CN105909511B

CN105909511B - Pump with disc-shaped cavity

Info

Publication number: CN105909511B
Application number: CN201610235856.6A
Authority: CN
Inventors: 贾丝廷·罗克·巴克兰; 斯图亚特·安德鲁·哈特菲尔德; 詹姆斯·爱德华·麦克龙; 理查德·扬瑟·范·伦斯堡
Original assignee: KCI Medical Resources ULC
Current assignee: KCI Medical Resources ULC
Priority date: 2009-06-03
Filing date: 2009-06-03
Publication date: 2019-07-12
Anticipated expiration: 2029-06-03
Also published as: CN105909511A

Abstract

A kind of pump with disc-shaped cavity is disclosed.The pump further comprises valve, which is used to control the flowing of the fluid by the valve.The valve has the first plate and the second plate with offset apertures, and side wall between the plates is arranged around the circumference of the plate, to form the chamber being in fluid communication with the hole.The valve further comprises thin slice, and thin slice setting can move between first plate and second plate and between first plate and second plate, which simultaneously has the hole for deviating from the hole of a plate and being substantially aligned with substantially with the hole of another plate.The variation that the direction of the pressure difference of the fluid of the valve is crossed in the thin slice response is pushed between two plates.

Description

Pump with disc-shaped cavity

The application be the applying date be on June 3rd, 2009, the entitled pump with disc-shaped cavity, application No. is 200980159668.8 application divisional application.

Technical field

Exemplary embodiment of the present invention relates generally to the pump for fluid, and more specifically, is related to having basic The pump of disc-shaped cavity, which has almost circular end wall and side wall, and is related to the flowing for controlling the fluid by the pump Valve.

Background technique

The generation of high amplitude pressure oscillation has caused enough in the compressor field of thermoacoustic and pump type in closed chamber Pay attention to.The latest developments of nonlinear acoustics allowed generate have than be previously believed that may more high amplitude pressure wave.

The known fluid realized from regulation entrance to outlet using resonance is pumped.This can be used has acoustics at one end The cylindrical cavity of driver is achieved, which drives standing acoustic waves.In this cylindrical cavity, acoustical pressure wave With finite amplitude.Such as taper, pyramid, spherical shape variable cross-section chamber have been used for realize high amplitude pressure oscillation, Thus pumping effect is significantly increased.In this high amplitude wave, the Nonlinear Mechanism with energy loss has been suppressed.However, The sympathetic response of high amplitude has been no longer used in disc-shaped cavity, and wherein radial pressure oscillation is excited recently.It is disclosed as WO International Patent Application PCT/GB2006/001487 of 2006/111775 (' 487 application) discloses the pump with basic disc-shaped cavity, The disc-shaped cavity has high aspect ratio, that is, the ratio of the height of the radius and chamber of chamber.

This pump has substantially cylindrical chamber, which includes the side wall being closed in every one end by end wall.The pump is also Including actuator, which drives any of end wall, along the surface oscillation basically perpendicular to driving end wall.Driving The spatial distribution of the movement of end wall is described as matching with the space wave that intracavitary Fluid pressure vibrates, which is retouched herein State into pattern match.When pump is by pattern match, by actuator act on the function in chamber on fluid more overdrive end wall surface and Actively increase, thus enhance the amplitude of pressure oscillation in chamber and exports high pumping efficiency.It, can in the pump not by pattern match There can be following regions of end wall, wherein acting on the Fluid pressure that the function on fluid reduces rather than enhances cavity fluid by end wall Oscillation.Thus, it is reduced by the useful work that actuator acts on fluid, and pump that become efficiency lower.Pattern match pump Efficiency depends on the interface between driving end wall and side wall.Wish to make it not reduce or inhibit to drive end wall by constructing the interface Any reduction of the movement amplitude that thus mitigates cavity fluid pressure oscillation keep the efficiency of this pump.

This pump also needs the flow valve for controlling the fluid by the pump more specifically can operate in a high frequency Valve.Traditional valve operates a variety of applications typically with the lower frequency less than 500Hz.For example, many traditional compressors Typically with 50 or 60Hz operating.Linear resonance compressor as known in the art is operated 150 between 350Hz.However, packet The many portable electronic devices for including Medical Devices need to transmit normal pressure or provide the pump of vacuum, and the pump size is fairly small, And this pump is noiseless when advantageously operating, to provide discrete operations.In order to realize these targets, this pump must be with very High frequency run, this is required to be greater than the valve of 20kHz and bigger frequency run, this generally cannot get.In order to this A little high-frequency operatings, valve must be responsive to higher-order of oscillation pressure, can be adjusted to produce the net flow of the fluid by the pump.

Summary of the invention

According to one embodiment of present invention, the actuator of said pump cause to drive end wall along basically perpendicular to end wall or It is basically parallel to the oscillating movement (" Displacement Oscillation ") in the direction of the longitudinal axis of cylindrical cavity, hereinafter referred to as intracavitary drive " axial oscillation " of moved end wall.The axial oscillation of end wall is driven, substantially at " pressure oscillation " of ratio, to form diameter in intracavitary generation It is distributed to pressure, which is similar to the pressure point such as the Bessel function of the first kind described in ' 487 applications Cloth, this application are incorporated herein by reference, " radial oscillation " of the hereinafter referred to as intracavitary Fluid pressure of this oscillation.It drives A part between actuator and side wall of moved end wall provides the contact surface with the side wall of pump, reduces the resistance of Displacement Oscillation Buddhist nun, to mitigate any reduction of intracavitary pressure oscillation, the part is hereinafter by referred to as " separator ".The example of separator Property embodiment and drive end wall perimeter portion it is operatively associated, to reduce the damping of Displacement Oscillation.

According to another embodiment of the present invention, pump include: limit chamber have the generally cylindrical in shape pump housing, the chamber by It is formed at both ends by the side wall that substantially round end wall is closed, at least one of described end wall is driving end wall, the driving end Wall has the perimeter portion of central part and the neighbouring side wall, wherein the chamber accommodates fluid when in use.It is described to pump into one Step includes actuator, and the actuator and the central part of the driving end wall are operatively associated, to cause the drive Moved end wall has maximum vibration at the about center of the driving end wall along the oscillating movement in the direction substantially vertical with it Thus width generates the Displacement Oscillation of the driving end wall when in use.The pump further comprises separator, the separator and institute The perimeter portion for stating driving end wall is operatively associated, to reduce the company by the end wall and the side wall of the chamber The damping of Displacement Oscillation caused by connecing.The pump further comprises the at one about center being arranged in the end wall The second hole at one hole, and any other position for being arranged in the pump housing, thus the Displacement Oscillation is in the pump housing The intracavitary radial oscillation for generating Fluid pressure, enable flow through hole flowing.

According to still another embodiment of the invention, the pump includes being arranged in first hole or second hole for controlling The valve that system passes through the flowing of the fluid of the pump.The valve includes: the first plate, first plate have extend generally vertically by this The hole of one plate；And second plate, which also has the hole extended generally vertically through second plate, wherein second plate The hole deviated substantially from the hole of first plate.The valve further comprises setting in first plate and described the Side wall between two plates, wherein the side wall is closed around the circumference of first plate and second plate, described the The chamber being in fluid communication with the hole of first plate and second plate is formed between one plate and second plate.The valve into One step includes that setting can move between first plate and second plate and between first plate and second plate Thin slice, deviated substantially from the hole of first plate and basic with the hole of second plate wherein the thin slice has The hole of alignment.Thin slice response cross the variation in the direction of the pressure difference of the fluid of the valve first plate with it is described It is pushed between second plate.

The other objects, features, and advantages of exemplary embodiment are described herein, and are retouched referring to attached drawing hereafter and in detail Stating will be apparent.

