CN105957800A - Substrate surface treatment process - Google Patents

Abstract

The invention relates to a surface treatment process of a substrate. The substrate is immersed in a glass detergent and cleaned with deionized water; immersed in an adhesion promotion liquid, ultrasonically treated and then taken out by adding acetone for ultrasonic treatment, and then rinsed with deionized water , and then use nitrogen to dry the substrate; soak it in an organic solvent and store it away from light. The present invention uses the substrate material treated by cleaning, ultrasonic, rinsing, drying, and soaking processes, and can utilize the slow reaction between the organic solvent and the substrate surface to remove surface oil residue to the greatest extent, improve the wettability of the substrate surface, and enhance the subsequent coating of the substrate. Adhesion and uniformity, the method is simple to operate, does not require other processing equipment, can be prepared in air at room temperature, and is compatible with large-scale commercial production preparation processes.

Description

A surface treatment process for a substrate

technical field

The invention relates to the field of surface treatment, in particular to a substrate surface treatment process for improving substrate surface wettability and enhancing substrate coating adhesion and uniformity.

Background technique

In recent years, substrate materials have been widely used in electronic products, semiconductor devices and other fields.

Generally, in order to manufacture solar cells, semiconductor devices and flat panel display devices, it is necessary to form a predetermined thin film layer, thin film circuit pattern or optical group on the surface of the substrate. Hidden thorns that require semiconductor manufacturing processes such as film deposition processes for depositing a thin film of a predetermined material on a substrate, optical processes for selectively exposing a thin film using a photosensitive material, and forming by selectively removing the exposed portion of the film Patterned etching process.

Substrate materials need to be ultrasonically cleaned to remove surface oil before use. Ultrasonic cleaning has the following problems: short-term ultrasonic cleaning cannot remove all oil stains on the substrate, and the wettability of the substrate surface is not significantly improved. If the substrate is not used immediately after ultrasonication, it will cause secondary pollution of the substrate. Therefore, the cleaning effect of the substrate is affected and limit.

Contents of the invention

The purpose of the present invention is to provide a substrate surface treatment that improves the wettability of the substrate surface, enhances the adhesion and uniformity of the substrate coating, and solves the defects that the wettability of the substrate surface is not significantly improved and the adhesion is poor after ultrasonic cleaning of the existing substrate. craft.

In order to achieve the above object, the present invention adopts the following technical solutions:

A surface treatment process for a substrate, comprising the steps of:

a) Cleaning: immerse the substrate in glass detergent, wash it with deionized water after cleaning;

b) Ultrasonic treatment: immerse the substrate obtained in step a) in the adhesion promoting solution, and ultrasonically treat it for 45-60 minutes; then take it out and add acetone for ultrasonic treatment for 15-30 minutes, rinse it with deionized water after taking it out, and then dry the substrate with nitrogen gas ;

c) Preservation by immersion: immerse the substrate obtained in step b) in an organic solvent, and store it away from light. In this technical solution, the oily dirt and other substances on the surface of the substrate are first cleaned with a glass detergent, and then the adhesion and wettability of the substrate surface are improved with an adhesion promoting liquid, so as to subsequently improve the adhesion and uniformity of the substrate coating during the subsequent coating , Prolonged immersion helps the substrate surface to react slowly with organic solvents, completely removes oil residue on the substrate surface and improves the wettability of the substrate surface.

As a preference, the adhesion promoting liquid in step b) consists of the following raw materials in parts by weight: 10-15 parts of hydroxyethyl cellulose, 20-35 parts of methyl orthosilicate, 5-10 parts of seaweed mud, 80 parts of ethyl acetate -100 parts, 15-25 parts of silane coupling agent and 1-5 parts of hydrofluoric acid.

As a preference, the preparation method of the adhesion promoting liquid is as follows: adding hydroxyethyl cellulose, methyl orthosilicate, silane coupling agent and seaweed mud to ethyl acetate, adding hydrofluoric acid after stirring and dissolving, and supersonicating at 60KHz Obtained after 35-50 minutes of treatment.

Preferably, the temperature of the adhesion promoting solution in step b) is 65-80°C.

Preferably, the ultrasonic frequency in step b) is 85-100KHz.

Preferably, the organic solvent in step c) is one of ethanol, isopropanol, acetone, methanol, ethylene glycol ether or propylene glycol methyl ether.

Preferably, the substrate is one of PET, glass, quartz, silicon wafer, ITO conductive glass, FTO conductive glass, and ZnO conductive glass.

Beneficial effects of the present invention: the substrate material treated by cleaning, ultrasonic, rinsing, drying, and soaking processes in the present invention can utilize the slow reaction between the organic solvent and the surface of the substrate to remove surface oil residue to the greatest extent, and improve the wettability of the substrate surface, The method can enhance the adhesion and uniformity of subsequent coating films on the substrate. The method is simple to operate, does not require other processing equipment, can be prepared in air at room temperature, and is compatible with large-area commercial production preparation processes.

detailed description

The following will clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

Example 1

A surface treatment process for a substrate, comprising the steps of:

a) Cleaning: immerse the substrate (ITO conductive glass as the substrate) into the glass detergent, wash it with deionized water after cleaning;

b) Ultrasonic treatment: immerse the substrate obtained in step a) in an adhesion promoting solution with a temperature of 65°C, and treat it at an ultrasonic frequency of 85KHz for 45 minutes; then take it out and add acetone and treat it at an ultrasonic frequency of 85KHz for 15 minutes, rinse it with deionized water after taking it out, and then use Dry the substrate with nitrogen; wherein the adhesion promoting liquid is composed of the following raw materials in parts by weight: 10 parts of hydroxyethyl cellulose, 20 parts of methyl orthosilicate, 5 parts of seaweed mud, 80 parts of ethyl acetate, silane coupling agent 15 parts and 1 part of hydrofluoric acid; the preparation method of the adhesion promoting liquid is: add hydroxyethyl cellulose, methyl orthosilicate, silane coupling agent and seaweed mud to ethyl acetate, stir and dissolve, then add Hydrofluoric acid, obtained after ultrasonic treatment at 60KHz for 35 minutes;

c) Soaking and preservation: Soak the substrate obtained in step b) in ethanol, tighten the sealed bottle cap, and put it in a cool place away from light. Put it aside for more than 24 hours.

