CN105590874A - Operating method of micro force output mechanism for wedge bonding of lead wire - Google Patents
Operating method of micro force output mechanism for wedge bonding of lead wire Download PDFInfo
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- CN105590874A CN105590874A CN201510950553.8A CN201510950553A CN105590874A CN 105590874 A CN105590874 A CN 105590874A CN 201510950553 A CN201510950553 A CN 201510950553A CN 105590874 A CN105590874 A CN 105590874A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78313—Wedge
- H01L2224/78321—Material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78343—Means for applying energy, e.g. heating means by means of pressure by ultrasonic vibrations
- H01L2224/78347—Piezoelectric transducers
- H01L2224/78349—Piezoelectric transducers in the upper part of the bonding apparatus, e.g. in the capillary or wedge
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Abstract
本发明公开了一种引线楔焊微小力输出机构的工作方法，解决了在引线楔焊中存在的微小力输出稳定性差和控制调节难的问题。包括微小力执行机构安装板（1）、音圈电机、工业控制机和引线键合超声换能器，在引线键合超声换能器的右端设置有压电陶瓷（10），在引线键合超声换能器的左端连接有劈刀（11），音圈电机定子（6）是倒置地固定吊接在微小力执行机构安装板（1）的下端面上的，弹性变形矩形块（2）连接在微小力执行机构安装板与换能器安装套（9）之间，音圈电机动子（7）的顶端面与换能器安装套的顶端面顶接，压电陶瓷、音圈电机和位置传感器（8）分别与工业控制机电连接在一起。本发明在整个压力行程内，压力控制稳定可靠，重复性好。
The invention discloses a working method of a small force output mechanism for lead wedge welding, which solves the problems of poor stability of small force output and difficult control and adjustment in lead wedge welding. Including micro-force actuator mounting plate (1), voice coil motor, industrial control machine and wire-bonded ultrasonic transducer, piezoelectric ceramics (10) are arranged on the right end of the wire-bonded ultrasonic transducer, and the wire-bonded The left end of the ultrasonic transducer is connected with a chopper (11), the stator of the voice coil motor (6) is fixed upside down and connected to the lower end surface of the micro force actuator mounting plate (1), and the elastically deformed rectangular block (2) Connected between the micro-force actuator mounting plate and the transducer mounting sleeve (9), the top surface of the voice coil motor mover (7) is connected to the top surface of the transducer mounting sleeve, piezoelectric ceramics, voice coil motor and the position sensor (8) are respectively connected with the industrial control electromechanical. The present invention has stable and reliable pressure control and good repeatability in the entire pressure stroke.
Description
技术领域 technical field
本发明涉及一种微小力输出的音圈压力输出机构，特别涉及一种针对全自动引线键合设备的基于音圈电机的微小力输出机构的工作方法。 The invention relates to a voice coil pressure output mechanism with micro-force output, in particular to a working method of the micro-force output mechanism based on a voice coil motor for automatic wire bonding equipment.
背景技术 Background technique
全自动引线楔焊键合机是利用加压、加热、超声的方式，用金丝作为互连介质，完成芯片与基板之间的引线键合的，以实现其电气互连的功能。在引线键合过程中，键合微小力的精确控制和输出是获得良好键合效果的重要保证，压力偏大可能会造成芯片损伤，压力偏小会使焊点强度达不到要求。目前，引线键合工艺大多是手动设备，采用的是气缸和弹簧配合的双力调节机制做为微小力输出执行机构，气缸压力调节容易滞后，难以满足高速引线键合工艺，普通弹簧加压方式存在输出压力稳定性差且不易控制和调节的缺陷，使微小力的控制和输出精度受限。 The fully automatic wire wedge bonding machine uses pressure, heating, and ultrasonic methods, using gold wire as the interconnection medium, to complete the wire bonding between the chip and the substrate, so as to realize its electrical interconnection function. In the process of wire bonding, the precise control and output of the small bonding force is an important guarantee for obtaining a good bonding effect. If the pressure is too high, it may cause damage to the chip, and if the pressure is too small, the strength of the solder joint will not meet the requirements. At present, the wire bonding process is mostly manual equipment, using a dual-force adjustment mechanism with a cylinder and a spring as a small force output actuator. The pressure adjustment of the cylinder is easy to lag behind, and it is difficult to meet the high-speed wire bonding process. The common spring pressure method It has the defects of poor output pressure stability and difficult control and adjustment, which limits the control and output accuracy of micro force.