Detailed description of the invention

Figure 1A to Fig. 1 C shows the schematic cross sectional views of first pump of an exemplary embodiment of the present invention, provides just The chart that pressure, the chart for the displacement vibration for driving end wall of pump and the intracavitary Fluid pressure of pump vibrate.

Fig. 2 shows the diagrammatic top top views of the first pump of Figure 1A.

Fig. 3 shows the schematic cross sectional views of second pump of an exemplary embodiment of the present invention, provides negative pressure.

Fig. 4 shows schematically cuing open for the third pump with frustoconical bottom of an exemplary embodiment of the present invention View.

Fig. 5 shows schematically cuing open for the 4th pump including two actuators in accordance with an alternative illustrative embodiment of the present invention View.

Fig. 6 A shows the schematic cross sectional views of the pump of Fig. 3, and Fig. 6 B shows the pressure vibration of fluid in pump as is shown in fig. 1C The chart swung.

Fig. 6 C shows the schematic cross sectional views of the exemplary embodiment using the valve in the pump of Fig. 3.

Fig. 7 A shows the schematic cross sectional views of the exemplary embodiment of valve in the close position, and Fig. 7 B shows the valve of Fig. 7 A The decomposition section of line 7B-7B interception in Fig. 7 D.

Fig. 7 C shows the schematic perspective view of the valve of Fig. 7 B.

Fig. 7 D shows the schematic plan of the valve of Fig. 7 B.

Fig. 8 A shows the schematic cross sectional views in an open position when fluid flows through the valve of the valve in Fig. 7 B.

Fig. 8 B shows the schematic cross sectional views in an open position between closed position when transition of the valve in Fig. 7 B.

Fig. 9 A shows the chart of the oscillation pressure difference on the valve for being applied to Fig. 7 B according to an exemplary embodiment.

Fig. 9 B shows the chart of the operation circulation of the valve of Fig. 7 B between the open position and the closed position.

Figure 10 shows schematically cuing open for a part of the valve of Fig. 7 B in the close position according to an exemplary embodiment View.

Figure 11 A shows the schematic cross sectional views of the improved form of the valve of Fig. 7 B with relief hole.

Figure 11 B shows the schematic cross sectional views of a part of the valve in Figure 11 A.

Figure 12 A shows the schematic cross sectional views of two valves of Fig. 7 B according to an exemplary embodiment, one of valve quilt It is inverted, to allow fluid to flow along the direction opposite with another valve.

Figure 12 B shows the schematic plan of valve shown in Figure 12 A.

Figure 12 C shows the chart of the operation circulation of the valve of Figure 12 A between the open position and the closed position.

Figure 13 shows the schematic cross sectional views of the two-way valve according to an exemplary embodiment, which has permission fluid Two valve portions flowed in the opposite direction, two valve portions all have normally closed position.

Figure 14 shows the schematic plan of the two-way valve of Figure 13.

Figure 15 shows the schematic cross sectional views of the two-way valve according to an exemplary embodiment, which has permission fluid Two valve portions flowed in the opposite direction, one of valve portion have normally closed position, another valve portion has normally open position.

Specific embodiment

Below in the detailed description of some exemplary embodiments, with reference to the attached drawing for forming a part herein, and only It is shown in the accompanying drawings by implementable illustration certain preferred embodiment of the invention.These embodiments are retouched in detail enough It states, so that those skilled in the art can implement the present invention, it should be understood that in the feelings without departing substantially from the spirit or scope of the present invention Under condition, using other embodiments, and logical construction, machinery, electronics and chemical change can be carried out.In order to avoid this field skill Art personnel implement the unnecessary details of embodiment described here institute, the description may omit it is well known by persons skilled in the art certain A little information.Therefore, detailed description below is understood not to restrictive, and the range of exemplary embodiment is only by appended Claim limits.

Figure 1A is the schematic cross sectional views of the pump 10 of an exemplary embodiment of the present invention.Referring again to Figure 1B, pump 10 It include: with the generally cylindrical in shape pump housing, which includes that one end is closed and the other end is closed by end plate 17 by bottom 18 Cylindrical wall 19；And be arranged in end plate 17 and the pump housing cylindrical wall 19 the other end between cyclic annular separator 30.Circle Cylindrical wall 19 and bottom 18 can be include the single component of the pump housing, and other component or system can be mounted to.Cylindrical wall 19, the inner surface of bottom 18, end plate 17 and separator 30 forms chamber 11 in pump 10, and lumen 11 is included in both ends by end wall The side wall 14 of 12 and 13 closures.End wall 13 is the inner surface of bottom 18, and side wall 14 is the inner surface of cylindrical wall 19.End wall 12 wraps Include the central part of the inner surface corresponding to end plate 17 and the perimeter portion of the inner surface corresponding to separator 30.Although chamber 11 exists It is in shape substantially round, but chamber 11 can also be ellipse or other shapes.The bottom 18 of the pump housing and cylindrical wall 19 can be by Any suitable rigid material is formed, which includes but is not limited to metal, ceramics, glass or plastics, the plastic bag It includes but is not limited to injection-moulded plastic.

Pump 10 further includes piezoceramic disk 20, and piezoceramic disk 20 is operatively connectable to end plate 17 to form actuator 40, the actuating Device 40 is operatively associated via end plate 17 and the central part of end wall 12.Piezoceramic disk 20 not necessarily must be by piezoelectric material shape At, but can be formed by the electroactive material of any vibration, such as, such as by electrostriction material or magnetostriction materials shape At.End plate 17 preferably has the bending stiffness similar to piezoceramic disk 20, and can be by such as metal or the electrically inert material of ceramics It is formed.When piezoceramic disk 20 is by current excitation, actuator 40 is expanded and is shunk along radial direction relative to the longitudinal axis of chamber 11, Cause end plate 17 to be bent, thus causes end wall 12 along the axial deflection in the direction basically perpendicular to end wall 12.End plate 17 can replace Generation ground can also be formed by such as such as electroactive material of piezoelectric material, magnetostriction materials or electrostriction material.Another In embodiment, piezoceramic disk 20 can by the equipment replacement with end wall 12 at force-transmitting relation, such as such as by mechanical equipment, magnetic machine or Electrostatic apparatus substitution, wherein end wall 12 can be formed the electrically inert or passive layer of material, and the layer is by this equipment (not shown) Driving is extremely vibrated in the same manner as described above.

Pump 10 further comprises at least two holes that the outside of pump 10 is extended to from chamber 11, wherein at least the in the hole One hole may include valve to control the flowing of the fluid by the hole.Although the hole comprising valve can be located at chamber 11 in it is as follows more The actuator 40 of detailed description generates any position of pressure difference, pump 10 a preferred embodiment include be located approximately at end wall 12, The hole with valve at any of 13 center.Pump 10 shown in Figure 1A and Figure 1B includes primary hole 16, the primary hole 16 The bottom 18 of the pump housing is extended through from chamber 11 at the about center of end wall 13 and includes valve 46.Valve 46 is installed in primary hole 16 It is interior, and allow fluid along the flowing in a direction as shown by arrows to serve as the outlet for pumping 10.Second hole 15 can position In any position in chamber 11 other than the position in the hole 16 with valve 46.In a preferred embodiment of pump 10, second Hole is arranged between the center and side wall 14 of any of end wall 12,13.The implementation of pump 10 shown in Figure 1A and Figure 1B Example includes two secondary apertures 15 that actuator 40 is extended through from chamber 11, the two secondary apertures 15 are arranged on the center of end wall 12 Between side wall 14.Although secondary apertures 15 are not charged with valve in the embodiment of pump 10, but if needing them also provided with valve To improve performance.In the embodiment of pump 10, primary hole 16 is equipped with valve, so that fluid passes through 15 quilt of secondary apertures as shown by arrows It is drawn into the chamber 11 of pump 10, and is pumped into outside chamber 11 by primary hole 16, to provide normal pressure at primary hole 16.

