CN106312778A - A double-sided polishing machine for large-diameter optical components - Google Patents

Abstract

The invention discloses a large-caliber optical element double-sided polishing machine, and belongs to the technical field of optical element processing. The upper polishing disk structure capable of swinging and rotating is adopted, so that the upper polishing disk can swing, polish and annularly polish workpieces at the same time, the polishing efficiency is improved, the polishing track is more uniform, and the problems that the surface shape is easy to have edges stepped and corners warped are solved; the lower polishing disc annularly polishes the lower surface of the workpiece, the correction disc is adopted to correct and maintain the surface shape of the lower polishing disc, and the surface shape precision of the polishing disc is improved, so that the surface shape precision of an optical element is improved, and the small-size manufacturing error of the optical surface is reduced; an adjustable caliper structure is adopted, adjustable process parameters are increased, the polishing track is further uniform, and the double-side polishing precision and the production efficiency are improved; the invention is suitable for the double-side polishing of large-aperture optical elements with apertures up to 600mm and special requirements on parallelism, reflected wavefront and transmitted wavefront.

Description

A double-sided polishing machine for large-diameter optical components

technical field

The invention belongs to the technical field of optical element processing, in particular to a double-sided polishing machine for large-diameter optical elements.

Background technique

With the development of modern optical systems, especially the rapid development of high-power laser devices, higher requirements are placed on the processing of large-diameter optical components. In addition to strict requirements on surface shape accuracy, parallelism, production cycle and production cost, small-scale manufacturing errors of optical surfaces have also attracted more and more attention. Small-scale manufacturing errors on optical surfaces can lead to high-frequency modulation of the beam and nonlinear growth of the system, which can easily cause damage to optical components and reduce the focusable power of the beam.

At present, large-scale ring polishing machines at home and abroad adopt the method of single-sided polishing. The processing accuracy depends on the experience of the operator, and the requirements for the operator are high. When processing an optical element with a transmitted wavefront, only one side can be processed first, and the other One side needs to be protected, which makes it difficult to detect the transmitted wavefront, and the processing efficiency is low; the existing domestic double-sided polishing machine is mainly for small and medium-sized ultra-thin optical components with a diameter of 80-300mm, mainly focusing on the production cycle and production cost, surface shape accuracy, parallelism The precision requirements are generally not high, and it cannot meet the requirements for double-sided polishing of optical components with a diameter of 600mm. Patent 2010101454338 proposes a ring and pendulum polishing double-sided polishing machine, which integrates ring and pendulum throwing, and is suitable for polishing large-diameter ultra-thin optical components with transmission and reflection wavefront requirements. The polishing efficiency of the workpiece varies greatly, and the workpiece needs to be turned over frequently during the processing process, and when the upper plate swings, the linear speed difference between the center and the edge position is relatively large, which may easily cause the workpiece surface to step and warp; in addition, Patent 2013202816890 proposes an active translational double-sided polishing machine, which integrates translational polishing and circular polishing, and is suitable for polishing large-diameter ultra-thin optical components that have special requirements for processing traces. It is easy to change the surface shape, which reduces the processing accuracy, and it takes extra time to repair the surface shape of the lower plate, which prolongs the processing cycle. In addition, large-diameter optical components can also be processed by CNC small tool polishing, which can improve surface shape accuracy, but will introduce small-scale manufacturing errors on the optical surface, reducing the service life of optical components and system beam quality.

Aiming at the processing characteristics of large-diameter optical elements and the defects of the existing processing technology, the present invention adopts an upper polishing disc structure capable of swinging and rotating, so that the movement mode of the upper polishing disc becomes active, thereby improving the polishing efficiency, and the polishing track It is more uniform and solves the problems of surface treading and warping angle; in addition, the surface shape correction structure of the lower polishing disc is adopted, so that the surface shape of the lower polishing disc can be repaired and maintained during work, which improves the surface shape accuracy of the lower polishing disc and reduces the optical surface Small size manufacturing error; in addition, the adjustable caliper structure is adopted to increase the adjustable process parameters, further make the polishing trajectory uniform, improve the double-sided polishing accuracy and production efficiency of large-diameter optical components, and improve the service life of optical components and the system beam quality.

