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CN1064161C - Integrated transducer-suspension structure for longitudinal recording - Google Patents

Integrated transducer-suspension structure for longitudinal recording Download PDF

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CN1064161C
CN1064161C CN93118812A CN93118812A CN1064161C CN 1064161 C CN1064161 C CN 1064161C CN 93118812 A CN93118812 A CN 93118812A CN 93118812 A CN93118812 A CN 93118812A CN 1064161 C CN1064161 C CN 1064161C
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pole piece
layer
pole
head
magnetic
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CN1099895A (en
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小罗伯特·E·琼斯
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HGST Inc
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Abstract

本发明提供一种用于纵向记录的组合式薄膜磁头传感器和悬浮系统,其第一、第二极片在后隙区较宽,在极头处较窄;弹性材料薄膜层的悬浮层至少覆盖第二极片水平部分,与第二极片和线圈电绝缘和磁绝缘,弹性材料延伸超过后隙区;第二极片垂直部分具有在邻接磁隙层一端上的实质垂直部位和在偏离于实质垂直部分一定角度的第二端上的部位。还提供制造该系统的方法及应用该系统的磁盘驱动器组件。本发明扩大了磁头应用范围,并能批量生产。

The invention provides a combined thin-film magnetic head sensor and suspension system for longitudinal recording, the first and second pole pieces are wider in the back gap area and narrower in the pole head; the suspension layer of the elastic material film layer covers at least A second pole piece horizontal portion electrically and magnetically insulated from the second pole piece and the coil, the elastic material extending beyond the back gap region; a second pole piece vertical portion having a substantially vertical portion on one end adjacent to the magnetic gap layer and at an offset from The location on the second end of the substantially vertical portion at an angle. A method of making the system and a disk drive assembly using the system are also provided. The invention expands the application range of the magnetic head and can be produced in batches.

Description

用于纵向记录的组合式薄膜磁头和悬浮系统及其制造方法Combined thin-film magnetic head and suspension system for longitudinal recording and manufacturing method thereof

转让给本发明的受让人的,并于1986年11月25日颁布的Hinkel等人的美国专利4624048公开了本发明使用的磁头基片的制造方法。US Patent 4,624,048, Hinkel et al., issued November 25, 1986, assigned to the assignee of the present invention, discloses a method of manufacturing a head substrate for use in the present invention.

转让给本发明的受让人的并于1974年11月19日颁布的Cuzner等人的美国专利3849800公开了本发明中使用的驱动装置中的旋转执行机构。US Patent No. 3,849,800 to Cuzner et al., issued November 19, 1974, assigned to the assignee of the present invention, discloses a rotary actuator in a drive mechanism used in the present invention.

转让给本发明的受让人的,并于1981年2月17日颁布的Jacobs的美国专利4251841公开了本发明使用的圆片形基片材料。US Patent 4,251,841 to Jacobs, issued February 17, 1981, assigned to the assignee of the present invention, discloses a disc-shaped substrate material useful in the present invention.

本发明涉及可移动磁存储器及其记录元件,特别涉及适于批量生产的传感器-悬浮装置及其制造方法,The present invention relates to a removable magnetic memory and its recording element, in particular to a sensor-suspension device suitable for mass production and its manufacturing method,

可移动磁存储器特别是磁盘驱动器很快成为所选择的存储器。因为,它具有可扩充的永久存储器存贮能力和相当低的成本。从这些存储器中精确地检索出所存贮的信息是关键,要求传感器的位置尽可能靠近介质,最好是转换器与介质接触。Removable magnetic storage, especially disk drives, is quickly becoming the storage of choice. Because it has expandable persistent memory storage capacity and relatively low cost. Accurately retrieving the stored information from these memories is key, requiring the sensor to be located as close to the medium as possible, preferably with the transducer in contact with the medium.

磁盘文件是信息存贮装置,它至少使用一个包含数据信息的具有同心数据磁轨的可旋转磁盘。传感器-滑动器-悬浮装置的组合包括一个传感器,用于从各个磁轨上读出数据,或将数据写入各个磁轨;一个滑动器,用于夹持传感器,使其邻近通常以上述介质飞动的磁轨;和一个悬浮装置,用于弹性夹持滑动器和磁轨上的传感器。组合装置上连接一个定位器,将传感器移动到所希望的磁轨上并使传感器在读出或写入时保持在磁轨中心线上。传感器安装在空气支承滑动器上,空气支承滑动器以转动磁盘产生的气垫来支撑传感器靠近磁轨。但是,可以使传感器与磁盘接触。悬浮装置具有高弹力刚度,并且在滑动器与操作杆之间具有尺寸稳定性。要求悬浮装置以尽可能低的载荷力保持传感器和滑动器紧挨在磁盘的数据表面。控制执行机构,根据读出操作所希望的数据,使传感器位于正确的磁轨上,或者在写入操作中,使传感器定位于数据布置的正确磁轨。Disk files are information storage devices that use at least one rotatable disk with concentric data tracks that contain data information. The sensor-slider-suspension combination consists of a sensor for reading data from or writing data to each of the magnetic tracks; a flying magnetic track; and a levitation device for elastically holding the slider and the sensor on the magnetic track. A positioner is attached to the combination to move the sensor to the desired track and keep the sensor on the track centerline while reading or writing. The sensor is mounted on an air bearing slider that uses the air cushion created by the rotating disk to support the sensor close to the magnetic track. However, it is possible to bring the sensor into contact with the disk. The suspension has high spring stiffness and dimensional stability between the slider and the lever. The suspension is required to hold the sensor and slider against the data surface of the disk with the lowest possible load force. The actuator is controlled to position the sensor on the correct track according to the desired data for the read operation, or to position the sensor on the correct track for the data arrangement during the write operation.

通用的磁盘驱动器中,传感器及其滑动器与悬浮装置是分开构成的,然后由操作者控制的精确操作使其相连。部件小,而且相互之间的定位必须精确。传感器必须精确地处于磁轨上,与此相应的是,悬浮装置必须精确地位于滑动器上。悬浮装置必须有弹性,有节矩,并使滑动器在磁盘转动方向滚动,还要防止摆动。悬浮装置在滑动器上的布置上的任何误差都有损于其性能和寿命。即使是悬浮装置与滑动器正确定位,也必须使连接传感器的导线连接到传感器上。导线通常是直接沿着悬浮装置,与位于悬浮装置上的或位于执行机构上的放大器相连。导线在提供良好的电互连的同时,肯定无法增强滑动器的弹性刚度。In a conventional disk drive, the sensor and its slider are constructed separately from the suspension and then connected by precise operation controlled by the operator. The components are small and must be positioned precisely relative to each other. The sensor must be positioned precisely on the magnetic track, and accordingly the levitation must be positioned precisely on the slider. The suspension must be elastic, articulated, and allow the slider to roll in the direction of disk rotation, but also prevent wobbling. Any error in the placement of the suspension on the slider impairs its performance and life. Even if the levitation is properly positioned with the slider, it is necessary to have the wires connecting the sensor connected to the sensor. The wires usually run directly along the suspension to an amplifier located on the suspension or on the actuator. Wires certainly do not enhance the elastic stiffness of the slider while providing good electrical interconnection.

通常,导线是由操作者通过焊接来连接的,例如,使其与传感器的输出和放大器两者连接。误差再次会引起整个组合损坏。Typically, wires are connected by the operator by soldering, for example, to both the output of the sensor and the amplifier. Errors can again cause damage to the entire combination.

