CN105987766A - Temperature measurement method and temperature measurement device - Google Patents
Temperature measurement method and temperature measurement device Download PDFInfo
- Publication number
- CN105987766A CN105987766A CN201510051681.9A CN201510051681A CN105987766A CN 105987766 A CN105987766 A CN 105987766A CN 201510051681 A CN201510051681 A CN 201510051681A CN 105987766 A CN105987766 A CN 105987766A
- Authority
- CN
- China
- Prior art keywords
- resistance
- temperature
- branch road
- parallel
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract description 6
- 238000009529 body temperature measurement Methods 0.000 title abstract 4
- 238000005259 measurement Methods 0.000 claims abstract description 24
- 238000012545 processing Methods 0.000 claims abstract description 6
- 230000035882 stress Effects 0.000 claims description 43
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical group [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 39
- 239000000463 material Substances 0.000 claims description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 238000004544 sputter deposition Methods 0.000 claims description 19
- 230000005611 electricity Effects 0.000 claims description 17
- 229910052757 nitrogen Inorganic materials 0.000 claims description 16
- 238000004861 thermometry Methods 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 10
- 230000006353 environmental stress Effects 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 9
- 238000004062 sedimentation Methods 0.000 claims description 9
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 6
- 206010030113 Oedema Diseases 0.000 claims 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 claims 1
- 208000035475 disorder Diseases 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 description 6
- 241001269238 Data Species 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
Abstract
The invention provides a temperature measurement method and a temperature measurement device. The device comprises a measurement circuit. The measurement circuit comprises a first branch and a second branch connected in parallel, and first and second resistors. The resistances of the second resistors change. The resistance of the first branch is equal to the resistance of the second branch. The first resistor connected with a grounding parallel connection point includes a first resistor grounding end directly connected with the grounding parallel connection point and a first resistor non-grounding end not directly connected with the grounding parallel connection point. The second resistor connected with the grounding parallel connection point includes a second resistor grounding end directly connected with the grounding parallel connection point and a second resistor non-grounding end not directly connected with the grounding parallel connection point. The measurement circuit further comprises a processing unit which gets the temperature of the environment where the measurement circuit is in based on the resistance changes of the second resistors and the fixed relationship between the resistances of the second resistors and the temperature. The beneficial effect is that the resistance to high temperature is better compared with the prior art, and the working stability at high temperature is higher.
Description
Technical field
The present invention relates to semiconductor applications, be specifically related to a kind of thermometry and temperature measuring equipment.
Background technology
Prior art it is frequently necessary to detect temperature by temperature measuring equipment.But existing temperature is surveyed
The heat resistance of amount device is poor, it is difficult to the environment that adaptive temperature is higher, this can cause its job stability
It is deteriorated, and then causes its certainty of measurement to be affected.
Additionally, due to these existing temperature sensing circuits are due to the tolerance degree to above-mentioned hot environment
The highest, the service life of these temperature sensing circuits is the most permanent, needs to be replaced as often as possible, and this is necessarily
The cost during the manufacturing and time is added in degree.
Therefore, how to design a kind of temperature sensing circuit that can bear high temperature and high pressure environment and become this area
The technical problem that technical staff is urgently to be resolved hurrily.
Summary of the invention
The problem that the present invention solves is to provide a kind of thermometry and temperature measuring equipment, to improve
The certainty of measurement of temperature sensing circuit.
For solving the problems referred to above, the present invention provides a kind of temperature measuring equipment, including:
Measuring loop, described measurement loop includes:
First branch road and the second branch road, parallel with one another between described first branch road and the second branch road, and
There is the first point in parallel and the second point in parallel；One of them in parallel with second is put in described first parallel connection
As ground connection parallel connection point ground connection；
Described first branch road and the second branch road all include the first resistance and at least one that some resistances are fixing
Second resistance of individual change in resistance, in a fixed relationship change between resistance and the temperature of described second resistance,
Described second resistance is identical with the resistance of described first resistance when the first temperature；Described first branch road and
The resistance of the second branch road is equal；
First branch road includes first resistance being directly connected with described ground connection parallel connection point, described second
Road includes second resistance being connected with described ground connection parallel connection point；Or, described first branch road includes
One the second resistance being directly connected with described ground connection parallel connection point, described second branch road includes that one connects with described
The first resistance that ground point in parallel is connected；
The first resistance being connected with described ground connection parallel connection point includes the first electricity that point in parallel with ground connection is joined directly together
The first ungrounded end of resistance that resistance earth terminal and point in parallel with ground connection are not joined directly together；In parallel with described ground connection
The second resistance that point is connected includes the second resistance eutral grounding end that point in parallel with ground connection be joined directly together and with ground connection also
The second ungrounded end of resistance that connection point is not joined directly together；
Processing unit, for according between the described first ungrounded end of resistance and the ungrounded end of the second resistance
Voltage difference, and the current value of the first point in parallel or the second point in parallel is to obtain the electricity of described second resistance
Resistance changing value, and by the increased resistance value of described second resistance and the resistance of the second resistance and temperature it
Between fixed relationship, it is thus achieved that measure the temperature of loop local environment.
Optionally, when temperature is higher than described first temperature, the resistance of described second resistance raises with temperature
And increase.
Optionally, described first branch road is provided with one first resistance and one second resistance, described first electricity
It is serially connected between resistance and the second resistance；
Described second branch road is provided with one first resistance and one second resistance, described first resistance and second
Resistant series.
Optionally, the temperature-coefficient of electrical resistance of described second resistance is higher than the resistance temperature system of described first resistance
Number.
Optionally, the temperature-coefficient of electrical resistance of described second resistance be 1 × 10-3/ degree Celsius～2 × 10-3/ Celsius
Degree.
Optionally, the material of described first resistance and the second resistance is titanium nitride, described first resistance
Stress less than the stress of the second resistance.
