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CN103792665A - Beam shaping device based on microfluidic optical technology - Google Patents

Beam shaping device based on microfluidic optical technology Download PDF

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CN103792665A
CN103792665A CN201410037622.1A CN201410037622A CN103792665A CN 103792665 A CN103792665 A CN 103792665A CN 201410037622 A CN201410037622 A CN 201410037622A CN 103792665 A CN103792665 A CN 103792665A
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fluid
receiving surface
incident laser
cladding
optical waveguide
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乐孜纯
孙运利
王昌辉
付明磊
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Zhejiang University of Technology ZJUT
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Abstract

一种基于微流控光学技术的光束整形装置,包括流体光波导主体、入射激光器、光束接收面和流出流体贮存器,流体光波导主体上开有用于承载微流体的流道,流道包括一个芯层流体入口、两个对称的包层流体入口、流体微腔和两个对称的流体出口,芯层流体入口、包层流体入口均与流体微腔的入口侧连通,流体微腔的出口侧与两个流体出口连接,流体出口与流出流体贮存器连通,入射激光器和光束接收面同轴布置,入射激光器和所述光束接收面的轴线与流体流动方向轴线相交,入射激光器和所述光束接收面以相交点为对称中心对称放置,光束传播方向与流体流动方向呈90°±10°。本发明光传播过程损耗小、结构简化、制作方便、调控灵活性较好。

A beam shaping device based on microfluidic optical technology, including a fluid optical waveguide body, an incident laser, a beam receiving surface, and an outflow fluid reservoir. The fluid optical waveguide body is opened with a flow channel for carrying microfluids. The flow channel includes a The core layer fluid inlet, two symmetrical cladding fluid inlets, the fluid microcavity and two symmetrical fluid outlets, the core fluid inlet and the cladding fluid inlet are all connected to the inlet side of the fluid microcavity, and the outlet side of the fluid microcavity It is connected with two fluid outlets, the fluid outlet communicates with the outflow fluid reservoir, the incident laser and the beam receiving surface are coaxially arranged, the axes of the incident laser and the beam receiving surface intersect with the fluid flow direction axis, and the incident laser and the beam receiving surface The surface is placed symmetrically with the intersection point as the center of symmetry, and the beam propagation direction and the fluid flow direction are 90°±10°. The invention has the advantages of small loss in the light propagation process, simplified structure, convenient manufacture and good control flexibility.

Description

基于微流控光学技术的光束整形装置Beam shaping device based on microfluidic optical technology

技术领域technical field

本发明涉及光学器件和检测系统领域,尤其是一种光束整形装置。背景技术The invention relates to the field of optical devices and detection systems, in particular to a light beam shaping device. Background technique