传感器/滑动器组合或磁头与介质接触或轻触所引起的特有的问题是,造成介质磨损并有可能使介质破碎。为了减少磨损和“破碎”的可能性,已经知道的是,必须使悬浮系统的体积降到最小。小的体积可以很好地控制对介质上的磁头的“碰撞”,由此减少对介质损坏和磨损的可能性。The unique problem caused by the contact or light touch of the sensor/slider combination or the head with the media is that it causes the media to wear and possibly break it. In order to reduce wear and the possibility of "crushing", it is known that the volume of the suspension system must be minimized. The small size allows for better control of "bumping" the head on the media, thereby reducing the potential for damage and wear to the media.

为此,公开了许多种机构,这些机构采用“簧片”方式来制作传感器-悬浮装置。在垂直记录场合工作的结构中,簧片装置允许磁头和悬浮装置易于形成:(ⅰ)精确的喉部高度控制;(ⅱ)精确的接触记录传感器的布置或通过空气支承的形成来获得规定的飞动高度;(ⅲ)滑动器与悬浮装置连接,和(ⅳ)易于确定导线路径。这些结构,如Hamilton美国专利5041932中所述的,例如包括一个水平传感器,它具有水平第一极片和水平第二极片,第二极片有一个垂直部分,该垂直部分与第一极片形成相互隔开的磁隙。To this end, a number of mechanisms have been disclosed which use a "reed" approach to make the sensor-levitation. In a configuration that works in perpendicular recording applications, the reed arrangement allows easy formation of the head and suspension: (i) precise throat height control; (ii) precise placement of contact recording transducers or by formation of air bearings to obtain prescribed flying height; (iii) slider and suspension connection, and (iv) ease of wire routing. These structures, such as those described in Hamilton US Pat. No. 5,041,932, include, for example, a horizontal sensor having a horizontal first pole piece and a horizontal second pole piece. The second pole piece has a vertical portion that is aligned with the first pole piece. Magnetic gaps separated from each other are formed.

如上所述,接触记录可获得较高的信号和较大的分辩率,而不受悬浮高度的改变的限制。遗憾的是,由接触记录带来的磨损在文件的寿命期间通常估计为400微英寸,这是不能允许的。另一个主要缺陷是,以前这类磁头只适合于垂直记录而不适合于纵向介质。所有这些,使上述设计的垂直记录磁头不适合于高密度记录。As mentioned above, contact recording can obtain higher signal and greater resolution, not limited by the change of levitation height. Unfortunately, wear from contact recording is typically estimated at 400 microinches over the life of the document, which cannot be tolerated. Another major drawback is that previous heads of this type were only suitable for perpendicular recording and not for longitudinal media. All of these make the perpendicular recording head of the above-mentioned design unsuitable for high-density recording.

本发明的目的是,提供一个增强型的移动式磁存储器,它具有一个包含增强型悬浮-传感器组合的磁头结构。It is an object of the present invention to provide an enhanced mobile magnetic memory having a magnetic head structure comprising an enhanced suspension-sensor combination.

本发明的另一目的是,提供一个增强型悬浮-传感器组合磁头结构。Another object of the present invention is to provide an enhanced suspension-sensor combination magnetic head structure.

本发明的又一目的是,制成一个适合于纵向记录的传感器-悬浮结构。Yet another object of the invention is to make a sensor-suspension suitable for longitudinal recording.

本发明的进一步的目的是,制造一种耐磨并且接触凸点外形变化的纵向磁头。A further object of the present invention is to manufacture a longitudinal magnetic head which is wear-resistant and has a variable shape of the contact bumps.

本发明是一种纵向记录用的悬浮装置与传感器磁头的组合装置,它可以用于接触记录或在介质上飞动。传感器包括水平第一极片和截面呈水平部分和垂直部分的第二极片。在第一极片与第二极片的垂直部分之间形成磁隙。极片的形状应能避免磁饱和并有窄的极头。悬浮装置主要由两层构成,第一层是一绝缘层,它将第一水平极片与第二极片的水平部分分开。第二层是一绝缘层,它复盖并保护传感器层。The present invention is a combined device of suspension device and sensor magnetic head for longitudinal recording, which can be used for contact recording or flying on the medium. The sensor includes a horizontal first pole piece and a second pole piece with a horizontal section and a vertical section in section. A magnetic gap is formed between the first pole piece and the vertical portion of the second pole piece. The shape of the pole piece should avoid magnetic saturation and have a narrow pole head. The levitation means consists essentially of two layers, the first being an insulating layer which separates the first horizontal pole piece from the horizontal portion of the second pole piece. The second layer is an insulating layer which covers and protects the sensor layer.

传感器-悬浮装置的组合结构的制造方法中,是在基片上形成行和列结构的许多布图光刻胶的接触凸点。然后在基片上淀积一层分离层。在每个接触凸点上布图形成与其部分接触的第一极片。在每个第一极片上淀积一层厚的磁性材料后气隙层。在耐磨层之后淀积一层厚的电绝缘和磁绝缘材料。这一层是组合结构中悬浮部件的主要部分。该悬浮层被研磨平,并在每个极片用的悬浮薄膜上形成一层初级线圈层。在绝缘层上与每个第一极片对应地淀积磁性材料层的第二极片并至少部分覆盖初级线圈层。第二极片层上覆盖一绝缘层,但允许与初级线圈接触。然后在该绝缘层上沿着连结到线圈电路的导线上构成线圈电路。导线和随后淀积的导电栓用于与每个传感器的驱动电路(未画出)的连接。然后淀积第二层厚的电绝缘和磁绝缘材料,形成组合结构的悬浮部分的第二个和最后的主要部分,该层顶部被磨去,使其与早已形成的导电栓电接触。由于组合件是以行列形式淀积在圆形基片上的,然后把每个组件均分割或许多组件的行。In the manufacturing method of the combination structure of the sensor-suspension device, contact bumps of many patterned photoresists in a row and column structure are formed on the substrate. A release layer is then deposited on the substrate. A pattern is formed on each contact bump to partially contact the first pole piece. A thick rear air gap layer of magnetic material is deposited on each first pole piece. A thick layer of electrically and magnetically insulating material is deposited after the wear layer. This layer is the main part of the suspended parts in the combined structure. The suspension layer is ground flat and forms a primary coil layer on top of the suspension film for each pole piece. A second pole piece of a magnetic material layer is deposited on the insulating layer corresponding to each first pole piece and at least partially covers the primary coil layer. The second pole piece layer is covered with an insulating layer, but is allowed to be in contact with the primary coil. A coil circuit is then formed on the insulating layer along wires connected to the coil circuit. Wires and subsequently deposited conductive plugs are used to interface with each sensor's drive circuitry (not shown). A second thick layer of electrically and magnetically insulating material is then deposited to form the second and final major portion of the suspended portion of the combined structure, the top of this layer being ground away to make electrical contact with the already formed conductive plug. Since the assemblies are deposited on the circular substrate in rows and columns, each assembly is then divided into rows or rows of assemblies.

