CN104759760A - Laser processing method of surface array microstructure of point cloud description curve workpiece - Google Patents
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Abstract
本发明提供了一种点云描述曲面工件的表面阵列微结构激光加工方法,包括:采用逆向工程方法测量建模待加工自由曲面工件外形,并基于点云描述曲面进行表面阵列微结构的设计图形布局;之后对设计图形进行激光刻蚀加工路径规划,根据加工路径所在的切平面、几何中心点以及对应外法矢量,调整激光加工头相对自由曲面工件的空间方位,使激光束沿法向方向射向自由曲面工件,逐条进行几何线条的激光刻蚀加工。本发明的表面阵列微结构图形的布局设计,计算量与自由曲面的曲率分布与变化无关,兼容各种类型的自由曲面,计算规模稳定且保持收敛,布局效率高;完全消除了表面阵列微结构图形的布局与加工误差,确保了激光刻蚀加工工艺质量的精确性和稳定性。The invention provides a surface array microstructure laser processing method for a curved surface workpiece described by a point cloud, comprising: using a reverse engineering method to measure and model the shape of a free curved surface workpiece to be processed, and to design graphics for the surface array microstructure based on the point cloud described curved surface Layout; then plan the laser etching processing path for the design graphics, adjust the spatial orientation of the laser processing head relative to the free-form surface workpiece according to the tangent plane where the processing path is located, the geometric center point, and the corresponding external normal vector, so that the laser beam is along the normal direction Shoot to the free-form surface workpiece, and perform laser etching of geometric lines one by one. The layout design of the surface array microstructure graphics of the present invention has nothing to do with the curvature distribution and change of the free-form surface, and is compatible with various types of free-form surfaces. The calculation scale is stable and convergent, and the layout efficiency is high; the surface array microstructure is completely eliminated. The layout and processing errors of the graphics ensure the accuracy and stability of the laser etching process quality.
Description
技术领域technical field
本发明属于激光加工技术领域,具体涉及一种点云描述曲面工件的表面阵列微结构激光加工方法。The invention belongs to the technical field of laser processing, and in particular relates to a surface array microstructure laser processing method for a curved surface workpiece described by a point cloud.
背景技术Background technique
在机械工业和电子工业领域,经常需要在已经成型的自由曲面工件表面上再制备出阵列微结构。微结构是指面形精度达亚微米级,表面粗糙度达纳米级的,具有特定功能的微小表面拓扑形状。微结构最主要的特征是其结构的功能性,如微结构表面光学元件的表面结构决定了对光线的反射,透射或衍射性能,便于光学设计者优化光学系统,减轻重量,缩小体积。另一特征是它们一般都有大的深宽比,这与传统的表面参数及统计特性不同。In the field of mechanical industry and electronic industry, it is often necessary to prepare array microstructures on the surface of the formed free-form surface workpiece. Microstructure refers to the tiny topological shape of the surface with a surface shape accuracy of submicron level and surface roughness of nanometer level with specific functions. The most important feature of microstructure is the functionality of its structure. For example, the surface structure of microstructure surface optical components determines the reflection, transmission or diffraction performance of light, which is convenient for optical designers to optimize the optical system, reduce weight and reduce volume. Another feature is that they generally have a large aspect ratio, which is different from the traditional surface parameters and statistical properties.
由于曲面工件外形的不规则性、非回转性和不可展性等特点,一般很难用数学方程精确地描述,通常采用一系列离散型值点,即散乱点云数据来描述自由曲面模型。其中,散乱点云数据可以直接来自于采用逆向工程方法测量尺寸并制作成3D模型后,再在CAD/CAM系统中对其进行离散化获得。Due to the irregularity, non-rotation and non-extensibility of the shape of the surface workpiece, it is generally difficult to accurately describe it with mathematical equations. Usually, a series of discrete value points, that is, scattered point cloud data, are used to describe the free-form surface model. Among them, the scattered point cloud data can be obtained directly from measuring the size by using the reverse engineering method and making it into a 3D model, and then discretizing it in the CAD/CAM system.
激光刻蚀加工在激光加工中属于激光去除类,也可以称之为蒸发加工,是基于激光与被加工材料相互作用引起物态变化形成的热物理效应,以及各种能量变化产生的综合结果。影响加工质量的主要因素取决于激光的波长、激光功率密度、光束质量、聚焦状态和被加工材料本身的物理特性等参数。激光束初始经过聚焦透镜后照射在处于焦平面的工件上,使被加工材料表面的温度迅速上升。当温度上升到接近于材料的蒸发温度时,激光对材料的去除加工开始进行。此时固态金属发生强烈的相变,最先金属开始融化,之后一部分开始汽化。随着温度不断上升,金属蒸汽携带着液相物质以极高的速度从液相底部猛烈的喷溅出来,从而将底部新的表面暴露在激光束照射之下,从而持续产生熔化、蒸发与喷溅。通过这种不断的照射、熔化-蒸发、喷溅、照射,直至达到要求的激光刻蚀深度或穿透整个工件材料。与此同时,激光束按照设定的速度和路径移动,可以获得要求的激光刻蚀加工结构。Laser etching belongs to the category of laser removal in laser processing, and it can also be called evaporation processing. It is based on the thermophysical effect of the physical state change caused by the interaction between the laser and the processed material, and the comprehensive result of various energy changes. The main factors affecting the processing quality depend on parameters such as the wavelength of the laser, laser power density, beam quality, focusing state, and the physical properties of the processed material itself. The laser beam initially passes through the focusing lens and irradiates the workpiece at the focal plane, causing the surface temperature of the processed material to rise rapidly. When the temperature rises to close to the evaporation temperature of the material, the laser will start to remove the material. At this time, the solid metal undergoes a strong phase change. First, the metal begins to melt, and then part of it begins to vaporize. As the temperature continues to rise, the metal vapor carries the liquid phase material and violently splashes out from the bottom of the liquid phase at a very high speed, thereby exposing the new surface of the bottom to the laser beam, thereby continuously producing melting, evaporation and spraying. splash. Through this continuous irradiation, melting-evaporation, sputtering, and irradiation, until the required laser etching depth is reached or the entire workpiece material is penetrated. At the same time, the laser beam moves according to the set speed and path, and the required laser etching structure can be obtained.
现有技术中,针对曲面工件外形的表面阵列微结构的加工一般有两种方法。第一种方法是先基于理论工件模型进行离线虚拟设计再对实际工件进行在线加工,但是由于任何自由曲面工件在其自由曲面外形的加工过程中都有加工公差,因此这种方法没有考虑工件实际外形尺寸与理论工件模型的误差,加工误差较大。第二种方法是先基于表面阵列微结构图形进行离线虚拟布局和设计,再对实际工件进行在线加工,但是由于刀具的方位误差和磨损误差或激光束的投影拼接误差的存在,使得微结构图形布局与加工均存在较大的偏差。In the prior art, there are generally two methods for processing surface array microstructures for the shape of curved workpieces. The first method is to conduct offline virtual design based on the theoretical workpiece model and then process the actual workpiece online. However, since any free-form surface workpiece has machining tolerances during the processing of its free-form surface shape, this method does not consider the actual workpiece. The error between the external dimension and the theoretical workpiece model, the processing error is relatively large. The second method is to conduct offline virtual layout and design based on surface array microstructure graphics, and then process the actual workpiece online. There are large deviations in layout and processing.
发明内容Contents of the invention
本发明针对上述现有技术的不足,提供了一种加工误差小、精确性好和稳定性高的点云描述曲面工件的表面阵列微结构激光加工方法。The present invention aims at the deficiencies of the above-mentioned prior art, and provides a surface array microstructure laser processing method for a curved surface workpiece described by a point cloud with small processing error, good accuracy and high stability.
本发明是通过如下技术方案实现的:The present invention is achieved through the following technical solutions:
一种点云描述曲面工件的表面阵列微结构激光加工方法,包括如下步骤:A surface array microstructure laser processing method for point cloud description of a curved surface workpiece, comprising the following steps:
(1)固定装夹和定位自由曲面工件;基于空间XYZ直角坐标系,采用逆向工程方法测量自由曲面工件表面的外形尺寸,获得基于散乱点云数据描述的曲面模型,即点云描述曲面;其中,散乱点云数据中相邻点的最大空间距离不大于预先设定的值α,且ΔDist>α,ΔAngle>D/α;ΔDist为周期性阵列微结构布局最大距离误差值,ΔAngle为周期性阵列微结构布局的最大角度误差值,D为周期性阵列微结构中任意两个单元微结构的各自几何中心点之间的空间直线距离;(1) Fixed clamping and positioning of the free-form surface workpiece; based on the spatial XYZ rectangular coordinate system, the external dimensions of the free-form surface workpiece surface are measured by reverse engineering methods, and the surface model based on the description of the scattered point cloud data is obtained, that is, the surface described by the point cloud; , the maximum spatial distance between adjacent points in the scattered point cloud data is not greater than the preset value α, and ΔDist>α, ΔAngle>D/α; ΔDist is the maximum distance error value of the periodic array microstructure layout, ΔAngle is the periodicity The maximum angular error value of the array microstructure layout, D is the space linear distance between the respective geometric center points of any two unit microstructures in the periodic array microstructure;
(2)将顶点集合初始化为空集;并在点云描述曲面上,取两个初始点P0(x0,y0,z0)和P1(x1,y1,z1),使得P0、P1两点的空间直线距离Dist_P与周期性单元间距D满足关系D-ΔDist<Dist_P<D+ΔDist,将P0、P1都标记为“未扩展”并加入顶点集合;(2) Initialize the vertex set as an empty set; and on the point cloud description surface, take two initial points P 0 (x 0 , y 0 , z 0 ) and P 1 (x 1 , y 1 , z 1 ), Make the spatial straight-line distance Dist_P of two points P 0 and P 1 satisfy the relationship D-ΔDist<Dist_P<D+ΔDist, and mark P 0 and P 1 as "unexpanded" and add them to the vertex set;
(3)取顶点集合中任意一个标记为“未扩展”的点Pi,在点云描述曲面上进行N等分扩展操作,获得M个扩展点Pj;N取3、4、5或6,j=1~M;(3) Take any point P i marked as "unextended" in the vertex set, and perform N equal division expansion operations on the point cloud description surface to obtain M expansion points P j ; N is 3, 4, 5 or 6 , j=1~M;
其中,N等分扩展操作的含义为:根据点Pi及点Pi的一个相邻的且标记为“未扩展”的点Pi+1,在点云描述曲面的点云数据中搜索寻取扩展点Pj,使得满足如下条件:1)Pi、Pj两点的距离Dist_Pj需要满足关系D-ΔDist<Dist_Pj<D+ΔDist;2)Pi、Pj两点连线与Pi、Pi+1两点连线之间的夹角angle满足2kπ/N-ΔAngle<angle<2kπ/N+ΔAngle,k为小于等于N的正整数;Among them, the meaning of the N equal division expansion operation is: according to the point P i and an adjacent point P i+1 of the point P i that is marked as "unexpanded", search for the point cloud data in the point cloud description surface. Take the extension point P j so that the following conditions are met: 1) The distance Dist_P j between P i and P j needs to satisfy the relationship D-ΔDist<Dist_P j <D+ΔDist; 2) The line connecting the two points P i and P j and The angle angle between the line connecting two points P i and P i+1 satisfies 2kπ/N-ΔAngle<angle<2kπ/N+ΔAngle, and k is a positive integer less than or equal to N;
(4)将步骤(3)得到的M个扩展点Pj,都标记为“未扩展”并加入顶点集合,将Pi标记为“已扩展”;分别计算Pj与顶点集合中所有其他点的空间直线距离,若得到的所有空间直线距离值中存在至少一个空间距离值小于D/2,则表明Pj是冗余点,将其从顶点集合删除;(4) Mark the M expansion points P j obtained in step (3) as "unexpanded" and add them to the vertex set, mark P i as "extended"; calculate P j and all other points in the vertex set respectively If there is at least one space distance value smaller than D/2 in all obtained space line distance values, it indicates that P j is a redundant point, and it is deleted from the vertex set;
(5)重复步骤(3)-(4),直至顶点集合不存在标记为“未扩展”的点;(5) Repeat steps (3)-(4), until there is no point marked as "unexpanded" in the vertex set;
(6)对步骤(2)-(5)获得的顶点集合中的所有点Pt,计算求得Pt所在点云描述曲面位置的切平面Kt和外法矢量Vt;t为大于2的整数;(6) For all points P t in the vertex set obtained in steps (2)-(5), calculate and obtain the tangent plane K t and the external normal vector V t of the point cloud description surface position where P t is located; t is greater than 2 an integer of
(7)在点云描述曲面所在的空间XYZ直角坐标系中,任意选择一个空间基准向量;(7) In the XYZ Cartesian coordinate system of the space where the point cloud describes the curved surface, arbitrarily select a space reference vector;
(8)在所有切平面Kt上,以其对应的Pt点为几何中心点,对应排布一个单元微结构的设计图形Gt,并且满足所有切平面上的设计图形的同一条对应特征边线与空间基准向量在Kt上的投影线之间的夹角均为固定值;(8) On all tangent planes K t , with its corresponding P t point as the geometric center point, a design graph G t of a unit microstructure is correspondingly arranged, and the same corresponding feature of the design graph on all tangent planes is satisfied The included angle between the edge line and the projection line of the spatial reference vector on Kt is a fixed value;
(9)对步骤(8)获得的所有的设计图形Gt进行激光刻蚀加工路径规划,获得对应的激光刻蚀加工路径集合Rt,Rt由若干条位于切平面Kt上的几何线条构成。(9) Perform laser etching processing path planning on all the design graphics G t obtained in step (8), and obtain the corresponding laser etching processing path set R t , R t consists of several geometric lines located on the tangent plane K t constitute.
(10)对所有激光刻蚀加工路径集合Rt,根据其所在的切平面Kt、几何中心点Pt以及对应外法矢量Vt,经过Rt中的每一条几何线条的起点Pst,作与Vt方向平行的平行线Vst,搜索点云描述曲面的点云数据中距离Vst最近的点Pst’,并且计算Pst和Pst’的空间距离ds;同样的,经过Rt中的每一条几何线条的终点Ptt,作与Vt方向平行的平行线Vtt,搜索点云描述曲面的点云数据中距离Vtt最近的点Ptt’,并且计算Ptt和Ptt’的空间距离dt;(10) For all laser etching processing path sets R t , according to the tangent plane K t , the geometric center point P t and the corresponding external normal vector V t , pass through the starting point P st of each geometric line in R t , Make a parallel line V st parallel to the V t direction, search for the point P st ' closest to V st in the point cloud data describing the surface of the point cloud, and calculate the spatial distance d s between P st and P st '; similarly, after The end point P tt of each geometric line in R t is a parallel line V tt parallel to the direction of V t , search for the point P tt ' closest to V tt in the point cloud data of the point cloud describing the curved surface, and calculate P tt and The spatial distance d t of P tt ';
(11)对所有激光刻蚀加工路径集合Rt,根据其所在的切平面Kt、几何中心点Pt以及对应外法矢量Vt,调整激光加工头相对自由曲面工件的空间方位,使激光束沿Vt方向射向自由曲面工件,即使得激光加工头的聚焦物镜出射的聚焦激光束光轴与Vt平行;(11) For all the laser etching processing path sets R t , adjust the spatial orientation of the laser processing head relative to the free-form surface workpiece according to the tangent plane K t , the geometric center point P t and the corresponding external normal vector V t , so that the laser The beam shoots to the workpiece on the free-form surface along the V t direction, that is, the optical axis of the focused laser beam emitted by the focusing objective lens of the laser processing head is parallel to V t ;
(12)在Rt中选择任意一条未加工过的几何线条,平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过该几何线条的起点,并且光束焦点位于自由曲面工件表面或有离焦量;(12) Select any unprocessed geometric line in R t , and translate the laser processing head so that the focused laser beam emitted by the focusing objective lens passes through the starting point of the geometric line, and the focus of the beam is located on the free-form surface workpiece surface or has defocus quantity;
(13)打开激光;(13) Turn on the laser;
(14)平移激光加工头,使光束焦点以一定的扫描速度沿着该几何线条的轨迹由起点向终点平移行进,行进过程中同时使得聚焦物镜与自由曲面工件沿Vi方向的距离均匀的调整dt-ds大小,即保证光束焦点在行进过程中始终位于自由曲面工件表面或有离焦量;到达终点后,标记该几何线条为已加工过;(14) Translate the laser processing head so that the focus of the beam moves from the starting point to the end point along the trajectory of the geometric line at a certain scanning speed, and at the same time make the distance between the focusing objective lens and the free-form surface workpiece along the V i direction evenly adjusted during the moving process The size of d t -d s , that is, to ensure that the focus of the beam is always on the surface of the free-form surface workpiece or has a defocus amount during the traveling process; after reaching the end point, mark the geometric line as processed;
(15)在Rt中任意选择一条未加工过的几何线条作为下一条加工线条,若不存在下一条加工线条,则表明Rt中所有的几何线条均被加工过,转入步骤(18);若存在下一条加工线条,则判断下一条加工线条是否与步骤(14)中已加工过的几何线条首尾衔接,若是,则转入步骤(17);否则进入步骤(16);(15) Randomly select an unprocessed geometric line in R t as the next processing line, if there is no next processing line, it indicates that all the geometric lines in R t have been processed, and turn to step (18) ; If there is a next processing line, then judge whether the next processing line is connected end-to-end with the processed geometric lines in the step (14), if so, then proceed to the step (17); otherwise enter the step (16);
(16)关闭激光;平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过下一条加工线条的起点,并且光束焦点位于自由曲面工件表面或有离焦量;返回步骤(13);(16) Turn off the laser; translate the laser processing head so that the focused laser beam emitted through the focusing objective lens passes through the starting point of the next processing line, and the focus of the beam is located on the free-form surface workpiece surface or has a defocus amount; return to step (13);
(17)平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过下一条加工线条的起点,并且光束焦点位于自由曲面工件表面或有离焦量;返回步骤(14);(17) Translate the laser processing head so that the focused laser beam emitted by the focusing objective lens passes through the starting point of the next processing line, and the focus of the beam is located on the free-form surface workpiece surface or has a defocus amount; return to step (14);
(18)结束。(18) END.
本发明具有如下有益效果:The present invention has following beneficial effect:
1、本发明采用逆向工程方法测量建模待加工自由曲面工件外形并基于点云描述曲面模型进行表面阵列微结构的设计图形布局,在线测量、设计与加工在同一坐标系下进行,相比传统方法完全消除了工件实际外形尺寸与理论工件模型的误差问题,并且阵列微结构的设计图形采用了平行投影方式,与激光加工的光束平移完全一致(激光束平移加工本质就是光线平行投影),从而也完全消除了表面阵列微结构图形的布局与加工误差。1. The present invention uses the reverse engineering method to measure and model the shape of the free-form surface workpiece to be processed, and based on the point cloud to describe the surface model to design the graphic layout of the surface array microstructure, online measurement, design and processing are carried out in the same coordinate system, compared with the traditional The method completely eliminates the error problem between the actual dimensions of the workpiece and the theoretical workpiece model, and the design pattern of the array microstructure adopts a parallel projection method, which is completely consistent with the beam translation of laser processing (the essence of laser beam translation processing is the parallel projection of light rays), thus It also completely eliminates the layout and processing errors of surface array microstructure graphics.
2、本发明虽然采用逆向工程设备对自由曲面工件进行测量,但后续布局设计及加工处理都是直接基于点云数据进行处理,省去了曲面拟合处理,大大减少了计算量;2. Although the present invention uses reverse engineering equipment to measure free-form surface workpieces, the subsequent layout design and processing are all processed directly based on point cloud data, eliminating the need for surface fitting processing and greatly reducing the amount of calculation;
3、本发明的表面阵列微结构图形的布局与设计,计算量与自由曲面的曲率分布与变化无关,兼容各种类型的自由曲面,计算规模稳定且保持收敛,布局效率高;3. The layout and design of the surface array microstructure graphics of the present invention has nothing to do with the curvature distribution and change of the free-form surface, and is compatible with various types of free-form surfaces. The calculation scale is stable and convergent, and the layout efficiency is high;
4、本发明的表面阵列微结构图形布局方法,布局精度与逆向工程测量的点云数据精度直接相关,具有可预测、可控制的优点,尤其可以根据需要和具体应用灵活控制,合理规划点云数据量,进一步优化计算量;4. The surface array microstructure graphic layout method of the present invention, the layout accuracy is directly related to the point cloud data accuracy measured by reverse engineering, and has the advantages of predictability and controllability, especially it can be flexibly controlled according to needs and specific applications, and the point cloud can be reasonably planned The amount of data, to further optimize the amount of calculation;
5、本发明的表面阵列微结构图形布局方法,满足所有切平面上的设计图形的同一条对应特征边线与空间基准向量在Ki上的投影线之间的夹角均为固定值,从而保证所有的阵列微结构的空间朝向尽可能整齐,若周期性阵列微结构的功能为频率选择表面,则该空间基准向量与入射电磁波的方向一致,十分精确、灵活和便于调整;5. The surface array microstructure graphics layout method of the present invention satisfies that the included angles between the same corresponding feature edge of the design graphics on all tangent planes and the projection line of the space reference vector on Ki are fixed values, thereby ensuring The spatial orientation of all array microstructures is as neat as possible. If the function of the periodic array microstructure is a frequency selective surface, then the spatial reference vector is consistent with the direction of the incident electromagnetic wave, which is very accurate, flexible and easy to adjust;
6、本发明通过N等分扩展操作(N可为3、4、5、6之一),从而使得周期性阵列微结构的图形布局可以设计成120、90、72、60度交错排列之一,并不局限于传统的60度交错;6. The present invention expands the operation through N equal divisions (N can be one of 3, 4, 5, or 6), so that the graphic layout of the periodic array microstructure can be designed as one of 120, 90, 72, and 60 degrees of staggered arrangement , not limited to the traditional 60-degree stagger;
7、本发明的表面阵列微结构的激光刻蚀加工,可以有效保证光束焦点在加工过程中始终位于自由曲面工件表面或根据工艺需要有一定的离焦量,相比目前现有在自由曲面工件表面上的各种“近似聚焦”的激光加工方法,是一种全新的“准确聚焦”激光加工方法,确保了激光刻蚀加工工艺质量的精确性和稳定性。7. The laser etching process of the surface array microstructure of the present invention can effectively ensure that the beam focus is always located on the surface of the free-form surface workpiece during the processing or has a certain amount of defocus according to the process requirements. Various "approximate focus" laser processing methods on the surface are a brand-new "accurate focus" laser processing method, which ensures the accuracy and stability of the laser etching process quality.
具体实施方式Detailed ways
下面结合具体实施方式对本发明做进一步详细的说明。The present invention will be described in further detail below in combination with specific embodiments.
本发明提供了一种点云描述曲面工件的表面阵列微结构激光加工方法,采用该方法可以在给定某个具有光滑表面的自由曲面工件表面排布和制备周期性阵列微结构;其中,构成周期性阵列微结构的单元微结构之间的周期性单元间距为D;周期性单元间距的定义为任意两个单元微结构的各自几何中心点之间的空间直线距离。预先设置周期性阵列微结构布局中最大距离误差值ΔDist(ΔDist为大于0的实数)和最大角度误差值ΔAngle(ΔAngle为大于0的实数,单位一般用弧度表示)。The present invention provides a surface array microstructure laser processing method for curved surface workpieces described by point clouds, which can be used to arrange and prepare periodic array microstructures on the surface of a given free-form surface workpiece with a smooth surface; wherein, the composition The periodic unit spacing between the unit microstructures of the periodic array microstructure is D; the periodic unit spacing is defined as the space linear distance between the respective geometric center points of any two unit microstructures. Preset the maximum distance error value ΔDist (ΔDist is a real number greater than 0) and the maximum angle error value ΔAngle (ΔAngle is a real number greater than 0, and the unit is generally expressed in radians) in the periodic array microstructure layout.
上述点云描述曲面工件的表面阵列微结构激光加工方法具体包括如下步骤:The surface array microstructure laser processing method of the above-mentioned point cloud description curved surface workpiece specifically includes the following steps:
(1)固定装夹和定位自由曲面工件;基于空间XYZ直角坐标系,采用逆向工程方法测量自由曲面工件表面的外形尺寸,获得基于散乱点云数据描述的曲面模型,以下将基于散乱点云数据描述的曲面模型简称点云描述曲面。其中,点云描述曲面的精度由逆向工程方法的测量精度和取点疏密程度控制,可以通过三维逆向工程设备测量参数设定所获得的散乱点云数据中相邻点的最大空间距离不大于值α(α为大于0的实数,可根据需要任意设定),并且要求ΔDist>α,ΔAngle>D/α,其意义在于保证后续步骤中的点的“N等分扩展操作”一定可以找到对应的扩展点;(1) Fixed clamping and positioning of the free-form surface workpiece; based on the spatial XYZ rectangular coordinate system, the external dimensions of the free-form surface workpiece surface are measured by reverse engineering methods, and the surface model described based on the scattered point cloud data is obtained. The following will be based on the scattered point cloud data. The described surface model is referred to as point cloud description surface. Among them, the accuracy of the surface described by the point cloud is controlled by the measurement accuracy of the reverse engineering method and the point density. The maximum spatial distance between adjacent points in the scattered point cloud data obtained by setting the measurement parameters of the 3D reverse engineering equipment is not greater than The value of α (α is a real number greater than 0, which can be set arbitrarily according to the needs), and requires ΔDist>α, ΔAngle>D/α, which means to ensure that the "N equal division expansion operation" of the points in the subsequent steps can be found Corresponding extension point;
(2)将顶点集合初始化为空集;并在点云描述曲面上,取两个初始点P0(x0,y0,z0)和P1(x1,y1,z1),使得P0、P1两点的空间直线距离Dist_P与周期性单元间距D满足关系D-ΔDist<Dist_P<D+ΔDist,将P0、P1都标记为“未扩展”并加入顶点集合;(2) Initialize the vertex set as an empty set; and on the point cloud description surface, take two initial points P 0 (x 0 , y 0 , z 0 ) and P 1 (x 1 , y 1 , z 1 ), Make the spatial straight-line distance Dist_P of two points P 0 and P 1 satisfy the relationship D-ΔDist<Dist_P<D+ΔDist, and mark P 0 and P 1 as "unexpanded" and add them to the vertex set;
(3)取顶点集合中任意一个标记为“未扩展”的点Pi,在点云描述曲面上进行N等分扩展操作(N取3、4、5或6),获得M个扩展点Pj(j=1~M);(3) Take any point P i marked as "unextended" in the vertex set, and perform N equal-division expansion operations on the point cloud description surface (N is 3, 4, 5 or 6), and obtain M expansion points P j (j=1~M);
其中,N等分扩展操作的含义为:根据点Pi及点Pi的一个相邻的且标记为“未扩展”的点Pi+1(显然,Pi、Pi+1两点的空间直线距离大于D-ΔDist,小于D+ΔDist),在点云描述曲面的点云数据中搜索寻取扩展点Pj(j=1~M),使得满足如下条件:1)Pi、Pj两点的距离Dist_Pj需要满足关系D-ΔDist<Dist_Pj<D+ΔDist;2)Pi、Pj两点连线与Pi、Pi+1两点连线之间的夹角angle满足2kπ/N-ΔAngle<angle<2kπ/N+ΔAngle,k为小于等于N的正整数;Among them, the meaning of the N equal division expansion operation is: according to the point P i and an adjacent point P i +1 marked as "unexpanded" of the point P i (obviously, the two points P i and P i+1 Space straight-line distance is greater than D-ΔDist, less than D+ΔDist), search for the extension point P j (j=1~M) in the point cloud data of the point cloud description surface, so that the following conditions are met: 1) P i , P The distance Dist_P j between the two points of j needs to satisfy the relationship D-ΔDist<Dist_P j <D+ΔDist; 2) The angle between the line connecting the two points P i and P j and the line connecting the two points P i and P i+1 Satisfy 2kπ/N-ΔAngle<angle<2kπ/N+ΔAngle, k is a positive integer less than or equal to N;
(4)将步骤(3)得到的M个扩展点Pj,都标记为“未扩展”并加入顶点集合,将Pi标记为“已扩展”;分别计算Pj与顶点集合中所有其他点的空间直线距离,若得到的所有空间直线距离值中存在至少一个空间距离值小于D/2,则表明Pj是冗余点,将其从顶点集合删除;(4) Mark the M expansion points P j obtained in step (3) as "unexpanded" and add them to the vertex set, mark P i as "extended"; calculate P j and all other points in the vertex set respectively If there is at least one space distance value smaller than D/2 in all obtained space line distance values, it indicates that P j is a redundant point, and it is deleted from the vertex set;
(5)重复步骤(3)-(4),直至顶点集合不存在标记为“未扩展”的点;(5) Repeat steps (3)-(4), until there is no point marked as "unexpanded" in the vertex set;
(6)对步骤(2)-(5)获得的顶点集合中的所有点Pt(t为大于2的整数),计算求得Pt所在点云描述曲面位置的切平面Kt和外法矢量Vt(即Kt与Vt垂直);(6) For all points P t (t is an integer greater than 2) in the vertex set obtained in steps (2)-(5), calculate and obtain the tangent plane K t and the external method of the position of the point cloud describing the surface where P t is located Vector V t (that is, K t is perpendicular to V t );
(7)在点云描述曲面所在的空间XYZ直角坐标系中,任意选择一个空间基准向量(若周期性阵列微结构的功能为频率选择表面,则该空间基准向量与入射电磁波的方向一致);(7) In the XYZ Cartesian coordinate system of the space where the point cloud describes the surface, arbitrarily select a spatial reference vector (if the function of the periodic array microstructure is a frequency selective surface, then the spatial reference vector is consistent with the direction of the incident electromagnetic wave);
(8)在所有切平面Kt上,以其对应的Pt点为几何中心点,对应排布一个单元微结构的设计图形Gt,并且满足所有切平面上的设计图形的同一条对应特征边线(所述特征边线是指构成设计图形Gi的任一线段)与空间基准向量在Kt上的投影线之间的夹角均为固定值(即限定设计图形绕Pt点的旋转方位角,保证所有的阵列微结构的空间朝向尽可能整齐);(8) On all tangent planes K t , with its corresponding P t point as the geometric center point, a design graph G t of a unit microstructure is correspondingly arranged, and the same corresponding feature of the design graph on all tangent planes is satisfied The angle between the sideline (the feature sideline refers to any line segment that constitutes the design graphic G i ) and the projection line of the space reference vector on K t is a fixed value (that is, the rotation orientation of the design graphic around the P t point is limited angle, to ensure that the spatial orientation of all array microstructures is as neat as possible);
(9)对步骤(8)获得的所有的设计图形Gt(t=0~n,n为大于2的整数)进行激光刻蚀加工路径规划,获得对应的激光刻蚀加工路径集合Rt(t=0~n,n为大于2的整数),Rt由若干条位于切平面Kt上的几何线条构成,该几何线条可以为直线,也可以为曲线。(9) Perform laser etching processing path planning for all design graphics G t (t=0~n, n is an integer greater than 2) obtained in step (8), and obtain a corresponding laser etching processing path set R t ( t=0~n, n is an integer greater than 2), R t is composed of several geometric lines located on the tangent plane K t , and the geometric lines can be straight lines or curved lines.
其中,激光刻蚀加工路径规划定义为:根据激光束聚焦光斑外形尺寸和功率密度(组合起来决定了单次扫描的刻蚀线宽和刻蚀深度),确定激光束聚焦光斑的图形轮廓线和内部填充线的扫描路径,显然此处扫描路径为对应切平面Ki上的几何线条。Among them, laser etching processing path planning is defined as: according to the laser beam focus spot size and power density (combined to determine the etching line width and etching depth of a single scan), determine the graphic outline and laser beam focus spot The scanning path of the internal filling line, obviously, the scanning path here is the geometric line on the corresponding tangent plane K i .
(10)对所有激光刻蚀加工路径集合Rt(t=0~n,n为大于2的整数),根据其所在的切平面Kt、几何中心点Pt以及对应外法矢量Vt,经过Rt中的每一条几何线条的起点Pst,作与Vt方向平行的平行线Vst,搜索点云描述曲面的点云数据中距离Vst最近的点Pst’,并且计算Pst和Pst’的空间距离ds;同样的,经过Rt中的每一条几何线条的终点Ptt,作与Vt方向平行的平行线Vtt,搜索点云描述曲面的点云数据中距离Vtt最近的点Ptt’,并且计算Ptt和Ptt’的空间距离dt;(10) For all laser etching processing path sets R t (t=0~n, n is an integer greater than 2), according to the tangent plane K t where it is located, the geometric center point P t and the corresponding external normal vector V t , After passing through the starting point P st of each geometric line in R t , draw a parallel line V st parallel to the direction of V t , search for the point P st ' closest to V st in the point cloud data describing the surface of the point cloud, and calculate P st and the spatial distance d s of P st '; similarly, through the end point P tt of each geometric line in R t , make a parallel line V tt parallel to the direction of V t , and search for the distance in the point cloud data of the point cloud describing the curved surface V tt the nearest point P tt ', and calculate the spatial distance d t between P tt and P tt ';
(11)对所有激光刻蚀加工路径集合Rt(t=0~n,n为大于2的整数),根据其所在的切平面Kt、几何中心点Pt以及对应外法矢量Vt,调整激光加工头相对自由曲面工件的空间方位,使激光束沿Vt方向射向自由曲面工件,即使得激光加工头的聚焦物镜出射的聚焦激光束光轴与Vt平行;(11) For all laser etching processing path sets R t (t=0~n, n is an integer greater than 2), according to the tangent plane K t , the geometric center point P t and the corresponding external normal vector V t , Adjust the spatial orientation of the laser processing head relative to the free-form surface workpiece, so that the laser beam shoots toward the free-form surface workpiece along the V t direction, that is, the optical axis of the focused laser beam emitted by the focusing objective lens of the laser processing head is parallel to V t ;
(12)在Rt中选择任意一条未加工过的几何线条,平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过该几何线条的起点,并且光束焦点位于自由曲面工件表面或根据工艺需要有一定的离焦量;(12) Select any unprocessed geometric line in R t , translate the laser processing head so that the focused laser beam emitted by the focusing objective lens passes through the starting point of the geometric line, and the focus of the beam is located on the surface of the free-form surface or according to the process requirements There is a certain amount of defocus;
(13)打开激光;(13) Turn on the laser;
(14)平移激光加工头,使光束焦点以一定的扫描速度沿着该几何线条的轨迹由起点向终点平移行进,行进过程中同时使得聚焦物镜与自由曲面工件沿Vi方向的距离均匀的调整dt-ds大小,即保证光束焦点在行进过程中始终位于自由曲面工件表面或根据工艺需要有一定的离焦量;到达终点后,标记该几何线条为已加工过;(14) Translate the laser processing head so that the focus of the beam moves from the starting point to the end point along the trajectory of the geometric line at a certain scanning speed, and at the same time make the distance between the focusing objective lens and the free-form surface workpiece along the V i direction evenly adjusted during the moving process The size of d t -d s , that is, to ensure that the focus of the beam is always on the surface of the free-form surface workpiece or has a certain amount of defocus according to the process requirements; after reaching the end point, mark the geometric line as processed;
(15)在Rt中任意选择一条未加工过的几何线条作为下一条加工线条,若不存在下一条加工线条,则表明Rt中所有的几何线条均被加工过,转入步骤(18);若存在下一条加工线条,则判断下一条加工线条是否与步骤(14)中已加工过的几何线条首尾衔接,若是,则转入步骤(17);否则进入步骤(16);(15) Randomly select an unprocessed geometric line in R t as the next processing line, if there is no next processing line, it indicates that all the geometric lines in R t have been processed, and turn to step (18) ; If there is a next processing line, then judge whether the next processing line is connected end-to-end with the processed geometric lines in the step (14), if so, then proceed to the step (17); otherwise enter the step (16);
(16)关闭激光;平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过下一条加工线条的起点,并且光束焦点位于自由曲面工件表面或根据工艺需要有一定的离焦量;返回步骤(13);(16) Turn off the laser; translate the laser processing head so that the focused laser beam emitted by the focusing objective lens passes through the starting point of the next processing line, and the focus of the beam is located on the surface of the free-form surface workpiece or has a certain amount of defocus according to the needs of the process; return to the step ( 13);
(17)平移激光加工头使得经过聚焦物镜出射的聚焦激光束穿过下一条加工线条的起点,并且光束焦点位于自由曲面工件表面或根据工艺需要有一定的离焦量;返回步骤(14);(17) Translate the laser processing head so that the focused laser beam emitted by the focusing objective lens passes through the starting point of the next processing line, and the focus of the beam is located on the surface of the free-form surface workpiece or has a certain amount of defocus according to the needs of the process; return to step (14);
(18)结束。(18) END.
本发明可改变为多种方式对本领域的技术人员是显而易见的,这样的改变不认为脱离本发明的范围。所有这样的对所述领域的技术人员显而易见的修改,将包括在本权利要求的范围之内。It will be obvious to those skilled in the art that the present invention may be modified in various ways and such modifications are not to be regarded as departing from the scope of the present invention. All such modifications obvious to those skilled in the art are intended to be included within the scope of this claim.
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