光束的整形技术包括了对光束的聚焦、准直、偏转、分束、耦合等调控,通常利用调控光学介质的介电常数和磁导率分布并进而改变空间电磁场分布来实现,比如对光学器件的折射率分布的调控就可以方便地实现对入射光束的聚焦、准直、偏转、分束等控制。近年来快速发展的微流控光学技术为我们提供了光束整形的新方法,其原理是通过控制流体流动来实现对光线微观尺度的控制。鉴于此,微流控技术和系统可以被引入可控折射率流体光波导的设计和制作中。如果一种折射率较高的流体能够在折射率较低的流体中扩散,并且在扩散的过程中能够实现一种稳定的分布,那么在流体扩散与对流的过程中就会呈现出可调控的折射率分布,比如,在基底材料上利用刻蚀技术制作微流体沟道,配合以恒流流体装置,便可以实现基于对流和扩散效应的微流体渐变折射率分布透镜(Mao X,Lin SS,Lapsley MI,Shi J,Juluri BK,Tunable liquid gradient refractive index(L-GRIN)lens with two degrees of freedom,Lab.Chip.,9(2009):2050-2058,具有2个自由度调节能力的可调谐液体渐变折射率透镜,片上实验室,9(2009):2050-2058;Yang Y,Liu AQ,Chin LK,Zhang XM,Tsai DP,Lin CL,Lu C,Wang GP,Zheludev NI,Optofluidic waveguide as atransformation optics device for lightwave bending andmanipulation,Nat.Commun.,3(2012):651-657,用于光波弯曲和控制的基于光流控波导的转换光学器件,自然-通信,3(2012):651-657)。要利用微流控光学技术实现光束的动态整形,基于微流控光学技术的光束整形方法,以及基于该方法的流体光波导结构是必须要解决的核心技术问题。Beam shaping technology includes focusing, collimation, deflection, beam splitting, coupling and other adjustments to the beam, usually by adjusting the dielectric constant and permeability distribution of the optical medium and then changing the spatial electromagnetic field distribution, such as for optical devices The adjustment of the refractive index distribution can easily realize the control of focusing, collimation, deflection, and beam splitting of the incident beam. The rapid development of microfluidic optical technology in recent years has provided us with a new method of beam shaping. The principle is to control the microscopic scale of light by controlling the flow of fluid. In view of this, microfluidic technology and systems can be introduced into the design and fabrication of fluid optical waveguides with controllable refractive index. If a fluid with a higher refractive index can diffuse in a fluid with a lower refractive index, and can achieve a stable distribution during the diffusion process, then there will be a controllable flow in the process of fluid diffusion and convection. Refractive index distribution, for example, using etching technology to fabricate microfluidic channels on the substrate material, combined with a constant flow fluid device, can realize microfluidic graded refractive index distribution lenses based on convection and diffusion effects (Mao X, Lin SS, Lapsley MI, Shi J, Juluri BK, Tunable liquid gradient refractive index (L-GRIN) lens with two degrees of freedom, Lab.Chip., 9(2009):2050-2058, tunable with 2 degrees of freedom adjustment ability Liquid graded-index lenses, Lab on a Chip, 9(2009):2050-2058; Yang Y, Liu AQ, Chin LK, Zhang XM, Tsai DP, Lin CL, Lu C, Wang GP, Zheludev NI, Optofluidic waveguide as a transformation Optics device for lightwave bending and manipulation, Nat.Commun., 3(2012):651-657 ). To use microfluidic optics technology to achieve dynamic beam shaping, the beam shaping method based on microfluidic optics technology and the fluid optical waveguide structure based on this method are the core technical problems that must be solved.

发明内容Contents of the invention

为了克服已有光束整形方法的光传播过程损耗大、结构复杂、制作困难、调控灵活性差的不足,本发明提供一种光传播过程损耗小、结构简化、制作方便、调控灵活性较好的基于微流控光学技术的光束整形装置。In order to overcome the deficiencies of the existing beam shaping methods, such as large loss in light propagation process, complex structure, difficult production, and poor control flexibility, the present invention provides a light transmission process based on low loss, simplified structure, convenient production, and good control flexibility. Beam shaping device for microfluidic optics.

本发明解决其技术问题所采用的技术方案是:The technical solution adopted by the present invention to solve its technical problems is:

一种基于微流控光学技术的光束整形装置,包括流体光波导主体、入射激光器、光束接收面和流出流体贮存器,所述流体光波导主体上开有用于承载微流体的流道,所述流道包括一个芯层流体入口、两个对称的包层流体入口、流体微腔和两个对称的流体出口,所述芯层流体入口、包层流体入口均与所述流体微腔的入口侧连通,所述流体微腔的出口侧与两个流体出口连接,所述流体出口与流出流体贮存器连通,所述入射激光器和所述光束接收面同轴布置,所述入射激光器和所述光束接收面的轴线与流体流动方向轴线相交,所述入射激光器和所述光束接收面以相交点为对称中心对称放置,所述入射激光器将设定波长的激光束入射到所述流体光波导,光束传播方向与流体流动方向呈90°±10°,所述光束接收面接收经过流体光波导后输出的光束。A beam shaping device based on microfluidic optical technology, comprising a fluid optical waveguide main body, an incident laser, a beam receiving surface and an outflow fluid reservoir, the fluid optical waveguide main body is provided with a flow channel for carrying microfluids, the The flow channel comprises a core fluid inlet, two symmetrical cladding fluid inlets, a fluid microcavity and two symmetrical fluid outlets, the core fluid inlet and the cladding fluid inlet are all connected to the inlet side of the fluid microcavity The outlet side of the fluid microcavity is connected to two fluid outlets, the fluid outlet is communicated with the outflow fluid reservoir, the incident laser and the beam receiving surface are coaxially arranged, the incident laser and the beam The axis of the receiving surface intersects the axis of the fluid flow direction, the incident laser and the beam receiving surface are symmetrically placed with the intersection point as the center of symmetry, and the incident laser injects a laser beam of a set wavelength into the fluid optical waveguide, and the beam The direction of propagation is 90°±10° to the direction of fluid flow, and the beam receiving surface receives the output beam after passing through the fluid optical waveguide.

