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CN106505059A - Substrate structure - Google Patents

Substrate structure Download PDF

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Publication number
CN106505059A
CN106505059A CN201510652194.8A CN201510652194A CN106505059A CN 106505059 A CN106505059 A CN 106505059A CN 201510652194 A CN201510652194 A CN 201510652194A CN 106505059 A CN106505059 A CN 106505059A
Authority
CN
China
Prior art keywords
electric contact
board structure
contact mat
hollow
substrate body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510652194.8A
Other languages
Chinese (zh)
Other versions
CN106505059B (en
Inventor
潘嘉伟
高迺澔
张宏达
姜亦震
江东昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siliconware Precision Industries Co Ltd
Original Assignee
Siliconware Precision Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siliconware Precision Industries Co Ltd filed Critical Siliconware Precision Industries Co Ltd
Publication of CN106505059A publication Critical patent/CN106505059A/en
Application granted granted Critical
Publication of CN106505059B publication Critical patent/CN106505059B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/02Bonding areas ; Manufacturing methods related thereto
    • H01L24/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49838Geometry or layout
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/0401Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/0501Shape
    • H01L2224/05011Shape comprising apertures or cavities
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/0501Shape
    • H01L2224/05012Shape in top view
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/0501Shape
    • H01L2224/05012Shape in top view
    • H01L2224/05015Shape in top view being circular or elliptic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/0502Disposition
    • H01L2224/05022Disposition the internal layer being at least partially embedded in the surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/05075Plural internal layers
    • H01L2224/05076Plural internal layers being mutually engaged together, e.g. through inserts
    • HELECTRICITY
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    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/05001Internal layers
    • H01L2224/05099Material
    • H01L2224/05186Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0556Disposition
    • H01L2224/05571Disposition the external layer being disposed in a recess of the surface
    • H01L2224/05572Disposition the external layer being disposed in a recess of the surface the external layer extending out of an opening
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L2224/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
    • H01L2224/13001Core members of the bump connector
    • H01L2224/1302Disposition
    • H01L2224/13022Disposition the bump connector being at least partially embedded in the surface
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/10Bump connectors ; Manufacturing methods related thereto
    • H01L24/12Structure, shape, material or disposition of the bump connectors prior to the connecting process
    • H01L24/13Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
  • Structure Of Printed Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

A substrate structure, comprising: the substrate structure comprises a substrate body and an electric contact pad arranged on the substrate body, wherein the electric contact pad is provided with at least one hollow part so that part of the surface of the substrate body is exposed out of the hollow part, and the rigidity of the electric contact pad is reduced, so that when the substrate structure is stressed, the counter torque generated by the electric contact pad is greatly reduced, and the problem of breakage of the substrate body is avoided.

