CN106338333A - High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof - Google Patents
High-robustness homodyne laser vibration measurer based on wave plate yawing and four-step adjustment method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明属于激光测振技术领域，主要涉及一种基于波片偏航的高鲁棒性零差激光测振仪及四步调整法。The invention belongs to the technical field of laser vibrometers, and mainly relates to a highly robust homodyne laser vibrometer based on wave plate yaw and a four-step adjustment method.
背景技术Background technique
零差激光测振仪具有结构简单、测量精度高、动态范围宽，非线性易于补偿等优点，被广泛应用于位移动态测量、振动测量与监测、超精密装备与系统集成、科学研究与实验等领域。零差激光测振仪多采用四通道零差正交激光测振方案，利用偏振光移相干涉技术，获得两路正交光电信号，通过反正切计算和连续相位解调，实现位移、振动的高精度测量。The homodyne laser vibrometer has the advantages of simple structure, high measurement accuracy, wide dynamic range, and easy compensation for nonlinearity. It is widely used in dynamic displacement measurement, vibration measurement and monitoring, ultra-precision equipment and system integration, scientific research and experiments, etc. field. The homodyne laser vibrometer mostly adopts a four-channel homodyne orthogonal laser vibrometer scheme, uses polarized light phase-shifting interference technology to obtain two orthogonal photoelectric signals, and realizes displacement and vibration through arctangent calculation and continuous phase demodulation. High precision measurement.
由于激光功率漂移、光学元器件不理想以及光学元件安装位置误差等因素，尤其是偏振分光镜PBS和偏振片等光学器件存在偏振泄漏，消偏振分光镜NBS存在附加相移，波片器件存在相位延迟误差等因素，导致实际输出的两路正交信号存在直流偏置、不等幅及非正交误差，从而给测量结果带来非线性误差，其中直流偏置误差和不等幅误差可采用实时补偿算法消除，而非正交误差难以采用实时补偿算法消除。考虑零差激光测振仪的鲁棒性，光学元件尤其是波片的旋转轻微偏离指定角度不应该产生显著的测量误差。误差灵敏度是衡量零差激光测振仪鲁棒性的重要指标。波片的非正交误差灵敏度，即波片旋转轻微偏离指定角度对非正交误差的影响程度，制约了非正交误差的减小；波片的非正交误差灵敏度越大，零差激光测振仪的非正交误差越难以调整，其鲁棒性越差。因此，如何通过光路结构与原理上的创新，从原理上降低波片的非正交误差灵敏度，是解决零差激光测振仪同时兼顾亚纳米甚至皮米量级的非线性误差、实时测量以及高鲁棒性的问题最有效的方法。Due to factors such as laser power drift, unsatisfactory optical components, and installation position errors of optical components, especially the polarization leakage of optical components such as polarizing beam splitter PBS and polarizer, the additional phase shift of depolarizing beam splitter NBS, and the phase of wave plate devices Delay error and other factors lead to the existence of DC offset, unequal amplitude and non-orthogonal errors in the actual output of the two quadrature signals, thus bringing nonlinear errors to the measurement results. Among them, the DC offset error and unequal amplitude error can be used Real-time compensation algorithm to eliminate non-orthogonal error is difficult to use real-time compensation algorithm to eliminate. Considering the robustness of the homodyne laser vibrometer, the slight deviation of the rotation of the optical components, especially the wave plate, from the specified angle should not cause significant measurement errors. Error sensitivity is an important index to measure the robustness of homodyne laser vibrometer. The non-orthogonal error sensitivity of the wave plate, that is, the influence degree of the non-orthogonal error caused by the slight deviation of the wave plate rotation from the specified angle, restricts the reduction of the non-orthogonal error; the greater the non-orthogonal error sensitivity of the wave plate, the homodyne laser The more difficult it is to adjust for a vibrometer's non-orthogonal errors, the less robust it will be. Therefore, how to reduce the non-orthogonal error sensitivity of the wave plate from the principle of innovation through the innovation of the optical path structure and principle is the solution to solve the problem of homodyne laser vibrometer while taking into account the non-linear error of sub-nanometer or even picometer level, real-time measurement and The most effective method for high robustness problems.