Referring to Fig. 3, the pump 10 of Fig. 1 is shown as the alternative configuration with primary hole 16.More specifically, primary hole Valve 46 ' in 16 ' is squeezed, so that fluid passes through primary hole 16 ' as shown by arrows and is inhaled into chamber 11, and passes through secondary apertures 15 are discharged to outside chamber 11, and suction or Reduced pressure source (source of reduced are thus provided at primary hole 16 ' pressure).Term " decompression " (" reduced pressure ") as used herein is generally referred to as less than 10 positions of pump Ambient pressure.Although term " vacuum " and " negative pressure " can be used for describing depressurizing, actual decompression (pressure It reduction) can be significantly less than decompression usually relevant to absolute vacuum.Pressure is the meaning that " negative " refers to that it is meter pressure, I.e. pressure is reduced below ambient atmospheric pressure.Unless otherwise indicated, the value of pressure mentioned herein is meter pressure.It mentions The increase of decompression typically refers to the reduction of absolute pressure, and the reduction depressurized typically refers to the increase of absolute pressure.

Referring now to Fig. 4, pump 70 in accordance with an alternative illustrative embodiment of the present invention is shown.10 base of pump of pump 70 and Fig. 1 This is similar, in addition to the pump housing includes the bottom 18 ' that there is upper surface to form the end wall 13 ' that shape is frusto-conical.Therefore, chamber 11 Height from the height change from side wall 14 to the more low height at the center of end wall 12,13 ' end wall 12,13 '.End The frusto-conical shape of wall 13 ' strengthens the pressure at the center of the lesser chamber 11 of pressure at the side wall 14 relative to chamber 11 Power, the height of chamber 11 is bigger at the center of chamber 11, smaller in the height of the side-walls chamber 11 of chamber 11.Therefore, compare with phase Deng center pressure amplitude cylindrical cavity 11 and frustoconical cavity 11, it is evident that frustoconical cavity 11 will be far from chamber The position at 11 center substantially has lesser pressure amplitude: the cumulative height of chamber 11 is used to reduce the amplitude of pressure wave.Due to The viscous loss and heat energy loss undergone during the fluid oscillating in chamber 11 increases with the amplitude of this oscillation, passes through Effect of the amplitude to pump 70 of the pressure oscillation at the center far from chamber 11 is reduced using the design of frustoconical cavity 11 Rate is advantageous.In an exemplary embodiment of pump 70, the diameter of chamber 11 is approximation 20mm, and the height of chamber 11 is from side wall Approximate 1.0mm at 14 gradually decreases to the approximate 0.3mm at the center of end wall 13 '.Any of end wall 12,13 or Both end walls 12,13 can have frusto-conical shape.

Referring now to Fig. 5, the pump 60 of another exemplary embodiment is shown according to the present invention.The pump 10 of pump 60 and Fig. 1 is basic It is similar, in addition to including the second actuator 62 for substituting the bottom 18 of the pump housing.Actuator 62 includes the second disk 64 and is arranged in disk 64 Cyclic annular separator 66 between side wall 14.Pump 60 further includes being operatively connectable to disk 64 to form the second of actuator 62 the pressure Electroplax 68.Actuator 62 is operatively associated with end wall 13, and end wall 13 includes the inner surface of disk 64 and the interior table of separator 66 Face.Second actuator 62 also by be similar to actuator 40 as described above relative to end wall 12 in a manner of make end wall 13 generate along The oscillating movement in the direction basically perpendicular to end wall 13.When actuator 40,62 is activated, control circuit (not shown) is provided To coordinate the axial displacement oscillation of actuator.Preferably actuator is out of phase driven with identical frequency and approximation, that is, so that The center of end wall 12,13 is then separated first towards moving each other.

The size of pump described herein should be preferably relative to the relationship between the height (h) of chamber 11 and the radius (r) of chamber Meet a certain inequality, radius (r) is from the longitudinal axis of chamber 11 to the distance of side wall 14.These equations are as follows:

r/h>1.2；And

h²/r>4×10^-10Rice.

In one embodiment of the invention, when the fluid in chamber 11 is gas, the ratio (r/ of chamber radius and chamber height H) between about 10 to about 50.In this example, the volume of chamber 11 is smaller than about 10ml.In addition, ratio h²/ r is preferred About 10^-3Rice arrives about 10^-6In the range of rice, wherein working fluid is the gas opposite with liquid.

In one embodiment of the invention, secondary apertures 15 are located at the ground that the amplitude of the pressure oscillation in chamber 11 is close to zero Side, i.e., at " node " point of pressure oscillation.When chamber 11 is cylindrical, the radial correlation of pressure oscillation can be by first kind shellfish plug Your Function Estimation, and the radial node of the lowest-order pressure oscillation in chamber 11 occur away from end wall 12 center or chamber 11 it is vertical At the distance of axis approximation 0.63r ± 0.2r.Thus, secondary apertures 15 are preferably placed at the radially distance (a) away from end wall 12,13 Place, wherein (a) ≈ 0.63r ± 0.2r, that is, close to the node of pressure oscillation.

In addition, pump disclosed herein should preferably satisfy be related to chamber radius (r) and working frequency (f) with lower inequality, Working frequency (f) is that actuator 40 is vibrated to generate frequency locating for the axial displacement of end wall 12.Inequality is as follows:

It wherein such as can be in the low speed of about 115m/s with the velocity of sound (c) of the working fluid in the chamber 11 that is indicated in upper inequality (c_s) arrive the quick (c for being equal to about 1970m/s_f) in the range of, and k₀For constant (k₀=3.83).The vibration of actuator 40 The frequency of movement is preferably approximately equal to the lowest resonance frequency of the oscillation of the radial pressure in chamber 11, but can be at it within 20%.Chamber The lowest resonance frequency of radial pressure oscillation in 11 is preferably greater than 500Hz.

Referring now to the pump 10 in operating, piezoceramic disk 20 is motivated to expand and shrink along radial direction against end plate 17, This causes actuator 40 to be bent, and thus causes to drive end wall 12 along the direction axial displacement basically perpendicular to driving end wall 12. Actuator 40 is operatively associated with the central point of end wall 12 as described above, so that the axial displacement of actuator 40 is vibrated big About cause the axial displacement oscillation with full swing amplitude on the surface along end wall 12 at the center of end wall 12, that is, anti-wave Save Displacement Oscillation.Referring again to Figure 1A, the Displacement Oscillation of pump 10 and last pressure oscillation are more clear respectively generally as described above It is shown in Chu in Figure 1B and Fig. 1 C.Phase relation between Displacement Oscillation and pressure oscillation is alterable, and specific phase Relationship should not be implied from any figure.

Figure 1B, which is shown, illustrates a possible displacement profile of the axial oscillation of driving end wall 12 of chamber 11.Solid-line curve and arrow The displacement instant in a point of driving end wall 12 is represented, imaginary curve represents displacement of the driving end wall 12 after a half cycle. It is displaced and is exaggerated shown in the figure and other figures.Because actuator 40 is not rigidly mounted in its circumference, but logical The pendency of separator 30 is crossed, thus actuator 40 can surround its mass center free oscillation in its basic vibration mode.In the basic vibration mode In, the amplitude of the Displacement Oscillation of actuator 40 base at the ring-type displacement node 22 between the center and side wall 14 for being located at end wall 12 It originally is zero.Amplitude of the Displacement Oscillation at other points on end wall 12 has the amplitude for being greater than zero as shown in vertical arrows.In Heart displacement antinode 21 is present in the immediate vicinity of actuator 40, and circumferential displacement antinode 21 ' is present in the circumference of actuator 40 Near.

