CN105301763A - Two-dimensional rapid deflection apparatus and method based on secondary bridge type displacement amplifier - Google Patents

Abstract

A large-angle displacement two-dimensional rapid deflection device and method based on a two-stage bridge displacement amplifier, the device includes a cross-shaped deflector that is integrated with the column and fixed on the base in the XOY plane, located below the cross-shaped deflector and distributed opposite to the column The first drive mechanism and the third drive mechanism in the XOZ plane on both sides, the second drive mechanism and the fourth drive mechanism in the YOZ plane distributed on the other opposite sides of the column under the cross-shaped deflector; the first drive mechanism, The second drive mechanism, the third drive mechanism, and the fourth drive mechanism are two-stage bridge-type displacement amplification mechanisms based on piezoelectric ceramics; the bottom surface of the cross-shaped deflector is always in contact with the tops of the four drive mechanisms; Reflective mirrors of different specifications are installed according to needs; the invention also discloses a deflection method; since the X and Y motions are uncoupled, when two pairs of drivers work at the same time, high-precision, large-scale two-dimensional deflection can be realized to meet the needs of large Occasions where the deflection angle has special requirements.

Description

A two-dimensional fast deflection device and method based on a two-stage bridge displacement amplifier

technical field

The invention belongs to the technical field of beam control, and in particular relates to a large-angle displacement two-dimensional fast deflection device and method based on a two-stage bridge-type displacement amplifier.

technical background

In recent years, with the rapid development of microelectronics technology, bioengineering, aerospace engineering and other disciplines, two-dimensional fast deflecting mirrors have been widely used in astronomical telescopes, image stabilization, military target scanning detection, tracking, aiming, and precise pointing of spacecraft and laser communication. It has been widely used and is playing an increasingly important role.

At present, devices that widely use voice coil motors to achieve two-dimensional deflection have disadvantages such as large size, high power consumption, severe heat generation, electromagnetic interference, large size and low resonance frequency. Piezoelectric actuators have the characteristics of small size, light weight, low power consumption, large output force, low heat generation, and fast response. The flexible hinge has the characteristics of compact structure, no mechanical friction, and high transmission precision. The current fast deflection devices based on direct drive of piezoelectric materials often have the disadvantage of small deflection range.

Contents of the invention

In order to overcome the above problems in the prior art, the object of the present invention is to provide a two-dimensional fast deflection device and method based on a two-stage bridge displacement amplifier. In addition to large angular displacement, the structure also has compact structure and high precision. , Low power consumption and so on.

In order to achieve the above object, the technical scheme adopted in the present invention is as follows:

The two-dimensional fast deflection device based on the two-stage bridge-type displacement amplifier includes a cross-shaped deflector 8 fixed on the base 1 and located in the XOY plane as a whole with the column, and distributed under the cross-shaped deflector 8 on two opposite sides of the column. The first driving mechanism 4 and the third driving mechanism 9 in the XOZ plane on the side, the second driving mechanism 7 and the fourth driving mechanism 12 in the YOZ plane distributed on the other opposite sides of the column under the cross-shaped deflector 8; The first drive mechanism 4, the second drive mechanism 7, the third drive mechanism 9, and the fourth drive mechanism 12 are two-stage bridge displacement amplification mechanisms based on piezoelectric ceramics; the bottom surface of the cross-shaped deflector 8 is in contact with the four The top of the driving mechanism is kept in contact all the time; reflective mirrors of different specifications are installed on the cross-shaped deflector 8 as required.

The first driving mechanism 4 includes a first two-stage bridge displacement amplifying mechanism 2, and a first piezoelectric stack 3 installed in the long axis of the first stage bridge displacement amplifier inside the first two bridge displacement amplifying mechanism 2 ; The major axis of the first and second stage bridge displacement amplifying mechanism 2 is coaxial with the minor axis of the first stage bridge displacement amplifier inside it, and the minor axis top of the first and second stage bridge displacement amplifying mechanism 2 is deflected with the cross The bottom surface of the body 8 is always in contact; the structure of the second drive mechanism 7 , the third drive mechanism 9 and the fourth drive mechanism 12 is the same as that of the first drive mechanism 4 .

