CN106405860A - Method for installing and adjusting refraction and reflection type infrared imaging optical system - Google Patents
Method for installing and adjusting refraction and reflection type infrared imaging optical system Download PDFInfo
- Publication number
- CN106405860A CN106405860A CN201611121714.3A CN201611121714A CN106405860A CN 106405860 A CN106405860 A CN 106405860A CN 201611121714 A CN201611121714 A CN 201611121714A CN 106405860 A CN106405860 A CN 106405860A
- Authority
- CN
- China
- Prior art keywords
- diaphotoscope
- mirror
- optical system
- laser interferometer
- infrared imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Telescopes (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
基于折反式红外成像光学系统的装调方法，涉及红外光学系统装调技术领域，解决现有的红外光学系统装调过程中单元光学元件无法定量的问题，具体装调方法如下：一、通过激光干涉仪装调所有反射镜，保证反射镜波前质量；二、采用激光跟踪仪将所有透射镜或透射镜组的空间位置进行安放；三、通过透射镜表面反射的干涉条纹精调透射镜的径向位置，消除残余位置误差；四、通过红外探测器成像结合光学系统理论设计精调透射镜或透射镜组与光轴的倾斜角度，消除残余光学像差。通过本发明所述的方法能够快速、有效和准确的实现对折反式红外成像光学系统的装调。
The installation and adjustment method based on the catadioptric infrared imaging optical system relates to the technical field of infrared optical system installation and adjustment, and solves the problem that the unit optical elements cannot be quantified during the installation and adjustment of the existing infrared optical system. The specific adjustment method is as follows: 1. Through The laser interferometer installs and adjusts all the mirrors to ensure the wavefront quality of the mirrors; 2. Use the laser tracker to place the spatial positions of all the transmission mirrors or groups of transmission mirrors; 3. Fine-tune the transmission mirrors through the interference fringes reflected on the surface of the transmission mirrors 4. Eliminate residual optical aberration by fine-tuning the inclination angle between the transmission mirror or transmission mirror group and the optical axis through infrared detector imaging combined with optical system theory design. The method of the invention can quickly, effectively and accurately realize the installation and adjustment of the catadioptric infrared imaging optical system.
Description
技术领域technical field
本发明涉及红外光学系统装调技术领域，具体涉及一种基于折反式红外成像光学系统的装调方法，适用于多种红外波段成像的折反式光学系统精密装调过程，通过本方法能够快速、有效和准确的实现对折反式红外成像光学系统的装调。The invention relates to the technical field of infrared optical system installation and adjustment, in particular to an installation and adjustment method based on a catadioptric infrared imaging optical system, which is suitable for the precise installation and adjustment process of a catadioptric optical system for imaging in various infrared bands. This method can Quickly, effectively and accurately realize the installation and adjustment of the catadioptric infrared imaging optical system.
背景技术Background technique
红外成像光学系统的技术指标相对于其他红外光学系统要更为严格，装调过程是保证红外光学系统成像质量的重要阶段。随着光学口径的增加和红外探测器终端冷光阑的限制，光学系统基本为折反式结构，并且一般为多块反射镜和透射镜。而绝大多数红外透射镜光学材料在可见光波段都存在光谱的物理截止，为系统光机装调增加了难度和不确定性。Compared with other infrared optical systems, the technical indicators of the infrared imaging optical system are more stringent, and the adjustment process is an important stage to ensure the imaging quality of the infrared optical system. With the increase of the optical aperture and the limitation of the cold aperture at the end of the infrared detector, the optical system is basically a catadioptric structure, and generally consists of multiple reflective mirrors and transmissive mirrors. However, most optical materials for infrared transmission mirrors have a physical cut-off of the spectrum in the visible light band, which adds difficulty and uncertainty to the optical-mechanical adjustment of the system.