Description

Board structure
Technical field
The present invention relates to a kind of board structure, more particularly to a kind of with the in electrical contact of improvement The board structure of pad.
Background technology
With the evolution of semiconductor packaging, semiconductor device (Semiconductor device) Different encapsulation kenels have been developed.Wherein, sphere grid several-group type (Ball grid array, BGA), Such as PBGA, EBGA, FCBGA etc., are a kind of advanced semiconductor packaging, its feature Be semiconductor subassembly is disposed using a base plate for packaging, and put in base plate for packaging back side plant many Several stannum balls (Solder ball) into the arrangement of palisade array, make the bearing part of same units area On can accommodate more input/output connection ends (I/O connection) to meet height aggregation (Integration) demand of semiconductor chip, and whole encapsulation unit welds by mat those stannum balls Tie and be electrically connected to external electronic.
Additionally, compact, multi-functional, at high speed and high frequency in order to meet semiconductor package part The developing way of change, semiconductor chip develop towards fine rule road and small-bore.
Fig. 1 is the cross-sectional schematic of existing semiconductor chip 1.As shown in Figure 1, there is provided a tool There are the body 10 of multiple electric contact mats 100 and conductive trace 101, the body 10 that there is a base The bottom 10a and line construction 10b in substrate 10a, and the electric contact mat 100 With conductive trace 101 on line construction 10b.Then, an insulating protective layer 11 is formed On the chip body 10, on the insulating protective layer 11, multiple perforates 110 are formed, made each The electric contact mat 100 correspondingly exposes to the respectively perforate 110.Afterwards, by metal under projection Layer 130 forms multiple conductive components 13 such as soldered ball on the electric contact mat 100, leads this Electrical component 13 is electrically connected with the electric contact mat 100, to complete existing chip package (Flip Chip Package semiconductor chip 1).
In encapsulation making method, the semiconductor chip 1 by reflow those conductive components 13 with It is bound on base plate for packaging (figure is omited), now, the semiconductor chip 1 is subjected to external force, example Such as, reflow oven can produce thermal stress to the inside of the semiconductor chip 1.
But, when the inside of the semiconductor chip 1 produces thermal stress, the electric contact mat 100 There is extremely strong rigidity because which is shaped as solid disk (as shown in Fig. 1 '), therefore this is electrically connected with Touch pad 100 can produce the torque for contending with to the thermal stress, especially in the electric contact mat 100 Edge produced by the torque that contends with maximum, cause positioned at the electric contact mat 100 Line construction 10b near edge because bearing excessive stresses and fragmentation (Crack), such as Fig. 1 institutes K at the fragmentation that shows.
Therefore, how to overcome above-mentioned problem of the prior art, real into desiring most ardently asking for solution at present Topic.
Content of the invention
In view of the various shortcoming of above-mentioned prior art, the present invention provides a kind of board structure, to keep away Exempt from the problem of the substrate body rupture.
The board structure of the present invention includes:Substrate body;And electric contact mat, which is located at this In substrate body and with least hollow-out parts, to make the part surface of the substrate body expose to The hollow-out parts.
In aforesaid board structure, the substrate body is line construction.
In aforesaid board structure, the substrate body includes substrate and located at the suprabasil line Line structure, and the electric contact mat is on the line construction.
In aforesaid board structure, also there is at least one electric connection in the substrate body, and this is electrical The conductive trace of engagement pad.
In aforesaid board structure, the upper view plane of the electric contact mat is generally circular in shape or polygon Shape.
In aforesaid board structure, the hollow-out parts are located at the edge of the electric contact mat.
In aforesaid board structure, and the side view of the hollow-out parts is to should electric contact mat Side view.For example, the side of the parallel electric contact mat of the lateral surface of the hollow-out parts;Or, The flat shape of the hollow-out parts is the sector at ring-type or at least two intervals for having breach;Or, should The upper view plane of electric contact mat is generally circular in shape or polygon.
In aforesaid board structure, also include insulating protective layer, in the substrate body, and The insulating protective layer has perforate, makes the electric contact mat expose to the perforate.
In aforesaid board structure, also include the conductive component on the electric contact mat.
In aforesaid board structure, also include located at metal under the projection on the electric contact mat Layer.
From the foregoing, it will be observed that the board structure of the present invention, by the design of the hollow-out parts, makes this electrical The rigidity of engagement pad diminishes, therefore compared to prior art, when the board structure stress, the electricity Property engagement pad will not be too strong and produce the excessive torque for contending with the substrate body because of rigidity On, therefore it is avoided that the problem of the substrate body rupture.
Description of the drawings
Fig. 1 is the cross-sectional schematic of existing semiconductor chip;
Fig. 1 ' is the upper viewing view of existing electric contact mat;
Fig. 2 is the cross-sectional schematic of the board structure of the present invention;
Cross-sectional schematics of the Fig. 2 ' for another embodiment of Fig. 2;
Fig. 2A to Fig. 2 I is the first embodiment of the electric contact mat of the board structure of the present invention The upper viewing view of various embodiments;And
Fig. 3 A to Fig. 3 C are the second embodiment of the electric contact mat of the board structure of the present invention The upper viewing view of various embodiments.
Description of reference numerals:
1 semiconductor chip
10 bodies
10a, 20a substrate
10b, 20b line construction
100,200,300 electric contact mats
101,201 conductive traces
11,21 insulating protective layers
110,210 perforates
13,23 conductive components
130,230 projection underlying metal layers
2 board structures
20,20 ' substrate bodies
200a, 300a hollow-out parts
At K fragmentations
R sides
S lateral surface.
Specific embodiment
Embodiments of the present invention, art technology are described below by way of particular specific embodiment Personnel can be understood other advantages and the work(of the present invention easily by content disclosed in the present specification Effect.