The deflection method of the two-dimensional fast deflection device based on the two-stage bridge displacement amplifier: the two pairs of drive mechanisms located under the X and Y axes are independent of each other; when the first piezoelectric stack 3 and the third piezoelectric stack under the X axis When the pile 10 outputs a differential displacement along the axial direction under the action of a differential voltage, under the action of the secondary bridge displacement amplifier, it generates a differential displacement that is several times larger than that of the piezoelectric stack along the Z direction, thereby driving a cross-shaped deflection body 8 realizes the deflection in the Y-axis direction; similarly, the drive mechanism under the Y-axis can realize the deflection of the cross-shaped deflector 8 along the X-axis direction; since the X movement and the Y movement are not coupled, thus, when two pairs of drive mechanisms work simultaneously , the two-dimensional deflection of the cross-shaped deflector 8 with high precision and continuous range can be realized.

Compared with the prior art, the present invention has the following advantages:

The present invention overcomes the characteristics of small output displacement directly driven by piezoelectric materials, uses a two-stage bridge-type displacement amplifier to drive and generate a relatively large actuating displacement, can realize a wide range of deflection angles, and has a small volume compared with the same angular displacement output , light weight, low power consumption, large driving force, high actuation precision and can drive large-size lenses.

Description of drawings

Fig. 1 is a structural diagram of the deflection device of the present invention.

Figure 2 is a schematic diagram of uniaxial deflection.

detailed description

The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

As shown in Figure 1, the two-dimensional fast deflection device based on the two-stage bridge-type displacement amplifier of the present invention includes a cross-shaped deflector 8 fixed on the base 1 and located in the XOY plane, and a cross-shaped deflector located in the cross-shaped deflector. The first driving mechanism 4 and the third driving mechanism 9 distributed in the XOZ plane on the opposite sides of the column under the body 8, and the second driving mechanism 7 located in the YOZ plane on the other opposite sides of the column under the cross-shaped deflector 8 And the fourth drive mechanism 12; The first drive mechanism 4, the second drive mechanism 7, the third drive mechanism 9 and the fourth drive mechanism 12 are secondary bridge displacement amplification mechanisms based on piezoelectric ceramics; the cross-shaped The bottom surface of the deflector 8 is always in contact with the tops of the four driving mechanisms; mirror lenses of different specifications are installed on the cross-shaped deflector 8 as required; the first driving mechanism 4, the second driving mechanism 7, the third driving mechanism 9 and Both the fourth drive mechanism 12 and the upright column connecting the cross-shaped deflection body 8 are fixed on the base 1 .

As shown in Fig. 1, described first drive mechanism 4 comprises first two-stage bridge type displacement amplifying mechanism 2, is installed in the first stage bridge type displacement amplifier inner major axis direction of first two-stage bridge type displacement amplifying mechanism 2 inside The first piezoelectric stack 3; the long axis of the first and second bridge displacement amplifying mechanism 2 is coaxial with the short axis of the first stage bridge displacement amplifier inside it, and the first and second bridge displacement amplifying mechanism 2 The top of the short axis is always in contact with the bottom surface of the cross-shaped deflector 8 ; the structures of the second drive mechanism 7 , the third drive mechanism 9 and the fourth drive mechanism 12 are the same as that of the first drive mechanism 4 .

The third driving mechanism 9 includes a third secondary bridge displacement amplifying mechanism 11, and a third piezoelectric element in the long axis direction of the first stage bridge displacement amplifier installed inside the third secondary bridge displacement amplifying mechanism 11. Stack 10; the major axis of the third and second stage bridge displacement amplifying mechanism 11 is coaxial with the minor axis of its internal first stage bridge displacement amplifier, and the minor axis top of the third and second stage bridge displacement amplifying mechanism 11 is in line with the cross The bottom surfaces of the deflectors 8 are always in contact.

The second driving mechanism 7 includes a second secondary bridge type displacement amplification mechanism 5, a second piezoelectric stack 6 installed in the long axis of the first stage bridge type displacement amplifier within the second secondary bridge type displacement amplification mechanism 5 ; The long axis of the second secondary bridge displacement amplifying mechanism 5 is coaxial with the minor axis of the internal first stage bridge displacement amplifier, and the minor axis top of the second secondary bridge displacement amplifying mechanism 5 is in contact with the cross-shaped deflector The bottom surface of 8 remains in contact at all times.

The fourth driving mechanism 12 includes a fourth secondary bridge displacement amplification mechanism 14, and the fourth piezoelectric stack in the long axis direction of the first stage bridge displacement amplifier installed inside the fourth secondary bridge displacement amplification mechanism 14 13. The long axis of the fourth and second stage bridge displacement amplifying mechanism 14 is coaxial with the short axis of the internal first stage bridge displacement amplifier, and the top of the short axis of the fourth and second stage bridge displacement amplifying mechanism 14 and the cross-shaped deflection The bottom surfaces of the body 8 are always in contact.