目前现有的技术手段在红外光学系统装调阶段无法实现过程中的定量检测，目前传统的透射镜或透射镜组的装调基本是即依靠机械结构控制透射镜或透射镜组的空间位置、径向偏移和与光轴的倾斜。即使光学系统反射镜装调完毕，在将透射镜或者透射镜组与反射镜耦合的过程中，透射镜或透镜组的装调也只依靠机械定位，无法进一步精确调整光学元件的位置使光学系统成像质量达到最优。并且导致最终的系统质量只能依靠光学系统红外探测器终端的成像质量而定。如果系统检测结果没有达到技术指标要求，尤其是在光学系统成像质量满足要求但是系统的焦距和视场都出现偏差的情况下，对存在偏差的光学元件的排查将极其困难。At present, the existing technical means cannot realize quantitative detection in the process of infrared optical system installation and adjustment. At present, the installation and adjustment of traditional transmission mirrors or transmission mirror groups basically rely on mechanical structures to control the spatial position of transmission mirrors or transmission mirror groups. Radial offset and tilt from the optical axis. Even if the reflector of the optical system is assembled and adjusted, in the process of coupling the transmission mirror or the transmission lens group with the reflector, the adjustment of the transmission mirror or the lens group only depends on mechanical positioning, and the position of the optical components cannot be further precisely adjusted to make the optical system Image quality is at its best. And the final system quality can only depend on the imaging quality of the infrared detector terminal of the optical system. If the system inspection results do not meet the technical specification requirements, especially when the imaging quality of the optical system meets the requirements but the focal length and field of view of the system deviate, it will be extremely difficult to check the deviated optical components.
发明内容Contents of the invention
本发明为了解决现有的红外光学系统装调过程中单元光学元件无法定量的问题，提供一种基于折反式红外成像光学系统的装调方法。In order to solve the problem that unit optical elements cannot be quantified during the installation and adjustment process of the existing infrared optical system, the invention provides an installation and adjustment method based on a catadioptric infrared imaging optical system.
基于折反式红外成像光学系统的装调方法，该方法由以下步骤实现：Based on the installation and adjustment method of the catadioptric infrared imaging optical system, the method is realized by the following steps:
步骤一、采用激光干涉仪了出射平行光束，将光斑均调整至第一离轴反射镜、第二离轴反射镜、第一平面反射镜、第二平面反射镜反射表面的中心；并根据激光干涉仪反馈的波前信息，将第一离轴反射镜、第二离轴反射镜、第一平面反射镜、第二平面反射镜的波前误差RMS调整至60nm-180nm；Step 1. Use a laser interferometer to emit parallel beams, and adjust the spot to the center of the first off-axis reflector, the second off-axis reflector, the first plane reflector, and the second plane reflector; and according to the laser The wavefront information fed back by the interferometer adjusts the wavefront error RMS of the first off-axis mirror, the second off-axis mirror, the first plane mirror, and the second plane mirror to 60nm-180nm;
步骤二、采用激光跟踪仪对步骤一所述的第一离轴反射镜、第二离轴反射镜、第一平面反射镜、第二平面反射镜进行位置定位，并根据定位基准安装第三透射镜，采用第三透射镜前表面返回光束在激光干涉仪上形成干涉条纹；通过调整第三透射镜的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第三透射镜的径向位置误差；将红外探测器置于所述第三透射镜的焦点处，以红外探测器的成像质量为标准，通过调整第三透射镜与光轴的夹角消除角度倾斜误差；Step 2. Use a laser tracker to position the first off-axis reflector, the second off-axis reflector, the first plane reflector, and the second plane reflector described in step 1, and install the third transmission mirror according to the positioning reference. mirror, using the return beam on the front surface of the third transmission mirror to form interference fringes on the laser interferometer; by adjusting the radial translation of the third transmission mirror, the center of the interference fringes is moved to the center of the target surface of the laser interferometer, eliminating the third transmission The radial position error of the mirror; placing the infrared detector at the focal point of the third transmission mirror, taking the imaging quality of the infrared detector as a standard, eliminating the angular tilt error by adjusting the angle between the third transmission mirror and the optical axis;