It should be clear that structure, ratio, size depicted in this specification institute accompanying drawing etc., only in order to Coordinate the content disclosed in description, for the understanding and reading of those skilled in the art, not In order to limit enforceable qualificationss of the invention, therefore do not have technical essential meaning, any The modification of structure, the change of proportionate relationship or the adjustment of size, can produce the present invention is not affected Under raw effect and the purpose that can reach, still all should fall in disclosed technology contents Obtain in the range of covering.Meanwhile, in this specification cited such as " on " and " one " etc. Term, be also only and be easy to described to understand, and be not used to limit enforceable scope of the invention, Its relativeness is altered or modified, under without essence change technology contents, when being also considered as this Bright enforceable category.
Fig. 2 is the cross-sectional schematic of the board structure 2 of the present invention.As shown in Fig. 2 the substrate Structure 2 includes:One substrate body 20, the multiple electric contact mats in the substrate body 20 200th, multiple conductive traces 201 and an insulating protective layer 21.
Described substrate body 20 includes line construction, for example, wiring board, and which has multiple Dielectric layer and multiple line layers, and the electric contact mat 200 and the conductive trace 201 are located at most On the dielectric layer of outer layer and it is electrically connected with the line layer.
In another embodiment, such as shown in Fig. 2 ', the substrate body 20 ' includes a substrate The 20a and line construction 20b in substrate 20a, and the electric contact mat 200 is located at On line construction 20b.For example, substrate 20a be semiconductor substrate, such as wafer, chip, There is intermediate plate of silicon perforation (Through-Silicon Via, abbreviation TSV) etc., and the line Line structure 20b has multiple dielectric layers (figure is omited) and multiple circuit redistribution layer (redistribution Layer, abbreviation RDL) (figure is omited), and the electric contact mat 200 and the conductive trace 201 It is located on outermost dielectric layer and is electrically connected with the circuit redistribution layer or the electric contact mat 200 with the conductive trace 201 as circuit redistribution layer a part.
Described electric contact mat 200 is electrically connected with the conductive trace 201, and the electric contact mat 200 have at least hollow-out parts 200a, to make the substrate body 20 (or line construction 20b) Part surface expose to hollow-out parts 200a.
In the present embodiment, hollow-out parts 200a are located at the edge of the electric contact mat 200, but The side R (as shown in Figure 2 A) of the electric contact mat 200 is not connected.
Additionally, the forming method of hollow-out parts 200a is etching or the laser electric contact mat 200; Or, can the electric contact mat 200 of Direct Electroplating or coating formation with hollow-out parts 200a.
Further, since respectively around the electric contact mat 200 and conductive trace 201 and thereon Structure all same, therefore single electric contact mat 200 and conductive trace 201 is only illustrated in schema To explain, state clearly hereby.
Described insulating protective layer 21 has the perforate 210 for correspondingly exposing the electric contact mat 200. For example, the material of the insulating protective layer 21 is anti-wlding or dielectric material, such as pi (Polyimide, abbreviation PI), benzocyclobutene (Benezocy-clobutene, referred to as BCB) or poly- to diazole benzene (Polybenzoxazole, abbreviation PBO).
In addition, described board structure 2 also includes the conductive component 23 in the perforate 210, Which is electrically connected with the electric contact mat 200.
In the present embodiment, the conductive component 23 is soldered ball, metal derby etc., makes the board structure 2 combine other electronic building bricks (figure is omited), for example, semiconductor die by those conductive components 23 Circle, chip, the intermediate plate or wiring board with silicon perforation.
Additionally, a projection underlying metal layer (Under can be initially formed under the conductive component 23 Bump Metallurgy, abbreviation UBM) 230, the conductive component 23 is more firmly incorporated into On the electric contact mat 200.
The board structure 2 of the present invention is by forming hollow-out parts 200a in the electric contact mat 200 On, make the rigidity of the electric contact mat 200 diminish, when 2 stress of board structure, especially When being thermal stress and warpage occurring, the electric contact mat 200 will not be produced because rigidity is too strong The excessive torque for contending with therefore is avoided that the substrate body in the substrate body 20 on 20 ' 20,20 ' line layer or the problem of RDL fractures.
Additionally, the area of hollow-out parts 200a is bigger, then the stress of the electric contact mat 200 changes Kind effect is better, i.e., the electric contact mat 200 has preferably elasticity and flexibility.As schemed Shown in 2A to Fig. 2 H, when the upper view plane of the electric contact mat 200 is generally circular in shape, this is engraved The side view (i.e. arcuation) of empty portion 200a to should electric contact mat 200 side view (i.e. Arcuation), to make the flat shape of hollow-out parts 200a be formed such as the fan-shaped or class at least two intervals Like sector, and it is preferred that parallel electric contact mats 200 of the lateral surface S of hollow-out parts 200a Side R, use hollow-out parts 200a for obtaining maximum area.
It is preferred that compared to existing electric contact mat, the face of hollow-out parts 200a shown in Fig. 2 E Product is larger, causes the torque produced by which less, the power produced by about only existing electric contact mat The 92% of square.
Also, the flat shape of hollow-out parts 200a can also form the annular of tool breach, such as Fig. 2 I Shown, 92% of torque produced by the about only existing electric contact mat of torque produced by which.
In addition, the upper view plane shape of the electric contact mat 300 can be other geometries, such as Polygon shown in Fig. 3 A to Fig. 3 C, and the side view (i.e. flat) of hollow-out parts 200a To should electric contact mat 200 side view (i.e. flat), to obtain maximum area Hollow-out parts 300a.
Therefore, various with the shape aspect of hollow-out parts about the electric contact mat, however it is not limited on State.
In sum, board structure of the invention, main by being formed on the electric contact mat Hollow-out parts, and the side view of the hollow-out parts to should electric contact mat side view, to subtract The rigidity of the little electric contact mat, therefore when the board structure stress, the electric contact mat is produced The torque that life contends with significantly reduces, thus the problem that the substrate body will not be chipping.
Principle and its effect of the above-described embodiment only in order to the illustrative present invention, not for Limit the present invention.Any those skilled in the art can be in the spirit and the scope without prejudice to the present invention Under, above-described embodiment is modified.Therefore the scope of the present invention, should be such as right Listed by claim.

