CN104897145A - Piezoelectric driving multi-ring gyroscope with fixed outer edge and preparation method of piezoelectric driving multi-ring gyroscope - Google Patents

Abstract

The invention provides an outer edge fixed piezoelectric driven multi-ring gyroscope and a preparation method thereof, comprising a multi-ring resonator containing five to eight rings; a fixed chute supporting the multi-ring resonator; Multiple groups of spokes between two adjacent rings of the resonator are used to connect the rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference; discrete electrodes located on the inner ring surface of the multi-ring resonator ; Wherein: the outermost ring of the multi-ring resonator is fixed, and only the radial vibration is free. Because the outer edge of the multi-ring resonator is fixed, and the discrete electrodes are built in the center of the ring, the invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description

An outer edge fixed piezoelectric driven multi-ring gyroscope and its preparation method

technical field

The invention relates to a solid wave mode matching gyroscope in the field of micro-electromechanical technology, in particular to an outer edge fixed piezoelectric-driven multi-ring gyroscope and a preparation method thereof.

Background technique

Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. The micro gyroscope based on MEMS technology is processed by micro-nano batch manufacturing technology, its cost, size, and power consumption are very low, and its environmental adaptability, working life, reliability, and integration are greatly improved compared with traditional technologies. Therefore, MEMS micro-gyroscope has become an important direction of extensive research and application development of MEMS technology in recent years.

Solid wave is a kind of mechanical fluctuation in a solid, which propagates the deformation caused by a certain point or part of the solid to be disturbed by force or other reasons, such as volume deformation or shear deformation, to other parts of the solid in the form of waves. In the process of wave propagation, the particle in the solid does not produce permanent displacement except for a small vibration in its original position. Because the solid is elastic, the elastic force has the ability to restore the deformation caused by the disturbance to the state without deformation, so the wave is formed. Elasticity is the main reason why waves can form in solids.

After searching the literature of the prior art, it was found that the Chinese patent "miniature hemispherical resonant gyro and its preparation method" (patent application number: CN201310022146.1) obtained the hemispherical resonator cavity by etching, and obtained the support body cavity by ICP etching on the back , depositing a silicon dioxide insulating layer on the surface of the cavity, depositing polysilicon on the surface of the silicon dioxide to obtain a hemispherical resonator and a support body, removing excess polysilicon and etching the silicon dioxide to obtain a movable hemispherical resonator.

This technology has the following disadvantages: the hemispherical resonant gyroscope is difficult to process because it involves spherical processing, and the process error is difficult to control; the cavity of the hemispherical resonator is obtained by etching, and the sphericity is not high enough, and the sphericity of the hemispherical resonator largely depends on the hemisphere The cavity of the resonator has a great influence on the performance of the gyro; the contact area between the hemispherical resonator and the support body of the gyro is small, and there is a possibility of fracture under high-frequency vibration, and the reliability is not high; the processing technology of the gyro is relatively complicated. The processing cost is high and it is not suitable for mass production.

Contents of the invention

The purpose of the present invention is to provide an outer edge fixed piezoelectric-driven multi-ring gyro structure, which has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

According to one aspect of the present invention, there is provided a peripheral fixed piezoelectric driven multi-ring gyroscope, comprising:

a multi-ring resonator containing five to eight rings;

a fixed chute supporting the multi-ring resonator;

Multiple groups of spokes located between two adjacent rings of the multi-ring resonator are used to connect rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference;

Discrete electrodes on the inner ring surface of the multi-ring resonator;

Wherein: the outermost ring of the multi-ring resonator is fixed (that is, the outer edge has a fixed feature), and only the radial vibration is free. In one embodiment, the outermost ring of the multi-ring resonator is fixed in the fixing slot.

In the present invention, the fixed chute is formed into a circle by splicing two semicircular chute. The slot leads out to a small rectangular block at the end, which is used for screwing and fixing.

In the present invention, each group of spokes is evenly arranged along the circumference of the ring of the multi-ring resonator, the number of each group of spokes is n, and the interval angle of each group of spokes is 360°/n. The positions of two adjacent groups of spokes have a certain angle difference θ, where θ=360°/2n.

