CN106206485A - Imageing sensor module and preparation method thereof - Google Patents
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Abstract
本发明实施例公开了一种图像传感器模组,包括:图像传感芯片和至少一个辅助芯片,所述图像传感芯片和所述至少一个辅助芯片由塑封材料封装为一个芯片封装体,所述图像传感芯片和所述至少一个辅助芯片的电路面朝向同一个方向;所述图像传感芯片包括图像传感单元,以及设置在所述图像传感单元入光面上方的封装玻璃,所述芯片封装体正面形成与所述封装玻璃对应的通光孔,所述芯片封装体的背面形成有与所述图像传感芯片的焊垫和所述至少一个辅助芯片的焊垫电连接的重布线图形,所述重布线图形上形成有多个凸点;镜头支架,安装在所述芯片封装体的正面,且所述镜头支架上固定有镜头组。本发明提高了图像传感器模组的可靠性,降低了布线难度。
The embodiment of the present invention discloses an image sensor module, including: an image sensor chip and at least one auxiliary chip, the image sensor chip and the at least one auxiliary chip are packaged into a chip package by a plastic packaging material, the The circuit faces of the image sensing chip and the at least one auxiliary chip face the same direction; the image sensing chip includes an image sensing unit, and packaging glass arranged above the light-incident surface of the image sensing unit, the A light through hole corresponding to the packaging glass is formed on the front of the chip package, and a rewiring that is electrically connected to the pads of the image sensor chip and the pads of the at least one auxiliary chip is formed on the back of the chip package. A pattern, a plurality of bumps are formed on the rewiring pattern; a lens holder is installed on the front of the chip package, and a lens group is fixed on the lens holder. The invention improves the reliability of the image sensor module and reduces the difficulty of wiring.
Description
技术领域technical field
本发明涉及传感器领域,具体涉及一种图像传感器模组及其制作方法。The invention relates to the field of sensors, in particular to an image sensor module and a manufacturing method thereof.
背景技术Background technique
图像传感芯片是一种能够感受外部光线并将其转换成电信号的半导体器件。在图像传感芯片制作完成后,首先对图像传感芯片进行一系列封装工艺,然后安装镜座支架和镜头,形成一个图像传感器模组。图像传感器模组主要用于智能手机、平板电脑、数码相机、汽车行驶记录仪和儿童玩具等电子设备。An image sensor chip is a semiconductor device that senses external light and converts it into electrical signals. After the image sensor chip is manufactured, a series of packaging processes are first performed on the image sensor chip, and then the mirror mount bracket and the lens are installed to form an image sensor module. Image sensor modules are mainly used in electronic devices such as smartphones, tablet computers, digital cameras, car driving recorders, and children's toys.
现有的图像传感芯片封装方法主要为COB(Chip On Board)封装,将裸芯片用导电或非导电胶贴附在互联基板上,然后进行引线键合实现其电气连接。现有技术的图像传感器封装方法只是将单个图像传感芯片封装,而图像传感器模组还包括很多外围辅助芯片,诸如图像处理芯片、中央处理芯片和驱动芯片等,这些芯片需要贴附在软硬结合板上,但是这样的结构存在以下缺点:The existing image sensor chip packaging method is mainly COB (Chip On Board) packaging, the bare chip is attached to the interconnection substrate with conductive or non-conductive adhesive, and then wire bonding is performed to realize its electrical connection. The image sensor packaging method in the prior art only packages a single image sensor chip, and the image sensor module also includes many peripheral auxiliary chips, such as image processing chips, central processing chips and driver chips, etc. These chips need to be attached to the soft and hard Combined with the board, but such a structure has the following disadvantages:
软硬结合板有一定的柔性,因此,软硬结合板在发生弯折和碰撞时,贴附在其上的元器件容易焊垫断裂,使得图像传感器模组的可靠性降低;而且,软硬结合板要贴附外围辅助芯片,势必会增加软硬结合板的层数,布线难度也会增加。Rigid-flex board has a certain degree of flexibility. Therefore, when the board is bent and collided, the components attached to it are likely to break the pads, which reduces the reliability of the image sensor module; moreover, the rigid-flex board The bonding board needs to be attached to peripheral auxiliary chips, which will inevitably increase the number of layers of the flexible and rigid bonding board, and the difficulty of wiring will also increase.
发明内容Contents of the invention
有鉴于此,本发明提出一种图像传感器模组及其制作方法,以解决现有图像传感器模组存在的问题,提高图像传感器模组的可靠性,降低布线难度。In view of this, the present invention proposes an image sensor module and a manufacturing method thereof to solve the problems existing in the existing image sensor module, improve the reliability of the image sensor module, and reduce the difficulty of wiring.
一方面,本发明实施例提供了一种图像传感器模组,包括:On the one hand, an embodiment of the present invention provides an image sensor module, including:
图像传感芯片和至少一个辅助芯片,图像传感芯片和至少一个辅助芯片由塑封材料封装为一个芯片封装体,而且,图像传感芯片和至少一个辅助芯片的电路面朝向同一个方向;The image sensing chip and at least one auxiliary chip, the image sensing chip and the at least one auxiliary chip are packaged into a chip package by a plastic encapsulation material, and the circuit faces of the image sensing chip and the at least one auxiliary chip face the same direction;
图像传感芯片包括图像传感单元,以及设置在该图像传感单元入光面上方的封装玻璃,上述芯片封装体正面形成与封装玻璃对应的通光孔,其背面形成有与图像传感芯片的焊垫和至少一个辅助芯片的焊垫电连接的重布线图形,该重布线图形上形成有多个凸点;The image sensing chip includes an image sensing unit and packaging glass arranged above the light-incident surface of the image sensing unit. The front side of the above-mentioned chip package is formed with a light hole corresponding to the packaging glass, and its back is formed with a hole corresponding to the image sensing chip. A rewiring pattern for electrically connecting the pads of the at least one auxiliary chip to the pads of the auxiliary chip, and a plurality of bumps are formed on the rewiring pattern;
镜头支架,安装在上述芯片封装体的正面,且该镜头支架上固定有镜头组,镜头组包括至少一个光学膜片。The lens bracket is installed on the front of the chip package, and the lens bracket is fixed with a lens group, and the lens group includes at least one optical film.