Optionally, the stress of described second resistance is higher than 10GPa, and the stress of described first resistance is less than 0.1
GPa。
Additionally, the present invention also provides for a kind of thermometry, including:
One measurement loop is provided；
First branch road and the second branch road are set in described measurement loop；
Make between described first branch road and the second branch road parallel with one another to form the first point in parallel and second
Point in parallel, and make the described first point in parallel or the second point in parallel as ground connection parallel connection point ground connection；
Described first branch road and the second branch road are respectively provided with the first fixing resistance of some resistances and
Second resistance of at least one change in resistance, in a fixing pass between resistance and the temperature of described second resistance
System's change, described second resistance is identical with the resistance of described first resistance when the first temperature；Make described
The resistance of one branch road and the second branch road is equal；
One the first resistance being directly connected with described ground connection parallel connection point is set in described first branch road, and
Described second branch road arranges second resistance being connected with described ground connection parallel connection point；Or, described
One branch road arranges second resistance being directly connected with described ground connection parallel connection point, and at described second branch road
Middle first resistance being connected with described ground connection parallel connection point is set；
Making the first resistance being connected with described ground connection parallel connection point include, point in parallel with ground connection is joined directly together first
The first ungrounded end of resistance that resistance eutral grounding end and point in parallel with ground connection are not joined directly together；And make to connect with described
The second resistance that ground point in parallel is connected include the second resistance eutral grounding end that point in parallel with ground connection be joined directly together and with
The second ungrounded end of resistance that ground connection parallel connection point is not joined directly together；
Described measurement loop is positioned over an environment being higher or lower than the first temperature；
Obtain the voltage difference between the described first ungrounded end of resistance and the ungrounded end of the second resistance；
Obtain the first point in parallel or the current value of the second point in parallel；
The increased resistance value of described second resistance is obtained by described voltage difference and current value；
By fixing between increased resistance value and the resistance of the second resistance and the temperature of described second resistance
Relation, it is thus achieved that measure the temperature of loop local environment.
Optionally, when temperature is higher than described first temperature, the resistance of described second resistance raises with temperature
And increase.
Optionally, in the first branch road and the second branch road, it is respectively provided with the first resistance and the second resistance
Step includes:
One first resistance and one second resistance are set in described first branch road, and make described first resistance
And second be serially connected between resistance；
One first resistance and one second resistance are set in described second branch road, and make described first resistance
With the second resistant series.
Optionally, in the first branch road and the second branch road, it is respectively provided with the first resistance and the second resistance
Step includes: make the temperature-coefficient of electrical resistance resistance temperature system higher than described first resistance of described second resistance
Number.
Optionally, the temperature-coefficient of electrical resistance of the second resistance is 1 × 10-3/ degree Celsius～2 × 10-3/ degree Celsius.
Optionally, in the first branch road and the second branch road, it is respectively provided with the first resistance and the second resistance
Step includes: uses titanium nitride as described first resistance and the material of the second resistance, and makes described the
The stress of one resistance is less than the stress of the second resistance.
Optionally, the stress the second resistance higher than 10GPa is set, and stress is less than the first of 0.1GPa
Resistance.
Optionally, in the first branch road and the second branch road, it is respectively provided with the first resistance and the second resistance
Step includes: use the mode of sputtering sedimentation to form described first resistance and the second resistance.
Optionally, the step forming the first resistance includes: use the target of titanium material, with nitrogen as instead
Answering gas, nitrogen partial pressure is in the range of 1.7～1.9Pa；Make the environmental stress of sputtering sedimentation 2.2～2.4Pa
In the range of, ambient temperature is in the range of 340～360 degrees Celsius；The power making sputtering deposition device exists
In the range of 0.4～0.6Kw, bias voltage is 0；
The step forming the second resistance includes: use the target of titanium material, with nitrogen as reacting gas,
Nitrogen partial pressure is in the range of 0.3～0.5Pa；Make the environmental stress of sputtering sedimentation 0.4～0.6Pa scope
In, ambient temperature is in the range of 340～360 degrees Celsius；Make the power of sputtering deposition device 11～
In the range of 13Kw, bias voltage is 0.
Compared with prior art, technical scheme has the advantage that
The temperature measuring equipment of the present invention comprises the first branch road and the second branch road being arranged in parallel, and described
First branch road and the second branch road are respectively arranged with the first fixing resistance of some resistances and at least one
Second resistance of change in resistance, the resistance of the first branch road and the second branch road is equal；The measurement loop of the present invention
For by between the first end resistance in the first branch road and the second branch road or the second end resistance
Voltage difference, and the current value of the first point in parallel or the second point in parallel obtains the resistance of described second resistance
Changing value, and by between increased resistance value and the resistance of the second resistance and the temperature of described second resistance
Fixed relationship, it is thus achieved that measure the temperature of loop local environment.First point in parallel or the second parallel connection are put
Between first end resistance or the second end resistance in current value, the first branch road and the second branch road
Voltage difference is easy to record in practical operation, and the pass of increased resistance value and the temperature due to the second resistance
System is fixing, the temperature of the environment residing for the temperature measuring equipment obtaining the present invention that so can be more accurate.
Further, this structure itself relies on the rising of temperature and then changes the resistance of the second resistance, and then counter pushes away
To ambient temperature, its resistant to elevated temperatures ability is more preferable compared to prior art, and steady operation at high temperature is steady
Qualitative the highest.
Accompanying drawing explanation
Fig. 1 to Fig. 3 is the schematic diagram in temperature measuring equipment one embodiment of the present invention.
Detailed description of the invention
Temperature measuring equipment of the prior art is poor for the tolerance degree of high temperature, and this not only results in it
Measuring bad stability and then affect certainty of measurement, also result in step-down in its in service life, needs are the most more
Changing, such production cost also can increase.