In the present invention, a structure of the discrete electrode is: composed of three parts, the middle layer is a piezoelectric film, and the outer two layers are metal electrodes, wherein one side of the inner electrode layer is attached to the multi-ring resonator ring surface, the other side is attached to the inner surface of the piezoelectric film, the outer electrode layer is attached to the outer surface of the piezoelectric film, and the three layers of the discrete electrodes are arranged in sequence along the radial direction of the multi-ring resonator, A three-layer structure of internal electrode layer-piezoelectric film-external electrode layer is formed. The discrete electrodes are m (m>=8, and m is an even number) fan-shaped electrodes, including m/2 driving electrodes and m/2 detecting electrodes, and the driving electrodes and detecting electrodes are evenly spaced.

The discrete electrodes are closely attached to the inner ring surface of the multi-ring resonator, the width of the discrete electrodes is equal to the height of the multi-ring resonator, and the central axis of the discrete electrodes coincides with the central axis of the multi-ring resonator .

The inner electrode layer and the multi-ring resonator are grounded to ensure that the same potential is 0V; the plane four-antinode vibration mode of the multi-ring resonator is used (that is, the multi-ring resonator vibrates in a plane, and there are four The direction reaches the maximum vibration amplitude) as a reference vibration, when the driving electrode of the piezoelectric film is applied with an AC voltage, the radial vibration is generated by the inverse piezoelectric effect, thereby driving the multi-ring resonator to vibrate; when there is the multi-ring When the angular velocity in the direction of the central axis of the resonator is input, under the action of the Coriolis force, the mode shape of the multi-ring resonator changes to the detection mode, driving the piezoelectric film to vibrate, and the positive piezoelectric effect on the detection electrode By obtaining the electrical signal, the amplitude of the multi-ring resonator in the detection mode can be obtained, and then the magnitude of the input angular velocity can be obtained.

According to another aspect of the present invention, a kind of preparation method of above-mentioned top is provided, and this method is specifically:

Using MEMS microfabrication technology, etch the disc-shaped quartz block to obtain a multi-ring resonator;

The fixed chute is obtained by precision machining;

Discrete electrodes include drive electrodes and detection electrodes. Conductive glue is used as the inner electrode layer to fix the piezoelectric film on the inner ring surface of the multi-ring resonator, and the outer electrode layer is bonded to the other surface of the piezoelectric film;

When the gyroscope is assembled, the multi-ring resonator is installed on the fixed chute, and the fixing chute is tightened to fix the multi-ring resonator. The discrete electrodes are closely attached to the inner ring surface of the multi-ring resonator, and the lower surface of the discrete electrodes is in contact with the multi-ring resonator. The lower surface is at the same level so that the discrete electrodes are aligned with the inner rings of the multi-ring resonator.

In the present invention, another structure of the discrete electrodes is: the discrete electrodes are arranged on the upper surface of the multi-ring resonator, and from bottom to top are the lower electrode layer, the piezoelectric film, and the upper electrode layer. Glue is used as the lower electrode layer, and the piezoelectric film is fixed on the upper surface of the multi-ring resonator through conductive glue, and the upper electrode layer is bonded to the upper surface of the piezoelectric film to form the discrete electrodes. Three layers, namely lower electrode layer-piezoelectric film-upper electrode layer.

The discrete electrodes are fan-shaped electrodes, including drive electrodes and detection electrodes, and the drive electrodes and detection electrodes are evenly spaced; the discrete electrodes have two rings, and the rings are connected in the form of spokes to form a plurality of fan-shaped I-shaped type electrodes, attached to the upper surfaces of the two inner rings of the multi-ring resonator.

According to a third aspect of the present invention, a method for preparing the above-mentioned gyroscope is provided, the method is specifically:

Using MEMS microfabrication technology, etch the disc-shaped quartz block to obtain a multi-ring resonator;

The fixed chute is obtained by precision machining;

Discrete electrodes are arranged on the upper surface of the multi-ring resonator, which are the lower electrode layer, the piezoelectric film, and the upper electrode layer from bottom to top; using conductive glue as the lower electrode layer, the piezoelectric film is fixed on the multi-ring resonator On the surface, the upper electrode layer is bonded to the upper surface of the piezoelectric film to form three layers of discrete electrodes;

When the gyro is assembled, the multi-ring resonator is installed on the fixed chute, and the fixing chute is tightened to fix the multi-ring resonator, and the discrete electrodes are arranged on the upper surface of the multi-ring resonator.

