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CN105571756A - High-sensitivity bending electric sensor used for shock wave detection - Google Patents

High-sensitivity bending electric sensor used for shock wave detection Download PDF

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CN105571756A
CN105571756A CN201510929110.0A CN201510929110A CN105571756A CN 105571756 A CN105571756 A CN 105571756A CN 201510929110 A CN201510929110 A CN 201510929110A CN 105571756 A CN105571756 A CN 105571756A
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metal electrode
flexoelectric
shock wave
dielectric material
wave detection
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CN105571756B (en
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胡涛涛
申胜平
梁旭
卢建锋
贾坤
刘群峰
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0052Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to impact
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices

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Abstract

一种可用于冲击波检测的高灵敏度挠曲电传感器,包括分别设置在挠曲电介电材料左右表面的左金属电极和右金属电极;左金属电极与右金属电极分别连接有两条输出测量电荷的引线,两条引线的另一端与两外接金属电极连接,环氧树脂把挠曲电介电材料、金属电极和引线密封在内;金属筛具有冲击波施加压力的压力通道;外壳与金属筛粘接在一起,把环氧树脂固结在内;本发明通过在冲击波压缩作用下挠曲电介电材料产生的应变梯度与基于挠曲电动态效应产生电荷之间的线性关系,来测量冲击波压力的大小。

A high-sensitivity flexoelectric sensor that can be used for shock wave detection, including a left metal electrode and a right metal electrode respectively arranged on the left and right surfaces of a flexoelectric dielectric material; the left metal electrode and the right metal electrode are respectively connected with two output measurement charges The other ends of the two lead wires are connected to two external metal electrodes, and the epoxy resin seals the flexible dielectric material, metal electrodes and lead wires; the metal screen has a pressure channel for the shock wave to apply pressure; the shell is bonded to the metal screen Connected together, epoxy resin is consolidated inside; the present invention measures the shock wave pressure by the linear relationship between the strain gradient produced by the flexoelectric dielectric material under shock wave compression and the charge generated based on the flexoelectric dynamic effect the size of.

Description

一种可用于冲击波检测的高灵敏度挠曲电传感器A high-sensitivity flexoelectric sensor for shock wave detection

技术领域technical field

本发明涉及传感器技术领域,具体涉及一种可用于冲击波检测的高灵敏度挠曲电传感器。The invention relates to the technical field of sensors, in particular to a high-sensitivity flexoelectric sensor that can be used for shock wave detection.

背景技术Background technique

力电耦合现象广泛存在于各种人工和天然材料中。传统的压电式传感器利用某些电介质材料受力后具有压电效应的现象制成。压电效应是指某些电介质在收到一定方向上外力作用而发生弯曲或伸缩变形时,由于内部电荷发生极化而在其表面上产生电荷聚集的现象。压电传感器就是通过测量表面电荷量,利用力电耦合关系实现其它非电量的测量,被广泛应用在力学、声学、医学、宇航和国防等方面。The phenomenon of electromechanical coupling widely exists in various artificial and natural materials. Traditional piezoelectric sensors are made using the phenomenon that certain dielectric materials have a piezoelectric effect when they are stressed. The piezoelectric effect refers to the phenomenon that when some dielectrics are bent or deformed by external forces in a certain direction, charge accumulation occurs on the surface due to the polarization of internal charges. Piezoelectric sensors are used to measure the surface charge and use the electromechanical coupling relationship to realize other non-electrical measurements, and are widely used in mechanics, acoustics, medicine, aerospace and national defense.

虽然压电材料具有优越的力电转换效应,但是在晶体学中,压电效应仅存在于在具有非中心对称结构的晶体,这样极大的限制了材料的选取和利用。天然存在的压电材料压电效应非常微弱,压电率太低,很难用于实际检测。目前广泛使用的压电材料主要由石英晶体、压电高分子和压电陶瓷等材料。在实际工业应用中,所采用的压电材料大多为镐钛酸铅类的压电陶瓷,然而镐钛酸铅含有重金属铅,容易对环境和人类健康造成伤害。Although piezoelectric materials have superior electromechanical conversion effects, in crystallography, piezoelectric effects only exist in crystals with non-centrosymmetric structures, which greatly limits the selection and utilization of materials. The piezoelectric effect of naturally occurring piezoelectric materials is very weak, and the piezoelectric rate is too low to be used in practical detection. The widely used piezoelectric materials are mainly composed of quartz crystals, piezoelectric polymers and piezoelectric ceramics. In practical industrial applications, most of the piezoelectric materials used are piezoelectric ceramics like lead titanate. However, lead titanate contains heavy metal lead, which is easy to cause harm to the environment and human health.