Fig. 1 C, which is shown, illustrates the possible pressure oscillation profile of the pressure oscillation in chamber 11, the axis as shown in Figure 1B It is generated to Displacement Oscillation.Solid-line curve and arrow represent the pressure instant in a point, and imaginary curve represents after a half cycle Pressure.Under the mode and higher order mode, the amplitude of pressure oscillation has the center pressure antinode close to the center of chamber 11 23 and close to chamber 11 side wall 14 circumferential pressure antinode 24.The amplitude of pressure oscillation is in center pressure antinode 23 and circumference It is substantially zeroed at circular pressure node 25 between pressure antinode 24.For cylindrical cavity 11, pressure oscillation in chamber 11 The radial correlation of amplitude can be estimated by Bessel function of the first kind.Above-mentioned pressure oscillation by the fluid in chamber 11 radial motion It generates, and in order to distinguish with the oscillation of the axial displacement of actuator 40 by " the radial pressure vibration of the fluid in referred to as chamber 11 It swings ".

With further reference to Figure 1B and Fig. 1 C, it can be seen that, the radial correlation of the amplitude of the axial displacement oscillation of actuator 40 Property (" vibration shape " of actuator 40) should be approximately Bessel function of the first kind, with closer match the required pressure in chamber 11 vibration The radial correlation (" vibration shape " of pressure oscillation) of the amplitude swung.By the way that actuator 40 is not rigidly attached at its circumference and is permitted Perhaps it more freely surrounds the vibration of its mass center, and the vibration shape of Displacement Oscillation matches the vibration shape of the pressure oscillation in chamber 11 substantially, thus Obtain vibration shape matching, or more simply pattern match.Although pattern match in this regard can not be always absolute, actuating Relevant pressure in the axial displacement oscillation of device 40 and chamber 11 vibrates in the whole surface of actuator 40 with essentially identical Relative phase, the radial position of the circular pressure node 25 of the pressure oscillation in lumen 11 and the axial displacement of actuator 40 The radial position of the ring-type displacement node 22 of oscillation essentially coincides.

Since actuator 40 is vibrated around its mass center, when actuator 40 is in basic vibration mode vibration as shown in Figure 1B, ring The radial position of shape displacement wave 22 will necessarily be fallen in the radius of actuator 40.Thus, in order to ensure ring-type displacement node 22 It is overlapped with circular pressure node 25, the radius (r of actuator_act) it should be preferably greater than the radius of circular pressure node 25, so that mode It matches optimal.Assume again that the pressure oscillation in chamber 11 is approximately Bessel function of the first kind, then the half of circular pressure node 25 Diameter should be approximately the radius from the center of end wall 13 to side wall 14, that is, the 0.63 of the radius (r) of chamber 11 shown in figure 1A Times.Therefore, the radius (r of actuator 40_act) should preferably satisfy with lower inequality: r_act≥0.63r。

Separator 30 can be flexible membrane, enable the edge of actuator 40 by the vibration of responsive actuation device 40 (as schemed In 1B circumferential displacement oscillation 21 ' displacement shown in) bending and stretching and more freely move as described above.By in actuator Lower mechanical impedance is provided between 40 and the cylindrical wall 19 of pump 10 to support thus to reduce the circumferential displacement of actuator 40 and shake The damping of 21 ' axial oscillation is swung, flexible membrane overcomes side wall 14 to the potential damping effect of actuator 40.Substantially, flexible membrane 31 keep the energy for being transmitted to side wall 14 from actuator 40 minimum, which remains substantially stationary.As a result, ring-type displacement node 22 will It is substantially aligned with the holding of circular pressure node 25, to keep the pattern match state of pump 10.Thus, drive the axial position of end wall 12 It moves and vibrates from center pressure antinode 23 shown in Fig. 1 C to the circumferential pressure antinode 24 being located at side wall 14 in chamber 11 Generate pressure oscillation to continuous effective.

Fig. 6 A shows the schematic cross sectional views of the pump of Fig. 3, and Fig. 6 B is the pressure of the fluid in the pump as shown in fig. 1 c The chart of oscillation.Valve 46 ' (and valve 46) allows fluid to flow as described above only along a direction.Valve 46 ' can be non-return Valve or any other valve for allowing fluid to flow only along a direction.The type of some valves can by open position with close Coincidence switches adjusting fluid flowing between setting.For this valve, in order to be operated under the high frequency that actuator 40 generates, 46 He of valve 46 ' must have the response time being exceedingly fast, allow it to be significantly less than pressure oscillation when target markers under play open and close It closes.One embodiment of valve 46 and 46 ' is realized by using extremely light clack valve, clack valve has lower inertia, therefore can ring It answers the variation of the relative pressure on valve arrangement and moves rapidly.

Referring to Fig. 7 A-7D, accoding to exemplary embodiment, this clack valve, valve 110 is shown according to an exemplary embodiment. Valve 110 includes substantially cylindrical wall 112, and cylindrical wall 112 is ring-type, be closed at one end by holding plate 114 and the other end by Sealing plate 116 is closed.The inner surface of the inner surface of wall 112, the inner surface of holding plate 114 and sealing plate 116 is formed in valve 110 Chamber 115.Valve 110 further comprises being arranged between holding plate 114 and sealing plate 116 but adjacent to the substantially round of sealing plate 116 Thin slice 117.Thin slice 117 can be arranged in alternative embodiments adjacent to holding plate 114, as will be hereinafter described in greater detail, In this sense, thin slice 117 is considered as " biasing " and seals against any of plate 116 or holding plate 114.The circle of thin slice 117 Circumferential portion is sandwiched between sealing plate 116 and annular wall 112, so that the movement of thin slice 117 is limited in basically perpendicular to thin slice In the plane on 117 surface.Movement of the thin slice 117 in the plane in alternative embodiments can also be by the direct of thin slice 117 It is attached to the circumferential section of sealing plate 116 or wall 112 or is limited by the thin slice 117 fitted snugly in annular wall 112.It is thin The rest part of piece 117 is sufficiently flexible, and can move along the direction on the surface basically perpendicular to thin slice 117, so as to apply Power to any surface of thin slice 117 will promote thin slice 117 between sealing plate 116 and holding plate 114.

Both holding plate 114 and sealing plate 116 are respectively provided with the hole 118 and 120 for extending through each plate.Thin slice 117 Also there is hole 122, hole 122 and the hole 118 of holding plate 114 are substantially aligned with, to provide such as dotted arrow in Fig. 6 C and Fig. 8 A The access that fluid shown in 124 may flow through.Hole 122 in thin slice 117 can be also partially aligned, that is, in holding plate 114 Hole 118 only partly overlap.Although hole 118,120,122 is shown with almost the same size and shape, Can have different-diameter or even different shape in the case where not limiting the scope of the invention.In one embodiment of the present of invention In, hole 118 and 120 forms alternating pattern on the surfaces of the board, as the solid line of Fig. 7 D is round and circle of dotted line is respectively shown in.At other In embodiment, hole 118,120,122 do not influence valve 110 relative to the hole 118 as shown in single group dotted arrow 124,120, Different pattern can be arranged in the case where the operation of 122 single pair function.The pattern of hole 118,120,122 is designed to The quantity of hole is increased or reduced, the overall flow rate that the fluid of valve 110 is passed through with control as needed.For example, hole 118,120, 122 can be increased, and increase the total flow of valve 110 to reduce the flow resistance of valve 110.

