CN105477780A - Implantable neuro-stimulation and recording photoelectrode and manufacturing method thereof - Google Patents
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Abstract
本发明公开一种植入式神经刺激与记录的光电极,包括:支撑部件,其包括插入端,所述插入端设有产生电刺激和记录所述电刺激产生的神经信号的记录触点;以及,发光部件,其位于所述插入端,用于产生光刺激;其中,所述记录触点还用于记录所述光刺激产生的神经信号。本发明通过在光电极的插入端设置产生电刺激和记录所述电刺激产生的神经信号的记录触点以及产生光刺激的发光部件、记录触点还用于记录光刺激产生的神经信号,从而形成光/电刺激并带有多路记录触点于一体的光电极,通过一个光电极分别完成光/电刺激以及光/电刺激的神经信号的记录,简化设备,节约材料,适用多部位电位测量,应用广泛。
The invention discloses an implantable photoelectrode for nerve stimulation and recording, which comprises: a support component, which includes an insertion end, and the insertion end is provided with a recording contact for generating electrical stimulation and recording nerve signals generated by the electrical stimulation; and , a light-emitting component, which is located at the insertion end and is used to generate light stimulation; wherein, the recording contacts are also used to record nerve signals generated by the light stimulation. In the present invention, a recording contact for generating electrical stimulation and recording the nerve signal generated by the electrical stimulation and a light-emitting component for generating light stimulation are arranged at the insertion end of the photoelectrode, and the recording contact is also used for recording the nerve signal generated by the light stimulation, thereby A photoelectrode with optical/electrical stimulation and multi-channel recording contacts is formed, and the recording of optical/electrical stimulation and optical/electrical stimulation nerve signals is completed through one photoelectrode, which simplifies equipment, saves materials, and is suitable for multi-site potentials Measurement, widely used.
Description
技术领域technical field
本发明涉及生物医学工程技术领域,更具体地说,本发明涉及一种植入式神经刺激与记录的光电极及其制造方法。The invention relates to the technical field of biomedical engineering, more specifically, the invention relates to an implantable nerve stimulation and recording photoelectrode and a manufacturing method thereof.
背景技术Background technique
光遗传学,也称光刺激基因工程,它是一种通过使用光学技术和遗传技术来实现控制细胞行为的方法。光遗传学技术克服了传统的只用电刺激手段控制细胞或有机体活动的许多缺点,为神经科学提供了一种变革性的研究手段。该技术方法通过特定波长的光刺激来控制表达了光敏感蛋白细胞的发放或抑制。目前,光遗传学最流行的研究方法是由激光器或LED(LightEmittingDiode,发光二极管)光源发出一定波长的光,通过光纤传输到实验动物的大脑,通常为小鼠或大鼠。光遗传学技术作为一个工具使动物神经元产生神经兴奋,同时需要配合使用其他仪器及电极来观察和记录动物神经元放电、行为变化和生理变化等。Optogenetics, also known as light-stimulated genetic engineering, is a method of controlling cell behavior by using optical technology and genetic technology. Optogenetics technology overcomes many shortcomings of the traditional method of only using electrical stimulation to control the activities of cells or organisms, and provides a transformative research method for neuroscience. This technical method controls the emission or inhibition of cells expressing light-sensitive protein through light stimulation of a specific wavelength. At present, the most popular research method of optogenetics is that a laser or LED (Light Emitting Diode, Light Emitting Diode) light source emits light of a certain wavelength, which is transmitted to the brain of an experimental animal, usually a mouse or a rat, through an optical fiber. Optogenetic technology is used as a tool to excite neurons in animals. At the same time, it needs to cooperate with other instruments and electrodes to observe and record neuron discharge, behavioral changes and physiological changes in animals.
目前,同类神经调控策略多为通过金属丝进行电刺激或者通过由激光器作为发光源通过光纤进行光刺激或者直接通过LED发光耦合光纤输出。其中电刺激技术较为成熟,已经成功应用于帕金森等中枢神经系统疾病的治疗中,电刺激电极一般用金属箔丝作为电极实现;光刺激可以更为精准的对特定的神经元进行刺激,在未来可能成为比电刺激更为有效的治疗手段,但基于光纤的刺激有着发光面积有限,光源受限于外界激光发生器种类,价格昂贵等缺点,不能很好的实现神经环路多点刺激及核团刺激等应用场合要求;同时虽然目前也出现了少数基于发光二极管的光极,但其制作工艺较为复杂且价格高昂;另外,光刺激不具备电刺激及神经信号记录功能,如果需要记录刺激产生的神经信号,必须另外配置其他记录电极及硬件系统使用,且该电极产品价格非常昂贵。At present, most of the similar neuromodulation strategies are electrical stimulation through metal wires, optical stimulation through optical fibers with lasers as light sources, or direct output through LED light-emitting coupling optical fibers. Among them, the electrical stimulation technology is relatively mature and has been successfully applied in the treatment of central nervous system diseases such as Parkinson's. The electrical stimulation electrodes are generally implemented with metal foil wires as electrodes; optical stimulation can stimulate specific neurons more accurately. In the future, it may become a more effective treatment method than electrical stimulation. However, optical fiber-based stimulation has the disadvantages of limited luminous area, light source is limited by the type of external laser generator, and expensive. It cannot achieve multi-point stimulation of neural circuits and Nucleus stimulation and other application requirements; at the same time, although there are a few light-emitting diode-based optodes, their manufacturing process is relatively complicated and the price is high; in addition, light stimulation does not have the functions of electrical stimulation and nerve signal recording. If you need to record stimulation The generated nerve signals must be configured with other recording electrodes and hardware systems, and the electrode products are very expensive.