发明内容 Contents of the invention
本发明提供了一种引线楔焊微小力输出机构的工作方法，解决了在引线楔焊中存在的微小力输出稳定性差和控制调节难的技术问题。 The invention provides a working method of a small force output mechanism for wire wedge welding, which solves the technical problems of poor stability of small force output and difficult control and adjustment existing in the wire wedge welding.
本发明是通过以下技术方案解决以上技术问题的： The present invention solves the above technical problems through the following technical solutions:
一种引线楔焊微小力输出机构，包括微小力执行机构安装板、音圈电机、工业控制机和引线键合超声换能器，在引线键合超声换能器的右端设置有压电陶瓷，在引线键合超声换能器的左端连接有劈刀，在弹性变形矩形块上设置有上下垂直方向上的音圈电机通过孔，在弹性变形矩形块的左端设置有左螺纹孔，在弹性变形矩形块的右端设置有右螺纹孔，音圈电机定子是倒置地固定吊接在微小力执行机构安装板的下端面上的，左连接螺栓通过弹性变形矩形块的左端设置的左螺纹孔将弹性变形矩形块的左端与微小力执行机构安装板连接在一起，弹性变形矩形块的右端通过右螺纹孔中的右连接螺栓与换能器安装套固定连接在一起，在换能器安装套中设置有引线键合超声换能器，在弹性变形矩形块上设置的音圈电机通过孔中设置有音圈电机定子，音圈电机动子的顶端面与换能器安装套的顶端面顶接在一起，在换能器安装套的右端设置有位置测量龙门架，位置测量龙门架是通过龙门架连接螺栓与换能器安装套固定连接在一起的，在位置测量龙门架的顶梁下方的微小力执行机构安装板上设置有位置传感器，压电陶瓷、音圈电机和位置传感器分别与工业控制机电连接在一起。 A wire wedge welding micro-force output mechanism, including a micro-force actuator mounting plate, a voice coil motor, an industrial control machine and a wire-bonded ultrasonic transducer, and a piezoelectric ceramic is arranged at the right end of the wire-bonded ultrasonic transducer, A chopper is connected to the left end of the wire-bonded ultrasonic transducer, a voice coil motor passing hole in the vertical direction is arranged on the elastically deformed rectangular block, and a left threaded hole is arranged on the left end of the elastically deformed rectangular block. The right end of the rectangular block is provided with a right threaded hole, the stator of the voice coil motor is fixed upside down and connected to the lower end surface of the mounting plate of the micro force actuator, and the left connecting bolt is elastically deformed through the left threaded hole provided at the left end of the rectangular block. The left end of the deformed rectangular block is connected with the mounting plate of the micro-force actuator, and the right end of the elastically deformed rectangular block is fixedly connected with the transducer mounting sleeve through the right connecting bolt in the right threaded hole, and is set in the transducer mounting sleeve. There is a wire-bonded ultrasonic transducer, and a voice coil motor stator is arranged in the passage hole of the voice coil motor arranged on the elastically deformable rectangular block, and the top surface of the voice coil motor mover is connected to the top surface of the transducer mounting sleeve. At the same time, there is a position measuring gantry at the right end of the transducer mounting sleeve. The position measuring gantry is fixedly connected with the transducer mounting sleeve through the gantry connecting bolts. A position sensor is arranged on the mounting plate of the force actuator, and the piezoelectric ceramics, the voice coil motor and the position sensor are respectively connected with the industrial control electromechanics.
在由铍青铜材料制成的弹性变形矩形块中设置有前后水平方向上的工字型凹槽通孔。 The elastically deformed rectangular block made of beryllium bronze is provided with I-shaped groove through holes in the front and rear horizontal directions.
