CN105371833A - Disc multi-ring outer S-shaped flexible beam resonator gyro and preparation method thereof - Google Patents

Abstract

The invention provides a disc multi-ring outer S-shaped flexible beam resonator and its preparation method, comprising a base; rings, multiple S-shaped flexible beams and multiple groups of spokes, wherein: the outermost ring is connected to the base, the concentric rings are connected through multiple spokes, and the two ends of the multiple S-shaped flexible beams are respectively connected to the most The inner side of a peripheral ring is connected to the outer side of the largest concentric ring; a group of electrodes distributed on the inner edge of the S-shaped flexible beam resonator outside the multi-rings of the disk, and each electrode is connected to the base respectively. The invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description

A kind of S-shaped flexible beam resonant gyroscope with multi-ring outer disk and its preparation method

technical field

The invention relates to a gyroscope in the field of micro-electromechanical technology, in particular to a resonant gyroscope with S-shaped flexible beams outside a multi-ring disk and a preparation method thereof.

Background technique

Gyroscope is an inertial device that can sensitively detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and integration are greatly improved compared with traditional technologies. Therefore, MEMS-level micro-gyroscopes have become an important direction in the extensive research and application development of MEMS technology in recent years.

With the application and development of MEMS gyroscopes in navigation systems, the hemispherical resonant gyroscope developed by foreign scientists in 1994 has higher performance. With the help of the study of this hemispherical resonator gyroscope, the researchers have a better understanding of the design of MEMS resonators with high Q value and symmetrical structure. However, since the rod part of the early rod-structure resonators needs to be assembled on the micromechanical mechanism, higher dynamic loads and imprecise connections at the joints will lead to larger deflection of the hemispherical resonator in the long run. Therefore, I thought of designing a MEMS gyroscope with good symmetry, small and compact planar structure, that is, S-shaped flexible beam resonant gyroscope with multi-ring outer disk.

Contents of the invention

The purpose of the present invention is to provide a structure of S-shaped flexible beam resonant gyroscope with multi-ring outer disk, which has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

According to one aspect of the present invention, there is provided a S-shaped flexible beam resonant gyro with a multi-ring outer disk, comprising:

a base;

A disc multi-ring external S-shaped flexible beam resonator, including the outermost ring, multiple concentric rings, multiple S-shaped flexible beams and multiple groups of spokes, wherein: the outermost ring is connected to the base, The concentric rings are connected by a plurality of spokes, and the two ends of the multiple S-shaped flexible beams are respectively connected to the inside of the outermost ring and the outside of the largest ring of the concentric ring;

A group of electrodes distributed on the inner edge of the S-shaped flexible beam resonator outside the disk multi-ring, and each electrode is respectively connected to the base.

Preferably, the center of the base is a cylindrical hollow structure;

There are protruding parts on the base, and the protruding parts include n discrete fan ring parts on the peripheral edges and n discrete fan ring parts in the center, n≥8 and n is an even number, wherein: n discrete fan ring parts on the peripheral edges The fan ring parts are distributed at equal intervals and the width of each fan ring part is equal; the n discrete fan ring parts are distributed at equal intervals and the width of each fan ring part is equal; the n peripheral edge discrete fan ring parts The central axis coincides with the central axis of the n central discrete fan ring parts; the n peripheral edge discrete fan ring parts and the n central discrete fan ring parts are all equal in height;

The outermost edge of the base is n equally spaced electrode sheets, wherein: the n electrode sheets are in one-to-one correspondence with the n central discrete fan ring parts, and the n electrode sheets are respectively corresponding to the n central discrete fan ring parts. The fan ring parts are connected by wires, and the wires respectively pass through the gaps of n discrete fan ring parts on the outer edge; the width and thickness of the n electrode sheets are equal;

A lead wire will be drawn from the central cylinder on the base for grounding or zero potential.

More preferably, a layer of conductive thin film is respectively provided on the n discrete sector ring parts at the peripheral edges and the n discrete sector ring parts at the center, and then the substrate is bonded to the single crystal silicon wafer.

Preferably, the material of the substrate is fused silica or heat-resistant glass or single crystal silicon.

