CN104895913B - Two-freedom mobile decoupling flexure hinge mechanism - Google Patents

Abstract

A two-degree-of-freedom motion decoupling flexible hinge mechanism, the mechanism includes a flexible hinge base and a drive branch, wherein the flexible hinge base includes a flexible hinge branch and a rigid connector, and the rigid connector includes a terminal located in the middle part of the flexible hinge base The rigid output platform and the upper, lower, left, and right rigid platforms respectively located on the upper, lower, left, and right parts of the flexible hinge base; the upper, lower, left, and right rigid platforms respectively pass through the flexible hinge branch chain and the terminal rigid output platform connected, and the upper, lower, left, and right rigid platforms are respectively connected to the rigid base of the flexible hinge base through flexible hinge branches. The two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention can realize the decoupling between the terminal's all-directional motion and force, thereby helping to improve the motion accuracy of the two-degree-of-freedom motion decoupling flexible hinge mechanism.

Description

Two-degree-of-freedom motion decoupling flexible hinge mechanism

technical field

The invention relates to the technical field of mechanical design and manufacture, in particular to the design technology of a high-precision transmission mechanism.

Background technique

The micro-motion mechanism has the characteristics of motion precision, high resolution, compact structure, and small motion range. It is widely used in the field of micro-nano manipulation, such as atomic force microscope, photolithography mask platform, fine steel stone turning, precision motion platform, etc. A frequently used micro-motion mechanism is a flexible hinge. The flexible hinge utilizes the micro-deformation and self-recovery properties of elastic materials, eliminates the lost motion and mechanical friction in the transmission process, and can obtain high displacement resolution. Considering that the flexible hinge has no friction, no wear, no lubrication, and has the advantages of compact structure, light weight, easy manufacturing and assembly, etc., it is widely used in the design of micro-motion mechanism, which is called flexible hinge mechanism.

The flexible hinge mechanism can be divided into series type and parallel type according to its structural composition characteristics. The series type flexible hinge mechanism is composed of flexible hinges and rigid connection parts in series, and the parallel type flexible hinge mechanism is composed of multiple serial branches connected in parallel with the terminal platform. Composition, there are at least two or more closed-loop structures. Compared with the serial flexible hinge mechanism, the parallel flexible hinge mechanism has higher stiffness and natural frequency. More importantly, during the movement of the serial flexible hinge mechanism, in addition to the degree of freedom of the movement direction, the deformation of the hinge will also produce coupling errors in other non-movement directions, which will affect the output movement accuracy of the mechanism. In addition, due to Most of the flexible hinge mechanisms are driven by piezoelectric ceramic actuators, which can only bear axial loads and cannot bear lateral loads and bending moments, otherwise it will cause damage to the actuators. Therefore, due to the coupling of all-directional motion and loads , will generate a non-axial load at the end of the piezoelectric ceramic actuator, causing damage to the actuator. Through the design of the structure, the parallel flexible hinge mechanism can realize almost decoupling of the movement in all directions, which brings great convenience to the movement control of the mechanism, and can realize more high-precision movement. Therefore, the existing flexible hinge mechanism are implemented in parallel. In the parallel flexible hinge mechanism, there are two forms of space and planar parallel flexible hinge mechanism. Since the control of the flexible hinge mechanism requires the use of two-dimensional and three-dimensional flexible hinges, the processing is difficult and the accuracy is difficult to guarantee. Therefore, the planar flexible hinge mechanism is currently used more. hinge mechanism.

Realizing the motion decoupling of the flexible hinge micro-motion mechanism is the focus and difficulty in the design of this type of mechanism. The current method is to add a decoupling structure, but the existing decoupling structure is relatively complicated, which increases the difficulty of processing and assembling the mechanism. The motion accuracy of the mechanism has a certain impact, and it will increase the quality of the moving parts of the mechanism and reduce its dynamic performance. The decoupling performance of the decoupling structure with a relatively simple structure is difficult to meet the requirements, so how to design a flexible hinge mechanism with a simple and compact structure and excellent decoupling performance is a challenging and urgent task to be solved.