示例性地,上述塑封材料覆盖封装玻璃的入光面边缘,以形成通光孔。Exemplarily, the above-mentioned molding material covers the edge of the light-incident surface of the packaging glass to form a light-through hole.
示例性地,该图像传感器模组,还包括软硬结合板,软硬结合板包括导电线路层,以及设置在该软硬结合板正面上的多个焊垫,该多个焊垫分别与芯片封装体背面的重布线图形上的多个凸点电连接。Exemplarily, the image sensor module also includes a rigid-flex board, the rigid-flex board includes a conductive circuit layer, and a plurality of welding pads arranged on the front surface of the rigid-flex board, and the plurality of welding pads are respectively connected to the chip Multiple bumps on the redistribution pattern on the back of the package are electrically connected.
示例性地,软硬结合板背面设置有补强钢板。Exemplarily, a reinforcing steel plate is provided on the back of the rigid-flex board.
示例性地,封装玻璃为红外滤光玻璃;Exemplarily, the packaging glass is infrared filter glass;
或者,镜头组中的至少一个光学膜片为红外滤光光学膜片;Alternatively, at least one optical film in the lens group is an infrared filter optical film;
或者,镜头组与封装玻璃之间设置有红外滤光光学膜片,该红外滤光光学膜片固定在镜头支架上。Alternatively, an infrared filtering optical film is arranged between the lens group and the packaging glass, and the infrared filtering optical film is fixed on the lens bracket.
示例性地,辅助芯片包括图像处理芯片、中央处理芯片、镜头组驱动芯片和被动元器件中的一种或几种。Exemplarily, the auxiliary chip includes one or more of an image processing chip, a central processing chip, a lens group driving chip, and passive components.
示例性地,图像传感单元与封装玻璃由胶水键合为一体。Exemplarily, the image sensing unit and the packaging glass are bonded together by glue.
另一方面,本发明实施例提供了一种图像传感器模组的制作方法,包括:On the other hand, an embodiment of the present invention provides a method for manufacturing an image sensor module, including:
将图像传感芯片和至少一个辅助芯片由塑封材料封装为一个芯片封装体,其中图像传感芯片包括图像传感单元,以及设置在该图像传感单元入光面上方的封装玻璃,在芯片封装体正面形成与封装玻璃对应的通光孔;The image sensing chip and at least one auxiliary chip are packaged into a chip package by a plastic packaging material, wherein the image sensing chip includes an image sensing unit, and packaging glass arranged above the light-incident surface of the image sensing unit. A light hole corresponding to the packaging glass is formed on the front of the body;
在芯片封装体的背面形成与图像传感芯片的焊垫和至少一个辅助芯片的焊垫电连接的重布线图形,该重布线图形上形成有多个凸点;A rewiring pattern electrically connected to the pads of the image sensor chip and the pads of at least one auxiliary chip is formed on the back of the chip package, and a plurality of bumps are formed on the rewiring pattern;
在芯片封装体的正面安装镜头支架,该镜头支架上固定有镜头组,镜头组包括至少一个光学膜片。A lens bracket is installed on the front surface of the chip package, and a lens group is fixed on the lens bracket, and the lens group includes at least one optical film.
示例性地,该图像传感器模组的制作方法,还包括:Exemplarily, the manufacturing method of the image sensor module further includes:
提供软硬结合板,该软硬结合板包括导电线路层,以及设置在软硬结合板正面上的多个焊垫;A rigid-flex board is provided, the rigid-flex board includes a conductive circuit layer, and a plurality of solder pads arranged on the front side of the rigid-flex board;
将软硬结合板的多个焊垫分别与芯片封装体背面的重布线图形上的多个凸点电连接。The multiple pads of the rigid-flex board are respectively electrically connected to the multiple bumps on the rewiring pattern on the back of the chip package.
示例性地,上述将图像传感芯片和至少一个辅助芯片由塑封材料封装为一个芯片封装体包括:Exemplarily, the above-mentioned packaging of the image sensor chip and at least one auxiliary chip by a plastic encapsulation material into a chip package includes:
提供支撑基板、图像传感芯片和至少一个辅助芯片;providing a support substrate, an image sensing chip, and at least one companion chip;
将图像传感芯片和至少一个辅助芯片贴附到支撑基板上;attaching the image sensor chip and at least one auxiliary chip to the support substrate;
利用塑封材料将图像传感芯片和至少一个辅助芯片塑封为一个芯片封装体;Plastic packaging the image sensor chip and at least one auxiliary chip into a chip package with a plastic packaging material;
剥离支撑基板。Peel off the support substrate.