To this end, the present invention provides a kind of temperature measuring equipment, including:
Measuring loop, described measurement loop includes:
First branch road and the second branch road, parallel with one another between described first branch road and the second branch road, and
There is the first point in parallel and the second point in parallel；One of them in parallel with second is put in described first parallel connection
As ground connection parallel connection point ground connection；
Described first branch road and the second branch road all include the first resistance and at least one that some resistances are fixing
Second resistance of individual change in resistance, in a fixed relationship change between resistance and the temperature of described second resistance,
Described second resistance is identical with the resistance of described first resistance when the first temperature；Described first branch road and
The resistance of the second branch road is equal；
First branch road includes first resistance being directly connected with described ground connection parallel connection point, described second
Road includes second resistance being connected with described ground connection parallel connection point；Or, described first branch road includes
One the second resistance being directly connected with described ground connection parallel connection point, described second branch road includes that one connects with described
The first resistance that ground point in parallel is connected；
The first resistance being connected with described ground connection parallel connection point includes the first electricity that point in parallel with ground connection is joined directly together
Resistance earth terminal and point in parallel with ground connection are not joined directly together the first ungrounded end of resistance；Point in parallel with described ground connection
The second resistance being connected includes the second resistance eutral grounding end that point in parallel with ground connection be joined directly together and in parallel with ground connection
Point is not joined directly together the second ungrounded end of resistance；
Processing unit, for according between the described first ungrounded end of resistance and the ungrounded end of the second resistance
Voltage difference, and the current value of the first point in parallel or the second point in parallel is to obtain the electricity of described second resistance
Resistance changing value, and by the increased resistance value of described second resistance and the resistance of the second resistance and temperature it
Between fixed relationship, it is thus achieved that measure the temperature of loop local environment.
The measurement loop of the present invention is for according between the first ungrounded end of resistance and the ungrounded end of the second resistance
Voltage difference, and the current value of the first point in parallel or the second point in parallel obtains the electricity of described second resistance
Resistance changing value, and by the increased resistance value of described second resistance and the resistance of the second resistance and temperature it
Between fixed relationship, it is thus achieved that measure the temperature of loop local environment.First point in parallel or the second point in parallel
Current value, the first branch road and the second branch road in the first ungrounded end of resistance and the second resistance ungrounded
Voltage difference between end is easy to record in practical operation, and due to the second resistance increased resistance value with
The relation of temperature is fixed, the ring residing for the temperature measuring equipment obtaining the present invention that so can be more accurate
The temperature in border.Further, the loop of measuring of this present invention itself relies on the rising of temperature and then changes second
The resistance of resistance, and then it is back-calculated to obtain ambient temperature, its resistant to elevated temperatures ability is more preferable compared to prior art,
Steady operation stability at high temperature is the highest.
Understandable, below in conjunction with the accompanying drawings for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from
The specific embodiment of the present invention is described in detail.
Refer to Fig. 1 to Fig. 3, for the schematic diagram in temperature measuring equipment one embodiment of the present invention.
Referring first to Fig. 1, in the present embodiment, described temperature measuring equipment includes:
Measuring loop 100, described measurement loop 100 includes:
First branch road 110 and the second branch road 120, described first branch road 110 and the second branch road 120 it
Between parallel with one another, and there is the first point A and second in parallel point in parallel C；Wherein, described first is in parallel
One of them of point A and second point in parallel C is as ground connection parallel connection point ground connection, concrete, at the present embodiment
In, some A in parallel is used for being passed through electric current I, and some C in parallel is for ground connection, for ground connection parallel connection point.
The resistance of described first branch road 110 and the second branch road 120 is equal, is so passed through at parallel connection point A
Electric current I will distribute fifty-fifty to the first branch road 110 and the second branch road 120, say, that described
One branch road 110 and the second respective size of current of branch road 120 are 2/I.
Described first branch road 110 and the second branch road 120 include the first resistance that some resistances are fixing respectively
Second resistance 50 of 60 (R3 and R3 as in Fig. 1) and at least one change in resistance is (in Fig. 1
R1 and R4), wherein, described second resistance 50 at the first temperature with the resistance phase of the first resistance 60
Deng, and, when temperature higher or lower than described first temperature time, the resistance of described second resistance 50 with
Will be in a fixed relationship change between temperature.Between change and the temperature of the resistance according to the second resistance 50
Relation extrapolates the temperature of test loop local environment.Concrete mode will be described in detail in a later process.
Concrete, in the present embodiment, the resistance of described second resistance 50 raises along with temperature and increases.
Specifically, described first temperature can be room temperature in the present embodiment, and the most about 25 is Celsius
The scope of degree.In the range of room temperature, the resistance of described second resistance 50 is identical with described first resistance 60,
For the ease of describing, resistance size R of the first resistance 60 and the second resistance 50 under room temperature is represented.
When the temperature is higher than the room temperature, the resistance of the second resistance 50 increases, and becomes R+ Δ R, and wherein Δ R is second
The increased resistance value of resistance 50.
Further, in the present embodiment, in order to reach to make the resistance of the first resistance 60 fix, namely
Do not vary with temperature, make the resistance of the second resistance 50 raise along with the rising of temperature simultaneously, permissible
Use the material shape of relatively low resistance temperature coefficient (Temperature Coefficient of Resistance, TCR)
Described first resistance 60, the material simultaneously using temperature-coefficient of electrical resistance of a relatively high is become to form described second electricity
Resistance 50.
Incorporated by reference to reference to Fig. 2, it it is the resistance change rate pass with temperature of the first resistance 60 and the second resistance 50
System's figure, wherein the longitudinal axis is resistance change rate, and transverse axis is temperature, and line segment 11 and 12 represents the second electricity respectively
The relation of resistance 50 and the first resistance 60 and temperature.It can be seen that temperature-coefficient of electrical resistance is relatively
The second high resistance 50 is along with the rising of temperature, and its resistance change rate is gradually increased；And for the first resistance
60, owing to temperature-coefficient of electrical resistance is relatively small even close to zero, the change of the temperature change to its resistance
Affect less generally.
Such as, in the present embodiment, can use temperature-coefficient of electrical resistance scope is 1 × 10-3/ degree Celsius～2
×10-3/ degree Celsius the second resistance 50.
Additionally, the temperature-coefficient of electrical resistance of described first resistance 60 then selects alap material, such as, exist
In the present embodiment, can select temperature-coefficient of electrical resistance at the material of ppm magnitude, such as, resistance temperature system
Number about 1 × 10-6/ degree Celsius.