与压电效应不同,挠曲电效应是指由非均匀应变场或应变梯度产生电极化现象,即使对于中心对称晶体,挠曲电效应同样可以使材料产生电极化。由于对晶体结构对称性相对宽松的要求,挠曲电效应普遍存在于所有的电介质中,包括非压电材料和各向同性材料。Different from the piezoelectric effect, the flexoelectric effect refers to the phenomenon of electrical polarization generated by a non-uniform strain field or strain gradient. Even for centrosymmetric crystals, the flexoelectric effect can also generate electrical polarization in materials. Due to the relatively relaxed requirement on crystal structure symmetry, the flexoelectric effect is ubiquitous in all dielectrics, including non-piezoelectric and isotropic materials.

当冲击波通过挠曲电介电材料时,发生高应变率变形,产生依赖于时间的应变梯度,而应变梯度会产生离子的极化位移;对于冲击压缩波来说,原子的加速度正比于应变梯度,不同质量的离子的加速度产生额外的极化位移,从而产生挠曲电动态效应,产生极化电荷,挠曲电动态效应通常定义为:When a shock wave passes through a flexoelectric dielectric material, high-strain-rate deformation occurs, producing a time-dependent strain gradient that produces a polarization displacement of the ions; for shock-compression waves, the acceleration of the atoms is proportional to the strain gradient , the acceleration of ions of different masses produces an additional polarization displacement, which results in a flexoelectric dynamic effect, which creates a polarized charge. The flexoelectric dynamic effect is usually defined as:

PP == μμ dd ∂∂ ϵϵ ∂∂ xx

其中μd=-χcM/ρ是动态挠曲电系数。M是由晶格动力学计算出的系数。ε是材料的弹性应变,x是梯度的方向,P是由挠曲电效应导致的应变梯度产生的极化,ρ是密度,c是弹性常数。在国际单位制下,挠曲电系数的单位是C/m。where μ d =-χcM/ρ is the dynamic flexoelectric coefficient. M is a coefficient calculated from lattice dynamics. ε is the elastic strain of the material, x is the direction of the gradient, P is the polarization resulting from the strain gradient due to the flexoelectric effect, ρ is the density, and c is the elastic constant. Under the International System of Units, the unit of flexoelectric coefficient is C/m.

挠曲电式材料选择范围更广,环境和人类友好型材料可用来制备挠曲电式传感器、驱动器等功能器件。另外一个显著的特点是挠曲电效应与尺寸相关,有研究表明应变梯度是随着结构尺寸的减小而增大,小尺寸高灵敏度的挠曲电式微型器件在实际中是可行的,并且测量更加精确。The choice of flexoelectric materials is wider, and environmental and human-friendly materials can be used to prepare functional devices such as flexoelectric sensors and drivers. Another notable feature is that the flexoelectric effect is related to size. Studies have shown that the strain gradient increases as the size of the structure decreases. Small-sized and high-sensitivity flexoelectric micro-devices are feasible in practice, and Measurements are more precise.

发明内容Contents of the invention

为了克服上述现有技术存在的问题,本发明的目的在于提供一种可用于冲击波检测的高灵敏度挠曲电传感器,通过冲击波压缩作用挠曲电介电材料产生的应变梯度与基于挠曲电效应产生电荷之间的线性关系,来测量冲击波压力的大小,能够准确、简单的实现压力的测量。In order to overcome the above-mentioned problems in the prior art, the object of the present invention is to provide a high-sensitivity flexoelectric sensor that can be used for shock wave detection. A linear relationship between charges is generated to measure the magnitude of the shock wave pressure, and the pressure measurement can be realized accurately and simply.