示例性地,提供一图像传感芯片包括:Exemplarily, providing an image sensor chip includes:
提供封装玻璃和图像传感晶圆,图像传感晶圆包括多个图像传感单元,在封装玻璃上形成围坝,并与图像传感单元键合为一体;Provide encapsulation glass and image sensing wafer. The image sensing wafer includes multiple image sensing units, forming a dam on the encapsulation glass and bonding with the image sensing unit;
在图像传感晶圆背面制作硅通孔,并在硅通孔底部暴露出焊盘;Fabricate through-silicon vias on the back of the image sensing wafer, and expose pads at the bottom of the through-silicon vias;
在图像传感晶圆背面和硅通孔中沉积绝缘层;Deposition of insulating layers on the backside of image sensing wafers and in TSVs;
通过钻孔技术将硅通孔底部的焊盘暴露出来;The pad at the bottom of the TSV is exposed by drilling technology;
在图像传感晶圆背面和硅通孔中沉积金属层,并进行金属增厚;Deposit metal layers on the backside of the image sensing wafer and in the through-silicon vias, and perform metal thickening;
采用光刻工艺去除多余的金属层并形成图像传感芯片的焊垫,以所述图像传感单元为单位切割图像传感晶圆以获得独立的图像传感芯片。A photolithography process is used to remove redundant metal layers and form bonding pads of the image sensing chip, and the image sensing wafer is cut with the image sensing unit as a unit to obtain independent image sensing chips.
示例性地,上述在芯片封装体的背面制作重布线图形包括:Exemplarily, the above-mentioned making of the rewiring pattern on the back of the chip package includes:
在芯片封装体的背面沉积金属层,并进行金属增厚;Deposit a metal layer on the back of the chip package and thicken the metal;
采用光刻工艺对金属层进行处理以形成重布线图形;The metal layer is processed by photolithography to form a rewiring pattern;
在重布线图形表面进行镍金处理,并包封阻焊层,通过曝光显影暴露出需要植球的焊垫;Nickel-gold treatment is performed on the surface of the rewiring pattern, and the solder mask is encapsulated, and the solder pads that need to be balled are exposed through exposure and development;
在焊垫表面制作锡球,以形成重布线图形上的多个凸点。Solder balls are made on the surface of the pad to form multiple bumps on the redistribution pattern.
本发明实施例提供了一种图像传感器模组及其制作方法,该图像传感器模组通过将图像传感芯片和至少一个辅助芯片封装为一个芯片封装体,实现了图像传感芯片和至少一个辅助芯片的系统级封装,有效避免了辅助芯片的焊垫断裂,提高了图像传感模组的可靠性,同时减少了辅助芯片的布线层数,降低了布线难度。Embodiments of the present invention provide an image sensor module and a manufacturing method thereof. The image sensor module realizes an image sensor chip and at least one auxiliary chip by packaging the image sensor chip and at least one auxiliary chip into a chip package. The system-in-chip package of the chip effectively avoids the breakage of the bonding pad of the auxiliary chip, improves the reliability of the image sensing module, and reduces the number of wiring layers of the auxiliary chip and reduces the difficulty of wiring.
附图说明Description of drawings
图1为本发明实施例一提供的图像传感器模组的结构示意图;FIG. 1 is a schematic structural diagram of an image sensor module provided by Embodiment 1 of the present invention;
图2为本发明实施例二提供的图像传感器模组的结构示意图;FIG. 2 is a schematic structural diagram of an image sensor module provided in Embodiment 2 of the present invention;
图3为本发明实施例三提供的图像传感器模组的制作方法流程图;FIG. 3 is a flow chart of a manufacturing method of an image sensor module provided by Embodiment 3 of the present invention;
图4a至图4r为本发明实施例四提供的图像传感芯片制作方法工序步骤图;4a to 4r are process step diagrams of the method for manufacturing an image sensor chip provided by Embodiment 4 of the present invention;
图5a至图5l为本发明实施例四提供的芯片封装体制作方法的工序步骤图;5a to 5l are process steps diagrams of the chip package manufacturing method provided by Embodiment 4 of the present invention;
图6a至图6d为本发明实施例四提供的图像传感器模组的组装工序步骤图。6a to 6d are step diagrams of the assembly process of the image sensor module provided by Embodiment 4 of the present invention.
具体实施方式detailed description
下面结合附图和实施例对本发明作进一步的详细说明。可以理解的是,此处所描述的具体实施例仅仅用于解释本发明,而非对本发明的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与本发明相关的部分而非全部。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only the parts related to the present invention are shown in the drawings but not all of them.
实施例一Embodiment one
图1为本发明实施例一提供的图像传感器模组的结构示意图。本发明实施例提供的图像传感器模组可以应用于智能手机、平板电脑、数码相机、汽车行驶记录仪和儿童玩具等电子设备。FIG. 1 is a schematic structural diagram of an image sensor module provided by Embodiment 1 of the present invention. The image sensor module provided by the embodiments of the present invention can be applied to electronic devices such as smart phones, tablet computers, digital cameras, car driving recorders, and children's toys.