进一步,所述光束传播方向垂直于流体流动方向,光束接收面与入射激光器同轴。Further, the beam propagation direction is perpendicular to the fluid flow direction, and the beam receiving surface is coaxial with the incident laser.

所述光束整形装置还包括注入流体的蠕动泵,所述注入流体的蠕动泵位于芯层流体入口、包层流体入口,通过控制蠕动泵实现对流体的流速的调节,以及通过控制蠕动泵实现对流体的温度的调节。The beam shaping device also includes a peristaltic pump for injecting fluid. The peristaltic pump for injecting fluid is located at the inlet of the core layer fluid and the inlet of the cladding fluid. The adjustment of the flow rate of the fluid is realized by controlling the peristaltic pump, and the adjustment of the flow rate of the fluid is realized by controlling the peristaltic pump. The regulation of the temperature of the fluid.

本发明的技术构思为:利用构成流体光波导的芯层和包层两种流体的扩散和对流过程动态调控波导折射率,影响两种流体扩散与对流过程的因素很多,比如温度、浓度、流速以及微流体种类的选定、流体光波导主体结构和尺寸,并进而影响折射率分布。在有限长的微沟道中如果流体流速很高,芯层流体的扩散作用有限,这时对流效应占主导地位,此时流体光波导可以近似看成是阶跃折射率分布(垂直于流体流动方向)波导结构;而当流体流速较低,则扩散效应明显,此时无论是微腔的横截面方向还是沿着流体流动方向都要考虑扩散效应对浓度梯度的影响,而芯层流体在包层流体中的扩散正是渐变折射率流体光波导能够实现的理论基础。因此,通过控制芯层流体和包层流体的流速和流体种类可以有效控制扩散和对流的过程,从而控制流体扩散浓度以及折射率的空间分布。The technical idea of the present invention is to dynamically control the refractive index of the waveguide by utilizing the diffusion and convection process of the core layer and the cladding fluid that constitute the fluid optical waveguide. There are many factors that affect the diffusion and convection process of the two fluids, such as temperature, concentration, and flow rate. As well as the selection of the type of microfluid, the structure and size of the main body of the fluid optical waveguide, and then affect the distribution of the refractive index. In a finite-length microchannel, if the fluid velocity is high and the diffusion of the core fluid is limited, then the convective effect dominates. At this time, the fluid optical waveguide can be approximately regarded as a step refractive index distribution (perpendicular to the fluid flow direction ) waveguide structure; and when the fluid flow rate is low, the diffusion effect is obvious. At this time, whether it is the cross-sectional direction of the microcavity or along the fluid flow direction, the influence of the diffusion effect on the concentration gradient must be considered, while the core fluid is in the cladding layer The diffusion in the fluid is the theoretical basis for the realization of the graded-index fluid optical waveguide. Therefore, the process of diffusion and convection can be effectively controlled by controlling the flow rate and fluid type of the core fluid and cladding fluid, thereby controlling the spatial distribution of fluid diffusion concentration and refractive index.