In the present embodiment, the first resistance 60 and the second resistance 50 of titanium nitride material can be used, its
In, the titanium nitride material forming described second resistance 50 has heavily stressed, forms described first resistance 60
Material there is relatively low stress or not there is stress.
The own fusing point of titanium nitride higher (about 2950 degrees Celsius), himself has preferable high temperature resistant energy
Power, is conducive to increasing the high temperature tolerance degree of temperature measuring equipment further.Meanwhile, titanium nitride is partly being led
Body field is common materials, is also easier to obtain, and this is substantially without increasing the difficulty manufactured.
Specifically, there is the titanium nitride of higher stress and there is relatively low stress, the most substantially there is no stress
The grainiess of titanium nitride different, in the titanium nitride material of stress relatively low (the most substantially not having stress)
Containing more hole (void), these holes can discharge stress so that the overall stress of titanium nitride drops
Low, these holes can make electronics scatter simultaneously, and then increases the resistance of titanium nitride, its more crystalline substance
Boundary also can increase resistance sizes to a certain extent.It is to say, the electricity of the relatively low titanium nitride of this stress
Resistance mainly produced by these holes, its resistance be similar to a kind of material per se with resistance, its resistance
With the relation of temperature little, the temperature-coefficient of electrical resistance of the most this titanium nitride is the lowest even levels off to zero.
On the other hand, have in the titanium nitride of higher stress and lack hole, due to lack hole buffer should
Power or make electronics scatter, the resistance of the most this heavily stressed titanium nitride is more susceptible to temperature shadow
Ringing, therefore its temperature-coefficient of electrical resistance is higher relative to the titanium nitride of low stress.
When temperature raises, and the atomic vibration frequency in this heavily stressed titanium nitride increases, to conducting in it
In electron-blocking capacity become strong, thus resistance becomes big.
In the present embodiment, in order to the stress making heavily stressed titanium nitride is sufficiently high as far as possible, higher to obtain
Temperature-coefficient of electrical resistance, the titanium nitride material that stress can be used to be higher than 10GPa forms described second resistance
50。
Additionally, try one's best the first low resistance 60 to obtain temperature-coefficient of electrical resistance, in order in the calculation will
The resistance of the first resistance 60 regards a constant and then the convenient increased resistance value calculating the second resistance 50 as,
The titanium nitride material that stress can be selected to be less than 0.1GPa forms described first resistance 60.But this is only
Being an example, the present invention is to this and is not construed as limiting, but should be as the criterion according to actual needs.
In the present embodiment, in described first branch road 110 and the second branch road 120, it is provided with one respectively
One resistance 60 and one second resistance 50, described first resistance 60 is connected with the second resistance 50.Namely
Saying, described first branch road 110 and the second branch road 120 comprise two resistance (one first electricity respectively
Resistance 60 and second resistance 50).
As it was noted above, in the present embodiment, some C in parallel is ground connection parallel connection point.In first branch road 110
The first resistance 60 being joined directly together including a direct point in parallel with described ground connection (some C in parallel), specifically comes
Say as R2；Meanwhile, described second branch road 120 includes a point in parallel with described ground connection (some C in parallel)
The second resistance 50 being joined directly together.
But, it is the most necessary that point in parallel with described ground connection in the first branch road 110 is joined directly together by the present invention
Be in the first resistance 60, or the second branch road 120 point in parallel with described ground connection be joined directly together the most necessary
It is that the second resistance 50 is not construed as limiting, in other embodiments of the invention, it is also possible to be: described first
Road 110 includes second resistance 50 being directly connected, described second branch road 120 with described ground connection parallel connection point
Include first resistance 60 being connected with described ground connection parallel connection point.
Concrete, the first resistance 60 being connected with described ground connection parallel connection point includes point direct phase in parallel with ground connection
The first ungrounded end of resistance 60 that the first resistance 60 earth terminal even and point in parallel with ground connection are not joined directly together；
The second resistance 50 being connected with described ground connection parallel connection point includes the second resistance that point in parallel with ground connection is joined directly together
Earth terminal and point in parallel with ground connection are not joined directly together the second ungrounded end of resistance 50.
Herein it should be noted that the first branch road 110 and the second branch road 120 are specifically provided with by the present invention
How to arrange between how many first resistance 60 and second resistance the 50, first resistance 60 and the second resistance 50
Row are not limited in any way, because it is contemplated that measuring in the first branch road 110 and the second branch road 120 two
The respective ungrounded end of individual resistance (the first ungrounded end of the first resistance 60 and the of the second resistance 50
Two ungrounded ends) between voltage difference, in order to obtain described voltage difference, the two resistance should comprise
One the first resistance 60 and second resistance 50, and the first branch road 110 and the second branch road 120
Resistance summation is equal i.e. can reach the purpose of the present invention.Therefore, in other embodiments of the invention, institute
Stating can each self-contained multiple, the first resistance 60 and in the first branch road 110 and the second branch road 120
Two resistance 50.
In conjunction with reference Fig. 3, when described temperature measuring equipment being put in the middle of certain environment being higher than room temperature,
The resistance of the second resistance 50 raises, and for the ease of distinguishing, is labeled as by the second resistance 50 of change in resistance
R1` and R4`.
The measurement loop 100 of the present invention also includes processing unit (not shown), and described processing unit is used
In the first resistance 60 being joined directly together according to point in parallel with ground connection ungrounded end and the second resistance 50 is non-connects
Voltage difference between ground end, and the current value of the first point A or second in parallel point in parallel C obtains described
The increased resistance value of the second resistance 50, and by the increased resistance value and second of described second resistance 50
Fixed relationship between resistance and the temperature of resistance 50, it is thus achieved that measure the temperature of loop 100 local environment.
Concrete calculating process is as follows:
In the present embodiment, can connect, with cut-off, the ungrounded end of resistance R2 and R4 being connected with ground connection parallel connection point
Between voltage difference, namely voltage difference delta V between B, D 2.Described voltage difference is in practical operation
In be easier obtain, can directly record for example with instruments such as electroprobes.