发明内容Contents of the invention
针对上述技术中存在的不足之处,本发明提供一种植入式神经刺激与记录的光电极及其制造方法,通过在光电极的插入端设置产生电刺激和记录所述电刺激产生的神经信号的记录触点以及产生光刺激的发光部件、记录触点还用于记录光刺激产生的神经信号,从而形成光/电刺激并带有多路记录触点于一体的光电极,通过一个光电极分别完成光/电刺激以及光/电刺激的神经信号的记录,简化设备,节约材料,适用多部位电位测量,应用广泛。In view of the deficiencies in the above-mentioned technologies, the present invention provides an implantable nerve stimulation and recording photoelectrode and its manufacturing method, by setting the insertion end of the photoelectrode to generate electrical stimulation and record the neural signals generated by the electrical stimulation The recording contacts and the light-emitting parts that generate light stimulation, the recording contacts are also used to record the nerve signals generated by light stimulation, so as to form light/electric stimulation and a photoelectrode with multiple recording contacts in one, through a photoelectrode The optical/electrical stimulation and the recording of the nerve signal of the optical/electrical stimulation are respectively completed, the equipment is simplified, the material is saved, and it is suitable for multi-site potential measurement, and has a wide range of applications.
为了实现根据本发明的这些目的和其它优点,本发明通过以下技术方案实现:In order to realize these purposes and other advantages according to the present invention, the present invention realizes through the following technical solutions:
本发明所述的植入式神经刺激与记录的光电极,包括:The photoelectrode for implantable nerve stimulation and recording according to the present invention includes:
支撑部件,其包括插入端,所述插入端设有产生电刺激和记录所述电刺激产生的神经信号的记录触点;以及,a support member comprising an insertion end provided with recording contacts for generating electrical stimulation and recording neural signals generated by said electrical stimulation; and,
发光部件,其位于所述插入端,用于产生光刺激;a light-emitting component located at the insertion end for generating light stimulation;
其中,所述记录触点还用于记录所述光刺激产生的神经信号。Wherein, the recording contacts are also used to record the nerve signals generated by the light stimulation.
优选的是,所述插入端的插入侧沿插入方向呈梯形状。Preferably, the insertion side of the insertion end is trapezoidal along the insertion direction.
优选的是,所述支撑部件包括上基板层、下基板层以及连接到所述上基板层与所述下基板层之间的屏蔽层;所述支撑部件还包括连接外接器的连接端;Preferably, the support component includes an upper substrate layer, a lower substrate layer, and a shielding layer connected between the upper substrate layer and the lower substrate layer; the support component also includes a connection end connected to an external connector;
其中,所述上基板层包括采集神经信号的信号采集线、所述记录触点以及分别位于所述连接端的第一焊盘和第二焊盘;所述下基板层包括电源线;所述记录触点通过所述信号采集线连接到所述第一焊盘,所述发光部件通过所述电源线连接到所述第二焊盘。Wherein, the upper substrate layer includes a signal collection line for collecting neural signals, the recording contact, and a first pad and a second pad respectively located at the connection end; the lower substrate layer includes a power line; the recording The contact is connected to the first pad through the signal collection line, and the light emitting component is connected to the second pad through the power line.
优选的是,所述连接端设有第一通孔,所述插入端设有第二通孔;所述第二焊盘通过所述第一通孔连接到所述电源线一端,所述电源线另一端通过所述第二通孔连接到所述发光部件。Preferably, the connection end is provided with a first through hole, and the insertion end is provided with a second through hole; the second pad is connected to one end of the power line through the first through hole, and the power supply The other end of the wire is connected to the light emitting component through the second through hole.
优选的是,所述插入端的插入侧沿插入方向呈梯形状。Preferably, the insertion side of the insertion end is trapezoidal along the insertion direction.