针对现有各种四通道零差正交激光测振测技术方案，对其各自的优缺点以及波片的非正交误差灵敏度较大的原因分述如下：For the existing four-channel homodyne orthogonal laser vibration measurement technology solutions, their respective advantages and disadvantages and the reasons for the high sensitivity of the non-orthogonal error of the wave plate are described as follows:
(1)1995年，意大利学者Greco首次提出一种基于四分之一波片移相和偏振分光镜PBS分光的四通道零差正交激光测振测技术方案(Greco V，Molesini G，Quercioli F.”Accurate polarization interferometer”.Review of Scientific Instruments，1995，66(7)：3729-3734.)。该技术方案可用于零差正交激光测振仪的探测部分，如前级光路输出信号形式为两个偏振方向正交的线偏振光，记为P光和S光，使二分之一波片的快轴方向与P光或S光的偏振方向成22.5°夹角，则P光、S光经过二分之一波片后变成偏振方向为45°方向的两个正交线偏振光，再经消偏振分光镜NBS等比例分光，其中一路直接经偏振分光镜PBS得到两路相位为0°和180°的干涉信号，另一路先经快轴为45°方向的的四分之一波片变成圆偏振光，再经偏振分光镜PBS分光得到另外两路相位为90°和270°的干涉信号，最终得到四路相位相差90°的干涉信号。该方案受干涉部分、探测部分的偏振混叠以及探测部分的附加相移影响，探测部分二分之一波片的非正交误差的旋转灵敏度为1.5°/1°。(1) In 1995, Italian scholar Greco proposed for the first time a four-channel homodyne orthogonal laser vibration measurement technology scheme based on a quarter-wave plate phase shift and polarization beam splitter PBS (Greco V, Molesini G, Quercioli F "Accurate polarization interferometer". Review of Scientific Instruments, 1995, 66(7): 3729-3734.). This technical solution can be used in the detection part of the homodyne orthogonal laser vibrometer. For example, the output signal form of the front-stage optical path is two linearly polarized lights with orthogonal polarization directions, which are denoted as P light and S light, so that half-wave The fast axis direction of the plate forms an included angle of 22.5° with the polarization direction of P light or S light, then P light and S light become two orthogonal linearly polarized lights with a polarization direction of 45° after passing through the half-wave plate , and then through the depolarization beam splitter NBS equal proportion splitting, one of which directly passes through the polarization beam splitter PBS to get two interference signals with phases of 0° and 180°, and the other path passes through the fast axis first, which is a quarter of the direction of 45° The wave plate becomes circularly polarized light, and then the polarization beam splitter PBS splits the light to obtain two other interference signals with phases of 90° and 270°, and finally obtains four interference signals with phase differences of 90°. This scheme is affected by the interference part, the polarization aliasing of the detection part and the additional phase shift of the detection part, and the rotation sensitivity of the non-orthogonal error of the half-wave plate of the detection part is 1.5°/1°.
(2)2015年，哈尔滨工业大学的胡鹏程等也提出了一种基于空间旋转渥拉斯特棱镜的四通道零差正交激光测振测技术方案(Pengcheng Hu，et.al.“DC-offset homodyneinterferometer and its nonlinearity compensation”.Optics Express，2015，23(7)：8399-8408)。该技术方案中，如干涉部分输出两个偏振方向正交的线偏振光，记为P光和S光，经消偏振分光镜NBS分成两束，一束直接经绕光束方向空间旋转45°的渥拉斯特棱镜分成两束，然后被两个光电探测器接收，另一束先经光轴与一个线偏振光的偏振方向一致的四分之一波片，再经另一绕光束方向空间旋转45°的渥拉斯特棱镜分成两束，然后被另两个光电探测器接收。最终得到四路相位相差90°的干涉信号。该方案同样受干涉部分的偏振混叠和探测部分的附加相移影响，探测部分四分之一波片的非正交误差旋转灵敏度为2.7°/1°。(2) In 2015, Hu Pengcheng of Harbin Institute of Technology also proposed a four-channel homodyne orthogonal laser vibration measurement technology scheme based on spatially rotating Wollaste prism (Pengcheng Hu, et.al. "DC-offset homodyne interferometer and its nonlinearity compensation". Optics Express, 2015, 23(7): 8399-8408). In this technical solution, if the interference part outputs two linearly polarized lights with orthogonal polarization directions, which are denoted as P light and S light, they are divided into two beams by the depolarization beam splitter NBS, and one beam is directly passed through the beam that is rotated 45° around the beam direction. The Wollast prism is divided into two beams, which are then received by two photodetectors. The other beam first passes through a quarter-wave plate whose optical axis is consistent with the polarization direction of a linearly polarized light, and then passes through another space around the beam direction. The Wollaste prism rotated by 45° splits into two beams, which are then received by two other photodetectors. Finally, four channels of interference signals with a phase difference of 90° are obtained. This scheme is also affected by the polarization aliasing of the interference part and the additional phase shift of the detection part, and the non-orthogonal error rotation sensitivity of the quarter-wave plate of the detection part is 2.7°/1°.