Then, it is thus achieved that be passed through the size of the electric current I in described measurement loop 100.Same, in practical operation
During, the size of electric current I can also be obtained more easily by instruments such as electroprobes.
Owing to the resistance sizes of the first branch road 110 and the second branch road 120 is equal, therefore the first branch road 110
And second the respective circuit of branch road 120 be 2/I.
Therefore below equation is obtained:
Formula is deformed, obtains calculating the formula of the increased resistance value Δ R of the second resistance 50:
As it was noted above, the size of I and Δ V can directly obtain, therefore can obtain higher than the first temperature
At a temperature of certain of degree, the increased resistance value Δ R of the second resistance 50.
As it was noted above, close owing to fixing in one between increased resistance value Δ R and the temperature of the second resistance 50
System, by between the increased resistance value of described second resistance 50 and resistance and the temperature of the second resistance 50
Fixed relationship just can obtain the temperature measuring loop 100 local environment.
It should be noted that increased resistance value Δ R and temperature that how the present invention to obtaining the second resistance 50
Between fixed relationship do not repeat, because described fixed relationship material with resistance in practical operation is straight
Connect relevant, and can be directly obtained, therefore, at this by modes such as experiment, inquiry available datas
In bright, described fixed relationship is known quantity.
Additionally, the present invention also provides for a kind of thermometry, described measuring method is referred to Fig. 1 extremely
Fig. 3；Described kind of thermometry comprises the following steps:
One measurement loop 100 is provided；
First branch road 110 and the second branch road 120 is set in described measurement loop 100；
Make between described first branch road 110 and the second branch road 120 parallel with one another to form the first point A in parallel
And the second point C in parallel, and make the described first point A in parallel and second one of them conduct putting C in parallel
Ground connection parallel connection point ground connection；
Specifically, in the present embodiment, some A in parallel is used for being passed through electric current I, some C in parallel and is used for ground connection,
For ground connection parallel connection point.
Be respectively provided with in described first branch road 110 and the second branch road 120 that some resistances are fixing first
Resistance 60 and the second resistance 50 of at least one change in resistance, the resistance of described second resistance 50 and temperature
Between degree in one fixed relationship change, described second resistance 50 when the first temperature with described first resistance 60
Resistance identical；The resistance making described first branch road 110 and the second branch road 120 is equal；
In the present embodiment, when temperature higher than described first temperature time, the resistance of described second resistance 50 with
Temperature raises and increases.
In the present embodiment, described first temperature can be room temperature in the present embodiment, the most about 25
Degree Celsius scope.In the range of room temperature, the resistance of described second resistance 50 and described first resistance 60
Identical, for the ease of describing, by the first resistance 60 and resistance size R of the second resistance 50 under room temperature
Represent.When the temperature is higher than the room temperature, the resistance of the second resistance 50 increases, and becomes R+ Δ R, wherein Δ R
It it is the changing value of the resistance of the second resistance 50.
Further, in the present embodiment, in order to reach to make the resistance of the first resistance 60 fix, namely
Do not vary with temperature, make the resistance of the second resistance 50 raise along with the rising of temperature simultaneously, permissible
Use the material shape of relatively low resistance temperature coefficient (Temperature Coefficient of Resistance, TCR)
Described first resistance 60, the material simultaneously using temperature-coefficient of electrical resistance of a relatively high is become to form described second electricity
Resistance 50.
Such as, in the present embodiment, can use temperature-coefficient of electrical resistance scope is 1 × 10-3/ degree Celsius～2
×10-3/ degree Celsius the second resistance 50.
Additionally, the temperature-coefficient of electrical resistance of described first resistance 60 then selects alap material, such as, exist
In the present embodiment, can select temperature-coefficient of electrical resistance at the material of ppm magnitude, such as, resistance temperature system
Number about 1 × 10-6/ degree Celsius.
In the present embodiment, the first resistance 60 and the second resistance 50 of titanium nitride material can be used, its
In, the titanium nitride material forming described second resistance 50 has heavily stressed, forms described first resistance 60
Material there is relatively low stress or not there is stress.
The own fusing point of titanium nitride higher (about 2950 degrees Celsius), himself has preferable high temperature resistant energy
Power, is conducive to increasing the high temperature tolerance degree of temperature measuring equipment further.Meanwhile, titanium nitride is partly being led
Body field is common materials, is also easier to obtain, and this is substantially without increasing the difficulty manufactured.
Specifically, the titanium nitride with higher stress does not has stress the most substantially with having relatively low stress
The grainiess of titanium nitride is different, contains in the titanium nitride material of stress relatively low (the most substantially not having stress)
Having more hole (void), these holes can discharge stress so that the overall stress of titanium nitride reduces,
These holes can make electronics scatter simultaneously, and then increases the resistance of titanium nitride；Its more crystal boundary is also
Resistance sizes can be increased to a certain extent.It is to say, the resistance master of the relatively low titanium nitride of this stress
To be produced by these holes, its resistance be similar to a kind of material per se with resistance, its resistance with temperature
The relation of degree is the most little, and the temperature-coefficient of electrical resistance of the most this titanium nitride is the lowest even levels off to zero.
Additionally, try one's best the first low resistance 60 to obtain temperature-coefficient of electrical resistance, in order in the calculation will
The resistance of the first resistance 60 regards a constant and then the convenient change in resistance amount calculating the second resistance 50 as,
The titanium nitride material that stress can be selected to be less than 0.1GPa forms described first resistance 60.But this is only
Being an example, the present invention is to this and is not construed as limiting, but should be as the criterion according to actual needs.
In the present embodiment, described first resistance 60 and second can be formed in the way of using sputtering sedimentation
Resistance 50, and the nitridation with relatively low stress is formed by the parameters in change sputter deposition process
Titanium and there is the titanium nitride of higher stress.