步骤三、采用激光跟踪仪和红外探测器安装调整第二透射镜，采用第二透射镜前表面返回光束在激光干涉仪上形成的干涉条纹，通过调整第二透射镜的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第二透射镜的径向位置误差；将所述红外探测器放置在第二透射镜和第三透射镜的联合焦点处，以成像质量为标准通过调整第二透射镜与光轴的夹角消除角度倾斜误差；Step 3: Use the laser tracker and infrared detector to install and adjust the second transmission mirror, use the interference fringes formed on the laser interferometer by the return beam on the front surface of the second transmission mirror, and adjust the radial translation of the second transmission mirror to make the interference fringes The center of the center of the laser interferometer is moved to the center position of the target surface of the laser interferometer to eliminate the radial position error of the second transmission mirror; the infrared detector is placed at the joint focus of the second transmission mirror and the third transmission mirror, and the imaging quality is The standard eliminates the angle tilt error by adjusting the angle between the second transmission mirror and the optical axis;
步骤四、采用激光跟踪仪和红外探测器安装调整第一透射镜，采用第一透射镜前表面返回光束在激光干涉仪上形成的干涉条纹，通过调整第一透射镜的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第一透镜的径向误差，将红外探测器放置在系统像面处，并根据红外探测器成像质量消除第一透射镜的角度倾斜误差；实现折反式红外成像系统的装调。Step 4: Use the laser tracker and infrared detector to install and adjust the first transmission mirror, use the interference fringes formed on the laser interferometer by the return beam on the front surface of the first transmission mirror, and adjust the radial translation of the first transmission mirror to make the interference fringes The center of the laser interferometer is moved to the center of the target surface of the laser interferometer, the radial error of the first lens is eliminated, the infrared detector is placed on the image plane of the system, and the angular tilt error of the first transmission mirror is eliminated according to the imaging quality of the infrared detector; Realize the installation and adjustment of the catadioptric infrared imaging system.
本发明的有益效果：本发明中的折反式红外成像光学系统的主要由反射镜和透射镜组成，在系统装调的过程中采用分别组装，单独检测的原则进行安装。由于反射镜不会产生色差，可以利用激光干涉仪调整反射镜，再使用激光跟踪仪将透射镜进行安装，再由探测器进行进一步的精调。Beneficial effects of the present invention: The catadioptric infrared imaging optical system in the present invention is mainly composed of reflective mirrors and transmissive mirrors, which are installed on the principle of separate assembly and separate detection during the system installation and adjustment process. Since the reflector will not produce chromatic aberration, the reflector can be adjusted with a laser interferometer, and then the transmission mirror can be installed with a laser tracker, and further fine-tuned by the detector.
本发明所述的装调方法在光学系统装调过程中综合利用激光跟踪仪、激光干涉仪及探测器等高精度检测仪器，将所有光机元件都进行定量安装，在光机装调阶段实现了单元器件的装调质量保证。本方法不仅能够快速、有效和准确的完成对折反式红外成像光学系统的装调，而且实现了光学系统理论设计结果和最终系统成像质量的闭环控制。The installation and adjustment method of the present invention comprehensively utilizes high-precision detection instruments such as laser trackers, laser interferometers, and detectors during the installation and adjustment of the optical system, and quantitatively installs all optical-mechanical components, which is realized in the optical-mechanical installation and adjustment stage. The quality assurance of the assembly and adjustment of the unit device is ensured. The method can not only quickly, effectively and accurately complete the assembly and adjustment of the catadioptric infrared imaging optical system, but also realize the closed-loop control of the theoretical design results of the optical system and the imaging quality of the final system.
本发明所述的装调方法通过激光干涉仪、激光跟踪仪和红外探测器精确的控制所有光学元件的空间位置，消除光学元件在装调过程中位置的不确定性。The installation and adjustment method of the present invention precisely controls the spatial positions of all optical components through laser interferometers, laser trackers and infrared detectors, eliminating the uncertainty of the positions of the optical components during the installation and adjustment process.
附图说明Description of drawings
图1为本发明所述的折反式红外成像光学系统装调方法示意图。Fig. 1 is a schematic diagram of the installation and adjustment method of the catadioptric infrared imaging optical system according to the present invention.