(3)2015年.哈尔滨工业大学的崔俊宁等提出了一系列基于消偏振分光镜和渥拉斯特棱镜分光的四通道零差正交激光测振测技术方案(1.崔俊宁，何张强，谭久彬.单路圆偏振干涉和单渥拉斯特棱镜分光式零差激光测振仪，中国专利授权号：ZL201510340554.0；2.崔俊宁，何张强，谭久彬.双路圆偏振干涉和单渥拉斯特棱镜分光式零差激光测振仪，中国专利授权号：ZL201510341864.4；3.崔俊宁，何张强，久元溦，姜宏蕾，谭久彬.单路线偏振干涉和单渥拉斯特棱镜分光式零差激光测振仪，中国专利授权号：ZL 201510340370.4；4.崔俊宁，何张强，谭久彬.双路线偏振干涉和单渥拉斯特棱镜分光式零差激光测振仪，中国专利授权号：ZL201510340552.1)。这些技术方案中，干涉部分采用消偏振分光镜分光，通过在测量臂和参考臂中引入一个四分之一波片，使干涉部分输出两个偏振方向正交的线偏振光或圆偏振光，探测部分采用消偏振分光镜和渥拉斯特棱镜分光，产生四路相位相差90°的干涉信号。这些技术方案从原理上消除了偏振混叠，但是消偏振分光镜的附加相移使波片的非正交误差灵敏度增加的问题没有得到有效解决。(3) In 2015, Cui Junning from Harbin Institute of Technology and others proposed a series of four-channel homodyne orthogonal laser vibration measurement technology solutions based on depolarization beam splitter and Wollaste prism (1. Cui Junning, He Zhangqiang, Tan Jiubin .Single-channel circular polarization interference and single Wollaste prism spectroscopic homodyne laser vibrometer, Chinese patent authorization number: ZL201510340554.0; 2. Cui Junning, He Zhangqiang, Tan Jiubin. Dual-channel circular polarization interference and single Wollas Special prism spectroscopic homodyne laser vibrometer, Chinese patent authorization number: ZL201510341864.4; 3. Cui Junning, He Zhangqiang, Jiu Yuanwei, Jiang Honglei, Tan Jiubin. Single line polarization interference and single Wollaste prism spectroscopic homodyne Laser vibrometer, Chinese patent authorization number: ZL 201510340370.4; 4. Cui Junning, He Zhangqiang, Tan Jiubin. Dual-line polarization interference and single Wollaste prism spectroscopic homodyne laser vibrometer, Chinese patent authorization number: ZL201510340552.1 ). In these technical solutions, the interference part uses a depolarized beam splitter to split the light. By introducing a quarter-wave plate into the measurement arm and the reference arm, the interference part outputs two linearly polarized or circularly polarized lights with orthogonal polarization directions. The detection part uses a depolarization beam splitter and a Wollastedt prism to split the light, and generates four interference signals with a phase difference of 90°. These technical solutions eliminate polarization aliasing in principle, but the problem that the additional phase shift of the depolarized beam splitter increases the sensitivity of the non-orthogonal error of the wave plate has not been effectively solved.
综上，由于偏振分光镜的偏振混叠和消偏振分光镜的附加相移等因素，导致现有零差正交激光测振仪技术方案在干涉部分和探测部分，受光路结构、原理及光学器件本身特性不理想的限制，存在波片非正交误差灵敏度较大的问题，非正交误差灵敏度高达2°/1°左右，从而导致非线性误差很难调整到零，其值可达几nm甚至几十nm，难以满足实时、高精度测量，尤其是下一代亚纳米甚至皮米级精度、以及纳米级振幅等振动测量需求。因此，如何通过光路结构与原理上的创新，提供一种能从光路结构和原理上抑制非线性误差以及降低波片非正交误差灵敏度的零差正交激光测振技术方案，提高零差激光测振仪的鲁棒性，意义十分重大。In summary, due to factors such as the polarization aliasing of the polarizing beam splitter and the additional phase shift of the depolarizing beam splitting mirror, the existing homodyne orthogonal laser vibrometer technical solutions are in the interference part and detection part. Due to the limitation of the unsatisfactory characteristics of the device itself, there is a problem that the non-orthogonal error sensitivity of the wave plate is large, and the non-orthogonal error sensitivity is as high as about 2°/1°, which makes it difficult to adjust the nonlinear error to zero, and its value can reach several nm or even dozens of nm, it is difficult to meet the real-time, high-precision measurement, especially the vibration measurement requirements of the next generation of sub-nanometer or even picometer-level accuracy, and nano-level amplitude. Therefore, how to provide a homodyne orthogonal laser vibration measurement technology solution that can suppress nonlinear errors and reduce the sensitivity of wave plate non-orthogonal errors from the optical path structure and principle through innovation in the optical path structure and principle, and improve homodyne laser The robustness of the vibrometer is of great significance.