Contents of the invention

In view of this, the object of the present invention is to overcome the shortcomings of the prior art, and to provide a high-precision planar two-degree-of-freedom motion decoupling flexible hinge micro-motion mechanism, which has the advantages of compact decoupling, decoupling of motion in all directions, and The characteristics of high precision.

In order to achieve this goal, the technical solution adopted by the present invention is as follows.

A two-degree-of-freedom motion decoupling flexible hinge mechanism, the mechanism includes a flexible hinge base and a drive branch, wherein the flexible hinge base includes a flexible hinge branch and a rigid connector,

The rigid connector includes a terminal rigid output platform located in the middle part of the flexible hinge base and rigid platforms located at the upper, lower, left and right parts of the flexible hinge base, respectively, at the upper end, lower end, left end, and right end;

The upper, lower, left, and right rigid platforms are respectively connected to the terminal rigid output platform through flexible hinge branches, and the upper, lower, left, and right rigid platforms are respectively connected to the rigid base of the flexible hinge base through flexible hinge branches.

In particular, the flexible hinge branch includes a plurality of flexible hinge units arranged parallel to each other.

The flexible hinge branch connecting the terminal rigid output platform and the upper, lower, left, and right rigid platforms includes three flexible hinge units arranged in parallel: the connecting upper, lower, left, and right rigid platforms and the flexible hinge base The flexible hinge branch of the rigid base includes two flexible hinge units arranged parallel to each other.

Wherein, the flexible hinge unit is a rectangular flexible hinge unit.

The drive branch chain includes a first drive branch chain and a second drive branch chain driven in perpendicular directions, the first drive branch chain covers the first piezoelectric ceramic actuator and the first actuator connector, and the second drive branch chain The branch chain includes a second piezoceramic actuator and a second actuator connector, wherein,

The first piezoelectric ceramic actuator of the first drive branch is connected to one of the upper end, lower end, left end, and right end rigid platform through the first actuator connector;

The second piezoelectric ceramic actuator of the second drive branch is connected to another rigid platform in a direction perpendicular to the rigid platform connected to the first actuator connector through the second actuator connector.

In particular, the first drive branch chain also includes a first flange, a first tension pressure sensor and a first compression cover, and the second drive branch chain also includes a second flange plate, a second tension pressure sensor and a first compression cover. Two compression caps, in which,

The first tension pressure sensor is coaxial with the first piezoelectric ceramic actuator, connected to the tail end of the first piezoelectric ceramic actuator through the first flange, and the other end of the first tension pressure sensor is connected to the first compression The cover is fixedly connected, and the first compression cover is connected to one end of the flexible hinge base with bolts;

The second tension pressure sensor is coaxial with the second piezoelectric ceramic actuator, and is connected to the tail end of the second piezoelectric ceramic actuator through a second flange, and the other end of the second tension pressure sensor is connected to the second compression The cover is fixedly connected, and the second compression cover is bolted to the other end of the flexible hinge base.

In addition, there is a gap between the first compression cover or the second compression cover and the end of the flexible hinge substrate connected thereto, for actuating the first piezoelectric ceramic actuator or the second piezoelectric ceramic actuator through the bolts. The actuator applies an axial preload.