Preferably, the center of the disc multi-ring outer S-shaped flexible beam resonator is a cylindrical hollow structure;

The central axes of the plurality of concentric rings coincide with the central axis of the outermost ring; the widths of the plurality of concentric rings are all equal; the widths of the gaps between the concentric rings are all equal;

Each set of spokes distributed between the concentric rings is evenly spaced; the number of each set of spokes is m, m≥8 and m is an even number; the interval angle of each set of spokes is 360°/m; the width of each spoke is equal ;

In order to improve the sensitivity of the disc multi-ring resonator, a plurality of S-shaped flexible beams are added between the outermost ring and the largest ring of the concentric rings, and the number of the S-shaped flexible beams is n. n≥8 and n is an even number, n S-shaped flexible beams are equally spaced, and the centers of the n S-shaped flexible beams are located on the same circumference, and the n S-shaped flexible beams are located on the same level as the outermost ring.

More preferably, each of the S-shaped flexible beams is symmetrical to the center and is composed of two "crescent" structures, wherein: each "crescent" structure is composed of two semicircular arcs with equal diameters; The maximum distances between the two semicircular arcs are equal, and the center of each semicircular arc is collinear with the center of the S-shaped flexible beam.

Preferably, the material of the disk multi-ring outer S-shaped flexible beam resonator is single crystal silicon.

Preferably, the electrodes are n fan-shaped electrodes, n≥8 and n is an even number; the positions of the n electrodes correspond to the positions of the n S-shaped flexible beams one by one, and the central axis of each electrode corresponds to the The central axis of the S-shaped flexible beam resonator outside the disk multi-ring coincides; the gap distance between the n electrodes and the smallest ring in the concentric rings is equal;

The n electrodes include n/2 driving electrodes and n/2 detecting electrodes, and the n/2 driving electrodes and n/2 detecting electrodes are arranged at regular intervals along the inner edge of the S-shaped flexible beam resonator outside the disk multi-ring.

Preferably, the material of the electrodes is single crystal silicon.

According to another aspect of the present invention, there is provided a method for preparing a S-shaped flexible beam resonant gyroscope with a multi-ring outer disc, the method comprising the following steps:

(1) Using MEMS microfabrication technology, the substrate is etched to form grooves and protruding parts, and a conductive film is plated on the protruding parts;

(2) Using bonding technology, the substrate obtained in step (1) is bonded to the single crystal silicon wafer;

(3) Using Deep Reactive Ion Etching (DeepReactiveIonEtching) method, the monocrystalline silicon wafer is etched to obtain the multi-ring outer S-shaped flexible beam resonator and the electrodes on the inner edge of the disc, and finally obtain the multi-ring outer S of the disc. Shaped flexible beam resonant gyroscope.

Compared with the prior art, the present invention has the following advantages:

1. The processing steps are simple, using mature micro-machining technology and etching methods, which is conducive to mass production;

2. The S-shaped flexible beam resonant gyroscope with multi-ring outer disk has a high degree of symmetry, and the structure is relatively stable, impact-resistant, and has excellent performance;

3. The electrodes distributed on the inner edge of the S-shaped flexible beam resonator outside the disk multi-ring can improve the performance of the disk multi-ring compared to the electrodes distributed inside the concentric rings in the S-shaped flexible beam resonator outside the disk multi-ring. The Q value of the external S-shaped flexible beam resonant gyro is higher, so the response is more sensitive.

The invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

Fig. 1A is a top view of an S-shaped flexible beam resonator gyroscope with a multi-ring outer disc in an embodiment of the present invention;

Fig. 1B is a three-dimensional view of an S-shaped flexible beam resonator gyroscope with a multi-ring outer disc in an embodiment of the present invention;

Fig. 1C is a cross-sectional view of an S-shaped flexible beam resonator gyroscope with a multi-ring outer disc in an embodiment of the present invention;

Figure 2A is a top view of a substrate in an embodiment of the present invention;

Figure 2B is a three-dimensional view of the substrate in one embodiment of the present invention;

Figure 2C is a cross-sectional view of a substrate in an embodiment of the present invention;

Fig. 3A is a top view of an S-shaped flexible beam resonator outside a multi-ring disk in an embodiment of the present invention;

Fig. 3B is a three-dimensional view of the S-shaped flexible beam resonator outside the disk multi-ring in an embodiment of the present invention;