Compared with the prior art, the present invention has the following beneficial effects:

1. The processing steps are simple, and the mature micro-machining method is adopted, which is conducive to mass production;

2. The outer edge of the multi-ring resonator is fixed, which can make the structure of the packaged gyro stable, resist impact, and reduce the influence of external interference on the normal operation of the gyro;

3. The multi-ring resonator has a high degree of symmetry, which can make the multi-ring gyroscope achieve excellent performance. During operation, the electrodes detect the vibration of the inner ring of the multi-ring resonator, and the vibration amplitude is large and the response is sensitive.

4. Discrete electrodes and main circuits are arranged in the center of the inner ring of the multi-ring resonator, which does not occupy the peripheral space of the multi-ring resonator, which is conducive to the miniaturization of the gyroscope and is convenient for installation and portability.

The discrete electrodes of the present invention are piezoelectric materials, and the gyroscope adopts piezoelectric driving mode when working. Because the outer edge of the multi-ring resonator is fixed, and the discrete electrodes are built in the center of the ring, the invention has the advantages of small size, stable structure, sensitive response, etc., and has good symmetry, so it can achieve higher performance.

Description of drawings

Other characteristics, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings:

FIG. 1A is a top view of an outer edge fixed piezoelectric-driven multi-ring gyroscope according to an embodiment of the present invention;

FIG. 1B is a three-dimensional view of an outer edge fixed piezoelectric-driven multi-ring gyroscope according to an embodiment of the present invention;

2A is a top view of a multi-ring resonator according to an embodiment of the present invention;

2B is a three-dimensional view of a multi-ring resonator according to an embodiment of the present invention;

2C is a front view of a multi-ring resonator according to an embodiment of the present invention;

Fig. 3A is a top view of a fixed chute according to an embodiment of the present invention;

Fig. 3B is a three-dimensional view of a fixed chute according to an embodiment of the present invention;

Fig. 3C is a cross-sectional view of a fixed chute according to an embodiment of the present invention;

4A is a top view of discrete electrodes according to an embodiment of the present invention;

4B is a three-dimensional view of discrete electrodes according to an embodiment of the present invention;

4C is a front view of discrete electrodes according to an embodiment of the present invention;

5A is a top view of the positional relationship between a multi-ring resonator and discrete electrodes according to an embodiment of the present invention;

5B is a three-dimensional view of the positional relationship between a multi-ring resonator and discrete electrodes according to an embodiment of the present invention;

5C is a cross-sectional view of the relative positions of the multi-ring resonator and the discrete electrodes according to an embodiment of the present invention;

Fig. 6A is the drive mode shape diagram of the four-antinode vibration made by the multi-ring resonator when the outer edge fixed piezoelectric-driven multi-ring gyroscope is working;

Figure 6B is a detection mode diagram of the four-antinode vibration made by the multi-ring resonator when the outer edge fixed piezoelectric-driven multi-ring gyroscope is working;

Fig. 7 is a three-dimensional view of an outer edge fixed piezoelectric-driven multi-ring gyroscope according to another embodiment of the present invention;

8A is a top view of discrete electrodes according to another embodiment of the present invention;

8B is a three-dimensional cross-sectional view of discrete electrodes according to another embodiment of the present invention;

8C is a cross-sectional view of the relative positions of the multi-ring resonator and the discrete electrodes according to another embodiment of the present invention;

In the figure: 1 is the multi-ring resonator, 1.1 is the upper surface of the multi-ring resonator, 1.2 is the lower surface of the multi-ring resonator, 2 is the fixed chute, 3 is the spoke, 4 is the discrete electrode, 5 is the inner electrode layer, 6 6.1 is the inner surface of the piezoelectric film, 6.2 is the outer surface of the piezoelectric film, 6.3 is the upper surface of the piezoelectric film, 6.4 is the lower surface of the piezoelectric film, 7 is the outer electrode layer, 8 is the discrete electrode, 9 is The lower electrode layer, 10 is the piezoelectric film, and 11 is the upper electrode layer.

Detailed ways

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

Example 1

The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

As shown in Figures 1A and 1B, this embodiment provides an outer edge fixed piezoelectric-driven multi-ring gyroscope, including:

a multi-ring resonator1 containing five to eight rings;

A fixed chute 2 supporting the multi-ring resonator;

Four to seven groups of spokes 3 located between two adjacent rings of the multi-ring resonator are used to connect rings and rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference;

A ring of discrete electrodes 4 located on the inner ring surface of the multi-ring resonator 1 .