Contents of the invention

The purpose of the present invention is to propose a double-sided polishing machine for large-diameter optical elements, which can achieve double-sided polishing of large-diameter optical elements with a diameter of 600mm and special requirements for parallelism, reflected wavefront and transmitted wavefront. The invention adopts the structure of the upper polishing disc that can swing and rotate, so that the movement mode of the upper polishing disc becomes active, improves the polishing efficiency, makes the polishing track more uniform, and solves the problems of surface stepping and warping angle; in addition, adopts the lower polishing disc The surface shape correction structure of the polishing disk enables the surface shape of the lower polishing disk to be repaired and maintained during work, and improves the surface shape accuracy of the lower polishing disk, thereby improving the surface shape accuracy of optical components and reducing the small-scale manufacturing error of the optical surface; in addition, adjustable calipers are used structure, adding adjustable process parameters, further making the polishing track uniform, improving the precision and production efficiency of double-sided polishing of large-diameter optical components, and improving the service life of optical components and the quality of system beams.

Technical solution of the present invention is as follows:

A double-sided polishing machine for large-diameter optical components, including: an upper polishing disc, a main swing rod, an auxiliary swing rod, an eccentric wheel, an eccentric wheel base, an upper polishing disc rotation shaft, an upper polishing disc drive motor, a correction disc, and a correction disc caliper , correction disc drive motor, workpiece ring, workpiece ring caliper, workpiece ring drive motor, lower polishing disc, and main base; among them, the main swing rod, auxiliary swing rod, eccentric wheel, and eccentric wheel base form the swing structure of the upper polishing disc, which is the upper The polishing disc provides swinging motion; one end of the main swing rod is provided with an upper polishing disc rotation axis and an upper polishing disc driving motor, and the upper polishing disc driving motor drives the upper polishing disc rotation axis to provide rotation movement for the upper polishing disc; the correction disc is located on the lower On the surface of the polishing disc, the position is limited by the calibration disc caliper, and the calibration disc caliper drive motor is set on the calibration disc caliper, which is used to drive the calibration disc to rotate; the workpiece ring is located on the lower polishing disc surface, limited by the workpiece ring caliper, and the workpiece ring caliper is set A workpiece ring drive motor is used to drive the workpiece ring to rotate; the main base is connected to the lower polishing disc, which drives the lower polishing disc to rotate counterclockwise.

The length of the auxiliary pendulum can be adjusted, one end is connected to the main pendulum through a joint bearing, and the other end is connected to the eccentric wheel through a rolling bearing; the swing amplitude of the main pendulum can be adjusted by adjusting the eccentricity of the eccentric wheel The length of the main swing rod can be adjusted, and the end surface is provided with a motor seat connected to the driving motor of the upper polishing disc, and a through hole is also provided, and the bottom surface is provided with a square bearing seat for placing the rotation axis of the upper polishing disc; The upper end of the rotation shaft of the upper polishing disc is connected to the output end of the driving motor of the upper polishing disc through a coupling, and the lower end is connected to the upper polishing disc through a joint with a slot; the lower end of the rotation shaft of the upper polishing disc is provided with a pin hole, The pin hole is pierced with a pin, and the pin is located in the slot of the joint; the rotation direction of the upper polishing disc is consistent with the rotation direction of the lower polishing disc.

The diameter of the calibration disc is 8/15 of the diameter of the lower polishing disc, and its thickness is 1/10 of its diameter; the calibration disc is limited by the calibration disc caliper, and the calibration disc caliper can be adjusted to adjust the The position of the calibration disc; the calibration disc rotates under the driving motor of the calibration disc, and the direction of rotation is consistent with the direction of the lower polishing disc.

The workpiece ring caliper is provided with a driving wheel, a driven wheel and a protective arm, the driving wheel is connected with the driving motor of the workpiece ring, and the protective arm is provided with an auxiliary wheel; the driving wheel, the driven wheel and the auxiliary wheel are in contact with the outer circle of the workpiece ring Cutting, for the 120° uniform distribution of the center of the workpiece ring, hold the workpiece ring tightly; the workpiece ring caliper is equipped with an XY axis adjustment device, which can adjust the position of the workpiece ring.