一种引线楔焊微小力输出机构的工作方法，包括以下步骤： A working method of a wire wedge welding micro-force output mechanism, comprising the following steps:
第一步、在由铍青铜材料制成的弹性变形矩形块中设置水平方向的工字型凹槽通孔，在弹性变形矩形块上设置沿上下垂直方向的音圈电机通过孔，在弹性变形矩形块的左端设置左螺纹孔，在弹性变形矩形块的右端设置右螺纹孔，音圈电机定子倒置固定吊接在微小力执行机构安装板的下端面上，左连接螺栓通过弹性变形矩形块的左端设置的左螺纹孔将弹性变形矩形块的左端与微小力执行机构安装板的下端面连接，弹性变形矩形块的右端通过右螺纹孔中的螺栓与换能器安装套固定连接，在换能器安装套中设置有引线键合超声换能器，在弹性变形矩形块上设置的沿上下垂直方向的音圈电机通过孔中设置有音圈电机定子，音圈电机动子的顶端面与换能器安装套的顶端面顶接在一起，在换能器安装套的右侧设置有位置测量龙门架，位置测量龙门架是通过龙门架连接螺栓与换能器安装套固定连接在一起，在位置测量龙门架的顶梁下方的微小力执行机构安装板上设置有位置传感器，压电陶瓷、音圈电机和位置传感器分别与工控机电连接； The first step is to set a horizontal I-shaped groove through hole in the elastically deformed rectangular block made of beryllium bronze, and set a voice coil motor through hole in the vertical direction on the elastically deformed rectangular block. A left threaded hole is set at the left end of the rectangular block, and a right threaded hole is set at the right end of the elastically deformed rectangular block. The left threaded hole set at the left end connects the left end of the elastically deformed rectangular block with the lower end surface of the micro force actuator mounting plate, and the right end of the elastically deformed rectangular block is fixedly connected with the transducer mounting sleeve through the bolt in the right threaded hole. A wire-bonded ultrasonic transducer is arranged in the device mounting sleeve, and a voice coil motor stator is arranged in a voice coil motor passing hole along the vertical direction on the elastically deformable rectangular block, and the top surface of the voice coil motor mover is in contact with the transducer. The top surface of the transducer mounting sleeve is connected together, and a position measuring gantry is set on the right side of the transducer mounting sleeve. The position measuring gantry is fixedly connected with the transducer mounting sleeve through the gantry connecting bolts. The position sensor is installed on the micro force actuator mounting plate under the top beam of the position measurement gantry, and the piezoelectric ceramics, voice coil motor and position sensor are respectively connected to the industrial control electromechanical;
第二步、工控机向音圈电机发出启动指令，音圈电机动子向下伸出，带动换能器安装套向下运动，动换能器安装套带动弹性变形矩形块的右端向下运动，使弹性变形矩形块中的工字型槽产生变形，弹性变形矩形块对换能器安装套产生一个向上的牵引力，与换能器安装套受到音圈电机动子向下的压力达到平衡，实现了微小力的精确稳定输出； In the second step, the industrial computer sends a starting command to the voice coil motor, and the mover of the voice coil motor extends downward, driving the transducer mounting sleeve to move downward, and the moving transducer mounting sleeve drives the right end of the elastically deformed rectangular block to move downward, The I-shaped groove in the elastically deformed rectangular block is deformed, and the elastically deformed rectangular block generates an upward traction force on the transducer mounting sleeve, which is balanced with the downward pressure of the transducer mounting sleeve by the voice coil motor mover, realizing Accurate and stable output of small force;
第三步、在换能器安装套向下运动同时，位置传感器测得位置测量龙门架的向下位移量并传送给工控机，若该位移量超过预先设定的阈值，则工控机发出报警信号。 Step 3: While the transducer mounting sleeve moves downward, the position sensor measures the downward displacement of the position measuring gantry and transmits it to the industrial computer. If the displacement exceeds the preset threshold, the industrial computer sends out an alarm. Signal.