In the deflection method of the large-angle displacement two-dimensional fast deflection device based on the two-stage bridge displacement amplifier, the two pairs of drive mechanisms located under the X and Y axes are independent of each other; when the first piezoelectric stack 3 and the third piezoelectric stack under the X axis When the piezoelectric stack 10 outputs a differential displacement along the X axis under the action of a differential voltage, under the action of the secondary bridge displacement amplifier, it generates a differential output displacement several times that of the piezoelectric stack along the Z direction, thereby driving ten The glyph deflector 8 realizes the deflection in the Y-axis direction; similarly, the drive mechanism under the Y-axis can realize the deflection of the cross-shaped deflector 8 along the X-axis direction; since there is no coupling between the X movement and the Y movement, when two pairs of drive mechanisms simultaneously During operation, the cross-shaped deflector 8 can realize high-precision continuous large-scale two-dimensional deflection.

As shown in Figure 2, when a pair of displacement drive mechanisms under the X-axis are under the action of a differential voltage, when there is a differential displacement output relative to the initial state, +ΔZ and -ΔZ will be generated in the Z direction, thereby causing the cross-shaped deflector 8 to deflect , and the deflection angle θ≈arctan(ΔZ/l), where l is the distance from the deflection center to the support point of the drive mechanism; similarly, the drive mechanism under the Y axis can realize the deflection of the cross-shaped deflection rotor 8 along the X axis ; The cross-shaped deflector 8 is a "ten"-shaped structure, and mirrors of different sizes can be glued on it; since there is no coupling between X and Y movements, when two pairs of driving mechanisms work at the same time, high-precision and large-scale movement can be achieved. Two-dimensional deflection, meeting the occasions with special requirements for large deflection angles.

Claims (3)

1. The two-dimensional fast deflection device based on the two-stage bridge displacement amplifier is characterized in that: it includes a cross-shaped deflection swivel (8) that is integrally designed with the column and is fixed on the base (1) and is located in the XOY plane. The first drive mechanism (4) and the third drive mechanism (9) distributed in the XOZ plane on opposite sides of the column under the cross-shaped deflector (8) are located under the cross-shaped deflector (8) and distributed on the column. The second driving mechanism (7) and the fourth driving mechanism (12) in the YOZ plane on opposite sides; The first driving mechanism (4), the second driving mechanism (7), the third driving mechanism (9) and The fourth drive mechanism (12) is a secondary bridge displacement amplification mechanism based on piezoelectric ceramics; the bottom surface of the cross-shaped deflector (8) is always in contact with the tops of the four drive mechanisms; the cross-shaped deflector (8) According to the need to install reflective lenses of different specifications. 2. The large-angle displacement two-dimensional fast deflection device based on the secondary bridge displacement amplifier according to claim 1, characterized in that: the first driving mechanism (4) comprises a first secondary bridge displacement amplification mechanism (2 ), the first piezoelectric stack (3) installed in the long axis of the first-stage bridge-type displacement amplifier inside the first and second-level bridge-type displacement amplification mechanism (2); the first and second-level bridge-type displacement amplification mechanism ( The long axis of 2) is coaxial with the short axis of the first-stage bridge-type displacement amplifier inside, and the top of the short-axis of the first-stage and second-stage bridge-type displacement amplifying mechanism (2) is always in contact with the bottom surface of the cross-shaped deflector (8) ; The structure of the second drive mechanism (7), the third drive mechanism (9) and the fourth drive mechanism (12) is the same as that of the first drive mechanism (4). 3. The deflection method of the large-angle displacement two-dimensional fast deflection device based on the two-stage bridge displacement amplifier according to claim 1 or 2, characterized in that: the two pairs of drive mechanisms positioned under the X and Y axes are independent of each other; when the X axis When the first piezoelectric stack (3) and the third piezoelectric stack (10) under the action of the differential voltage output a differential displacement along the axial direction, under the action of the secondary bridge displacement amplifier, a digital displacement along the Z direction is generated. The differential output displacement is twice as large as that of the piezoelectric stack, thereby driving the cross-shaped deflector (8) to achieve deflection in the Y-axis direction; similarly, the driving mechanism under the Y-axis can realize the cross-shaped deflector (8) along the X-axis direction deflection; since there is no coupling between the X motion and the Y motion, when two pairs of drive mechanisms work simultaneously, the cross-shaped deflector (8) can realize high-precision continuous large-scale two-dimensional deflection.