CN106405167A - Probe card for integrated circuit detection - Google Patents
Probe card for integrated circuit detection Download PDFInfo
- Publication number
- CN106405167A CN106405167A CN201610708292.3A CN201610708292A CN106405167A CN 106405167 A CN106405167 A CN 106405167A CN 201610708292 A CN201610708292 A CN 201610708292A CN 106405167 A CN106405167 A CN 106405167A
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- Prior art keywords
- probe
- side wall
- flexible bag
- probe card
- stopper section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000523 sample Substances 0.000 title claims abstract description 137
- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 238000007789 sealing Methods 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 claims description 51
- 238000005452 bending Methods 0.000 claims description 5
- 230000035515 penetration Effects 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims 1
- 238000009423 ventilation Methods 0.000 abstract 5
- 230000015572 biosynthetic process Effects 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 14
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06733—Geometry aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
The invention discloses a probe card for integrated circuit detection, which comprises a probe holder and a detection circuit board. The probe card is provided with a gear stopping part in its formation. The lower end of the gear stopping part abuts against an elastic bag casing. The elastic bag casing is filled with gas. The elastic bag casing is provided with an air outlet in its formation. The air outlet is articulated with a sealing door. The side wall of the probe hole at one side of the sealing door is provided with an air ventilation groove. The side wall of the air ventilation groove is provided with an air pushing piston block. The air pushing piston block divides the air ventilation groove into an air ventilation area and a restoration area. The restoration area is provided therein with a restoration spring. One end of the restoration spring presses and leans against the air pushing piston block while the other end presses and leans against the inner side wall of the end part of the air ventilation groove. The probe hole is inserted by and connected with a vertically standing conducting strip. The upper end of the conducting strip is flexibly connected with the upper end and the lower end of the gear stopping part and is connected to the detection circuit board. The probe card of the invention has a simple structure and is convenient to manufacture and assemble. The probe card can also avoid the contact failure caused by the machinery fatigue of the spring mounted in a traditional probe card in the prior art.
Description
Technical field：
The present invention relates to the technical field of integrated circuit testing equipment, be specifically related to a kind of for testing integrated circuit
Probe card.
Background technology：
Probe card is to be commonly used for the element of testing circuit in semiconductor technology, is disposed with multiple probes, visits in it
The arrangement position of pin is corresponding with the circuit configuration on the circuit board under test that this probe card to be detected.Probe card is normally placed in one
On detection board, circuit board under test is clamped with an instrument and suppresses on probe so that each probe turns on circuit board under test
On circuit, detect the whether normal operation of circuit on circuit board under test with probe.
Existing probe structure has generally comprised a sleeve, is provided with two electrodes and is connected to two electrodes in sleeve
Between a spring, one of electrode is fixed on detection board and be electrically connected with detection board, and another electrode then may be used
It is slidably disposed in sleeve in order to connect the solder joint on the circuit board under test to be detected.When circuit board under test presses probe, bullet
Spring is compressed and is forced in movable electrode, so that this electrode is pressed into contact with circuit board under test and turn on.Or only set
Put a movable electrode, electrode and detection board are directly connected by spring.
Probe is small element, its complex structure, and part makes and assembling is all difficult.Existing probe using spring as
Connect element, and spring can be because mechanical fatigue inefficacy etc. causes loose contact, the error in therefore this technique after forever
Probe loose contact often can be led to cannot to turn on circuit board under test and detection board.
In view of above-mentioned defect, the design people, actively research and innovation in addition, to founding a kind of being used for of new structure
The probe card of test integrated circuit is so as to more the value in industry.
Content of the invention：
The purpose of the present invention aims to solve the problem that the problem that prior art exists, and provides a kind of structure simple, manufactures and assembling side
Just, it is avoided that conventional probe card inner spring mechanical fatigue lost efficacy and caused the spy for testing integrated circuit of loose contact simultaneously
Pin card.