本发明使用铍青铜材料的弹性变形矩形块即板簧，提高了劈刀的弹性性能和稳定性，采用的具有无限分辨率的音圈电机使引线楔焊微小力输出范围控制在5-150克力，压力控制分辨率±3克力，并且在整个压力行程内，压力控制稳定可靠，重复性好。 The invention uses the elastically deformed rectangular block of beryllium bronze material, that is, the leaf spring, which improves the elastic performance and stability of the riving knife, and adopts a voice coil motor with infinite resolution to control the small force output range of lead wedge welding within 5-150 grams Force, pressure control resolution ± 3 grams force, and in the entire pressure stroke, the pressure control is stable and reliable, with good repeatability.
附图说明 Description of drawings
图1是本发明的结构示意图； Fig. 1 is a structural representation of the present invention;
图2是本发明弹性变形矩形块2的结构示意图； Fig. 2 is a schematic structural view of an elastically deformable rectangular block 2 of the present invention;
图3是本发明在弹性变形矩形块2变形前的结构原理示意图； Fig. 3 is a schematic diagram of the structural principle of the present invention before the deformation of the elastically deformable rectangular block 2;
图4是本发明在弹性变形矩形块2变形后的结构原理示意图。 FIG. 4 is a schematic diagram of the structural principle of the present invention after the deformation of the elastically deformable rectangular block 2 .
具体实施方式 detailed description
下面结合附图对本发明进行详细说明： The present invention is described in detail below in conjunction with accompanying drawing:
一种引线楔焊微小力输出机构，包括微小力执行机构安装板1、音圈电机、工业控制机和引线键合超声换能器，在引线键合超声换能器的右端设置有压电陶瓷10，在引线键合超声换能器的左端连接有劈刀11，在弹性变形矩形块2上设置有上下垂直方向上的音圈电机通过孔3，在弹性变形矩形块2的左端设置有左螺纹孔4，在弹性变形矩形块2的右端设置有右螺纹孔5，音圈电机定子6是倒置地固定吊接在微小力执行机构安装板1的下端面上的，左连接螺栓通过弹性变形矩形块2的左端设置的左螺纹孔4将弹性变形矩形块2的左端与微小力执行机构安装板1连接在一起，弹性变形矩形块2的右端通过右螺纹孔5中的右连接螺栓与换能器安装套9固定连接在一起，在换能器安装套9中设置有引线键合超声换能器，在弹性变形矩形块2上设置的音圈电机通过孔3中设置有音圈电机定子6，音圈电机动子7的顶端面与换能器安装套9的顶端面顶接在一起，在换能器安装套9的右端设置有位置测量龙门架13，位置测量龙门架13是通过龙门架连接螺栓12与换能器安装套9固定连接在一起的，在位置测量龙门架13的顶梁下方的微小力执行机构安装板1上设置有位置传感器8，压电陶瓷10、音圈电机和位置传感器8分别与工业控制机电连接在一起。 A wire wedge welding micro-force output mechanism, including a micro-force actuator mounting plate 1, a voice coil motor, an industrial control machine and a wire-bonded ultrasonic transducer, and a piezoelectric ceramic is arranged at the right end of the wire-bonded ultrasonic transducer 10. A chopper 11 is connected to the left end of the wire-bonded ultrasonic transducer, and a voice coil motor passing hole 3 in the vertical direction is provided on the elastically deformable rectangular block 2, and a left end is provided on the left end of the elastically deformable rectangular block 2. The threaded hole 4 is provided with a right threaded hole 5 at the right end of the elastically deformable rectangular block 2. The stator 6 of the voice coil motor is fixed upside down and connected to the lower end surface of the mounting plate 1 of the micro force actuator. The left connecting bolt is elastically deformed The left threaded hole 4 provided at the left end of the rectangular block 2 connects the left end of the elastically deformed rectangular block 2 with the mounting plate 1 of the micro force actuator, and the right end of the elastically deformed rectangular block 2 passes through the right connecting bolt in the right threaded hole 5 and the replacement The transducer mounting sleeve 9 is fixedly connected together, a wire-bonded ultrasonic transducer is arranged in the transducer mounting sleeve 9, and a voice coil motor stator is disposed in the voice coil motor passage hole 3 provided on the elastically deformable rectangular block 2 6. The top surface of the voice coil motor mover 7 is connected to the top surface of the transducer installation sleeve 9, and a position measurement gantry 13 is arranged on the right end of the transducer installation sleeve 9, and the position measurement gantry 13 is passed through The gantry connecting bolts 12 are fixedly connected with the transducer mounting sleeve 9, and a position sensor 8, a piezoelectric ceramic 10, and a voice coil are arranged on the micro force actuator mounting plate 1 below the top beam of the position measuring gantry 13. The motor and the position sensor 8 are respectively connected with the industrial control electromechanics.
