CN104832407A - Double-vibrator piezoelectric driving micro fan - Google Patents
Double-vibrator piezoelectric driving micro fan Download PDFInfo
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- CN104832407A CN104832407A CN201510122114.8A CN201510122114A CN104832407A CN 104832407 A CN104832407 A CN 104832407A CN 201510122114 A CN201510122114 A CN 201510122114A CN 104832407 A CN104832407 A CN 104832407A
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- piezoelectric vibrator
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- 239000011159 matrix material Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 6
- 239000012530 fluid Substances 0.000 abstract description 5
- 238000009434 installation Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003380 propellant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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Abstract
The invention relates to a double-vibrator piezoelectric driving micro fan comprising two piezoelectric vibrators and a substrate. The substrate is a flat rectangular block, a pair of piezoelectric vibrator installation grooves is arranged symmetrically in the top and bottom surfaces of the substrate, and a run-through middle hole is arranged between the bottom surfaces of the two installation grooves. The two piezoelectric vibrators are respectively installed in the two piezoelectric vibrator installation grooves of the substrate, and the two piezoelectric vibrators and the middle hole of the substrate form a middle cavity. One side of the substrate is provided with an outlet hole which communicates the middle cavity with outside air. An inlet hole is arranged in the vertical direction of the outlet hole. During working, the two piezoelectric vibrators bend inward or outward and vibrate at the same time, the size of the middle cavity is reduced or increased, fluid flows into or out of the outlet hole, and gas flows into the inlet hole or flows out of the outlet hole, thus forming directional fluid drive capability output by gas from the outlet hole. The amount of volume change of the cavity in each cycle is significantly greater than that of a traditional single-vibrator piezoelectric fan. The output capability of the piezoelectric fan can be improved.
Description
Technical field
The invention belongs to field of fluid, be specifically related to a kind of two oscillator driving type piezoelectric actuator mini fan.
Background technique
piezoelectricity blower fan is a kind of by the fluid drive apparatus of piezoelectric vibrator as power original paper, its function, for providing the gas of certain flow in outlet port, can be used for the aspects such as the active cooling in instrument and apparatus, detection facility and mechano-electronic field, gas conveying, pneumatic drive.Have that structure is simply convenient to produce in enormous quantities, volume is littlely convenient to microminiaturization, be convenient to Digital Control and the advantage such as the life-span is long.The power source of piezoelectricity blower fan is in the past generally a slice piezoelectric vibrator, and because the distortion of piezoelectric vibrator is less, General Central maximum displacement is all less than 20 microns, and therefore the output capability of blower fan is more weak, limits the application of piezoelectricity blower fan in every field.
Summary of the invention
In order to solve the more weak problem of current piezoelectric fluid driving arrangement propellant ability, propose a kind of two oscillator driving type piezoelectric actuator mini fan, described pair of oscillator driving type piezoelectric actuator mini fan is made up of two piezoelectric vibrators and matrix, two piezoelectric vibrators and matrix form a middle chamber jointly, back and forth change is there is in described middle chamber with piezoelectric vibrator displacement, during work, the deformation direction of two piezoelectric vibrators is simultaneously outside or inside, the middle chamber volume change in each cycle is obviously greater than the cavity variable quantity of traditional simple oscialltor piezoelectricity blower fan, improve the output capability of piezoelectricity blower fan, simultaneously to have structure simple for this arrangement, be convenient to the features such as mass production.
To achieve these goals, the present invention is by the following technical solutions:
A kind of two oscillator driving type piezoelectric actuator mini fan of the present invention, comprises the first piezoelectric vibrator, the second piezoelectric vibrator and matrix, wherein:
First piezoelectric vibrator is identical with the second piezoelectric vibrator structure, employing is pasted onto on elastic base plate by a slice thin sheets of piezoelectric material and forms single-chip structure, or be pasted onto elastic base plate both sides by two panels thin sheets of piezoelectric material and form double wafer structure, piezoelectric vibrator can occur to be out of shape along the cyclic bending of axial direction under the effect of alternating voltage.