为了达到以上目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts following technical scheme:

一种可用于冲击波检测的高灵敏度挠曲电传感器,包括分别设置在挠曲电介电材料3左右表面的左金属电极2和右金属电极4;所述左金属电极2与右金属电极4分别连接有两条输出测量电荷的引线5,两条引线5的另一端与外接金属电极8连接;所述挠曲电介电材料3、左金属电极2、右金属电极4和引线5密封在环氧树脂7内;外壳7与金属筛1粘接在一起,把环氧树脂7固结在内;所述金属筛1具有冲击波施加压力的压力通道。A high-sensitivity flexoelectric sensor that can be used for shock wave detection, including a left metal electrode 2 and a right metal electrode 4 respectively arranged on the left and right surfaces of a flexoelectric dielectric material 3; the left metal electrode 2 and the right metal electrode 4 are respectively There are two lead wires 5 that output the measured charge, and the other ends of the two lead wires 5 are connected to the external metal electrodes 8; the flexible dielectric material 3, the left metal electrode 2, the right metal electrode 4 and the lead wires 5 are sealed in the ring epoxy resin 7; the shell 7 and the metal screen 1 are bonded together to consolidate the epoxy resin 7; the metal screen 1 has a pressure channel through which the shock wave applies pressure.

所述左金属电极2和右金属电极4为蒸镀金属电极。The left metal electrode 2 and the right metal electrode 4 are evaporated metal electrodes.

所述引线5与左金属电极2和右金属电极片4及外接金属电极8通过引线键合的方式连接。The lead wire 5 is connected to the left metal electrode 2 , the right metal electrode sheet 4 and the external metal electrode 8 by wire bonding.

所述挠曲电电介质3为碳酸锶钡块体。The flex dielectric 3 is a block of barium strontium carbonate.

所述外接金属电极8为两根铜棒。The external metal electrodes 8 are two copper rods.

当高速冲击波通过挠曲电介电材料3时,发生高应变率变形,产生依赖于时间的应变梯度,而应变梯度会产生离子的极化位移;对于冲击压缩波来说,原子的加速度正比于应变梯度,不同质量的离子的加速度产生额外的极化位移,从而产生挠曲电动态效应,产生极化电荷,其表达式为:When a high-speed shock wave passes through a flexoelectric dielectric material 3, high-strain-rate deformation occurs, producing a time-dependent strain gradient that produces a polarization displacement of the ions; for shock-compression waves, the acceleration of the atoms is proportional to The strain gradient, the acceleration of ions of different masses produces additional polarization displacements, resulting in a flexoelectric dynamic effect, resulting in a polarization charge, whose expression is:

PP == (( μμ ++ μμ dd )) ∂∂ ϵϵ ∂∂ xx == QQ Hh 22

U=kQU=kQ

其中μd=-χcM/ρ是动态挠曲电系数,M是由晶格动力学计算出的系数,ρ是密度,c是弹性常数;μ是静态挠曲电系数,ε是材料的弹性应变,x是梯度的方向,P是由挠曲电效应导致的应变梯度产生的极化,Q是左金属电极2和右金属电极片4金属电极的输出电荷,k为电荷放大系数,U为电压值的输出量,H为材料试件下表面边长。以上公式能够看出,只要测量输出电荷值,通过冲击波压缩作用挠曲电介电材料产生的应变梯度与基于挠曲电效应产生电荷之间的线性关系,能够准确、简单的实现冲击波压力的测量。where μ d = -χcM/ρ is the dynamic flexoelectric coefficient, M is the coefficient calculated by lattice dynamics, ρ is the density, c is the elastic constant; μ is the static flexoelectric coefficient, ε is the elastic strain of the material , x is the direction of the gradient, P is the polarization generated by the strain gradient caused by the flexoelectric effect, Q is the output charge of the metal electrodes of the left metal electrode 2 and the right metal electrode sheet 4, k is the charge amplification factor, and U is the voltage The output of the value, H is the side length of the lower surface of the material specimen. It can be seen from the above formula that as long as the output charge value is measured, the linear relationship between the strain gradient generated by the flexoelectric dielectric material through the shock wave compression and the charge generated based on the flexoelectric effect can accurately and simply realize the measurement of the shock wave pressure .

和现有技术相比较,本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:

1)本发明采用挠曲电动态效应测量冲击波压力,与传统的压式传感器不同,挠曲电式传感器材料的选取范围更宽。1) The present invention uses the flexoelectric dynamic effect to measure the shock wave pressure. Different from the traditional pressure sensor, the material selection range of the flexoelectric sensor is wider.