When there is no power to be applied to biasing of any surface of thin slice 117 to overcome thin slice 117, because thin slice 117 is neighbouring Sealing plate 116 is set, wherein the offset of the hole 118 of the hole 122 of thin slice and sealing plate 116 or misalignment, then valve 110 is in " normally closed " position.In " normally closed " position, by the flowing of the fluid of sealing plate 116 as shown in figures 7 a and 7b by thin slice 117 puncherless part stops or covers substantially.When pressure applies against the either side of thin slice 117, which overcomes thin slice 117 biasing simultaneously 114 pushes thin slice 117 towards holding plate far from sealing plate 116 as shown in Fig. 6 C and Fig. 8 A, valve 110 It is moved to " opening " position from normally closed position through (opening time delay (To)) after a period of time, allows fluid along dotted arrow The flowing of direction shown in 124.When pressure changes direction as shown in Figure 8 B, thin slice 117 will be returned by pushing towards sealing plate 116 To normally closed position.When this happens, fluid will flow the shorter time along opposite direction shown in dotted arrow 132 (make delay (Tc)) stops to pass through sealing plate 116 until the hole 120 of the sealing sealing plate 116 of thin slice 117 with basic Fluid flowing, as shown in Figure 7 B.In other embodiments of the invention, thin slice 117 can be biased against holding plate 114, Hole 118,122 is in " normally opened " position alignment.In this embodiment, normal pressure is applied for pushing away thin slice 117 to thin slice 117 It will be necessary for moving and entering " closed " position.Note that about the term " sealing " of valve operation and " stopping as used herein " it is intended to include following situations: basic (but incomplete) sealing or obstruction occurs, so that the flow resistance of valve is in " closed " position It is bigger than in " opening " position.

The operation of valve 110 is the function along the variation in the direction of the differential pressure (△ P) for the fluid for crossing valve 110.In Fig. 7 B In, pressure difference has been assigned to the negative value as shown in downward arrow (- △ P).When pressure difference has negative value (- △ P).Holding plate The Fluid pressure of 114 outer surface is greater than the Fluid pressure of the outer surface of sealing plate 116.The Negative Pressure Difference (- △ P) driving is thin Piece 117 enters fully closed position as described above, and wherein thin slice 117 is urged against sealing plate 116, with baffle seal plate Hole 120 in 116, is thus essentially prevented from the flowing of the fluid by valve 110.When cross valve 110 pressure difference invert become as When positive differential pressure shown in the upward arrow in Fig. 8 A (+△ P), thin slice 117 is by far from sealing plate 116 and towards holding plate 114 are forced into open position.When pressure difference has positive value (+△ P), the Fluid pressure of the outer surface of sealing plate 116 is big In the Fluid pressure of the outer surface of holding plate 114.In open position, the hole of the movement not plug for seal plate 116 of thin slice 117 120, it enables fluid to flow through hole 120 and thin slice 117 and the respective alignment holes 122 and 118 of holding plate 114, As shown in dotted arrow 124.

When the pressure difference for crossing valve 110 changes back to the Negative Pressure Difference as shown in the downward arrow in Fig. 8 B (- △ P), stream Body starts if you need to flow through valve 110 shown in arrow 132 in the opposite direction, this forces thin slice 117 back towards institute in Fig. 7 B The closed position shown.In the fig. 8b, the Fluid pressure between thin slice 117 and sealing plate 116 is less than thin slice 117 and holding plate 114 Between Fluid pressure.Thus, thin slice 117 undergoes the resultant force indicated by arrow 138, this makes thin slice 117 be accelerated towards sealing plate 116 with closure valve 110.In this way, direction (that is, positive or negative) of the pressure difference of variation based on the pressure difference on valve 110 makes valve 110 recycle between closed position and open position.It should be understood that when there is no pressure difference to be applied on valve 110, that is, valve 110 Will thus be in " normally opened " position when, thin slice 117 can be biased against holding plate 114 in open position.

Referring again to Fig. 6 A, valve 110 is arranged in the primary hole 46 ' of pump 10, so that fluid passes through as shown in solid arrow Primary hole 46 ' is inhaled into chamber 11 and is discharged by secondary apertures 15 from chamber 11, thus provides and subtracts at the primary hole 46 ' of pump 10 Potential source.Fluid flowing as shown in the solid arrow indicated upwards through primary hole 46 ' corresponds to the dotted arrow 124 as being also directed toward The fluid of the shown hole 118,120 by valve 110 flows.As it appears from the above, for this embodiment of negative pressure pump, valve 110 Operation is along the function of the variation in the direction of the pressure difference (△ P) of the fluid of the whole surface for the holding plate 114 for crossing valve 110. Pressure difference (△ P) be assumed to be it is almost the same in the whole surface of holding plate 114, this is because the diameter of holding plate 114 is opposite The wavelength of pressure oscillation in chamber 115 is smaller, and because valve 110 be located at close to chamber 115 center primary hole 46 ' (in The amplitude of heart pressure antinode 71 is relative constant) in.Become when the pressure difference for crossing valve 110 inverts as shown in Fig. 6 C and Fig. 8 A Positive differential pressure (+△ P) when, the thin slice 117 of biasing is forced into far from 116 face holding plate 114 of sealing plate to open position. In the position, the hole 120 of the movement not plug for seal plate 116 of thin slice 117, so that fluid is allowed to as shown in dotted arrow 124 Flow through the alignment holes 118 of hole 120 and holding plate 114 and the hole 122 of thin slice 117.When pressure difference changes back to negative pressure When poor (- △ P), fluid starts to flow through valve 110 (see Fig. 8 B) in the opposite direction, this forces thin slice 117 towards closure position Set return (see Fig. 7 B).Thus, as the pressure oscillation in chamber 11 recycles valve 110 between normally closed position and normally open position, Every half cycles of the pump 160 when valve 110 is in an open position provide decompression.

Pressure difference (△ P) be assumed to be it is almost the same in the whole surface of holding plate 114, this is because its as described above it is right Should be in center pressure antinode 71, therefore it is not have the preferable approximation of spatial variations in the pressure on valve 110.Although The time dependence of pressure in practice on valve may be approximately sine curve, in the following analysis, it will be assumed that positive differential pressure (+△ P) pressure difference (△ P) between value and Negative Pressure Difference (- △ P) value can be respectively by the positive pressure period (t of square wave as illustrated in figure 9 a_p+) With negative pressure period (t_p-) on square wave indicate.Since pressure difference (△ P) recycles valve 110 between normally closed position and normally open position, Pump 10 is undergone similarly, as described above in valve 110 and the opening time as shown in figures 9 b and 9 postpones (To) and make delay (Tc) every half cycles in an open position provide decompression.When the pressure difference on valve 110 due to valve 110 be closed (see Fig. 7 A) and It is initially negative and inverts when becoming positive differential pressure (+△ P), the thin slice 117 of biasing is prompted to separate after opening time postpones (To) Sealing plate 116 enters open position towards holding plate 114 (see Fig. 7 B).In the position, the movement not plug for seal of thin slice 117 The hole 120 of plate 116, so that fluid is allowed to flow through pair of hole 120 and holding plate 114 as shown in dotted arrow 124 Thus the hole 122 of quasi- hole 118 and thin slice 117 provides during opening time delay (To) in the primary hole 46 ' of pump 10 outside Reduced pressure source.When the pressure difference on valve 110 becomes Negative Pressure Difference (- △ P) again, fluid start to flow through in the opposite direction valve 110 (see Fig. 7 C), this forces thin slice 117 after make delay (Tc) back towards closed position.Valve 110 half cycles remaining Time or closure period (tc) remain closed.

Holding plate 114 and sealing plate 116 are sufficiently robust, and are vibrated with being subjected to the Fluid pressure that they bear without obvious Mechanically deform.Holding plate 114 and sealing plate 116 can be by any suitable rigid materials in such as glass, silicon, ceramics or metal It is formed.Hole 118,120 in holding plate 114 and sealing plate 116 can be formed by any suitable technique, including chemistry is rotten Erosion, laser processing, machine drilling, gunpowder explosion and punching press.In one embodiment, holding plate 114 and sealing plate 116 are by 100 Micron is formed to 200 microns of thick steel plates, and hole therein 118,120 is formed by chemical attack.Thin slice 117 can be by all As any light material of metal or polymer film is formed.In one embodiment, if valve holding plate side 134 or sealing When plate side 136 is vibrated there are the Fluid pressure of 20kHz or bigger, thin slice 117 can be poly- 1 micron to 20 microns by thickness Object thin slice is closed to be formed.For example, thin slice 117 can be approximately 3 microns of polyethylene terephthalate (PET) or liquid crystal by thickness Polymer film is formed.