Fig. 3C is a front view of the S-shaped flexible beam resonator outside the disk multi-ring in an embodiment of the present invention;

4A is a top view of the relative position of the S-shaped flexible beam resonator outside the disk multi-ring and its inner edge electrode in an embodiment of the present invention;

4B is a three-dimensional view of the relative position of the S-shaped flexible beam resonator outside the disk multi-ring and its inner edge electrode in an embodiment of the present invention;

4C is a cross-sectional view of the relative position of the S-shaped flexible beam resonator outside the disk multi-ring and its inner edge electrode in an embodiment of the present invention;

Fig. 5A is the drive mode diagram of the four-antinode vibration made by the S-shaped flexible beam resonator outside the multi-ring disc when the multi-ring outer S-shaped flexible beam resonator of the disc is working;

Figure 5B is a detection mode diagram of the four-antinode vibration made by the S-shaped flexible beam resonator outside the multi-ring disc when the multi-ring outer S-shaped flexible beam resonator of the disc is working;

6A-6C are schematic diagrams of the manufacturing process flow of the substrate in an embodiment of the present invention;

Fig. 7A is a schematic diagram before the substrate and the single crystal silicon wafer are bonded in an embodiment of the present invention;

Fig. 7B is a schematic diagram of the bonding of the substrate and the single crystal silicon wafer in an embodiment of the present invention;

Fig. 8 shows that in an embodiment of the present invention, a deep reactive ion etching (DeepReactiveIonEtching) method is used to etch a single crystal silicon wafer, and finally obtain an S-shaped flexible beam resonant gyroscope with a multi-ring outer disk;

In the figure: a substrate 100 , an S-shaped flexible beam resonator 102 outside a multi-ring disk, and an electrode 104 .

detailed description

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

As shown in Fig. 1A, Fig. 1B, and Fig. 1C, a kind of S-shaped flexible beam resonant gyroscope with multi-ring outer disk is provided in this embodiment, including:

A substrate 100, including 8 discrete sector ring parts on the peripheral edge, 8 central discrete sector ring parts and 8 electrode sheets on the outermost edge;

A disc multi-ring external S-shaped flexible beam resonator 102, including the outermost ring, 8 S-shaped flexible beams, multiple concentric rings and multiple spokes, wherein: the outermost ring is connected to the base , multiple concentric rings are connected by multiple spokes, and the two ends of the eight S-shaped flexible beams are respectively connected to the inside of the outermost ring and the outside of the largest ring among the concentric rings;

Eight electrodes 104 are distributed on the inner edge of the S-shaped flexible beam resonator 102 outside the disk multi-ring, and each electrode 104 is connected to the substrate 100 respectively.

Descriptions about length, width, height, etc. involved in the embodiments are as follows:

As shown in Figure 2A, the center of the base 100 is a hollowed out structure, and the hollowed out part is _a cylinder whose bottom circle diameter is D1 (the value of D1 is ₂₀ μm ~ 2mm); are all W ₂ (the value of W ₂ is 10 μm to 100 μm); the widths of the eight central discrete fan ring parts are all W ₃ (the value of W ₃ is 10 μm to 50 μm), and the widths of the eight electrode sheets on the outermost edge are all It is W ₄ (the value of W ₄ is 10 μm to 100 μm).

As shown in FIG. 2C, the heights of the protrusions on the substrate 100 (i.e., the 8 discrete fan ring parts on the peripheral edge and the 8 central discrete fan ring parts) are all H ₁ (the value of H ₁ is 1 μm～ 100μm); a layer of conductive film is deposited on the protruding part, and the thickness of the conductive film is H ₂ (the value of H ₂ is 100nm～1μm); the thickness of the electrode sheet on the outermost edge is H ₃ (the value of H ₃ 100nm ~ 1μm).

As shown in Figure 3A, the center of the S-shaped flexible beam resonator 102 outside the multi-ring disk is a hollow structure, and the hollow part is a cylinder with a bottom diameter of D2 (the value of D2 is ₂₀ μm ~ _2mm ); each The width of the concentric rings is W ₅ (the value of W ₅ is 5 μm to 50 μm); the width of the gap between the concentric rings is W ₆ (the value of W ₆ is 5 μm to 50 μm); the width of each spoke is W ₇ (the value of W ₇ is 5 μm to 50 μm); the width of the outermost ring is W ₈ (the value of W ₈ is 20 μm to 200 μm); the 8 S-shaped flexible beams are centrally symmetrical, and each S The flexible beams are composed of two structures similar to the "crescent" shape, and each "crescent" structure is composed of two semicircular arcs, and the diameter of the semicircular arcs is D ₃ (the value of D ₃ is 10 μm to 100 μm ), the maximum distance between the two semicircular arcs is W ₉ (the value of W ₉ is 5 μm to 50 μm).