本发明的有益效果主要表现在:1、基于微流控光学技术的光束整形方法,以两种流体之间的对流和扩散过程形成流体光波导结构,通过控制芯层和包层流体的流速以及流体种类,可以得到灵活多变的折射率分布;2、通过发明基于微流控光学技术的流体光波导,可以构建对光束进行聚焦、准直、分束、偏转等功能的新型器件;3、实现了光束聚焦、分束、偏转的动态可调、且属于在线实时调节;4、光束传播方向垂直于流体流动方向,有效降低了光束的传播损耗。The beneficial effects of the present invention are mainly manifested in: 1. Based on the beam shaping method of microfluidic optical technology, the fluid optical waveguide structure is formed by the convection and diffusion process between the two fluids, by controlling the flow velocity of the core layer and the cladding fluid and Fluid types can obtain flexible and variable refractive index distributions; 2. By inventing fluid optical waveguides based on microfluidic optical technology, new devices that can focus, collimate, split, and deflect light beams can be constructed; 3. The dynamic adjustment of beam focusing, beam splitting and deflection is realized, and it belongs to online real-time adjustment; 4. The beam propagation direction is perpendicular to the fluid flow direction, which effectively reduces the propagation loss of the beam.

附图说明Description of drawings

图1是本发明基于微流控光学技术的光束整形装置的示意图。Fig. 1 is a schematic diagram of a beam shaping device based on microfluidic optical technology of the present invention.

图2是本发明基于微流控光学技术的光束整形装置中流体光波导主体承载微流体的空腔示意图。Fig. 2 is a schematic diagram of the cavity of the fluid optical waveguide body carrying the microfluid in the beam shaping device based on the microfluidic optical technology of the present invention.

图3是本发明流体光波导沿着流体流动方向不同横截面处的折射率分布。Fig. 3 is the distribution of refractive index at different cross-sections of the fluidic optical waveguide of the present invention along the direction of fluid flow.

图4是不同流速情况下,沿着流体流动方向中心位置横截面处(即激光光束入射处)的折射率分布。Figure 4 shows the distribution of the refractive index at the cross section at the center position along the fluid flow direction (that is, where the laser beam is incident) at different flow rates.

图5是当两侧包层流速不同的情况下,改变一侧包层流体流速,沿着流体流动方向中心位置横截面处(即激光光束入射处)的折射率分布。Figure 5 shows the distribution of the refractive index at the cross section at the center of the fluid flow direction (that is, where the laser beam is incident) when the flow velocity of the cladding on one side is changed when the flow velocity of the cladding on both sides is different.

图6是包层流体折射率高于芯层流体折射率时,流体光波导折射率分布随流速的变化。Fig. 6 is the variation of the refractive index distribution of the fluid optical waveguide with the flow velocity when the refractive index of the cladding fluid is higher than that of the core fluid.

具体实施方式Detailed ways

下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.

参照图1~图6,一种基于微流控光学技术的光束整形方法,该整形方法采用基于微流控光学技术的光束整形装置,所述光束整形装置包括流体光波导主体1、入射激光器2、光束接收面3和流出流体贮存器4,所述流体光波导主体1上开有用于承载微流体的流道,所述流道包括一个芯层流体入口5、两个对称的包层流体入口6、流体微腔7和两个对称的流体出口8,所述芯层流体入口5、包层流体入口6均与所述流体微腔7的入口侧连通,所述流体微腔7的出口侧与两个流体出口8连接,所述流体出口8与流出流体贮存器4连通,所述入射激光器2和所述光束接收面3同轴布置,所述入射激光器和所述光束接收面的轴线与流体流动方向轴线相交,所述入射激光器和所述光束接收面以相交点为对称中心对称放置,所述入射激光器将设定波长的激光束入射到所述流体光波导,光束传播方向与流体流动方向呈90°±10°,所述光束接收面接收经过流体光波导后输出的光束。Referring to Figures 1 to 6, a beam shaping method based on microfluidic optics technology, the shaping method uses a beam shaping device based on microfluidic optics technology, the beam shaping device includes a fluid optical waveguide body 1, an incident laser 2 , a light beam receiving surface 3 and an outflow fluid reservoir 4, the fluid optical waveguide main body 1 is provided with a channel for carrying microfluidics, and the channel includes a core fluid inlet 5 and two symmetrical cladding fluid inlets 6. The fluid microcavity 7 and two symmetrical fluid outlets 8, the core layer fluid inlet 5 and the cladding fluid inlet 6 are all communicated with the inlet side of the fluid microcavity 7, and the outlet side of the fluid microcavity 7 Connected with two fluid outlets 8, the fluid outlet 8 communicates with the outflow fluid reservoir 4, the incident laser 2 and the beam receiving surface 3 are coaxially arranged, and the axes of the incident laser and the beam receiving surface are in line with the The axes of the fluid flow directions intersect, and the incident laser and the beam receiving surface are symmetrically placed with the intersection point as the center of symmetry. The direction is 90°±10°, and the beam receiving surface receives the output beam after passing through the fluid optical waveguide.