发明内容Contents of the invention
本发明的目的是针对现有零差正交激光测振技术方案在光路结构和原理上存在的波片非正交误差灵敏度较大的问题，提供一种基于波片偏航的高鲁棒性零差激光测振仪及四步调整法，通过光路结构与原理的创新，光路调整简单，使波片在指定安装角度位置非正交误差为零且波片的非正交误差灵敏度为零，减少了光路的非线性误差，提高了光路的鲁棒性，可满足实时测量的需求。The purpose of the present invention is to provide a high robustness based on wave plate yaw in view of the existing homodyne orthogonal laser vibrometer technology scheme in terms of the optical path structure and principle of the non-orthogonal error sensitivity of the wave plate. The homodyne laser vibrometer and the four-step adjustment method, through the innovation of the optical path structure and principle, the optical path adjustment is simple, so that the non-orthogonal error of the wave plate at the specified installation angle is zero and the non-orthogonal error sensitivity of the wave plate is zero. The nonlinear error of the optical path is reduced, the robustness of the optical path is improved, and the requirement of real-time measurement can be met.
本发明的技术解决方案是：Technical solution of the present invention is:
一种基于波片偏航的高鲁棒性零差激光测振仪，由干涉部分和探测部分组成，所述干涉部分由激光器、光隔离器、第一消偏振分光镜、参考镜、第一四分之一波片、二分之一波片和测量镜组成；激光器发出线偏振光，经光隔离器后被第一消偏振分光镜分光，反射光作为参考光与第一四分之一波片、参考镜形成参考臂，透射光作为测量光与二分之一波片、测量镜形成测量臂，第一四分之一波片位于第一消偏振分光镜和参考镜之间，二分之一波片位于第一消偏振分光镜和测量镜之间；参考光经第一消偏振分光镜透射，测量光经第一消偏振分光镜反射，参考光与测量光合光形成干涉光；所述探测部分由第二消偏振分光镜、第二四分之一波片，第一渥拉斯特棱镜、第二渥拉斯特棱镜、第一光电探测器、第二光电探测器、第三光电探测器和第四光电探测器组成；干涉光经第二消偏振分光镜透射形成第一光束和反射形成第二光束；第一光束经第一渥拉斯特棱镜分成第一o光、第一e光，分别被第一光电探测器、第二光电探测器接收；第二光束先经第二四分之一波片后，经第二渥拉斯特棱镜分成第二o光、第二e光，分别被第三光电探测器、第四光电探测器接收；所述第一四分之一波片和二分之一波片具有一定的偏航角度。A highly robust homodyne laser vibrometer based on wave plate yaw, which consists of an interference part and a detection part, the interference part consists of a laser, an optical isolator, a first depolarizing beam splitter, a reference mirror, a first Composed of a quarter-wave plate, a half-wave plate and a measuring mirror; the laser emits linearly polarized light, which is split by the first depolarized beam splitter after passing through the optical isolator, and the reflected light is used as the reference light and the first quarter wave The wave plate and the reference mirror form a reference arm, the transmitted light is used as the measurement light and the half wave plate and the measuring mirror form the measuring arm, the first quarter wave plate is located between the first depolarizing beam splitter and the reference mirror, the two The one-half wave plate is located between the first depolarizing beam splitter and the measuring mirror; the reference light is transmitted through the first depolarizing beam splitter, the measuring light is reflected by the first depolarizing beam splitter, and the reference light and the measuring photosynthetic light form interference light; The detection part consists of a second depolarizing beam splitter, a second quarter-wave plate, a first Wollaste prism, a second Wollaste prism, a first photodetector, a second photodetector, a first Composed of three photodetectors and a fourth photodetector; the interference light is transmitted through the second depolarizing beam splitter to form the first beam and reflected to form the second beam; the first beam is divided into the first o light, The first e light is respectively received by the first photodetector and the second photodetector; the second light beam first passes through the second quarter-wave plate, and then is divided into the second o light and the second light by the second Wollast prism. The two e lights are respectively received by the third photodetector and the fourth photodetector; the first quarter wave plate and the half wave plate have a certain yaw angle.