In order to obtain thin slice 117 maximum unit area quality amplitude estimation order, a reality according to the present invention Example is applied, assumes again that the pressure oscillation on valve 110 is square wave as illustrated in figure 9 a, and total pressure head reduces on thin slice 117. It is further assumed that thin slice 117 is as mobile in rigid body, when pressure difference is inverted to positive value from negative value, thin slice 117 is far from closed position Acceleration can be expressed as follows:

Wherein, x is the position of thin slice 117,The acceleration of thin slice 117 is represented, P is the amplitude of oscillation pressure ripple, and m is thin The mass area ratio of piece 117.The integral of the expression formula is sought to obtain the distance d that thin slice 117 is advanced in time t, is obtained following:

The expression formula can be used for estimating the opening time delay (To) since pressure reversal point under any circumstance and close It closes time delay (Tc).

In one embodiment of the invention, week of the thin slice 117 in the pressure difference oscillation for being less than the movement of driving thin slice 117 Phase, that is, the period (t of approximate square waves_pres) about a quarter (25%) period in should advance holding plate 114 and sealing plate The distance between 116, valve clearance (v_gap) it is vertical range between two plates.Based on the approximation and above equation, thin slice 117 mass area ratio (m) is obeyed with lower inequality:

Or alternatively

Wherein d_gapFor sheet gaps, that is, valve clearance (v_gap) thickness of thin slice 117 is subtracted, f is that the pressure difference applied vibrates Frequency (as shown in Figure 10).In one embodiment, P can be 15kPa, and f can be 20kHz, and d_gapIt can be 25 microns, table The mass area ratio (m) of bright thin slice 117 should be less than every about square metres 60 grams.According to the mass area ratio (m) of thin slice 117 The thickness of transformation, thin slice 117 is obeyed with lower inequality:

Wherein ρ_flapFor the density of 117 material of thin slice.For polymer using typical density of material (for example, approximate 1400kg/m³), for the operation of valve 110 in the above conditions, the thickness of thin slice 117 is less than about 45 according to this embodiment Micron.Because the near-sinusoidal oscillations pressure waveform on the usually excessively high estimation valve 110 of square wave shown in Fig. 9 A, and into One step because only that a part for the pressure difference being applied on valve 110 will act as the acceleration pressure difference on thin slice 117, thin slice 117 just Starting acceleration will be less than the above estimation, and opening time delay (To) will be actually higher.Therefore, thin slice derived above is thick The upper-bound limit of degree is very high, and in fact, in order to compensate for thin slice 117 reduced acceleration, the thickness of thin slice 117 can quilt Reduce, to meet the inequality of equation 5.Thin slice 117 is thinner, so that it accelerates faster, so that it is guaranteed that opening time postpones (To) it is less than pressure difference period of oscillation (t_pres) about a quarter (25%).

Due to influencing obtainable maximum stream flow and stall pressure, make the pressure that valve 110 and generation are flowed through with air Drop is minimized and is important for maximizing valve performance.Reduce the valve clearance (v between plate_gap) size or plate in The diameter of hole 118,120 had not only made flow resistance maximum but also had increased the pressure drop for passing through valve 110.Another implementation according to the present invention Example, the operation that can be used for improving valve 110 by the following analysis of the flow resistance of valve 110 is estimated using stable state flow equation. Hagan-Pouisille equation can be used to estimate by the pressure drop of the flowing of the hole 118 or 120 in either plate:

Wherein μ is fluid dynamic viscosity, and q is the flow by hole, t_plateFor plate thickness, d_holeFor hole diameter.

When valve 110 is in open position as shown in Figure 7 B, by gap between thin slice 117 and sealing plate 116 (with it is thin Piece gap d_gapIdentical value) the flowing of fluid shortened between the hole 118 in holding plate 114 radially, and it is close leaving The approximately radial gap that diffuses through is reached into first approximation after hole 120 in sealing plate 116.If the hole in two plates 118,120 pattern is square array, and as shown in figs. 7b and 7d in the hole of the hole 118 of holding plate 114 and sealing plate 116 There is seal length s between hole 120, can be estimated by following equation by the pressure drop of the chamber 115 of valve 110:

Thus, overall presure drop (is approximately △ p_gap+2*△p_hole) being capable of variation to the diameter of hole 118,120 and thin slice Sheet gaps d between 117 and sealing plate 116_gapIt is very sensitive.It should be noted that in order to make the opening time of valve 110 postpone (To) Desired smaller sheet gaps d is minimized with make delay (Tc)_gapPressure drop can be significantly increased.According to above equation Formula, by sheet gaps d_gapBeing reduced to 20 microns from 25 microns doubles pressure drop.In many practical embodiments of valve, exactly ring This tradeoff between seasonable between pressure drop determines the best sheet gaps d between thin slice 117 and sealing plate 116_gap.At one In embodiment, best sheet gaps d_gapIt falls in the approximate extents between about 5 microns to about 150 microns.

When setting the diameter of hole 120 of sealing plate 116, being considered as should be during the operation of valve 10 by thin slice 117 The stress of experience is maintained in tolerance limit that (this stress is subtracted by using the small diameter of the hole 120 of sealing plate 116 It is small) and ensure that the overall presure drop by valve 110 will not be dominated by the pressure drop of hole 120.About later regard, above in relation to hole Comparison between the inequality 6 and 7 of gap pressure drop generates minimum diameter for hole 120, and hole pressure drop is in the minimum diameter Approximately equal to valve clearance pressure drop.The calculating sets lower limit to the desired diameter of hole 120, the diameter more than the lower limit When, it is small that hole pressure drop quickly changes to negligibly that youngest.

About the related previous consideration of the stress that undergoes in operation with thin slice 117, Figure 10 is illustrated in normally closed position A part of the valve 110 of Fig. 7 B.In the position, due to the hole 120 in the sealing of thin slice 117 and baffle seal plate 116, cause thin The shape distortion in the opening to extend into hole 120, thin slice 117 meet with stresses piece 117 as shown.It is thin in this configuration Stress level on piece 117 increases the thickness of given thin slice 117 with the diameter of the hole 120 in sealing plate 116.Such as The diameter of fruit hole 120 is excessive, and the material of thin slice 117 will often be more easily broken off, so as to cause the failure of valve 110.In order to subtract A possibility that material fracture of flakelet 117, the diameter of hole 120 can be reduced, and be answered what thin slice 117 was undergone in operation Power limit to lower than thin slice 117 material fatigue stress level.

The estimation of following two equation can be used in the maximum stress that the material of thin slice 117 is undergone in operation:

Wherein r_holeFor the radius of the hole 120 in sealing plate 116, t is the thickness of thin slice 117, and y is thin slice 117 in hole Amount of deflection at the center in hole 120, △ p_maxThe maximum differential pressure that thin slice 117 is undergone when to seal, E are the Young of the material of thin slice 117 Modulus and K₁To K₄For depending on the boundary condition details of thin slice 117 and the constant of Poisson's ratio.For given thin slice 117 The geometry of material and hole 120, equation 8 can solve deformation y, and be then used in equation 9 and calculate stress. For y < < t value, the cube item and quadratic term of the y/t in equation 8 and 9 becomes smaller respectively, and the letter of these equations Listization is theoretical to match lesser plate deflection.Simplify these equations generate it is square directly proportional to the radius of hole 120 and with Square maximum stress being inversely proportional of the thickness of thin slice 117.For y > > t value or for the thin slice of not bending stiffness, two The cube item and quadratic term of y/t in equation becomes apparent, so that the 2/3 of the radius of maximum stress and hole 120 2/3 directly proportional and with the thickness of thin slice 117 power of power is inversely proportional.