如图1所示,本实施例提供的图像传感器模组,包括:As shown in Figure 1, the image sensor module provided in this embodiment includes:
图像传感芯片110和至少一个辅助芯片120,图像传感芯片110和至少一个辅助芯片120由塑封材料101封装为一个芯片封装体100,而且,图像传感芯片110和至少一个辅助芯片120的电路面朝向同一个方向;The image sensing chip 110 and at least one auxiliary chip 120, the image sensing chip 110 and at least one auxiliary chip 120 are packaged into a chip package 100 by the plastic packaging material 101, and the circuit of the image sensing chip 110 and at least one auxiliary chip 120 face in the same direction;
图像传感芯片110包括图像传感单元111,以及设置在该图像传感单元111入光面上方的封装玻璃112,上述芯片封装体100正面形成与封装玻璃112对应的通光孔102,其背面形成有与图像传感芯片110的焊垫和至少一个辅助芯片120的焊垫电连接的重布线图形,该重布线图形上形成有多个凸点103;The image sensing chip 110 includes an image sensing unit 111, and an encapsulation glass 112 arranged above the light-incident surface of the image sensing unit 111. The front side of the above-mentioned chip package 100 forms a light through hole 102 corresponding to the encapsulation glass 112. A rewiring pattern electrically connected to the bonding pad of the image sensor chip 110 and the bonding pad of at least one auxiliary chip 120 is formed, and a plurality of bumps 103 are formed on the rewiring pattern;
镜头支架130,安装在上述芯片封装体100的正面,且该镜头支架130上固定有镜头组140,镜头组140包括至少一个光学膜片141。The lens holder 130 is installed on the front of the chip package 100 , and the lens holder 130 is fixed with a lens group 140 , and the lens group 140 includes at least one optical film 141 .
光学膜片141可以是玻璃片,或者树脂塑料片。The optical film 141 can be a glass sheet, or a resin plastic sheet.
塑封是以塑料代替金属、玻璃、陶瓷等包封电子元件的一种技术,与现有技术相比,本发明实施例一提供的图像传感器模组中,图像传感芯片110和至少一个辅助芯片120由塑封材料101封装为一个芯片封装体100,避免了现有技术中,图像传感器模组在受到外部作用力时,其外围的辅助芯片发生焊垫断裂的情况。Plastic encapsulation is a technology that replaces metal, glass, ceramics, etc. with plastic to encapsulate electronic components. Compared with the prior art, in the image sensor module provided by Embodiment 1 of the present invention, the image sensor chip 110 and at least one auxiliary chip 120 is encapsulated by plastic encapsulation material 101 into a chip package 100, which avoids the situation in the prior art that when the image sensor module is subjected to an external force, the welding pads on the periphery of the auxiliary chip are broken.
可选地,塑封材料可以是环氧塑封料,本实施例提供的图像传感器模组通过塑封工艺将图像传感芯片110和至少一个辅助芯片120封装为一个芯片封装体100,实现系统级封装,其中,芯片封装体100内的图像传感芯片110和至少一个辅助芯片120是以二维方式平铺,其电路面朝向同一方向。优选地,图像传感芯片110和至少一个辅助芯片120的电路面的焊垫可以在同一平面上,这样的结构有利于在芯片封装体100的背面进行重布线工艺。由于至少一个辅助芯片120被塑封在芯片封装体100中,与图像传感芯片110同时进行重布线,因此减少了布线层数,降低了布线难度。Optionally, the plastic packaging material may be epoxy molding compound. The image sensor module provided in this embodiment packages the image sensor chip 110 and at least one auxiliary chip 120 into a chip package 100 through a plastic packaging process to realize system-in-package. Wherein, the image sensing chip 110 and at least one auxiliary chip 120 in the chip package 100 are tiled in a two-dimensional manner, and the circuit surfaces thereof face the same direction. Preferably, the bonding pads on the circuit surface of the image sensor chip 110 and the at least one auxiliary chip 120 may be on the same plane, and such a structure facilitates the rewiring process on the backside of the chip package 100 . Since at least one auxiliary chip 120 is plastic-encapsulated in the chip package 100 and rewired simultaneously with the image sensor chip 110 , the number of wiring layers is reduced and the difficulty of wiring is reduced.
可选地,如果辅助芯片120贴装过多,在芯片封装体100的一面放不下时,还可以在塑封层中开通孔,并在通孔中填充金属,然后在芯片封装体100的另一面贴装辅助芯片120。Optionally, if there are too many auxiliary chips 120 mounted, when one side of the chip package 100 cannot be put down, through holes can also be opened in the plastic packaging layer, and metal can be filled in the through holes, and then on the other side of the chip package 100 The auxiliary chip 120 is mounted.
本发明实施例一提供的图像传感器模组中,图像传感芯片110包括图像传感单元111,以及设置在该图像传感单元111入光面上方的封装玻璃112,其中,芯片封装体100正面形成与封装玻璃对应的通光孔102。示例性地,该通光孔102由塑封材料101覆盖在封装玻璃112的入光面边缘形成,使得外部光线透过封装玻璃112照射在图像传感单元111上。In the image sensor module provided in Embodiment 1 of the present invention, the image sensor chip 110 includes an image sensor unit 111, and an encapsulation glass 112 arranged above the light-incident surface of the image sensor unit 111, wherein the front surface of the chip package 100 A light hole 102 corresponding to the packaging glass is formed. Exemplarily, the light hole 102 is formed by covering the edge of the light-incident surface of the packaging glass 112 with the molding material 101 , so that external light passes through the packaging glass 112 and irradiates the image sensing unit 111 .
可选地,在封装玻璃112的入光面边缘与塑封材料101接触处形成嵌合结构,使得塑封层牢牢抓住封装玻璃112,提高图像传感器模组的机械可靠性。Optionally, a fitting structure is formed where the edge of the light-incident surface of the packaging glass 112 is in contact with the molding material 101 , so that the molding layer firmly grasps the packaging glass 112 and improves the mechanical reliability of the image sensor module.
