CN104647374A - Multi-degree-of-freedom mechanical hand for transferring flexible film - Google Patents
Multi-degree-of-freedom mechanical hand for transferring flexible film Download PDFInfo
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- CN104647374A CN104647374A CN201510071778.6A CN201510071778A CN104647374A CN 104647374 A CN104647374 A CN 104647374A CN 201510071778 A CN201510071778 A CN 201510071778A CN 104647374 A CN104647374 A CN 104647374A
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Abstract
本发明公开了一种用于柔性膜转移的多自由度机械手，包括拾取单元、α转动模块、γ转动模块、XYZ三轴平移模块、气路分配单元和视觉定位单元，其中拾取单元具备绕Y轴转动的β转动自由度，并可在轴向和周向上对吸附区域进行调整；α、γ转动模块和XYZ三轴平移模块则分别用于实现机械手绕X轴和Z轴转动的α和γ转动自由度以及XYZ三个方向的平动自由度；气路分配单元执行拾取单元内部各个真空气路的开关控制和真空度检测；视觉定位单元用于实现柔性膜在XY平面内的位置和角度检测以及Z轴方向上的位置检测。通过本发明，可根据柔性膜的特征、尺寸和位置自主调整机械手的空间姿态、转移力和吸附区间，实现对柔性膜的高精度吸取和转移。
The invention discloses a multi-degree-of-freedom manipulator for flexible film transfer, which includes a pick-up unit, an α-rotation module, a γ-rotation module, an XYZ three-axis translation module, an air distribution unit and a visual positioning unit, wherein the pick-up unit has The β rotation degree of freedom of shaft rotation, and the adsorption area can be adjusted in the axial and circumferential directions; the α, γ rotation module and the XYZ three-axis translation module are used to realize the α and γ rotation of the manipulator around the X axis and Z axis, respectively. Rotational degrees of freedom and translational degrees of freedom in the three directions of XYZ; the air circuit distribution unit performs the switch control and vacuum degree detection of each vacuum air circuit inside the pickup unit; the visual positioning unit is used to realize the position and angle of the flexible film in the XY plane detection and position detection in the Z-axis direction. Through the present invention, the spatial posture, transfer force and adsorption range of the manipulator can be adjusted autonomously according to the characteristics, size and position of the flexible film, so as to realize high-precision suction and transfer of the flexible film.
Description
Technical field
The invention belongs to flexible electronic and produce relevant device field, more specifically, relate to a kind of Multi-freedom-degreemanipulator manipulator for flexible membrane transfer.
Background technology
Raising along with industrial automation technology and the requirement to production efficiency, adopt industrial robot to carry out processing in industrial production more and more, and manipulator is widely used in the fields such as industrial production manufacture, medical treatment, military affairs as the industrial robot occurred the earliest.Flexible membrane is a kind of comparatively common processing object in industrial production, usually need to perform the transfer operation such as pickup, placement to it, and the precision of transfer operation directly has influence on the crudy of final products in operation.But, for the flexible substrate film in a lot of flexible membrane such as solar cell, RFID electronic intelligent label and fexible film switch etc., they possess from heavy and light, the feature such as yielding, in transfer process pickup and the inaccurate problem of placement location more outstanding, the difficulty that the easy increase later stage carries out the techniques such as laminated and paster, causes the problems such as end product quality is poor, productivity ratio is low; Particularly, these flexible membranes generally carry chip or printed circuit, in flexible membrane transfer process, if the contact force in not attention mobility process suffered by flexible membrane, then the power that likely comes in contact is excessive and cause the serious problems such as flexible membrane breakage.