Wherein: the outer edge of the multi-ring resonator 1 (that is, the outermost ring) has a fixed feature, and only the radial vibration is free. For example, it can be accommodated in the fixed runner 2 . The outermost ring of the multi-ring resonator can be fixed in different ways, such as fixing the outermost ring of the multi-ring resonator by adding mechanical components, or designing a specific process in the micromachining process, The outermost ring of the multi-ring resonator is fixedly connected to the substrate.

Descriptions about length, width, height, etc. involved in the description of the following embodiments:

In Fig. 2A, the length of each ring of the multi-ring resonator in the radial direction of the multi-ring resonator is called the width of the ring of the multi-ring resonator, and the spokes are perpendicular to the radial direction of the multi-ring resonator The length in the direction is called the width of the spoke, and the gap length of the rings at the adjacent positions of the multi-ring resonator in the radial direction of the multi-ring resonator is called the gap between the rings at the adjacent positions of the multi-ring resonator distance;

In FIG. 2C, the length of the multi-ring resonator is referred to as the height of the multi-ring resonator;

In Fig. 3C, the length of the cavity of the fixed chute in the radial direction of the multi-ring resonator is called the depth of the cavity of the fixed chute, and the cavity of the fixed chute is parallel to the multi-ring The length in the height direction of the resonator is called the height of the cavity of the fixed chute;

In FIG. 4C, the length of the discrete electrodes in the height direction of the multi-ring resonator is referred to as the width of the discrete electrodes;

In Fig. 8A, the length of each ring of the discrete electrodes in the radial direction of the multi-ring resonator is called the width of the discrete electrode ring, and the spokes of the discrete electrodes are perpendicular to the radial direction of the multi-ring resonator The length of is called the width of the discrete electrode spokes, and the gap length of the rings of the discrete electrodes in the radial direction of the multi-ring resonator is called the gap distance between the discrete electrode rings.

As shown in Figures 2A, 2B, and 2C, the center of the multi-ring resonator 1 in this embodiment is a hollow structure, and the width W of each ring of the multi-ring resonator ₁ is the same, and the multi-ring resonator 1 has a phase _The gap distance W3 between adjacent rings is also the same, and _W1 and _W3 are equal.

As shown in Figures 3A, 3B, and 3C, the fixed chute 2 in this embodiment is composed of two semicircular chute splicing to form a circle. The cross section of the semicircular chute is half I-shaped, and the cavity is just It accommodates the outermost ring of the multi-ring resonator 1 . The semicircular chute leads to a shorter rectangular block at the end, and has screw holes for tightening and fixing. The depth W ₄ of the cavity of the fixed chute 2 is the same as the width W ₁ of each ring of the multi-ring resonator 1, and the height h ₂ of the fixed chute 2 is the same as that of each ring of the multi-ring resonator 1. The height h ₁ is the same, and the fixed chute 2 just accommodates the outermost ring of the multi-ring resonator 1 to achieve the function of fixing and supporting, so that the multi-ring resonator 1 only retains the freedom of radial vibration.

As shown in Figures 2A, 2B, and 2C, the spokes 3 in this embodiment are uniformly arranged in each group, and the number of spokes in each group is n, so the interval angle of each group of spokes is 360°/n. The positions of two adjacent groups of spokes have a certain angle difference θ, where θ=360°/2n.

As shown in Figures 4A, 4B, and 4C, the discrete electrodes 4 in this embodiment are located on the inner ring surface of the multi-ring resonator 1, and the discrete electrodes 4 have 8 fan-shaped electrodes arranged in a uniform circle, and each fan-shaped electrode The sector degree is 22.5°, and the sector angle of the gap between the sector electrodes is 22.5°. The discrete electrode 4 is composed of three parts, the middle layer is a piezoelectric film 6, and the outer two layers are metal electrodes, forming a three-layer structure of inner electrode layer-piezoelectric film-outer electrode layer. The inner electrode layer 5 is attached to the inner ring surface of the multi-ring resonator 1, and the outer electrode layer 7 is located at the innermost side of the outer edge-fixed piezoelectric-driven multi-ring gyroscope. The width h ₃ of the discrete electrodes 4 is equal to the height h ₁ of the multi-ring resonator 1 , and the central axis of the discrete electrodes 4 coincides with the central axis of the multi-ring resonator 1 .