本发明实施例一提供了一种图像传感器模组,该图像传感器模组通过将图像传感芯片和至少一个辅助芯片封装为一个芯片封装体,实现了图像传感芯片和至少一个辅助芯片的系统级封装,有效避免了辅助芯片的焊垫断裂,提高了图像传感模组的可靠性,同时减少了辅助芯片的布线层数,降低了布线难度。Embodiment 1 of the present invention provides an image sensor module. The image sensor module realizes a system of an image sensor chip and at least one auxiliary chip by packaging the image sensor chip and at least one auxiliary chip into a chip package. Level packaging effectively avoids the bonding pad breakage of the auxiliary chip, improves the reliability of the image sensor module, reduces the number of wiring layers of the auxiliary chip, and reduces the difficulty of wiring.
实施例二Embodiment two
图2为本发明实施例二提供的图像传感器模组的结构示意图。如图2所示,进一步地,本实施例提供的图像传感器模组还包括软硬结合板150,其中,软硬结合板150包括导电线路层,以及设置在该软硬结合板150正面上的多个焊垫,多个焊垫分别与芯片封装体100背面的重布线图形上的多个凸点103电连接。FIG. 2 is a schematic structural diagram of an image sensor module provided by Embodiment 2 of the present invention. As shown in FIG. 2 , further, the image sensor module provided in this embodiment also includes a rigid-flex board 150 , wherein the rigid-flex board 150 includes a conductive circuit layer, and the rigid-flex board 150 is arranged on the front surface A plurality of welding pads are respectively electrically connected to a plurality of bumps 103 on the redistribution pattern on the back of the chip package 100 .
软硬结合板,即柔性线路板(FPC)与硬性线路板(PCB),经过压合等工序,按相关工艺要求组合在一起,形成的具有FPC特性与PCB特性的线路板。本发明实施例二提供的图像传感器模组贴附在软硬结合板150上,软硬结合板150既有一定的挠性区域,也有一定的刚性区域,有助于节省图像传感器模组内部空间,提高图像传感器模组性能。Rigid-flex boards, that is, flexible circuit boards (FPC) and rigid circuit boards (PCB), are combined according to relevant process requirements after lamination and other processes to form circuit boards with FPC characteristics and PCB characteristics. The image sensor module provided by Embodiment 2 of the present invention is attached to the rigid-flex board 150. The rigid-flex board 150 has both a certain flexible area and a certain rigid area, which helps to save the internal space of the image sensor module. , to improve the performance of the image sensor module.
可选地,软硬结合板150背面设置有补强钢板160。Optionally, a reinforcing steel plate 160 is provided on the back of the rigid-flex board 150 .
为了过滤红外光,提高图像传感器的成像品质,一般在图像传感器模组中设置红外滤光光学膜片。红外滤光光学膜片在图像传感器模组中的位置不做限定,可选地,镜头组140与封装玻璃112之间设置有红外滤光光学膜片170,该红外滤光光学膜片170固定在镜头支架130上。In order to filter infrared light and improve the imaging quality of the image sensor, an infrared filter optical diaphragm is generally installed in the image sensor module. The position of the infrared filter optical film in the image sensor module is not limited. Optionally, an infrared filter optical film 170 is arranged between the lens group 140 and the packaging glass 112, and the infrared filter optical film 170 is fixed On the lens holder 130.
可选地,封装玻璃112为红外滤光玻璃,或者,镜头组140中的至少一个光学膜片141为红外滤光光学膜片。Optionally, the packaging glass 112 is infrared filter glass, or at least one optical film 141 in the lens group 140 is an infrared filter optical film.
可选地,本发明实施例中的辅助芯片120可以包括图像处理芯片、中央处理芯片、镜头组驱动芯片和被动元器件中的一种或几种,其中,被动器件包括电容、电阻和电感等。Optionally, the auxiliary chip 120 in the embodiment of the present invention may include one or more of an image processing chip, a central processing chip, a lens group driving chip, and passive components, wherein the passive components include capacitors, resistors, and inductors, etc. .
可选地,图像传感单元111与封装玻璃112由胶水键合为一体。Optionally, the image sensing unit 111 and the packaging glass 112 are bonded together by glue.
可选地,封装玻璃112上形成有围坝,用以和图像传感单元111压合时形成空腔。Optionally, a dam is formed on the packaging glass 112 to form a cavity when it is pressed together with the image sensing unit 111 .
本发明实施例二提供了一种图像传感器模组,该图像传感器模组通过将图像传感芯片和至少一个辅助芯片封装为一个芯片封装体,并贴附在软硬结合板上,节省了图像传感器模组内部空间,实现了图像传感芯片和至少一个辅助芯片的系统级封装,有效避免了辅助芯片的焊垫断裂,提高了图像传感模组的可靠性,同时减少了辅助芯片的布线层数,降低了布线难度。Embodiment 2 of the present invention provides an image sensor module. The image sensor module packages the image sensor chip and at least one auxiliary chip into a chip package and attaches it to the soft-hard board, saving image The internal space of the sensor module realizes the system-in-package of the image sensor chip and at least one auxiliary chip, effectively avoids the bonding pad breakage of the auxiliary chip, improves the reliability of the image sensing module, and reduces the wiring of the auxiliary chip The number of layers reduces the difficulty of wiring.
