer steam, wherein the carrier gas is argon, and maintaining the vacuum degree in the vacuum chamber to be 15Pa;
(3) And starting a plasma source to discharge to generate plasma, starting an ultraviolet light source at the same time, and polymerizing monomer steam under the dual actions of the plasma and ultraviolet irradiation and depositing the monomer steam on the surface of the substrate to form a coating.
Claims (7)
1. An ultraviolet irradiation assisted plasma polymerization surface coating device is characterized in that: a plasma source (2) is arranged in a vacuum chamber (1), the plasma source (2) is one of an electrode, an induction coil or a microwave antenna, an array of ultraviolet light sources (3) is arranged in a region far away from the plasma source in the vacuum chamber (1), the ultraviolet light sources (3) are one of ultraviolet lamps or ultraviolet light emitting diodes, a carrier gas pipeline (4) is connected to one side, close to the plasma source (2), in the vacuum chamber, the other end of the carrier gas pipeline is connected with the carrier gas source, a monomer steam pipeline (5) is connected to the front of the plasma source in the vacuum chamber, and the other end of the monomer steam pipeline is connected with the monomer steam source; the vacuum exhaust pipe (6) is connected to one side of the vacuum chamber (1) far away from the plasma source (2); the other end of the vacuum exhaust pipe is connected to a vacuum pump, and a substrate (7) to be treated is placed in the vacuum chamber (1);
the distance between the adjacent ultraviolet light sources (3) is 10cm, and the distance between the adjacent ultraviolet light sources and the plasma source (2) is 20cm, and the distance between the monomer steam pipeline (5) and the plasma source (2) is 5cm;
or the distance between the adjacent ultraviolet light sources (3) is 150cm and 80cm away from the plasma source (2), and the distance between the monomer vapor pipeline (5) and the plasma source (2) is 30cm;
or the distance between the adjacent ultraviolet light sources (3) is 25cm, the distance between the adjacent ultraviolet light sources and the plasma source (2) is 50cm, and the distance between the monomer vapor pipeline (5) and the plasma source (2) is 10cm.
2. An ultraviolet radiation assisted plasma polymerized surface coating apparatus according to claim 1, wherein: the discharge power of the plasma source (2) is 5-1000W.
3. An ultraviolet radiation assisted plasma polymerized surface coating apparatus according to claim 1, wherein: the plasma source (2) can continuously or intermittently work, and when the plasma source (2) intermittently works, the discharge time is 2-100 mu s, and the discharge interruption time is 1-100ms.
4. An ultraviolet radiation assisted plasma polymerized surface coating apparatus according to claim 1, wherein:
the wavelength range of the ultraviolet light source (3) is 180-380nm, and the power of the ultraviolet light source (3) is 0.1-200W.
5. An ultraviolet radiation assisted plasma polymerized surface coating apparatus according to claim 1, wherein: the ultraviolet light source (3) can emit light continuously or intermittently, and when the ultraviolet light source (3) emits light intermittently, the light emitting time is 1 mu s-1s, and the light emitting interruption time is 10 mu s-10s.
6. A method of surface coating a surface coating using the ultraviolet radiation assisted plasma polymerization surface coating apparatus of claim 1, wherein: mainly comprises the following steps:
(1) Placing a substrate (7) to be treated in the vacuum chamber (1), and starting a vacuum pump to pump the vacuum degree in the vacuum chamber (1) to below 1 Pa;
(2) Introducing carrier gas and monomer steam, and maintaining the vacuum degree in the vacuum chamber (1) at 2-30Pa;
(3) And starting the plasma source (2) to discharge to generate plasma, and simultaneously starting the ultraviolet light source (3), wherein monomer vapor is polymerized and deposited on the surface of the substrate to form a coating under the dual actions of the plasma and ultraviolet irradiation.
7. The method according to claim 6, wherein: the carrier gas in the step (2) is one or a mixture of two of helium and argon.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2016107871869 | 2016-08-30 | ||
| CN201610787186 | 2016-08-30 |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1272142A (en) * | 1997-09-29 | 2000-11-01 | 巴特勒记忆研究所 | Plasma enhanced chemical deposition with low vapor pressure compounds |
| CN1646238A (en) * | 2002-04-19 | 2005-07-27 | 杜尔系统有限公司 | Method and device for hardening a coating |
| CN103930472A (en) * | 2011-07-29 | 2014-07-16 | 艾德昂有限责任公司 | A method of curing a composition by electron beam radiation, by gas-generated plasma and ultraviolet radiation |
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2016
- 2016-11-30 CN CN201611076332.3A patent/CN106622891B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1272142A (en) * | 1997-09-29 | 2000-11-01 | 巴特勒记忆研究所 | Plasma enhanced chemical deposition with low vapor pressure compounds |
| CN1646238A (en) * | 2002-04-19 | 2005-07-27 | 杜尔系统有限公司 | Method and device for hardening a coating |
| CN103930472A (en) * | 2011-07-29 | 2014-07-16 | 艾德昂有限责任公司 | A method of curing a composition by electron beam radiation, by gas-generated plasma and ultraviolet radiation |
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