Matrix is a flat rectangular block, is furnished with the first piezoelectric vibrator mounting groove at the end face of matrix, and the degree of depth of described first piezoelectric vibrator mounting groove is greater than the first piezoelectric vibrator thickness and the first piezoelectric vibrator center deformation peak value sum; Have the second piezoelectric vibrator mounting groove in the sole arrangement of matrix, the degree of depth of described second piezoelectric vibrator mounting groove is greater than the second piezoelectric vibrator thickness and the second piezoelectric vibrator center deformation peak value sum; Between the first piezoelectric vibrator mounting groove and the second piezoelectric vibrator mounting groove bottom surface, arrange an intermediate hole run through, the diameter of section of intermediate hole is less than the diameter of section of mounting groove; First piezoelectric vibrator is arranged in the first piezoelectric vibrator mounting groove, second piezoelectric vibrator is arranged in the second piezoelectric vibrator mounting groove, two piezoelectric vibrators after installation and described intermediate hole form the middle chamber of a sealing, and reciprocal change occurs along with the vibration of piezoelectric vibrator the volume of described middle chamber.
At the side arrangement flow-out hole of matrix, described middle chamber is communicated with outside air by described flow-out hole, the diameter of section of described flow-out hole is less than the height of middle chamber, is furnished with inflow hole in the Vertical direction of described flow-out hole, and described inflow hole runs through matrix and through with described flow-out hole.
During work, reciprocal transformation is there is and distortion sensing increase simultaneously cavity volume direction (or simultaneously pointing to reduction cavity volume direction) in two piezoelectric vibrators under the effect of alternating voltage, there is back and forth change in the volume of middle chamber, cause gas to flow through flow-out hole and inflow hole, form local depression at the intersectional region of flow-out hole and inflow hole; When middle cavity volume increases, middle chamber internal pressure reduces, extraneous gas is formed from flow-out hole suction middle chamber and sucks high velocity air, and described suction high velocity air forms local depression in runner confluence, and the gas sucked from inflow hole enters middle chamber along with sucking high velocity air; When middle chamber volume reduces, middle chamber internal pressure rises, in middle chamber, gas is formed along flow-out hole and discharges high velocity air, and described discharge high velocity air forms local depression in runner confluence, and the gas flowed into from inflow hole is discharged from flow-out hole along with high velocity air; Working procedure defines gas and sucks from inflow hole, from the dynamic gas driving force that flow-out hole is discharged.
Accompanying drawing explanation
Fig. 1 is the two oscillator driving type piezoelectric actuator mini fan structural representation of the present invention.
Fig. 2 is the two oscillator driving type piezoelectric actuator mini fan structure of the present invention and assembly relation schematic diagram.
Embodiment
See figures.1.and.2, of the present invention pair of oscillator driving type piezoelectric actuator blower fan is made up of the first piezoelectric vibrator 1, second piezoelectric vibrator 2 and matrix 3, wherein:
First piezoelectric vibrator 1 is thin sheets of piezoelectric material 11 formation bonding with elastic base plate 12, and the second piezoelectric vibrator 2 is thin sheets of piezoelectric material 11 formation bonding with elastic base plate 12.
Matrix 3 is flat rectangular blocks, the end face of matrix 3 arranges the first piezoelectric vibrator mounting groove 31, the sole arrangement second piezoelectric vibrator mounting groove 32 of matrix 3, the degree of depth of the first piezoelectric vibrator mounting groove 31 is greater than total thickness and the first piezoelectric vibrator 1 center deformation peak value sum of the first piezoelectric vibrator 1, the degree of depth of the second piezoelectric vibrator mounting groove 32 is greater than total thickness and the second piezoelectric vibrator 2 center deformation peak value sum of the second piezoelectric vibrator 2, arranges a center hole 35 run through between two piezoelectric vibrator mounting groove bottom surfaces.