将部分行组件的端部磨光并淀积一层磁隙层。然后在磁隙层中形成接触通道,露出第二极片层。在每行上布图淀积磁性材料的第三极片,以形成第二极片的垂直部分。然后,在制成的悬浮和传感器组件的行上淀积保护涂层。然后将组件行分成许多单个的组合结构。紧接着,通过对分离进行溶解或腐蚀,除去基片,留下部分制成的组合结构。除去气隙部分,第三极片和延伸到原始接点下面的最终保护层,完成组合结构。最好是采用淀积氧化铝(Al2O3)层来形成悬浮装置。切割氧化铝层然后将构成的悬浮装置从基片表面分离,构成所希望的悬浮结构。基片的去除最好采用分离层来完成。The ends of some of the row assemblies are ground and a magnetic gap layer is deposited. Contact channels are then formed in the magnetic gap layer, exposing the second pole piece layer. A third pole piece of magnetic material is patterned on each row to form a vertical portion of the second pole piece. A protective coating is then deposited on the finished rows of suspension and sensor assemblies. The component rows are then split into many individual composite structures. Next, the substrate is removed by dissolving or etching the separation, leaving the partially fabricated composite structure. Removal of the air gap portion, the third pole piece and the final protective layer extending below the original contact completes the combined structure. Preferably, a deposited aluminum oxide (Al 2 O 3 ) layer is used to form the suspended device. Cutting the alumina layer then separates the formed suspension from the substrate surface to form the desired suspension structure. Removal of the substrate is preferably accomplished using a release layer.

由于本发明在接触凸点表面上提供了一个磁极之间的窄气隙,因此,有可能进行纵向记录。这就大大提高了本发明的适用性,使其应用范围明显地超出现有技术。此外,本发明基本上是平面淀积结构,使其组件的主要处理工艺可以直接在圆形基片表面上进行。这就大大提高了本发明的实用性,并使其组合能批量生产。Since the present invention provides a narrow air gap between magnetic poles on the contact bump surface, longitudinal recording is possible. This has just greatly improved the applicability of the present invention, and its scope of application obviously exceeds prior art. Furthermore, the present invention is essentially a planar deposition structure, so that the main processing processes of its components can be carried out directly on the circular substrate surface. This greatly improves the practicability of the present invention and enables its combination to be mass-produced.

本发明是另一优点是在磁头结构上使用了耐磨材料,从而使磁头的极头区得到保护。Another advantage of the present invention is that wear-resistant materials are used in the structure of the magnetic head, so that the pole head area of the magnetic head is protected.

下面将结合本发明的优选实施例,参考附图对本发明前述目的及其它目的,本发明的特征和优点作详细说明。其中,The foregoing and other objects, features and advantages of the present invention will be described in detail below in conjunction with preferred embodiments of the present invention and with reference to the accompanying drawings. in,

图1是一个磁记录机构的俯视图,它使用本发明的悬挂组件,在与磁盘文件的磁盘表面之间的传感关系中由旋转执行机构定位;Figure 1 is a top view of a magnetic recording mechanism utilizing the suspension assembly of the present invention positioned by a rotary actuator in sensing relationship to the disk surface of a disk file;

图2是按本发明制成的传感器-悬浮装置组件的透视图,该组件与图1的磁盘驱动器配合使用;Figure 2 is a perspective view of a sensor-suspension assembly made in accordance with the present invention for use with the disk drive of Figure 1;

图3是一个基片的透视图,在该基片上制成以行和列形式排列的用以构成图2所示组合件的许多结构;Figure 3 is a perspective view of a substrate on which a number of structures arranged in rows and columns to form the assembly shown in Figure 2 are formed;

图4是沿图3中4-4线的剖面图;Fig. 4 is a sectional view along line 4-4 in Fig. 3;

图5是取自图3所示基片上的一行结构的透视图,并安装用以进一步的处理;Figure 5 is a perspective view taken of a row of structures on the substrate shown in Figure 3, mounted for further processing;

图6A和6B是按本发明的传感器的实施例剖面图;和6A and 6B are cross-sectional views of embodiments of sensors of the present invention; and

图7是无绝缘层和导体层的本发明的传感器透视图。Fig. 7 is a perspective view of the sensor of the present invention without the insulating layer and the conductor layer.

本发明的优选实施例最好是用于大型多个磁盘驱动器,但也可以用于通常为个人微型计算机所使用的单个磁盘驱动器,或其它任何形式的介质驱动器,例如磁带驱动器。图1所示的数据记录磁盘文件包括一个外壳8,外壳中安装一个旋轨执行机构10,一个相关的存贮磁盘12和旋转磁盘12的驱动装置13。旋转执行机构10驱动本发明的组合件在磁盘12上按一弧形路径移动。旋转执行机构10包括一个音圈电机,它包括可在有铁芯16的固定永久磁铁组件的磁场中移动的线圈14。执行臂20固定在可动线圈14上。执行臂20的另一端固定在本发明的并按上述方法制成的传感器-悬浮装置组合件22上。组合件22包括一个传感器-滑动块24和一个悬浮段26。悬浮段26可以在磁盘12表面上把传感器滑动块24支撑在由磁盘12旋转产生的空气支承或空气垫上。最好是悬浮段26支撑传感器-滑动块24与磁盘12的表面相接触。空气支承或空气支承表面指的是传感器与磁盘表面平行并邻接的表面。它包括两种构型,一种是设计成在操作中传感器在磁盘上飞动,一种是设计成在操作中传感器与记录介质、磁盘12接触。执行臂20可以包括多个臂,每个臂支撑其各自的组合件22,每个组合件22与位于数据记录磁盘驱动器组合中的各磁盘的表面对应。因此,例如,磁盘12也可以有安装在执行臂20上的一个组合件22,使其与磁盘12下表面上的记录介质表面相对应。此外,其他组合件也与包括在磁盘驱动器组合中的其他磁盘的顶侧和底侧相对应。磁盘驱动器组合中传感器的存取由执行机构10控制。The preferred embodiment of the present invention is preferably used with large multiple disk drives, but can also be used with a single disk drive commonly used in personal microcomputers, or any other form of media drive, such as a tape drive. The data recording disk file shown in FIG. 1 comprises a housing 8 in which is mounted a rotary rail actuator 10 , an associated storage disk 12 and drive means 13 for rotating the disk 12 . The rotary actuator 10 drives the assembly of the present invention to move on a magnetic disk 12 in an arcuate path. The rotary actuator 10 includes a voice coil motor including a coil 14 movable in the magnetic field of a fixed permanent magnet assembly with an iron core 16 . The actuator arm 20 is fixed on the movable coil 14 . The other end of the actuator arm 20 is fixed on the sensor-suspension device assembly 22 of the present invention and manufactured according to the method described above. Assembly 22 includes a sensor-slider 24 and a suspension section 26 . Suspension section 26 may support sensor slider 24 on an air bearing or cushion created by disk 12 rotation on the disk 12 surface. Preferably, the suspension section 26 supports the sensor-slider 24 in contact with the surface of the disk 12 . Air bearing or air bearing surface refers to the surface of the transducer that is parallel to and adjoins the surface of the disk. It includes two configurations, one is designed so that the sensor flies over the disk during operation, and the other is designed so that the sensor is in contact with the recording medium, disk 12, during operation. Actuator arm 20 may comprise a plurality of arms, each arm supporting its respective assembly 22, each assembly 22 corresponding to the surface of each disk located in the data recording disk drive assembly. Thus, for example, the magnetic disk 12 may also have an assembly 22 mounted on the actuator arm 20 such that it corresponds to the surface of the recording medium on the lower surface of the magnetic disk 12 . In addition, other assemblies also correspond to the top and bottom sides of other disks included in the disk drive assembly. Access to the sensors in the disk drive assembly is controlled by actuator 10 .