In one embodiment of the invention, thin slice 117 is formed by thin polymeric sheet, such as poly- with 0.38 Poisson's ratio Ester film, and sealing plate 116 is clamped in the edge of hole 120.Constant K₁To K₄Can be estimated as 6.23 respectively, 3.04, 4.68 with 1.73.Using these values in equation 8 and 9, and assume thin slice 117 with a thickness of about 3 microns, in 500mbar There is the Young's modulus of 4.3GPa under pressure difference, the amount of deflection of thin slice 117 is approximately 1 μm for the hole radius of 0.06mm, for The hole radius of 0.1mm will be about 4 μm, and will be about 8 μm for the hole radius of 0.15mm.Under the conditions of these most Big stress will be respectively 16,34 and 43MPa.In view of be applied to during the operation of valve 110 thin slice 117 Cyclic Stress compared with The maximum stress of high quantity, every circulation that thin slice 117 is endured should be significantly lower than the yield stress of the material of thin slice 117, to subtract A possibility that flakelet 117 is by fatigue fracture, especially in the pit portion of thin slice 117 extended in hole 120.It is based on For the fatigue data of a large amount of circulation establishments, it has been determined that, the actual yield stress of the material of thin slice 117 should be thinner than being applied to Greatly at least about four times of stress (for example, as above calculate 16,34 and 43MPa) on the material of piece 117.Thus, thin slice 117 Material should have the up to yield stress of 150MPa, so that for 200 microns of maximum hole diameter approximate in the case A possibility that this fracture, is minimum.

The diameter of reduction hole 120 may be desired in this regard, since this further decreases answering for thin slice 117 Power, and valve flow resistance is had not significant impact, until the diameter of hole 120 approaches and sheet gaps d_gapIdentical size. Further, the reduction of the diameter of hole 120 allows the unit area on the surface of valve 110 to include increasing for given seal length The hole 120 of amount.However, the size of the diameter of hole 120 can be at least partly being limited by way of manufacturing the plate of valve 110 System.For example, the diameter of hole 120 is constrained to be approximately greater than the thickness of plate by chemical attack, to realize acceptable and controllable Corrosion results.In one embodiment, the hole 120 in sealing plate 116 is diametrically at about 20 microns to about 500 microns Between.In another embodiment, holding plate 114 and sealing plate 116 are formed by about 100 microns of thick steel plates, and hole 118,120 be diametrically about 150 microns.In this embodiment, valve thin slice 117 is by polyethylene terephthalate (PET) formation and about 3 microns of thickness.Valve clearance (v between sealing plate 116 and holding plate 114_gap) it is 25 microns.

Figure 11 A and Figure 11 B illustrate the another embodiment of valve 110, valve 310 comprising the hole 118 in holding plate 114 Between extend through the release hole 318 of holding plate 114.Hole 322 is discharged convenient for thin when the pressure difference on valve 310 changes direction Acceleration of the piece 117 far from holding plate 114, thus further decreases the response time of valve 310, that is, reduces make delay (Tc).Change signal with pressure difference and countercurrently starts (as shown in dotted arrow 332), fluid between thin slice 117 and sealing plate 112 Pressure reduction, thus thin slice 117 is moved towards sealing plate 116 far from holding plate 114.Release hole 318 make thin slice 117 with guarantor It is leaked cruelly in the pressure difference for closure valve 310 outer surface for holding the contact of plate 114.Moreover, release hole 318 reduces fluid in holding plate 114 had to pass through between thin slice 117 at a distance from 360, thus as shown in Figure 11 B from holding plate 114 discharge thin slice 117.Release Hole 318 can have different-diameter compared with other holes 118,120 in valve plate.In Figure 11 A and 11B, holding plate 114 is used In the movement of limitation thin slice 117, and in open position support slice 117, while there is reduction with the surface of thin slice 117 317 Contact surface area.

Figure 12 A and Figure 12 B show two valves 110 as shown in Figure 7 A, and one of valve 410 is oriented to the valve with Fig. 7 A 110 identical positions, and another valve 420 is squeezed or reversely, has the holding plate 114 being located on downside and on upside Sealing plate 116.Valve 410,420 has such as about Fig. 7 A-7C and 8A-8B aforesaid operations along the dotted arrow for valve 410 412 and for opposite direction shown in 420 dotted arrow 422 of valve air-flow, one of valve be used as intake valve, another be used as row Air valve.Figure 12 C show valve 410,420 open position and the motion cycle of closed position diameter chart, by a dotted line (see Fig. 9 A and 9B) shown in pressure difference (△ P) square wave circulation modulated.Chart is shown for each of valve 410,420 from closing Coincidence sets half cycles when opening.When the pressure difference on valve 410 is initially negative and reversely becomes positive differential pressure (+△ P), valve 410 It opens and is shown by chart 414 as described above, wherein fluid is flowed along direction shown in arrow 412.However, when on valve 420 Pressure difference when being initially positive and reversely becoming Negative Pressure Difference (- △ P), valve 420 is opened simultaneously shown by chart 424 as described above, wherein Fluid is flowed along opposite direction shown in arrow 422.As a result, the combination of valve 410,420 is used as the circulation of response pressure difference (△ P) The two-way valve for allowing fluid in two directions to flow.Valve 410,420 can be easily mounted side by side on the primary hole of pump 10 In 46 ', to provide half cycles along direction shown in the solid arrow in primary hole 46 ' as shown in Figure 6A and then opposite half A fluid flowing for recycling (not shown) in the opposite direction.

Figure 13 and 14 shows the another embodiment of the valve 410,420 of Figure 12 A, wherein corresponding respectively to the two of valve 410,420 A valve 510,520 is formed in single structure 505.Substantially, although other constructions are also possible, two valves 510,520 are total It enjoys common wall or segmentation barrier 540, barrier 540 is formed as a part of wall 112 in the case.At the beginning of the pressure difference on valve 510 When beginning is negative and reversely becomes positive differential pressure (+△ P), valve 510 is opened from its normally closed position, wherein flowing along shown in arrow 512 Direction flowing.However, valve 520 is normally closed from its when the pressure difference on valve 520 is initially positive and reversely becomes Negative Pressure Difference (- △ P) Position is opened, and is flowed wherein flowing along opposite direction shown in arrow 522.As a result, the combination of valve 510,520 is used as response pressure The two-way valve that the circulation of poor (△ P) allows fluid in two directions to flow.

Figure 15 shows the another embodiment of two-way valve 555, has the structure similar with the two-way valve 505 of Figure 14.It is two-way Valve 551 is also formed in single structure, is had the common wall of shared a part for being again formed as wall 112 or is divided barrier 560 Two valves 510,530.Valve 510 is with opposite way as described above operating, wherein the shown thin slice 117 in normally closed position is also such as The upper blocking hole 20.However, two-way valve 550 has single thin slice 117, there is the first slice part being located in valve 510 Divide 117a and the second sheet segment 117b in valve 530.Second sheet segment 117b is biased against plate 516 and including hole Hole 522 is different from above-mentioned valve, and hole 522 is aligned with the hole 120 of plate 516, rather than with the hole of plate 514 118.Substantially, Valve 130 is in the sheet segment 117b for distinguishing with the normally closed position of above-mentioned another valve and being in normally open position and biases.Thus, valve 510,530 combination is used as the circulation permission that pressure difference (△ P) is responded in the case where the opening and closing alternate cycles of two valves The two-way valve of fluid flowing in two directions.