优选的是,至少一个所述记录触点和至少一个所述发光部件沿插入方向依次排列在所述插入端的插入侧;其中,至少一个所述记录触点沿垂直于插入方向依次排列在所述插入端的插入侧;至少一个所述发光部件沿插入方向依次排列在所述插入端的插入侧。Preferably, at least one of the recording contacts and at least one of the light-emitting components are arranged sequentially on the insertion side of the insertion end along the insertion direction; wherein at least one of the recording contacts is arranged on the insertion side perpendicular to the insertion direction. The insertion side of the insertion end; at least one of the light-emitting components is arranged sequentially on the insertion side of the insertion end along the insertion direction.
优选的是,一个所述记录触点与一个所述发光部件沿插入方向依次排列在所述插入端的插入侧;其中,一个所述记录触点产生电刺激、记录所述电刺激产生的神经信号以及记录一个所述发光部件光刺激产生的神经信号。Preferably, one of the recording contacts and one of the light-emitting components are sequentially arranged on the insertion side of the insertion end along the insertion direction; wherein, one of the recording contacts generates electrical stimulation, and records the nerve signal generated by the electrical stimulation And record a neural signal generated by light stimulation of the light-emitting component.
优选的是,若干个所述记录触点与至少一个所述发光部件沿插入方向依次排列在所述插入端的插入侧;其中,若干个所述记录触点产生电刺激、记录所述电刺激产生的神经信号以及记录至少一个所述发光部件光刺激产生的神经信号。Preferably, several of the recording contacts and at least one of the light-emitting components are sequentially arranged on the insertion side of the insertion end along the insertion direction; wherein, several of the recording contacts generate electrical stimulation, and the recording of the electrical stimulation generates neural signals and record the neural signals generated by light stimulation of at least one light-emitting component.
优选的是,若干个所述记录触点与至少一个所述发光部件沿插入方向依次排列在所述插入端的插入侧;其中,若干个所述记录触点包括产生电刺激和记录所述电刺激产生的神经信号的第一记录触点以及记录至少一个所述光刺激产生的神经信号的第二记录触点。Preferably, several of the recording contacts and at least one of the light-emitting components are sequentially arranged on the insertion side of the insertion end along the insertion direction; wherein, several of the recording contacts include generating electrical stimulation and recording the electrical stimulation A first recording contact for neural signals generated and a second recording contact for recording at least one neural signal generated by said light stimulation.
一种植入式神经刺激与记录的光电极的制作方法,包括以下步骤:A method for making an implantable nerve stimulation and recording photoelectrode, comprising the following steps:
S1,在聚酰亚胺制成的下基板上方涂布一层环氧树脂胶,在环氧树脂胶上方贴合表面贴有一层光致抗蚀剂的铜箔,形成屏蔽层;S1, apply a layer of epoxy resin glue on the lower substrate made of polyimide, and attach a layer of copper foil with photoresist on the surface of the epoxy resin glue to form a shielding layer;
S2,利用掩膜进行紫外线曝光,曝光区域是光电极屏蔽层的形状,曝光之后用显影液将未曝光区域去除;S2, using a mask for ultraviolet exposure, the exposed area is the shape of the photoelectrode shielding layer, and the unexposed area is removed with a developer after exposure;
S3,利用刻蚀液将裸露的铜箔去除,再利用强碱溶液将光致抗蚀剂去除,让屏蔽层上方完全露出;S3, using an etching solution to remove the exposed copper foil, and then using a strong alkali solution to remove the photoresist, so that the top of the shielding layer is completely exposed;
S4,在屏蔽层上方涂布环氧树脂胶后,在环氧树胶上方贴合聚酰亚胺制成的上基板层,从而形成光电极的支承部件;S4, after coating epoxy resin glue on the top of the shielding layer, attaching an upper substrate layer made of polyimide on the top of the epoxy glue, thereby forming a supporting part of the photoelectrode;
S5,在光电极的支承部件上下表面贴合铜箔;S5, attaching copper foil to the upper and lower surfaces of the supporting part of the photoelectrode;
S7,对光电极的支承部件进行钻孔处理,形成第一通孔和第二通孔;S7, performing drilling processing on the supporting part of the photoelectrode to form a first through hole and a second through hole;
S6,用电镀工艺分别在第一通孔和第二通孔的孔壁上镀一层铜;S6, using an electroplating process to plate a layer of copper on the walls of the first through hole and the second through hole respectively;
S7,按照步骤S1、步骤S2、步骤S3的方法进行图形转移,在光电极支承部件的上表面和下表面形成所设计的信号采集线、电源线、第一焊盘以及第二焊盘;S7, performing pattern transfer according to the methods of step S1, step S2, and step S3, and forming designed signal collection lines, power lines, first pads, and second pads on the upper surface and the lower surface of the photoelectrode support member;
S8,利用激光切割技术围绕信号采集线、电源线、第一焊盘以及第二焊盘将上基板层和下基板层共同切割成光电极支承部件的形状,将发光部件焊接在支承部件插入端的第二通孔;形成植入式神经刺激与记录的光电极。S8, using laser cutting technology to cut the upper substrate layer and the lower substrate layer into the shape of the photoelectrode supporting part around the signal collection line, the power line, the first pad and the second pad, and welding the light emitting part to the insertion end of the supporting part The second through hole; forms the photoelectrode for implantable nerve stimulation and recording.
