CN106206381A - A kind of monocrystalline etching cleaning machine and process thereof - Google Patents

Abstract

The invention discloses a cleaning machine for single crystal velvet, which comprises a cleaning body, the cleaning body includes three boxes, the front end of the cleaning body is provided with a material inlet, the rear end of the cleaning body is provided with a material outlet, the material inlet and the material outlet Conveyor belts are installed at the mouth positions, and a plurality of manipulators for grabbing materials are arranged above the conveyor belts. The upper cover of the cleaning body is provided with air outlets. There are also velvet tanks, pickling tanks, water washing tanks, and pre-cleaning tanks in the cleaning body. The dehydration tank and the drying tank are equipped with a heating device and a temperature sensor under each tank body, and a liquid distribution and replenishment system connected with each tank body is also provided in the cleaning body. The invention is beneficial to realize full-automatic cleaning of single crystal texturing, can monitor and manage the whole cleaning process, adopts a box structure, and is suitable for industrialized production.

Description

A single crystal texturing cleaning machine and its process method

technical field

The invention relates to single crystal texturing cleaning equipment, in particular to a single crystal texturing cleaning machine and a process method thereof.

Background technique

Silicon wafers need to be cleaned after a series of processing procedures. The purpose of cleaning is to eliminate all kinds of pollutants adsorbed on the surface of silicon wafers, and to make a suede structure that can reduce the reflection of sunlight on the surface. It directly affects the yield and reliability of cells. Texturing is the first process for manufacturing crystalline silicon cells, also known as "surface texturing". The effective textured structure makes the incident light reflect and refract multiple times on the surface of the silicon wafer, which increases the light absorption, reduces the reflectivity, and helps to improve the performance of the battery.

Patent application number: 201410267231.9 discloses a cleaning method for monocrystalline silicon wafer texturing. After single crystal texturing, the mixed acid cleaning solution of hydrofluoric acid and hydrochloric acid is used for two cleanings. The first hydrofluoric acid plus hydrochloric acid Cleaning can effectively remove the main metal impurities such as sodium ions and potassium ions, and remove the thin layer of silicon dioxide on the surface of the silicon wafer; the second hydrofluoric acid plus hydrochloric acid cleaning further cleans the superficial metal impurities of the silicon wafer (after the first cleaning Residual metal impurities), and remove the silicon dioxide layer on the surface of the silicon wafer to achieve an effective dehydration effect. At the same time, the invention also discloses a single crystal texturing equipment. By introducing hydrochloric acid pipelines and hydrofluoric acid pipelines into the hydrochloric acid tank at the same time, hydrofluoric acid pipelines and hydrofluoric acid pipelines are simultaneously introduced into the hydrofluoric acid tank; thus it can be conveniently A mixed solution of hydrochloric acid and hydrofluoric acid is obtained, which facilitates the cleaning method of the above-mentioned monocrystalline silicon chip texturing.

The above-mentioned existing patented technology cannot only provide what liquid is used to clean the silicon wafer after monocrystalline texturing, but does not provide corresponding equipment, and cannot realize automatic cleaning.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies of the prior art and provide a single crystal texturing cleaning machine and its process method. This invention is conducive to the realization of fully automatic cleaning of single crystal texturing, and can monitor and manage the entire cleaning process. It adopts a box structure and is suitable for industrial production.

The purpose of the present invention is achieved through the following technical solutions: a single crystal texturing cleaning machine, including a cleaning body, the cleaning body includes three boxes, the front end of the cleaning body is provided with a feed port, and the rear end of the cleaning body is provided with an outlet There are conveyor belts at the feed port, feed port and discharge port respectively. There are multiple manipulators above the conveyor belt for grabbing materials. One side of the cleaning body is used to control the cleaning process in the cleaning body and monitor the cleaning process. Real-time monitoring control cabinet, the upper cover of the cleaning body is equipped with an air outlet, and the cleaning body is also equipped with a velvet tank, pickling tank, water washing tank, pre-dehydration tank and drying tank, and a heating tank is installed under each tank. device and a temperature sensor, and a liquid dispensing and replenishing system connected to each tank body is also arranged in the cleaning body.

Preferably, the three manipulators located at the feed inlet are equipped with spraying devices.

Preferably, the texturing tank includes a texturing tank body, an automatic cover, an overflow port, a pump suction port, a heater, a pump outlet, a pump circulation device and a flower basket, and the automatic cover is installed on the top of the texturing tank body, automatically There is an overflow port under the cover, the pump suction port is set outside the overflow port, the flower basket is set in the velvet tank, the heater is set under the flower basket, the pump discharge port is set under the heater, and the pump circulation device is set in the The outside of the texturing tank is connected with the pump suction port and the pump discharge port respectively.