As shown in FIG. 4A, the eight electrodes 104 distributed on the inner edge of the S-shaped flexible beam resonator 102 outside the disk multi-ring have a width of W ₁ (the value of W ₁ is 10 μm to 50 μm), and each electrode 104 is connected to The gap distance between the smallest rings in the concentric rings is all W ₁₀ (the value of W ₁₀ is 5 μm to 50 μm).

As shown in Fig. 2A, Fig. 2B, and Fig. 2C, in this embodiment, the height H1 of the 8 discrete fan ring parts on the peripheral edge and the 8 central discrete fan ring parts protruding from the base ₁₀₀ is the same, The thickness _H2 of a layer of conductive film deposited on the protruding part is also the same, and the thickness H3 _of the outermost edge electrode sheet is also the same; the discrete fan ring parts of the 8 peripheral edges are equally spaced and the width of each fan ring part is W ₂ are the same; the 8 central discrete fan ring parts are equally spaced and the width W3 _of each fan ring part is the same.

As shown in Figure 3A, Figure 3B, and Figure 3C, in this embodiment, the center of the disc multi-ring outer S-shaped flexible beam resonator 102 is a cylindrical hollow structure, and the periphery is a plurality of concentric rings and 8 The S-shaped flexible beam and the outermost ring, wherein: the width of the outermost ring is _{W8 ;} the width W5 of each concentric ring is the same, and the gap width W6 between the concentric rings is the same _; There are 8 spokes evenly arranged between each concentric ring, and the width W ₇ of each spoke is the same; the diameter D ₃ of the semicircle in each "crescent" is the same, and the maximum distance between two semicircles is W ₉ is the same.

As shown in Figure 4A, Figure 4B, and Figure 4C, in this embodiment, eight electrodes 104 are evenly distributed along the inner edge of the S-shaped flexible beam resonator 102 outside the disk multi-ring, and the center of each electrode 104 The axes all coincide with the central axis of the S-shaped flexible beam resonator 102 outside the disk multi-ring, the width W _of each electrode 104 is all the same, and the gap between each electrode 104 and the smallest ring in the concentric ring The distance W ₁₀ is also the same.

In this embodiment, in the disc multi-ring outer S-shaped flexible beam resonator 102: the width W ₅ of each concentric ring, the gap width W ₆ between the concentric rings, the width W ₇ of each spoke, The angle difference θ between the spokes, the diameter D ₃ of the semicircle in each "crescent", and the maximum distance W ₉ between the two semicircles can be properly adjusted during processing to achieve ideal mode matching.

In this embodiment, the electrodes 104 on the inner edge of the S-shaped flexible beam resonator 102 outside the multi-ring disk are eight sector ring electrodes, which are respectively 4 drive electrodes and 4 detection electrodes, wherein: 4 drive electrodes and 4 detection electrodes The four detection electrodes are evenly spaced, the position interval between adjacent drive electrodes is 90°, the position interval between adjacent detection electrodes is 90°, and the position interval between adjacent drive electrodes and detection electrodes is 45°.

As shown in Fig. 5A and Fig. 5B, in this embodiment, the plane four-antinode vibration mode of the multi-ring outer S-shaped flexible beam resonator 102 of the disc is used as a reference vibration, and the disc multi-annular vibration mode is used as a reference vibration. The outer S-shaped flexible beam resonator 102 vibrates radially. The specific working principle is:

The disc multi-ring outer S-shaped flexible beam resonator 102 is partially grounded with the discrete fan rings on the peripheral edge of the substrate 100 to ensure that the same potential is 0V; using the disc multi-ring outer S-shaped flexible beam resonator 102 The plane four-antinode vibration mode of the disk is used as a reference vibration, and when the driving electrode in the electrode 104 of the inner edge of the S-shaped flexible beam resonator 102 outside the disk multi-ring is applied with an AC voltage, the radial vibration is generated by the inverse piezoelectric effect , thereby driving the multi-ring outer S-shaped flexible beam resonator 102 of the disk to vibrate; when there is an angular velocity input in the direction of the central axis of the multi-ring outer S-shaped flexible beam resonator 102 of the disk, under the action of the Coriolis force , the mode shape of the multi-ring outer S-shaped flexible beam resonator 102 of the disk changes to the detection mode, which drives the electrode 104 on the inner edge of the S-shaped flexible beam resonator 102 outside the multi-ring disk to vibrate, and the positive piezoelectric effect on the detection electrode to obtain an electrical signal, thereby obtaining the amplitude of the disc multi-ring outer S-shaped flexible beam resonator 102 in the detection mode, because the detection mode resonance amplitude is proportional to the input angular velocity, and then can be obtained Enter the magnitude of the angular velocity. The difference between the driving mode and the detection mode in Fig. 5A and Fig. 5B is 45°.

In this embodiment, the substrate 100 has a thickness of 300 μm to 800 μm and a diameter of 2 mm to 8 mm; the material of the substrate 100 is fused silica, and the quartz material has characteristics such as high temperature resistance, small thermal expansion coefficient, corrosion resistance, and resonance, and can be So that the finished gyroscope can work in harsh environments.

In this embodiment, the thickness of the S-shaped flexible beam resonator 102 outside the disk multi-ring is 100 μm-500 μm, and the diameter is 2 mm-8 mm; the thickness of the electrode 104 is 100 μm-500 μm; The materials of the S-shaped flexible beam resonator 102 and the electrodes 104 on the inner edge are all monocrystalline silicon, and monocrystalline silicon has semiconductor properties, which can make the gyroscope achieve higher performance.

This embodiment provides a method for preparing a S-shaped flexible beam resonant gyroscope with a multi-ring outer disk, and the method includes the following steps:

(1) Using the MEMS microfabrication process, the fused silica block is wet or dry etched to obtain the groove and the protruding part of the substrate 100, and then a conductive layer is deposited on the protruding part on the substrate 100. Thin film, finally obtain described substrate 100 (as shown in Figure 6A, Figure 6B, Figure 6C);

(2) Using bonding technology, the above-mentioned substrate 100 is bonded to the single crystal silicon wafer (as shown in Figure 7A and Figure 7B, wherein: Figure 7A is a schematic diagram before the substrate and the single crystal silicon wafer are bonded, and Figure 7B is the substrate Schematic diagram after bonding with single crystal silicon wafer):

(3) Using Deep Reactive Ion Etching (DeepReactiveIonEtching) method, the monocrystalline silicon wafer is etched to obtain the S-shaped flexible beam resonator 102 outside the disk multi-ring and the electrode 104 on the inner edge, and finally obtain the disk multi-ring The outer S-shaped flexible beam resonant gyroscope (as shown in Figure 8).

The advantages of the gyroscope in this embodiment: 1. Smaller size; 2. Good performance; 3. Good impact resistance; 4. Simple process steps, which is conducive to mass production, thereby reducing manufacturing costs.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.

Claims (10)