The working process of the present invention is as follows: first sprinkle the polishing liquid on the upper polishing disc, move the calibration disc into the calibration disc caliper, open the workpiece ring protection arm, place the workpiece ring on the lower polishing disc, and put the workpiece into the workpiece ring , sprinkle polishing liquid on the upper surface of the workpiece, then put the upper polishing disc on the workpiece, close the protective arm of the workpiece ring and lock it, adjust the XY axis adjustment device of the workpiece ring, make the workpiece ring in the working position, and then put down the main swing lever , so that the pin at the lower end of the rotation shaft of the upper polishing disc is located in the slot of the joint of the upper polishing disc, adjust the length of the main swing rod, the auxiliary swing rod and the eccentric wheel, so that the upper polishing disc is in the working position, turn on the switch of the main engine, and the main base Work, the lower polishing disc rotates, then turn on the switch of the driving motor of the correction disc and the drive motor of the workpiece ring, the calibration disc and the workpiece ring rotate automatically, after confirming that the operation is normal, turn on the switch of the eccentric wheel base and the drive motor of the upper polishing disc, so that the upper polishing disc swings and Self-rotating work; the lower polishing disc performs circular polishing on the lower surface of the workpiece, while the correction disc corrects and maintains the surface shape of the lower polishing disc, while the upper polishing disc simultaneously performs swing polishing and circular polishing on the workpiece.

The advantages of the present invention are: a double-sided polishing machine for large-diameter optical elements adopts an upper polishing disc structure capable of swinging and rotating, so that the upper polishing disc can perform swing polishing and circular polishing on the workpiece at the same time, thereby improving the polishing efficiency, and The polishing trajectory is more uniform, which solves the problem that the surface shape is prone to stepping and warping; the lower polishing disc performs circular polishing on the lower surface of the workpiece, and the correction disc is used to correct and maintain the surface shape of the lower polishing disc, which improves the surface shape accuracy of the polishing disc. Thereby improving the surface shape precision of the optical element and reducing the manufacturing error of the small size of the optical surface; the adjustable caliper structure is adopted to increase the adjustable process parameters and further make the polishing track uniform; , Double-sided polishing of large-diameter optical components with special requirements for reflected wavefront and transmitted wavefront, which improves the precision and production efficiency of double-sided polishing of large-diameter optical components, and also improves the service life of optical components and system beam quality.

Description of drawings

Fig. 1 is the overall structural representation of the present invention;

Fig. 2 is a schematic diagram of the corresponding positions of the upper polishing disc, the correction disc and the lower polishing disc of the present invention;

Parts and numbers in the picture: 1-upper polishing disc, 2-main swing rod, 3-secondary swing rod, 4-eccentric wheel, 5-eccentric wheel base, 6-upper polishing disc rotation shaft, 7-upper polishing disc drive Motor, 8-calibration disc, 9-calibration disc caliper, 10-calibration disc drive motor, 11-workpiece ring, 12-workpiece ring caliper, 13-workpiece ring drive motor, 14-lower polishing disc, 15-main base, 16 -joint bearing, 17-rolling bearing, 18-motor seat, 19-through hole, 20-square bearing seat, 21-coupling, 22-joint, 23-pin hole, 24-pin, 25-driving wheel, 26- Driven wheel, 27-protection arm, 28-auxiliary wheel, 29-XY axis adjusting device, 30-workpiece.

detailed description

Below in conjunction with embodiment the present invention is further described.

As shown in Figure 1-2, a double-sided polishing machine for large-diameter optical components includes: upper polishing disc 1, main swing rod 2, auxiliary swing rod 3, eccentric wheel 4, eccentric wheel base 5, upper polishing disc rotation shaft 6, Upper polishing disc drive motor 7, calibration disc 8, calibration disc caliper 9, calibration disc drive motor 10, workpiece ring 11, workpiece ring caliper 12, workpiece ring drive motor 13, lower polishing disc 14, main base 15; wherein, the main pendulum Rod 2, auxiliary swing rod 3, eccentric wheel 4, and eccentric wheel base 5 form the swing structure of the upper polishing disc to provide swinging motion for the upper polishing disc; one end of the main swing rod 2 is provided with the rotation axis 6 of the upper polishing disc and the driving motor of the upper polishing disc 7. The driving motor 7 of the upper polishing disc drives the rotation shaft 6 of the upper polishing disc to provide the rotation movement for the upper polishing disc; the correction disc 8 is located on the surface of the lower polishing disc 14, and is limited by the calibration disc caliper 9, which is set on the calibration disc caliper 9 There is a calibration disk caliper drive motor 10 for driving the calibration disk 8 to rotate; the workpiece ring 11 is located on the surface of the lower polishing disk 14, and is limited by the workpiece ring caliper 12. The workpiece ring caliper 12 is provided with a workpiece ring drive motor 13 for The workpiece ring 11 is driven to rotate; the main base 15 is connected to the lower polishing disc 14, and the lower polishing disc 14 is driven to rotate counterclockwise.