Preferably, the pickling tank includes a pickling tank body, an automatic cover, an overflow port, a pump suction inlet, a pump outlet, a pump circulation device and a flower basket, a flower basket is arranged in the pickling tank body, and a uniform Flow plate and bubbling, with overflow ports on both sides of the pickling tank.

Preferably, the rinsing tank includes a rinsing tank body and a flower basket arranged in the rinsing tank body, the bottom of the flower basket is provided with an equalizer plate and bubbling, one side of the rinsing tank body is provided with an overflow discharge port, and a conductivity meter is provided on the overflow discharge port , There is also a water inlet control valve outside the rinsing tank.

Preferably, the pre-dehydration tank includes a pre-dehydration tank, a motor and a push-pull mechanism arranged above the pre-dehydration tank, a flower basket is arranged in the pre-dehydration tank, and a heater is arranged at the bottom of the flower basket.

Preferably, the drying tank includes a drying tank body and a flower basket arranged in the drying tank body, a partition is arranged on one side of the flower basket, a quartz heating tube is arranged between the partition board and the drying tank body, and a quartz heating tube is arranged below the drying tank body. There is a fan, the top of the drying tank is equipped with an automatic cover, and the bottom of the drying tank is equipped with a drainage mechanism.

A method for cleaning single crystal texturing, comprising the following steps:

Put the silicon wafers into the flower basket, send it to the feeding port through the conveyor belt, and the robot grabs the flower basket and sends it to the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank in turn;

The processes of pre-cleaning, warm water rinsing, texturing corrosion, pure water rinsing, pickling, pre-dehydration and drying are respectively carried out by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank;

After being processed by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank, the flower baskets are picked up by the manipulator, placed on the conveyor belt, and sent to the discharge port.

Preferably, it is set to include real-time monitoring of liquid level, tank cover status, manipulator in place status, valve start and stop status, Heater start and stop status, acid and alkali gas content, air pressure value and temperature data of each tank.

Preferably, the process sequence of processing through the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank also includes the following detailed steps:

Pre-cleaning, pre-cleaning, warm water rinsing, texture corrosion, texture corrosion, texture corrosion, pure water rinse, texture corrosion, texture corrosion, texture corrosion, pure water rinse, pure water rinse, warm water rinse, pickling , Pure water rinsing, pickling, pure water rinsing, pure water rinsing, pre-dehydration, drying, drying, drying.

The beneficial effects of the present invention are:

(1) Multiple functional tanks are used to clean the single crystal texturing. The cleaning process is simple and the cleaning degree is high, which is beneficial to avoid the disadvantages of the traditional method that cannot completely remove the silicon dioxide layer on the product surface;

(2) It can monitor and warn the whole cleaning process, which is conducive to process traceability and refined quality control after production;

(3) Using multiple tanks for functional cleaning, simple structure, easy to use,

(4) The operation of the equipment is safe and stable, with a high degree of automation and intelligence, which is conducive to saving labor costs and production costs, and is suitable for large-scale industrial production.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is the structural representation of the cashmere-making groove of the present invention;

Fig. 3 is the structural representation of pickling tank of the present invention;

Fig. 4 is the structural representation of rinsing tank of the present invention;

Fig. 5 is the structural representation of pre-dewatering tank of the present invention;

Fig. 6 is the structural representation of drying tank of the present invention;

In the figure, 10-cleaning body, 20-control cabinet, 101-inlet, 102-outlet, 301-automatic cover, 302-overflow, 303-pump suction, 304-heater, 305- Pump circulation device, 306-flower basket, 307-pump outlet, 308-split plate and bubbling, 309-conductivity meter, 310-overflow discharge port, 311-motor, 312-push-pull mechanism, 313-partition Plate, 314-quartz heating pipe, 315-partition plate return air outlet, 316-fan, 317-drainage mechanism.

detailed description

The technical solution of the present invention will be further described in detail below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

Example 1:

As shown in Figure 1, a single crystal texturing cleaning machine includes a cleaning body 10, the cleaning body 10 includes three boxes, the front end of the cleaning body 10 is provided with a feed port 101, and the rear end of the cleaning body 10 is provided with a discharge port 102, the feeding port 101 and the feeding port 102 are respectively provided with conveyor belts, and a plurality of manipulators for grabbing materials are arranged above the conveyor belts, and one side of the cleaning body 10 is provided for regulating the cleaning process in the cleaning body 10, and for The cleaning process is carried out in the control cabinet 20 of real-time monitoring. The upper cover of the cleaning body 10 is provided with an air outlet. A heating device and a temperature sensor are arranged below the tank body, and a liquid dispensing and replenishing system connected to each tank body is also provided in the cleaning body 10 .