本发明至少包括以下有益效果:The present invention at least includes the following beneficial effects:
1)通过在光电极的插入端设置产生电刺激和记录所述电刺激产生的神经信号的记录触点以及产生光刺激的发光部件、记录触点还用于记录光刺激产生的神经信号,从而形成光/电刺激并带有多路记录触点于一体的光电极,通过一个光电极分别完成光/电刺激以及光/电刺激的神经信号的记录,简化设备,节约材料;1) By setting the recording contacts for generating electrical stimulation and recording the neural signals generated by the electrical stimulation at the insertion end of the photoelectrode and the light-emitting components for generating optical stimulation, the recording contacts are also used to record the neural signals generated by optical stimulation, thereby A photoelectrode that forms photo/electric stimulation and has multiple recording contacts in one, completes the recording of photo/electric stimulation and photo/electric stimulation nerve signals respectively through one photoelectrode, simplifies equipment and saves materials;
2)插入端的插入侧沿插入方向呈梯形状,插入侧呈梯形状相当于三角形去尖端,类似弧形设计,减少插入端插入时对神经组织的伤害;2) The insertion side of the insertion end has a trapezoidal shape along the insertion direction, and the trapezoidal shape of the insertion side is equivalent to a triangle without the tip, similar to an arc design, which reduces the damage to the nerve tissue when the insertion end is inserted;
3)记录触点和发光部件沿插入方向依次排列在插入端;至少一个记录触点沿垂直于插入方向排列在所述插入端,可以提供至少一个电刺激或至少一个记录光刺激产生的神经信号;至少一个发光部件沿插入方向依次排列在插入端,可以提供至少一个或至少一种波长的光刺激。3) The recording contacts and light-emitting components are arranged at the insertion end in sequence along the insertion direction; at least one recording contact is arranged at the insertion end perpendicular to the insertion direction, which can provide at least one electrical stimulation or at least one neural signal generated by recording light stimulation ; At least one light-emitting component is arranged sequentially at the insertion end along the insertion direction, and can provide light stimulation of at least one or at least one wavelength.
本发明的其它优点、目标和特征将部分通过下面的说明体现,部分还将通过对本发明的研究和实践而为本领域的技术人员所理解。Other advantages, objectives and features of the present invention will partly be embodied through the following descriptions, and partly will be understood by those skilled in the art through the study and practice of the present invention.
附图说明Description of drawings
图1为本发明所述的植入式神经刺激与记录的光电极的结构示意图;Fig. 1 is the structure schematic diagram of the photoelectrode of implantable nerve stimulation and recording according to the present invention;
图2为本发明所述的植入式神经刺激与记录的光电极的俯视图;Fig. 2 is the top view of the photoelectrode of implantable nerve stimulation and recording according to the present invention;
图3为本发明所述的植入式神经刺激与记录的光电极的右视图。Fig. 3 is a right view of the photoelectrode for implantable nerve stimulation and recording according to the present invention.
图中:In the picture:
10-支撑部件;11-插入端;111-记录触点;11A-插入侧;12-连接端;13-信号采集线;14-第一焊盘;15-第二焊盘;16-电源线;17-第一通孔;18-第二通孔;10-support component; 11-insert end; 111-record contact; 11A-insert side; 12-connection end; 13-signal acquisition line; 14-first pad; 15-second pad; 16-power line ; 17-the first through hole; 18-the second through hole;
20-发光部件。20 - Lighting component.
具体实施方式detailed description
下面结合附图对本发明做进一步的详细说明,以令本领域技术人员参照说明书文字能够据以实施。The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.
应当理解,本文所使用的诸如“具有”、“包含”以及“包括”术语并不排除一个或多个其它元件或其组合的存在或添加。It should be understood that terms such as "having", "comprising" and "including" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.
实施例1Example 1
神经调控功能可通过两种方式体现,其一可以通过电极触点产生参数可调的电脉冲刺激,其二可以通过特定波长的微型光极对表达了光敏蛋白的特定性神经组织进行光刺激。如图1、图2和图3所示,本发明提供一种植入式神经刺激与记录的光电极,包括:支撑部件10,其包括插入端11,插入端11设有产生电刺激和记录电刺激产生的神经信号的记录触点111;以及,发光部件20,其位于插入端11,用于产生光刺激;其中,记录触点111还用于记录光刺激产生的神经信号。The neuromodulation function can be manifested in two ways. One can generate electrical pulse stimulation with adjustable parameters through electrode contacts, and the other can perform light stimulation on specific neural tissues expressing light-sensitive proteins through micro-optic electrodes of specific wavelengths. As shown in Fig. 1, Fig. 2 and Fig. 3, the present invention provides a photoelectrode for implantable nerve stimulation and recording, including: a supporting part 10, which includes an insertion end 11, and the insertion end 11 is provided with a The recording contact 111 of the nerve signal generated by stimulation; and the light-emitting component 20, which is located at the insertion end 11, for generating light stimulation; wherein, the recording contact 111 is also used for recording the nerve signal generated by light stimulation.