The length of the secondary fork 3 can be adjusted, one end is connected with the main fork 2 through a joint bearing 16, and the other end is connected with the eccentric wheel 4 through a rolling bearing 17; the eccentricity of the eccentric wheel 4 can be adjusted by adjusting the The main swing rod 2 swings; the length of the main swing rod 2 can be adjusted, and the end surface is provided with a motor seat 18 connected to the upper polishing disc drive motor 7, and a through hole 19 is also provided, and a square bearing seat is provided on the bottom surface 20, for placing the upper polishing disc rotation shaft 6; the upper end of the upper polishing disc rotation shaft 6 is connected to the output end of the upper polishing disc drive motor 7 through a coupling 21, and the lower end is connected to the upper polishing disc drive motor 7 through a joint 22 with a slot. The polishing disc 1 is connected; the lower end of the upper polishing disc rotation shaft 6 is provided with a pin hole 23, and a latch 24 is pierced in the pin hole, and the latch is located in the slot of the joint; the rotation direction of the upper polishing disc 1 is the same as that of the lower polishing disc The optical discs 14 rotate in the same direction.

The diameter of the correction disc 8 is 8/15 of the diameter of the lower polishing disc 14, and its thickness is 1/10 of its own diameter; the correction disc 8 is limited by the correction disc caliper 9, and the adjustment disc caliper 9 can adjust the position of the calibration disc 8; the calibration disc 8 rotates under the calibration disc drive motor 10, and the direction of rotation is consistent with the direction of the lower polishing disc 14.

Preferably, the diameter of the lower polishing disc 14 is 1500mm, and the material is marble; in addition, the material of the correction disc is also marble.

Described workpiece ring caliper 12 is provided with driving wheel 25, driven wheel 26 and protection arm 27, and driving wheel 25 is connected with described workpiece ring driving motor 13, and protection arm 27 is provided with auxiliary wheel 28; Driving wheel 25, driven wheel 26 and The auxiliary wheel 28 is tangent to the outer circle of the workpiece ring 11, and is evenly distributed at 120° corresponding to the center of the workpiece ring 11, and hugs the workpiece ring 11 tightly; the workpiece ring caliper 12 is provided with an XY axis adjustment device 29, which can be adjusted The workpiece ring 11 position.

Preferably, the upper polishing disc drive motor 7 , the correction disc drive motor 10 , and the workpiece ring drive motor 13 are all speed-adjustable motors, and the eccentric wheel base 4 and the main base 15 are all equipped with speed-adjustable motors.

During work, first sprinkle polishing fluid on the lower polishing disc 14, move the calibration disc 8 into the calibration disc caliper 9, open the workpiece ring protection arm 27, place the workpiece ring 11 on the lower polishing disc 14, and put the workpiece 30 into the workpiece In the ring 11, sprinkle polishing liquid on the upper surface of the workpiece 30, then put the upper polishing disc 1 on the workpiece, close the workpiece ring protection arm 27 and lock it, adjust the workpiece ring XY axis adjustment device 29, so that the workpiece ring 11 is in the In the working position, put down the main swing lever 2 subsequently, so that the latch 24 at the lower end of the upper polishing disc rotation shaft 6 is located in the slot of the upper polishing disc joint 22, adjust the length of the main swing lever 2, the auxiliary swing lever 3 and the eccentric wheel 4, thereby Make the upper polishing disc 1 in the working position, turn on the main engine switch, the main base 15 works, the lower polishing disc 14 rotates, then turn on the switch of the calibration disc drive motor 7 and the workpiece ring drive motor 13, the calibration disc 8 and the workpiece ring 11 rotate automatically, and confirm the operation After normal, open the eccentric gear base 5 and the upper polishing disc drive motor 7 switches to make the upper polishing disc 1 swing and rotate. The lower polishing disc 14 performs annular polishing on the lower surface of the workpiece 30 , while the correction disc 8 corrects and maintains the surface shape of the lower polishing disc 1 , while the upper polishing disc 1 performs swing polishing and annular polishing on the workpiece 30 at the same time.