As shown in Figures 5A, 5B, and 5C, the discrete electrodes 4 in this embodiment are closely attached to the inner ring surface of the multi-ring resonator 1, and the lower surface of the discrete electrodes 4 is in contact with the lower surface of the multi-ring resonator 1. In the same horizontal plane, the discrete electrodes 4 are aligned with the inner ring of the multi-ring resonator 1 .

As shown in FIGS. 6A and 6B , the planar four-antinode vibration mode of the multi-ring resonator 1 in this embodiment is used as a reference vibration, and the multi-ring resonator 1 vibrates radially in this mode. The specific working principle is that the internal electrode layer 5 and the multi-ring resonator 1 are grounded to ensure that the same potential is 0V; using the plane four-antinode vibration mode of the multi-ring resonator 1 as a reference vibration, the pressure When the driving electrode of the electric film 6 is applied with an AC voltage, radial vibration is generated by the inverse piezoelectric effect, thereby driving the multi-ring resonator 1 to vibrate; when there is an angular velocity input in the direction of the central axis of the multi-ring resonator 1, Under the action of the Coriolis force, the mode shape of the multi-ring resonator 1 changes to the detection mode, which drives the piezoelectric film 6 to vibrate, and an electric signal is obtained on the detection electrode by the positive piezoelectric effect, thereby obtaining a multi-ring The resonator is detecting the amplitude of the mode, and then the magnitude of the input angular velocity can be obtained. The drive mode and the detection mode of Fig. 6A, 6B differ by 45 degrees.

In this embodiment, the width W 1 of each ring of the multi-ring resonator ₁ , the width W ₂ of the spokes 3 and the angle difference θ between the spokes can be properly adjusted during processing to achieve ideal mode matching.

In this embodiment, the material of the multi-ring resonator 1 is quartz, which has the characteristics of high temperature resistance, small thermal expansion coefficient, corrosion resistance, and resonance, and meets the resonance characteristics and mechanical strength required by the four-antinode vibration of the resonator. And make the finished gyroscope work in harsh environment.

In this embodiment, the fixed chute 2 is made of a metal material with good mechanical properties, such as steel, which is obtained by a mature precision machining method, and supports the multi-ring resonator 1 .

In this embodiment, the multi-ring resonator 1 is obtained by using MEMS microfabrication technology, using Ar as the working gas, and AZ1350 photoresist as the mask, and performing ion beam etching on the disc-shaped quartz block. The specific method is to clean and dry the disc-shaped quartz block, spin-coat a layer of AZ1350 photoresist, use the prepared mask to carry out photolithography, and then develop and pattern it, and use Ar gas to treat the patterned circle. The disk quartz block is subjected to ion beam etching to finally obtain the multi-ring resonator 1 .

In this embodiment, the discrete electrodes 4 are made on the inner ring surface of the multi-ring resonator 1, specifically, conductive glue is used as the inner electrode layer 5, and the piezoelectric film 6 is fixed on the multi-ring resonator 1. The inner ring surface of the ring resonator 1, the outer electrode layer 7 is bonded to the outer surface of the piezoelectric film 6, and the three layers of the discrete electrodes are arranged in sequence along the radial direction of the multi-ring resonator to form an inner electrode layer -Three-layer structure of piezoelectric film-external electrode layer. The internal electrode layer 5 , the piezoelectric film 6 and the external electrode layer 7 have the same fan-out.

In this embodiment, the discrete electrodes 4 include eight fan-shaped electrodes, which are 4 drive electrodes and 4 detection electrodes. The drive electrodes and the detection electrodes are evenly spaced, and the positions of adjacent drive electrodes are separated by 90 degrees. The positions of the electrodes are separated by 90 degrees, and the positions of adjacent drive electrodes and detection electrodes are separated by 45 degrees.

When the gyroscope of this embodiment is finally packaged, the fixed chute 2 is installed outside the multi-ring resonator 1, and the fixed chute 2 can be fixed on the packaging shell to ensure the relative stability of each component and make the The outer edge of the multi-ring resonator 1 is fixed, and only the radial vibration is free.

Example 2

Embodiment 2 is similar to Embodiment 1, except that the discrete electrodes in Embodiment 2 are arranged on the upper surface of the multi-ring resonator.