The two-degree-of-freedom motion decoupling flexible hinge mechanism also includes a displacement measurement system and a measurement reference, and the displacement measurement system includes a first displacement measurement system and a second displacement measurement system for respectively measuring displacements in two orthogonal directions, in,

The first displacement measurement system is fixed at one end of the flexible hinge base, including a first displacement sensor and a first mount, and the measurement direction of the first displacement sensor is parallel to the axial direction of the first piezoelectric ceramic actuator ;

The second displacement measurement system is fixed on one end of the flexible hinge base in a direction perpendicular to the installation end of the first displacement measurement system, including a second displacement sensor and a second mounting seat, and the measurement direction of the second displacement sensor is the same as that of the first displacement measurement system. The axis direction of the second piezoelectric ceramic actuator is parallel;

The measurement reference is fixedly connected to the terminal rigid output platform of the flexible hinge base, and has two end faces, the first end face is perpendicular to the measuring direction of the first displacement sensor, and the second end face is perpendicular to the measuring direction of the second displacement sensor.

The displacement sensor in the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention is a laser displacement sensor.

By adopting the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention, the following beneficial technical effects can be obtained.

1. The moving part of the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention adopts a symmetrical parallel structure, which has the advantages of compact structure and high rigidity, and this structure can ensure the movement and force of the terminal in all directions The decoupling between them helps to improve the motion accuracy of the two-degree-of-freedom motion decoupling flexible hinge mechanism.

2. The present invention adopts a rectangular flexible hinge unit as the deformation unit of the overall mechanism. The rectangular flexible hinge unit is easy to process, has high machining accuracy, and can realize a more compact structure than other forms of flexible hinge units.

3. In the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention, the flexible hinge branch fixedly connected to the terminal platform of the flexible hinge base adopts a combination of multiple rectangular flexible hinge units, and the flexible hinge branch fixedly connected to the rigid platform at the input end The chain uses a combination of multiple rectangular flexible hinge units. The branch chain formed by the parallel arrangement of multiple hinge units has greater bending stiffness and greater lateral flexibility than a single flexible hinge unit, which can increase the movement of the mechanism. The stroke in the direction, while increasing the stiffness in the non-moving direction, helps to improve the mechanism's resistance to the influence of external load disturbances and ensure high motion accuracy.

4. In the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention, the tension and pressure sensor is fixedly installed on the tail end of the piezoelectric ceramic actuator, which can avoid the increase of moving parts due to the fixed installation of the tension and pressure sensor on the front end of the actuator Mass, thereby reducing the dynamic operating performance of the mechanism, and at the same time, the axial load of the actuator can be monitored in real time, which provides convenience for the monitoring of pretightening force and dynamic control.

Description of drawings

Fig. 1 is a perspective view of a two-degree-of-freedom motion decoupling flexible hinge mechanism in a specific embodiment of the present invention.

Fig. 2 is a perspective view of a flexible hinge base of a two-degree-of-freedom motion decoupling flexible hinge ladle in a specific embodiment of the present invention.

detailed description

The present invention will be described in detail below in conjunction with the accompanying drawings.

First, the component names in the reference numerals will be explained.

1 flexible hinge base;

2 a first piezoelectric ceramic actuator;

3 first actuator connector;

4. The first tension pressure sensor;

5 the first flange;

6 the first compression cover;

7 the second piezoelectric ceramic actuator;

8 second actuator connector;

9 second tension pressure sensor;

10 second flange;

11 second compression cover;

12 the first mount;

13 the first laser displacement sensor;

14 measuring base;

15 second mount;

16 second laser displacement sensor;

1-1 terminal rigid output platform;

1-2 flexible hinge branches;

1-3 flexible hinge branches;

1-4 flexible hinge branches;

1-5 flexible hinge branches;

1-6 upper rigid platform;

1-7 flexible hinge branches;

1-8 flexible hinge branches;

1-9 left end rigid platform;

1-10 flexible hinge branches;

1-11 flexible hinge branches;

1-12 right end rigid platform;

1-13 flexible hinge branches;

1-14 flexible hinge branches;

1-15 lower end rigid platform;

1-16 flexible hinge branches;

1-17 flexible hinge branches;

1-18 rigid body matrix.

Detailed exemplary embodiments are disclosed below. However, specific structural and functional details disclosed herein are merely for purposes of describing example embodiments.