Such as, the step forming the first resistance 60 includes: use the target of titanium material, with nitrogen as instead
Answering gas, nitrogen partial pressure is in the range of 1.7～1.9Pa；Make the environmental stress of sputtering sedimentation 2.2～
In the range of 2.4Pa, ambient temperature is in the range of 340～360 degrees Celsius；Make sputtering deposition device
Power is in the range of 0.4～0.6Kw, and bias voltage is 0；
Concrete, nitrogen partial pressure can be 1.8Pa, and environmental stress is 2.3Pa, and ambient temperature is 350 to take the photograph
Family name's degree, the power of sputtering deposition device is 0.5Kw.
Additionally, the step forming the second resistance 50 includes: use the target of titanium material, with nitrogen as instead
Answering gas, nitrogen partial pressure is in the range of 0.3～0.5Pa；Make the environmental stress of sputtering sedimentation 0.4～0.6
In the range of Pa, ambient temperature is in the range of 340～360 degrees Celsius；Make the power of sputtering deposition device
In the range of 11～13Kw, bias voltage is 0.
Concrete, nitrogen partial pressure can be 0.41Pa, and environmental stress is 0.53Pa, and ambient temperature is 350
Degree Celsius, the power of sputtering deposition device is 12Kw；
It can be seen that formed when answering titanium nitride as the first resistance 60 material low, sputtering deposition device
Power is relatively small, and makes environmental stress and nitrogen partial pressure become relatively large, so advantageously forms
Titanium nitride material containing more hole；And when forming the heavily stressed titanium nitride of the second resistance 50, make to spatter
The power penetrating depositing device becomes of a relatively high, environmental stress and nitrogen partial pressure become relatively small favorably
In forming dense, the less heavily stressed titanium nitride of hole.
In the present embodiment, in described first branch road 110 and the second branch road 120, arrange one respectively
One resistance 60 and one second resistance 50, described first resistance 60 is connected with the second resistance 50.Namely
Say, make described first branch road 110 and the second branch road 120 comprise two resistance (first respectively
Resistance 60 and second resistance 50).
Describe for convenience, described first branch road 110 arranges a direct some phase in parallel with described ground connection
The first resistance 60 even, and in described second branch road 120, arrange one be connected with described ground connection parallel connection point C
The second resistance 50.
But, it is the most necessary that point in parallel with described ground connection in the first branch road 110 is joined directly together by the present invention
Be in the first resistance 60, or the second branch road 120 point in parallel with described ground connection be joined directly together the most necessary
It is that the second resistance 50 is not construed as limiting, in other embodiments of the invention, it is also possible to be: described first
Branch road 110 arranges second resistance 50 being directly connected with described ground connection parallel connection point, and described second
Branch road 120 arranges first resistance 60 being connected with described ground connection parallel connection point；
Making the first resistance 60 being connected with described ground connection parallel connection point include, point in parallel with ground connection is joined directly together
The first ungrounded end of resistance that one resistance 60 earth terminal and point in parallel with ground connection are not joined directly together；And make and institute
The second resistance 50 stating ground connection parallel connection point connected includes the second resistance 50 that point in parallel with ground connection is joined directly together
The second ungrounded end of resistance 50 that earth terminal and point in parallel with ground connection are not joined directly together；
The resistance making described first branch road 110 and the second branch road 120 is equal, so that through the first branch road
110 and second the size of current of branch road 120 equal.
Described measurement loop is positioned in an environment being higher than the first temperature, the now resistance of the second resistance 50
Value increases, and becomes R+ Δ R；
Obtain the voltage between ungrounded end and the ungrounded end of the second resistance 50 of described first resistance 60
Difference Δ V；Concrete, the voltage difference between R2 and R4, the namely electricity between B, D can be taken at 2
Pressure differential deltap V.Described voltage difference is easier to obtain in practical operation, permissible for example with instruments such as electroprobes
Directly record.
Obtain the current value of the first point A or second in parallel point in parallel C；Same, in practical operation
Cheng Zhong, the size of electric current I can also be obtained more easily by instruments such as electroprobes.
Owing to the resistance sizes of the first branch road 110 and the second branch road 120 is equal, therefore the first branch road 110
And second the respective circuit of branch road 120 be 2/I.
Therefore below equation is obtained:
Formula is deformed, obtains calculating the formula of the change in resistance amount Δ R of the second resistance 50:
The increased resistance value Δ R of described second resistance 50 is obtained by described voltage difference delta V and current value I；
As it was noted above, close owing to fixing in one between change in resistance value Δ R and the temperature of the second resistance 50
System, therefore, by the increased resistance value of described second resistance 50 and the resistance of the second resistance 50 and temperature
Fixed relationship between degree, it is possible to obtain measure the temperature of loop 100 local environment.
It should be noted that increased resistance value Δ R and temperature that how the present invention to obtaining the second resistance 50
Between fixed relationship do not repeat, because described fixed relationship material with resistance in practical operation is straight
Connect relevant, and can be directly obtained, therefore, at this by modes such as experiment, inquiry available datas
In bright, described fixed relationship is known quantity.
By the first ungrounded end of resistance 60 in the first branch road 110 and the second branch road 120 and the second electricity
Hinder the voltage difference between 50 ungrounded ends, and the current value of the first point A or second in parallel point in parallel C
Obtain the increased resistance value of described second resistance 50, and by the increased resistance value of described second resistance 50
And second resistance 50 resistance and temperature between fixed relationship, it is thus achieved that measure the temperature of loop local environment
Degree.The current value of the first point A or second in parallel point in parallel C and the first ungrounded end of resistance 60 and the
Voltage difference between the two ungrounded ends of resistance 50 is easy to record in practical operation, and due to the second resistance
The change in resistance of 50 is fixed with the relation of temperature, and the temperature obtaining the present invention that so can be more accurate is surveyed
The temperature of amount environment residing for device.Further, this structure itself relies on the rising of temperature and then changes the
The resistance of two resistance 50, and then it is back-calculated to obtain ambient temperature, its resistant to elevated temperatures ability is compared to prior art
More preferably, steady operation stability at high temperature is the highest.
Additionally, the thermometry of the present invention can be, but not limited to use above-mentioned temperature measuring equipment to obtain
Arrive.