图中：1、激光干涉仪，2、第一离轴反射镜，3、第二离轴反射镜，4、第一平面反射镜，5、第一透射镜，6、第二平面反射镜，7、第二透射镜，8、第三透射镜，9、激光跟踪仪，10、红外探测器，11、光学平台。In the figure: 1. Laser interferometer, 2. First off-axis reflector, 3. Second off-axis reflector, 4. First plane reflector, 5. First transmission mirror, 6. Second plane reflector, 7. Second transmission mirror, 8. Third transmission mirror, 9. Laser tracker, 10. Infrared detector, 11. Optical platform.
具体实施方式detailed description
具体实施方式一、结合图1说明本实施方式，基于折反式红外成像光学系统的装调方法，包括激光干涉仪1、第一离轴反射镜2、第二离轴反射镜3、第一平面反射镜4、第一透射镜5、第二平面反射镜6、第二透射镜7、第三透射镜8、激光跟踪仪9、红外探测器10和光学平台11。其中，第一离轴反射镜2、第二离轴反射镜3、第一平面反射镜4、第一透射镜5、第二平面反射镜6、第二透射镜7、第三透射镜8和红外探测器10构成折反式红外成像光学系统，且上述单元器件均安装在光学平台11上。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. This embodiment is described in conjunction with FIG. 1 , based on the installation and adjustment method of the catadioptric infrared imaging optical system, including a laser interferometer 1, a first off-axis mirror 2, a second off-axis mirror 3, a first Plane reflection mirror 4 , first transmission mirror 5 , second plane reflection mirror 6 , second transmission mirror 7 , third transmission mirror 8 , laser tracker 9 , infrared detector 10 and optical platform 11 . Among them, the first off-axis mirror 2, the second off-axis mirror 3, the first plane mirror 4, the first transmission mirror 5, the second plane mirror 6, the second transmission mirror 7, the third transmission mirror 8 and The infrared detector 10 constitutes a catadioptric infrared imaging optical system, and the above-mentioned unit devices are installed on the optical platform 11 .
该方法由以下步骤实现：This method is implemented by the following steps:
步骤一、将激光干涉仪出射平行光束，将所有反射镜进行穿轴，将激光干涉仪的光斑均调整至第一离轴反射镜2、第二离轴反射镜3、第一平面反射镜4、第二平面反射镜6反射表面的中心。各个反射镜的角度由机械结构事先确定。然后将激光干涉仪1安装焦比略小于系统焦比的镜头，设定所述激光干涉仪镜头焦比为1.5；以便可以测量全口径的光学波前质量。通过激光干涉仪反馈的波前信息，将第一离轴反射镜2、第二离轴反射镜3、第一平面反射镜4、第二平面反射镜6的像差调整至最优；即：波前误差RMS调整至60nm-180nm。Step 1. Let the laser interferometer emit parallel beams, pass all the reflectors on the axis, and adjust the laser spot of the laser interferometer to the first off-axis reflector 2, the second off-axis reflector 3, and the first plane reflector 4 , the center of the reflective surface of the second plane mirror 6 . The angle of each mirror is determined in advance by the mechanical structure. Then the laser interferometer 1 is installed with a lens with a focal ratio slightly smaller than the system focal ratio, and the focal ratio of the laser interferometer lens is set to 1.5; so that the full-aperture optical wavefront quality can be measured. Through the wavefront information fed back by the laser interferometer, the aberrations of the first off-axis mirror 2, the second off-axis mirror 3, the first plane mirror 4, and the second plane mirror 6 are adjusted to the optimum; that is: The wavefront error RMS is adjusted to 60nm-180nm.