实施例三Embodiment Three
图3为本发明实施例三提供的图像传感器模组的制作方法流程图。本实施例提供一种图像传感器模组的制作方法,包括:FIG. 3 is a flowchart of a manufacturing method of an image sensor module provided by Embodiment 3 of the present invention. This embodiment provides a method for manufacturing an image sensor module, including:
S110、将图像传感芯片和至少一个辅助芯片由塑封材料封装为一个芯片封装体,其中图像传感芯片包括图像传感单元,以及设置在该图像传感单元入光面上方的封装玻璃,在芯片封装体正面形成与封装玻璃对应的通光孔;S110, packaging the image sensing chip and at least one auxiliary chip into a chip package with a plastic packaging material, wherein the image sensing chip includes an image sensing unit, and packaging glass arranged above the light-incident surface of the image sensing unit, A light hole corresponding to the packaging glass is formed on the front of the chip package;
S120、在芯片封装体的背面形成与图像传感芯片的焊垫和至少一个辅助芯片的焊垫电连接的重布线图形,该重布线图形上形成有多个凸点;S120, forming a rewiring pattern electrically connected to the bonding pad of the image sensor chip and the bonding pad of at least one auxiliary chip on the back of the chip package, and a plurality of bumps are formed on the rewiring pattern;
S130、在芯片封装体的正面安装镜头支架,该镜头支架上固定有镜头组,镜头组包括至少一个光学膜片。S130. Install a lens holder on the front surface of the chip package, a lens group is fixed on the lens holder, and the lens group includes at least one optical film.
示例性地,该图像传感器模组的制作方法,还包括:Exemplarily, the manufacturing method of the image sensor module further includes:
S140、提供软硬结合板,该软硬结合板包括导电线路层,以及设置在软硬结合板正面上的多个焊垫,将软硬结合板的多个焊垫分别与芯片封装体背面的重布线图形上的多个凸点电连接。S140. Provide a rigid-flex board. The rigid-flex board includes a conductive circuit layer and a plurality of welding pads arranged on the front side of the rigid-flex board. Rewire multiple bump electrical connections on the pattern.
本发明实施例三提供了一种图像传感器模组的制作方法,通过将图像传感芯片和至少一个辅助芯片封装为一个芯片封装体,并贴附在软硬结合板上,节省了图像传感器模组内部空间,实现了图像传感芯片和至少一个辅助芯片的系统级封装,有效避免了辅助芯片的焊垫断裂,提高了图像传感模组的可靠性,同时减少了辅助芯片的布线层数,降低了布线难度。Embodiment 3 of the present invention provides a method for manufacturing an image sensor module. By packaging the image sensor chip and at least one auxiliary chip into a chip package and attaching it to a rigid-flex board, the image sensor module is saved. The internal space of the group realizes the system-in-package of the image sensor chip and at least one auxiliary chip, effectively avoids the bonding pad breakage of the auxiliary chip, improves the reliability of the image sensing module, and reduces the number of wiring layers of the auxiliary chip , reducing the wiring difficulty.
实施例四Embodiment Four
在上述实施例的基础上,本发明实施例四提供的图像传感器的制作方法可以包括三个部分,第一部分:制作图像传感芯片。On the basis of the above-mentioned embodiments, the method for manufacturing an image sensor provided by Embodiment 4 of the present invention may include three parts. The first part: making an image sensor chip.
图4a至图4r为本发明实施例四提供的图像传感芯片制作方法工序步骤图。如图4a所示,提供图像传感晶圆,该图像传感晶圆包括多个图像传感单元111,即图像传感晶圆上的小格子,每个图像传感单元111都完全相同。为了下文表述方便,取其中两个进行剖面图文介绍。FIG. 4a to FIG. 4r are process step diagrams of the method for fabricating an image sensor chip provided by Embodiment 4 of the present invention. As shown in FIG. 4 a , an image sensing wafer is provided, and the image sensing wafer includes a plurality of image sensing units 111 , that is, small grids on the image sensing wafer, and each image sensing unit 111 is identical. For the convenience of the following description, two of them are selected for section graphic introduction.
如图4b所示,提供封装玻璃112,为了作图方便,图4b中的虚线表示对称。As shown in FIG. 4b, an encapsulating glass 112 is provided. For the convenience of drawing, the dotted line in FIG. 4b indicates symmetry.
可选地,封装玻璃112可以为普通玻璃,也可以为红外滤光玻璃,红外滤光玻璃的作用是过滤红外光,提高图像传感器的成像品质。Optionally, the packaging glass 112 may be common glass or infrared filter glass, the function of which is to filter infrared light and improve the imaging quality of the image sensor.
如图4c所示,在封装玻璃112上形成围坝113,用以和图像传感单元111压合时形成空腔。As shown in FIG. 4 c , a dam 113 is formed on the packaging glass 112 to form a cavity when it is pressed together with the image sensing unit 111 .
如图4d所示,将封装玻璃112和图像传感单元111键合为一体,可选地,该封装玻璃112和图像传感单元111由胶水键合为一体。As shown in FIG. 4 d , the packaging glass 112 and the image sensing unit 111 are bonded together. Optionally, the packaging glass 112 and the image sensing unit 111 are bonded together by glue.
如图4e所示,在图像传感单元111背面进行减薄,以便使产品厚度降低,同时减低硅通孔工艺的难度和时间。As shown in FIG. 4e, thinning is performed on the back of the image sensing unit 111, so as to reduce the thickness of the product, and at the same time reduce the difficulty and time of the TSV process.
如图4f和图4g所示,其中图4g为图4f圆圈处的局部放大图,在图像传感单元111背面制作硅通孔114,可选地,采用干法蚀刻工艺制作硅通孔114。在该硅通孔114底部暴露出晶圆焊盘115。As shown in Figure 4f and Figure 4g, where Figure 4g is a partial enlarged view of the circle in Figure 4f, the through-silicon hole 114 is formed on the back of the image sensing unit 111, and optionally, the through-silicon hole 114 is formed by a dry etching process. The wafer bonding pad 115 is exposed at the bottom of the TSV 114 .
