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CN104649667A - Temperature stable ultra-low dielectric constant microwave dielectric ceramic LiZn3WVO9 - Google Patents

Temperature stable ultra-low dielectric constant microwave dielectric ceramic LiZn3WVO9 Download PDF

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CN104649667A
CN104649667A CN201510066142.2A CN201510066142A CN104649667A CN 104649667 A CN104649667 A CN 104649667A CN 201510066142 A CN201510066142 A CN 201510066142A CN 104649667 A CN104649667 A CN 104649667A
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方亮
王丹
苏和平
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Guilin University of Technology
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Abstract

本发明公开了一种可低温烧结的温度稳定型超低介电常数微波介电陶瓷LiZn3WVO9及其制备方法。(1)将纯度为99.9%(重量百分比)以上的Li2CO3、ZnO、WO3和V2O5的原始粉末按LiZn3WVO9的组成称量配料;(2)将步骤(1)原料湿式球磨混合12小时,球磨介质为蒸馏水,烘干后在800℃大气气氛中预烧6小时;(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在850~900℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,聚乙烯醇的添加量占粉末总质量的3%。本发明制备的陶瓷在950℃以下烧结良好,介电常数达到8.3~8.9,其品质因数Qf值高达123000-158000GHz,谐振频率温度系数小,在工业上有着极大的应用价值。The invention discloses a temperature-stable ultra-low dielectric constant microwave dielectric ceramic LiZn 3 WVO 9 capable of low-temperature sintering and a preparation method thereof. (1) The original powder of Li 2 CO 3 , ZnO, WO 3 and V 2 O 5 with a purity of 99.9% (weight percent) or more is weighed and dosed according to the composition of LiZn 3 WVO 9 ; (2) The step (1) The raw materials were mixed by wet ball milling for 12 hours. The ball milling medium was distilled water. After drying, they were pre-fired in the atmosphere at 800°C for 6 hours; (3) After adding a binder to the powder prepared in step (2) and granulating, then pressing Molding, and finally sintering at 850-900°C for 4 hours in an air atmosphere; the binder uses a polyvinyl alcohol solution with a mass concentration of 5%, and the amount of polyvinyl alcohol added accounts for 3% of the total mass of the powder. The ceramic prepared by the invention is well sintered below 950 DEG C, the dielectric constant reaches 8.3-8.9, its quality factor Qf value is as high as 123000-158000 GHz, the temperature coefficient of resonance frequency is small, and it has great application value in industry.

Description

温度稳定型超低介电常数微波介电陶瓷LiZn3WVO9 Temperature stable ultra-low dielectric constant microwave dielectric ceramic LiZn3WVO9

技术领域 technical field

本发明涉及介电陶瓷材料,特别是涉及用于制造微波频率使用的陶瓷基板、谐振器与滤波器等微波元器件的介电陶瓷材料及其制备方法。 The invention relates to a dielectric ceramic material, in particular to a dielectric ceramic material for manufacturing microwave components such as ceramic substrates, resonators and filters used in microwave frequencies and a preparation method thereof.

背景技术 Background technique

微波介电陶瓷是指应用于微波频段(主要是UHF和SHF频段)电路中作为介质材料并完成一种或多种功能的陶瓷,在现代通讯中被广泛用作谐振器、滤波器、介质基片和介质导波回路等元器件,是现代通信技术的关键基础材料,已在便携式移动电话、汽车电话、无绳电话、电视卫星接受器和军事雷达等方面有着十分重要的应用,在现代通讯工具的小型化、集成化过程中正发挥着越来越大的作用。 Microwave dielectric ceramics refer to ceramics that are used as dielectric materials in circuits in the microwave frequency band (mainly UHF and SHF bands) and perform one or more functions. They are widely used as resonators, filters, and dielectric substrates in modern communications. Components such as chips and dielectric waveguide circuits are the key basic materials of modern communication technology. They have been used in portable mobile phones, car phones, cordless phones, TV satellite receivers and military radars. They are used in modern communication tools. It is playing an increasingly important role in the process of miniaturization and integration.