The present invention relates to a kind of probe card for testing integrated circuit, including probe base and testing circuit plate, described spy
In needle stand, there is probe aperture, be plugged with probe in described probe aperture, the probe of described probe exposes the upper surface of probe base, described
Stopper section is formed on probe, the upper end of described stopper section is resisted against on the side wall of probe aperture, and the lower end of stopper section is resisted against one
On flexible bag shell, in described flexible bag shell, it is filled with gas, the side wall of flexible bag shell is close on the side wall of probe aperture, flexible bag
Form gas outlet on shell, described gas outlet is hinged with hermatic door, sets between the edge side wall of described hermatic door and gas outlet
There is sealing gasket, the probe aperture side wall of hermatic door side forms air channel, the side wall of air channel is provided with gas push piston block, institute
State gas push piston block and air channel is divided into ventilating zone and reset area, described ventilating zone is connected with hermatic door, described reset area
Inside it is provided with back-moving spring, one end of described back-moving spring is pressed against on gas push piston block, the other end is pressed against the end of air channel
On madial wall；
Be plugged with vertical conducting strip in described probe aperture, the upper end bending forming of described conducting strip have upper connecting portion, under
End bending forming has lower connecting portion, and the side wall of described stopper section forms vertical inserting groove, one end of described upper connecting portion
It is plugged in described inserting groove, the side wall of inserting groove forms vertical gathering sill, the end of upper connecting portion forms protrusion
Guide pad, described guide pad sleeve in described gathering sill, the lower end of described flexible bag shell against there being a contiguous block, described under
Connecting portion is resisted against the lower surface of described contiguous block and is linked together by contact screw with contiguous block, and described contact screw supports
Lean against on the conductive region of testing circuit plate.
By technique scheme, operationally, probe is located at the probe in the hole of probe base, the probe dew of probe to the present invention
The upper surface going out probe base is in order to be connected with to-be-measured integrated circuit.There is provided bullet by the flexible bag shell of probe in the hole to probe
Power, when the probe contacts circuit under test of probe, probe is extruded, and stopper section is moved to probe in the hole, stopper section extruding elasticity
Bag shell, flexible bag shell is extruded by compressive deformation and by its interior gas from gas outlet, and the thrust of gas makes to be hinged on gas outlet
On hermatic door open, gas push piston block is simultaneously promoted by the ventilating zone that gas enters air channel, and gas push piston block is towards reset area
Move and by the back-moving spring compression in reset area, back-moving spring stores elastic potential energy, after treating that a wheel integrated circuit detects,
Back-moving spring releases energy and promotes gas push piston block to ventilating zone, and the gas in ventilating zone is pushed hermatic door open and reentered bullet
Property bag shell in, flexible bag shell is full of collision again by gas, then upwardly stopper section, and stopper section drives probe to recover former
Position, thus completes one-time detection circulation.In above process, the inserting groove in stopper section for the guide pad of the upper connecting portion of conducting strip
Gathering sill in move up and down, and keep contact with stopper section all the time, the lower connecting portion of conducting strip is by contact screw and detection
Circuit board connects, so that testing circuit plate is electrically connected with probe, thus detecting to circuit under test.
By such scheme, the probe card configuration of the present invention is simple, manufactures and easy to assembly, replaces bullet by flexible bag shell
Spring provides elastic force so that electrical connection contact is respond well, is avoided that conventional probe card inner spring mechanical fatigue lost efficacy and caused to connect
Touch bad.
A kind of as such scheme is preferably coated with one layer of toughness elastic layer on the outer wall of described flexible bag shell, described
The side wall of toughness elastic layer is close on the side wall of probe aperture, and the upper end of toughness elastic layer forms and described stopper section bottom surface phase
The upper groove of cooperation, stopper section is resisted against in described upper groove, and the lower end of toughness elastic layer forms the top with described contiguous block
The low groove matching in face, contiguous block is resisted against on described low groove.By such scheme, stopper section and contiguous block press up against
On the upper groove and low groove of toughness elastic layer, the toughness power of toughness elastic layer makes stopper section and contiguous block in extruding flexible bag
It is difficult during shell to be punctured, thus ensureing to detect working properly carrying out.