传感器-悬浮装置组合件22中的悬浮段26给传感器-滑动块24一个总是垂直于磁盘12表面的负荷。该垂直负荷使传感器-滑动块24保持在磁盘12上或磁盘12的上方。由驱动装置13使磁盘12的旋转过程中,组合件22与磁盘12保持接触,以便读出或写入数据。作为一种替换,组合件22可以设计成利用传感器-滑动块24与磁盘12之间产生的浮力或向上力对抗由悬浮段26加给传感器-滑动块24上的负荷而在磁盘12上面飞动。接触记录是本发明优选的实施例。The suspension segments 26 in the sensor-suspension assembly 22 give the sensor-slider 24 a load that is always perpendicular to the disk 12 surface. This vertical load keeps the sensor-slider 24 on or above the disk 12 . During the rotation of the magnetic disk 12 by the drive means 13, the assembly 22 remains in contact with the magnetic disk 12 for reading or writing data. As an alternative, the assembly 22 can be designed to fly above the disk 12 by utilizing the buoyancy or upward force generated between the sensor-slider 24 and the disk 12 against the load imposed on the sensor-slider 24 by the suspension section 26 . Contact logging is a preferred embodiment of the invention.

操作中,传感器-滑动块24借助于线圈14移动到磁盘12的数据表面上的同心数据磁轨中的所希望的磁轨上,线圈14在磁体组件的磁场中运动。要求传感器-滑动块24迅速地从一个磁轨移向另一个磁轨。必须使滑动块24的传感器在最短的时间里真正定位于所希望的磁轨上。本发明所用的旋转执行机构如US 3849800中所述。应注意的是,图1中所示的执行机构10是一个旋转执行机构,其他类型的传统磁盘文件所用的直线执行机构,在本发明中也能使用。In operation, the sensor-slider 24 is moved to a desired one of the concentric data tracks on the data surface of the magnetic disk 12 by means of the coil 14 which moves in the magnetic field of the magnet assembly. The sensor-slider 24 is required to move rapidly from one magnetic track to the other. The sensors of the slider 24 must be actually positioned on the desired magnetic track in the shortest possible time. The rotary actuator used in the present invention is as described in US 3849800. It should be noted that the actuator 10 shown in FIG. 1 is a rotary actuator, and other types of linear actuators used in conventional disk files can also be used in the present invention.

组合件22的悬浮段26必须有径向刚度,当它夹持滑动块24的传感器处于磁盘12的数据表面上方时在节矩和滚动方向上基本上有弹性。如果需要,组合件22的悬浮段26上也可以制作一个集成电路组件28。参考标号28指示的是一个集成电路放大器。图2中给出了图1所示组合件22的放大结构。The suspension section 26 of the assembly 22 must be radially rigid and substantially elastic in the pitch and roll directions as it holds the transducer of the slider 24 above the data surface of the disk 12. An integrated circuit package 28 may also be formed on the suspended section 26 of the assembly 22, if desired. Reference numeral 28 designates an integrated circuit amplifier. An enlarged structure of the assembly 22 shown in FIG. 1 is shown in FIG. 2 .

现在参看图2,其中相同的数字表示各个图中相同的特征和结构元件。所示的组合件22位于磁盘12上。磁盘12按箭头36所指方向旋转。传感器-滑动块24的传感器38(所示的垂直极截面)位于邻近磁盘12处,用以在磁盘12上读出或写入磁性转换。本发明的水平传感器-悬浮装置其位置平行于磁盘12,以便于说明本发明,因为多数磁盘驱动器均有水平安装的磁盘。显然,垂直安装的磁盘也被等效覆盖,在那样的组装中,“水平”和“垂直”单元必然要颠倒,但传感器仍然平行于磁盘表面运行。Referring now to FIG. 2, like numerals indicate like features and structural elements in the various figures. Assembly 22 is shown on disk 12 . Disk 12 rotates in the direction indicated by arrow 36 . The sensor 38 of the sensor-slider 24 (vertical pole cross-section shown) is located adjacent to the magnetic disk 12 for reading or writing magnetic transitions on the magnetic disk 12 . The level sensor-suspension of the present invention is positioned parallel to the disk 12 for ease of illustration of the invention since most disk drives have disks mounted horizontally. Obviously, vertically mounted disks are also covered equivalently, in that assembly the "horizontal" and "vertical" units would necessarily be reversed, but the sensor would still run parallel to the surface of the disk.

悬浮段26使传感器38悬浮在磁盘12上面。该实施例中的悬浮段26包括第一绝缘层40和第二绝缘层42。在这两层之间包封一导电电路层(未画出)。由悬浮段构成的支撑主体由第一和第二绝缘层40和42保持。传感器38电气连接到导电电路层上。设置电连接导体凸点48给位于相邻处的放大器提供互连。可以设置集成电路放大器(没画出)用以代替导电凸点。图1中的淀积的集成电路放大器是放大器布置的一种可能的例子。Suspension section 26 suspends sensor 38 above disk 12 . The suspension segment 26 in this embodiment includes a first insulating layer 40 and a second insulating layer 42 . A conductive circuit layer (not shown) is encapsulated between these two layers. The supporting body constituted by the suspended segments is held by the first and second insulating layers 40 and 42 . Sensor 38 is electrically connected to the conductive circuit layer. Electrical connection conductor bumps 48 are provided to provide interconnection to adjacently located amplifiers. Integrated circuit amplifiers (not shown) may be provided in place of conductive bumps. The deposited integrated circuit amplifier in Figure 1 is one possible example of an amplifier arrangement.

绝缘层40和42使导电层与传感器38的可能导电的磁性部分之间绝缘。两层绝缘层40和42提供了在磁盘32的磁轨上定位夹持传感器38的悬浮支承。Insulating layers 40 and 42 insulate the conductive layer from the possibly conductive magnetic portion of sensor 38 . The two insulating layers 40 and 42 provide a suspension for positioning the clamp sensor 38 on the magnetic tracks of the magnetic disk 32 .

图3给出了形成图2所示结构的组合件22的工艺步骤。组合件22的成批制造是用一个非磁性的圆形基片50完成的。基片50的厚度T应足以支撑制造中的结构。在基片50上以行和列的形式淀积多个组合件22。图示为5行的每行52和图示为4列的每列54说明了构成多行的组件结构,然后每行组件可再分成单个单元。在一个单片基片50上可以制出比图3所示的行52和列54所示数量多或少的组合件,所能制出的组件数取决于所用基片的大小和单个组件的尺寸大小。FIG. 3 illustrates the process steps for forming the assembly 22 of the structure shown in FIG. 2 . Mass fabrication of assembly 22 is accomplished using a non-magnetic circular substrate 50 . The thickness T of the substrate 50 should be sufficient to support the structure under fabrication. A plurality of assemblies 22 are deposited on a substrate 50 in rows and columns. Each row 52, shown as 5 rows, and each column 54, shown as 4 columns, illustrate the structure of modules that make up multiple rows, each row of modules can then be subdivided into individual cells. On a monolithic substrate 50, more or fewer assemblies than those shown in rows 52 and columns 54 shown in FIG. Size.

仍旧参看图3,一行52A是用锯56从基片50上切割开的。行52A在端面59处有传感器部分38。行52A经过图5和6所示的方法再处理,然后用锯58或其他切割方法将其分割成单个单元,如图3所示。图4给出的是作为组合件22的第一部分的淀积在基片50上的淀积层的剖面图。Still referring to FIG. 3 , a row 52A is cut from substrate 50 with saw 56 . Row 52A has sensor portion 38 at end face 59 . Row 52A is reprocessed by the method shown in FIGS. 5 and 6 and then divided into individual units by saw 58 or other cutting means, as shown in FIG. 3 . FIG. 4 shows a cross-sectional view of the deposited layer deposited on a substrate 50 as a first part of the assembly 22. As shown in FIG.