It should be understood, however, that the invention is not limited to the particular exemplary embodiments disclosed, but covers all modifications, equivalents, and alternatives falling within the scope of the disclosure. Throughout the description of the figures, the same reference numerals denote the same elements.

Also, it should be understood that as used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. Also it will be understood that when a component or unit is referred to as being “connected” or “coupled” to another component or unit, it can be directly connected or coupled to the other component or unit or intervening components or units may also be present. In addition, other words used to describe the relationship between parts or elements should be interpreted in the same manner (eg, ('between' vs. 'directly between': 'adjacent' vs. 'directly adjacent', etc.).

As shown in Figure 1, the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention includes a flexible hinge base 1 and a drive branch, wherein the flexible hinge base 1 includes a plurality of flexible hinge branches and rigid connectors,

The rigid connector includes a terminal rigid output platform 1-1 located in the middle part of the flexible hinge base 1 and an upper rigid platform 1-6, a lower rigid platform 1-15, and a left rigid platform respectively located on the upper, lower, left, and right parts of the flexible hinge base. Platforms 1-9 and right end rigid platforms 1-12;

The upper rigid platform 1-6, the lower rigid platform 1-15, the left rigid platform 1-9 and the right rigid platform 1-12 are respectively connected to the terminal rigid output platform 1-1 through flexible hinge branches, and the upper rigid platform 1 -6. The lower rigid platform 1-15, the left rigid platform 1-9 and the right rigid platform 1-12 are respectively connected to the rigid base 1-18 of the flexible hinge base through flexible hinge branches.

Therefore, the moving part of the flexible hinge base of the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention adopts a symmetrical parallel structure, which has the advantages of compact structure and high rigidity, and this structure can ensure that the terminals move in all directions and force The decoupling between them helps to improve the motion accuracy of the two-degree-of-freedom motion decoupling flexible hinge mechanism.

In a specific embodiment of the present invention, the flexible hinge branch includes a plurality of flexible hinge units arranged parallel to each other.

In particular, the flexible hinge branch connecting the terminal rigid output platform and the upper, lower, left and right rigid platforms includes three flexible hinge units arranged parallel to each other: the connecting upper, lower, left and right rigid platforms and flexible The flexible hinge branch of the rigid base of the hinge base comprises two flexible hinge units arranged parallel to each other.

On the other hand, the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention adopts a rectangular flexible hinge unit as the deformation unit of the overall mechanism. The rectangular flexible hinge unit is easy to process and has high machining accuracy, and can realize more flexible hinge units than other forms. for compact structure.

In addition, the flexible hinge branch chain fixedly connected with the rigid output platform of the flexible hinge matrix terminal adopts a combination of multiple rectangular flexible hinge units, and the flexible hinge branch chain fixedly connected with the upper end, lower end, left end, and right end rigid platform adopts the same Combination of multiple rectangular flexible hinge units, the branch chain formed by the parallel arrangement of multiple hinge units has greater bending stiffness and greater lateral flexibility than a single flexible hinge unit, which can increase the travel of the mechanism in the direction of movement, At the same time, increasing the stiffness in the non-moving direction helps to improve the mechanism's resistance to the influence of external load disturbances and ensure high motion accuracy.