2)相对于压电式压力传感器,具有高灵敏度,并具有尺寸效应,随块体尺寸的减小灵敏度增加。2) Compared with the piezoelectric pressure sensor, it has high sensitivity and has a size effect, and the sensitivity increases with the decrease of the block size.

3)由于挠曲电效应主要是由于应变梯度产生的,在小变形情况下,应变的测量较为困难,大应变梯度依然存在,可极为容易的检测到电信号,甚至可直接输出电信号分析,为结构的现场检测提供了可能。3) Since the flexoelectric effect is mainly caused by the strain gradient, it is difficult to measure the strain in the case of small deformation, but the large strain gradient still exists, and the electrical signal can be detected very easily, and even the electrical signal can be directly output for analysis. It provides the possibility for the on-site inspection of the structure.

附图说明Description of drawings

附图为本发明传感器结构示意图。The accompanying drawing is a structural schematic diagram of the sensor of the present invention.

具体实施方式detailed description

下面结合附图和具体实施方式对本发明做进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

如附图所示,本发明一种可用于冲击波检测的高灵敏度挠曲电传感器,包括分别设置在挠曲电介电材料3左右表面的左金属电极2和右金属电极3,所述左金属电极2与挠曲电介电材料3的左表面相接触;所述右金属电极4与挠曲电介电材料3的右表面相接触;所述左金属电极2与右金属电极4分别连接有两条输出测量电荷的引线5,两条引线5的另一端与外接金属电极8连接,环氧树脂7把挠曲电介电材料3、金属电极2、4和引线5密封在内;金属筛1具有冲击波施加压力的压力通道;所述外壳7与金属筛1粘接在一起,把环氧树脂7固结在内。As shown in the drawings, a high-sensitivity flexoelectric sensor that can be used for shock wave detection in the present invention includes left metal electrodes 2 and right metal electrodes 3 respectively arranged on the left and right surfaces of flexoelectric dielectric materials 3, the left metal electrodes The electrode 2 is in contact with the left surface of the flexible dielectric material 3; the right metal electrode 4 is in contact with the right surface of the flexible dielectric material 3; the left metal electrode 2 and the right metal electrode 4 are respectively connected with Two lead wires 5 that output the measured charge, the other ends of the two lead wires 5 are connected to the external metal electrodes 8, and the epoxy resin 7 seals the flexoelectric dielectric material 3, the metal electrodes 2, 4 and the lead wires 5; the metal screen 1 has a pressure channel through which the shock wave exerts pressure; the shell 7 is bonded to the metal screen 1, and the epoxy resin 7 is consolidated inside.

所述左金属电极2和右金属电极4为蒸镀金属电极。The left metal electrode 2 and the right metal electrode 4 are evaporated metal electrodes.

所述引线5与左金属电极2和右金属电极片4及外接金属电极8通过引线键合的方式连接。The lead wire 5 is connected to the left metal electrode 2 , the right metal electrode sheet 4 and the external metal electrode 8 by wire bonding.

所述挠曲电电介质3为碳酸锶钡块体。The flex dielectric 3 is a block of barium strontium carbonate.

所述外接金属电极8为两根铜棒。The external metal electrodes 8 are two copper rods.

当高速冲击波通过挠曲电介电材料3时,发生高应变率变形,产生依赖于时间的应变梯度,而应变梯度会产生离子的极化位移;对于冲击压缩波来说,原子的加速度正比于应变梯度,不同质量的离子的加速度产生额外的极化位移,从而产生挠曲电动态效应,产生极化电荷,其表达式为:When a high-speed shock wave passes through a flexoelectric dielectric material 3, high-strain-rate deformation occurs, producing a time-dependent strain gradient that produces a polarization displacement of the ions; for shock-compression waves, the acceleration of the atoms is proportional to The strain gradient, the acceleration of ions of different masses produces additional polarization displacements, resulting in a flexoelectric dynamic effect, resulting in a polarization charge, whose expression is:

PP == (( μμ ++ μμ dd )) ∂∂ ϵϵ ∂∂ xx == QQ Hh 22

U=kQU=kQ

其中μd=-χcM/ρ是动态挠曲电系数,M是由晶格动力学计算出的系数,ρ是密度,c是弹性常数;μ是静态挠曲电系数,ε是材料的弹性应变,x是梯度的方向,P是由挠曲电效应导致的应变梯度产生的极化,Q是左金属电极2和右金属电极片4金属电极的输出电荷,k为电荷放大系数,U为电压值的输出量,H为材料试件下表面边长。以上公式能够看出,只要测量输出电荷值,通过冲击波压缩作用挠曲电介电材料产生的应变梯度与基于挠曲电效应产生电荷之间的线性关系,能够准确、简单的实现冲击波压力的测量。where μ d = -χcM/ρ is the dynamic flexoelectric coefficient, M is the coefficient calculated by lattice dynamics, ρ is the density, c is the elastic constant; μ is the static flexoelectric coefficient, ε is the elastic strain of the material , x is the direction of the gradient, P is the polarization generated by the strain gradient caused by the flexoelectric effect, Q is the output charge of the metal electrodes of the left metal electrode 2 and the right metal electrode sheet 4, k is the charge amplification factor, and U is the voltage The output of the value, H is the side length of the lower surface of the material specimen. It can be seen from the above formula that as long as the output charge value is measured, the linear relationship between the strain gradient generated by the flexoelectric dielectric material through the shock wave compression and the charge generated based on the flexoelectric effect can accurately and simply realize the measurement of the shock wave pressure .

Claims (5)

1. can be used for a high sensitivity flexure electric transducer for shock-wave detection, it is characterized in that: comprise the left metal electrode (2) and right metal electrode (4) that are separately positioned on surface, the electric dielectric material of flexure (3) left and right; Described left metal electrode (2) and right metal electrode (4) are connected to two and export the lead-in wire (5) measuring electric charge, and the other end of two lead-in wires (5) is connected with external metal electrode (8); The electric dielectric material of described flexure (3), left metal electrode (2), right metal electrode (4) and lead-in wire (5) are sealed in epoxy resin (7); Shell (6) and metallic screen (1) bond together, in epoxy resin (7) is cemented in; Described metallic screen (1) has shock wave and executes stressed pressure channel.
2. a kind of high sensitivity flexure electric transducer that can be used for shock-wave detection according to claim 1, is characterized in that: described left metal electrode (2) and right metal electrode (4) are evaporation metal electrode.
3. a kind of high sensitivity flexure electric transducer that can be used for shock-wave detection according to claim 1, is characterized in that: described lead-in wire (5) and left metal electrode (2) and right metal electrode film (4) and external metal electrode (8) are connected by the mode of wire bonding.
4. a kind of high sensitivity flexure electric transducer that can be used for shock-wave detection according to claim 1, is characterized in that: the electric dielectric material of described flexure (3) is strontium carbonate barium block.
5. a kind of high sensitivity flexure electric transducer that can be used for shock-wave detection according to claim 1, is characterized in that: described external metal electrode (8) is two copper rods.
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Publication number Priority date Publication date Assignee Title
CN106768628A (en) * 2016-12-07 2017-05-31 西安近代化学研究所 A kind of shock wave pipe mounting structure and method for base measuring pressure response diaphragm
CN109507450A (en) * 2018-10-30 2019-03-22 西安交通大学 A kind of beam type bends electric acceleration transducer and acceleration measurement method
CN109724732A (en) * 2018-12-12 2019-05-07 西安近代化学研究所 A kind of explosion wave pressure effect target of depth automatic measurement
CN110686817A (en) * 2019-10-31 2020-01-14 电子科技大学 A device for measuring the emission angle of a particle beam
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Publication number Priority date Publication date Assignee Title
CN106768628A (en) * 2016-12-07 2017-05-31 西安近代化学研究所 A kind of shock wave pipe mounting structure and method for base measuring pressure response diaphragm
US10962992B2 (en) 2017-12-25 2021-03-30 Industrial Technology Research Institute Apparatus with two anchors
CN109507450A (en) * 2018-10-30 2019-03-22 西安交通大学 A kind of beam type bends electric acceleration transducer and acceleration measurement method
CN109724732A (en) * 2018-12-12 2019-05-07 西安近代化学研究所 A kind of explosion wave pressure effect target of depth automatic measurement
CN110686817A (en) * 2019-10-31 2020-01-14 电子科技大学 A device for measuring the emission angle of a particle beam

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