Claims (13)

1. a kind of board structure, it is characterized by, the board structure includes:
One substrate body;And
Multiple electric contact mats, its are located in the substrate body and there are at least hollow-out parts, with The part surface of the substrate body is made to expose to the hollow-out parts.
2. board structure as defined in claim 1, it is characterized by, the substrate body is Line construction.
3. board structure as defined in claim 1, it is characterized by, the substrate body bag Containing substrate and located at the suprabasil line construction, and the electric contact mat is located at circuit knot On structure.
4. board structure as defined in claim 1, it is characterized by, in the substrate body Also there is at least one conductive trace for being electrically connected with the electric contact mat.
5. board structure as defined in claim 1, it is characterized by, the electric contact mat Upper view plane is generally circular in shape or polygon.
6. board structure as defined in claim 1, it is characterized by, the hollow-out parts are located at The edge of the electric contact mat.
7. board structure as defined in claim 1, it is characterized by, the side of the hollow-out parts Face shape to should electric contact mat side view.
8. such as board structure according to claim 7, it is characterized by, outside the hollow-out parts The side of the parallel electric contact mat in side.
9. such as board structure according to claim 7, it is characterized by, the hollow-out parts flat Face is shaped as the sector at the ring-type for having breach or at least two intervals.
10. such as board structure according to claim 7, it is characterized by, the electric contact mat Upper view plane is generally circular in shape or polygon.
11. board structures as defined in claim 1, it is characterized by, also include that insulation is protected Sheath, its are located in the substrate body, and the insulating protective layer has perforate, are electrically connected with this Touch pad exposes to the perforate.
12. board structures as defined in claim 1, it is characterized by, the board structure is also Including the conductive component on the electric contact mat.
13. board structures as defined in claim 1, it is characterized by, the board structure is also Including the projection underlying metal layer on the electric contact mat.
CN201510652194.8A 2015-09-07 2015-10-10 Substrate structure Active CN106505059B (en)

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Application Number Priority Date Filing Date Title
TW104129480A TWI562256B (en) 2015-09-07 2015-09-07 Substrate structure
TW104129480 2015-09-07

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114303233A (en) * 2019-08-26 2022-04-08 思睿逻辑国际半导体有限公司 Metal layer patterning to minimize mechanical stress in integrated circuit packages
US20240049382A1 (en) * 2022-08-04 2024-02-08 Siliconware Precision Industries Co., Ltd. Carrier structure

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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