A kind of preferred as such scheme, described probe aperture forms two described air channels, two air channel phases
Central axis for probe aperture is symmetrical arranged, and the structure of two air channels is identical, flexible bag shell forms two respectively with
The corresponding gas outlet of two air channels, two gas outlets have been respectively articulated with two hermatic doors, and described hermatic door is molded over tough
On property elastic layer.By such scheme, the setting of two gas outlets, hermatic door and air channel makes flexible bag shell be subject in extruding
Power uniformly and is vented uniformly.
A kind of preferred as such scheme, the upper end of described probe aperture forms detection hole, the upper end in described detection hole
The upper surface of penetration probe seat, the upper end of described stopper section is resisted against on the side wall of probe aperture that detection hole is joined with probe aperture,
The upper end of stopper section forms test section, and described detection position includes being molded over detection in detection in the hole, the probe of described probe
The syringe needle of some tapers of portion upper end, described syringe needle is ringwise evenly distributed on test section around the center of test section upper surface
On.
As such scheme a kind of preferably, the guide pad of the upper connecting portion of the described conducting strip gathering sill apart from stopper section
The distance of upper surface exposes the length of probe base upper surface not less than the test section upper end of probe.
A kind of preferred as such scheme, described contiguous block is right up and down with respect to flexible bag shell with the position of stop block
Claim.
A kind of preferred as such scheme, the lower surface of described contiguous block forms the bottom thread of contact screw
Hole, the lower connecting portion of conducting strip forms the via of contact screw.
A kind of preferred as such scheme, described flexible bag shell forms inflation inlet and exhaust outlet.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Brief description：
The following drawings is only intended to, in doing schematic illustration and explanation to the present invention, not delimit the scope of the invention.Wherein：
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the structural representation of flexible bag shell in the present invention；
Fig. 3 is the structural representation in the present invention between conducting strip and stopper section and contiguous block；
Fig. 4 is the partial structural diagram of Fig. 1.
Specific embodiment：
With reference to the accompanying drawings and examples, the specific embodiment of the present invention is described in further detail.Hereinafter implement
Example is used for the present invention is described, but is not limited to the scope of the present invention.
Referring to Fig. 1, Fig. 4, a kind of probe card for testing integrated circuit of the present invention, including probe base 10 and inspection
Slowdown monitoring circuit plate 20, has probe aperture 11 in described probe base 10, be plugged with probe 30, the probe of described probe in described probe aperture
31 upper surfaces exposing probe base 10, probe 30 includes test section 32, and the upper end of probe aperture 11 forms detection hole 12, described inspection
The upper surface of the upper end penetration probe seat 10 of gaging hole, described test section 32 is located in detection hole 12, and the probe 31 of probe 30 includes
Be molded over the syringe needle 311 of some tapers of test section 32 upper end, described syringe needle around test section 32 upper surface center ringwise
It is evenly distributed on test section 32.
Referring to Fig. 1, Fig. 2, described probe 30 forms stopper section 33, the upper end of described stopper section is resisted against detection hole 12
On the side wall of the probe aperture 11 of probe aperture 11 handing-over, the upper end of stopper section 33 forms described test section 32, stopper section 33
Lower end is resisted against on a flexible bag shell 40, is filled with gas 41 in described flexible bag shell, and the side wall of flexible bag shell 40 is close to spy
On the side wall of pin hole 11, flexible bag shell 40 forms inflation inlet 42 and exhaust outlet 43, flexible bag shell 40 forms gas outlet
44, described gas outlet is hinged with hermatic door 50, between the edge side wall of described hermatic door and gas outlet 44, is provided with sealing gasket 51,
Air channel 13 is formed on the probe aperture 11 side wall of hermatic door 50 side, the side wall of air channel is provided with gas push piston block 60, institute
State gas push piston block and air channel 13 is divided into ventilating zone 131 and reset area 132, described ventilating zone 131 is connected with hermatic door 50
Logical, it is provided with back-moving spring 70 in described reset area 132, one end of described back-moving spring is pressed against on gas push piston block 60, another
Side pressure leans against on the tip inside wall of air channel 13.
