CN104777330B - Single Island Multi-Electrode Quartz Accelerometer - Google Patents

Abstract

The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using multi-electrode quartz force-sensitive resonators as sensitive core components. This kind of accelerometer acts the inertial force generated during the accelerated motion to the multi-electrode quartz force-sensitive resonator, and obtains the corresponding acceleration to be measured by detecting the variation of the resonant frequency of the resonator. This accelerometer consists of a base, a casing, a circuit board, sensitive components and an aviation socket. The base and the shell form a closed cavity, the sensitive element is mounted on the base, the circuit board is mounted on the sensitive element, and the socket is mounted on the shell. The single-island base of the sensitive element and the sealing cover are closely matched to form a sealed cavity. The two central single-islands in the cavity are equipped with multi-electrode quartz force-sensitive resonators. The single-island base and the central single-island are processed in one piece. The single-island Set screws are mounted on the base. The accelerometer has a measurement range of 10 ^‑4 g to 10 ² g and can be used in detection and control systems for aircraft, vehicles, ships, etc.

Description

Single Island Multi-Electrode Quartz Accelerometer

technical field

The single-island multi-electrode quartz accelerometer of the invention belongs to the field of linear acceleration measurement using a multi-electrode quartz force-sensitive resonator as a sensitive core element. This kind of accelerometer consists of a base, a shell, a circuit board, a sensitive element and a socket, and can be used in detection and control systems for aircraft, vehicles, ships, and industrial automation fields.

Background technique

Quartz crystal has good physical and chemical stability, and its piezoelectric effect has been widely used in force and stress detection, especially in the field of digital detection and control. People's sustained attention. For example, the piezoelectric effect of quartz crystals is applied to acceleration detection. The strategic-grade quartz accelerometer developed by Kearfott Company of the United States uses double masses and double resonators. The headquarters and Allied Singal Aerospace Instunment System Company adopt a high-acceleration high-performance quartz crystal accelerometer with double mass and frequency differential structure, with a measurement range of 1200g and a proportionality factor of 1.1Hz/g. US Patent No. 5,578,755 and US Patent No. 5,962,786 all disclose solutions of quartz accelerometers with different structures. The quartz accelerometer (VIA) developed by the French National Aerospace Research Corporation (ONERA) with a vibrating beam structure has been used for attitude control of tactical missiles. These quartz accelerometers are generally complex in construction.

Contents of the invention

The purpose of the present invention is to solve the influence of temperature and other environmental factors on the performance of the accelerometer in the application process of the quartz accelerometer, and provide a single-island multi-electrode quartz accelerometer with high stability, strong anti-interference ability and simple structure.

The invention discloses a single-island multi-electrode quartz accelerometer, which is composed of a base, a shell, a circuit board, a sensitive element and a socket. The supporting base and the shell are assembled into a cavity by screws. The sensitive components for detection are installed on the base with screws. The circuit board is fastened to the sensitive components by the circuit board support studs and connecting screws. Installed on the shell, the power supply and signal enter and exit from the aviation socket through the cable. Its characteristics are: (1) the sensitive element is composed of a single-island base, a central single-island, a limit screw, a multi-electrode quartz force sensitive resonator and a sealing cover; (2) the single-island base and the sealing cover are fastened by screws The sealed cavity, the single-island base and the central single-island are processed in one piece; (3) The force-sensitive resonator as the core component is a multi-electrode quartz crystal force-sensitive resonator, and the number of electrode pairs is two or more .