Specifically, as shown in FIG. 2 , the main part of the flexible hinge base 1 is composed of flexible hinge branches and rigid connectors, presenting a symmetrical structure about the XY axis. The middle part of the flexible hinge base 1 is the terminal rigid output platform 1-1, and the upper, lower, left and right parts of the terminal rigid output platform 1-1 are respectively connected with the same flexible hinge branches 1-2, 1-3, 1-4 and 1-50 flexible hinge branches 1-2 are composed of three vertically parallel and equally spaced identical rectangular flexible hinge units, and the upper end of the flexible hinge branches 1-2 is fixed with an upper rigid platform 1 -6, the left and right ends of the upper rigid platform 1-6 are symmetrically fixed with flexible hinge branches 1-7 and 1-8, and the flexible hinge branches 1-7 and 1-8 are composed of two identical and horizontally parallel Arranged rectangular flexible hinge units, the other ends of which are respectively fixed on the rigid substrate 1-18; the flexible hinge branch chain 1-3 is composed of three identical rectangular flexible hinge units arranged in parallel and equally spaced horizontally. The left end of the flexible hinge branch chain 1-3 is affixed to the right and left end rigid platform 1-9, and the upper and lower ends of the left end rigid platform 1-9 are respectively symmetrically fixed with flexible hinge branch chains 1-10 and 1-11, and the flexible hinge branch chain 1-10 and 1-11 are composed of two identical and vertically parallel rectangular flexible hinge units, and their other ends are respectively fixed on the rigid base 1-18; the flexible hinge branches 1-4 are composed of three The same rectangular flexible hinge units arranged horizontally and at equal intervals are composed, and the right end rigid platform 1-12 is fixedly connected to the right end of the flexible hinge branch chain 1-4, and the upper and lower ends of the right rigid platform 1-12 are symmetrically fixed respectively. There are flexible hinge branches 1-13 and 1-14, and the flexible hinge branches 1-13 and 1-14 are composed of two identical and vertically parallel rectangular flexible hinge units, and their other ends are fixed respectively On the rigid base 1-18; the flexible hinge branch chain 1-5 is composed of three vertically parallel and equally spaced identical rectangular flexible hinge units, and the lower end of the flexible hinge branch chain 1-5 is fixed with a lower rigid platform 1-15, the left and right ends of the lower rigid platform 1-15 are respectively symmetrically fixed with flexible hinge branches 1-16 and 1-17, and the flexible hinge branches 1-16 and 1-17 are composed of two identical and horizontal It consists of rectangular flexible hinge units arranged in parallel, and their other ends are respectively fixed on the rigid base 1-18.

Those skilled in the art should understand that in the above embodiment, the flexible hinge branch connecting the upper end, lower end, left end and right end rigid platform and the terminal output rigid platform includes three flexible hinge units arranged in parallel; and connecting the upper end, lower end, The flexible hinge branches of the rigid base of the rigid platform at the left end and the right end and the flexible hinge base include two flexible hinge units arranged in parallel to each other. This is just an example. Those skilled in the art can use Other numbers of flexible hinge units are used to achieve similar technical effects.

As shown in Figure 1, the drive branch chain covers the first drive branch chain and the second drive branch chain driven in the perpendicular direction, the first drive branch chain includes the first piezoelectric ceramic actuator 2 and the first actuator connector 3, the second drive branch chain includes a second piezoelectric ceramic actuator 7 and a second actuator connector 8.

In addition, in the specific embodiment of the present invention, the first drive branch chain also includes the first flange 5, the first tension pressure sensor 4 and the first compression cover 6, and the second drive branch chain also includes the second method The blue plate 10, the second tension pressure sensor 9 and the second compression cover 11.

Specifically, the first piezoelectric ceramic actuator 2 is fixedly connected to the rigid platform 1-9 at the left end of the flexible hinge base 1 through the first actuator connector 3, and the first tension pressure sensor 4 is connected through the first flange 5 It is fixedly connected with the tail end of the first piezoelectric ceramic actuator 2, the axis of the first tension pressure sensor 4 is kept collinear with the axis of the first piezoelectric ceramic actuator 2, and the other end of the first tension pressure sensor 4 is in line with the axis of the first piezoelectric ceramic actuator 2. The first compression cover 6 is fixedly connected, and the two ends of the first compression cover 6 are connected to the left end of the flexible hinge base 1 by bolts. Between the first compression cover 6 and the left end of the flexible hinge base 1, there must be A certain gap is left, so that a certain axial preload can be applied to the first piezoelectric ceramic actuator 2 through bolt preload.