Referring to Fig. 1, Fig. 3, it is plugged with vertical conducting strip 80 in described probe aperture 11, the upper end of described conducting strip is bent into
Type has upper connecting portion 81, lower end bending forming to have lower connecting portion 82, and the side wall of described stopper section 33 forms vertical grafting
Groove 331, one end of described upper connecting portion 81 is plugged in described inserting groove 331, and the side wall of inserting groove forms vertical leading
To groove 332, the end of upper connecting portion 81 forms the guide pad 811 of protrusion, and described guide pad sleeve is in described gathering sill 332
Interior, against there being a contiguous block 90, the position of described contiguous block and stop block 33 is with respect to elasticity for the lower end of described flexible bag shell 40
Bag shell 40 is symmetrical above and below, and described lower connecting portion 82 is resisted against the lower surface of contiguous block 90 and passes through contact screw 91 with contiguous block 90
Link together, described contact screw is resisted against on the conductive region of testing circuit plate 20, the lower surface of contiguous block 90 is molded
There is the bottom thread hole 92 of contact screw 91, the lower connecting portion 82 of conducting strip 80 forms the via 821 of contact screw 91.
Referring to Fig. 1, Fig. 2, the outer wall of described flexible bag shell 40 is coated with one layer of toughness elastic layer 100, described toughness bullet
The side wall of power layer is close on the side wall of probe aperture 11, and the upper end of toughness elastic layer 100 forms and described stopper section 33 bottom surface
The upper groove 101 matching, stopper section 33 is resisted against in described upper groove 101, and the lower end of toughness elastic layer 100 forms and institute
State the low groove 102 that the top surface of contiguous block 90 matches, contiguous block 90 is resisted against on described low groove 102.
Referring to Fig. 1, described probe aperture 11 forms two described air channels 13, two air channels 13 are with respect to probe aperture
11 central axis is symmetrical arranged, and the structure of two air channels 13 is identical, flexible bag shell 40 forms two respectively with two
The corresponding gas outlet of air channel 13 44, two gas outlets have been respectively articulated with two hermatic doors 50, and described hermatic door is molded over
On toughness elastic layer 100.
Referring to Fig. 1, the guide pad 811 of the upper connecting portion 81 of described conducting strip 80 is on the gathering sill 332 of stopper section 33
The distance of end face exposes the length of probe base 10 upper surface not less than test section 32 upper end of probe 30.
In the specific implementation, probe 30 is located in the probe aperture 11 of probe base 10 present invention, and the probe 31 of probe 30 exposes
The upper surface of probe base 10 is in order to be connected with to-be-measured integrated circuit.By the flexible bag shell 40 in probe aperture 11, probe 30 is carried
For elastic force, when the probe 31 contact measured circuit of probe 30, probe 31 is extruded, and stopper section 33 is moved into probe aperture 11,
Stopper section 33 extrudes flexible bag shell 40, and flexible bag shell 40 is extruded by compressive deformation and by its interior gas 41 from gas outlet 44, gas
The thrust of body 41 makes the hermatic door 50 being hinged on gas outlet 44 open, and gas 41 enters the ventilating zone 131 of air channel 13 simultaneously
Gas push piston block 60 is promoted, gas push piston block 60 moves towards reset area 132 and presses the back-moving spring 70 in reset area 132
Contracting, back-moving spring 70 stores elastic potential energy, and after treating that a wheel integrated circuit detects, back-moving spring 70 releases energy and for gas to push away work
Chock 60 promotes to ventilating zone 131, and the gas 41 in ventilating zone 131 is pushed hermatic door 50 open and reentered in flexible bag shell 40,
Flexible bag shell 40 is full of collision again by gas 41, then upwardly stopper section 33, and stopper section 33 drives probe 31 to recover former
Position, thus completes one-time detection circulation.