As shown in Figure 7, this embodiment provides an outer edge fixed piezoelectric-driven multi-ring gyroscope, including:

a multi-ring resonator1 containing five to eight rings;

A fixed chute 2 supporting the multi-ring resonator;

Four to seven groups of spokes 3 located between two adjacent rings of the multi-ring resonator are used to connect rings and rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference;

Discrete electrodes 8 located on the upper surface of the multi-ring resonator 1 .

Wherein, the multi-ring resonator 1 , the fixed chute 2 , and the spokes 3 have similar features to those in Embodiment 1, except that the discrete electrodes 8 are attached to the upper surface of the multi-ring resonator 1 .

As shown in Figures 8A, 8B, and 8C, the discrete electrodes 8 in this embodiment are located on the upper surface of the multi-ring resonator 1, and the discrete electrodes 8 have 8 fan-shaped electrodes, which are uniformly arranged in a circle. The sector degree is 30°, and the sector angle of the gap between the sector electrodes is 15°.

In this implementation, the discrete electrode 8 has two rings, and the rings are connected in the form of spokes to form 8 fan-shaped I-shaped electrodes. The spokes of the discrete electrodes 8 and the spokes of the multi-ring resonator 1 The location coincides.

In this embodiment, the width W ₅ of each ring of the discrete electrode 8 is equal to the width W ₁ of each ring of the multi-ring resonator 1, and the width W 6 of the spokes of the discrete electrode 8 is equal to the width W ₆ of the multi-ring resonator The width W ₂ of the spokes 3 of the resonator 1, the gap distance W ₇ between the rings of the discrete electrodes 8 is equal to the gap distance W ₃ between the adjacent rings of the multi-ring resonator 1, the central axis of the discrete electrodes 8 coincides with the central axis of the multi-ring resonator 1 .

In this implementation, the discrete electrodes 8 are composed of three layers, the middle layer is a piezoelectric film 10, and the outer two layers are metal electrodes, forming a three-layer structure of lower electrode layer-piezoelectric film-upper electrode layer. Specifically, the piezoelectric film 10 is fixed on the upper surface of the multi-ring resonator 1 with conductive glue, the conductive glue forms the lower electrode layer 9, and the upper electrode layer 11 is bonded on the piezoelectric film 10. The surface constitutes three layers of the discrete electrodes 8 .

In this embodiment, the working principle of the gyroscope is similar to Embodiment 1. The lower electrode layer 9 and the multi-ring resonator 1 are grounded to ensure that the same potential is 0V; using the plane four-antinode vibration mode of the multi-ring resonator 1 as a reference vibration, the driving of the piezoelectric film 10 When an AC voltage is applied to the electrode, the radial vibration is generated by the inverse piezoelectric effect, thereby driving the multi-ring resonator 1 to vibrate; when there is an input of angular velocity in the direction of the central axis of the multi-ring resonator 1, the Coriolis force Under the action, the mode shape of the multi-ring resonator 1 changes to the detection mode, driving the piezoelectric film 10 to vibrate, and an electric signal is obtained on the detection electrode by the positive piezoelectric effect, thereby obtaining the multi-ring resonator in the detection mode. The amplitude of the state, and then the magnitude of the input angular velocity can be obtained.

When the gyroscope of this embodiment is finally packaged, the fixed chute 2 is installed outside the multi-ring resonator 1, and the fixed chute 2 can be fixed on the packaging shell to ensure the relative stability of each component and make the The outer edge of the multi-ring resonator 1 is fixed, and only the radial vibration is free.

The gyroscopes of the above two embodiments are high-frequency solid-wave gyroscopes. When the gyroscopes are working, the multi-ring resonators do radial four-antinode vibrations. When there is an angular velocity input in the direction of the central axis of the multi-ring resonators, the Under the action of Coriolis force, the resonance mode of the multi-ring resonator will change from the driving mode to the detection mode, and the resonance amplitude of the detection mode is proportional to the magnitude of the input angular velocity. The amplitude of the multi-ring resonator in the detection mode can be obtained by detecting the change of the electric signal in the electrode, and then the magnitude of the input angular velocity can be obtained. The advantages of the gyroscope in this embodiment are as follows: 1. Smaller size; 2. Good performance; 3. Good impact resistance; 4. Simple process steps, which is conducive to mass production, thereby reducing manufacturing costs.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art may make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention.

