CN105319645B - A kind of waveguide type adjustable light power beam splitter based on microflow control technique - Google Patents
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Abstract
本发明所公开的一种基于微流控技术的波导型可调光功率分束器，属于集成光子学领域，涉及光波导器件与技术。本发明提出的波导型可调光功率分束器由1个波导输入端口（1）、2个波导输出端口（6、10）、1个Y分支波导（由波导2、3、4、5、7、9构成）、1个微流体通道（8）构成。光信号通过光纤耦合到波导输入端口（1）后，光信号在光波导内传播，当到达Y分支处时，光信号发生分束，其光功率分束比与微流体通道内混合液体折射率有关。因而，通过改变微流体通道内混合液体的折射率，从而改变输出端口（6、10）光功率的输出，最终实现光功率分束器输出分束比的动态调控。本发明提供的波导型可调光功率分束器具有调控范围大、波长和偏振依赖性低、结构简单、易于设计与制作、易于调控等等诸多优点，在集成光子系统和微流体芯片中有广泛应用前景。
A waveguide-type adjustable optical power beam splitter based on microfluidic technology disclosed by the invention belongs to the field of integrated photonics and relates to optical waveguide devices and technologies. The waveguide type adjustable optical power beam splitter proposed by the present invention consists of 1 waveguide input port (1), 2 waveguide output ports (6, 10), 1 Y branch waveguide (by waveguides 2, 3, 4, 5, 7, 9), and a microfluidic channel (8). After the optical signal is coupled to the waveguide input port (1) through the optical fiber, the optical signal propagates in the optical waveguide, and when it reaches the Y branch, the optical signal splits, and the optical power splitting ratio is the same as the refractive index of the mixed liquid in the microfluidic channel related. Therefore, by changing the refractive index of the mixed liquid in the microfluidic channel, the output of the optical power of the output port (6, 10) is changed, and finally the dynamic control of the output beam splitting ratio of the optical power beam splitter is realized. The waveguide-type tunable optical power beam splitter provided by the present invention has many advantages such as large control range, low wavelength and polarization dependence, simple structure, easy design and manufacture, and easy control. It is useful in integrated photonic systems and microfluidic chips. Wide application prospects.
Description
技术领域technical field
本发明属于集成光子学技术领域，涉及光波导功能器件，具体指一种基于微流控技术的波导型可调光功率分束器。The invention belongs to the technical field of integrated photonics, relates to optical waveguide functional devices, and specifically refers to a waveguide-type adjustable optical power beam splitter based on microfluidic technology.
背景技术Background technique
光波导器件因其结构紧凑、易于集成、性能稳定可靠等诸多优点而受到国内外研究人员的广泛关注和重视，且近年来发展十分迅速。光波导器件是集成光子系统中的基本单元器件，可通过采用不同方式进行集成（包括单片集成和混合集成），从而实现具有特定光信息处理功能的集成光子系统，它们在光通信、光信号处理、光学传感等领域有广泛应用。Due to its compact structure, easy integration, stable and reliable performance and many other advantages, optical waveguide devices have been widely concerned and valued by researchers at home and abroad, and have developed rapidly in recent years. Optical waveguide devices are the basic unit devices in integrated photonic systems. They can be integrated in different ways (including monolithic integration and hybrid integration) to realize integrated photonic systems with specific optical information processing functions. They are used in optical communication, optical signal Processing, optical sensing and other fields have a wide range of applications.
光功率分束器的实现方案有多种，按其实现形式主要分为体元件型、光栅型和波导型结构。对于体元件型和光栅型结构，它们主要应用于全息、干涉光刻以及空间光通信系统中，但都不适合用于集成光子系统。波导型光功率分束器是集成光子系统中不可或缺的关键功能器件，其结构形式主要有方向耦合型波导结构、Y分支型波导结构、光子晶体型波导结构、表面等离子型波导结构以及多模干涉型波导结构等多种设计方案。但是，这些结构形式的光功率分束器的光功率分束比不能动态调控，使得其应用领域和范围受到较大限制。基于此，波导型可调光功率分束器的研究开始引起了人们的广泛关注，它是利用电光、磁光或热光等物理效应来改变其各个分支中光功率输出，实现其动态调控。近年来，有关波导型可调光功率分束器的设计方案较少，且存在诸多缺点，如动态范围小、损耗高、偏振依赖性高、波长依赖性强、结构参数影响敏感、工艺制作难度大等，这离实际应用还有较大距离。需要特别指出的是，这些方案均不能用于微流控光子系统。There are many implementation schemes of optical power beam splitters, which are mainly divided into bulk element type, grating type and waveguide type structure according to their realization forms. For bulk element and grating structures, they are mainly used in holography, interference lithography, and space optical communication systems, but they are not suitable for integrated photonic systems. The waveguide optical power beam splitter is an indispensable key functional device in the integrated photonic system. Mode interference waveguide structure and other design schemes. However, the optical power splitting ratio of these structured optical power beam splitters cannot be dynamically adjusted, which greatly limits their application fields and scope. Based on this, research on waveguide-type tunable optical power beam splitters has attracted widespread attention. It utilizes physical effects such as electro-optic, magneto-optic, or thermo-optic to change the optical power output of each branch and realize its dynamic regulation. In recent years, there are few design schemes for waveguide-type tunable optical power beam splitters, and there are many disadvantages, such as small dynamic range, high loss, high polarization dependence, strong wavelength dependence, sensitive structure parameters, and difficult manufacturing process. However, there is still a long way to go for practical applications. It should be pointed out that none of these solutions can be used in microfluidic photonic systems.