在由铍青铜材料制成的弹性变形矩形块2中设置有前后水平方向上的工字型凹槽通孔14。 The elastically deformable rectangular block 2 made of beryllium bronze is provided with I-shaped groove through holes 14 in the front and rear horizontal directions.
本发明的音圈电机在工控机的控制下，音圈电机的动子向下运动，通过顶接换能器安装套9，带动引线键合超声换能器向下运动，使劈刀11完成焊接动作。在换能器安装套9向下运动过程中，换能器安装套9牵引弹性变形矩形块2的右端向下运动，使弹性变形矩形块2中的工字型槽14产生变形，导致弹性变形矩形块2对换能器安装套9产生向上的牵引力，实现了微小压力的稳定输出；同时换能器安装套9向下运动带动位置测量龙门架13向下运动，位置传感器8测得位置测量龙门架13向下的位移量并传送给工控机，工控机通过判断位移量的大小以实现控制和报警，采用弹性变形矩形块2加音圈电机的设计方案，把音圈电机设计在测力的最前端，减少力的传递环节。 In the voice coil motor of the present invention, under the control of the industrial computer, the mover of the voice coil motor moves downward, and the transducer mounting sleeve 9 is connected to the top to drive the wire bonding ultrasonic transducer to move downward, so that the rivet 11 is completed. Welding action. During the downward movement of the transducer mounting sleeve 9, the transducer mounting sleeve 9 pulls the right end of the elastically deformable rectangular block 2 to move downward, causing the I-shaped groove 14 in the elastically deformable rectangular block 2 to deform, resulting in elastic deformation The rectangular block 2 generates an upward traction force on the transducer mounting sleeve 9, realizing a stable output of tiny pressure; at the same time, the downward movement of the transducer mounting sleeve 9 drives the position measurement gantry 13 to move downward, and the position sensor 8 measures the position measurement The downward displacement of the gantry 13 is transmitted to the industrial computer, and the industrial computer realizes control and alarm by judging the displacement, adopts the design scheme of elastically deforming rectangular block 2 and adding a voice coil motor, and designs the voice coil motor in the force measurement The most front end, reduce the transmission link of force.
所述的弹性变形矩形块2的内部开“工”字型槽，有效的增强了其上下方向上的弹性性能。其材料是铍青铜，铍青铜是沉淀硬化性合金，固溶时效处理后具有很高的强度、硬度、弹性极限和疲劳极限，弹性滞后小，并具有耐蚀特性。这些特性很好的提高了板簧的弹性性能、可恢复性能以及稳定性，有效的延长了其工作寿命。 The inside of the elastically deformable rectangular block 2 has an "I"-shaped groove, which effectively enhances its elastic performance in the up and down direction. Its material is beryllium bronze, which is a precipitation hardening alloy. After solution aging treatment, it has high strength, hardness, elastic limit and fatigue limit, small elastic hysteresis, and corrosion resistance. These characteristics have greatly improved the elastic performance, recoverability and stability of the leaf spring, effectively prolonging its working life.