Claims (14)

1. A kind of outer edge fixed piezo-electric drive multi-ring gyroscope, it is characterized in that, comprises: a multi-ring resonator containing five to eight rings; a fixed chute supporting the multi-ring resonator; A plurality of groups of spokes located between two adjacent rings of the multi-ring resonator are used to connect rings of the multi-ring resonator, and the positions of adjacent two groups of spokes have an angle difference; Discrete electrodes on the inner ring surface of the multi-ring resonator; Wherein: the outermost ring of the multi-ring resonator is fixed, and only the radial vibration is free. 2. A kind of peripheral fixed piezoelectric-driven multi-ring gyroscope according to claim 1, characterized in that, the center of the multi-ring resonator is a hollow structure, and each ring width W of the multi-ring resonator is ₁ Similarly, the gap distance W ₃ between each ring of the multi-ring resonator is also the same, and the width W ₁ of each ring is equal to the gap distance W ₃ between each ring. 3. A kind of outer edge fixed piezoelectric drive multi-ring gyroscope according to claim 1, characterized in that, said fixed chute is composed of two semicircular chute splicing to form a circular, semicircular chute The cross-section is half I-shaped, and a cavity is formed in the middle to accommodate the multi-ring resonator. The semicircular chute leads to a small rectangular block at the end for tightening and fixing. 4. A kind of outer edge fixed piezoelectric drive multi-ring gyroscope according to claim ₃ , characterized in that, the depth W of the cavity of the fixed chute is the same as the width W of each ring of the multi-ring resonator ₁ , the height h ₂ of the fixing chute is the same as the height h ₁ of each ring of the multi-ring resonator, and the fixing chute just accommodates the outermost ring of the multi-ring resonator to achieve fixing and The bracing effect allows the multi-ring resonator to remain free only for radial vibrations. 5. a kind of outer edge fixed piezoelectric drive multi-ring gyroscope according to claim 1, is characterized in that, every group of spokes is arranged evenly along the circumference of the ring of described multi-ring resonator, and the number of every group of spokes is n, the interval angle of each group of spokes is 360°/n; the positions of adjacent two groups of spokes have a certain angle difference θ, where θ=360°/2n. 6. An outer edge fixed piezoelectrically driven multi-ring gyroscope according to any one of claims 1-5, wherein the discrete electrodes are located on the inner ring surface of the multi-ring resonator, and the discrete electrodes The width is equal to the height of the multi-ring resonator, and the central axis of the discrete electrode coincides with the central axis of the multi-ring resonator; the lower surface of the discrete electrode is at the same level as the lower surface of the multi-ring resonator, so that the The discrete electrodes are aligned with the inner ring of the multi-ring resonator. 7. A kind of peripheral fixed piezoelectric drive multi-ring gyroscope according to claim 6, characterized in that, the discrete electrodes are composed of three parts, the middle layer is a piezoelectric film, and the outer two layers are metal electrodes, One side of the inner electrode layer is attached to the inner ring surface of the multi-ring resonator, the other side is in close contact with the inner surface of the piezoelectric film, the outer electrode layer is attached to the outer surface of the piezoelectric film, and the discrete The three layers of electrodes are arranged in sequence along the radial direction of the multi-ring resonator, forming a three-layer structure of inner electrode layer-piezoelectric film-outer electrode layer; the discrete electrodes are m sector electrodes, including m/2 driving The electrodes and m/2 detection electrodes, driving electrodes and detection electrodes are evenly spaced, m>=8 and m is an even number. 8. A kind of peripheral fixed piezoelectric drive multi-ring gyroscope according to claim 7, characterized in that, said inner electrode layer and said multi-ring resonator are grounded to ensure that the same potential is 0V; The plane four-antinode vibration mode of the ring resonator is used as a reference vibration. When the driving electrode of the piezoelectric film is applied with an AC voltage, radial vibration is generated by the inverse piezoelectric effect, thereby driving the multi-ring resonator to vibrate; When the angular velocity in the direction of the central axis of the multi-ring resonator is input, under the action of the Coriolis force, the mode shape of the multi-ring resonator changes to the detection mode, driving the piezoelectric film to vibrate, and the positive piezoelectric film The effect is to obtain electrical signals on the discrete electrodes, thereby obtaining the amplitude of the multi-ring resonator in the detection mode, and further obtaining the magnitude of the input angular velocity. 