现在参看图4,组合件22包括构成传感器-滑动块24和悬浮段26的许多层。截面图中,本发明所考虑的水平传感器构成图1和2所示传感器-滑动块24的全部或至少其一部分。传感器包括水平放置的第一极片62,即平行于磁盘(未画出)的接触平面。第一极片62形成有倾斜的接触区63,倾斜接触区63可以通过模压原始基片50的表面制成,如图4所示。圆形基片50的表面在淀积制造极片62的材料之前涂复一层分离层60。在后面的工艺中溶去分离层60使圆形基片50与极片62分开。淀积与极片62连接的磁性元件64。磁性元件64形成之后,圆形基片50的整个分离层60表面涂复一层耐磨材料65和一层绝缘层66。耐磨层65复盖传感器部分24与磁盘12之间的接触面的大部分(见图2)。耐磨层65和绝缘层66淀积之后被磨平给随后的淀积层提供一光滑表面,并暴露出元件64的顶表面。然后在绝缘层66上形成传感器线圈用的第一组导体带68,并涂复一层电绝缘材料的线圈绝缘层70。然后在绝缘层70上形成第二极片的水平部分72。第二极片水平部分72与磁性元件64接触构成传感器的后气隙。在圆形基片的全部表面上淀积一层线圈绝缘层74的附加层。在线圈绝缘层74上淀积第二组线圈导体带76。第二组线圈导体带76与第一组线圈导体带互连,围绕传感器部分24的第二极片的水平部分72提供激磁导体线圈。将导体带68和76与淀积在导体线圈绝缘层74上的导体层78电气连接以构成线圈。该线圈与传感器的磁性元件构成一体,使传感器在磁盘12上进行磁转换的读出和写入。线圈感应的信号通过导体层78的自由端处形成的导体栓80由导体层输入电路系统(未画出)。在导体线圈带76和导体层78上淀积第二电绝缘层82。该第二绝缘层82和第一绝缘层66是悬浮段26的支撑结构。导体凸点48(见图2)然后形成在第二绝缘层82上,并与导体栓80相连接。导体凸点48可能通过如图1所示的集成电路28与相应的磁盘驱动器的电路系统互连。Referring now to FIG. 4 , assembly 22 includes a number of layers that make up sensor-slider 24 and suspension segment 26 . In cross section, the level sensor considered by the invention constitutes all or at least a part of the sensor-slider 24 shown in FIGS. 1 and 2 . The sensor comprises a first pole piece 62 positioned horizontally, ie parallel to the contact plane of the magnetic disk (not shown). The first pole piece 62 is formed with an inclined contact area 63 which may be formed by embossing the surface of the original substrate 50 as shown in FIG. 4 . The surface of the circular substrate 50 is coated with a release layer 60 prior to depositing the material for making the pole piece 62 . The separation layer 60 is dissolved to separate the circular substrate 50 from the pole piece 62 in a subsequent process. A magnetic element 64 connected to pole piece 62 is deposited. After the magnetic element 64 is formed, the entire surface of the separation layer 60 of the circular substrate 50 is coated with a wear-resistant material 65 and an insulating layer 66 . Abradable layer 65 covers most of the interface between sensor portion 24 and magnetic disk 12 (see FIG. 2 ). Wear resistant layer 65 and insulating layer 66 are ground down after deposition to provide a smooth surface for subsequently deposited layers and to expose the top surface of element 64 . A first set of conductor strips 68 for the sensor coils are then formed on insulating layer 66 and coated with a coil insulating layer 70 of electrically insulating material. The horizontal portion 72 of the second pole piece is then formed on the insulating layer 70 . The second pole piece horizontal portion 72 is in contact with the magnetic element 64 to form the rear air gap of the sensor. An additional layer of coil insulation 74 is deposited over the entire surface of the circular substrate. On the coil insulation layer 74 is deposited a second set of coil conductor strips 76 . A second set of coil conductor strips 76 interconnects the first set of coil conductor strips, providing an excitation conductor coil around the horizontal portion 72 of the second pole piece of the sensor portion 24 . Conductor strips 68 and 76 are electrically connected to conductor layer 78 deposited on conductor coil insulating layer 74 to form the coil. The coil is integrated with the magnetic element of the sensor, enabling the sensor to perform magnetic conversion reading and writing on the magnetic disk 12 . The signal induced by the coil passes through the conductor plug 80 formed at the free end of the conductor layer 78 and enters the circuit system (not shown) from the conductor layer. A second electrically insulating layer 82 is deposited over the conductor coil strip 76 and the conductor layer 78 . The second insulating layer 82 and the first insulating layer 66 are supporting structures of the suspension section 26 . Conductor bumps 48 (see FIG. 2 ) are then formed on second insulating layer 82 and connected to conductor studs 80 . Conductor bumps 48 may be interconnected with corresponding disk drive circuitry via integrated circuit 28 as shown in FIG. 1 .

图4所示的淀积工艺完成之后,将圆形基片50切割成行,如图3所示。图3中,行52A是用锯56从圆形基片50上分割下来的。然后用粘接剂将行52A固定在例如运送工具90上,见图5,而将行52A的端面59露出。然后将行52A的端面59研磨平。对传感器进一步处理使之成为图6A所示的一个实施例。After the deposition process shown in FIG. 4 is completed, the circular substrate 50 is cut into rows, as shown in FIG. 3 . In FIG. 3, row 52A is cut from circular substrate 50 using saw 56. As shown in FIG. The row 52A is then secured, for example, to a transport tool 90 with adhesive, see FIG. 5, leaving the end face 59 of the row 52A exposed. The end face 59 of row 52A is then ground flat. Further processing of the sensor leads to an embodiment as shown in FIG. 6A.

现在参看图6A,行52A的端面59被研磨平,并形成了一层磁隙层92。第二极片的水平部分的端面露出并淀积一个垂直部分94。参考数96表示的第二极片包括它的水平部分72和它的垂直部分94。这样,传感器部分24包括与磁隙92构成一体的第二极片96,见图4,第一极片层62和磁性元件64。垂直部分94制成后,淀积保护层98。现在就制成了行52A的结构,并准备将其分割成磁盘12用的单个组合件22,见图2。如图3所示,锯58将包含多个制成的传感器的行52A分割成很多单个单元。第二极片96用的垂直部分的第二种类型如图6B所示。Referring now to FIG. 6A, end faces 59 of row 52A are ground flat and a magnetic gap layer 92 is formed. The end face of the horizontal portion of the second pole piece is exposed and deposited with a vertical portion 94 . The second pole piece, indicated by reference numeral 96, comprises its horizontal portion 72 and its vertical portion 94. Thus, sensor portion 24 includes second pole piece 96 integrally formed with magnetic gap 92 , see FIG. 4 , first pole piece layer 62 and magnetic element 64 . After vertical portion 94 is formed, protective layer 98 is deposited. The row 52A structure is now completed and ready to be divided into individual assemblies 22 for disks 12, see FIG. As shown in FIG. 3, the saw 58 divides the row 52A containing the plurality of fabricated sensors into a number of individual units. A second type of vertical section for the second pole piece 96 is shown in Figure 6B.