The equipment that some adopt robotic manipulation flexible membrane has been proposed in prior art.Such as, CN200980104088 discloses a kind of robot hand for substrate transportation, its by be provided with at manipulator that substrate lower surface peripheral part takes a seat on the surface first take a seat and take a seat for its lower surface when face and substrate bend with recess downwards second to take a seat face, realize the bracket of substrate and fixing thus; But this manipulator is more suitable for rigid substrate, and be only prevent substrate from producing excessive distortion by fixing staircase structural model and inclined-plane.In addition, CN20121012316.7 discloses a kind of sheet vacuum pick and place device, and the position adjustments that can realize on XYZ tri-directions and the angular adjustment in Z-direction; But the accommodation that this pick device cannot carry out initiatively according to the size of pickup object equally, and need further to be improved in the adjustment free degree of position and attitude and control accuracy etc.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of Multi-freedom-degreemanipulator manipulator for flexible membrane transfer, wherein by structure and the packaging technology feature thereof of set flexible membrane self, and to its key component as pickup unit, α rotating module, concrete structure and the relation that mutually arranges thereof of γ rotating module etc. carry out studying and designing, and matching used gas circuit allocation units and vision positioning unit are improved, mutually should be able to high accuracy, the mode being convenient to manipulate realizes the pose adjustment of manipulator up to six-freedom degree, particularly also can realize the accurate detection and control to contact force in the adsorption area of pickup unit and flexible membrane transfer process, thus solar cell flexible substrate film is particularly useful for, the transfer occasion of RFID label tag and fexible film switch and so on flexible electronic components and parts.
For achieving the above object, according to the present invention, provide a kind of Multi-freedom-degreemanipulator manipulator for flexible membrane transfer, it is characterized in that, this Multi-freedom-degreemanipulator manipulator comprises pickup unit, α rotating module, γ rotating module, XYZ tri-axle translation module and gas circuit allocation units, wherein:
Described pickup unit is rotationally connected seat by alpha-beta and hangs the below being arranged on described α rotating module, and can realize β direction also namely around the free degree that Y-axis is rotated, it comprises pick-up head cavity, right plate, left plate, β rotary electric machine, screw mandrel Timing Belt assembly, regulates dividing plate and vacuum gas-tpe fitting, wherein this pick-up head cavity is in the hollow roller structure vertically placed, and in its circular arc external surface, be axially processed with the vacuum absorption holes of array arrangement with circumferential direction, this left and right side plate is the circular ring structure supporting both sides being arranged on described pick-up head cavity respectively, for realizing sealing to pick-up head inside cavity, and their inwall offers respectively the T-slot of multiple radially directional spreding and multiple trapezoidal thread hole run through along thickness direction, this β rotary electric machine is arranged on the center of inside of described pick-up head cavity, and is that pick-up head cavity is provided in the driving force that β direction is rotated by shaft coupling, this screw mandrel Timing Belt component integration is arranged on described pick-up head cavity side, and the multiple trapezoidal screws comprised along the distribution of pick-up head cavity wall circumference, the synchronous pulley that quantity is equal and supporting Timing Belt, wherein synchronous pulley is arranged on corresponding trapezoidal screw respectively, all synchronous pulleys couple together by synchronous pulley, and the two ends of each trapezoidal screw are arranged on a described left side respectively by described trapezoidal thread hole, on right plate, in this way, by rotating trapezoidal screw, a left side can be made, right plate performs relative movement along pick-up head cavity, and then in the axial direction the active section adsorption area of pick-up head chamber outer surface is regulated, the platy structure of the T-shaped cross section of this adjustment dividing plate, and respectively by described left and right side plate radially the described T-slot of directional spreding be arranged on the inside of pick-up head cavity, thus by regulating the layout of dividing plate to these, and then in circumferential direction the active section adsorption area of pick-up head chamber outer surface is regulated, this vacuum gas-tpe fitting is connected with the vacuum air-channel being arranged on described pick-up head cavity side, and for realizing being communicated with between pick-up head inside cavity with described gas circuit allocation units,
Described α rotating module is rotationally connected by α-γ the below that seat is arranged on described γ rotating module, and for realizing described pickup unit in α direction also namely around the free degree that X-axis is rotated;
Described γ rotating module by γ rotate mount pad continue the one end being arranged on described XYZ tri-axle translation module, and for realize described α rotating module and hang on it described pickup unit in γ direction also namely around Z axis rotate the free degree;
Described XYZ tri-axle translation module is assembled jointly by X-axis translation module, Y-axis translation module and Z axis translation module, and for realizing described γ rotating module, α rotating module and the pickup unit translation freedoms on XYZ tri-direction of principal axis;
Described gas circuit allocation units are arranged on described α rotating module, and for realizing the switch control rule of the vacuum air-channel to described pick-up head inside cavity.