Although present disclosure is as above, but the present invention is not limited to this.Any those skilled in the art,
Without departing from the spirit and scope of the present invention, all can make various changes or modifications, therefore the guarantor of the present invention
The scope of protecting should be as the criterion with claim limited range.
Claims (16)
1. a temperature measuring equipment, it is characterised in that including:
Measuring loop, described measurement loop includes:
First branch road and the second branch road, parallel with one another between described first branch road and the second branch road, and have
There are the first point in parallel and the second point in parallel；One of them in parallel with second is put in described first parallel connection
As ground connection parallel connection point ground connection；
Described first branch road and the second branch road all include fixing the first resistance of some resistances and at least one
Second resistance of change in resistance, in a fixed relationship change between resistance and the temperature of described second resistance,
Described second resistance is identical with the resistance of described first resistance when the first temperature；Described first branch road with
And second the resistance of branch road equal；
First branch road includes first resistance being directly connected, described second branch road with described ground connection parallel connection point
Include second resistance being connected with described ground connection parallel connection point；Or, described first branch road includes
One the second resistance being directly connected with described ground connection parallel connection point, described second branch road includes one with described
The first resistance that ground connection parallel connection point is connected；
The first resistance being connected with described ground connection parallel connection point includes the first resistance that point in parallel with ground connection is joined directly together
The first ungrounded end of resistance that earth terminal and point in parallel with ground connection are not joined directly together；In parallel with described ground connection
The second resistance that point is connected includes the second resistance eutral grounding end and and the ground connection that point in parallel with ground connection be joined directly together
The second ungrounded end of resistance that point in parallel is not joined directly together；
Processing unit, for according to the electricity between the described first ungrounded end of resistance and the ungrounded end of the second resistance
Pressure reduction, and the current value of the first point in parallel or the second point in parallel is to obtain the electricity of described second resistance
Resistance changing value, and by the increased resistance value of described second resistance and the resistance of the second resistance and temperature
Between fixed relationship, it is thus achieved that measure the temperature of loop local environment.
2. temperature measuring equipment as claimed in claim 1, it is characterised in that when temperature is higher than described first temperature
When spending, the resistance of described second resistance raises with temperature and increases.
3. temperature measuring equipment as claimed in claim 1, it is characterised in that be provided with in described first branch road
First resistance and one second resistance, be serially connected between described first resistance and the second resistance；
Described second branch road is provided with one first resistance and one second resistance, described first resistance and the second electricity
Resistance series connection.
4. temperature measuring equipment as claimed in claim 1, it is characterised in that the resistance temperature of described second resistance
Degree coefficient is higher than the temperature-coefficient of electrical resistance of described first resistance.
5. temperature measuring equipment as claimed in claim 1, it is characterised in that the resistance temperature of described second resistance
Degree coefficient is 1 × 10-3/ degree Celsius～2 × 10-3/ degree Celsius.
6. temperature measuring equipment as claimed in claim 1, it is characterised in that described first resistance and second
The material of resistance is titanium nitride, and the stress of described first resistance is less than the stress of the second resistance.
7. temperature measuring equipment as claimed in claim 6, it is characterised in that the stress of described second resistance is high
In 10GPa, the stress of described first resistance is less than 0.1GPa.
8. a thermometry, it is characterised in that including:
One measurement loop is provided；
First branch road and the second branch road are set in described measurement loop；
Make between described first branch road and the second branch road parallel with one another to form the first point in parallel and second also
Connection point, and make the described first point in parallel or the second point in parallel as ground connection parallel connection point ground connection；
The first fixing resistance of some resistances and extremely it is respectively provided with in described first branch road and the second branch road
Second resistance of a few change in resistance, in a fixing pass between resistance and the temperature of described second resistance
System's change, described second resistance is identical with the resistance of described first resistance when the first temperature；Make described
The resistance of the first branch road and the second branch road is equal；
One the first resistance being directly connected with described ground connection parallel connection point is set in described first branch road, and in institute
State and the second branch road arranges second resistance being connected with described ground connection parallel connection point；Or, described
One branch road arranges second resistance being directly connected with described ground connection parallel connection point, and at described second
Road arranges first resistance being connected with described ground connection parallel connection point；
The first resistance being connected with described ground connection parallel connection point is made to include the first electricity that point in parallel with ground connection is joined directly together
The first ungrounded end of resistance that resistance earth terminal and point in parallel with ground connection are not joined directly together；And make to connect with described
The second resistance that ground point in parallel is connected include the second resistance eutral grounding end that point in parallel with ground connection be joined directly together and
The second ungrounded end of resistance that point in parallel with ground connection is not joined directly together；
Described measurement loop is positioned over an environment being higher or lower than the first temperature；
Obtain the voltage difference between the described first ungrounded end of resistance and the ungrounded end of the second resistance；
Obtain the first point in parallel or the current value of the second point in parallel；
The increased resistance value of described second resistance is obtained by described voltage difference and current value；
By the fixing pass between increased resistance value and the resistance of the second resistance and the temperature of described second resistance
System, it is thus achieved that measure the temperature of loop local environment.
9. thermometry as claimed in claim 8, it is characterised in that when temperature is higher than described first temperature
When spending, the resistance of described second resistance raises with temperature and increases.
10. thermometry as claimed in claim 8, it is characterised in that the first branch road and second
The step being respectively provided with the first resistance and the second resistance in road includes:
One first resistance and one second resistance is set in described first branch road, and make described first resistance with
And second be serially connected between resistance；
One first resistance and one second resistance is set in described second branch road, and make described first resistance with
Second resistant series.
11. thermometries as claimed in claim 8, it is characterised in that the first branch road and second
The step being respectively provided with the first resistance and the second resistance in road includes: make the resistance of described second resistance
Temperature coefficient is higher than the temperature-coefficient of electrical resistance of described first resistance.
12. thermometries as claimed in claim 11, it is characterised in that the resistance temperature system of the second resistance
Number is 1 × 10-3/ degree Celsius～2 × 10-3/ degree Celsius.