The second piezoelectric ceramic actuator 7 is fixedly connected to the lower end rigid platform 1-15 of the flexible hinge substrate 1 through the second actuator connector 8, and the second tension pressure sensor 9 is connected to the second pressure sensor 9 through the second flange 10. The tail end of the electroceramic actuator 7 is fixedly connected, the axis of the second tension pressure sensor 9 remains collinear with the axis of the second piezoelectric ceramic actuator 7, and the other end of the second tension pressure sensor 9 is connected to the second compression The cover 11 is fixedly connected, and the two ends of the second compression cover 11 are connected to the lower end of the flexible hinge base 1 by bolts, and a certain gap must be left between the second compression cover 11 and the lower side of the flexible hinge base 1 Clearance, in order to apply a certain axial preload to the second piezoelectric ceramic actuator 7 by preloading the bolts.

In addition, in a specific embodiment of the present invention, the two-degree-of-freedom motion decoupling flexible hinge mechanism further includes a displacement measurement system and a measurement reference, and the displacement measurement system includes a first A displacement measurement system and a second displacement measurement system, wherein,

The first displacement measurement system is fixed on one end of the flexible hinge substrate, and includes a first displacement sensor 13 and a first mount 12, and the measurement direction of the first displacement sensor 13 is the same as that of the first piezoelectric ceramic actuator 2 The axis direction is parallel;

The second displacement measurement system is fixed on one end of the flexible hinge substrate in a direction perpendicular to the installation end of the first displacement measurement system, including a second displacement sensor 16 and a second mount 15, and the measurement direction of the second displacement sensor 16 is parallel to the axial direction of the second piezoelectric ceramic actuator 7;

The measuring standard 14 is fixedly connected to the terminal rigid output platform of the flexible hinge base, and has two end faces, the first end face is perpendicular to the measuring direction of the first displacement sensor 13 , and the second end face is perpendicular to the measuring direction of the second displacement sensor 16 .

In particular, the displacement sensor is a laser displacement sensor.

Specifically, as shown in FIG. 2 , the first mount 12 is fixed to the right end of the flexible hinge base 1 by bolts, and the first laser displacement sensor 13 is fixedly installed on the first mount 12. The first laser displacement sensor 13 The measuring direction is kept parallel to the axial direction of the first piezoelectric ceramic actuator 2, and the measuring reference 14 is fixedly installed on the terminal rigid output platform 1-1 of the flexible hinge substrate 1, and the right end surface of the measuring base 14 is in line with the first piezoelectric ceramic actuator. The measuring direction of a laser displacement sensor 13 remains vertical. The second mounting seat 15 is fixedly installed on the upper end of the flexible hinge base 1 by bolts, and the second laser displacement sensor 16 is fixedly installed on the second mounting seat 15. The measuring direction of the second laser displacement sensor 16 is consistent with the second piezoelectric ceramic The axis direction of the actuator 7 is kept parallel, and the upper end surface of the measurement base 14 is kept perpendicular to the measurement direction of the second laser displacement sensor 16 .

Therefore, the working principle of the two-degree-of-freedom motion decoupling flexible hinge mechanism of the present invention is: the mechanism can realize two-degree-of-freedom motion in the XY plane. In order to illustrate its working method, the rigid output platform 1- The center point of 1 is the coordinate origin, the axial direction of the first piezoelectric ceramic actuator 2 is the X axis, and the axial direction of the second piezoelectric ceramic actuator 7 is the Y axis. Since the process and control principle of the X-axis and Y-axis movement of the mechanism are exactly the same, here we take the X-axis movement as an example to illustrate the working principle of the mechanism.