一种基于波片偏航的高鲁棒性零差激光测振四步调整法，该方法包括以下步骤：A highly robust homodyne laser vibrometer four-step adjustment method based on wave plate yaw, the method includes the following steps:
(1)光隔离器输出光偏振方向与竖直方向夹角为45°，二分之一波片、第一四分之一波片和第二四分之一波片的快轴与竖直方向夹角分别为0°、0°和45°，激光垂直入射到二分之一波片、第一四分之一波片和第二四分之一波片。(1) The angle between the polarization direction of the output light of the optical isolator and the vertical direction is 45°, and the fast axis of the half-wave plate, the first quarter-wave plate and the second quarter-wave plate and the vertical The direction angles are 0°, 0° and 45° respectively, and the laser light is vertically incident on the half-wave plate, the first quarter-wave plate and the second quarter-wave plate.
(2)偏航第一四分之一波片，使第一光电探测器与第二光电探测器接收的信号的丽萨如图为斜率为负数的直线；(2) yaw the first quarter-wave plate, so that the Lisa of the signals received by the first photodetector and the second photodetector is shown as a straight line with a negative slope;
(3)偏航二分之一波片，使非正交误差最小；(3) Yaw one-half wave plate to minimize the non-orthogonal error;
(4)偏航第一四分之一波片，使第一光电探测器与第二光电探测器接收的信号的丽萨如图为斜率为负数的直线。(4) Yaw the first quarter-wave plate, so that the Lisa of the signals received by the first photodetector and the second photodetector is a straight line with a negative slope as shown in the figure.
所述激光器为稳频激光器。The laser is a frequency-stabilized laser.
所述参考镜、测量镜为平面反射或角锥反射镜。The reference mirror and the measuring mirror are plane reflectors or pyramid reflectors.
所述第一消偏振分光镜、第二消偏振分光镜分光比为50％∶50％。The light splitting ratio of the first depolarizing beam splitter and the second depolarizing beam splitter is 50%:50%.
本发明的技术创新性及产生的良好效果在于：The technical innovation of the present invention and the good effect that produce are:
(1)本发明提出一种从原理上可消除消偏振分光镜附加相移的四通道零差正交激光测振仪技术方案。该方案采用消偏振分光镜分光形成参考臂和测量臂，在参考臂和测量臂上分别引入四分之一波片和二分之一波片，通过改变波片的相位延迟补偿消偏振分光镜的附加相移，使干涉部分输出的参考光和测量光为正交偏振光，理论上可使波片在指定安装角度位置非正交误差为零且波片的非正交误差灵敏度为零，提高了光路的鲁棒性。通过上述技术创新，可有效解决现有技术方案中光路由于偏振混叠和附加相移导致波片非正交误差灵敏度较大的问题。(1) The present invention proposes a technical solution of a four-channel homodyne orthogonal laser vibrometer that can eliminate the additional phase shift of the depolarizing beam splitter in principle. In this scheme, a depolarized beam splitter is used to split light to form a reference arm and a measurement arm, and a quarter-wave plate and a half-wave plate are respectively introduced into the reference arm and the measurement arm, and the depolarized beam splitter is compensated by changing the phase delay of the wave plate. The additional phase shift of , so that the reference light and measuring light output by the interference part are orthogonally polarized light, theoretically, the non-orthogonal error of the wave plate at the specified installation angle can be zero and the non-orthogonal error sensitivity of the wave plate is zero. The robustness of the optical path is improved. Through the above technical innovations, the problem of high non-orthogonal error sensitivity of the wave plate due to polarization aliasing and additional phase shift in the optical path in the prior art solution can be effectively solved.
(2)本发明提出一种简单快速的四步调整法。该方法根据四路干涉信号的丽萨如图形状以及非正交误差值调整二分之一波片和四分之一波片的偏航角度，调整简单有效，能够满足以波片的相位延迟消除消偏振分光镜的附加相移的要求。(2) The present invention proposes a simple and rapid four-step adjustment method. This method adjusts the yaw angle of the half-wave plate and the quarter-wave plate according to the Lissa diagram shape of the four-way interference signal and the non-orthogonal error value. The adjustment is simple and effective, and can meet the phase delay of the wave plate. Eliminates the requirement for additional phase shift of the depolarizing beamsplitter.