As further preferably, above-mentioned Multi-freedom-degreemanipulator manipulator also comprises vision positioning unit, this vision positioning unit comprises ccd sensor, laser displacement sensor and sensor stand, wherein sensor stand rotates mount pad with described γ be fixedly connected in the rod-like structure of stretching out downwards, described ccd sensor is installed in its side, and determines the position of flexible membrane on XY direction of principal axis and the rotational angle around Z axis by the pattern characteristics detected on the edge of flexible membrane or flexible membrane; Described laser displacement sensor is then installed in its other side, and determines that flexible membrane is relative to described pick-up head cavity position in the Z-axis direction by laser ranging.
As further preferably, described pickup unit also comprises pressure sensor and gravity sensor group, and wherein this pressure sensor is arranged on described shaft coupling by projecting shaft, and for detecting the contact force size in flexible membrane pick process; This gravity sensor group is made up of jointly two cover gravity sensors of square crossing, and they are arranged on the side of described pick-up head cavity, and detect for the angle of rotating around X-axis and Y-axis pick-up head cavity.
As further preferably, for described α rotating module, it preferably includes α rotary electric machine, key and α rotational support seat, and wherein α rotary electric machine is arranged on the lower end that described α-γ is rotationally connected seat, for the driving force providing described pickup unit to rotate in α direction; α rotational support seat is distributed in the horizontal both sides of described α rotary electric machine, and is realized and the connecting of described α rotary electric machine by described key.
As further preferably, for described γ rotating module, it preferably includes γ rotary electric machine, and this γ rotary electric machine is directly installed on described γ and rotates on mount pad, for the driving force providing described α rotating module and pickup unit to rotate in γ direction.
As further preferably, for described gas circuit allocation units, it preferably includes packaging type magnetic valve and air pressure sensor, and wherein this packaging type magnetic valve is made up of jointly multiple magnetic valve, for controlling the Switch Controller of described each vacuum air-channel of pick-up head inside cavity; The quantity of this air pressure sensor is identical with described magnetic valve, and for detecting the vacuum size correspondence of described each vacuum air-channel of pick-up head inside cavity.
As further preferably, described flexible membrane is preferably solar cell flexible substrate film, RFID label tag or fexible film switch.
In general, the above technical scheme conceived by the present invention compared with prior art, mainly possesses following technological merit:
1, by designing according to the unitary construction of manipulator of the present invention and layout spatially thereof, the rotational freedom on the translational degree of freedom in manipulator XYZ tri-directions and α β γ tri-directions can be realized with compact conformation, the mode of being convenient to manipulate, the pick-up head cavity space pose adjustment that corresponding acquisition is wider, and then obtain flexible membrane pickup more accurately and positioning action;
2, by taking cavity, left side plate, adjustment dividing plate and screw mandrel Timing Belt assembly to cooperatively interact assembling to the pickup unit as key component, not only can utilize the spacing between screw mandrel Timing Belt assembly even regulation two side plates, and then change the adsorption area of pick-up head cavity work exterior surface area in the axial direction, but also by being arranged on the adjustment dividing plate on side plate equally, also the adsorption area of pick-up head cavity work outer surface is regulated in circumferential direction; Whole pickup unit can cooperatively interact in the two directions and carry out rea adjusting thus, more adequately adapts to the flexible membrane of different size thus, and significantly improves the precision of pick-up operation;
3, by being equipped with pressure sensor and gravity sensor group for pickup unit, can the phenomenons such as Real-time Feedback the flexible membrane preventing contact force excessive and cause be damaged, and the angle of pickup unit around X, Y-axis rotation can be finely tuned further, contribute to more determining to precision the spatial attitude of pick-up head cavity and the position of absorption active section; In addition, by improving the set-up mode of the sensor parts, can guarantee not have a negative impact to flexible membrane transfer, being convenient to compactedness and the operation Discussing Convenience of keeping system simultaneously;
4, by setting up ccd sensor and laser displacement sensor, the position in flexible membrane XYZ tri-directions can accurately be determined; On this basis by follow-up attitude regulation, the corresponding active section of pick device that can further improve adsorbs with accurately aliging between flexible membrane;
5, by the internal structure of gas circuit distributor and and each vacuum air-channel of pick-up head inside cavity between connected mode improve, can control the vacuum state of pick-up head inside cavity more flexibly, easily, and guarantee to provide satisfactory highly sensitive vacuum.