所述的音圈电机是一种直接驱动电机，除了和直线电机一样避免了传动环节存在间隙等不足外，在理论上具有无限分辨率，还有无滞后、高响应、高速度、高加速度、力特性稳定和控制方便等优点，更适于驱动频繁启停的微小力输出机构。所述音圈电机满足引线楔焊键合微小力输出范围控制在5-150gf（克力），压力控制分辨率±3gf的要求，并且在整个压力行程内，压力控制稳定可靠，重复性好。 The voice coil motor is a direct drive motor. In addition to avoiding the lack of gaps in the transmission link like the linear motor, it has theoretically infinite resolution, no hysteresis, high response, high speed, high acceleration, With the advantages of stable force characteristics and convenient control, it is more suitable for driving small force output mechanisms with frequent start and stop. The voice coil motor satisfies the requirements of wire wedge bonding with a small force output range of 5-150 gf (gram force), and a pressure control resolution of ±3 gf, and the pressure control is stable and reliable with good repeatability throughout the entire pressure stroke.
一种引线楔焊微小力输出机构的工作方法，包括以下步骤： A working method of a wire wedge welding micro-force output mechanism, comprising the following steps:
第一步、在由铍青铜材料制成的弹性变形矩形块2中设置水平方向的工字型凹槽通孔14，在弹性变形矩形块2上设置沿上下垂直方向的音圈电机通过孔3，在弹性变形矩形块2的左端设置左螺纹孔4，在弹性变形矩形块2的右端设置右螺纹孔5，音圈电机定子6倒置固定吊接在微小力执行机构安装板1的下端面上，左连接螺栓通过弹性变形矩形块2的左端设置的左螺纹孔4将弹性变形矩形块2的左端与微小力执行机构安装板1的下端面连接，弹性变形矩形块2的右端通过右螺纹孔5中的螺栓与换能器安装套9固定连接，在换能器安装套9中设置有引线键合超声换能器，在弹性变形矩形块2上设置的沿上下垂直方向的音圈电机通过孔3中设置有音圈电机定子6，音圈电机动子7的顶端面与换能器安装套9的顶端面顶接在一起，在换能器安装套9的右侧设置有位置测量龙门架13，位置测量龙门架13是通过龙门架连接螺栓12与换能器安装套9固定连接在一起，在位置测量龙门架13的顶梁下方的微小力执行机构安装板1上设置有位置传感器8，压电陶瓷10、音圈电机和位置传感器8分别与工控机电连接； The first step is to set a horizontal I-shaped groove through hole 14 in the elastically deformed rectangular block 2 made of beryllium bronze material, and set a vertically vertical voice coil motor through hole 3 on the elastically deformed rectangular block 2 , the left threaded hole 4 is set at the left end of the elastically deformable rectangular block 2, the right threaded hole 5 is set at the right end of the elastically deformable rectangular block 2, the stator 6 of the voice coil motor is inverted and fixedly connected to the lower end surface of the micro force actuator mounting plate 1 , the left connecting bolt connects the left end of the elastically deformable rectangular block 2 with the lower end surface of the micro force actuator mounting plate 1 through the left threaded hole 4 provided at the left end of the elastically deformable rectangular block 2, and the right end of the elastically deformable rectangular block 2 passes through the right threaded hole The bolts in 5 are fixedly connected to the transducer mounting sleeve 9, and a wire-bonded ultrasonic transducer is arranged in the transducer mounting sleeve 9, and the voice coil motor arranged on the elastically deformable rectangular block 2 along the vertical direction passes through The voice coil motor stator 6 is arranged in the hole 3, the top surface of the voice coil motor mover 7 is connected with the top surface of the transducer mounting sleeve 9, and a position measuring gantry is arranged on the right side of the transducer mounting sleeve 9 Frame 13, the position measuring gantry 13 is fixedly connected together with the transducer mounting sleeve 9 through the gantry connecting bolts 12, and a position sensor is arranged on the micro force actuator mounting plate 1 below the top beam of the position measuring gantry 13 8. The piezoelectric ceramic 10, the voice coil motor and the position sensor 8 are respectively connected with the industrial control electromechanical;