与上述传统可调光分束器相比，基于微流控技术的波导型可调光功率分束器是一类新型基础关键器件，不仅可在集成光子系统中用于实现新的光分束调控方法和技术，也可在微流控光子系统中用于实现新的生物光子传感和化学分析与诊断等重要功能，其应用前景十分广阔。目前，有关微流控可调光功率分束器的研究才刚刚开始，仍处于初步探索阶段，其有关报道还很少，且在调控性能、稳定性、与其它器件集成等某些或多个方面存在明显缺点，使其潜在应用大大受到限制。因而，探索新型波导型可调光功率分束器对于集成光子学领域发展具有重要意义。Compared with the traditional tunable optical beam splitters mentioned above, the waveguide-type tunable optical power beam splitter based on microfluidic technology is a new type of basic key device, which can not only be used to realize new optical beam splitters in integrated photonic systems Regulation methods and technologies can also be used in microfluidic photonic systems to realize important functions such as new biophotonic sensing and chemical analysis and diagnosis, and its application prospects are very broad. At present, the research on microfluidic tunable optical power beam splitters has just begun and is still in the preliminary exploration stage. There are obvious shortcomings in this aspect, which greatly limits its potential application. Therefore, exploring new waveguide-type tunable optical power beam splitters is of great significance for the development of integrated photonics.
发明内容Contents of the invention
本发明的目的是提供一种基于微流控技术的波导型可调光功率分束器，该分束器由非对称Y分支波导和和微流体通道构成，波导内光束在Y分支处发生分束，其分束比与微流体通道中的液体折射率密切相关。通过改变液体的折射率，从而实现两分支波导输出光功率的动态调控。该器件具有结构简单、易于设计和制作、波长依赖性低、测试简便等诸多优点。The purpose of the present invention is to provide a waveguide-type adjustable optical power beam splitter based on microfluidic technology. The beam splitter is composed of an asymmetric Y-branch waveguide and a microfluidic channel. The beam splitting ratio is closely related to the refractive index of the liquid in the microfluidic channel. By changing the refractive index of the liquid, the dynamic control of the output optical power of the two-branch waveguide is realized. The device has many advantages such as simple structure, easy design and manufacture, low wavelength dependence, and easy testing.