进一步,所述光束传播方向垂直于流体流动方向,光束接收面与入射激光器同轴。Further, the beam propagation direction is perpendicular to the fluid flow direction, and the beam receiving surface is coaxial with the incident laser.

所述光束整形装置还包括注入流体的蠕动泵,所述注入流体的蠕动泵位于芯层流体入口、包层流体入口,通过控制蠕动泵实现对流体的流速的调节,以及通过控制蠕动泵实现对流体的温度的调节。The beam shaping device also includes a peristaltic pump for injecting fluid. The peristaltic pump for injecting fluid is located at the inlet of the core layer fluid and the inlet of the cladding fluid. The adjustment of the flow rate of the fluid is realized by controlling the peristaltic pump, and the adjustment of the flow rate of the fluid is realized by controlling the peristaltic pump. The regulation of the temperature of the fluid.

本实施例的光束整形装置,实现的光束整形方法包括以下步骤:In the beam shaping device of this embodiment, the beam shaping method implemented includes the following steps:

(1)所述芯层流体和包层流体彼此之间只存在扩散和对流运动(芯层流体和包层流体彼此之间不发生化学反应),包层流体均衡地环绕着芯层流体,所述芯层流体和包层流体是具有不同折射率的两种流体,所述芯层流体和包层流体在流体微腔中流动,共同构成流体光波导;(1) There is only diffusion and convection between the core fluid and the cladding fluid (the core fluid and the cladding fluid do not chemically react with each other), and the cladding fluid surrounds the core fluid in a balanced manner, so The core fluid and the cladding fluid are two fluids with different refractive indices, and the core fluid and the cladding fluid flow in the fluid microcavity to jointly form a fluid optical waveguide;

(2)所述入射激光器将设定波长的激光束入射到所述流体光波导,光束传播方向与流体流动方向呈90°±10°,所述光束接收面接收经过流体光波导后输出的光束;(2) The incident laser injects the laser beam with a set wavelength into the fluid optical waveguide, the beam propagation direction is 90°±10° with the fluid flow direction, and the beam receiving surface receives the output beam after passing through the fluid optical waveguide ;

(3)通过调节流体流速、温度、浓度、微流体种类,控制流体扩散过程以及折射率的空间分布,实现光束整形。(3) By adjusting the fluid flow rate, temperature, concentration, and microfluidic type, controlling the fluid diffusion process and the spatial distribution of the refractive index, beam shaping is realized.

本实施例中,所述步骤(3)中,通过控制芯层流体和包层流体的流速和流体种类可以有效控制扩散和对流的过程,从而控制流体扩散以及折射率的空间分布;具体如下:In this embodiment, in the step (3), the process of diffusion and convection can be effectively controlled by controlling the flow velocity and fluid type of the core fluid and the cladding fluid, thereby controlling the spatial distribution of fluid diffusion and refractive index; the details are as follows:

1)流体光波导不同横截面的折射率分布,假设芯层流体与包层流体对流和扩散过程中的扩散系数为常数(1×10-9m2/s),设定蠕动泵控制参数,使得包层与芯层流体的流速相同(同为2500pL/s),并让沿着流体方向和垂直流体方向的扩散效果都比较明显,得出沿着流体流动方向不同位置的横截面处的折射率分布,如图3所示,折射率分布随着远离流体入口,折射率分布曲线渐渐趋于平缓。这种折射率分布最直接的效果就是可以对垂直入射的激光束的焦距进行调控。1) The refractive index distribution of different cross-sections of the fluid optical waveguide, assuming that the diffusion coefficient during the convection and diffusion process between the core fluid and the cladding fluid is constant (1×10 -9 m 2 /s), and setting the control parameters of the peristaltic pump, Make the flow rate of the cladding and core fluids the same (both 2500pL/s), and make the diffusion effect along the fluid direction and the vertical fluid direction more obvious, and obtain the refraction at the cross section at different positions along the fluid flow direction As shown in Figure 3, the refractive index distribution curve tends to be flatter gradually as the refractive index distribution moves away from the fluid inlet. The most direct effect of this refractive index distribution is that the focal length of the vertically incident laser beam can be adjusted.

2)流速对折射率分布的影响,为了研究流体流速的对折射率分布的影响,保持其他参数不变,选择沿着流体流动方向中心位置横截面处(即激光光束入射处)的折射率分布作为参考,得出流体流速对波导折射率分布的影响,如图4所示,流速较低时(Q1=Q2=Qc=1000pL/s),折射率分布比较平缓,流速较高时(Q1=Q2=Qc=5000pL/s),折射率分布比较尖锐。这种变化可以在光束位置不变情况下通过调节流速达到调节折射率分布,从而实现对光束会聚的连续可调,即对光束的连续动态整形。2) The influence of flow velocity on the distribution of the refractive index. In order to study the influence of the flow velocity of the fluid on the distribution of the refractive index, keeping other parameters unchanged, the refractive index distribution at the cross section at the center of the fluid flow direction (that is, where the laser beam is incident) is selected. As a reference, the influence of the fluid velocity on the distribution of the refractive index of the waveguide is obtained. As shown in Figure 4, when the flow velocity is low (Q 1 =Q 2 =Q c =1000pL/s), the refractive index distribution is relatively flat, and when the flow velocity is high (Q 1 =Q 2 =Q c =5000pL/s), the refractive index distribution is relatively sharp. This change can adjust the refractive index distribution by adjusting the flow velocity under the condition that the position of the beam remains unchanged, so as to realize the continuous adjustment of the beam convergence, that is, the continuous dynamic shaping of the beam.

3)两侧包层流速不同对折射率分布的影响,前面讨论的条件是芯层流速与两侧包层相同流速的情况,这种流速条件得到的结果是折射率中心在流体微腔的中心处。如果保持一侧的包层流体不变,改变另一侧包层流体流速,则可以更加灵活地调节流体光波导的折射率分布,得到沿光轴不对称的折射率分布,进而可以调控光束的偏转。同样选择沿着流体流动方向中心位置横截面处(即激光光束入射处)的折射率分布作为参考,保持Qc=Q2=2500pL/s,改变Q1,即一侧包层与芯层流速恒定为2500pL/s,另一侧包层流速分别选取了500pL/s、1500pL/s、2500pL/s、5000pL/s和10000pL/s这时的折射率分布中心从-25μm变化到28μm,如图5所示。这种空间折射率偏移的变化对光线最直接的影响就是可以实现光束的聚焦偏转,且偏转角度随着包层流速的变化连续可调。3) The influence of different cladding flow rates on both sides on the refractive index distribution. The condition discussed above is the case where the flow rate of the core layer is the same as that of the cladding layers on both sides. The result of this flow rate condition is that the refractive index center is at the center of the fluid microcavity place. If the cladding fluid on one side is kept constant and the flow velocity of the cladding fluid on the other side is changed, the refractive index distribution of the fluid optical waveguide can be adjusted more flexibly, and an asymmetric refractive index distribution along the optical axis can be obtained, which in turn can control the beam's deflection. Also select the refractive index distribution at the cross section at the center position along the fluid flow direction (that is, where the laser beam is incident) as a reference, keep Q c = Q 2 = 2500pL/s, change Q 1 , that is, the flow velocity of the cladding layer and the core layer on one side The constant is 2500pL/s, and the cladding flow rate on the other side is respectively selected as 500pL/s, 1500pL/s, 2500pL/s, 5000pL/s and 10000pL/s. At this time, the center of the refractive index distribution changes from -25μm to 28μm, as shown in the figure 5. The most direct impact of this spatial refractive index shift on the light is that it can realize the focus and deflection of the beam, and the deflection angle can be continuously adjusted with the change of the cladding flow velocity.

