CN106066215B - A kind of sapphire pyrostat - Google Patents
A kind of sapphire pyrostat Download PDFInfo
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- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 107
- 239000010980 sapphire Substances 0.000 title claims abstract description 107
- 239000013307 optical fiber Substances 0.000 claims abstract description 40
- 239000000835 fiber Substances 0.000 claims abstract description 28
- 239000003292 glue Substances 0.000 claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 229910052593 corundum Inorganic materials 0.000 claims abstract description 4
- 239000010431 corundum Substances 0.000 claims abstract description 4
- 238000007526 fusion splicing Methods 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 31
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- CRQQGFGUEAVUIL-UHFFFAOYSA-N chlorothalonil Chemical compound ClC1=C(Cl)C(C#N)=C(Cl)C(C#N)=C1Cl CRQQGFGUEAVUIL-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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Abstract
本发明公开了一种蓝宝石高温传感器，包括蓝宝石光纤和蓝宝石晶片，蓝宝石光纤的入射端固定连接有多模光纤，反射端与蓝宝石晶片相连，蓝宝石光纤与蓝宝石晶片的连接处设置有斜角；蓝宝石光纤的反射端外套装有耐高温插芯，耐高温插芯外套装有耐高温套筒，耐高温材料为陶瓷、蓝宝石或刚玉等材料，耐高温套筒的一端与蓝宝石晶片固定连接。本发明能够校准蓝宝石光纤，还能对蓝宝石光纤和蓝宝石晶片进行紧密固定，有效防止了高温胶渗入蓝宝石光纤的端头；且能够防止光纤端面与蓝宝石晶片之间发生干涉，提高了干涉光谱的质量。
The invention discloses a sapphire high temperature sensor, comprising a sapphire optical fiber and a sapphire wafer. The incident end of the sapphire fiber is fixedly connected with a multimode fiber, the reflection end is connected with the sapphire wafer, and the connection between the sapphire fiber and the sapphire wafer is provided with an oblique angle; The reflective end jacket of the optical fiber is equipped with a high temperature resistant ferrule, and the high temperature resistant ferrule jacket is equipped with a high temperature resistant sleeve. The high temperature resistant material is ceramic, sapphire or corundum and other materials. The invention can calibrate the sapphire optical fiber, can also tightly fix the sapphire optical fiber and the sapphire wafer, effectively prevent the high temperature glue from infiltrating the end of the sapphire optical fiber; and can prevent the interference between the end face of the optical fiber and the sapphire wafer, and improve the quality of the interference spectrum .
Description
技术领域technical field
本发明涉及光纤传感器技术领域，尤其涉及一种蓝宝石高温传感器。The invention relates to the technical field of optical fiber sensors, in particular to a sapphire high temperature sensor.
背景技术Background technique
美国弗吉尼亚理工大学光电子研究中心的Yizheng Zhu于2005年提出并制作了一种基于蓝宝石晶片的法珀高温传感器。In 2005, Yizheng Zhu from the Optoelectronics Research Center of Virginia Tech University proposed and fabricated a Faber high temperature sensor based on sapphire wafers.
该结构的传感器在制作时，因为毛细现象的存在高温胶很容易渗入到蓝宝石光纤的端头，污染光纤端头和蓝宝石晶片，这样干涉光谱的质量会严重下降，造成制作成功率很低。本次主要就是为了改进这个技术问题。该传感器使用0°角端面的蓝宝石光纤，这样光纤端面与蓝宝石晶片之间呈平行关系，容易发生干涉，影响晶片本身干涉信号的质量。When the sensor of this structure is fabricated, the high-temperature glue can easily penetrate into the end of the sapphire fiber due to the existence of capillary phenomenon, contaminating the fiber end and the sapphire wafer, so the quality of the interference spectrum will be seriously degraded, resulting in a very low production success rate. This time is mainly to improve this technical problem. The sensor uses a sapphire optical fiber with a 0° angle end face, so that the optical fiber end face and the sapphire wafer are in a parallel relationship, which is prone to interference and affects the quality of the interference signal of the wafer itself.