附图说明Description of drawings
图1为本发明的基于波片偏航的高鲁棒性零差激光测振仪的光路原理图的一个实施例；Fig. 1 is an embodiment of the optical path principle diagram of the highly robust homodyne laser vibrometer based on the wave plate yaw of the present invention;
图2为波片相位延迟与偏航角度关系的分析结果；Figure 2 is the analysis result of the relationship between wave plate phase delay and yaw angle;
图3为波片偏航前后非正交误差对波片旋转角度关系的一个实施例；Fig. 3 is an embodiment of the relationship between the non-orthogonal error before and after the yaw of the wave plate to the angle of rotation of the wave plate;
图中件号说明：1激光器、2光隔离器、3第一消偏振分光镜、4参考镜、5二分之一波片、6测量镜、7第一渥拉斯特棱镜、8第二渥拉斯特棱镜、9第一光电探测器、10第二光电探测器、11第三光电探测器、12第四光电探测器、13干涉部分、14探测部分、15参考光、16测量光、17干涉光、18第一光束、19第二光束、20第二消偏振分光镜、21第一o光、22第一e光、23第二o光、24第二e光、25第一四分之一波片、26第二四分之一波片。Part number description in the figure: 1 laser, 2 optical isolator, 3 first depolarizing beam splitter, 4 reference mirror, 5 half wave plate, 6 measuring mirror, 7 first Wollasted prism, 8 second Wollaste prism, 9 first photodetector, 10 second photodetector, 11 third photodetector, 12 fourth photodetector, 13 interference part, 14 detection part, 15 reference light, 16 measurement light, 17 interference light, 18 first light beam, 19 second light beam, 20 second depolarizing beam splitter, 21 first o light, 22 first e light, 23 second o light, 24 second e light, 25 first four One-quarter wave plate, 26 second quarter wave plate.
具体实施方式detailed description
下面结合附图对本发明的具体实施方式进行详细说明，并给出实施例。The specific implementation manner of the present invention will be described in detail below with reference to the accompanying drawings, and examples will be given.
一种基于波片偏航的高鲁棒性零差激光测振仪，由干涉部分13和探测部分14组成，所述干涉部分13由激光器1、光隔离器2、第一消偏振分光镜3、参考镜4、第一四分之一波片25、二分之一波片5和测量镜6组成；激光器1发出线偏振光，经光隔离器2后被第一消偏振分光镜3分光，反射光作为参考光15与第一四分之一波片25、参考镜4形成参考臂，透射光作为测量光16与二分之一波片5、测量镜6形成测量臂，第一四分之一波片25位于第一消偏振分光镜3和参考镜4之间，二分之一波片5位于第一消偏振分光镜3和测量镜6之间；参考光15经第一消偏振分光镜3透射，测量光16经第一消偏振分光镜3反射，参考光15与测量光16合光形成干涉光17；所述探测部分14由第二消偏振分光镜20、第二四分之一波片26，第一渥拉斯特棱镜7、第二渥拉斯特棱镜8、第一光电探测器9、第二光电探测器10、第三光电探测器11和第四光电探测器12组成；干涉光17经第二消偏振分光镜20透射形成第一光束18和反射形成第二光束19；第一光束18经第一渥拉斯特棱镜7分成第一o光21、第一e光22，分别被第一光电探测器9、第二光电探测器10接收；第二光束19先经第二四分之一波片26后，经第二渥拉斯特棱镜8分成第二o光23、第二e光24，分别被第三光电探测器11、第四光电探测器12接收；所述第一四分之一波片25和二分之一波片5具有一定的偏航角度。A highly robust homodyne laser vibrometer based on wave plate yaw, consisting of an interference part 13 and a detection part 14, the interference part 13 is composed of a laser 1, an optical isolator 2, and a first depolarizing beam splitter 3 , a reference mirror 4, a first quarter-wave plate 25, a half-wave plate 5 and a measuring mirror 6; the laser 1 emits linearly polarized light, which is split by the first depolarizing beam splitter 3 after passing through the optical isolator 2 , the reflected light is used as the reference light 15 to form a reference arm with the first quarter-wave plate 25 and the reference mirror 4, and the transmitted light is used as the measurement light 16 to form the measurement arm with the half-wave plate 5 and the measuring mirror 6, and the first four The one-half wave plate 25 is located between the first depolarizing beam splitter 3 and the reference mirror 4, and the half wave plate 5 is located between the first depolarizing beam splitter 3 and the measuring mirror 6; the reference light 15 passes through the first depolarizing beam splitter The polarizing beam splitter 3 transmits, the measuring light 16 is reflected by the first depolarizing beam splitting mirror 3, and the reference light 15 combines with the measuring light 16 to form interference light 17; the detection part 14 is composed of the second depolarizing beam splitting mirror 20, the second One-third wave plate 26, the first Wollaste prism 7, the second Wollaste prism 8, the first photodetector 9, the second photodetector 10, the third photodetector 11 and the fourth photodetector The interference light 17 is transmitted through the second depolarizing beam splitter 20 to form the first light beam 18 and reflected to form the second light beam 19; the first light beam 18 is divided into the first o light 21, the second light beam 18 through the first Wollaste prism 7 An e light 22 is received by the first photodetector 9 and the second photodetector 10 respectively; after the second light beam 19 first passes through the second quarter-wave plate 26, it is divided into the first by the second Wollaste prism 8 The second o light 23 and the second e light 24 are respectively received by the third photodetector 11 and the fourth photodetector 12; the first quarter wave plate 25 and the half wave plate 5 have a certain yaw angle.