9. A peripheral-fixed piezoelectrically driven multi-ring gyroscope according to any one of claims 1-5, wherein the discrete electrodes are arranged on the upper surface of the multi-ring resonator from bottom to top The lower electrode layer, the piezoelectric film, and the upper electrode layer are followed by the conductive glue as the lower electrode layer, the piezoelectric film is fixed on the upper surface of the multi-ring resonator, and the upper electrode layer is bonded to the The upper surface of the piezoelectric film constitutes three layers of the discrete electrodes, namely the lower electrode layer-the piezoelectric film-the upper electrode layer. 10. A kind of peripheral fixed piezoelectric driven multi-ring gyroscope according to claim 9, characterized in that, the discrete electrodes are m sector electrodes, including m/2 driving electrodes and m/2 detecting electrodes , the drive electrodes and the detection electrodes are evenly spaced, m>=8 and m is an even number; the discrete electrodes have two rings, and the rings are connected in the form of spokes to form a plurality of fan-shaped I-shaped electrodes, which are attached to the The upper surfaces of the two inner rings of the multi-ring resonator. 11. A kind of peripheral fixed piezoelectrically driven multi-ring gyroscope according to claim ₁₀ , characterized in that, the width W of each ring of the discrete electrodes is equal to the width W of each ring of the multi-ring resonator ₁ , the width W ₆ of the spokes of the discrete electrodes is equal to the width W ₂ of the spokes of the multi-ring resonator, and the gap distance W ₇ between the rings of the discrete electrodes is equal to the adjacent rings of the multi-ring resonator The gap distance W ₃ between them, the central axis of the discrete electrodes coincides with the central axis of the multi-ring resonator. 12. A kind of outer edge fixed piezoelectric drive multi-ring gyroscope according to claim 10, characterized in that, the lower electrode layer and the multi-ring resonator are grounded to ensure that the same potential is 0V; The plane four-antinode vibration mode of the ring resonator is used as a reference vibration. When the driving electrode of the piezoelectric film is applied with an AC voltage, radial vibration is generated by the inverse piezoelectric effect, thereby driving the multi-ring resonator to vibrate; When the angular velocity in the direction of the central axis of the multi-ring resonator is input, under the action of the Coriolis force, the mode shape of the multi-ring resonator changes to the detection mode, driving the piezoelectric film to vibrate, and the positive piezoelectric film The effect is to obtain an electrical signal on the detection electrode, thereby obtaining the amplitude of the multi-ring resonator in the detection mode, and then obtaining the magnitude of the input angular velocity. 13. A method for preparing the outer edge fixed piezoelectric-driven multi-ring gyroscope according to any one of claims 1-8, characterized in that, the method is specifically: Using MEMS microfabrication technology, etch the disc-shaped quartz block to obtain a multi-ring resonator; The fixed chute is obtained by precision machining; Discrete electrodes include drive electrodes and detection electrodes. Conductive glue is used as the inner electrode layer to fix the piezoelectric film on the inner ring surface of the multi-ring resonator, and the outer electrode layer is bonded to the other surface of the piezoelectric film; When the gyroscope is assembled, the multi-ring resonator is installed on the fixed chute, and the fixing chute is tightened to fix the multi-ring resonator. The discrete electrodes are closely attached to the inner ring surface of the multi-ring resonator, and the lower surface of the discrete electrodes is in contact with the multi-ring resonator. The lower surface is at the same level so that the discrete electrodes are aligned with the inner rings of the multi-ring resonator. 14. A method for preparing the outer edge fixed piezoelectric-driven multi-ring gyroscope according to any one of claims 1-5, 9-12, characterized in that, the method is specifically: Using MEMS microfabrication technology, etch the disc-shaped quartz block to obtain a multi-ring resonator; The fixed chute is obtained by precision machining; Discrete electrodes are arranged on the upper surface of the multi-ring resonator, which are the lower electrode layer, the piezoelectric film, and the upper electrode layer from bottom to top; using conductive glue as the lower electrode layer, the piezoelectric film is fixed on the multi-ring resonator On the surface, the upper electrode layer is bonded to the upper surface of the piezoelectric film to form three layers of discrete electrodes; When the gyro is assembled, the multi-ring resonator is installed on the fixed chute, and the fixing chute is tightened to fix the multi-ring resonator, and the discrete electrodes are arranged on the upper surface of the multi-ring resonator.