Experiments show that the present invention adopts an upper polishing disc structure capable of both swinging and self-rotation, so that the upper polishing disc performs swing polishing and ring polishing on the workpiece at the same time, which improves the polishing efficiency, makes the polishing track more uniform, and solves the problem that the surface shape is prone to occur. The problem of stepping on the edge and warping angle; the lower polishing disc performs circular polishing on the lower surface of the workpiece, and the correction disc is used to correct and maintain the surface shape of the lower polishing disc, which improves the surface shape accuracy of the polishing disc, thereby improving the surface shape accuracy of optical elements and reducing the The manufacturing error of the optical surface is small; the adjustable caliper structure is adopted, and the adjustable process parameters are added to further make the polishing track uniform; The double-sided polishing of large-diameter optical components improves the precision and production efficiency of double-sided polishing of large-diameter optical components, and also improves the service life of optical components and the quality of system beams.

The present invention has been described in detail above, but those skilled in the art can make various changes and improvements without departing from the scope of the present invention defined by the appended claims.

Claims (4)

1. an optical elements of large caliber Twp-sided polishing machine, including: upper polishing disk, main fork, secondary fork, eccentric, bias Wheel support, the upper polishing disk axis of rotation, upthrow cd-rom drive motor, correction dish, correction dish clamp, correction disk-drive motor, work Part ring, workpiece ring clamp, workpiece ring drive motor, lower polishing disk, main engine bed；Wherein, main fork, secondary fork, eccentric, The upper polishing disk swinging structure of eccentric support composition, provides oscillating motion for upper polishing disk；Main fork one end is provided with polishing The dish axis of rotation, upthrow cd-rom drive motor, upthrow cd-rom drive motor drives the upper polishing disk axis of rotation to rotate, carries for upper polishing disk For spinning motion；Correction dish is positioned in lower polishing card, spacing by correction dish clamp, and correction dish clamp are provided with correction dish Clamp drive motor, are used for driving correction dish rotation；Workpiece ring is positioned in lower polishing card, spacing by workpiece ring clamp, work It is provided with workpiece ring on part ring clamp and drives motor, be used for driving workpiece ring rotation；Main engine bed connects lower polishing disk, drives lower throwing CD rotation in the counterclockwise direction.

Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described secondary fork scalable Length, one end is connected with described main fork by oscillating bearing, and the other end is connected with described eccentric by rolling bearing；Pass through Regulate the main fork amplitude of oscillation described in the eccentric throw scalable of described eccentric；Described main fork adjustable length, terminal surface is provided with Motor cabinet is connected with described upthrow cd-rom drive motor, is additionally provided with through hole, and bottom surface is provided with square shaft bearing, is used for placing upthrow The CD axis of rotation；Described upper polishing disk axis of rotation upper end is connected with described upthrow cd-rom drive motor outfan by shaft coupling, under End is connected with upper polishing disk by having the joint of flat recess；Described upper polishing disk axis of rotation lower end is provided with pin-and-hole, is installed with in pin-and-hole Latch, latch is positioned at the flat recess of joint；Described upper polishing disk sense of rotation is consistent with described lower polishing disk rotation direction.

Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: the diameter of described correction dish Being the 8/15 of described lower polishing disk diameter, its thickness is the 1/10 of its diameter；Described correction dish is spacing by described correction dish clamp, Relative position by correction dish described in regulation correction dish clamp scalable with described lower polishing disk；Described correction dish is in described correction Rotation under disk-drive motor, sense of rotation is consistent with described lower polishing disk direction.

Optical elements of large caliber Twp-sided polishing machine the most according to claim 1, it is characterised in that: described workpiece ring clamp set Having drivewheel, driven pulley and shield arm, drivewheel to drive motor to be connected with described workpiece ring, shield arm is provided with auxiliary wheel；Actively Wheel, driven pulley and auxiliary wheel are tangent with described workpiece ring cylindrical, and 120 ° of the most described workpiece ring center is uniformly distributed, and holds institute tightly State workpiece ring；Described workpiece ring clamp are provided with XY apparatus for adjusting position, the relative position of workpiece ring described in scalable and lower polishing disk.