4)包层流体折射率高于芯层流体折射率对流体光波导折射率分布的影响,当包层流体采用折射率较高的乙二醇稀溶液,芯层流体采用折射率较低的去离子水,同时保持芯层和包层流体流速相等。当连续调整流体流速大小时,得出沿着流体流动方向中心位置横截面处(即激光光束入射处)的折射率分布,如图6所示。从图6可以看出,折射率分布出现了中心凹陷,这种分布最简单的应用是在光束的分束器件上,并在分束的同时实现了光束的聚焦。此外,动态调节包层流体的流速,例如图6左下方曲线显示了Q1=10000pL/s、Qc=Q2=2500pL/s时的折射率分布,可以实现光束分光比的连续可调。4) The influence of the refractive index of the cladding fluid being higher than that of the core fluid on the distribution of the refractive index of the fluid optical waveguide. When the cladding fluid adopts dilute ethylene glycol solution with a higher Ionized water while maintaining equal core and cladding fluid flow rates. When the fluid flow velocity is continuously adjusted, the refractive index distribution at the cross section at the center position along the fluid flow direction (that is, where the laser beam is incident) is obtained, as shown in Figure 6. It can be seen from Figure 6 that the refractive index distribution has a central depression. The simplest application of this distribution is on the beam splitting device of the beam, and the beam is focused while splitting the beam. In addition, dynamically adjusting the flow rate of the cladding fluid, for example, the lower left curve in Figure 6 shows the refractive index distribution when Q 1 =10000pL/s, Q c =Q 2 =2500pL/s, which can realize continuous adjustment of the beam splitting ratio.

5)温度、浓度、微流体种类对流体光波导折射率分布的影响,所述温度变化对流体光波导折射率分布的影响,表现在芯层和包层流体温度的升高使得扩散系数变大(例如,芯层流体采用质量分数为0.8的乙二醇溶液时,当温度从30°C变化到50°C,扩散系数变化从3.19×10-10m2/s变化到4.63×10-10m2/s),进而使得流体光波导的折射率分布曲线更平缓;所述温度变化对芯层流体和包层流体的影响是一致的。所述浓度变化对流体光波导折射率分布的影响,浓度越高则扩散系数越小(例如,当乙二醇与去离子水浓度比在0.0250-0.950之间时,扩散系数的变化范围在9.28×10-10m2/s到1.67×10-10m2/s之间),进而使得流体光波导的折射率分布曲线更尖锐;所述浓度变化对芯层流体和包层流体的影响的趋势是一致的,但可以单独调控。所述微流体种类对流体光波导折射率分布的影响,表现在不同微流体具有不同的粘滞系数,流体微腔壁与流体之间的粘滞阻力对微流体扩散过程产生影响,靠近流体微腔壁的位置处,流体速率比微腔中心处的流速要小,流速减小的区域扩散更明显,因此相对于中心处的折射率分布曲线,边缘处的折射率分布相对平滑。5) The influence of temperature, concentration, and type of microfluid on the distribution of the refractive index of the fluid optical waveguide. The influence of the temperature change on the distribution of the refractive index of the fluid optical waveguide is manifested in the increase in the temperature of the core and cladding fluids, which increases the diffusion coefficient (For example, when the core fluid uses ethylene glycol solution with a mass fraction of 0.8, when the temperature changes from 30°C to 50°C, the diffusion coefficient changes from 3.19×10 -10 m 2 /s to 4.63×10 -10 m 2 /s), thereby making the refractive index distribution curve of the fluid optical waveguide more gentle; the influence of the temperature change on the core fluid and the cladding fluid is consistent. The impact of the concentration change on the distribution of the refractive index of the fluid optical waveguide, the higher the concentration, the smaller the diffusion coefficient (for example, when the concentration ratio of ethylene glycol to deionized water is between 0.0250-0.950, the variation range of the diffusion coefficient is 9.28 ×10 -10 m 2 /s to 1.67×10 -10 m 2 /s), which in turn makes the refractive index distribution curve of the fluid optical waveguide sharper; the influence of the concentration change on the core fluid and cladding fluid Trends are consistent but can be individually regulated. The impact of the type of microfluid on the distribution of the refractive index of the fluid optical waveguide is manifested in that different microfluids have different viscosity coefficients, and the viscous resistance between the fluid microcavity wall and the fluid affects the diffusion process of the microfluid. At the position of the cavity wall, the fluid velocity is lower than that at the center of the microcavity, and the area where the flow velocity decreases diffuses more obviously. Therefore, compared with the refractive index distribution curve at the center, the refractive index distribution at the edge is relatively smooth.