In the present invention, six manipulators are arranged, and the manipulators move above the conveyor belt or the tank body, and grab flower baskets according to the sequence of the technological process. The operation of the manipulator is controlled by a motor located on one side of the cleaning body. The manipulator can move up and down, left and right, and the movement is stable, and there is no shaking when picking up the flower basket. When the manipulator picks up the flower basket, the air exposure time of the flower basket between two adjacent tanks is 11s. Further, the three manipulators located at the feed inlet are equipped with spraying devices.

In the present invention, as shown in Figure 2, the texturing tank comprises a texturing tank body, an automatic cover 301, an overflow port 302, a pump suction port 303, a heater 304, a pump discharge port 307, a pump circulation device 305 and The flower basket 306, the automatic cover 301 is installed on the top of the texturing tank, the overflow port 302 is set under the automatic cover 301, the pump suction port 303 is set outside the overflow port 302, the flower basket 306 is set in the texturing tank, and the flower basket 306 is below A heater 304 is provided, a pump discharge port 307 is provided below the heater 304, and a pump circulation device 305 is arranged outside the texturing tank and connected to the pump suction port 303 and the pump discharge port 307 respectively.

In the present invention, as shown in Figure 3, the pickling tank includes a pickling tank body, an automatic cover 301, an overflow port 302, a pump suction port 303, a pump discharge port 307, a pump circulation device 305 and a flower basket 306. A flower basket 306 is arranged in the washing tank body, and an equalizing plate and a bubble 308 are arranged at the bottom of the flower basket 306, and overflow ports 302 are arranged on both sides of the pickling tank body.

Preferably, as shown in FIG. 4, the rinsing tank includes a rinsing tank body, an automatic cover 301, an overflow port 302, a pump suction port 303, a heater 304, a pump discharge port 307, a pump circulation device 305 and a flower basket 306, The bottom of the flower basket 306 is provided with an equalizing plate and bubbles 308, one side of the rinse tank is provided with an overflow discharge port 310, and a conductivity meter 309 is provided on the overflow discharge port 310, and a water inlet control valve is provided outside the rinse tank.

In the present invention, as shown in Figure 5, the pre-dehydration tank includes a pre-dehydration tank body and a motor 311 and a push-pull mechanism 312 located above the pre-dehydration tank body, a flower basket 306 is arranged in the pre-dehydration tank body, and a heater is provided at the bottom of the flower basket 306 .

In the present invention, as shown in Figure 6, the drying tank includes a drying tank body and a flower basket 306 located in the drying tank body, and one side of the flower basket 306 is provided with a partition 313, and a partition between the partition board 313 and the drying tank body A quartz heating tube 314 is provided, a blower 316 is provided under the quartz heating tube 314, a partition return air outlet 315 is provided between the partition 313 and the bottom of the tank, an automatic cover 301 is provided above the drying tank, and the bottom of the drying tank is A drainage mechanism 317 is provided.

Example 2:

This embodiment provides a single crystal texturing cleaning process, which specifically includes the following steps:

S1. Put the silicon wafers into the flower basket, send it to the feeding port through the conveyor belt, and grab the flower basket by the manipulator and send it to the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank in turn;

S2. The processes of pre-cleaning, warm water rinsing, texturing corrosion, pure water rinsing, pickling, pre-dehydration and drying are respectively carried out by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank;

S3. After being processed by the texturing tank, pickling tank, water washing tank, pre-dewatering tank and drying tank, the flower basket is picked up by the manipulator, placed on the conveyor belt, and sent to the discharge port.

In this embodiment, it is set to include real-time monitoring of the liquid level, the state of the tank cover, the status of the manipulator in place, the opening and closing of the valve, and the Stop state, heater start and stop state, acid and alkali gas content, air pressure value and temperature data of each tank.

In this embodiment, the process sequence of setting the processing through the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank is as follows:

Pre-cleaning, pre-cleaning, warm water rinsing, texture corrosion, texture corrosion, texture corrosion, pure water rinse, texture corrosion, texture corrosion, texture corrosion, pure water rinse, pure water rinse, warm water rinse, pickling , Pure water rinsing, pickling, pure water rinsing, pure water rinsing, pre-dehydration, drying, drying, drying.

In this embodiment, a plurality of functional tanks are used to clean single crystal texturing. The cleaning process is simple and the cleaning degree is high, which is conducive to avoiding the disadvantages of traditional methods that cannot completely remove the silicon dioxide layer on the product surface. At the same time, fully automated equipment operation, It is safe and stable, which is conducive to saving labor costs and production costs, and is suitable for large-scale industrial production.