一种基于波片偏航的高鲁棒性零差激光测振四步调整法，该方法包括以下步骤：A highly robust homodyne laser vibrometer four-step adjustment method based on wave plate yaw, the method includes the following steps:
(1)光隔离器2输出光偏振方向与竖直方向夹角为45°，二分之一波片5、第一四分之一波片25和第二四分之一波片26的快轴与竖直方向夹角分别为0°、0°和45°，激光垂直入射到二分之一波片5、第一四分之一波片25和第二四分之一波片26；(1) Optical isolator 2 output light polarization direction and vertical direction angle are 45 °, the fast of half wave plate 5, the first quarter wave plate 25 and the second quarter wave plate 26 The included angles between the axis and the vertical direction are 0°, 0° and 45° respectively, and the laser is vertically incident on the half-wave plate 5, the first quarter-wave plate 25 and the second quarter-wave plate 26;
(2)偏航第一四分之一波片25，使第一光电探测器9与第二光电探测器10接收的信号的丽萨如图为斜率为负数的直线；(2) yaw the first quarter-wave plate 25, so that the Lisa of the signals received by the first photodetector 9 and the second photodetector 10 is a straight line with a negative slope as shown in the figure;
(3)偏航二分之一波片5，使非正交误差最小；(3) yaw 1/2 wave plate 5 to minimize the non-orthogonal error;
(4)偏航第一四分之一波片25，使第一光电探测器9与第二光电探测器10接收的信号的丽萨如图为斜率为负数的直线。(4) Yawing the first quarter-wave plate 25 so that the LIS of the signals received by the first photodetector 9 and the second photodetector 10 is a straight line with a negative slope as shown in the figure.
所述激光器1为稳频激光器。The laser 1 is a frequency-stabilized laser.
所述参考镜4、测量镜6为平面反射或角锥反射镜。The reference mirror 4 and the measuring mirror 6 are plane reflectors or pyramid reflectors.
所述第一消偏振分光镜3、第二消偏振分光镜20分光比为50％∶50％。The light splitting ratio of the first depolarizing beam splitter 3 and the second depolarizing beam splitter 20 is 50%:50%.
下面结合图1给出本发明的一个实施例。本实施例中，激光器1采用经过稳频的He-Ne激光器，波长为632.8nm，噪声＜0.05％rms，输出功率为1mW，偏振化为1000∶1，在空间坐标系xyz内，激光器1发出线偏振光，偏振方向沿x轴，即为P光。光束经光隔离器2后变成45°线偏振光。经第一消偏振分光镜3等比例分光，在参考臂上，第一四分之一波片25放置在yz平面内，其快轴与y轴夹角为0，在测量臂上，二分之一波片5放置在xy平面内，理论上其快轴可与y轴成任意角度，在本实施例中，其夹角为0。参考光15经消偏振分光镜3一次反射和一次透射，测量光16经消偏振分光镜3一次透射和一次反射，参考光15和测量光16合成后形成干涉光17。干涉光17在探测部分14被第二消偏振分光镜20分成两束光，一束直接被第一渥拉斯特棱镜7分成第一o光21和第一e光22，分别被第一、二光电探测器9、10接收，另一束先经快轴与y轴方向成45°的第二四分之一波片26移相后，再被第二渥拉斯特棱镜8分成第二o光23和第二e光24，分别被第一、二光电探测器11、12接收。An embodiment of the present invention is given below in conjunction with FIG. 1 . In this embodiment, the laser 1 adopts a frequency-stabilized He-Ne laser, the wavelength is 632.8nm, the noise is less than 0.05% rms, the output power is 1mW, and the polarization is 1000:1. In the space coordinate system xyz, the laser 1 emits Linearly polarized light, the polarization direction is along the x-axis, that is, P light. The light beam becomes 45° linearly polarized light after passing through the optical isolator 2. After the first depolarizing beam splitter 3 equal-proportion light splitting, on the reference arm, the first quarter-wave plate 25 is placed in the yz plane, and the angle between its fast axis and the y-axis is 0; One of the wave plates 5 is placed in the xy plane, theoretically its fast axis can form any angle with the y axis, and in this embodiment, the included angle is 0. The reference light 15 is once reflected and once transmitted by the depolarizing beam splitter 3 , the measuring light 16 is once transmitted and once reflected by the depolarizing beam splitter 3 , and the reference light 15 and the measuring light 16 are synthesized to form interference light 17 . The interfering light 17 is split into two beams by the second depolarizing beam splitter 20 in the detection part 14, and one beam is directly split into the first o-light 21 and the first e-light 22 by the first Wollaste prism 7, respectively by the first, Two photodetectors 9, 10 receive, and another beam first passes through the second quarter-wave plate 26 phase-shifting of 45 ° with the y-axis direction, and then is divided into the second by the second Wollaste prism 8. The o light 23 and the second e light 24 are respectively received by the first and second photodetectors 11 and 12 .