现在参看图6B,在行52A的端表面59上也是首先淀积磁隙层92。再对磁隙层92进行研磨使其与垂直方向成夹角X,露出第二极片的水平部分72的端部。淀积磁性材料层构成垂直部分99。参考数96所表示的第二极片包括水平部分72和垂直部分99。因此,传感器部分24包括与磁隙92构成一体的第二极片96,第一极片层62和磁性元件64。垂直部分99制成后,如上述的,淀积保护层98,与对图6A和图3的说明相同,现在已制成行52A,该行准备分割成单个组件22。Referring now to FIG. 6B, the magnetic gap layer 92 is also deposited first on the end surface 59 of the row 52A. The magnetic gap layer 92 is then ground to form an angle X with the vertical direction, exposing the end of the horizontal portion 72 of the second pole piece. A layer of deposited magnetic material forms vertical portion 99 . A second pole piece, indicated by reference numeral 96 , includes a horizontal portion 72 and a vertical portion 99 . Thus, sensor portion 24 includes second pole piece 96 integrally formed with magnetic gap 92 , first pole piece layer 62 and magnetic element 64 . After the vertical sections 99 have been formed, a protective layer 98 is deposited as described above, as described for FIGS.

再看图4,包括传感器部分24和悬浮部分26的制成组合件22,通过溶去分离层60而使其与基片50公开。分离层60可以是镀铜。另一种分离层材料可以是钨。例如采用过硫酸铵可以容易地除去铜分离层,而不会对传感器制造过程中通常使用的氧化铝基片造成腐蚀。一旦制成了组合件,就很容易将其应用于硬磁盘读出系统,这对本领域的技术人员是显而易见的。Referring again to FIG. 4, the fabricated assembly 22, including the sensor portion 24 and the suspension portion 26, is released from the substrate 50 by dissolving the separation layer 60. As shown in FIG. The separation layer 60 may be copper-plated. Another separation layer material may be tungsten. For example, ammonium persulfate can be used to easily remove the copper separation layer without causing corrosion to the aluminum oxide substrate usually used in the sensor manufacturing process. Once the assembly is made, it is readily applicable to hard disk readout systems, as will be apparent to those skilled in the art.

圆形基片50可以是已有技术中任何适用的材料。不要求基片50必须是氧化铝-钛-碳化物或硅。分离层60,例如可以是导电材料,它作为随后的淀积层例如传感器的第一极片层62的籽晶或电镀基层。导电材料最好是铜镀层,但也可以是金或其他合适的导体。导线78沿悬浮段26布线至导体栓80。导线应由两根扁平的薄导线构成带状线,因为悬浮段26是薄的,并且所要求的应力对称与带状线设计相适应。最好通过淀积氧化铝作为第一和第二绝缘层66和62来制造悬浮段26。如已有技术那样,导电栓80和导电凸点48用标准的导电栓和导电凸点制造技术制造,以制成薄膜传感器-悬浮装置组合件。可以用厚的淀积氧化铝包封带包护层98的传感器。例如氧化铝薄层可以构成磁隙92,例如坡莫合金可以用作磁性材料,形成传感器的极片部分。传感器极片件的形状如图7所示。为了显示本发明传感器的磁性部分的优选形状,图部设画出线圈和传感器。Circular substrate 50 may be any suitable material known in the art. Substrate 50 is not required to be alumina-titanium-carbide or silicon. Separation layer 60, which may be, for example, a conductive material, serves as a seed or plating base for a subsequently deposited layer, such as the first pole piece layer 62 of the sensor. The conductive material is preferably copper plating, but could also be gold or other suitable conductor. The wire 78 is routed along the suspension section 26 to the conductor plug 80 . The conductors should consist of two flat thin wires forming the stripline, since the suspended section 26 is thin and the required stress symmetry is compatible with the stripline design. Suspension section 26 is preferably fabricated by depositing aluminum oxide as first and second insulating layers 66 and 62 . The conductive plugs 80 and conductive bumps 48 are fabricated using standard conductive plug and conductive bump fabrication techniques to form the thin film sensor-suspension assembly, as is known in the art. The sensor with cladding 98 may be encapsulated with thick deposited alumina. For example a thin layer of aluminum oxide may form the magnetic gap 92 and for example permalloy may be used as the magnetic material forming the pole piece portion of the sensor. The shape of the pole piece of the sensor is shown in FIG. 7 . In order to show the preferred shape of the magnetic part of the sensor of the present invention, the figures show the coil and the sensor.

现在参看图7,本发明的优选实施例包括一个传感器,该传感器兼有Jones,Jr等人的美国专利4190872的优点,该专利于1980年2月26日颁布并转让给本发明的受让人。传感器包括的第一极片层62,通过磁性元件64在后气隙100处磁性地与第二极片的水平部分72连接。第二极片的垂直部分94磁性地与其水平部分72连接,并由磁隙92与第一极片62分开。第一极片在其后气隙100处的宽度大于在其极头部102的宽度。同样,第二极片的水平部分在后气隙100处的宽度大于与垂直部分94连接的端部104处的宽度。垂直部分94在与极片72的端部104连接的端部宽度大于它的极头106的宽度,传感器的优选形状如图7所示,它有窄的极头结构,但避免了磁力线沿极片的饱和。Referring now to FIG. 7, a preferred embodiment of the present invention includes a sensor that incorporates the advantages of Jones, Jr. et al., U.S. Patent 4,190,872, issued February 26, 1980, and assigned to the assignee of the present invention . The sensor comprises a first pole piece layer 62 magnetically connected by a magnetic element 64 to a horizontal portion 72 of a second pole piece at a rear air gap 100 . The vertical portion 94 of the second pole piece is magnetically connected to its horizontal portion 72 and is separated from the first pole piece 62 by a magnetic gap 92 . The width of the first pole piece is greater at its rear air gap 100 than at its pole head 102 . Likewise, the horizontal portion of the second pole piece has a greater width at the rear air gap 100 than at the end 104 where the vertical portion 94 joins. Vertical portion 94 is greater than the width of its pole head 106 at the end that is connected with the end 104 of pole piece 72, and the preferred shape of sensor is as shown in Figure 7, and it has narrow pole head structure, but has avoided magnetic field line along pole. Saturation of slices.

尽管对本发明已详细地示出并参照优选的实施例做了详细说明,但应该了解,在不脱离本发明的实质和范围的情况下,本领域的技术人员可以按美国专利4190872的实施例所述的形式在基片上制作传感器,在不超出本发明的范围的情况下,也可以使用其他结构。基片可以用Jacobs等人的美国专利4251841的主题所述的材料制成,其题目为“磁头滑动装置”,并转让给本发明的受让人。按优选实施例的悬浮部分可以是聚酰亚胺材料和淀积其上的金属层构成的双层材料,使其具有悬浮件所需的足够弹性和刚度。必须注意,假若单层材料具有适合的厚度和强度。也可以用单层材料制造悬浮件。还应该懂得的是,有许多导电材料能用做导电电路和传感器引线。铜和金较好,但如已有技术所熟知的,许多其他材料也适用。尽管这里说明了空气支承悬浮,但本发明也包括接触记录,悬浮装置使传感器与记录介质接触。下面的权利要求记载了发明要求保护的范围。Although the present invention has been shown in detail and described in detail with reference to preferred embodiments, it should be understood that, without departing from the spirit and scope of the present invention, those skilled in the art can follow the embodiments described in U.S. Patent 4,190,872 The sensor is fabricated on a substrate in the manner described above, but other structures can also be used without departing from the scope of the present invention. The substrate may be made of the materials described in the subject matter of US Patent 4,251,841 to Jacobs et al., entitled "Magnetic Head Slider" and assigned to the assignee of the present invention. The suspending part according to the preferred embodiment may be a double-layer material of polyimide material and a metal layer deposited thereon, so that it has sufficient elasticity and rigidity required by the suspending member. Care must be taken, provided the single layer material is of suitable thickness and strength. It is also possible to manufacture the suspension from a single layer of material. It should also be understood that there are many conductive materials that can be used for conductive circuits and sensor leads. Copper and gold are preferred, but many other materials are suitable as is well known in the art. Although air bearing suspension is described here, the invention also includes contact recording, where the suspension device brings the sensor into contact with the recording medium. The following claims describe the scope of the invention claimed.