It is answered according to above-mentioned it is evident that having been provided for the invention with obvious advantage.However, the present invention only passes through a small number of shapes Formula is shown, and is not to be limited just, but may be allowed variations and modifications in the case where without departing from its scope.

Claims

1. a kind of clack valve, in the valve port for being arranged in the end wall of pump chamber, which includes:

Sealing plate, the sealing plate have the seal plate bore for extending vertically through the sealing plate；

Holding plate, which, which has, extends vertically through the holding plate hole of the holding plate, and the holding plate hole is from described close The offset of sealing plate hole, the holding plate, which has, extends vertically through the holding plate and the releasing between the holding plate hole that be spaced Discharge hole；

Cylindrical wall, the cylindrical wall are arranged between the sealing plate and the holding plate to form chamber；And

Thin slice, the thin slice are arranged between the sealing plate and the holding plate, and the thin slice has from the seal plate bore The sheet hole for deviating and being aligned with the holding plate hole；

The thin slice responds the variation in the direction of the pressure difference of the fluid of the flap valve external in the sealing plate and the holding plate Between can move,

Wherein:

The thin slice is arranged to when the pressure difference is zero in neighbouring any of the sealing plate and the holding plate First position,

The thin slice can be moved to when applying pressure difference another in the sealing plate and the holding plate at the second position,

The variation that the thin slice responds the direction of the pressure difference of the fluid of the flap valve external is pushed from the first position To the second position,

The reversion that the thin slice responds the direction of the pressure difference of the fluid is pushed to the first position from the second position, And

Wherein the relief hole is deviated from the sheet hole of the thin slice in the second position.

2. clack valve according to claim 1, wherein the thin slice is arranged on the normally open position of the neighbouring holding plate, from And when the thin slice is in the first position, the fluid flows through the clack valve, when the thin slice is in described the When two positions, the flowing of the fluid is stopped by the clack valve.

3. clack valve according to claim 1, wherein the thin slice is arranged on the normally closed position of the neighbouring sealing plate, from And when the thin slice is in the first position, the flowing of the fluid is stopped by the clack valve, when the thin slice is in institute When stating the second position, the fluid flows through the clack valve.

4. clack valve according to claim 1, wherein the sealing plate and the holding plate are by selecting free metal, plastics, silicon It is formed with one of the group of glass composition rigid material.

5. clack valve according to claim 4, wherein the metal is with the thickness between 100 microns to 200 microns Steel.

6. clack valve according to claim 1, the thin slice and any of the sealing plate and the holding plate are divided Leave the distance between 5 microns to 150 microns.

7. clack valve according to claim 6, wherein the thin slice has 3 microns of thickness, and the thin slice with it is described The distance between any of sealing plate and the holding plate are between 15 microns to 50 microns.

8. clack valve according to claim 1, wherein the thin slice by select free polymer and metal to form group in one Kind light material is formed.

9. clack valve according to claim 8, wherein the light material is the polymer with the thickness less than 20 microns.

10. clack valve according to claim 8, wherein the polymer is the poly terephthalic acid of the thickness with 3 microns Glycol ester.

11. clack valve according to claim 8, wherein the polymer is the liquid crystal film of the thickness with 3 microns.

12. clack valve according to claim 1, wherein the diameter of each seal plate bore is less than 500 microns.

13. clack valve according to claim 1, wherein the thin slice is formed by the polymer with 3 micron thickness, and every The diameter of a seal plate bore is less than 150 microns.

14. clack valve according to claim 1, wherein the sealing plate and the holding plate are by the thickness with 100 microns Steel formed, and wherein, the seal plate bore, it is described keep plate hole and the diameter of the sheet hole is 150 microns, and institute Thin slice is stated to be formed by the polymer film with 3 micron thickness.

15. clack valve according to claim 1, wherein the variation in the direction of the pressure difference is with the hunting of frequency greater than 20kHz.

16. clack valve according to claim 15, wherein the thin slice has the time cycle for being less than pressure difference oscillation 25 percent response time delay.

17. clack valve according to claim 1, wherein the sealing plate is the first sealing plate, the holding plate is the first guarantor Hold plate, the cylindrical wall is the first cylindrical wall, and the thin slice is the first thin slice, and first sealing plate, described One holding plate, first cylindrical wall and first thin slice constitute the first valve portion, and the clack valve further comprises Second valve portion, second valve portion include:

Second sealing plate, second sealing plate have the second seal plate bore for extending vertically through second sealing plate；

Second holding plate, which has extend vertically through second holding plate second to keep plate hole, described Second holding plate hole is deviated from second seal plate bore；

Second cylindrical wall, second cylindrical wall are arranged between second sealing plate and second holding plate with shape At the second chamber；And

Second thin slice, second thin slice are arranged between second sealing plate and second holding plate, and described second is thin Piece has the second sheet hole for deviating from second seal plate bore and being aligned with the second holding plate hole；

The thin slice respond the variation in the direction of the pressure difference of the fluid outside second valve portion second sealing plate with It can be moved between second holding plate；And

Wherein first valve portion and second valve portion are directed relative to the pressure difference, to allow described in fluidic response The variation of the pressure difference of the fluid of flap valve external flows through the clack valve in both directions.

18. clack valve according to claim 17, in which:

First thin slice is arranged to keep when the pressure difference is zero in neighbouring first sealing plate and described first The first position of any of plate；

First thin slice can be moved to another in first sealing plate and first holding plate when applying pressure difference The second position at place；

First thin slice responds the variation in the direction of the pressure difference of the fluid outside first valve portion from described first Position is pushed to the second position；And

The reversion that first thin slice responds the direction of the pressure difference of the fluid is pushed to described first from the second position Position；

Second thin slice is arranged to keep when the pressure difference is zero in neighbouring second sealing plate and described second The first position of any of plate；

Second thin slice can be moved to another in second sealing plate and second holding plate when applying pressure difference The second position at place；

Second thin slice responds the variation in the direction of the pressure difference of the fluid outside second valve portion from described first Position is pushed to the second position；And

The reversion that second thin slice responds the direction of the pressure difference of the fluid is pushed to described first from the second position Position.

19. clack valve according to claim 18, in which:

First valve portion and second valve portion orient in the opposite direction about the pressure difference；And

First thin slice of first valve portion is arranged on the normally open position of neighbouring first holding plate；

Second thin slice of second valve portion is arranged on the normally open position of neighbouring second holding plate；

When first thin slice is in the first position, the fluid flows through first valve portion and described second Valve portion, when first thin slice and second thin slice are in the second position, the flowing of the fluid is by described One valve portion and second valve portion stop.

20. clack valve according to claim 19, in which:

First valve portion and second valve portion orient in the opposite direction about the pressure difference；

First thin slice of first valve portion is arranged on the normally closed position of neighbouring first sealing plate；

Second thin slice of second valve portion is arranged on the normally closed position of neighbouring second sealing plate；

So that the flowing of the fluid is described when first thin slice and second thin slice are in the first position First valve portion and second valve portion stop, when first thin slice and second thin slice are in the second position When, the fluid flows through first valve portion and second valve portion.

21. clack valve according to claim 19, in which:

First valve portion and second valve portion are oriented about the pressure difference along the same direction；

First thin slice of first valve portion is arranged on the normally closed position of neighbouring first sealing plate, to work as institute When stating the first thin slice and being in the first position, the flowing of the fluid is stopped by first valve portion, when described first thin When piece is in the second position, the fluid flows through first valve portion；Also,

Second thin slice of second valve portion is arranged on the normally open position of neighbouring second holding plate, to work as institute When stating the second thin slice and being in the first position, the fluid flows through second valve portion, at second thin slice When the second position, the flowing of the fluid is stopped by second valve portion.