Claims (3)

1.一种基于微流控光学技术的光束整形装置,其特征在于:包括流体光波导主体、入射激光器、光束接收面和流出流体贮存器,所述流体光波导主体上开有用于承载微流体的流道,所述流道包括一个芯层流体入口、两个对称的包层流体入口、流体微腔和两个对称的流体出口,所述芯层流体入口、包层流体入口均与所述流体微腔的入口侧连通,所述流体微腔的出口侧与两个流体出口连接,所述流体出口与流出流体贮存器连通,所述入射激光器和所述光束接收面同轴布置,所述入射激光器和所述光束接收面的轴线与流体流动方向轴线相交,所述入射激光器和所述光束接收面以相交点为对称中心对称放置,所述入射激光器将设定波长的激光束入射到所述流体光波导,光束传播方向与流体流动方向呈90°±10°,所述光束接收面接收经过流体光波导后输出的光束。1. A light beam shaping device based on microfluidic optical technology, characterized in that: it includes a fluid optical waveguide main body, an incident laser, a beam receiving surface and an outflow fluid reservoir, and the fluid optical waveguide main body has a The flow channel comprises a core fluid inlet, two symmetrical cladding fluid inlets, a fluid microcavity and two symmetrical fluid outlets, the core fluid inlet and the cladding fluid inlet are all connected to the The inlet side of the fluid microcavity is connected, the outlet side of the fluid microcavity is connected with two fluid outlets, and the fluid outlets are connected with the outflow fluid reservoir, the incident laser and the beam receiving surface are arranged coaxially, the The axis of the incident laser and the beam receiving surface intersects the axis of the fluid flow direction, the incident laser and the beam receiving surface are symmetrically placed with the intersection point as the center of symmetry, and the incident laser injects the laser beam of the set wavelength into the In the fluid optical waveguide, the beam propagation direction is 90°±10° to the fluid flow direction, and the beam receiving surface receives the output beam after passing through the fluid optical waveguide. 2.如权利要求1所述的基于微流控光学技术的光束整形装置,其特征在于:所述光束传播方向垂直于流体流动方向,光束接收面与入射激光器同轴。2 . The beam shaping device based on microfluidic optical technology according to claim 1 , wherein the beam propagation direction is perpendicular to the fluid flow direction, and the beam receiving surface is coaxial with the incident laser. 3 . 3.如权利要求1或2所述的基于微流控光学技术的光束整形装置,其特征在于:所述光束整形装置还包括注入流体的蠕动泵,所述注入流体的蠕动泵位于芯层流体入口、包层流体入口。3. The beam shaping device based on microfluidic optical technology as claimed in claim 1 or 2, characterized in that: the beam shaping device also includes a peristaltic pump for injecting fluid, and the peristaltic pump for injecting fluid is located in the core fluid Inlet, cladding fluid inlet.
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