本实施例中，光电探测器采用Si PIN类型的二象限光电探测器，光敏区大小为10mm×10mm，灵敏度为0.45A/W(λ＝632.8nm)，二象限光电探测器的两个象限分别作为第一、二光电探测器9、10；同理，采用另一个二象限光电探测器的两个象限作为第三、四光电探测器11、12。In this embodiment, the photodetector adopts a Si PIN type two-quadrant photodetector, the size of the photosensitive area is 10mm×10mm, and the sensitivity is 0.45A/W (λ=632.8nm). The two quadrants of the two-quadrant photodetector are respectively as the first and second photodetectors 9 and 10; similarly, two quadrants of another two-quadrant photodetector are used as the third and fourth photodetectors 11 and 12.
本实施例中，消偏振分光镜从四个面(A面～D面)分别入射时，透射相移分别为5.4°、10.4°、6.5°和12.4°，反射相移分别为132.7°、134.5°、158.3°和159.7度。当二分之一波片的相位延迟为199°以及第一四分之一波片的相位延迟为119.2°时，可补偿消偏振分光镜的附加相移。In this embodiment, when the depolarizing beamsplitter is incident from the four surfaces (A surface to D surface), the transmission phase shifts are 5.4°, 10.4°, 6.5° and 12.4° respectively, and the reflection phase shifts are 132.7° and 134.5° respectively. °, 158.3° and 159.7 degrees. When the phase delay of the half-wave plate is 199° and the phase delay of the first quarter-wave plate is 119.2°, the additional phase shift of the depolarizing beamsplitter can be compensated.
图2为波片相位延迟与偏航角度关系的分析结果。图2(a)为零级四分之一石英波片相位延迟曲线，图2(b)为零级二分之一石英波片相位延迟曲线。理想情况下，当光束垂直入射到波片，即偏航角度为0时，四分之一波片、二分之一波片的相位延迟分别为90°、180°。当二分之一波片的偏航角度为3.5°时，相位延迟为199°，四分之一波片偏航角度为4.4°时，相位延迟为119.2°。通过微小的偏航角度，可满足改变波片相位延迟的需求。Figure 2 shows the analysis results of the relationship between wave plate phase delay and yaw angle. Figure 2(a) is the phase delay curve of the zero-order quarter quartz wave plate, and Figure 2(b) is the phase delay curve of the zero-order one-half quartz wave plate. Ideally, when the beam is vertically incident on the wave plate, that is, when the yaw angle is 0, the phase delays of the quarter-wave plate and the half-wave plate are 90° and 180°, respectively. When the yaw angle of the half-wave plate is 3.5°, the phase delay is 199°, and when the yaw angle of the quarter-wave plate is 4.4°, the phase delay is 119.2°. Through the small yaw angle, the requirement of changing the phase delay of the wave plate can be met.
图3为波片偏航前后非正交误差对波片旋转角度关系的一个实施例。波片偏航前，非正交误差对第一四分之一波片25旋转的灵敏度高达1.4°/1°。偏航后，在二分之一波片5、第一四分之一波片25、第二四分之一波片26的指定安装角度为0°、0°和45°处，波片的非正交误差灵敏度均为0。通过偏航波片的方法，该零差激光测振仪的鲁棒性得到极大的提高。Fig. 3 is an embodiment of the relationship between the non-orthogonal error before and after the yaw of the wave plate and the rotation angle of the wave plate. Before the wave plate yaws, the sensitivity of the non-orthogonal error to the rotation of the first quarter wave plate 25 is as high as 1.4°/1°. After yaw, at the designated installation angles of the half-wave plate 5, the first quarter-wave plate 25, and the second quarter-wave plate 26 at 0°, 0° and 45°, the wave plate Non-orthogonal error sensitivities are all 0. Through the method of yaw wave plate, the robustness of the homodyne laser vibrometer is greatly improved.
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