In above process, the leading of the inserting groove 331 in stopper section 33 for the guide pad 811 of the upper connecting portion 81 of conducting strip 80
Move up and down into groove 332, and keep contacting with stopper section 33 all the time, the lower connecting portion 82 of conducting strip 80 passes through contact screw 91
It is connected with testing circuit plate 20, so that testing circuit plate 20 is electrically connected with probe 30, thus detecting to circuit under test.
In sum, the probe card configuration of the present invention is simple, manufactures and easy to assembly, replaces spring by flexible bag shell 40
There is provided elastic force so that electrical connection contact is respond well, be avoided that conventional probe card inner spring mechanical fatigue lost efficacy and caused to contact
Bad.
Probe card for testing integrated circuit provided by the present invention, the only specific embodiment of the present invention, but this
Invention protection domain be not limited thereto, any those familiar with the art the invention discloses technical scope
Interior, change or replacement can be readily occurred in, all should cover within the scope of the present invention.Therefore, protection scope of the present invention should
It is defined by described scope of the claims.
Claims (8)
1. a kind of probe card for testing integrated circuit, including probe base (10) and testing circuit plate (20), described probe base
(10) there is in probe aperture (11), in described probe aperture (10), be plugged with probe (30), the probe (31) of described probe exposes spy
The upper surface of needle stand (10) it is characterised in that：
Stopper section (33) is formed on described probe (30), the upper end of described stopper section is resisted against on the side wall of probe aperture (11),
The lower end of stopper section (33) is resisted against on a flexible bag shell (40), is filled with gas (41), flexible bag shell in described flexible bag shell
(40) side wall is close on the side wall of probe aperture (11), and flexible bag shell (40) forms gas outlet (44), described gas outlet
On be hinged with hermatic door (50), be provided with sealing gasket (51), hermatic door between the edge side wall of described hermatic door and gas outlet (44)
(50) form air channel (13) on probe aperture (11) the side wall of side, the side wall of air channel is provided with gas push piston block (60),
Air channel (13) is divided into ventilating zone (131) and reset area (132) by described gas push piston block, described ventilating zone (131) with close
Seal up a door (50) be connected, be provided with back-moving spring (70) in described reset area (132), one end of described back-moving spring is pressed against gas and pushes away
Piston block (60) is upper, the other end is pressed against on the tip inside wall of air channel (13)；
It is plugged with vertical conducting strip (80), the upper end bending forming of described conducting strip has upper connecting portion in described probe aperture (11)
(81), lower end bending forming has lower connecting portion (82), and the side wall of described stopper section (33) forms vertical inserting groove
(331), one end of described upper connecting portion (81) is plugged in described inserting groove (331), the side wall of inserting groove forms vertically
Gathering sill (332), the end of upper connecting portion (81) forms the guide pad (811) of protrusion, and described guide pad sleeve is described
In gathering sill (332), against there being a contiguous block (90), described lower connecting portion (82) is resisted against for the lower end of described flexible bag shell (40)
The lower surface of described contiguous block (90) is simultaneously linked together by contact screw (91) with contiguous block (90), and described contact screw supports
Lean against on the conductive region of testing circuit plate (20).
2. the probe card for testing integrated circuit according to claim 1 it is characterised in that：Described flexible bag shell (40)
Outer wall on be coated with one layer of toughness elastic layer (100), the side wall of described toughness elastic layer is close to the side wall of probe aperture (11)
On, the upper end of toughness elastic layer (100) forms the upper groove (101) matching with described stopper section (33) bottom surface, stopper section
(33) it is resisted against in described upper groove (101), the lower end of toughness elastic layer (100) forms the top surface with described contiguous block (90)
The low groove (102) matching, contiguous block (90) is resisted against on described low groove (102).