发明内容SUMMARY OF THE INVENTION
本发明要解决的技术问题在于针对现有技术中高温胶容易渗入蓝宝石光纤，且0°角端面的蓝宝石光纤容易发生干涉的缺陷，提供一种新固定结构，且蓝宝石光纤端面设置斜角的蓝宝石高温传感器。The technical problem to be solved by the present invention is to provide a new fixing structure in view of the defects in the prior art that high-temperature glue easily penetrates into the sapphire optical fiber, and the sapphire optical fiber at the 0° angle end face is prone to interference, and the sapphire optical fiber end face is provided with a beveled sapphire optical fiber. High temperature sensor.
本发明解决其技术问题所采用的技术方案是：The technical scheme adopted by the present invention to solve its technical problems is:
本发明提供一种蓝宝石高温传感器，包括蓝宝石光纤和蓝宝石晶片，蓝宝石光纤的入射端固定连接有多模光纤，反射端与蓝宝石晶片相连，蓝宝石光纤与蓝宝石晶片的连接处设置有斜角；The invention provides a sapphire high temperature sensor, comprising a sapphire optical fiber and a sapphire wafer, the incident end of the sapphire fiber is fixedly connected with a multimode fiber, the reflection end is connected with the sapphire wafer, and the connection between the sapphire fiber and the sapphire wafer is provided with an oblique angle;
蓝宝石光纤的反射端外套装有耐高温插芯，耐高温插芯外套装有耐高温套筒，耐高温套筒的一端与蓝宝石晶片固定连接。The reflective end jacket of the sapphire optical fiber is provided with a high temperature resistant ferrule, the high temperature resistant ferrule jacket is provided with a high temperature resistant sleeve, and one end of the high temperature resistant sleeve is fixedly connected with the sapphire wafer.
进一步地，本发明的蓝宝石光纤反射端与蓝宝石晶片之间的斜角的角度为3°-10°。Further, the angle of the oblique angle between the reflecting end of the sapphire optical fiber of the present invention and the sapphire wafer is 3°-10°.
进一步地，本发明的蓝宝石光纤反射端与蓝宝石晶片之间的斜角的角度为5°，通过对蓝宝石光纤反射端的端面进行研磨，形成5°的斜角。Further, the angle of the oblique angle between the reflection end of the sapphire optical fiber and the sapphire wafer of the present invention is 5°, and the oblique angle of 5° is formed by grinding the end face of the reflection end of the sapphire optical fiber.
进一步地，本发明的蓝宝石光纤与耐高温插芯之间通过高温胶粘连，耐高温插芯与耐高温套筒之间通过高温胶粘连，耐高温套筒与蓝宝石晶片之间通过高温胶粘连。Further, the sapphire optical fiber and the high temperature resistant ferrule of the present invention are bonded by high temperature adhesive, the high temperature resistant ferrule and the high temperature resistant sleeve are bonded by high temperature adhesive, and the high temperature resistant sleeve and the sapphire wafer are bonded by high temperature adhesive. Adhesion.
进一步地，本发明的耐高温插芯的长度大于耐高温套筒的长度。Further, the length of the high temperature resistant ferrule of the present invention is greater than the length of the high temperature resistant sleeve.
进一步地，本发明的耐高温插芯与蓝宝石晶片之间设置有空隙。Further, a gap is provided between the high temperature resistant ferrule of the present invention and the sapphire wafer.
进一步地，本发明的多模光纤与蓝宝石光纤通过熔接的手段进行固定。Further, the multimode optical fiber and the sapphire optical fiber of the present invention are fixed by means of fusion splicing.
进一步地，本发明的耐高温插芯和耐高温套筒为陶瓷、蓝宝石或刚玉材料。Further, the high temperature resistant ferrule and the high temperature resistant sleeve of the present invention are made of ceramic, sapphire or corundum material.