本发明提供的植入式神经刺激与记录的光电极,通过在光电极的插入端11设置产生电刺激和记录电刺激产生的神经信号的记录触点111以及产生光刺激的发光部件20、记录触点111还记录光刺激产生的神经信号,从而形成光/电刺激并带有记录触点于一体的光电极,即通过一个光电极分别完成光/电刺激以及光/电刺激的神经信号的记录,既具备光刺激的特定神经元精准刺激,又通过产生电刺激的记录触点111及时记录光刺激的神经信号,简化设备、节约材料,提高光电极的测量精确性和便利性。The photoelectrode for implantable nerve stimulation and recording provided by the present invention is provided with a recording contact 111 for generating electrical stimulation and recording nerve signals generated by electrical stimulation and a light-emitting component 20 for generating optical stimulation at the insertion end 11 of the photoelectrode, recording The contact 111 also records the nerve signal generated by light stimulation, thereby forming a light/electric stimulation and a photoelectrode with an integrated recording contact, that is, the light/electric stimulation and the light/electric stimulation nerve signal are respectively completed through one photoelectrode. Recording, not only has the precise stimulation of specific neurons stimulated by light, but also records the nerve signals of light stimulation in time through the recording contacts 111 that generate electrical stimulation, simplifies equipment, saves materials, and improves the measurement accuracy and convenience of photoelectrodes.
其中,记录触点111既产生电刺激和记录电刺激产生的神经信号,又记录光刺激产生的神经信号,提高记录触点111的利用率。发光部件20的光源可以是任意发出光波对神经组织进行光刺激的激光发生器,本实施方式考虑植入式神经刺激与记录的光电极的大小尺寸和应用场合,优选可以产生特定波长的光、进而控制光敏蛋白表达的微型发光二极管,微型发光二极管作用面积较小,散射发光面积大,可适用于动物体多部位电位测量,拓广植入式神经刺激与记录的光电极的应用范围。Wherein, the recording contact 111 not only generates electrical stimulation and records the nerve signal generated by the electrical stimulation, but also records the nerve signal generated by the light stimulation, so as to improve the utilization rate of the recording contact 111 . The light source of the light-emitting component 20 can be a laser generator that emits light waves to optically stimulate nerve tissue. In this embodiment, considering the size and application of the photoelectrode for implantable nerve stimulation and recording, it is preferable to generate light of a specific wavelength, Furthermore, the miniature light-emitting diodes that control the expression of light-sensitive proteins have a small active area and a large scattered light-emitting area, which can be applied to the potential measurement of multiple parts of the animal body, and expand the application range of photoelectrodes for implantable nerve stimulation and recording.
作为本发明的另一种实施方式,支撑部件10包括上基板层、下基板层以及连接到上基板层与下基板层之间的屏蔽层;支撑部件10还包括连接外部连接器的连接端12;其中,上基板层包括采集神经信号的信号采集线13、记录触点111以及分别位于连接端12的第一焊盘14和第二焊盘15;下基板层包括电源线16;记录触点111通过信号采集线13连接到第一焊盘14,发光部件20通过电源线16连接到第二焊盘15。第一焊盘14、第二焊盘15、信号采集线13、以及电源线16均是镀金铜材料;屏蔽层采用铜箔。支撑部件10的上基板层与下基板层中间设有的屏蔽层,减小驱动发光部件20的电源线16对信号采集线13的干扰。As another embodiment of the present invention, the support member 10 includes an upper substrate layer, a lower substrate layer, and a shielding layer connected between the upper substrate layer and the lower substrate layer; the support member 10 also includes a connection terminal 12 connected to an external connector ; Wherein, the upper substrate layer includes the signal acquisition line 13 for collecting nerve signals, the recording contact 111 and the first pad 14 and the second pad 15 respectively located at the connection end 12; the lower substrate layer includes the power line 16; the recording contact 111 is connected to the first pad 14 through the signal collection line 13 , and the light emitting component 20 is connected to the second pad 15 through the power line 16 . The first pad 14, the second pad 15, the signal collection line 13, and the power line 16 are all made of gold-plated copper material; the shielding layer is made of copper foil. The shielding layer provided between the upper substrate layer and the lower substrate layer of the support component 10 reduces the interference of the power line 16 driving the light-emitting component 20 on the signal collection line 13 .
作为本发明的另一种实施方式,连接端12设有第一通孔17,插入端11设有第二通孔18;第二焊盘15通过第一通孔17连接到电源线16一端,电源线16另一端通过第二通孔18连接到发光部件20。第一通孔17与第二通孔18为电源驱动光电极的发光部件20提供了走线便利,促使信号采集线13以及电源线16的布线合理。其中,电源线16均通过第一通孔17与连接端12的第二焊盘15焊接;发光部件20通过第二通孔18与插入端11焊接;连接端12与外部连接器以插接或焊接的方式连接。As another embodiment of the present invention, the connection end 12 is provided with a first through hole 17, and the insertion end 11 is provided with a second through hole 18; the second pad 15 is connected to one end of the power line 16 through the first through hole 17, The other end of the power line 16 is connected to the light emitting component 20 through the second through hole 18 . The first through hole 17 and the second through hole 18 provide convenient wiring for the light-emitting component 20 of the power-driven photoelectrode, and promote the reasonable wiring of the signal collection line 13 and the power line 16 . Wherein, the power line 16 is welded to the second pad 15 of the connecting end 12 through the first through hole 17; the light-emitting component 20 is welded to the inserting end 11 through the second through hole 18; Connected by welding.
作为本发明的另一种实施方式,插入端11的插入侧11A沿插入方向呈梯形状。通常,光电极插入端11的插入侧采用具有尖端的三角形,提高光电极插入生物体的便利性,本发明实施方式的光电极插入端11沿插入方向的长度为7mm、垂直于于插入方向的宽度为500um、插入侧11A与发光部件20一起的厚度为300um,将插入端11的插入侧11A沿插入方向呈梯形状,这种去除尖端、类似弧形的设计,在保证光电极插入便利、不影响发光部件20和记录触点工作的情况下,减少了光电极插入对神经组织的伤害。As another embodiment of the present invention, the insertion side 11A of the insertion end 11 has a trapezoidal shape along the insertion direction. Usually, the insertion side of the photoelectrode insertion end 11 adopts a triangular shape with a sharp point to improve the convenience of the photoelectrode insertion into the living body. The width is 500um, the thickness of the insertion side 11A and the light-emitting component 20 is 300um, and the insertion side 11A of the insertion end 11 is trapezoidal along the insertion direction. Without affecting the work of the light-emitting component 20 and the recording contact, the damage to the nerve tissue caused by the insertion of the photoelectrode is reduced.
作为本发明的另一种实施方式,至少一个记录触点111和至少一个发光部件20沿插入方向依次排列在插入端11的插入侧11A,便于记录触点111、发光部件20、信号采集线13以及电源线16合理布局的同时,减小光电极的插入端的尺寸,为光电极插入提供便利。为进一步提高布局的合理性和插入的便利性,本实施方式优选为:至少一个记录触点111沿垂直于插入方向依次排列在插入端11的插入侧11A:如图2所示,三个记录触点111沿垂直于插入方向依次排列在插入端11的插入侧11A;至少一个发光部件20沿插入方向依次排列在插入端11的插入侧11A。As another embodiment of the present invention, at least one recording contact 111 and at least one light-emitting component 20 are sequentially arranged on the insertion side 11A of the insertion end 11 along the insertion direction, so as to facilitate the recording contact 111, the light-emitting component 20, and the signal collection line 13 And while the power line 16 is reasonably laid out, the size of the insertion end of the photoelectrode is reduced to facilitate the insertion of the photoelectrode. In order to further improve the rationality of the layout and the convenience of insertion, it is preferred in this embodiment that at least one recording contact 111 is arranged in sequence on the insertion side 11A of the insertion end 11 along the direction perpendicular to the insertion direction: as shown in Figure 2, three recording contacts 111 The contacts 111 are sequentially arranged on the insertion side 11A of the insertion end 11 along the direction perpendicular to the insertion direction; at least one light-emitting component 20 is sequentially arranged on the insertion side 11A of the insertion end 11 along the insertion direction.
作为本发明的另一种实施方式,一个记录触点111与一个发光部件20沿插入方向依次排列在插入端11的插入侧11A;其中,一个记录触点111产生电刺激、记录电刺激产生的神经信号以及记录一个发光部件20光刺激产生的神经信号。本实施方式是一个记录触点111对应一个发光部件20的一对一模式,满足光电极电刺激/光刺激记录的同时,最大程度地节省了材料,集成度高,提高了光电极使用的便利性。As another embodiment of the present invention, a recording contact 111 and a light-emitting component 20 are arranged sequentially on the insertion side 11A of the insertion end 11 along the insertion direction; Neural signals and recording of neural signals generated by light stimulation of a light-emitting component 20 . This embodiment is a one-to-one mode in which one recording contact 111 corresponds to one light-emitting component 20, which satisfies photoelectrode electrical stimulation/photostimulation recording, and at the same time saves materials to the greatest extent, has a high degree of integration, and improves the convenience of photoelectrode use sex.
作为本发明的另一种实施方式,若干个记录触点111与至少一个发光部件20沿插入方向依次排列在插入端11的插入侧11A;其中,若干个记录触点111产生电刺激、记录电刺激产生的神经信号以及记录至少一个发光部件20光刺激产生的神经信号。本实施方式是若干个记录触点111对应一个发光部件20的多对一模式或若干个记录触点111对应若干个发光部件20的多对多模式:本实施方式的多对一的模式下,若干个记录触点111记录同一个发光部件20光刺激产生的神经信号,具体是指,若干个记录触点111从不同通道记录一个发光部件20的光刺激产生的神经信号,使得光电极具备多通道神经电信号差分记录和电刺激与光刺激的双模神经调控功能,多通道的记录,也提高了光刺激产生的神经信号采集的精确性;本实施方式的多对多的模式下,具体是指,若干个记录触点111分别发出电刺激、记录电刺激产生的神经信号的同时,也记录若干个发光部件20光刺激产生的神经信号,为记录多种不同波长光刺激产生的神经信号提供了一种方式,进一步提高了光刺激记录的准确性。As another embodiment of the present invention, several recording contacts 111 and at least one light-emitting component 20 are arranged sequentially on the insertion side 11A of the insertion end 11 along the insertion direction; wherein, several recording contacts 111 generate electrical stimulation, recording electrical Stimulating and recording the neural signals generated by the at least one light-emitting component 20 . This embodiment is a many-to-one mode in which several recording contacts 111 correspond to one light-emitting component 20 or a many-to-many mode in which several recording contacts 111 correspond to several light-emitting components 20: in the many-to-one mode of this embodiment, Several recording contacts 111 record the nerve signals generated by the light stimulation of the same light-emitting component 20, specifically, several recording contacts 111 record the nerve signals generated by the light-stimulation of one light-emitting component 20 from different channels, so that the photoelectrode has multiple Differential recording of channel nerve electrical signals and dual-mode neuromodulation function of electrical stimulation and light stimulation, multi-channel recording also improves the accuracy of nerve signal acquisition generated by light stimulation; in the many-to-many mode of this embodiment, the specific It means that when several recording contacts 111 respectively send out electrical stimulation and record the nerve signals generated by electrical stimulation, they also record the nerve signals generated by light stimulation of several light-emitting components 20, in order to record the nerve signals generated by light stimulation of a variety of different wavelengths. Provides a way to further improve the accuracy of photostimulation recordings.
作为本发明的另一种实施方式,若干个记录触点111与至少一个发光部件20沿插入方向依次排列在插入端11的插入侧11A;其中,若干个记录触点111包括产生电刺激和记录电刺激产生的神经信号的第一记录触点以及记录至少一个光刺激产生的神经信号的第二记录触点。将仅用于产生电刺激和记录电刺激产生的神经信号的第一记录触点和仅用于记录至少一个光刺激产生的神经信号的第二记录触点划分开来,提高了光刺激/电刺激记录的精确性。As another embodiment of the present invention, several recording contacts 111 and at least one light-emitting component 20 are sequentially arranged on the insertion side 11A of the insertion end 11 along the insertion direction; wherein, several recording contacts 111 include generating electrical stimulation and recording A first recording contact for neural signals generated by electrical stimulation and a second recording contact for recording at least one neural signal generated by optical stimulation. Dividing the first recording contact only for generating electrical stimulation and recording the neural signal generated by electrical stimulation from the second recording contact only for recording at least one neural signal generated by optical stimulation improves the optical stimulation/electrical Accuracy of stimulus recording.
实施例2Example 2
在实施例1的基础上,本实施例提供一种实施例1所述植入式神经刺激与记录的光电极的制作方法,其特征在于,包括以下步骤:On the basis of Embodiment 1, this embodiment provides a method for manufacturing an implantable nerve stimulation and recording photoelectrode described in Embodiment 1, which is characterized in that it includes the following steps:
S1,在聚酰亚胺制成的下基板上方涂布一层环氧树脂胶,在环氧树脂胶上方贴合表面贴有一层光致抗蚀剂的铜箔,形成屏蔽层;S1, apply a layer of epoxy resin glue on the lower substrate made of polyimide, and attach a layer of copper foil with photoresist on the surface of the epoxy resin glue to form a shielding layer;
S2,利用掩膜进行紫外线曝光,曝光区域是光电极屏蔽层的形状,曝光之后用显影液将未曝光区域去除;S2, using a mask for ultraviolet exposure, the exposed area is the shape of the photoelectrode shielding layer, and the unexposed area is removed with a developer after exposure;
S3,利用刻蚀液将裸露的铜箔去除,再利用强碱溶液将光致抗蚀剂去除,让屏蔽层上方完全露出;S3, using an etching solution to remove the exposed copper foil, and then using a strong alkali solution to remove the photoresist, so that the top of the shielding layer is completely exposed;
S4,在屏蔽层上方涂布环氧树脂胶后,在环氧树胶上方贴合聚酰亚胺制成的上基板层,从而形成光电极的支承部件;S4, after coating epoxy resin glue on the top of the shielding layer, attaching an upper substrate layer made of polyimide on the top of the epoxy glue, thereby forming a supporting part of the photoelectrode;
S5,在光电极的支承部件上下表面贴合铜箔;S5, attaching copper foil to the upper and lower surfaces of the supporting part of the photoelectrode;
S7,对光电极的支承部件进行钻孔处理,形成第一通孔和第二通孔;S7, performing drilling processing on the supporting part of the photoelectrode to form a first through hole and a second through hole;
S6,用电镀工艺分别在第一通孔和第二通孔的孔壁上镀一层铜;S6, using an electroplating process to plate a layer of copper on the walls of the first through hole and the second through hole respectively;
S7,按照步骤S1、步骤S2、步骤S3的方法进行图形转移,在光电极支承部件的上表面和下表面形成所设计的信号采集线、电源线、第一焊盘以及第二焊盘;S7, performing pattern transfer according to the methods of step S1, step S2, and step S3, and forming designed signal collection lines, power lines, first pads, and second pads on the upper surface and the lower surface of the photoelectrode support member;
S8,利用激光切割技术围绕信号采集线、电源线、第一焊盘以及第二焊盘将上基板层和下基板层共同切割成光电极支承部件的形状,将发光部件焊接在支承部件插入端的第二通孔;形成植入式神经刺激与记录的光电极。S8, using laser cutting technology to cut the upper substrate layer and the lower substrate layer into the shape of the photoelectrode supporting part around the signal collection line, the power line, the first pad and the second pad, and welding the light emitting part to the insertion end of the supporting part The second through hole; forms the photoelectrode for implantable nerve stimulation and recording.
其中,显影液的主要成分为碳酸钠。刻蚀液的主要成分为双氧水和盐酸。强碱溶液的主要成分为氢氧化钠。第一焊盘14、第二焊盘15、信号采集线13以及电源线16采用镀金铜材料,第一通孔17和第二通孔18的孔壁上镀一层铜,从而实现了支撑部件10上基板层、下基板层以及屏蔽层之间的记录触点111与第一焊盘14的电连接、发光部件20与第二焊盘15之间电连接。通过无铅低温锡膏将发光部件20焊接在支承部件10插入端11的第二通孔18。Wherein, the main component of developing solution is sodium carbonate. The main components of the etching solution are hydrogen peroxide and hydrochloric acid. The main component of strong alkaline solution is sodium hydroxide. The first pad 14, the second pad 15, the signal collection line 13, and the power line 16 are made of gold-plated copper material, and a layer of copper is plated on the walls of the first through hole 17 and the second through hole 18, thereby realizing the support component 10 The electrical connection between the recording contact 111 between the upper substrate layer, the lower substrate layer and the shielding layer and the first pad 14 , and the electrical connection between the light emitting component 20 and the second pad 15 . The light-emitting component 20 is soldered to the second through hole 18 of the insertion end 11 of the supporting component 10 by lead-free low-temperature solder paste.
本发明实施方式提供了一种植入式神经刺激与记录的光电极的制作方法,该方法制成的植入式神经刺激与记录的光电极为柔性光电极,可弯折,既适用于表皮、也适用于深部组织,光电极可自由的在神经组织中放置,提高了光电极使用的灵活性,拓广了光电极的使用范围。The embodiment of the present invention provides a method for manufacturing an implantable photoelectrode for nerve stimulation and recording. The photoelectrode for implantable nerve stimulation and recording produced by the method is flexible and bendable, and is suitable for both epidermis and It is suitable for deep tissues, and the photoelectrode can be freely placed in the nerve tissue, which improves the flexibility of the photoelectrode and broadens the application range of the photoelectrode.
尽管本发明的实施方案已公开如上,但其并不仅仅限于说明书和实施方式中所列运用。它完全可以被适用于各种适合本发明的领域。对于熟悉本领域的人员而言可容易地实现另外的修改。因此在不背离权利要求及等同范围所限定的一般概念下,本发明并不限于特定的细节和这里示出与描述的图例。Although embodiments of the present invention have been disclosed above, it is not limited to the applications set forth in the specification and examples. It can be fully applied to various fields suitable for the present invention. Additional modifications can be readily effected by those skilled in the art. Therefore, the invention should not be limited to the specific details and examples shown and described herein, without departing from the general concept defined by the claims and their equivalents.
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