Description of drawings

Figure 1 Structural cross-sectional view of a single-island multi-electrode quartz accelerometer

1-base 2-housing

3- Sensitive element 4- Aviation socket

5-circuit board 6-circuit board support studs (4 in total)

7-circuit board screws (4 in total) 8-socket screws (4 in total)

9-shell screws (4 in total) 10-base screws (2 in total)

Figure 2 Schematic diagram of the structure of the sensitive element

11-Single island base 12-1, 12-2-Limit screw

13-1, 13-2-multi-electrode force sensitive resonator 14-central single island

15-1, 15-2 (not shown)-set screw 16-seal cover

17 - sealing screw (total 8)

Figure 3 Schematic diagram of the base of the single island and the structure of the central single island

11-Single-island base 11-1, 11-2-Single-island base resonator support platform

11-3, 11-4-limit nut holes 11-5-electrode lead holes (4 in total)

11-6- Mounting nut holes (2 in total) 11-7- Lead groove

11-8-Sealing cover set nut hole 14-Central single island

14-1-flexible connection 14-2, 14-3-central single-island resonator support platform

14-4-Inertial mass block

Figure 4 Schematic diagram of the structure of the sealing cover

16-Seal cover 16-1-Seal countersunk screw holes (8 in total)

16-2-Board mounting nut holes (total 4)

Implementation

The single-island multi-electrode quartz accelerometer of the present invention is described below in conjunction with the accompanying drawings.

The structure of the single-island multi-electrode quartz accelerometer is shown in Figure 1. It consists of a supporting base 1 and a housing 2 that are tightly fitted with screws 9 to form a cavity. Sensitive elements 3 for detection are installed on the base 1 with screws 10. , the circuit board 5 is supported by the circuit board stud 6, and is fastened on the sensitive element 3 by the circuit board screw 7, the aviation socket 4 is installed on the shell 2 by the socket screw 8, and the power supply and signal are entered and exited from the aviation socket 4 by the cable; The structure of the sensitive element 3 is shown in Figure 2, it consists of a single-island base 11, a central single-island 14, two limit screws 12-1 and 12-2, two multi-electrode force-sensitive resonators 13-1 and 13 -2. The sealing cover 16 is formed.

The single-island base 11 and sealing cover 16 of the sensitive element 3 are fastened by sealing screws 17 to form a sealed cavity. There is a central single-island 14 in the cavity. The single-island base 11 and the central single-island 14 are integrally processed, and the structure is as follows: As shown in Figure 3, the central single island 14 divides the cavity of the sensitive element into two symmetrical left and right small cavities, and two multi-electrode force-sensitive resonators 13-1 and 13-2 are symmetrically embedded on both sides of the central single island 14. In the two small cavities on the side, one side of the multi-electrode force sensitive resonator 13-1 or 13-2 is welded to the support platform 14-2 or 14-3 in the middle of the central single island 14, and the other side is welded to the single island base 11 The support platform 11-1 or 11-2 in the middle is welded, and limit screws 12-1 and 12-2 are placed at the corresponding positions of the left and right ends of the upper part of the single island base 11 and the inertial mass block 14-4 on the upper part of the central single island 14 , the limit screws 12-1 and 12-2 are installed in the limit nut holes 11-3 and 11-4 corresponding to the top of the single island base 11, and set screws 15-1 and 15-2 (not shown ) tight.

The single-island base 11 and the central single-island 14 of the sensitive element 3 shown in Fig. 2, its structure is as shown in Fig. The connection 14-1 with the single-island base 11 is a flexible connection, and the left and right sides of the middle of the central single-island 14 have symmetrical support platforms 14-2 and 14-2 embedded with multi-electrode force-sensitive resonators 13-1 and 13-2. 3. The upper part of the central single island 14 is an inertial mass block 14-4; the bottom of the single island base 11 has electrode lead holes 11-5 (4 in total), mounting nut holes 11-6 (2 in total), and lead grooves 11-7, there are symmetrical support platforms 11-1 and 11-2 inlaid with multi-electrode force-sensitive resonators 13-1 or 13-2 on the left and right sides of the middle part of the single-island base 11, and the left and right sides of the upper part of the single-island base 11 There are nut holes 11-3 and 11-4 for installing limit screws 12-1 or 12-2 on the side, and there are set nut holes 11-8 for installing sealing cover 16 on the left and right sides of the single island base 11 (total 8 indivual).

The multi-electrode force-sensitive resonator 13-1 or 13-2 of the sensitive element 3 shown in Fig. 2, its substrate is a quartz crystal disc, and the number of electrode pairs on the same substrate is two pairs or more than two pairs. The distribution of positions on the substrate can be symmetrical or asymmetrical; in this embodiment, a quartz force sensitive resonator with three pairs of electrodes is shown.