如图4h和图4i所示,其中图4i为图4g圆圈处的局部放大图,在图像传感单元111背面沉积绝缘层116,用以将后续工艺与硅通孔114电绝缘开。可选地,采用喷涂工艺沉积绝缘层116。As shown in FIG. 4h and FIG. 4i , where FIG. 4i is a partial enlarged view of the circle in FIG. 4g , an insulating layer 116 is deposited on the back of the image sensing unit 111 to electrically insulate subsequent processes from the TSV 114 . Optionally, the insulating layer 116 is deposited by a spraying process.
如图4j和图4k所示,其中图4k为图4j圆圈处的局部放大图,将硅通孔114底部的晶圆焊盘115的金属层暴露出来,可选地,采用激光钻孔技术。As shown in Fig. 4j and Fig. 4k, Fig. 4k is a partially enlarged view of the circle in Fig. 4j, exposing the metal layer of the wafer pad 115 at the bottom of the TSV 114, optionally, using laser drilling technology.
如图4l和图4m所示,其中图4m为图4l圆圈处的局部放大图,在绝缘层116上沉积金属层117,用于连接晶圆焊盘115。并对金属层117进行增厚,使其达到需求的厚度。可选地,通过磁控溅射、蒸镀等方式沉积种子层金属,并在种子层金属上电镀金属,以实现金属增厚。As shown in FIG. 4l and FIG. 4m , wherein FIG. 4m is a partially enlarged view of the circle in FIG. 4l , a metal layer 117 is deposited on the insulating layer 116 for connecting the wafer pad 115 . And thicken the metal layer 117 to make it reach the required thickness. Optionally, the seed layer metal is deposited by means of magnetron sputtering, vapor deposition, etc., and the metal is electroplated on the seed layer metal to achieve metal thickening.
如图4n和图4o所示,其中图4o为图4n圆圈处的局部放大图,在金属层117上涂布光刻胶118进行光刻工艺。可选地,通过涂布工艺旋涂光刻胶118,并进行曝光显影,将需要保留的金属层117用光刻胶118覆盖起来。As shown in FIG. 4n and FIG. 4o, where FIG. 4o is a partially enlarged view of the circle in FIG. 4n, a photoresist 118 is coated on the metal layer 117 for photolithography. Optionally, the photoresist 118 is spin-coated by a coating process, and then exposed and developed to cover the metal layer 117 to be retained with the photoresist 118 .
如图4p和图4q所示,其中图4q为图4p圆圈处的局部放大图,通过蚀刻工艺去除多余的金属层,以形成图像传感单元111的焊垫117a,并去除光刻胶。As shown in FIG. 4p and FIG. 4q, where FIG. 4q is a partial enlarged view of the circle in FIG. 4p, the excess metal layer is removed by etching to form the pad 117a of the image sensing unit 111, and the photoresist is removed.
如图4r所示,以图像传感单元111为单位切割图像传感晶圆获得独立的图像传感芯片110。优选地,采用机械刀片或者激光方式进行切割。As shown in FIG. 4 r , the image sensing wafer is cut in units of image sensing units 111 to obtain independent image sensing chips 110 . Preferably, the cutting is performed with a mechanical blade or a laser.
第二部分:将图像传感芯片与辅助芯片封装为一个芯片封装体。The second part: packaging the image sensor chip and the auxiliary chip into a chip package.
图5a至图5l为本发明实施例四提供的芯片封装体制作方法的工序步骤图。5a to 5l are process steps diagrams of the chip package manufacturing method provided by Embodiment 4 of the present invention.
如图5a所示,提供支撑基板104、图像传感芯片110和至少一个辅助芯片120,将图像传感芯片110和至少一个辅助芯片120贴附到支撑基板上104。As shown in FIG. 5 a , a supporting substrate 104 , an image sensing chip 110 and at least one auxiliary chip 120 are provided, and the image sensing chip 110 and at least one auxiliary chip 120 are attached to the supporting substrate 104 .
优选地,支撑基板104上铺设有临时键合材料105,用以贴附图像传感芯片110和至少一个辅助芯片120。而且,临时键合材料105可以通过激光、UV光、机械、或者加热方式使支撑基板104分离开来。Preferably, a temporary bonding material 105 is laid on the support substrate 104 for attaching the image sensor chip 110 and at least one auxiliary chip 120 . Moreover, the temporary bonding material 105 can separate the support substrate 104 by means of laser, UV light, machinery, or heating.
如图5b所示,利用塑封材料101将图像传感芯片110和至少一个辅助芯片120塑封为一个芯片封装体100,实现系统级封装,并在芯片封装体100的正面形成通光孔102。As shown in FIG. 5 b , the image sensor chip 110 and at least one auxiliary chip 120 are plastic-packed into a chip package 100 with a plastic packaging material 101 to realize system-in-package, and a light through hole 102 is formed on the front side of the chip package 100 .
如图5c所示,优选地,如果辅助芯片120贴装过多,在芯片封装体100的一面放不下时,还可以在塑封层中开通孔106,并在通孔106中填充金属,然后在芯片封装体100的另一面贴装辅助芯片120。As shown in Figure 5c, preferably, if there are too many auxiliary chips 120 mounted, when one side of the chip package 100 cannot be put down, a through hole 106 can also be opened in the plastic packaging layer, and metal can be filled in the through hole 106, and then The auxiliary chip 120 is mounted on the other side of the chip package 100 .