本发明技术方案如下：Technical scheme of the present invention is as follows:
一种基于微流控技术的波导型可调光功率分束器，如图1、图2和图3所示，其中图1为器件俯视平面图，图2和图3分别为器件在图1中A1A2、B1B2连线进行剖分的波导截面示意图。该分束器包括采用上包层材料15、芯层材料16和下包层材料17构成的一个非对称Y型分支波导结构、微流体通道8（其流体输入端口为11和12，流体输出端口为13）、上基片14、下基片18组成；所述Y型分支波导结构包括光输入直波导2、第一偏向波导3、第二偏向波导4、第三偏向波导5、光输出直波导7和光输出直波导9。所述光输入直波导2与光输出直波导7之间由第一偏向波导3、第二偏向波导4和第三偏向波导5顺序连接，使得光输入直波导2与光输出直波导7相互平行；光输入直波导2与光输出直波导9在同一直线上。微流体通道8位于光输出直波导9之上，且与第一偏向波导3的侧面相邻。第一偏向波导3、第二偏向波导4和第三偏向波导5与光输入直波导2之间的夹角分别为、和，所述夹角由上包层材料15、芯层材料16和下包层材料17的折射率决定。A waveguide-type adjustable optical power beam splitter based on microfluidic technology, as shown in Figure 1, Figure 2 and Figure 3, where Figure 1 is a top plan view of the device, Figure 2 and Figure 3 are the devices in Figure 1 A schematic diagram of the waveguide cross-section divided by the line A 1 A 2 and B 1 B 2 . This beam splitter comprises an asymmetric Y-shaped branched waveguide structure made of an upper cladding material 15, a core material 16 and a lower cladding material 17, a microfluidic channel 8 (its fluid input ports are 11 and 12, and the fluid output ports 13), an upper substrate 14, and a lower substrate 18; the Y-shaped branched waveguide structure includes a light input straight waveguide 2, a first deflection waveguide 3, a second deflection waveguide 4, a third deflection waveguide 5, and a light output straight waveguide waveguide 7 and light output straight waveguide 9. The light input straight waveguide 2 and the light output straight waveguide 7 are sequentially connected by the first deflection waveguide 3, the second deflection waveguide 4 and the third deflection waveguide 5, so that the light input straight waveguide 2 and the light output straight waveguide 7 are parallel to each other ; The light input straight waveguide 2 and the light output straight waveguide 9 are on the same straight line. The microfluidic channel 8 is located on the light output straight waveguide 9 and adjacent to the side of the first deflection waveguide 3 . The included angles between the first deflecting waveguide 3, the second deflecting waveguide 4 and the third deflecting waveguide 5 and the light input straight waveguide 2 are respectively , and , the included angle is determined by the refractive indices of the upper cladding material 15 , the core material 16 and the lower cladding material 17 .
两种不同浓度的液体由输入端口11和输入端口12分别注入，然后混合，其混合液体19再流经微流体通道8，最后经由输出端口13输出。光信号通过锥形光纤由端口1输入，耦合进直波导2后，然后传输到Y型分支处而分成两束光，其中一束光经由第一偏向波导3、第二偏向波导4和第三偏向波导5传播，最后从直波导7的输出端口6输出，而另一束光经由直波导9的输出端口10输出，从而实现光功率分束过程。Two liquids with different concentrations are respectively injected through the input port 11 and the input port 12 , and then mixed, and the mixed liquid 19 flows through the microfluidic channel 8 , and finally is output through the output port 13 . The optical signal is input from the port 1 through the tapered optical fiber, coupled into the straight waveguide 2, and then transmitted to the Y-shaped branch and divided into two beams, one of which passes through the first deflection waveguide 3, the second deflection waveguide 4 and the third deflection waveguide The deflected waveguide 5 propagates, and finally outputs from the output port 6 of the straight waveguide 7, while another beam of light is output through the output port 10 of the straight waveguide 9, thereby realizing the optical power beam splitting process.
本发明提供的基于微流控技术的波导型可调光功率分束器由有机聚合物材料构成，器件为Y分支波导结构和微流体通道结构构成，采用光学光刻方法可容易制作，这里不再详细介绍其制作过程。The waveguide-type adjustable optical power beam splitter based on microfluidic technology provided by the present invention is composed of organic polymer materials, and the device is composed of a Y-branch waveguide structure and a microfluidic channel structure, which can be easily fabricated by optical lithography. Then introduce its production process in detail.
本发明的工作原理是：The working principle of the present invention is:
本发明提供的基于微流控技术的波导型可调光功率分束器的波导横切面分别如图2和图3所示，设上包层材料15和下包层材料17折射率分别为和、芯层材料16折射率为，包层材料和芯层材料均为有机聚合物材料；其波导芯层厚度、脊高以及宽度分别为、以及。而在微通道内混合液体19折射率为，其折射率大小由输入端口11和输入端口12分别注入的液体浓度和流速来决定。对于所设计的可调光功率分束器，图1中所示的夹角需满足如下条件：The waveguide cross-sections of the waveguide-type adjustable optical power beam splitter based on microfluidic technology provided by the present invention are shown in Figure 2 and Figure 3 respectively, assuming that the upper cladding material 15 and the lower cladding material 17 have a refractive index of and , The refractive index of the core layer material 16 , the cladding material and core material are both organic polymer materials; the core thickness, ridge height and width of the waveguide are respectively , as well as . While the refractive index of the mixed liquid 19 in the microchannel , whose refractive index is determined by the concentration and flow rate of the liquid injected into the input port 11 and the input port 12 respectively. For the designed tunable optical power beam splitter, the included angle shown in Figure 1 The following conditions must be met:
其中其中和分别表示TE波在非波导位置处和波导位置处的等效折射率。among them and denote the equivalent refractive index of the TE wave at the non-guided position and at the waveguided position, respectively.