The above-mentioned embodiments only express the specific implementation manner of the present invention, and the description thereof is relatively specific and detailed, but should not be construed as limiting the patent scope of the present invention. It should be pointed out that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all belong to the protection scope of the present invention.

Claims (10)

1. A cleaning machine for single crystal texturing, characterized in that it comprises a cleaning body, the cleaning body comprises three casings, the front end of the cleaning body is provided with a feed port, the rear end of the cleaning body is provided with a discharge port, the feed port and Conveyor belts are installed at the positions of the outlets, and a plurality of manipulators for grabbing materials are arranged above the conveyor belts. On the side of the cleaning body, there is a control cabinet for regulating the cleaning process in the cleaning body and monitoring the cleaning process in real time. There is an air outlet on the upper cover of the main body, and there are also velvet tanks, pickling tanks, water washing tanks, pre-dehydration tanks and drying tanks in the cleaning body. A heating device and a temperature sensor are installed under each tank to clean the body. There is also a liquid dispensing and replenishing system connected to each tank. 2. A cleaning machine for single crystal texturing according to claim 1, characterized in that, the three manipulators arranged at the feed inlet are equipped with spraying devices. 3. A kind of cleaning machine for single crystal texturing according to claim 1, wherein the texturing tank comprises a texturing tank body, an automatic cover, an overflow port, a pump suction inlet, a heater, a pump outlet, The pump circulation device and flower basket, the automatic cover is installed on the top of the texturing tank, the overflow port is set under the automatic cover, the pump suction port is set outside the overflow port, the flower basket is set in the texturing tank, and the heater is installed under the flower basket There is a pump discharge port under the heater, and the pump circulation device is arranged outside the texture tank and connected with the pump suction port and the pump discharge port respectively. 4. A cleaning machine for single crystal texturing according to claim 1, wherein the pickling tank comprises a pickling tank body, an automatic cover, an overflow port, a pump suction port, a pump discharge port, and a pump cycle The device and the flower basket, the flower basket is arranged in the pickling tank, the bottom of the flower basket is equipped with an equalizing plate and bubbles, and the two sides of the pickling tank are provided with overflow ports. 5. A cleaning machine for single crystal texturing according to claim 1, characterized in that the rinsing tank comprises a rinsing tank body and a flower basket arranged in the rinsing tank body, the bottom of the flower basket is provided with an equalizing plate and bubbling, and the rinsing tank body An overflow discharge port is provided on one side, a conductivity meter is provided on the overflow discharge port, and a water inlet control valve is provided outside the rinsing tank. 6. A single crystal texturing cleaning machine according to claim 1, wherein the pre-dewatering tank comprises a pre-dewatering tank body and a motor and a push-pull mechanism arranged above the pre-dewatering tank body, and a flower basket is arranged in the pre-dewatering tank body , There is a heater at the bottom of the flower basket. 7. A kind of cleaning machine for single crystal texturing according to claim 1, wherein the drying tank comprises a drying tank body and a flower basket arranged in the drying tank body, and one side of the flower basket is provided with a partition, and the partition board A quartz heating tube is arranged between the drying tank body, a fan is installed under the quartz heating tube, an automatic cover is arranged above the drying tank body, and a drainage mechanism is arranged at the bottom of the drying tank body. 8. A method for cleaning single crystal texture, comprising the following steps: Put the silicon wafers into the flower basket, send it to the feeding port through the conveyor belt, and the robot grabs the flower basket and sends it to the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank in turn; The processes of pre-cleaning, warm water rinsing, texturing corrosion, pure water rinsing, pickling, pre-dehydration and drying are respectively carried out by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank; After being processed by the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank, the flower baskets are picked up by the manipulator, placed on the conveyor belt, and sent to the discharge port. 9. A kind of single crystal texturing cleaning process according to claim 8 is characterized in that, it is set in the process of processing through texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank, and Including real-time monitoring of liquid level, tank cover status, manipulator in place status, valve start and stop status, heater start and stop status, acid and alkali gas content, air pressure value and temperature data of each tank body. 10. A single crystal texturing cleaning process according to claim 8, characterized in that the process sequence of processing through the texturing tank, pickling tank, water washing tank, pre-dehydration tank and drying tank also includes the following detailed steps : Pre-cleaning, pre-cleaning, warm water rinsing, texture corrosion, texture corrosion, texture corrosion, pure water rinse, texture corrosion, texture corrosion, texture corrosion, pure water rinse, pure water rinse, warm water rinse, pickling , Pure water rinsing, pickling, pure water rinsing, pure water rinsing, pre-dehydration, drying, drying, drying.