Claims (8)

1.一种用于纵向记录的组合式薄膜磁头传感器和悬浮系统,包括:1. A combined thin-film head sensor and suspension system for longitudinal recording, comprising: 一个有极头的第一水平薄膜极片;a first horizontal thin-film pole piece with pole head; 一个在所述第一极片的极头处形成的垂直的薄膜磁隙;a vertical thin film magnetic gap formed at the pole head of said first pole piece; 一个第二薄膜极片,它有一个垂直部分和一个水平部分,垂直部分具有一个极头邻接所述磁隙,水平部分与所述第一极片相邻并平行,但与所述第一极片磁绝缘,所述第一和第二极片在后隙区磁性地连接,在它们的极头处由所述磁隙磁绝缘;a second thin film pole piece having a vertical portion having a pole head adjacent to said magnetic gap and a horizontal portion adjacent to and parallel to said first pole piece but not connected to said first pole piece magnetic sheet insulation, said first and second pole pieces being magnetically connected at a backgap region and magnetically insulated at their pole tips by said magnetic gap; 一个薄膜线圈,它与所述第一和第二极片电绝缘,但激磁于所述第一和第二极片,并环绕所述第二极片的水平部分;a thin film coil electrically insulated from but energized by said first and second pole pieces and encircling a horizontal portion of said second pole piece; 其特征在于:It is characterized by: 所述第一和第二极片的构形是,在其后隙区有较宽表面,在其极头处有较窄表面;said first and second pole pieces are configured to have a wider surface at their back gap region and a narrower surface at their head; 一个弹性材料的薄膜层的悬浮层,它至少覆盖所述第二极片的水平部分,并与所述第二极片和所述线圈电绝缘和磁绝缘,所述弹性材料延伸超过后隙区;以及a suspended layer of a film layer of elastic material covering at least a horizontal portion of said second pole piece and electrically and magnetically insulated from said second pole piece and said coil, said elastic material extending beyond the backlash region ;as well as 所述第二极片的垂直部分具有在邻接所述磁隙层的一端上的实质垂直部位和在偏离于实质垂直部分的第二端上的部位,它与所述第二极片的水平部分接触。The vertical portion of the second pole piece has a substantially vertical portion on an end adjacent to the magnetic gap layer and a portion on a second end offset from the substantially vertical portion, which is aligned with the horizontal portion of the second pole piece touch. 2.根据权利要求1的组合式薄膜磁头传感器和悬浮系统,其特征在于:2. The combined thin-film magnetic head sensor and suspension system according to claim 1, characterized in that: 第一极片的极头是水平的并且垂直于第二极片的垂直部分;the pole head of the first pole piece is horizontal and perpendicular to the vertical part of the second pole piece; 第一极片具有一个向下倾斜部分,它与第一极片的极头相邻;The first pole piece has a downwardly sloped portion adjacent to the head of the first pole piece; 在所述磁隙处垂直的薄膜磁隙,具有相对的第一和第二垂直的薄膜表面;a vertical thin film magnetic gap at said magnetic gap, having opposing first and second vertical thin film surfaces; 第一和第二垂直薄膜表面是通过薄膜淀积工艺制成的,未经研磨;The first and second vertical film surfaces are formed by a film deposition process without grinding; 薄膜磁隙层的第一薄膜表面与第一水平薄膜极片的极头直接接触;The first thin film surface of the thin film magnetic gap layer is in direct contact with the pole head of the first horizontal thin film pole piece; 第二薄膜极片具有垂直部分,该部分具有一个与薄膜磁隙层的第二垂直薄膜表面直接接触的极头;the second thin film pole piece has a vertical portion having a pole head in direct contact with the second vertical thin film surface of the thin film magnetic gap layer; 第一极片的宽度从所述倾斜部分到极头变窄。The width of the first pole piece narrows from the inclined portion to the pole head. 3.根据权利要求1或2的组合式薄膜磁头传感器和悬浮系统,其特征在于还包括一个连接所述线圈的导电体,所述导电体包含在所述悬浮层中。3. The combined thin-film magnetic head sensor and suspension system according to claim 1 or 2, further comprising a conductor connected to said coil, said conductor being included in said suspension layer. 4.根据权利要求1或2的组合式薄膜磁头传感器和悬浮系统,其特征在于还包括一层耐磨层,它覆盖在所述悬浮层的外部和与它的极头相邻的第一极片。4. A combined thin film magnetic head sensor and suspension system according to claim 1 or 2, further comprising a wear-resistant layer covering the outside of said suspension layer and the first pole piece adjacent to its pole head. 5.一种磁盘驱动器组件,包括:5. A disk drive assembly comprising: 一个外壳;a shell; 一个安装在所述外壳中的磁盘,它有将数据贮存在它上面的磁道中的装置;a magnetic disk mounted in said housing and having means for storing data in tracks thereon; 在所述外壳内用于旋转所述磁盘的装置;means for rotating the disk within the housing; 安装在所述外壳内的执行臂,其自由端可操作地邻接所述磁盘上的一个磁道;an actuator arm mounted within the housing with a free end operatively abutting a track on the magnetic disk; 定位装置,用于使所述的执行臂邻接所述磁盘上的各个磁道上;以及positioning means for abutting said actuator arm on each track on said disk; and 一个用于纵向记录的组合式薄膜磁头传感器和悬浮系统,包括:A combined thin-film head sensor and suspension system for longitudinal recording, including: 一个有极头的第一水平薄膜极片;a first horizontal thin-film pole piece with pole head; 一个在所述第一极片的极头处形成的垂直的薄膜磁隙;a vertical thin film magnetic gap formed at the pole head of said first pole piece; 一个第二薄膜极片,它有一个垂直部分和一个水平部分,垂直部分具有一个极头邻接所述磁隙,水平部分与所述第一极片相邻并平行,但与所述第一极片磁绝缘,所述第一和第二极片在后隙区磁性地连接,在它们的极头处由所述磁隙磁绝缘;a second thin film pole piece having a vertical portion having a pole head adjacent to said magnetic gap and a horizontal portion adjacent to and parallel to said first pole piece but not connected to said first pole piece magnetic sheet insulation, said first and second pole pieces being magnetically connected at a backgap region and magnetically insulated at their pole tips by said magnetic gap; 一个薄膜线圈,它与所述第一和第二极片电绝缘,但激磁于所述第一和第二极片,并环绕所述第二极片的水平部分;a thin film coil electrically insulated from but energized by said first and second pole pieces and encircling a horizontal portion of said second pole piece; 其特征在于:It is characterized by: 所述第一和第二极片的构形是,在其后隙区有较宽表面,在其极头处有较窄表面;said first and second pole pieces are configured to have a wider surface at their back gap region and a narrower surface at their head; 一个弹性材料的薄膜层的悬浮层,它至少覆盖所述第二极片的水平部分,并与所述第二极片和所述线圈电绝缘和磁绝缘,所述弹性材料延伸超过后隙区;以及a suspended layer of a film layer of elastic material covering at least a horizontal portion of said second pole piece and electrically and magnetically insulated from said second pole piece and said coil, said elastic material extending beyond the backlash region ;as well as 所述第二极片的垂直部分具有在邻接所述磁隙层的一端上的实质垂直部位和在偏离于实质垂直部分的第二端上的部位,它与所述第二极片的水平部分接触。The vertical portion of the second pole piece has a substantially vertical portion on an end adjacent to the magnetic gap layer and a portion on a second end offset from the substantially vertical portion, which is aligned with the horizontal portion of the second pole piece touch. 6.