第二步、工控机向音圈电机发出启动指令，音圈电机动子7向下伸出，带动换能器安装套9向下运动，动换能器安装套9带动弹性变形矩形块2的右端向下运动，使弹性变形矩形块2中的工字型槽14产生变形，弹性变形矩形块2对换能器安装套9产生一个向上的牵引力，与换能器安装套9受到音圈电机动子7向下的压力达到平衡，实现了微小力的精确稳定输出； In the second step, the industrial computer sends a starting command to the voice coil motor, and the mover 7 of the voice coil motor extends downward, driving the transducer mounting sleeve 9 to move downward, and the moving transducer mounting sleeve 9 drives the right end of the elastically deformed rectangular block 2 Moving downward, the I-shaped groove 14 in the elastically deformed rectangular block 2 is deformed, and the elastically deformed rectangular block 2 generates an upward traction force on the transducer mounting sleeve 9, and the transducer mounting sleeve 9 is electrically driven by the voice coil motor. The downward pressure of the sub-7 is balanced, and the precise and stable output of small force is realized;
第三步、在换能器安装套9向下运动同时，位置传感器8测得位置测量龙门架13的向下位移量并传送给工控机，若该位移量超过预先设定的阈值，则工控机发出报警信号。 In the third step, while the transducer mounting sleeve 9 moves downward, the position sensor 8 measures the downward displacement of the position measuring gantry 13 and transmits it to the industrial computer. If the displacement exceeds the preset threshold, the industrial control The machine sends out an alarm signal.
本发明引线键合压力的施加措施主要通过控制音圈电机的力矩来完成。其具体过程为，首先利用测高机制使垂直方向接触到需要施加压力的物体，然后通过控制音圈电机的力矩增加或减小来实现引线楔焊微小力输出的控制。在焊接过程中，劈刀11通过向下微小的位移来实现微小压力的输出，在这个过程中位置传感器8的值从H1变化为H2。ΔH=H1-H2不仅显示了劈刀垂直方向的微小位移，同时也反映了每个焊点塑性变形量的大小。所述位置传感器8是一种具有集成温度补偿的高分辨率的传感器，实现了键合压力的灵敏反馈。同时采用压力输出闭环控制方式，有效提高键合压力的稳定性和精确性。确保焊接质量以及每个焊点的塑形变形量一致性。 The application measure of the wire bonding pressure in the present invention is mainly accomplished by controlling the torque of the voice coil motor. The specific process is as follows: firstly, the height measuring mechanism is used to make the vertical direction touch the object requiring pressure, and then the control of the small force output of the lead wedge welding is realized by controlling the increase or decrease of the torque of the voice coil motor. During the welding process, the capillary 11 realizes the output of a small pressure through a small downward displacement, and the value of the position sensor 8 changes from H1 to H2 during this process. ΔH=H1-H2 not only shows the tiny displacement in the vertical direction of the rivet, but also reflects the plastic deformation of each solder joint. The position sensor 8 is a high-resolution sensor with integrated temperature compensation, which realizes sensitive feedback of bonding pressure. At the same time, the pressure output closed-loop control method is adopted to effectively improve the stability and accuracy of the bonding pressure. Ensure welding quality and consistent plastic deformation of each solder joint.
所述的音圈电机具有无滞后、高响应、高速度、高加速度、力特性稳定和控制方便等优点，音圈电机采用较大的电常数，可以很大电流控制很小力（5-150gf）输出，适于驱动频繁启停的微小力输出机构。使引线楔焊微小力输出范围控制在5-150gf，压力控制分辨率±3gf，并且在整个压力行程内，压力控制稳定可靠，重复性好。 The voice coil motor has the advantages of no hysteresis, high response, high speed, high acceleration, stable force characteristics and convenient control. The voice coil motor adopts a relatively large electrical constant, which can control a small force (5-150gf ) output, suitable for driving small force output mechanisms with frequent start and stop. The small force output range of lead wedge welding is controlled at 5-150gf, the pressure control resolution is ±3gf, and the pressure control is stable, reliable and repeatable throughout the entire pressure stroke.
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