步骤二、利用激光跟踪仪1首先将光学平台定位11，再将所有反射镜光学元件进行位置定位。然后以激光跟踪仪1建立的基准安装第三透射镜8。由于透射镜材料在可见光波段的物理截止，因此可利用第三透射镜8前表面返回光束在激光干涉仪1上形成的只有离焦和球差的干涉条纹。通过调整第三透射镜8的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第三透射镜8的径向位置误差。进一步可将红外探测器10放置在第三透射镜8的焦点处，以成像质量为标准通过调整第三透射镜8与光轴的夹角消除因角度引起的光学像差。Step 2: Use the laser tracker 1 to first position the optical platform 11, and then position all mirror optical components. The third transmission mirror 8 is then mounted on the basis established by the laser tracker 1 . Due to the physical cut-off of the material of the transmission mirror in the visible light band, the return beam on the front surface of the third transmission mirror 8 can be used to form interference fringes with only defocus and spherical aberration on the laser interferometer 1 . By adjusting the radial translation of the third transmission mirror 8, the center of the interference fringes is moved to the center position of the target surface of the laser interferometer, and the radial position error of the third transmission mirror 8 is eliminated. Further, the infrared detector 10 can be placed at the focal point of the third transmission mirror 8, and the optical aberration caused by the angle can be eliminated by adjusting the angle between the third transmission mirror 8 and the optical axis based on the imaging quality.
步骤三、在第三透射镜8装调完毕后，利用激光跟踪仪和红外探测器安装调整第二透射镜7，可利用第二透射镜7前表面返回光束在激光干涉仪1上形成的只有离焦和球差的干涉条纹。通过调整第二透射镜7的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第二透射镜7的径向位置误差。进一步将红外探测器放置在第二透射镜7和第三透射镜8的联合焦点处，以成像质量为标准通过调整第二透射镜7与光轴的夹角消除因角度引起的光学像差。Step 3. After the third transmission mirror 8 is installed and adjusted, use the laser tracker and infrared detector to install and adjust the second transmission mirror 7. Only the return beam on the front surface of the second transmission mirror 7 can be used to form on the laser interferometer 1. Interference fringes from defocus and spherical aberration. By adjusting the radial translation of the second transmission mirror 7, the center of the interference fringe is moved to the center position of the target surface of the laser interferometer, and the radial position error of the second transmission mirror 7 is eliminated. The infrared detector is further placed at the joint focal point of the second transmission mirror 7 and the third transmission mirror 8, and the optical aberration caused by the angle is eliminated by adjusting the angle between the second transmission mirror 7 and the optical axis based on the imaging quality.
步骤四、最后按上述步骤调整第一透射镜5，采用第一透射镜5前表面返回光束在激光干涉仪上形成的干涉条纹，通过调整第一透射镜5的径向平移将干涉条纹的中心移至激光干涉仪的靶面中心位置，消除第一透镜5的径向误差，将红外探测器10放置在系统像面处，并根据红外探测器成像质量消除第一透射镜5的角度倾斜误差；直到每个光学元件的空间位置都满足公差要求实现折反式红外成像系统的装调。Step 4, finally adjust the first transmission mirror 5 according to the above steps, adopt the interference fringes formed on the laser interferometer by the return beam on the front surface of the first transmission mirror 5, and adjust the radial translation of the first transmission mirror 5 to center the interference fringes Move to the center of the target surface of the laser interferometer, eliminate the radial error of the first lens 5, place the infrared detector 10 at the image plane of the system, and eliminate the angular tilt error of the first transmission mirror 5 according to the imaging quality of the infrared detector ; until the spatial position of each optical element meets the tolerance requirements to realize the installation and adjustment of the catadioptric infrared imaging system.
本实施方式所述的激光干涉仪1的测量精度高于0.01λ，λ为波长，(λ＝632.8nm)，并且能够安装适合被检测系统焦比的测量镜头。所述激光跟踪仪的测量误差为0.015mm。The measurement accuracy of the laser interferometer 1 described in this embodiment is higher than 0.01λ, where λ is the wavelength (λ=632.8nm), and a measurement lens suitable for the focal ratio of the detected system can be installed. The measurement error of the laser tracker is 0.015mm.