光信号输入到直波导2后，在Y型分支处发生分束，其中一束光依次经由第一偏向波导3、第二偏向波导4、第三偏向波导5和直波导7传播，最后从端口6输出，而另一束光经由直波导9传播，从端口10输出。通过改变输入端口11和输入端口12所注入的液体浓度和流速，则微流体通道中混合液体19的折射率将发生变化，从而引起直波导9在Y型分支处的等效折射率发生相应改变。根据光波导理论，两分支波导内光束功率将相应发生改变，从而最终实现光功率分束器的动态调控输出。After the optical signal is input into the straight waveguide 2, beam splitting occurs at the Y-shaped branch, and one beam of light propagates sequentially through the first deflection waveguide 3, the second deflection waveguide 4, the third deflection waveguide 5 and the straight waveguide 7, and finally passes through the port 6 output, while another beam of light propagates through the straight waveguide 9 and is output from the port 10. By changing the concentration and flow rate of the liquid injected into the input port 11 and the input port 12, the refractive index of the mixed liquid 19 in the microfluidic channel will change, thereby causing a corresponding change in the equivalent refractive index of the straight waveguide 9 at the Y-shaped branch. . According to the optical waveguide theory, the beam power in the two branch waveguides will change accordingly, so as to finally realize the dynamic control output of the optical power beam splitter.
本发明提出的波导型可调光功率分束器，是一种基于微流控技术的新型功能器件。其原理是通过改变微流体通道内混合液体的折射率，利用Y型分支波导输出光功率受液体折射率的影响，从而改变光功率的输出，最终实现光功率分束器输出分束比的动态调控。该器件采用微流体来实现调控，具有调控范围大、波长和偏振依赖性低、结构简单、易于设计与制作、易于调控等诸多优点。The waveguide-type adjustable optical power beam splitter proposed by the invention is a new functional device based on microfluidic technology. The principle is that by changing the refractive index of the mixed liquid in the microfluidic channel, the output optical power of the Y-shaped branch waveguide is affected by the refractive index of the liquid, thereby changing the output of the optical power, and finally realizing the dynamic output splitting ratio of the optical power beam splitter. regulation. The device uses microfluidics to achieve regulation, and has many advantages such as large regulation range, low wavelength and polarization dependence, simple structure, easy design and fabrication, and easy regulation.
附图说明Description of drawings
图1是本发明提供的波导型可调光功率分束器的俯视图。Fig. 1 is a top view of a waveguide-type adjustable optical power beam splitter provided by the present invention.
图2是本发明提供的波导型可调光功率分束器的俯视图中A1A2连线进行剖分的波导横截面示意图。Fig. 2 is a schematic cross-sectional view of the waveguide divided by the line A 1 A 2 in the top view of the waveguide-type adjustable optical power beam splitter provided by the present invention.
图3是本发明提供的波导型可调光功率分束器的俯视图中B1B2连线进行剖分的波导横截面示意图。Fig. 3 is a schematic cross-sectional view of the waveguide divided by the line B 1 B 2 in the top view of the waveguide-type adjustable optical power beam splitter provided by the present invention.
图4是本发明提供的波导型可调光功率分束器的归一化光功率输出随混合液体折射率变化关系，(a)TE波，(b)TM，其中实线和虚线分别表示端口6和端口10输出的归一化输出光功率。Fig. 4 is the normalized optical power output of the waveguide type adjustable optical power beam splitter provided by the present invention as a function of the variation of the refractive index of the mixed liquid, (a) TE wave, (b) TM, wherein solid lines and dashed lines represent ports respectively 6 and the normalized output optical power output from port 10.
图5是本发明提供的波导型可调光功率分束器在混合液体折射率分别为(a)1.470和(b)1.510时TE波光信号在传播过程中的光场分布。Fig. 5 is the optical field distribution of the TE wave optical signal during propagation when the refractive index of the mixed liquid is respectively (a) 1.470 and (b) 1.510 for the waveguide-type adjustable optical power beam splitter provided by the present invention.
图6是本发明提供的波导型可调光功率分束器的归一化光功率输出随工作波长变化关系，(a)TE波，(b)TM，其中实线和虚线分别表示端口6和端口10输出的归一化输出光功率，液体折射率为1.470。Fig. 6 is the normalized optical power output of the waveguide-type tunable optical power beam splitter provided by the present invention as a function of the operating wavelength variation, (a) TE wave, (b) TM, wherein the solid line and the dashed line represent port 6 and Normalized output optical power at port 10, liquid refractive index 1.470.