Example 2

A surface treatment process for a substrate, comprising the steps of:

a) Cleaning: immerse the substrate (ZnO conductive glass is selected as the substrate) in the glass detergent, and clean it with deionized water after cleaning;

b) Ultrasonic treatment: immerse the substrate obtained in step a) in an adhesion promoting solution with a temperature of 70°C, and treat it at an ultrasonic frequency of 90KHz for 50min; then take it out and add acetone and treat it at an ultrasonic frequency of 90KHz for 20min, rinse it with deionized water after taking it out, and then use Dry the substrate with nitrogen gas; wherein the adhesion promoting liquid is composed of the following raw materials in parts by weight: 12 parts of hydroxyethyl cellulose, 25 parts of methyl orthosilicate, 5 parts of seaweed mud, 95 parts of ethyl acetate, silane coupling agent 20 parts and 3 parts of hydrofluoric acid; the preparation method of the adhesion promoting liquid is: add hydroxyethyl cellulose, methyl orthosilicate, silane coupling agent and seaweed mud to ethyl acetate, stir and dissolve, then add Hydrofluoric acid, obtained after ultrasonic treatment at 60KHz for 40 minutes;

c) Preservation by immersion: Soak the substrate obtained in step b) in propylene glycol methyl ether, tighten the cap of the sealed bottle, and place it in a cool place away from light. Put it aside for more than 24 hours.

Example 3

A surface treatment process for a substrate, comprising the steps of:

a) Cleaning: immerse the substrate (select FTO conductive glass as the substrate) into the glass detergent, wash it with deionized water after cleaning;

b) Ultrasonic treatment: immerse the substrate obtained in step a) in an adhesion promoting solution with a temperature of 80°C, and treat it at an ultrasonic frequency of 100KHz for 60 minutes; then take it out and add acetone and treat it at an ultrasonic frequency of 100KHz for 30 minutes, rinse it with deionized water after taking it out, and then use it Dry the substrate with nitrogen; wherein the adhesion promoting liquid is composed of the following raw materials in parts by weight: 15 parts of hydroxyethyl cellulose, 35 parts of methyl orthosilicate, 10 parts of seaweed mud, 100 parts of ethyl acetate, silane coupling agent 25 parts and 5 parts of hydrofluoric acid; the preparation method of the adhesion promoting liquid is: add hydroxyethyl cellulose, methyl orthosilicate, silane coupling agent and seaweed mud to ethyl acetate, stir and dissolve, then add Hydrofluoric acid, obtained after ultrasonic treatment at 60KHz for 50 minutes;

c) Preservation by immersion: Soak the substrate obtained in step b) in an organic solvent, tighten the cap of the sealed bottle, and store it in a cool place away from light. Put it aside for more than 24 hours.

The embodiment described above is only a preferred solution of the present invention, and does not limit the present invention in any form. There are other variations and modifications on the premise of not exceeding the technical solution described in the claims.

Claims (7)

1. A surface treatment process for a substrate, comprising the following steps: a) Cleaning: immerse the substrate in glass detergent, wash it with deionized water after cleaning; b) Ultrasonic treatment: immerse the substrate obtained in step a) in the adhesion promoting solution, and ultrasonically treat it for 45-60 minutes; then take it out and add acetone for ultrasonic treatment for 15-30 minutes, rinse it with deionized water after taking it out, and then dry the substrate with nitrogen gas ; c) Preservation by immersion: immerse the substrate obtained in step b) in an organic solvent, and store it away from light. 2. the surface treatment process of a kind of substrate according to claim 1, is characterized in that, in the step b), the adhesion promotion liquid is made up of the following raw materials of weight part: 10-15 parts of hydroxyethyl cellulose, orthosilicic acid 20-35 parts of methyl ester, 5-10 parts of seaweed mud, 80-100 parts of ethyl acetate, 15-25 parts of silane coupling agent and 1-5 parts of hydrofluoric acid. 3. the surface treatment process of a kind of substrate according to claim 2, is characterized in that, the preparation method of adhesion promoting liquid is: mix hydroxyethyl cellulose, tetramethyl orthosilicate, silane coupling agent and seaweed mud Add it into ethyl acetate, add hydrofluoric acid after stirring and dissolving, and obtain it after ultrasonic treatment at 60KHz for 35-50min. 4 . The surface treatment process of a substrate according to claim 1 , wherein the temperature of the adhesion promoting liquid in step b) is 65-80° C. 5 . The surface treatment process of a substrate according to claim 1 , wherein the ultrasonic frequency in step b) is 85-100 KHz. 6. the surface treatment process of a kind of substrate according to claim 1, is characterized in that, in step c), organic solvent is a kind of in ethanol, Virahol, acetone, methyl alcohol, ethylene glycol ethyl ether or propylene glycol methyl ether . 7. The surface treatment process of a substrate according to claim 1, wherein the substrate is one of PET, glass, quartz, silicon wafer, ITO conductive glass, FTO conductive glass, and ZnO conductive glass.