如图5d所示,剥离支撑基板104。优选地,通过激光、UV光或者机械方式对支撑基板104进行剥离,并对临时键合材料予以清洗。As shown in FIG. 5d, the support substrate 104 is peeled off. Preferably, the support substrate 104 is peeled off by laser, UV light or mechanical means, and the temporary bonding material is cleaned.
在芯片封装体100的背面制作重布线图形,包括:Making rewiring patterns on the back side of the chip package 100, including:
如图5e和图5f所示,其中图5f为图5e圆圈处的局部放大图,在芯片封装体100的背面沉积金属层107,并进行金属增厚。优选地,通过磁控溅射或者蒸镀方式在芯片封装体100的背面沉积种子层金属,然后在种子层金属上电镀金属,使金属层达到需求的厚度。As shown in FIG. 5e and FIG. 5f , wherein FIG. 5f is a partial enlarged view of the circle in FIG. 5e , a metal layer 107 is deposited on the back of the chip package 100 and the metal is thickened. Preferably, the seed layer metal is deposited on the back of the chip package 100 by magnetron sputtering or evaporation, and then the metal is electroplated on the seed layer metal to make the metal layer reach a required thickness.
如图5g所示,在金属层107表面涂布光刻胶108,通过曝光显影,把需要保留的金属层107用光刻胶108覆盖起来。As shown in FIG. 5 g , a photoresist 108 is coated on the surface of the metal layer 107 , and the metal layer 107 to be retained is covered with the photoresist 108 through exposure and development.
如图5h和图5i所示,其中图5i为图5h圆圈处的局部放大图,去除多余的金属层,可选地,采用湿法蚀刻进行去除,并去除光刻胶,以形成芯片封装体100的焊垫107a,构成重布线图形。As shown in Figure 5h and Figure 5i, wherein Figure 5i is a partial enlarged view of the circle in Figure 5h, the redundant metal layer is removed, optionally, wet etching is used for removal, and the photoresist is removed to form a chip package The bonding pad 107a of 100 constitutes a rewiring pattern.
如图5j和图5k所示,其中图5k为图5j圆圈处的局部放大图,在重布线图形表面进行镍金处理,并包封绝缘阻焊层109,通过曝光显影暴露出需要植球的焊垫107a。As shown in Figure 5j and Figure 5k, Figure 5k is a partial enlarged view of the circle in Figure 5j, nickel-gold treatment is performed on the surface of the rewiring pattern, and the insulating solder resist layer 109 is encapsulated, and the area that needs to be balled is exposed through exposure and development. pad 107a.
如图5l所示,在焊垫107a表面制作锡球,形成重布线图形的多个凸点103。As shown in FIG. 5l, solder balls are formed on the surface of the pad 107a to form a plurality of bumps 103 in the redistribution pattern.
第三部分:图像传感器模组的组装Part III: Assembly of Image Sensor Module
图6a至图6d为本发明实施例四提供的图像传感器模组的组装工序步骤图。6a to 6d are step diagrams of the assembly process of the image sensor module provided by Embodiment 4 of the present invention.
如图6a和图6b所示,将封装好的芯片封装体100贴至软硬结合板150上,其中,该软硬结合板150可以带补强钢板160,或者不带补强钢板160。As shown in FIG. 6 a and FIG. 6 b , the packaged chip package 100 is pasted on a rigid-flex board 150 , wherein the rigid-flex board 150 may be provided with a reinforcing steel plate 160 or without a reinforcing steel plate 160 .
如图6c和图6d所示,在芯片封装体100的正面安装镜头支架130,其中,镜头支架130上固定有镜头组140,该镜头组140包括至少一个光学膜片。优选地,如果前述步骤中封装玻璃112没有采用红外滤光玻璃,则在镜头支架130上组装红外滤光光学膜片170。图像传感器模组组装完成后,可以实现拍照摄像功能。As shown in FIG. 6c and FIG. 6d , a lens holder 130 is installed on the front surface of the chip package 100 , wherein a lens group 140 is fixed on the lens holder 130 , and the lens group 140 includes at least one optical film. Preferably, if the packaging glass 112 does not use infrared filter glass in the preceding steps, an infrared filter optical film 170 is assembled on the lens holder 130 . After the image sensor module is assembled, it can realize the camera function.
本发明实施例四提供了一种图像传感器模组的制作方法,通过将图像传感芯片和至少一个辅助芯片封装为一个芯片封装体,实现了图像传感芯片和至少一个辅助芯片的系统级封装,有效避免了辅助芯片的焊垫断裂,提高了图像传感模组的可靠性,同时减少了辅助芯片的布线层数,降低了布线难度。Embodiment 4 of the present invention provides a method for manufacturing an image sensor module. By packaging the image sensor chip and at least one auxiliary chip into a chip package, the system-in-package of the image sensor chip and at least one auxiliary chip is realized. , effectively avoiding the breakage of the bonding pad of the auxiliary chip, improving the reliability of the image sensing module, reducing the number of wiring layers of the auxiliary chip, and reducing the difficulty of wiring.
注意,上述仅为本发明的较佳实施例及所运用技术原理。本领域技术人员会理解,本发明不限于这里所述的特定实施例,对本领域技术人员来说能够进行各种明显的变化、重新调整和替代而不会脱离本发明的保护范围。因此,虽然通过以上实施例对本发明进行了较为详细的说明,但是本发明不仅仅限于以上实施例,在不脱离本发明构思的情况下,还可以包括更多其他等效实施例,而本发明的范围由所附的权利要求范围决定。Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention, and the present invention The scope is determined by the scope of the appended claims.
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