应用于微波频段的介电陶瓷,应满足如下介电特性的要求:(1)系列化介电常数εr以适应不同频率及不同应用场合的要求;(2)高的品质因数Q值或低的介电损耗tanδ以降低噪音,一般要求Qf≥3000 GHz;(3) 谐振频率的温度系数τƒ尽可能小以保证器件具有好的热稳定性,一般要求-10 ppm /℃≤τƒ≤+10 ppm/℃。国际上从20世纪30年代末就有人尝试将电介质材料应用于微波技术, 并制备出TiO2微波介质滤波器,但其谐振频率温度系数τƒ太大而无法实用化。上世纪70年代以来,开始了大规模的对介质陶瓷材料的开发工作, 根据相对介电常数εr的大小与使用频段的不同,通常可将已被开发和正在开发的微波介质陶瓷分为4类。 Dielectric ceramics used in the microwave frequency band should meet the following requirements for dielectric properties: (1) Serialized dielectric constant ε r to meet the requirements of different frequencies and different applications; (2) High quality factor Q value or low The dielectric loss tanδ to reduce noise, generally requires Qf≥3000 GHz; (3) The temperature coefficient τ ƒ of the resonant frequency should be as small as possible to ensure good thermal stability of the device, generally requiring -10 ppm /℃≤τ ƒ ≤ +10 ppm/°C. Internationally, since the late 1930s, some people have tried to apply dielectric materials to microwave technology, and prepared TiO 2 microwave dielectric filters, but the temperature coefficient τ ƒ of its resonant frequency is too large to be practical. Since the 1970s, a large-scale development of dielectric ceramic materials has begun. According to the relative permittivity ε r and the frequency band used, the microwave dielectric ceramics that have been developed and are being developed can usually be divided into 4 categories: kind.

(1)超低介电常数微波介电陶瓷,主要代表是Al2O3-TiO2、Y2BaCuO5、MgAl2O4和Mg2SiO4等,其εr≤20,品质因数Q×f≥50000GHz,τƒ≤10 ppm/°C。主要用于微波基板以及高端微波元器件。 (1) Ultra-low dielectric constant microwave dielectric ceramics, mainly represented by Al 2 O 3 -TiO 2 , Y 2 BaCuO 5 , MgAl 2 O 4 and Mg 2 SiO 4 , etc., whose ε r ≤ 20, quality factor Q× f≥50000GHz, τ ƒ ≤10 ppm/°C. Mainly used for microwave substrates and high-end microwave components.

(2)低εr和高Q值的微波介电陶瓷,主要是BaO-MgO-Ta2O5, BaO-ZnO-Ta2O5或BaO-MgO-Nb2O5, BaO-ZnO-Nb2O5系统或它们之间的复合系统MWDC材料。其εr=20~35, Q=(1~2)×104(在f≥10 GHz下), τƒ≈0。主要应用于f≥8 GHz的卫星直播等微波通信机中作为介质谐振器件。 (2) Microwave dielectric ceramics with low ε r and high Q value, mainly BaO-MgO-Ta 2 O 5 , BaO-ZnO-Ta 2 O 5 or BaO-MgO-Nb 2 O 5 , BaO-ZnO-Nb 2 O 5 system or composite system MWDC materials between them. Its ε r =20~35, Q=(1~2)×10 4 (at f≥10 GHz), τ ƒ ≈0. It is mainly used as a dielectric resonator device in microwave communication devices such as satellite broadcasting with f≥8 GHz.

(3)中等εr和Q值的微波介电陶瓷,主要是以BaTi4O9、Ba2Ti9O20和(Zr、Sn)TiO4等为基的MWDC材料,其εr=35~45,Q=(6~9)×103(在f=3~-4GHz下),τƒ≤5 ppm/°C。主要用于4~8 GHz 频率范围内的微波军用雷达及通信系统中作为介质谐振器件。 (3) Microwave dielectric ceramics with medium ε r and Q value, mainly MWDC materials based on BaTi 4 O 9 , Ba 2 Ti 9 O 20 and (Zr, Sn) TiO 4 , whose ε r = 35~ 45, Q=(6~9)×10 3 (at f=3~-4GHz), τ ƒ ≤5 ppm/°C. It is mainly used as a dielectric resonant device in microwave military radar and communication systems in the frequency range of 4-8 GHz.

(4)高εr而Q值较低的微波介电陶瓷,主要用于0.8~4GHz 频率范围内民用移动通讯系统,这也是微波介电陶瓷研究的重点。80年代以来,Kolar、Kato等人相继发现并研究了类钙钛矿钨青铜型BaO—Ln2O3—TiO2系列(Ln=La、 Sm、 Nd或Pr等,简称BLT系)、复合钙钛矿结构CaO—Li2O—Ln2O3—TiO2系列、铅基系列材料、Ca1-xLn2x/3TiO3系等高εr微波介电陶瓷,其中BLT体系的BaO—Nd2O3—TiO2材料介电常数达到90,铅基系列 (Pb,Ca)ZrO3介电常数达到105。 (4) Microwave dielectric ceramics with high ε r and low Q value are mainly used in civil mobile communication systems in the frequency range of 0.8-4GHz, which is also the focus of research on microwave dielectric ceramics. Since the 1980s, Kolar, Kato and others have successively discovered and studied perovskite-like tungsten bronze BaO—Ln 2 O 3 —TiO 2 series (Ln=La, Sm, Nd or Pr, etc., referred to as BLT series), composite calcium Titanite structure CaO—Li 2 O—Ln 2 O 3 —TiO 2 series, lead-based series materials, Ca 1-x Ln 2x/3 TiO 3 series and other high ε r microwave dielectric ceramics, among which BaO—Nd of BLT system The dielectric constant of 2 O 3 —TiO 2 materials reaches 90, and the dielectric constant of lead-based series (Pb, Ca)ZrO 3 reaches 105.

以上这些材料体系的烧结温度一般高于1300°C,不能直接与Ag和Cu 等低熔点金属共烧形成多层陶瓷电容器。近年来,随着低温共烧陶瓷技术(Low Temperature Co-fired Ceramics, LTCC)的发展和微波多层器件发展的要求,国内外的研究人员对一些低烧体系材料进行了广泛的探索和研究,主要是采用微晶玻璃或玻璃-陶瓷复合材料体系,因低熔点玻璃相具有相对较高的介质损耗,玻璃相的存在大大提高了材料的介质损耗。因此研制无玻璃相的低烧微波介质陶瓷材料是当前研究的重点。 The sintering temperature of the above material systems is generally higher than 1300°C, and cannot be directly co-fired with low melting point metals such as Ag and Cu to form multilayer ceramic capacitors. In recent years, with the low temperature co-fired ceramic technology (Low Temperature Co-fired Due to the development of Ceramics, LTCC) and the development of microwave multilayer devices, researchers at home and abroad have conducted extensive exploration and research on some low-fire system materials, mainly using glass-ceramic or glass-ceramic composite material systems, due to low melting point The glass phase has a relatively high dielectric loss, and the existence of the glass phase greatly increases the dielectric loss of the material. Therefore, the development of low-fired microwave dielectric ceramic materials without glass phase is the focus of current research.

在探索与开发新型可低烧微波介电陶瓷材料的过程中,固有烧结温度低的Li基化合物、Bi基化合物、钨酸盐体系化合物和碲酸盐体系化合物等材料体系得到了广泛关注与研究,但是由于微波介电陶瓷的三个性能指标(εr与Q·f 和τƒ)之间是相互制约的关系(见文献:微波介质陶瓷材料介电性能间的制约关系,朱建华,梁 飞,汪小红,吕文中, 电子元件与材料,2005年3月第3期),满足三个性能要求且可低温烧结的单相微波介质陶瓷非常少,主要是它们的谐振频率温度系数通常过大或者品质因数偏低而无法实际应用要求。目前对微波介质陶瓷的研究大部分是通过大量实验而得出的经验总结,却没有完整的理论来阐述微观结构与介电性能的关系,因此,在理论上还无法从化合物的组成与结构上预测其谐振频率温度系数和品质因数等微波介电性能,这在很大程度上限制了低温共烧技术及微波多层器件的发展。探索与开发既能低温烧结同时具有近零谐振频率温度系数(-10 ppm /℃≤τƒ≤+10 ppm/℃)与较高品质因数的微波介电陶瓷是本领域技术人员一直渴望解决但始终难以获得成功的难题。 In the process of exploring and developing new low-firing microwave dielectric ceramic materials, material systems such as Li-based compounds, Bi-based compounds, tungstate compounds and tellurate-based compounds with inherently low sintering temperatures have received extensive attention and research. However, since the three performance indicators of microwave dielectric ceramics (ε r and Q f and τ ƒ ) are mutually restrictive (see literature: The restrictive relationship between the dielectric properties of microwave dielectric ceramic materials, Zhu Jianhua, Liang Fei, Wang Xiaohong, Lu Wenzhong, Electronic Components and Materials, Issue 3, March 2005), there are very few single-phase microwave dielectric ceramics that meet the three performance requirements and can be sintered at low temperature, mainly because their resonant frequency temperature coefficient is usually too large or their quality Due to the low factor, it is impossible to apply the requirements in practice. At present, most of the research on microwave dielectric ceramics is a summary of experience obtained through a large number of experiments, but there is no complete theory to explain the relationship between microstructure and dielectric properties. Prediction of microwave dielectric properties such as temperature coefficient of resonant frequency and quality factor limits the development of low-temperature co-firing technology and microwave multilayer devices to a large extent. Exploring and developing microwave dielectric ceramics that can be sintered at low temperature and have a near-zero resonant frequency temperature coefficient (-10 ppm/°C≤τ ƒ ≤+10 ppm/°C) and a high quality factor is something that those skilled in the art have been eager to solve. Always difficult to get the puzzle of success.

我们对组成LiZn3WVO9、LiZn3WNbO9、LiCu3WNbO9的系列化合物进行了微波介电性能的研究,发现它们的烧结温度低于1000℃,但只有LiZn3WVO9具有近零谐振频率温度系数与高品质因数,LiZn3WNbO9陶瓷的谐振频率温度系数τƒ偏大(分别为-49 ppm/℃)并且介电损耗也较高而无法作为可实用化的微波介质陶瓷。LiCu3WNbO9为离子导体在微波频段没有谐振峰。 We have studied the microwave dielectric properties of a series of compounds composed of LiZn 3 WVO 9 , LiZn 3 WNbO 9 , and LiCu 3 WNbO 9 , and found that their sintering temperature is lower than 1000°C, but only LiZn 3 WVO 9 has a near-zero resonance frequency Temperature coefficient and high quality factor, the resonant frequency temperature coefficient τ ƒ of LiZn 3 WNbO 9 ceramics is too large (-49 ppm/℃ respectively) and the dielectric loss is also high, so it cannot be used as a practical microwave dielectric ceramic. LiCu 3 WNbO 9 is an ion conductor and has no resonance peak in the microwave frequency range.

发明内容 Contents of the invention

本发明的目的是提供一种具有良好的热稳定性与低损耗,同时可低温烧结的超低介电常数微波介电陶瓷材料及其制备方法。 The purpose of the present invention is to provide an ultra-low dielectric constant microwave dielectric ceramic material with good thermal stability and low loss, which can be sintered at low temperature and a preparation method thereof.

本发明的微波介电陶瓷材料的化学组成为LiZn3WVO9The chemical composition of the microwave dielectric ceramic material of the present invention is LiZn 3 WVO 9 .

本微波介电陶瓷材料的制备方法步骤为: The preparation method steps of this microwave dielectric ceramic material are:

(1)将纯度为99.9%(重量百分比)以上的Li2CO3、ZnO、WO3和V2O5的原始粉末按LiZn3WVO9的组成称量配料。 (1) The raw powders of Li 2 CO 3 , ZnO, WO 3 and V 2 O 5 with a purity of more than 99.9% (weight percent) were weighed and dosed according to the composition of LiZn 3 WVO 9 .

(2)将步骤(1)原料湿式球磨混合12小时,球磨介质为蒸馏水,烘干后在800℃大气气氛中预烧6小时。 (2) Mix the raw materials in step (1) by wet ball milling for 12 hours. The ball milling medium is distilled water. After drying, pre-fire in an atmosphere at 800°C for 6 hours.

(3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在850~900℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,聚乙烯醇添加量占粉末总质量的3%。 (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 850-900°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the amount of polyvinyl alcohol added accounts for 3% of the total mass of the powder.

本发明的优点:LiZn3WVO9陶瓷烧结温度低,原料成本低;介电常数达到8.3~8.9,其谐振频率的温度系数τƒ小,温度稳定性好;品质因数Qf值高达123000-158000GHz,可广泛用于各种介质基板、谐振器和滤波器等微波器件的制造,可满足低温共烧技术及微波多层器件的技术需要。 Advantages of the present invention: LiZn 3 WVO 9 ceramics have low sintering temperature and low raw material cost; the dielectric constant reaches 8.3-8.9, the temperature coefficient τ of its resonance frequency is small, and the temperature stability is good; the quality factor Qf value is as high as 123000-158000GHz, It can be widely used in the manufacture of microwave devices such as various dielectric substrates, resonators and filters, and can meet the technical needs of low-temperature co-firing technology and microwave multilayer devices.

具体实施方式 Detailed ways

实施例: Example:

表1示出了构成本发明的不同烧结温度的3个具体实施例及其微波介电性能。其制备方法如上所述,用圆柱介质谐振器法进行微波介电性能的评价。 Table 1 shows three specific examples of different sintering temperatures constituting the present invention and their microwave dielectric properties. The preparation method is as above, and the microwave dielectric performance is evaluated by the cylindrical dielectric resonator method.

本陶瓷可广泛用于各种介质基板、谐振器和滤波器等微波器件的制造,可满足移动通信和卫星通信等系统的技术需要。 The ceramics can be widely used in the manufacture of microwave devices such as various dielectric substrates, resonators and filters, and can meet the technical needs of mobile communication and satellite communication systems.

表1: Table 1:

Claims (1)

1.一种温度稳定型超低介电常数微波介电陶瓷,其特征在于所述微波介电陶瓷的化学组成为:LiZn3WVO91. A temperature-stable ultra-low dielectric constant microwave dielectric ceramic, characterized in that the chemical composition of the microwave dielectric ceramic is: LiZn 3 WVO 9 ; 所述微波介电陶瓷的制备方法具体步骤为: The specific steps of the preparation method of the microwave dielectric ceramic are: (1)将纯度为99.9%(重量百分比)以上的Li2CO3、ZnO、WO3和V2O5的原始粉末按LiZn3WVO9的组成称量配料; (1) The raw powders of Li 2 CO 3 , ZnO, WO 3 and V 2 O 5 with a purity of more than 99.9% (weight percent) are weighed according to the composition of LiZn 3 WVO 9 ; (2)将步骤(1)原料湿式球磨混合12小时,球磨介质为蒸馏水,烘干后在800℃大气气氛中预烧6小时; (2) Mix the raw materials in step (1) by wet ball milling for 12 hours. The ball milling medium is distilled water. After drying, pre-fire in the atmosphere at 800°C for 6 hours; (3)在步骤(2)制得的粉末中添加粘结剂并造粒后,再压制成型,最后在850~900℃大气气氛中烧结4小时;所述的粘结剂采用质量浓度为5%的聚乙烯醇溶液,聚乙烯醇添加量占粉末总质量的3%。 (3) Add a binder to the powder prepared in step (2) and granulate it, then press it into shape, and finally sinter it in the air atmosphere at 850-900°C for 4 hours; the binder is used at a mass concentration of 5 % polyvinyl alcohol solution, the amount of polyvinyl alcohol added accounts for 3% of the total mass of the powder.
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CN103159476A (en) * 2013-04-01 2013-06-19 桂林理工大学 Low-temperature sinterable microwave dielectric ceramic LiWVO6 and its preparation method
CN103553612A (en) * 2013-11-11 2014-02-05 桂林理工大学 Low-temperature sinterable microwave dielectric ceramic Ba6W2V2O17 and its preparation method
CN104003720A (en) * 2014-05-17 2014-08-27 桂林理工大学 Low-temperature sinterable microwave dielectric ceramic Li2Zn2W2O9 and its preparation method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111943670A (en) * 2020-06-30 2020-11-17 杭州电子科技大学 LiWVO6-K2MoO4Base composite ceramic microwave material and preparation method thereof
CN111943670B (en) * 2020-06-30 2023-06-06 杭州电子科技大学 LiWVO6-K2MoO4 based composite ceramic microwave material and its preparation method

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