Described first piezoelectric vibrator 1 is arranged in the first piezoelectric vibrator mounting groove 31, and described second piezoelectric vibrator 2 is arranged in the second piezoelectric vibrator mounting groove 32, and after installing, two piezoelectric vibrators and matrix 3 together form a middle chamber sealed 4.
Arrange a flow-out hole 33 in the side of matrix 3, described flow-out hole 33 cross section is circular, and the diameter of section of flow-out hole 33 is less than the degree of depth of middle chamber 4, and middle chamber 4 is communicated with outside air by described flow-out hole 33;
Arrange an inflow hole 34 in the Vertical direction of described flow-out hole 33, this inflow hole 34 cross section is rectangle, and described inflow hole 34 level runs through two sides of matrix 3 and through with described flow-out hole 33.
Claims (2)
1. a two oscillator driving type piezoelectric actuator mini fan, comprise: the first piezoelectric vibrator (1), the second piezoelectric vibrator (2) and matrix (3), wherein: matrix (3) is a flat rectangular block, a pair piezoelectric vibrator mounting groove is arranged symmetrically with at its end face and bottom surface, be respectively the first piezoelectric vibrator mounting groove (31) and the second piezoelectric vibrator mounting groove (32), between two mounting groove bottom surfaces, arrange a center hole (35) run through; Described first piezoelectric vibrator (1) is arranged in the first piezoelectric vibrator mounting groove (31), second piezoelectric vibrator (2) is arranged in the second piezoelectric vibrator mounting groove (32), and described first piezoelectric vibrator (1) and the second piezoelectric vibrator (2) form middle chamber (4) with the center hole (35) of described matrix (3); Side arrangement one flow-out hole (33) of described matrix (3), middle chamber (4) is communicated with outside air by described flow-out hole (33); The inflow hole (34) through with described flow-out hole (33) is arranged in the Vertical direction of flow-out hole (33).
2. according to claim 1 pair of oscillator driving type piezoelectric actuator mini fan, it is characterized in that: described first piezoelectric vibrator (1) second piezoelectric vibrator (2) structure is identical, adopt and be pasted onto by a slice thin sheets of piezoelectric material the single-chip structure that elastic base plate is formed, or be pasted onto by two panels thin sheets of piezoelectric material the double wafer structure that elastic base plate both sides are formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510122114.8A CN104832407A (en) | 2015-03-20 | 2015-03-20 | Double-vibrator piezoelectric driving micro fan |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510122114.8A CN104832407A (en) | 2015-03-20 | 2015-03-20 | Double-vibrator piezoelectric driving micro fan |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104832407A true CN104832407A (en) | 2015-08-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201510122114.8A Pending CN104832407A (en) | 2015-03-20 | 2015-03-20 | Double-vibrator piezoelectric driving micro fan |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106535582A (en) * | 2016-12-19 | 2017-03-22 | 南京航空航天大学 | Cylindrical inner cavity cooling device |
| CN110985360A (en) * | 2019-11-29 | 2020-04-10 | 昆山龙朋精密电子有限公司 | Miniature piezoelectric fan |
| CN113841018A (en) * | 2019-12-06 | 2021-12-24 | 福珞尔系统公司 | Center-anchored MEMS-based active cooling system |
| US11456234B2 (en) | 2018-08-10 | 2022-09-27 | Frore Systems Inc. | Chamber architecture for cooling devices |
| US11503742B2 (en) | 2019-12-06 | 2022-11-15 | Frore Systems Inc. | Engineered actuators usable in MEMS active cooling devices |
| US11765863B2 (en) | 2020-10-02 | 2023-09-19 | Frore Systems Inc. | Active heat sink |