The sealing cover 16 of sensitive element 3 shown in Fig. 2, its structure as shown in Figure 4, there are countersunk screw holes 16-1 (8 in total) that are used for installing sealing screw at two of sealing cover 16, in four There are support mounting nut holes 16-2 (total 4) for installing circuit board support columns 6 near the corners.

The single-island multi-electrode quartz accelerometer of the invention has a resolution of less than 10 ^-4 g, a non-linearity of less than 0.1%, a measurement range of 10 ^-4 g to 10 ² g, and has the advantages of simple structure, digital output and high reliability. The accelerometer can be used in detection and control systems of aircraft, vehicles, ships, industrial automation, etc.

Claims (2)

1. a kind of single island multi-electrode quartz accelerometer, close by screw (9) by the base (1) and shell (2) that play a supportive role Cooperation is assembled into cavity, and the sensing element (3) of detection is arranged on base (1) with screw (10), and circuit board (5) is by circuit Plate supporting studs (6) are supported, and are anchored on by circuit plate bolt (7) on sensing element (3), and aviation socket (4) is pacified by screw (8) On shell (2), power supply and signal are passed in and out by cable from aviation socket (4)；Sensing element (3) by single island pedestal (11), in Yang Dan islands (14), stop screw (12-1,12-2), the quick resonator of multi-electrode power (13-1,13-2) and seal closure (16) are formed；

The architectural feature of its sensing element (3) is：Single island pedestal (11) and seal closure (16) are made up of sealing screw (17) fastening Seal cavity, there is central single island (14) and two quick resonators of multi-electrode power (13-1,13-2) in cavity, single island pedestal (11) with The single island (14) in center is formed by being integrally machined, and the cavity of sensing element is divided into the two small chambers in symmetrical left and right by the single island (14) in center Body, two quick resonators of multi-electrode power (13-1,13-2) are symmetrically embedded in two small cavitys of single island (14) both sides in center, One side of the quick resonator of multi-electrode power (13-1,13-2) is welded with the support platform (14-2,14-3) in the middle part of the single island (14) in center, Another side is welded with the support platform (11-1,11-2) in the middle part of single island pedestal (11), the left and right ends on single island pedestal (11) top Limited location screw (12-1,12-2), stop screw (12-1,12-2) are embedded in stop nut corresponding to single island pedestal (11) top In hole (11-3,11-4), and by holding screw (15-1,15-2) tightening；

The architectural feature of the quick resonator of multi-electrode power (13-1,13-2) of its sensing element (3) is：The quick resonator of multi-electrode power The substrate of (13-1,13-2) is quartz crystal circle sheet, and the electrode logarithm on same substrate is two pairs or more, electrode Distribution of the position on substrate can be symmetrical or asymmetric distribution.

2. single island multi-electrode quartz accelerometer as claimed in claim 1, single island pedestal (11) of its sensing element (3) and in The architectural feature on Yang Dan islands (14) is：Single island pedestal (11) is formed with the single island (14) in center by being integrally machined, the single island (14) in center The junction (14-1) of bottom and single island pedestal (11) be flexible connection, have at left and right sides of the middle part of the single island (14) in center and inlay The single island resonator support platform (14-2,14-3) in symmetrical center of the quick resonator of multi-electrode power (13-1,13-2), the single island in center (14) top is inertial mass (14-4)；4 motor down-lead holes (11-5), 2 installations are arranged at the bottom of single island pedestal (11) Nut bore (11-6), wire lead slot (11-7), the middle part left and right sides of single island pedestal (11), which has, inlays the quick resonator of multi-electrode power There is installation stop screw the symmetric support platform (11-1,11-2) of (13-1,13-2), the top left and right sides of single island pedestal (11) The stop nut hole (11-3,11-4) of (12-1,12-2), have the 8 of installation seal closure (16) at left and right sides of single island pedestal (11) Individual locknut hole (11-8).