First of all, in order to ensure the output displacement accuracy and motion reliability of the first piezoelectric ceramic actuator 2 in the working process, it is necessary to apply a certain axial preload to the first piezoelectric ceramic actuator 2, the axial preload The load is realized by pre-tightening the bolts at both ends of the first compression cover 6. According to the size of the required pre-tightening load, at the same time by observing the magnitude of the axial load measured by the first tension pressure sensor 4, tighten or loosen the first pre-tightening load. Tighten the bolts at both ends of the cover 6 to continuously adjust the axial preload of the first piezoelectric ceramic actuator 2 until the required preload is reached.

After the design of the mechanism is completed, the displacement relationship between the left end rigid platform 1-9 of the flexible hinge base 1 of the mechanism and the terminal rigid output platform 1-1 can be obtained through the finite element analysis of the mechanism, so that the terminal rigidity of the mechanism can be output. The X-axis displacement required to be realized by the platform 1-1 is obtained by the X-direction input displacement required to be provided by the rigid platform 1-9 at the left end, and the displacement amount is the required displacement output value of the first piezoelectric ceramic actuator 2 .

Next, according to the displacement output value, the first piezoelectric ceramic actuator 2 accurately outputs the required displacement through the control of its driver and the closed-loop measurement of the internal displacement sensor. When the first piezoelectric ceramic actuator 2 is stretched, it pushes the rigid platform 1-9 at the left end of the flexible hinge substrate 1 to move along the X direction, because the flexible hinge branch chains 1-10 and 1-11 have great flexibility in the X direction , so there will be elastic deformation along the X direction with the rigid platform 1-9 at the left end, and the flexible hinge branch chain 1-3 has a large stiffness in the X direction, so there will be almost no deformation, so the rigid platform 1 at the left end can be The motion of -3 is almost completely transmitted to the terminal rigid output platform 1-1, and the flexible hinge branches 1-2 and 1-5 fixedly connected to the terminal rigid output platform 1-1 have great flexibility in the X direction, so they will With the elastic deformation of the terminal rigid output platform 1-1 in the X direction, the X-direction rigidity of the flexible hinge branch chain 1-4 fixedly connected with the terminal rigid output platform 1-1 is very large, so there is almost no deformation, and the flexible hinge The branch chain 1-4 transmits the motion of the terminal rigid output platform 1-1 almost completely to the right end rigid platform 1-12, and the flexible hinge branch chains 1-13 and 1-14 fixedly connected to the right end rigid platform 1-12 are in the X direction is very flexible, so it will elastically deform along the X direction along with the rigid platform 1-12 at the right end. After the flexible hinge branch 1-5 is elastically deformed along the X direction, it will generate an X-direction load on the lower rigid platform 1-15, but because the stiffness of the flexible hinge branch 1-5 in the X direction is very small, the flexible hinge branch The rigidity of the chains 1-16 and 1-17 in the X direction is very large, so the deformation of the lower rigid platform 1-15 along the X direction hardly occurs, so the movement of the mechanism in the X direction will affect the second piezoelectric ceramic driver 7 The influence is very small, that is to say, the excellent motion decoupling performance of the mechanism can be realized.

When the terminal rigid output platform 1-1 of the flexible hinge base 1 is displaced in the X direction, it will drive the measurement reference 14 on it to move together. At this time, the terminal rigid output platform 1-1 can be accurately measured by the first laser displacement sensor 13. Move the displacement along the X direction, compare the displacement with the expected displacement, and use the difference in displacement as the feedback for the input displacement correction of the driver of the first piezoelectric ceramic actuator 2, thereby Realize the full closed-loop control of the movement of the whole mechanism, which can ensure the required movement displacement of the mechanism.

It should be noted that the above-mentioned embodiments are only preferred embodiments of the present invention, and should not be understood as limiting the protection scope of the present invention. Any minor changes and modifications made to the present invention are acceptable without departing from the concept of the present invention. Belong to the protection scope of the present invention.