根据权利要求5的磁盘驱动器组件,其特征在于在所述组合式薄膜磁头传感器和悬浮系统中,6. The disk drive assembly according to claim 5, wherein in said combined thin-film magnetic head sensor and suspension system, 第一极片的极头是水平的并且垂直于第二极片的垂直部分;the pole head of the first pole piece is horizontal and perpendicular to the vertical part of the second pole piece; 第一极片具有一个向下倾斜部分,它与第一极片的极头相邻;The first pole piece has a downwardly sloped portion adjacent to the head of the first pole piece; 在所述磁隙处垂直的薄膜磁隙,具有相对的第一和第二垂直的薄膜表面;a vertical thin film magnetic gap at said magnetic gap, having opposing first and second vertical thin film surfaces; 第一和第二垂直薄膜表面是通过薄膜淀积工艺制成的,未经研磨;The first and second vertical film surfaces are formed by a film deposition process without grinding; 薄膜磁隙层的第一薄膜表面与第一水平薄膜极片的极头直接接触;The first thin film surface of the thin film magnetic gap layer is in direct contact with the pole head of the first horizontal thin film pole piece; 第二薄膜极片具有垂直部分,该部分具有一个与薄膜磁隙层的第二垂直薄膜表面直接接触的极头;the second thin film pole piece has a vertical portion having a pole head in direct contact with the second vertical thin film surface of the thin film magnetic gap layer; 第一极片的宽度从所述倾斜部分到极头变窄。The width of the first pole piece narrows from the inclined portion to the pole head. 7.一种制造组合式薄膜磁头传感器和悬浮系统的方法,其特征在于包括以下步骤:7. A method for manufacturing a combined thin-film magnetic head sensor and a suspension system, characterized in that it comprises the following steps: 准备一块圆形基片;Prepare a circular substrate; 在所述圆形基片上形成一倾斜的接触区;forming an inclined contact area on the circular substrate; 在所述基片上形成一层分离层;forming a separation layer on the substrate; 在所形成的分离层上形成磁性材料的第一极片;forming a first pole piece of magnetic material on the formed separation layer; 在所述已形成的第一极片上形成已构形的后隙元件;forming a contoured backlash element on said formed first pole piece; 在所述已形成的第一极片上形成一层耐磨层,并延续一段距离用于悬浮段;forming a wear-resistant layer on the formed first pole piece, and extending a certain distance for the suspension section; 在所述已形成的至少覆盖所述第一极片层的所述耐磨层上形成一磁和电的绝缘层,并作为第一悬浮层延伸一定距离用于悬浮段;forming a magnetic and electrical insulating layer on the formed wear-resistant layer covering at least the first pole piece layer, and extending a certain distance as the first suspension layer for the suspension section; 在所述形成的绝缘层上形成导电材料的第一半薄膜线圈;forming a first half-film coil of conductive material on said formed insulating layer; 形成第一电绝缘层,至少覆盖所述已形成的一半薄膜线圈;forming a first electrically insulating layer covering at least one half of said formed thin-film coil; 在所述已形成的绝缘层上形成磁性材料的构成第二极片层图形的水平部分;forming a horizontal portion of a magnetic material constituting a second pole piece layer pattern on the formed insulating layer; 形成第二电绝缘层,至少覆盖已构成图形的第二极片层;forming a second electrically insulating layer covering at least the patterned second pole piece layer; 在所述已形成的第二电绝缘层上形成导电材料的第二半薄膜线圈,并使其与所述已制成的第一半线圈电气连接;forming a second half-film coil of conductive material on the formed second electrical insulating layer and electrically connecting it to the fabricated first half-coil; 在所述已形成的第二半薄膜线圈上形成一层磁和电的绝缘层,并作为第二悬浮层延伸一定距离用于悬浮段;forming a magnetic and electrical insulating layer on the formed second half-film coil, and extending a certain distance as a second suspension layer for the suspension section; 在形成步骤所制成的组件的自由端上形成磁绝缘材料的磁隙层,并覆盖所形成的第一极片层的与所述形成的后气隙层相对的端部;forming a magnetic gap layer of magnetically insulating material on the free end of the assembly produced by the forming step and covering the end of the formed first pole piece layer opposite to said formed rear air gap layer; 在所述已形成的磁隙层上形成磁性材料的已构形的第二极片层的垂直部分,该垂直部分具有在邻接所述磁隙层的一端上的实质垂直部位和在偏离于实质垂直部位的第二端上的部位,它与所述第二极片的水平部分接触;A vertical portion of a patterned second pole piece layer of magnetic material is formed on said formed magnetic gap layer, the vertical portion having a substantially vertical portion on an end adjacent to said magnetic gap layer and at an offset from substantially a portion on the second end of the vertical portion in contact with the horizontal portion of said second pole piece; 形成一层保护层覆盖所述的极片垂直部分;forming a protective layer to cover the vertical part of the pole piece; 溶去分离层,使所述的已形成的接触区和所述的已形成的第一极片层与基片分离;Dissolving the separation layer to separate the formed contact region and the formed first pole piece layer from the substrate; 上述步骤将所述第一和第二极片的形状构成为在其后隙区有较宽的表面,在其极头处有较窄的表面。The steps described above configure said first and second pole pieces to have a wider surface at their backspace regions and a narrower surface at their pole tips. 8.根据权利要求7的制造组合式薄膜磁头传感器和悬浮系统的方法,其特征在于包括步骤:8. The method for manufacturing a combined thin-film magnetic head sensor and suspension system according to claim 7, characterized in that it comprises the steps of: 在延续一定距离用作悬浮段的所述已形成的绝缘层上形成导电材料的第一导体层,并与所述已形成的第一半线圈电连接;forming a first conductor layer of conductive material on the formed insulating layer extending for a certain distance as a suspension section, and electrically connecting with the formed first half-coil; 在延伸一定距离用作悬浮段的所述已形成的第二电绝缘层上形成导电材料的第二导体层,并电连接到所述已形成的第二半线圈上;和forming a second conductor layer of electrically conductive material on said formed second electrically insulating layer extending a distance to serve as a suspended section, and electrically connecting to said formed second half-coil; and 形成所述已形成的第一和第二导体层用的导电凸点,邻接与所形成的第一和第二极片相反的悬浮段的端部。Conductive bumps for the formed first and second conductor layers are formed adjacent to ends of the suspended segments opposite to the formed first and second pole pieces.
CN93118812A 1993-08-28 1993-08-28 Integrated transducer-suspension structure for longitudinal recording Expired - Fee Related CN1064161C (en)

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KR100718148B1 (en) * 2005-02-07 2007-05-14 삼성전자주식회사 Asymmetric type perpendicular magnetic recording head and method of manufacturing the same

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EP0430407A2 (en) * 1989-11-27 1991-06-05 Censtor Corporation Integrated magnetic read/write head/flexure/conductor structure

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EP0430407A2 (en) * 1989-11-27 1991-06-05 Censtor Corporation Integrated magnetic read/write head/flexure/conductor structure

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