3. the probe card for testing integrated circuit according to claim 2 it is characterised in that：On described probe aperture (11)
Form two described air channels (13), two air channels are symmetrical arranged with respect to the central axis of probe aperture (11), two lead to
The structure of air drain (13) is identical, and flexible bag shell (40) forms two gas outlets corresponding with two air channels (13) respectively
(44) two hermatic doors (50), two gas outlets have been respectively articulated with, described hermatic door is molded on toughness elastic layer (100).
4. the probe card for testing integrated circuit according to claim 1 it is characterised in that：Described probe aperture (11)
Upper end forms detects hole (12), the upper surface of upper end penetration probe seat (10) in described detection hole, described stopper section (33)
Upper end is resisted against on the side wall of probe aperture (11) that detection hole (12) is joined with probe aperture (11), the upper end shaping of stopper section (33)
There is test section (32), in detection hole (12), the probe (31) of described probe (30) includes being molded over detection described detection position
The syringe needle (311) of some tapers of portion (32) upper end, described syringe needle is ringwise uniform around the center of test section (32) upper surface
It is distributed on test section (32).
5. the probe card for testing integrated circuit according to claim 4 it is characterised in that：Described conducting strip (80)
The distance apart from gathering sill (332) upper surface of stopper section (33) for the guide pad (811) of upper connecting portion (81) is not less than probe
(30) length of probe base (10) upper surface is exposed in test section (32) upper end.
6. the probe card for testing integrated circuit according to claim 1 it is characterised in that：Described contiguous block (90) with
The position of stop block (33) is symmetrical above and below with respect to flexible bag shell (40).
7. the probe card for testing integrated circuit according to claim 1 or 6 it is characterised in that：Described contiguous block
(90) the bottom thread hole (92) of contact screw (91) is formed on lower surface, the lower connecting portion (82) of conducting strip (80) becomes
Type has the via (821) of contact screw (91).
8. the probe card for testing integrated circuit according to claim 1 it is characterised in that：Described flexible bag shell (40)
On form inflation inlet (42) and exhaust outlet (43).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610708292.3A CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610708292.3A CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106405167A true CN106405167A (en) | 2017-02-15 |
| CN106405167B CN106405167B (en) | 2018-11-02 |
Family
ID=58004268
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610708292.3A Active CN106405167B (en) | 2016-08-23 | 2016-08-23 | A kind of probe card for testing integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106405167B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109839522A (en) * | 2017-11-24 | 2019-06-04 | 中华精测科技股份有限公司 | Probe card device and its signal converting module |
| TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
| CN111122925A (en) * | 2019-12-24 | 2020-05-08 | 杭州易正科技有限公司 | Easy maintenance's test probe seat |
| CN111624375A (en) * | 2020-07-01 | 2020-09-04 | 强一半导体（苏州）有限公司 | Probe card for high-temperature and high-pressure test of power device and key structure thereof |
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| TW201107758A (en) * | 2009-03-12 | 2011-03-01 | Tokyo Electron Ltd | Probe card |
| CN105929208A (en) * | 2016-06-20 | 2016-09-07 | 东莞市联洲知识产权运营管理有限公司 | Test probe card used for detecting integrated circuit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
| CN109839522A (en) * | 2017-11-24 | 2019-06-04 | 中华精测科技股份有限公司 | Probe card device and its signal converting module |
| CN111122925A (en) * | 2019-12-24 | 2020-05-08 | 杭州易正科技有限公司 | Easy maintenance's test probe seat |
| CN111624375A (en) * | 2020-07-01 | 2020-09-04 | 强一半导体（苏州）有限公司 | Probe card for high-temperature and high-pressure test of power device and key structure thereof |
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| CN106405167B (en) | 2018-11-02 |
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