13. thermometries as claimed in claim 8, it is characterised in that the first branch road and second
The step being respectively provided with the first resistance and the second resistance in road includes: use titanium nitride as described the
One resistance and the material of the second resistance, and make stress the answering less than the second resistance of described first resistance
Power.
14. thermometries as claimed in claim 13, it is characterised in that stress is set higher than 10GPa
The second resistance, and stress is less than first resistance of 0.1GPa.
15. thermometries as claimed in claim 8, it is characterised in that the first branch road and second
The step being respectively provided with the first resistance and the second resistance in road includes: use the mode shape of sputtering sedimentation
Become described first resistance and the second resistance.
16. thermometries as claimed in claim 15, it is characterised in that form the step bag of the first resistance
Include: using the target of titanium material, with nitrogen as reacting gas, nitrogen partial pressure is 1.7～1.9Pa
In the range of；Make the environmental stress of sputtering sedimentation in the range of 2.2～2.4Pa, ambient temperature 340～
In the range of 360 degrees Celsius；Make the power of sputtering deposition device in the range of 0.4～0.6Kw, partially
Putting voltage is 0；
The step forming the second resistance includes: use the target of titanium material, with nitrogen as reacting gas, nitrogen
Edema caused by disorder of QI is pressed in the range of 0.3～0.5Pa；Make the environmental stress of sputtering sedimentation 0.4～0.6Pa model
In enclosing, ambient temperature is in the range of 340～360 degrees Celsius；The power making sputtering deposition device exists
In the range of 11～13Kw, bias voltage is 0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510051681.9A CN105987766A (en) | 2015-01-30 | 2015-01-30 | Temperature measurement method and temperature measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510051681.9A CN105987766A (en) | 2015-01-30 | 2015-01-30 | Temperature measurement method and temperature measurement device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105987766A true CN105987766A (en) | 2016-10-05 |
Family
ID=57035681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510051681.9A Pending CN105987766A (en) | 2015-01-30 | 2015-01-30 | Temperature measurement method and temperature measurement device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105987766A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5184520A (en) * | 1989-10-18 | 1993-02-09 | Ishida Scales Mfg. Co., Ltd. | Load sensor |
| CN1411138A (en) * | 2001-10-09 | 2003-04-16 | 富士通株式会社 | Semiconductor device with temp compensating circuit |
| CN1419111A (en) * | 2002-12-17 | 2003-05-21 | 株洲电力机车研究所 | Method for metering special temp. value |
| CN101488658A (en) * | 2008-01-17 | 2009-07-22 | 精工电子有限公司 | Overheat protection circuit |
| CN201672987U (en) * | 2010-05-04 | 2010-12-15 | 李海亮 | Temperature measuring apparatus |
| CN102135438A (en) * | 2011-01-13 | 2011-07-27 | 中国工程物理研究院电子工程研究所 | Temperature control device for micro sensor |
| CN102376404A (en) * | 2010-08-24 | 2012-03-14 | 意法半导体有限公司 | Multi-layer via-less thin film resistor |
-
2015
- 2015-01-30 CN CN201510051681.9A patent/CN105987766A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5184520A (en) * | 1989-10-18 | 1993-02-09 | Ishida Scales Mfg. Co., Ltd. | Load sensor |
| CN1411138A (en) * | 2001-10-09 | 2003-04-16 | 富士通株式会社 | Semiconductor device with temp compensating circuit |
| CN1419111A (en) * | 2002-12-17 | 2003-05-21 | 株洲电力机车研究所 | Method for metering special temp. value |
| CN101488658A (en) * | 2008-01-17 | 2009-07-22 | 精工电子有限公司 | Overheat protection circuit |
| CN201672987U (en) * | 2010-05-04 | 2010-12-15 | 李海亮 | Temperature measuring apparatus |
| CN102376404A (en) * | 2010-08-24 | 2012-03-14 | 意法半导体有限公司 | Multi-layer via-less thin film resistor |
| CN102135438A (en) * | 2011-01-13 | 2011-07-27 | 中国工程物理研究院电子工程研究所 | Temperature control device for micro sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10288693B2 (en) | State of charge estimator and methods of making and using the same | |
| JP6806002B2 (en) | Temperature estimation device | |
| CN111542760B (en) | System and method for correcting current value of shunt resistor | |
| CN106197751A (en) | The thermometry in a kind of temperature field and device | |
| JP3736853B2 (en) | Battery recharger | |
| CN103713013B (en) | Test tubulose material shaft is to the device of coefficient of heat conductivity | |
| US20140373640A1 (en) | Method for determining a three-dimensional stress field of an object, an integrated structure in particular, and corresponding system | |
| CN105987766A (en) | Temperature measurement method and temperature measurement device | |
| JP6834849B2 (en) | Impedance estimator | |
| CN104089717A (en) | Thermopile | |
| CN106352999A (en) | Temperature measuring method and temperature measuring structure | |
| CN106645953A (en) | Lithium battery internal resistance value estimation method | |
| JP2019039761A (en) | Impedance estimating device | |
| CN104931891B (en) | The life-span prediction method and vehicular energy system lifetim appraisal procedure of energy resource system | |
| CN105785102B (en) | Thermoelectrical potential measuring circuit, platform and the method for minute yardstick sample | |
| CN110260997A (en) | A thermal resistance temperature measuring device | |
| Mao et al. | Multipoint temperature measurement using serially connected resistor–capacitor parallel circuits by impedance spectroscopy | |
| CN113390757B (en) | Calibration and measurement method of quartz tuning fork liquid viscosity sensor | |
| CN104914298A (en) | Power measurement device for radio frequency calorimeter | |
| EP3314244B1 (en) | Measuring device for measuring change in dielectric properties in an environment with variable dielectric properties | |
| JP2567441B2 (en) | Measuring method of thermal conductivity, measuring device and thermistor | |
| CN221007723U (en) | Shunt type current sensor | |
| CN114112020B (en) | Determining vibration sensor type | |
| CN205015467U (en) | Direct current resistance case calibrating installation | |
| CN103792409A (en) | Measuring circuit for quickly-changed high currents |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161005 |
|
| RJ01 | Rejection of invention patent application after publication |