本实施方式所述的第一离轴反射镜2、第二离轴反射镜3、第一平面反射镜4和第二平面反射镜6的面型均可以为非球面、球面或者平面。安装精度达到0.1mm-0.015mm。并且所有反射镜完成了光学镀膜，在可见光波段具有至少10％的反射率，所有反射镜面形精度都达到了光学设计的公差要求。另外需要有两维倾斜，三维平移调整空间。The surface types of the first off-axis reflector 2 , the second off-axis reflector 3 , the first plane reflector 4 and the second plane reflector 6 in this embodiment can be aspherical, spherical or plane. The installation accuracy reaches 0.1mm-0.015mm. And all the reflectors are finished with optical coating, which has a reflectivity of at least 10% in the visible light band, and the surface shape accuracy of all reflectors has reached the tolerance requirements of optical design. In addition, two-dimensional tilt and three-dimensional translation adjustment space are required.
本实施方式所述的第一透射镜5、第二透射镜7和第三透射镜8的安装精度达到0.1mm-0.015mm。且都完成了光学镀膜，在可见光波段具有至少10％的反射率，所有透射镜面形精度都达到了光学设计的公差要求。另外需要有两维倾斜，三维平移调整空间。The installation precision of the first transmission mirror 5 , the second transmission mirror 7 and the third transmission mirror 8 in this embodiment reaches 0.1 mm-0.015 mm. All of them have completed optical coating, and have at least 10% reflectivity in the visible light band, and the surface shape accuracy of all transmission mirrors has reached the tolerance requirements of optical design. In addition, two-dimensional tilt and three-dimensional translation adjustment space are required.
本实施方式所述的红外探测器10，满足红外探测器冷阑和光学系统互相匹配，满足像元分辨率和折反式红外成像光学系统互相匹配。The infrared detector 10 described in this embodiment satisfies the mutual matching between the cold stop of the infrared detector and the optical system, and the mutual matching between the pixel resolution and the catadioptric infrared imaging optical system.
以上所述的实施例仅限于解释本发明，本发明的保护范围应包括权利要求的全部内容，而且通过实施例，该领域的技术人员即可以实现本发明权利要求的全部内容。The above-described embodiments are only limited to explain the present invention, and the protection scope of the present invention should include the entire contents of the claims, and through the embodiments, those skilled in the art can realize the entire contents of the claims of the present invention.
Claims (8)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611121714.3A CN106405860B (en) | 2016-12-08 | 2016-12-08 | Assembly and adjustment method based on catadioptric infrared imaging optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611121714.3A CN106405860B (en) | 2016-12-08 | 2016-12-08 | Assembly and adjustment method based on catadioptric infrared imaging optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106405860A true CN106405860A (en) | 2017-02-15 |
| CN106405860B CN106405860B (en) | 2019-03-12 |
Family
ID=58084505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611121714.3A Active CN106405860B (en) | 2016-12-08 | 2016-12-08 | Assembly and adjustment method based on catadioptric infrared imaging optical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106405860B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107132636A (en) * | 2017-06-29 | 2017-09-05 | 佛山科学技术学院 | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system |
| CN110737103A (en) * | 2019-10-31 | 2020-01-31 | 中国科学院长春光学精密机械与物理研究所 | large-caliber off-axis catadioptric multichannel optical system assembling and adjusting method |
| CN110824459A (en) * | 2019-12-19 | 2020-02-21 | 成都英飞睿技术有限公司 | Intelligent optical axis adjusting system based on interference fringes and adjusting method thereof |
| CN111650737A (en) * | 2020-07-13 | 2020-09-11 | 中国科学院光电技术研究所 | An adjustment method and device for an off-axis reflective optical system |
| CN111796434A (en) * | 2020-07-16 | 2020-10-20 | 中国人民解放军国防科技大学 | Automatic adjusting system and method for optical system |
| CN112747904A (en) * | 2020-12-30 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Method for assembling and adjusting infrared transfer function measuring instrument |
| CN113834633A (en) * | 2021-08-09 | 2021-12-24 | 中国工程物理研究院应用电子学研究所 | A transmission type near-infrared beam expander system installation and adjustment method |