1. A S-shaped flexible beam resonant gyroscope outside a disc multi-ring, is characterized in that, comprising: a base; A disc multi-ring external S-shaped flexible beam resonator, including the outermost ring, multiple concentric rings, multiple S-shaped flexible beams and multiple groups of spokes, wherein: the outermost ring is connected to the base, The concentric rings are connected by a plurality of spokes, and the two ends of the multiple S-shaped flexible beams are respectively connected to the inside of the outermost ring and the outside of the largest ring of the concentric ring; A group of electrodes distributed on the inner edge of the S-shaped flexible beam resonator outside the disk multi-ring, and each electrode is respectively connected to the base. 2. The S-shaped flexible beam resonant gyroscope with multi-ring outer disk according to claim 1, characterized in that: the center of the base is a cylindrical hollow structure; There are protruding parts on the base, and the protruding parts include n discrete fan ring parts on the peripheral edges and n discrete fan ring parts in the center, n≥8 and n is an even number, wherein: n discrete fan ring parts on the peripheral edges The fan ring parts are distributed at equal intervals and the width of each fan ring part is equal; the n discrete fan ring parts are distributed at equal intervals and the width of each fan ring part is equal; the n peripheral edge discrete fan ring parts The central axis coincides with the central axis of the n central discrete fan ring parts; the n peripheral edge discrete fan ring parts and the n central discrete fan ring parts are all equal in height; The outermost edge of the base is n equally spaced electrode sheets, wherein: the n electrode sheets are in one-to-one correspondence with the n central discrete fan ring parts, and the n electrode sheets are respectively corresponding to the n central discrete fan ring parts. The fan ring parts are connected by wires, and the wires respectively pass through the gaps of n discrete fan ring parts on the outer edge; the width and thickness of the n electrode sheets are equal; A lead wire will be drawn from the central cylinder on the base for grounding or zero potential. 3. The S-shaped flexible beam resonant gyroscope with multi-ring outer disk according to claim 1, characterized in that: on the n discrete fan ring parts and the n central discrete fan ring parts, respectively A layer of conductive film is provided, and then the substrate is bonded with a single crystal silicon wafer. 4. The S-shaped flexible beam resonant gyroscope with multiple rings outside the disk according to claim 1, wherein the material of the substrate is fused silica or heat-resistant glass or single crystal silicon. 5. The S-shaped flexible beam resonator with multi-ring outer disks according to claim 1, wherein the center of the S-shaped flexible beam resonator with multi-ring outer disks is a cylindrical hollow structure; The central axes of the plurality of concentric rings coincide with the central axis of the outermost ring; the widths of the plurality of concentric rings are all equal; the widths of the gaps between the concentric rings are all equal; Each set of spokes distributed between the concentric rings is evenly spaced; the number of each set of spokes is m, m≥8 and m is an even number; the interval angle of each set of spokes is 360°/m; the width of each spoke is equal ; The number of S-shaped flexible beams is n, n≥8 and n is an even number, and the n S-shaped flexible beams are equally spaced, and the centers of the n S-shaped flexible beams are located on the same circumference, and the n S-shaped flexible beams and The outermost ring is located on the same horizontal plane. 6. The S-shaped flexible beam resonant gyroscope with multi-ring outer disk according to claim 5, wherein each said S-shaped flexible beam is symmetrical to the center, and consists of two "crescent" shaped Structural composition, wherein: each "crescent" structure is composed of two semicircular arcs with equal diameters; the maximum distance between the two semicircular arcs is equal, and the center of each semicircular arc is in line with the S-shaped flexible The centers are collinear. 7. The resonator gyroscope with S-shaped flexible beams outside the multi-rings of the disk according to any one of claims 1-6, wherein the material of the S-shaped flexible beam resonator outside the multi-rings of the disk is a single crystal silicon. 8. A disc multi-ring S-shaped flexible beam resonator gyroscope according to any one of claims 1-6, wherein the electrodes are n sector-shaped electrodes, n≥8 and n is Even number; the positions of n electrodes correspond to the positions of n S-shaped flexible beams one by one, and the central axis of each electrode coincides with the central axis of the S-shaped flexible beam resonator outside the disk multi-ring; n electrodes are concentric with The gap distances between the smallest rings in the rings are all equal; The n electrodes include n/2 driving electrodes and n/2 detecting electrodes, and the n/2 driving electrodes and n/2 detecting electrodes are arranged at regular intervals along the inner edge of the S-shaped flexible beam resonator outside the disk multi-ring. 9 . The S-shaped flexible beam resonant gyroscope with multiple rings outside the disk according to claim 8 , wherein the material of the electrodes is single crystal silicon. 10 . 10. a method for preparing the outer S-shaped flexible beam resonant gyroscope of a disk multi-ring outer described in any one of claims 1-9, said method comprising the steps of: (1) Using MEMS microfabrication technology, the substrate is etched to form grooves and protruding parts, and a conductive film is plated on the protruding parts; (2) Using bonding technology, the substrate obtained in step (1) is bonded to the single crystal silicon wafer; (3) Using deep reactive ion etching method to etch the single crystal silicon wafer to obtain the multi-ring outer S-shaped flexible beam resonator and the electrodes on the inner edge of the disc, and finally obtain the S-shaped flexible beam outside the multi-ring disc resonant gyroscope.