| US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
| US12029005B2 (en) | 2019-12-17 | 2024-07-02 | Frore Systems Inc. | MEMS-based cooling systems for closed and open devices |
| US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
| US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
| US12193192B2 (en) | 2019-12-06 | 2025-01-07 | Frore Systems Inc. | Cavities for center-pinned actuator cooling systems |
| JP7659839B2 (en) | 2019-12-29 | 2025-04-10 | アクタシス インコーポレイテッド | Novel design and manufacturing techniques for synthetic jet actuators. |
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2015
- 2015-03-20 CN CN201510122114.8A patent/CN104832407A/en active Pending
Cited By (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106535582B (en) * | 2016-12-19 | 2018-10-16 | 南京航空航天大学 | A kind of cylindrical cavity cooling device |
| CN106535582A (en) * | 2016-12-19 | 2017-03-22 | 南京航空航天大学 | Cylindrical inner cavity cooling device |
| US11735496B2 (en) | 2018-08-10 | 2023-08-22 | Frore Systems Inc. | Piezoelectric MEMS-based active cooling for heat dissipation in compute devices |
| US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
| US11830789B2 (en) | 2018-08-10 | 2023-11-28 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| US11456234B2 (en) | 2018-08-10 | 2022-09-27 | Frore Systems Inc. | Chamber architecture for cooling devices |
| US11784109B2 (en) | 2018-08-10 | 2023-10-10 | Frore Systems Inc. | Method and system for driving piezoelectric MEMS-based active cooling devices |
| US11532536B2 (en) | 2018-08-10 | 2022-12-20 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| US11705382B2 (en) | 2018-08-10 | 2023-07-18 | Frore Systems Inc. | Two-dimensional addessable array of piezoelectric MEMS-based active cooling devices |
| US11710678B2 (en) | 2018-08-10 | 2023-07-25 | Frore Systems Inc. | Combined architecture for cooling devices |
| US11802554B2 (en) | 2019-10-30 | 2023-10-31 | Frore Systems Inc. | MEMS-based airflow system having a vibrating fan element arrangement |
| CN110985360A (en) * | 2019-11-29 | 2020-04-10 | 昆山龙朋精密电子有限公司 | Miniature piezoelectric fan |
| US11464140B2 (en) | 2019-12-06 | 2022-10-04 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
| US12193192B2 (en) | 2019-12-06 | 2025-01-07 | Frore Systems Inc. | Cavities for center-pinned actuator cooling systems |
| US11510341B2 (en) | 2019-12-06 | 2022-11-22 | Frore Systems Inc. | Engineered actuators usable in MEMs active cooling devices |
| US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US11503742B2 (en) | 2019-12-06 | 2022-11-15 | Frore Systems Inc. | Engineered actuators usable in MEMS active cooling devices |
| US11432433B2 (en) | 2019-12-06 | 2022-08-30 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
| US12320595B2 (en) | 2019-12-06 | 2025-06-03 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US12274035B2 (en) | 2019-12-06 | 2025-04-08 | Frore Systems Inc. | Engineered actuators usable in MEMs active cooling devices |
| CN113841018A (en) * | 2019-12-06 | 2021-12-24 | 福珞尔系统公司 | Center-anchored MEMS-based active cooling system |
| US12137540B2 (en) | 2019-12-06 | 2024-11-05 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
| US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
| US12029005B2 (en) | 2019-12-17 | 2024-07-02 | Frore Systems Inc. | MEMS-based cooling systems for closed and open devices |
| JP7659839B2 (en) | 2019-12-29 | 2025-04-10 | アクタシス インコーポレイテッド | Novel design and manufacturing techniques for synthetic jet actuators. |
| US12167574B2 (en) | 2020-10-02 | 2024-12-10 | Frore Systems Inc. | Active heat sink |
| US11765863B2 (en) | 2020-10-02 | 2023-09-19 | Frore Systems Inc. | Active heat sink |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150812 |
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| WD01 | Invention patent application deemed withdrawn after publication |