| CN113949443A (en) * | 2021-09-29 | 2022-01-18 | 中国科学院西安光学精密机械研究所 | A high-precision and fast assembly and adjustment method for a laser communication test system |
| CN114427953A (en) * | 2021-12-23 | 2022-05-03 | 北京空间机电研究所 | A fully automated system and test method for measuring optical components |
| CN114488521A (en) * | 2022-01-04 | 2022-05-13 | 中国科学院西安光学精密机械研究所 | Space pose positioning method of plane reflector in convergent-refractive optical path |
| CN115981020A (en) * | 2022-11-22 | 2023-04-18 | 中国航空工业集团公司洛阳电光设备研究所 | Infrared band optical system assembling and adjusting method and tooling eyepiece |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009085690A1 (en) * | 2007-12-21 | 2009-07-09 | Bausch & Lomb Incorporated | Ophthalmic instrument alignment apparatus and method of using same |
| CN102809428A (en) * | 2012-07-25 | 2012-12-05 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN104391366A (en) * | 2014-11-25 | 2015-03-04 | 电子科技大学 | Terahertz-band off-axis three-reflector system and debugging method thereof |
| CN105116515A (en) * | 2015-07-30 | 2015-12-02 | 北京理工大学 | Off-axis tri-reflector zooming optical system adjusting method |
| CN105242387A (en) * | 2015-10-26 | 2016-01-13 | 中国科学院西安光学精密机械研究所 | Large-view-field off-axis three-mirror system and adjustment method |
-
2016
- 2016-12-08 CN CN201611121714.3A patent/CN106405860B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009085690A1 (en) * | 2007-12-21 | 2009-07-09 | Bausch & Lomb Incorporated | Ophthalmic instrument alignment apparatus and method of using same |
| CN102809428A (en) * | 2012-07-25 | 2012-12-05 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting small echelle grating spectrometer |
| CN104391366A (en) * | 2014-11-25 | 2015-03-04 | 电子科技大学 | Terahertz-band off-axis three-reflector system and debugging method thereof |
| CN105116515A (en) * | 2015-07-30 | 2015-12-02 | 北京理工大学 | Off-axis tri-reflector zooming optical system adjusting method |
| CN105242387A (en) * | 2015-10-26 | 2016-01-13 | 中国科学院西安光学精密机械研究所 | Large-view-field off-axis three-mirror system and adjustment method |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107132636A (en) * | 2017-06-29 | 2017-09-05 | 佛山科学技术学院 | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system |
| CN107132636B (en) * | 2017-06-29 | 2019-10-11 | 佛山科学技术学院 | A method and system for calibrating the installation and adjustment reference of the reflective surface of an aspheric primary mirror |
| CN110737103A (en) * | 2019-10-31 | 2020-01-31 | 中国科学院长春光学精密机械与物理研究所 | large-caliber off-axis catadioptric multichannel optical system assembling and adjusting method |
| CN110737103B (en) * | 2019-10-31 | 2022-03-08 | 中国科学院长春光学精密机械与物理研究所 | A method for assembling and adjusting a large-aperture off-axis catadioptric multi-channel optical system |
| CN110824459A (en) * | 2019-12-19 | 2020-02-21 | 成都英飞睿技术有限公司 | Intelligent optical axis adjusting system based on interference fringes and adjusting method thereof |
| CN111650737A (en) * | 2020-07-13 | 2020-09-11 | 中国科学院光电技术研究所 | An adjustment method and device for an off-axis reflective optical system |
| CN111796434A (en) * | 2020-07-16 | 2020-10-20 | 中国人民解放军国防科技大学 | Automatic adjusting system and method for optical system |
| CN112747904B (en) * | 2020-12-30 | 2021-12-28 | 中国科学院长春光学精密机械与物理研究所 | Installation and adjustment method of infrared transfer function measuring instrument |
| CN112747904A (en) * | 2020-12-30 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Method for assembling and adjusting infrared transfer function measuring instrument |
| CN113834633A (en) * | 2021-08-09 | 2021-12-24 | 中国工程物理研究院应用电子学研究所 | A transmission type near-infrared beam expander system installation and adjustment method |
| CN113949443A (en) * | 2021-09-29 | 2022-01-18 | 中国科学院西安光学精密机械研究所 | A high-precision and fast assembly and adjustment method for a laser communication test system |