Claims (7)

1. a kind of two-freedom mobile decoupling flexure hinge mechanism, the mechanism includes flexible hinge matrix and driving side chain, its Middle flexible hinge matrix includes flexible hinge side chain and rigid connector,

Rigid connector includes being located at the terminal rigidity output stage of flexible hinge matrix center section and is located at flexible hinge respectively The upper end of chain matrix upper and lower, left and right part, lower end, left end, right-hand member rigid platfor；

The upper end, lower end, left end, right-hand member rigid platfor are connected by flexible hinge side chain and terminal rigidity output stage respectively Connect, and upper end, lower end, left end, right-hand member rigid platfor pass through flexible hinge side chain and the rigid matrix of flexible hinge matrix respectively Connection；

The driving side chain includes the first driving side chain and the second driving side chain of mutually perpendicular direction driving, the first driving side chain Including the first piezoelectric actuator and the first actuator connector, the second driving side chain include the second piezoelectric actuator and Second actuator connector, wherein,

First driving side chain the first piezoelectric actuator by the first actuator connector be connected to upper end, lower end, left end, One in right-hand member rigid platfor；

Second piezoelectric actuator of the second driving side chain is connected to by the second actuator connector to be connected with the first actuator Another rigid platfor of the rigid platfor phase orthogonal direction of joint connection；

The first driving side chain also includes first flange disk, the first pull pressure sensor and the first friction top, the second driving branch Chain also includes second flange disk, the second pull pressure sensor and the second friction top, wherein,

First pull pressure sensor and the first piezoelectric actuator are coaxial, and the first piezoelectric ceramics is connected to by first flange disk The tail end of actuator, the other end of the first pull pressure sensor are fixedly connected with the first friction top, and first, which compresses cover bolt, connects It is connected to one end of flexible hinge matrix；

Second pull pressure sensor and the second piezoelectric actuator are coaxial, and the second piezoelectric ceramics is connected to by second flange disk The tail end of actuator, the other end of the second pull pressure sensor are fixedly connected with the second friction top, and second, which compresses cover bolt, connects It is connected to the other end of flexible hinge matrix.

2. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that the flexible hinge Chain side chain includes multiple flexible hinge units being arranged parallel to.

3. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterised in that connection terminal is firm Property output stage and upper end, lower end, left end, the flexible hinge side chain of right-hand member rigid platfor are arranged parallel to soft including 3 Property hinge-unit；Connect the flexible hinge of the rigid matrix of upper end, lower end, left end, right-hand member rigid platfor and flexible hinge matrix Side chain includes 2 flexible hinge units being arranged parallel to.

4. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 2, it is characterised in that the flexible hinge Chain element is rectangular flexible hinge-unit.

5. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that the first friction top Or second friction top and the flexible hinge matrix being attached thereto end between there is gap, for being made pottery by bolt to the first piezoelectricity Porcelain actuator or the second piezoelectric actuator apply axial pretightening load.

6. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 1, it is characterised in that described two freely Degree mobile decoupling flexure hinge mechanism also includes displacement measurement system and measuring basis, and the displacement measurement system includes surveying respectively The first displacement measurement system and second displacement measuring system of the displacement on two orthogonal directions are measured, wherein,

First displacement measurement system is fixed on one end of the flexible hinge matrix, including the first displacement transducer and the first installation Seat, the measurement direction of first displacement transducer are parallel with the axis direction of first piezoelectric actuator；

Second displacement measuring system be fixed on the flexible hinge matrix with the first perpendicular side of displacement measurement system installation end To one end, including second displacement sensor and the second mounting seat, the measurement direction of the second displacement sensor and described the The axis direction of two piezoelectric actuators is parallel；

Measuring basis is fixedly attached to the terminal rigidity output stage of the flexible hinge matrix, has two end faces, first end Face is vertical with the measurement direction of the first displacement transducer, and second end face is vertical with the measurement direction of second displacement sensor.

7. according to the two-freedom mobile decoupling flexure hinge mechanism described in claim 6, it is characterised in that described first Displacement sensor and second displacement sensor are laser displacement sensor.