本发明产生的有益效果是：本发明的蓝宝石高温传感器，通过耐高温插芯和耐高温套筒的结构设计，能够校准蓝宝石光纤，还能对蓝宝石光纤和蓝宝石晶片进行紧密固定，使耐高温插芯端面和蓝宝石晶片分离开，避免了毛细现象，有效防止了高温胶渗入蓝宝石光纤的端头；通过在蓝宝石光纤端面设计的斜角结构，能够防止光纤端面与蓝宝石晶片之间发生干涉，提高了干涉光谱的质量，提高了传感器探头的操作成功率。The beneficial effects of the present invention are: the sapphire high temperature sensor of the present invention can calibrate the sapphire optical fiber through the structural design of the high temperature resistant ferrule and the high temperature resistant sleeve, and can also tightly fix the sapphire optical fiber and the sapphire wafer, so that the high temperature resistant insert The core end face and the sapphire wafer are separated to avoid the capillary phenomenon and effectively prevent the high temperature glue from infiltrating the end of the sapphire fiber. The quality of the interference spectrum improves the operational success rate of the sensor probe.
附图说明Description of drawings
下面将结合附图及实施例对本发明作进一步说明，附图中：The present invention will be further described below in conjunction with the accompanying drawings and embodiments, in which:
图1是本发明实施例的蓝宝石高温传感器的结构示意图；1 is a schematic structural diagram of a sapphire high temperature sensor according to an embodiment of the present invention;
图2是本发明实施例的蓝宝石高温传感器的斜角光线反射示意图；2 is a schematic diagram of oblique angle light reflection of a sapphire high temperature sensor according to an embodiment of the present invention;
图中，1-蓝宝石光纤，2-蓝宝石晶片，3-耐高温插芯，4-耐高温套筒，5-高温胶，6-多模光纤，7-空隙。In the picture, 1-sapphire fiber, 2-sapphire wafer, 3-high temperature ferrule, 4-high temperature sleeve, 5-high temperature glue, 6-multimode fiber, 7-gap.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅用以解释本发明，并不用于限定本发明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
如图1所示，本发明实施例的蓝宝石高温传感器，包括蓝宝石光纤1和蓝宝石晶片2，蓝宝石光纤1的入射端固定连接有多模光纤6，反射端与蓝宝石晶片2相连，蓝宝石光纤1与蓝宝石晶片2的连接处设置有斜角；As shown in FIG. 1 , the sapphire high temperature sensor according to the embodiment of the present invention includes a sapphire fiber 1 and a sapphire wafer 2. The incident end of the sapphire fiber 1 is fixedly connected to a multimode fiber 6, the reflection end is connected to the sapphire wafer 2, and the sapphire fiber 1 is connected to the sapphire wafer 2. The junction of the sapphire wafer 2 is provided with a bevel;
蓝宝石光纤1的反射端外套装有耐高温插芯3，耐高温插芯3外套装有耐高温套筒4，耐高温套筒4的一端与蓝宝石晶片2固定连接。The reflective end of the sapphire optical fiber 1 is covered with a high temperature resistant ferrule 3 , and the high temperature resistant ferrule 3 is covered with a high temperature resistant sleeve 4 , and one end of the high temperature resistant sleeve 4 is fixedly connected to the sapphire wafer 2 .
如图2所示，为了避免光纤与晶片之间发生干涉，提高晶片干涉光谱的质量，采用斜5°端头的蓝宝石光纤。其他斜度的也可以使用，但是角度太小效果不明显，角度太大会影响反射光谱的强度，蓝宝石光纤1反射端与蓝宝石晶片2之间的斜角最合适的角度范围为3°-10°。As shown in Figure 2, in order to avoid interference between the fiber and the wafer and improve the quality of the wafer's interference spectrum, a sapphire fiber with a 5° inclined end is used. Other inclinations can also be used, but if the angle is too small, the effect will not be obvious. If the angle is too large, the intensity of the reflection spectrum will be affected. .
蓝宝石光纤1与耐高温插芯3之间通过高温胶5粘连，耐高温插芯3与耐高温套筒4之间通过高温胶5粘连，耐高温套筒4与蓝宝石晶片2之间通过高温胶5粘连。耐高温插芯3的长度大于耐高温套筒4的长度。耐高温插芯3与蓝宝石晶片2之间设置有空隙。多模光纤6与蓝宝石光纤1通过熔接的手段进行固定。The sapphire optical fiber 1 and the high temperature resistant ferrule 3 are bonded by the high temperature glue 5, the high temperature resistant ferrule 3 and the high temperature resistant sleeve 4 are bonded by the high temperature glue 5, and the high temperature resistant sleeve 4 and the sapphire wafer 2 are bonded by the high temperature glue 5 Adhesion. The length of the high temperature resistant ferrule 3 is greater than the length of the high temperature resistant sleeve 4 . A gap is provided between the high temperature resistant ferrule 3 and the sapphire wafer 2 . The multimode optical fiber 6 and the sapphire optical fiber 1 are fixed by means of fusion splicing.
在本发明的另一个实施例中，传感器结构包含多模光纤、蓝宝石光纤、蓝宝石晶片、耐高温插芯和耐高温套管五个部分。其中多模光纤与蓝宝石光纤熔接在一起，而蓝宝石光纤的前端与蓝宝石晶片接触。蓝宝石光纤和蓝宝石晶片采用“耐高温插芯-耐高温套管-高温胶”结构固定在一起。该结构既可以校准蓝宝石光纤，也可以将光纤和晶片粘接固定起来。In another embodiment of the present invention, the sensor structure includes five parts: a multimode optical fiber, a sapphire optical fiber, a sapphire wafer, a high temperature resistant ferrule and a high temperature resistant sleeve. The multimode fiber and the sapphire fiber are fused together, and the front end of the sapphire fiber is in contact with the sapphire wafer. The sapphire optical fiber and the sapphire wafer are fixed together by the structure of "high temperature resistant ferrule-high temperature resistant sleeve-high temperature glue". The structure can not only calibrate the sapphire fiber, but also can bond the fiber and the wafer together.
由蓝宝石光纤传输的光在输出端面处发生折射，通过空气介质后到达蓝宝石晶片(法珀腔)。其中将蓝宝石光纤的端面设计成斜5°角，以有效抑制蓝宝石光纤端面和蓝宝石晶片之间的干涉现象。经过蓝宝石晶片前后两个面的反射后，得到强度不同的两束反射光，这两束光发生干涉，得到干涉光谱信号。该光谱信号经过蓝宝石光纤、多模光纤输出给光谱仪。The light transmitted by the sapphire fiber is refracted at the output end face, and then reaches the sapphire wafer (Fa-Per cavity) after passing through the air medium. The end face of the sapphire fiber is designed to be inclined at an angle of 5° to effectively suppress the interference phenomenon between the end face of the sapphire fiber and the sapphire wafer. After the reflection of the front and rear surfaces of the sapphire wafer, two reflected lights with different intensities are obtained, and the two lights interfere to obtain an interference spectrum signal. The spectral signal is output to the spectrometer through sapphire fiber and multimode fiber.
对于一个指定的传感器，干涉光谱信号与温度之间呈现一一对应关系，通过对光谱信号的解调就可以得到相应的温度值。For a given sensor, there is a one-to-one correspondence between the interference spectral signal and the temperature, and the corresponding temperature value can be obtained by demodulating the spectral signal.
因为传感器需要耐高温1800℃，所以采用陶瓷、蓝宝石、刚玉等耐高温材料。如果将耐高温插芯和耐高温套筒合为一体，制作出一种长尾椎耐高温插芯，也可以起到相同的作用。这种高温传感器可以实现高温、高压、高腐蚀、强电磁辐射的恶劣环境下对20℃-1800℃范围温度的测量。Because the sensor needs to be resistant to high temperature of 1800 °C, high temperature resistant materials such as ceramics, sapphire, and corundum are used. If the high temperature resistant ferrule and the high temperature resistant sleeve are integrated, a long tail vertebra high temperature resistant ferrule can be produced, which can also play the same role. This high temperature sensor can measure the temperature in the range of 20℃-1800℃ under the harsh environment of high temperature, high pressure, high corrosion and strong electromagnetic radiation.
应当理解的是，对本领域普通技术人员来说，可以根据上述说明加以改进或变换，而所有这些改进和变换都应属于本发明所附权利要求的保护范围。It should be understood that, for those skilled in the art, improvements or changes can be made according to the above description, and all these improvements and changes should fall within the protection scope of the appended claims of the present invention.
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