| CN113949443B (en) * | 2021-09-29 | 2023-01-06 | 中国科学院西安光学精密机械研究所 | A high-precision and rapid assembly and adjustment method for a laser communication test system |
| CN114427953A (en) * | 2021-12-23 | 2022-05-03 | 北京空间机电研究所 | A fully automated system and test method for measuring optical components |
| CN114488521A (en) * | 2022-01-04 | 2022-05-13 | 中国科学院西安光学精密机械研究所 | Space pose positioning method of plane reflector in convergent-refractive optical path |
| CN114488521B (en) * | 2022-01-04 | 2022-12-09 | 中国科学院西安光学精密机械研究所 | Spatial Pose Positioning Method for Plane Reflectors in Converging and Refracting Optical Paths |
| CN115981020A (en) * | 2022-11-22 | 2023-04-18 | 中国航空工业集团公司洛阳电光设备研究所 | Infrared band optical system assembling and adjusting method and tooling eyepiece |
| CN115981020B (en) * | 2022-11-22 | 2025-03-07 | 中国航空工业集团公司洛阳电光设备研究所 | An infrared band optical system assembly and adjustment method and tooling eyepiece |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106405860B (en) | 2019-03-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106405860A (en) | Method for installing and adjusting refraction and reflection type infrared imaging optical system | |
| RU2467286C1 (en) | Device to align two-mirror aligned optical system | |
| CN110207588B (en) | A method for assembling and adjusting the optical vertex aiming device of a corner cube prism | |
| CN104930971B (en) | Partial compensation lens and detected surface alignment device and alignment method in non-null detection | |
| US7375824B2 (en) | Interferometer for measurement of dome-like objects | |
| CN108121049A (en) | A kind of adjustment test method of multispectral section of multichannel remote sensing camera camera lens | |
| CN110779443B (en) | Edge sensor for splicing mirror surface based on interference principle and working method thereof | |
| US20140340691A1 (en) | Enhancements to integrated optical assembly | |
| CN110793755A (en) | Knife-edge device and measuring method for measuring focal length in the setting and adjustment of reflecting telephoto telescope | |
| US20150185324A1 (en) | Laser radar tracking systems | |
| CN111006851B (en) | A wavefront detection device and method for edge sub-mirrors in a splicing mirror | |
| CN103487929B (en) | Adjustment Method of Optical Axis and Focal Plane of Soft X-ray and Extreme Ultraviolet Compound Telescope | |
| CN211668748U (en) | Optical correction device for monitoring optical axis of reflecting telescope based on polarization beam splitting | |
| CN110793756A (en) | An optical correction device for monitoring the optical axis of a reflecting telescope based on polarization beam splitting | |
| CN112902875A (en) | Aspheric reflector curvature radius detection device and method | |
| US4958931A (en) | System utilizing an achromatic null lens for correcting aberrations in a spherical wavefront | |
| CN114185144B (en) | A Method for Mounting and Adjusting a Large-Aperture Optical System Based on a Small-Aperture Plane Mirror | |
| CN112923871B (en) | Device and method for detecting curvature radius of free-form surface mirror | |
| CN109253867B (en) | Optical system focal length measuring system and method | |
| CN113959262B (en) | Optical axis pupil calibration method for light beam tracking equipment | |
| US7619720B1 (en) | Sequentially addressable radius measurements of an optical surface using a range finder | |
| RU169716U1 (en) | Device for controlling convex aspherical optical surfaces of high-precision large-sized mirrors | |
| US6999182B2 (en) | Method and system for characterizing aspheric surfaces of optical elements | |
| CN116839506B (en) | Surface shape detection method and system for grazing incidence type spliced plane mirror | |
| US20220244519A1 (en) | Telescopes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |