CN105460939A - Hollow silicon core and silicon core assembly thereof - Google Patents
Hollow silicon core and silicon core assembly thereof Download PDFInfo
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- CN105460939A CN105460939A CN201610076564.2A CN201610076564A CN105460939A CN 105460939 A CN105460939 A CN 105460939A CN 201610076564 A CN201610076564 A CN 201610076564A CN 105460939 A CN105460939 A CN 105460939A
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- silicon
- silicon core
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
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Abstract
The invention discloses a hollow silicon core and a silicon core assembly thereof and relates to a silicon core used in the producing process of polycrystalline silicon. The hollow silicon core is formed by splicing two or more special-shaped vertical silicon plates (2). When the hollow silicon core formed by combining the special-shaped silicon plates and the silicon core assembly of the hollow silicon core are adopted, the hollow silicon core large in drawing difficulty does not need to be directly drawn, only the special-shaped silicon plates need to be drawn in advance, and then the silicon plates are combined into the silicon core in the needed cross section shape. The hollow silicon core and the silicon core assembly thereof have the advantages that drawing difficulty is low, crystallization efficiency is high and using cost is low, and the hollow silicon core and the silicon core assembly thereof are particularly suitable for being used and popularized in the field of polycrystalline silicon.
Description
[technical field]
The present invention relates to the silicon core used in a kind of polysilicon production process, relate to a kind of hollow silicon core and silicon core assembly thereof specifically.
[background technology]
Along with the development of photovoltaic (PV) industry, the usage quantity of polysilicon is increasing gradually.When producing polysilicon, majority utilizes reduction furnace to carry out polysilicon also original production, namely by the surface deposition polysilicon of chemical vapor deposition (CVD) method at silicon core.In the prior art, first three filled circles silicon cores or square silicon core are overlapped to form " Π " character form structure, then in reduction furnace, carry out reduction reaction.Described reduction reaction is carried out in an airtight reduction furnace.In reduction furnace, be first overlapped to form the loop line of some " Π " character form structure with silicon core, namely carry out " bridging ".Each loop line is by two electrodes, and two electrodes connect the positive and negative electrode of direct supply respectively.
Two perpendicular silicon cores and a horizontal silicon core composition.Two of loop line perpendicular silicon cores are connected on furnace bottom for convenience of description respectively, in the present invention this silicon core molectron overlapped according to " Π " character form structure are called " silicon core assembly ".
One or more silicon core assembly is placed in reduction furnace, utilizes direct current to heat silicon core, add and hanker each and organize the silicon core assembly that overlapped and be namely equivalent to a large resistance.Then in airtight reduction furnace, pass into hydrogen and trichlorosilane, start the deposition of carrying out polysilicon.In reduction furnace, polysilicon can be deposited on the surface formation polycrystalline silicon rod of silicon core gradually.Polycrystalline silicon rod recycles Czochralski furnace and is drawn into silicon single crystal rod after fragmentation.
Prior art is when overlapping silicon core assembly, and normally used silicon core is the filled circles silicon core of diameter about 8mm or the square silicon core of 10 × 10mm that formed through Linear cut with silicon ingot.In reduction reaction process, the silicon of generation is constantly deposited on silicon wicking surface, and the surface-area of silicon core can be increasing, and reactant gas molecules also can increase the collision opportunity of depositional plane (silicon wicking surface) and quantity thereupon.When the sedimentation rate of unit surface is constant, the polysilicon amount that surface-area more then deposits also the more.Therefore overlap silicon core assembly time, use the diameter of silicon core larger, the growth efficiency of polysilicon is also higher.Comparatively speaking, production efficiency when using large silicon core not only can improve polycrystalline reduction, also can reduce production cost simultaneously.
For this reason, the applicant also once attempted to adopt large diameter solid silicon core.Large diameter solid silicon core no doubt can improve the productivity of reduction process, but the drawing of major diameter silicon core exists the low problem of production efficiency also.The diameter of silicon core is larger, and it draws also difficulty all the more, and the radical once drawn in stove is also restricted.In addition, the problems such as difficulty is large are punctured after adopting large diameter solid silicon core also to there is inconvenience transport, overlap joint.
In order to improve the production efficiency of polysilicon, GT Solar Inc. of the U.S. its patent No. be 200780015406.5, name is called in the patent documentation of " polysilicon deposition improved in CVD (Chemical Vapor Deposition) reactor " that disclosing a kind of cross section is circular hollow silicon core, substitute traditional thin rod by the tubular silicon filament that diameter is 50 millimeters, thus improve output.The full content of this file is used as reference in this patent.
Although adopt this hollow silicon core of above-mentioned patent can solve subproblem of the prior art, because the drawing of hollow silicon core has difficulties, therefore have not yet to see extensive enforcement.
For the problems referred to above, the applicant once submitted to a in first patent application on January 6th, 2016, application number is 201610002833.0, and that application discloses a kind of technical scheme utilizing tabular or cylindric silicon strip composition hollow silicon core and subassembly thereof, the present invention is supplementing this earlier application.
[summary of the invention]
For the drawing of silicon plate, draw hollow silicon strip more difficult, but the silicon plate drawing special crosssection is not difficult.Accordingly, for above-mentioned the deficiencies in the prior art, the invention provides a kind of hollow silicon core of being combined by shaped silicon plate and silicon core assembly thereof.
The present invention, without the need to drawing hollow silicon core in advance, only need draw out shaped silicon plate, then shaped silicon plate is combined into the hollow silicon core that suitable geometrical shape can obtain desired shape.This silicon core has larger circumferential size, solves and draws the difficulty that faces of hollow silicon core, thus improve polysilicon drawing efficiency, reduce production cost.
Technical scheme of the present invention is as follows:
A kind of hollow silicon core, this silicon core is spliced by the silicon plate of more than two or two, and this hollow silicon core is put together by the shaped silicon plate of more than two or two.
Described abnormity, refers to that the cross section of silicon plate is non-planar, such as " L " shape or circular arc, and so-called its two edge lengths of " L " shape not necessarily identical and angle also differ and be decided to be 90 degree, both can adjust according to the shape of required splicing.
Described splitting mode can be interconnective, or leave gap each other, and this gap is made up gradually in crystallisation process.
Described its shape of cross section of the hollow silicon core be spliced is hollow Polygons or hollow circle.
Described Polygons can be equilateral triangle, square, rectangle, parallelogram, rhombus, regular pentagon or regular hexagon.
Present invention also offers a kind of silicon core assembly, this silicon core assembly is made up of silicon core and upper locking mechanism and lower locking mechanism, and described silicon core is hollow silicon core, and this hollow silicon core is put together by the shaped silicon plate of more than two or two.
Described lower locking mechanism can be made up of a permanent seat, the peripheral shape of permanent seat and the shape of cross section of hollow silicon core match, some perpendicular silicon plates are vertically placed along the periphery of permanent seat, and the outside of perpendicular silicon plate is provided with permanent sleeve, is fixed on permanent seat the lower end of perpendicular silicon plate.
The bottom of above-mentioned permanent seat can be outward extending boss, makes permanent seat be step-like, and the upper surface of boss forms the confined planes of perpendicular silicon plate lower end.
The peripheral shape of described permanent sleeve can be closed with the matching form of hollow silicon core, and also can be circular, the periphery of permanent sleeve be provided with puller bolt, will erect silicon plate and compress.
Described lower locking mechanism is permanent seat, and offer silicon plate jack at the upper surface of permanent seat, the shape of cross section of its shape and hollow silicon core matches.
Described lower locking mechanism comprises an additional sheet material, and sheet material offers silicon plate jack, be shrink-fit between silicon plate jack and silicon core, additional sheet material is fixed on permanent seat.
Described lower locking mechanism can be permanent seat, perpendicular silicon plate inserts in permanent seat, the periphery of permanent seat arranges some through locking holes to silicon plate jack, be fixed by puller bolt, or on the periphery of permanent seat, be socketed sheath, sheath is offered some locking holes, and perpendicular silicon plate is fixed through the perforation on locking hole and permanent seat side face by puller bolt.
Described upper locking mechanism is the one block of horizontal silicon plate being arranged on silicon plate upper end, and arrange hole or the groove of shape and hollow silicon core mating shapes at the lower surface of horizontal silicon plate, both adopt shrink-fit, and two groups of hollow silicon core connect and fix by horizontal silicon plate.
Technical scheme of the present invention is adopted to have following beneficial effect:
Adopt the silicon core that combined by shaped silicon plate of the present invention and silicon core assembly thereof, without the need to directly drawing the larger hollow silicon core of difficulty, only need draw shaped silicon plate in advance, being then combined into the silicon core of required shape of cross section by silicon plate.The present invention has and draws the features such as difficulty is low, crystalline rate is high and use cost is low, is particularly suitable in field polysilicon spread and application.
[accompanying drawing explanation]
Fig. 1 is the one-piece construction schematic diagram of silicon core assembly of the present invention;
Fig. 2 is the plan structure schematic diagram of Fig. 1 in the present invention;
Fig. 3 is the structural representation of permanent seat in the present invention;
Fig. 4 is the axial sectional structure schematic diagram of sheath in the present invention;
Fig. 5 is the structural representation of upper locking mechanism in the present invention;
The corresponding relation of the label in accompanying drawing and component title is:
1 horizontal silicon plate, the perpendicular silicon plate of 2 abnormity, 3 permanent sleeves, 4 puller bolts, 5 permanent seats, 6 silicon plate jacks, 7 silicon plate perforation, 8 sheaths, 9 locking holes, 10 silicon board grooves.
[embodiment]
Below by way of specific embodiment, the present invention will be further described.
Fig. 1 is an embodiment of silicon core assembly of the present invention, and it illustrates the one-piece construction of silicon core assembly.Fig. 2 is the plan structure schematic diagram of Fig. 1.This silicon core assembly comprises horizontal silicon plate 1, abnormity perpendicular silicon plate 2, permanent sleeve 3, puller bolt 4 and permanent seat 5.Two abnormity erect silicon plate 2 and are combined into hollow silicon core, the lower locking mechanism of permanent sleeve 3, puller bolt 4 and permanent seat 5 construction components, the upper locking mechanism of horizontal silicon plate 1 construction components.
As shown in Figure 2, hollow silicon core of the present invention is erected silicon plate 2 by two abnormity and is spliced, and the angle on perpendicular silicon plate 2 two limits of abnormity is 90 degree.By means of permanent sleeve 3 and puller bolt 4, the bottom of hollow silicon core is locked on permanent seat 5.
The shape of cross section of hollow silicon core is different, and the abnormity used erects the number of degrees of silicon plate 2 both sides angle also can be different.This angle can be greater than 90 degree, also can be less than 90 degree.The width on perpendicular silicon plate 2 both sides of abnormity can be the same or different.
The hollow silicon core combined by shaped silicon plate, can be end to end between silicon plate, also can leave gap each other, and this gap can be made up in the crystallisation process of silicon plate.
The hollow silicon core combined by shaped silicon plate, its shape of cross section of the hollow silicon core be spliced can be hollow Polygons.Described Polygons is can be equilateral triangle, square, rectangle, parallelogram or rhombus.
Also can replace shaped silicon plate with the silicon plate of circular arc, can be combined into cross section by polylith circular arc silicon plate is circular hollow silicon core.
Fig. 3 is the structural representation of permanent seat 5 in the present invention, and Fig. 4 is the axial sectional structure schematic diagram of sheath 8 in the present invention.
As shown in Figure 3, lower locking mechanism of the present invention comprises permanent seat 5, at some grooves that the upper surface of permanent seat 5 is offered, form silicon plate jack 6, its shape matches with the shape of cross section of combination silicon core, silicon plate is inserted in silicon plate jack 6, by wringing fit, the bottom of silicon plate 2 is fixed on permanent seat 5.Abnormity or circular arc are erected silicon plate 2 and also vertically can be placed along the periphery of permanent seat 5, the outside of the perpendicular silicon plate 2 of abnormity is provided with permanent sleeve 3, by means of permanent sleeve 3, the lower end of perpendicular silicon plate 2 is fixed on permanent seat 5, the peripheral shape of described permanent sleeve 3 can be closed with the matching form of hollow silicon core, also can be circular, the periphery of permanent sleeve 3 is provided with puller bolt 4, is compressed by perpendicular silicon plate 2.
The bottom of described permanent seat 5 can be outward extending boss, makes permanent seat 5 in step-like, and the upper surface of boss forms the confined planes of silicon plate lower end.
Described lower locking mechanism comprises an additional sheet material, and sheet material offers silicon plate jack 6, be shrink-fit between silicon plate jack 6 and silicon core, additional sheet material is fixed on permanent seat 5.
Also some through locking holes 9 to silicon plate jack 6 can be set on the periphery of described permanent seat 5, by puller bolt 4, the perpendicular silicon plate 2 inserting permanent seat 5 is fixed, or on the periphery of permanent seat 5, be socketed sheath 8, arrange on sheath 8 and bore a hole 7 with the silicon plate of hollow silicon core mating shapes, the periphery of sheath 8 arranges some locking holes 9, the lower end of the perpendicular silicon plate 2 of abnormity is inserted in silicon plate jack 6 through the silicon plate perforation 7 that sheath 8 is arranged, abnormity is erected silicon plate 2 through the perforation on locking hole 9 and permanent seat 5 side face and fixes by puller bolt 4, its middle punch can be unthreaded hole also can be a hole, some locking holes 9 that sheath 8 periphery is arranged can be unthreaded holes also can be a hole, when the locking hole 9 that permanent seat 5 is arranged is unthreaded hole, some locking holes 9 that sheath 8 periphery is arranged are silk hole, in like manner, when the locking hole 9 that permanent seat 5 is arranged is silk hole, some locking holes 9 that sheath 8 periphery is arranged are unthreaded hole.
Fig. 5 is the structural representation of upper locking mechanism in the present invention.Described upper locking mechanism is the horizontal silicon plate 1 being arranged on perpendicular silicon plate 2 upper end, the silicon board groove 10 of shape and hollow silicon core mating shapes is set at the lower surface of horizontal silicon plate 1, both adopt shrink-fit, to be connected the upper end of two groups of hollow silicon core and fix by means of horizontal silicon plate 1.
Above embodiment and accompanying drawing thereof just describe the present invention by means of specific " L " type silicon plate of one.Obviously, should its two edge lengths of " L " shape not necessarily identical and angle also differ and be decided to be 90 degree, both all can adjust according to the shape of required splicing; The abnormity adopted erects silicon plate except " L " tee section, can also adopt the perpendicular silicon plate of circular section or other shapes.The hollow silicon core that its split goes out can be various shape, such as various Polygons or circle etc.Locking mechanism up and down in silicon core assembly can make corresponding adjustment according to the shape of silicon core, and this is apparent to those skilled in the art, does not repeat them here.
Hollow silicon core of the present invention and assembly thereof, can obtain larger crystal surface with less silicon material and amass, thus accelerate the formation of polysilicon.Its advantage is:
1, draw simple, easy to operate.
2, production efficiency is high, and later stage use cost is low.
Claims (13)
1. a hollow silicon core, is characterized in that: this hollow silicon core is erected silicon plate (2) by the abnormity of more than two or two and is put together.
2. hollow silicon core as claimed in claim 1, is characterized in that: described abnormity erects the cross section of silicon plate (2) for " L " shape or circular arc, and its splitting mode is interconnective, or leaves gap each other, and this gap is made up gradually in crystallisation process.
3. hollow silicon core as claimed in claim 1, is characterized in that: its shape of cross section of the hollow silicon core be spliced is hollow Polygons or hollow circle.
4. hollow silicon core as claimed in claim 3, is characterized in that: described Polygons is equilateral triangle, square, rectangle, parallelogram, rhombus, regular pentagon or regular hexagon.
5. a silicon core assembly, this silicon core assembly is made up of silicon core and upper locking mechanism and lower locking mechanism, it is characterized in that: described silicon core adopts hollow silicon core according to claim 1.
6. silicon core assembly as claimed in claim 5, it is characterized in that: described lower locking mechanism is made up of a permanent seat (5), the peripheral shape of permanent seat (5) and the shape of cross section of hollow silicon core match, some perpendicular silicon plates (2) are vertically placed along the periphery of permanent seat (5), the outside of perpendicular silicon plate (2) is provided with permanent sleeve (3), is fixed on permanent seat (5) lower end of erecting silicon plate (2).
7. silicon core assembly as claimed in claim 6, is characterized in that: the bottom of described permanent seat (5) is outward extending boss, makes permanent seat (5) in step-like, and the upper surface of boss forms the confined planes of perpendicular silicon plate (2) lower end.
8. silicon core assembly as claimed in claim 6, is characterized in that: the described peripheral shape of permanent sleeve (3) and the matching form of hollow silicon core close.
9. silicon core assembly as claimed in claim 6, is characterized in that: the peripheral shape of described permanent sleeve (3) is for circular, and the periphery of permanent sleeve (3) is provided with puller bolt (4), will erect silicon plate (2) and compress.
10. silicon core assembly as claimed in claim 5, it is characterized in that: described lower locking mechanism comprises permanent seat (5), offer silicon plate jack (6) at the upper surface of permanent seat (5), the shape of cross section of its shape and hollow silicon core matches.
11. silicon core assemblies as claimed in claim 5, it is characterized in that: described lower locking mechanism comprises an additional sheet material, sheet material offers silicon plate jack (6), be shrink-fit between silicon plate jack (6) and silicon core, additional sheet material is fixed on permanent seat (5).
12. silicon core assemblies as claimed in claim 5, it is characterized in that: described lower locking mechanism is permanent seat (5), perpendicular silicon plate (2) inserts in the silicon plate jack (6) on permanent seat (5), the periphery of permanent seat (5) arranges some through locking holes (9) to silicon plate jack (6), be fixed by puller bolt (4), or on the periphery of permanent seat (5), be socketed sheath (8), the periphery of sheath (8) arranges some locking holes (9), arrange on sheath (8) and bore a hole (7) with the silicon plate of hollow silicon core mating shapes, puller bolt (4) will erect silicon plate (2) through the perforation on locking hole (9) and permanent seat (5) side face and fix.
13. silicon core assemblies as described in claim 5 ~ 12, it is characterized in that: described upper locking mechanism is the one piece of horizontal silicon plate (1) being arranged on silicon plate upper end, hole or the silicon board groove (10) of shape and hollow silicon core mating shapes are set at the lower surface of horizontal silicon plate (1), both adopt shrink-fit, and two groups of hollow silicon core connect and fix by horizontal silicon plate (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610076564.2A CN105460939B (en) | 2016-02-04 | 2016-02-04 | A kind of hollow silicon core and its silicon core assembly |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610076564.2A CN105460939B (en) | 2016-02-04 | 2016-02-04 | A kind of hollow silicon core and its silicon core assembly |
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| CN105460939A true CN105460939A (en) | 2016-04-06 |
| CN105460939B CN105460939B (en) | 2018-02-02 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101323449A (en) * | 2008-07-04 | 2008-12-17 | 上海通用硅晶体材料有限公司 | Method and apparatus for enhancing polysilicon production |
| CN201372204Y (en) * | 2009-03-13 | 2009-12-30 | 上海森和投资有限公司 | Silicon-core clamping device for polysilicon reducing furnace |
| CN201665729U (en) * | 2009-12-31 | 2010-12-08 | 江苏中能硅业科技发展有限公司 | Device for pulling thin silicon shell with curved surface |
| CN103160917A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Drawing die plate for hollow silicon core |
| CN103160926A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Method for growing polycrystalline silicon by virtue of hollow silicon core |
| CN103159216A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Clamping holder for hollow silicon core |
| CN104108718A (en) * | 2014-08-02 | 2014-10-22 | 徐泽庆 | Method and device for quickly depositing polysilicon |
| CN204298509U (en) * | 2014-12-12 | 2015-04-29 | 新特能源股份有限公司 | A kind of silicon core material stationary installation |
-
2016
- 2016-02-04 CN CN201610076564.2A patent/CN105460939B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101323449A (en) * | 2008-07-04 | 2008-12-17 | 上海通用硅晶体材料有限公司 | Method and apparatus for enhancing polysilicon production |
| CN201372204Y (en) * | 2009-03-13 | 2009-12-30 | 上海森和投资有限公司 | Silicon-core clamping device for polysilicon reducing furnace |
| CN201665729U (en) * | 2009-12-31 | 2010-12-08 | 江苏中能硅业科技发展有限公司 | Device for pulling thin silicon shell with curved surface |
| CN103160917A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Drawing die plate for hollow silicon core |
| CN103160926A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Method for growing polycrystalline silicon by virtue of hollow silicon core |
| CN103159216A (en) * | 2011-12-09 | 2013-06-19 | 洛阳金诺机械工程有限公司 | Clamping holder for hollow silicon core |
| CN104108718A (en) * | 2014-08-02 | 2014-10-22 | 徐泽庆 | Method and device for quickly depositing polysilicon |
| CN204298509U (en) * | 2014-12-12 | 2015-04-29 | 新特能源股份有限公司 | A kind of silicon core material stationary installation |
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