具体实施方式Detailed ways
下面结合附图对本发明进行进一步的说明。通常，光通信系统中通信窗口为近红外光，这里，假定光信号的工作波长为1.55μm。如图1所示，波导2、3、4、5、7、9的芯层材料为SU-8，其折射率为1.570；其上包层材料15为聚合物材料PMMA，其折射率为1.492；其下包层材料17为聚合物材料UV-15，其折射率为1.50。其波导芯层厚度、脊高以及宽度分别为0.7μm、0.5μm、5.0μm，其偏向夹角为1.0度。假定待测液体折射率的变化范围为1.430~1.540。The present invention will be further described below in conjunction with the accompanying drawings. Usually, the communication window in an optical communication system is near-infrared light. Here, it is assumed that the working wavelength of the optical signal is 1.55 μm. As shown in Figure 1, the core material of the waveguides 2, 3, 4, 5, 7, and 9 is SU-8, and its refractive index is 1.570; its upper cladding material 15 is polymer material PMMA, and its refractive index is 1.492 ; The lower cladding material 17 is a polymer material UV-15 with a refractive index of 1.50. Its waveguide core thickness , ridge height and width Respectively 0.7μm, 0.5μm, 5.0μm, the deflection angle is 1.0 degrees. Assume that the range of refractive index of the liquid to be measured is 1.430~1.540.
这里采用光束传播法（BPM）对本发明提供的波导型可调光功率分束器的光学性能进行模拟。当待测液体的折射率在1.430~1.540之间变化时，其波导输出端口6和输出端口10的归一化光功率输出随液体折射率变化如图4(a)和(b)所示。由图可以看出，其输出端口6的光功率输出随折射率增大而单调下降，而输出端口10的光功率输出随折射率增大而单调增加，且变化动态范围大于36.5dB。另外，其光波导损耗仅为0.06 dB。对于不同的偏振光输入，其光功率输出变化基本一致，表明其偏振依赖性很小。当液体的折射率分别为1.470和1.510时，光功率分束器内光场分布如图5(a)和(b)所示，由图可以直观看出，光功率分束器的两分支波导内光功率大小与液体折射率大小有关，即通过改变混合液体折射率大小，从而实现光功率输出的动态调控。Here, the beam propagation method (BPM) is used to simulate the optical performance of the waveguide-type adjustable optical power beam splitter provided by the present invention. When the refractive index of the liquid to be tested varies between 1.430 and 1.540, the normalized optical power output of the waveguide output port 6 and output port 10 varies with the refractive index of the liquid as shown in Figure 4(a) and (b). It can be seen from the figure that the optical power output of the output port 6 decreases monotonously with the increase of the refractive index, while the optical power output of the output port 10 increases monotonically with the increase of the refractive index, and the dynamic range of the change is greater than 36.5dB. In addition, its optical waveguide loss is only 0.06 dB. For different polarized light inputs, its optical power output changes basically the same, indicating that its polarization dependence is small. When the refractive index of the liquid is 1.470 and 1.510 respectively, the optical field distribution in the optical power beam splitter is shown in Figure 5(a) and (b). The internal optical power is related to the refractive index of the liquid, that is, the dynamic regulation of the optical power output can be realized by changing the refractive index of the mixed liquid.
通常，入射光信号存在一定的谱宽，约几十纳米左右，如光通信系统C波段窗口为1530nm~1565nm。本发明进一步考察了本发明提供的液体折射率传感器性能对其工作波长的依赖性。这里给出了模拟结果，如图6(a)和(b)所示，表示输出端口6和输出端口10的光功率输出随工作波长变化。模拟结果表明，其光功率输出随工作波长变化很小。因此，该器件的波长依赖性很低，这对于其实际应用十分有用。Usually, the incident optical signal has a certain spectral width, about tens of nanometers, such as the C-band window of the optical communication system is 1530nm~1565nm. The present invention further investigates the dependence of the performance of the liquid refractive index sensor provided by the present invention on its working wavelength. The simulation results are given here, as shown in Fig. 6(a) and (b), showing that the optical power output of the output port 6 and the output port 10 varies with the operating wavelength. Simulation results show that its optical power output varies little with the working wavelength. Therefore, the wavelength dependence of this device is low, which is very useful for its practical application.
本发明所提出的一种波导型可调光功率分束器，具有调控范围大、易于调控、结构简单、易于制作、波长和偏振依赖性低等优点，在集成光子学和微流控光子系统中具有重要应用前景。A waveguide-type adjustable optical power beam splitter proposed by the present invention has the advantages of large control range, easy control, simple structure, easy manufacture, low wavelength and polarization dependence, etc. It is used in integrated photonics and microfluidic photonic systems. has important application prospects.
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