CN104711532B - A kind of vacuum coating production line rotating platform mechanism - Google Patents
A kind of vacuum coating production line rotating platform mechanism Download PDFInfo
- Publication number
- CN104711532B CN104711532B CN201310688577.1A CN201310688577A CN104711532B CN 104711532 B CN104711532 B CN 104711532B CN 201310688577 A CN201310688577 A CN 201310688577A CN 104711532 B CN104711532 B CN 104711532B
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- production line
- driving element
- vacuum coating
- coating production
- platform mechanism
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 65
- 230000001939 inductive effect Effects 0.000 claims abstract description 26
- 230000005540 biological transmission Effects 0.000 claims abstract description 20
- 230000005693 optoelectronics Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 3
- 230000033001 locomotion Effects 0.000 abstract description 13
- 239000000463 material Substances 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 208000033999 Device damage Diseases 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 235000006708 antioxidants Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 210000004894 snout Anatomy 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of vacuum coating production line rotating platform mechanism, including：One drive component, the rotary components being connected with drive component and one are fixed on the limit assembly on rotary components, rotating disk on drive component driving rotary components rotates, rotary photoelectric inductor, inductive rod and the induced signal element of limit assembly are fixed on rotary components, and limit assembly controls the motion of rotating disk.Compared with prior art, the vacuum coating production line is particularly suitable for use in vacuum coating production line with rotating platform mechanism and connects substrate transmitting stream waterline and plated film streamline, the direction 180 degree of turning for making the substrate on substrate transmission streamline safe and reliable enters plated film streamline, prevent substrate from crank phenomenon occur, use manpower and material resources sparingly, floor space is reduced, it is safe and reliable rapid, therefore its application prospect is very wide.
Description
Technical field
The present invention relates to a kind of vacuum coating production line field, is to be related to one kind to be used for vacuum coating production line specifically
Rotating platform mechanism.
Background technology
Vacuum coating technology is begun to show in the 1930s, four the fifties start commercial Application occur, and industrialization is big to advise
Mould production starts from widely should in the 1980s, obtaining in the industry such as electronics, aerospace, packaging, decoration, gold stamping printing
With.Vacuum coating technology is a kind of novel materials synthesis and the new technology of processing, is the important set of field of surface engineering technique
Into part.Vacuum coating technology is the plated film that the surface of solids is coated to one layer of property using physics, chemical means, so that
There is the surface of solids wear-resistant, high temperature resistant, corrosion-resistant, anti-oxidant, radiation proof, conduction, magnetic conduction, insulation and ornament lamp many to be better than
The superior function of solid material in itself, reach and improve product quality, extend life of product, save the energy and obtain notable technology warp
The effect for benefit of helping.The glass of plated film or other materials is needed to be referred to as substrate, the material of plating is referred to as target.
In order to save floor occupying area and improve operating efficiency, substrate is transmitted into streamline and plating current inventor provides one kind
The production line that film streamline be arranged in parallel, then establish arc orbit and link together.But this connected mode, substrate transmission
Device needs to be flexible, and substrate transfer device is to bend in other words, but the substrate that conveyer typically transmits is general
For monoblock, such as glass, plastics so allow for justifying, it is necessary to substrate is smoothly sent in snout cavity by conveyer very much
The radian of arc track is very big, and such floor space will be enlarged by, and when conveyer is being run on arc orbit, substrate transmission
The stability of device is unreliable, and particularly when conveyer " turning ", substrate transfer device is very possible because crank,
Substrate transfer device falls down, and causes the situation of device damage and casualties.Therefore, the safe and reliable side of turning of substrate how is made
The problem of to 180 degree plated film being urgent need to resolve.
The content of the invention
In view of the above-mentioned problems existing in the prior art, it is an object of the invention to provide a kind of rotation of vacuum coating production line
Platform mechanism, the rotating platform mechanism are applied in vacuum coating production line, substrate is securely and reliably rapidly transported, saving accounts for
Ground area, improve operating efficiency.
For achieving the above object, the technical solution adopted by the present invention is as follows：
A kind of vacuum coating production line rotating platform mechanism, including：
One drive component, drive component include a motor, one first driving element and one second driving element, motor and
One driving element is connected, and the first driving element is connected with the second driving element；
One rotary components, rotary components are connected with drive component, and rotary components include a fixed mount and a rotating disk, rotation
Disk is connected with the second driving element, and motor is arranged on fixed mount；With
One limit assembly, limit assembly are fixed on rotary components, and limit assembly includes a rotary photoelectric inductor, a sense
Rod and at least one induced signal element are answered, induced signal element is connected with rotary photoelectric inductor, induced signal element and sense
Answer and sensed by optoelectronic distance between rod, induced signal element is arranged on fixed mount, rotary photoelectric inductor and inductive rod peace
Dress is on the rotating pan.
Preferably, vacuum coating production line rotating platform mechanism further comprises a controller, controller and rotation light
Electric inductor and motor connection.
It is highly preferred that the controller is preferably PLC.
Preferably, motor further comprises a rotary shaft, and the first driving element is set on the rotary shaft.
Preferably, the second driving element is set on the rotating pan, and the first driving element passes through gear with the second driving element
Engagement connects, and the rotary shaft on motor drives the motion of the first driving element, and the first driving element drives the motion of the second driving element.
It is highly preferred that the first driving element is a gear, the second driving element is single-revolution supporting, the first driving element with
Second driving element is engaged by gear.
Preferably, rotating platform mechanism further comprises substrate transfer assembly, and substrate transfer assembly is fixed on the rotating pan,
When rotating disc spins, substrate transfer assembly is driven to be moved in company with rotating disk.
It is highly preferred that substrate transfer assembly further comprises at least one retainer and a motor, retainer is with driving
Dynamic motor connection, motor driving retainer transmission, so drives the substrate motion on retainer.
Preferably, the diameter of the rotating disk of rotating platform mechanism is not less than substrate or the diameter of substrate frame.
Preferably, rotary photoelectric inductor is arranged on one end of rotating disk, passes through between inductive rod and induced signal element
Optoelectronic distance senses, and induced signal element surrounds the central distribution of rotating disk in fixed mount, the distributing position of induced signal element
It is consistent with the track of rotation disc spins with inductive rod.
It is highly preferred that when the distance between inductive rod and induced signal element are not more than 10mm, the transmitting of induced signal element
Signal gives rotary photoelectric inductor.
It is highly preferred that limit assembly further comprises at least one position guiding groove, position guiding groove surrounds the central distribution of rotating disk
On the rotating pan, the distributing position of position guiding groove is consistent with the track of rotation disc spins with inductive rod, and inductive rod is arranged on position guiding groove
It is interior.
Preferably, vacuum coating production line includes substrate transmission streamline and plated film streamline, and rotating platform mechanism is set
At the both ends of substrate transmission streamline and plated film streamline, substrate transmitting stream waterline and plated film streamline are connected.
Compared with prior art, a kind of vacuum coating production line rotating platform mechanism provided by the invention, passes through motor
Drive rotating disk to rotate, and be provided with limit assembly, the inductive rod of limit assembly is set on the rotating pan, and induced signal element leads to
The position for crossing inductive rod in sensing rotating disk passes to the startup of rotary photoelectric inductor automatic control type rotating disk, stops and reciprocal
Action, high-intelligentization, the rotating platform mechanism are particularly suitable for use in vacuum coating production line, make the safe and reliable side of turning of substrate
Enter plated film to 180 degree, prevent substrate from crank phenomenon occur, use manpower and material resources sparingly, reduce floor space, it is safe and reliable fast
Speed, therefore its application prospect is very wide.
Brief description of the drawings
Fig. 1 is a kind of main view of preferred embodiment of vacuum coating production line rotating platform mechanism provided by the invention
Figure；
Fig. 2 is a kind of vertical view of preferred embodiment of vacuum coating production line rotating platform mechanism provided by the invention
Figure；
Fig. 3 is a kind of side view of preferred embodiment of vacuum coating production line rotating platform mechanism provided by the invention
Figure.
Embodiment
The present invention is made further in detail, intactly to illustrate with reference to embodiment and accompanying drawing.
Fig. 1 to Fig. 3 is a kind of preferred embodiment of vacuum coating production line rotating platform mechanism provided by the invention.
As shown in Figure 1 to Figure 3, it is a kind of schematic diagram of preferred embodiment of vacuum coating production line rotating platform mechanism.The rotation
Platform mechanism is applied in vacuum coating production line, and rotating platform mechanism includes a drive component 10, a rotary components 20 and one
Limit assembly 30, drive component 10 are connected with rotary components 20, and limit assembly 30 is arranged on rotary components 20.
Drive component 10 further comprises one first driving element 11, one second driving element 12 and a motor 13, motor
13 are connected with the first driving element 11, and the first driving element 11 is connected with the second driving element 12.Motor 13 further comprises one
Rotary shaft 131, the first driving element 11 are arranged in rotary shaft 131.
Rotary components 20 are connected with drive component 10, and rotary components 20 further comprise a fixed mount 21 and a rotating disk
22, rotating disk 22 is connected with the second driving element 12, and motor 13 is arranged on fixed mount 21.The diameter of rotating disk 22 is not less than base
The diameter of piece.Second driving element 12 is arranged in rotating disk 22, and the first driving element 11 and the second driving element 12 pass through tooth
Wheel engagement connects, and the rotary shaft 131 on motor 13 drives the first driving element 11 to move, and the first driving element 11 drives second to drive
Dynamic element 12 moves.
First driving element 11 is preferably a gear, and the second driving element 12 is preferably single-revolution supporting, and the first driving is first
Part 11 is engaged with the second driving element 12 by gear.
Limit assembly 30 further comprises a rotary photoelectric inductor 31, an inductive rod 32 and at least one induced signal member
Part 33, rotary photoelectric inductor 31 are connected with inductive rod 32, and induced signal element 33 is arranged on fixed mount 21, rotary photoelectric sense
Device 31 and inductive rod 32 is answered to be arranged in rotating disk 22.Rotary photoelectric inductor 31 is arranged on one end of rotating disk 22, inductive rod
Sensed between 32 and induced signal element 33 by optoelectronic distance, induced signal element 33 exists around the central distribution of rotating disk 22
Fixed mount 21, the distributing position of induced signal element 33 are consistent with the track that inductive rod 32 rotates with rotating disk 22.It is preferred that sense
When the distance between rod 32 and induced signal element 33 are not more than 10mm, induced signal element 33 transmits signals to rotary photoelectric sense
Answer device 31.Preferably, 2 induced signal elements 33 are distributed on fixed mount 21 around the center of rotating disk 22 in 180 degree.
Limit assembly 30 further comprises at least one position guiding groove 34, and position guiding groove 34 exists around the central distribution of rotating disk 22
In rotating disk 22, the distributing position of position guiding groove 34 is consistent with the track that inductive rod 32 rotates with rotating disk 22, and inductive rod 32 is installed
In position guiding groove 34.Preferably, 2 position guiding grooves 34 are distributed in rotating disk 22 around the center of rotating disk 22 in 180 degree.
First driving element 11 is gear, and the second driving element 12 includes a drive gear 122, the first driving element 11 with
For second driving element 12 by gear drive, the gear diameter of the first driving element 11 is less than the gear diameter of drive gear 122,
So when the rotary shaft 131 of motor 13 drives the rotation of the first driving element 11, the first driving element 11 quickly rotates, and takes the to
The drive gear 122 of two driving elements 12 rotates.
Rotating platform mechanism further comprises substrate transfer assembly 40, and substrate transfer assembly 40 is fixed in rotating disk 22,
When rotating disk 22 rotates, substrate transfer assembly 40 is driven to move.Substrate transfer assembly 40 further comprises at least one transmission
The motor 42 of seat 41 and one, retainer 41 are connected with motor 42, and motor 42 drives retainer 41 to be driven, this belt transect
Substrate motion on dynamic retainer 41.
Vacuum coating production line rotating platform mechanism further comprises the (not shown) of a controller 50, controller 50
It is connected with rotary photoelectric inductor 31 and motor 13, controller 50 receives the signal control motor 13 of rotary photoelectric inductor 31
Motion.The controller 50 is preferably PLC.
Vacuum coating production line includes substrate transmission streamline and plated film streamline, and rotating platform mechanism is in substrate transmission
The both ends of streamline and plated film streamline, substrate is transmitted into the substrate on streamline and is transported in plated film streamline, simultaneously will
Plated in plated film streamline film substrate be transported to from plated film streamline substrate transmission streamline in unload subtegulum.Substrate is in base
In piece transmission streamline, it is initially mounted in substrate frame, substrate frame is moved on the retainer on delivery vehicle, is transported by delivery vehicle
Deliver on rotating platform mechanism, be conveyed through when the substrate drive component 40 of rotating platform mechanism receives on substrate transmission streamline
The substrate frame come, substrate frame are transported on the retainer 41 of substrate transfer assembly 41 in rotating disk 22, and motor 13 starts, motor 13
Rotary shaft 131 rotate, rotary shaft 131 drive the first driving element 11 rotate, the first driving element 11 and the second driving element
12 are engaged by gear, and the first driving element 11 drives the second driving element 12 to rotate, and rotation is fixed with the second driving element 12
Rotating disk 22, the second driving element 12 drive rotating disk 22 to rotate simultaneously, the substrate frame on the retainer 41 of such rotating disk 22 with
Rotating disk 22 to rotate；When rotating disk 22 rotates 180 degree, the substrate frame in rotating disk 22 have rotated 180 degree, substrate frame and plating
Film streamline is concordant, and the inductive rod 32 in rotating disk 22 have rotated 180 degree, between inductive rod 32 and induced signal element 33 away from
From less than 10mm, induced signal element 33 transmits signals to rotary photoelectric inductor 31, controller 50 and rotary photoelectric inductor
31 and motor 13 connect, the controlled motor 13 of controller 50 is stopped the rotation, and the rotary shaft 131 of such motor 13 is stopped the rotation, drive
The stop motion of the first driving element 11 in rotary shaft 131, the second driving element 12 engaged with the first driving element 11 stop
Motion, the stop motion of rotating disk 22 in the second driving element 12, while opened installed in motor 42 in rotating disk 22
Move, the retainer 41 of the driving substrate of motor 42 transfer assembly 40, the substrate frame movement on retainer 41, moved to substrate frame
When on to plated film streamline, motor 13 starts, and the rotary shaft 131 of motor 13 rotates, and rotary shaft 131 drives the first driving element 11
Rotate, the first driving element 11 is engaged with the second driving element 12 by gear, and the first driving element 11 drives the second driving member
Part 12 rotates, and fixed rotating disk 22 is simultaneously as the second driving element 12 rotates in the second driving element 12, when rotating disk 22
When have rotated 180 degree, inductive rod 32 in rotating disk 22 rotates 180 degree, between inductive rod 32 and induced signal element 33 away from
From less than 10mm, induced signal element 33 transmits signals to rotary photoelectric inductor 31, controller 50 and rotary photoelectric inductor
31 and motor 13 connect, controller 50 stops motor 13, and the rotary shaft 131 of such motor 13 is stopped the rotation, drive rotary shaft
The stop motion of the first driving element 11 on 131, the stop motion of the second driving element 12 engaged with the first driving element 11, peace
The stop motion of rotating disk 22, rotating disk 22 return to initial position in the second driving element 12, receive substrate transmitting stream again
The substrate frame transported on waterline.It is preferred that in rotating disk 22 retainer 41 be divided to for two row, when substrate transmission streamline on have substrate frame
When being sent to by a row retainer 41 in rotating disk 22, while the retainer 41 of another row will rotate through before in rotating disk 22
The substrate frame come is sent on plated film streamline, so shortens the residence time, improves transmission efficiency.It is preferred that rotating platform mechanism
The center being placed between substrate transmission streamline and plated film streamline, when rotating disk 22 rotates 180 degree, rotating disk 22
On remain the alignment substrate of a row retainer 41 transmit streamline, while another row retainer 41 alignment plated film streamline.
Finally be necessary described herein be：Above example is served only for further detailed to technical scheme work
Ground explanation, it is impossible to be interpreted as limiting the scope of the invention, those skilled in the art is according to the above of the invention
Some the nonessential modifications and adaptations made belong to protection scope of the present invention.
Claims (10)
- A kind of 1. vacuum coating production line rotating platform mechanism, it is characterised in that including：One drive component, the drive component include one first driving element, one second driving element and a motor, the motor It is connected with first driving element, first driving element is connected with second driving element；One rotary components, the rotary components are connected with the drive component, and the rotary components include a fixed mount and a rotation Rotating disk, the rotating disk are connected with second driving element, and the motor is arranged on the fixed mount；One limit assembly, the limit assembly are arranged on the rotary components, and the limit assembly includes a rotary photoelectric sense Device, an inductive rod and at least one induced signal element are answered, the induced signal element is connected with the rotary photoelectric inductor, Sensed between the induced signal element and the inductive rod by optoelectronic distance, the induced signal element is arranged on described solid Determine on frame, the rotary photoelectric inductor and the inductive rod are arranged in the rotating disk；WithOne substrate transfer assembly, the substrate transfer assembly are fixed in the rotating disk；One controller, controller and rotary photoelectric inductor and motor connection.
- 2. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The controller is PLC.
- 3. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The motor enters one Step includes a rotary shaft, and first driving element is arranged on first driving element in the rotary shaft and driven with described second Dynamic element is engaged by gear to be connected.
- 4. vacuum coating production line rotating platform mechanism according to claim 3, it is characterised in that：First driving Element is a gear, and second driving element supports for single-revolution, and first driving element passes through with the second driving element Gear engages.
- 5. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The rotary photoelectric Inductor is arranged on one end of the rotating disk, passes through optoelectronic distance sense between the inductive rod and the induced signal element Should.
- 6. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The limit assembly Further comprise at least one position guiding groove, the inductive rod is arranged in the position guiding groove.
- 7. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The substrate transmission Component further comprises at least one retainer and a motor, and the retainer is connected with the motor, the drive Dynamic motor drives the retainer transmission.
- 8. vacuum coating production line rotating platform mechanism according to claim 1, it is characterised in that：The vacuum coating Production line includes substrate transmission streamline and plated film streamline, and the rotating platform mechanism is arranged on the substrate transmission streamline With the both ends of the plated film streamline, the substrate transmission streamline and the plated film streamline are connected.
- 9. vacuum coating production line rotating platform mechanism according to claim 5, it is characterised in that：The induced signal Element surrounds the central distribution of the rotating disk on the fixed mount, distributing position and the sense of the induced signal element Answer rod consistent with the track of the rotation disc spins.
- 10. vacuum coating production line rotating platform mechanism according to claim 6, it is characterised in that：The position guiding groove Central distribution around the rotating disk is in the rotating disk, and the distributing position of the position guiding groove is with the inductive rod with described The track for rotating disc spins is consistent.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310688577.1A CN104711532B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
| CN201711349844.7A CN107964651A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310688577.1A CN104711532B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711349844.7A Division CN107964651A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN104711532A CN104711532A (en) | 2015-06-17 |
| CN104711532B true CN104711532B (en) | 2018-02-06 |
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| CN201711349844.7A Pending CN107964651A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
| CN201310688577.1A Active CN104711532B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
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| CN201711349844.7A Pending CN107964651A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line rotating platform mechanism |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109957767A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Transmission rotating device for double-sided glass plated film |
| CN109957778A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | Transmission rotating device for double-sided glass plated film |
| CN109957776A (en) * | 2017-12-14 | 2019-07-02 | 湘潭宏大真空技术股份有限公司 | TFT-LCD glass substrate double-sided coating production line |
| CN113086641B (en) * | 2021-03-16 | 2023-01-10 | 深圳市华星光电半导体显示技术有限公司 | Conveying device |
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|---|---|---|---|---|
| CN200981891Y (en) * | 2006-08-28 | 2007-11-28 | 深圳豪威真空光电子股份有限公司 | Substrate frame film coating device |
| JP2008291294A (en) * | 2007-05-23 | 2008-12-04 | Canon Anelva Corp | Vacuum deposition system |
| DE102008008320A1 (en) * | 2008-02-07 | 2009-08-20 | Von Ardenne Anlagentechnik Gmbh | Transport device for horizontal vacuum coating plant, comprises rotatably arranged transport rollers sequentially arranged in a horizontal plane and directed diagonally to transport direction, and a gas barrier element |
| CN102232043A (en) * | 2008-12-01 | 2011-11-02 | 格林策巴赫机械制造有限公司 | Method and device for reversing the feeding of sputter coating systems in clean rooms |
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| CN203700509U (en) * | 2013-12-16 | 2014-07-09 | 湘潭宏大真空技术股份有限公司 | Rotary platform mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104711532A (en) | 2015-06-17 |
| CN107964651A (en) | 2018-04-27 |
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