Accompanying drawing explanation
Fig. 1 is the agent structure schematic diagram according to the Multi-freedom-degreemanipulator manipulator constructed by the preferred embodiment of the present invention;
Fig. 2 a and Fig. 2 b observes obtained structural representation from right side and left side to pickup unit shown in Fig. 1;
Fig. 3 is the structural blast schematic diagram of pickup unit shown in Fig. 1;
Fig. 4 is the structure left view of pickup unit shown in Fig. 1;
Fig. 5 is the structure sectional view that pickup unit shown in Fig. 4 obtains along A-A line;
Fig. 6 a and 6b is the schematic diagram before and after the structure of the internal partition of pickup unit shown in Fig. 1 and active section area change respectively;
Fig. 7 is the half structure sectional view of the cavity of pick-up head shown in Fig. 5;
Fig. 8 is the structural representation of right plate shown in Fig. 2 b;
Fig. 9 is the structural representation of left plate shown in Fig. 2 a;
Figure 10 is the structural representation of shelf shown in Fig. 2;
Figure 11 is the overall structure schematic diagram of the rotating module of α shown in Fig. 1, γ rotating module, gas circuit distributor and vision positioning device;
Figure 12 is the composition structural representation of the distributor of gas circuit shown in Fig. 1;
Figure 13 is the gas circuit control of the distributor of gas circuit shown in Figure 12 and the schematic diagram of distribution principle figure;
Figure 14 a, 14b and 14c are the process schematic according to the manipulator absorption pickup flexible membrane constructed by the preferred embodiment of the present invention respectively.
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Fig. 1 is the agent structure schematic diagram according to the Multi-freedom-degreemanipulator manipulator constructed by the preferred embodiment of the present invention.As shown in fig. 1, this Multi-freedom-degreemanipulator manipulator mainly comprises pickup unit 1, α rotating module 2, γ rotating module 3, XYZ tri-axle translation module 4, gas circuit distributor 5 etc., and can be equipped with assembly such as vision positioning device 6 grade further.Wherein pickup unit 1 is arranged on the below of α rotating module 2, to rotate also the rotational freedom in i.e. β direction for realizing pick device 1 around Y-axis, provides vacuum suction different size flexible membrane simultaneously and detects the function of contact force suffered by feedback flexible membrane; α rotating module 2 is for example rotationally connected by horizontally disposed α-γ the below that seat 21 is arranged on γ rotating module 3, to rotate the rotational freedom in also i.e. α direction for realizing manipulator around X-axis; γ rotating module 3 for example rotates one end that mount pad 31 is arranged on XYZ tri-axle translation module 4, for realizing the γ rotational freedom that manipulator rotates around Z axis by the γ in drawer-like; XYZ tri-axle translation module 4 is rotated mount pad 31 with γ and is connected, for realizing the translational degree of freedom of manipulator along XYZ tri-directions; Gas circuit distributor 5 is arranged on α rotating module 2, for realizing the switch control rule to pick-up head cavity 10 each vacuum air-channel inner, and can provide the function of vacuum degree measurement; Vision positioning device 6 is arranged on γ and rotates mount pad 31, and detects by ccd sensor 61 and laser displacement sensor 62 position determining flexible membrane XYZ tri-directions.
Below with reference to Fig. 2 to Figure 12, each assembly above-mentioned is illustrated one by one.
First with reference to figure 2-5, the agent structure according to the pickup unit 1 constructed by the preferred embodiment of the present invention is shown.This pickup unit is as one of key improvements, comprise pick-up head cavity 10, right plate 11, left plate 12, β rotary electric machine 13, screw mandrel Timing Belt assembly 14, regulate dividing plate 15 and vacuum gas-tpe fitting 16 etc., wherein this pick-up head cavity 10 is for example in the hollow roller structure vertically placed, and in its circular arc external surface, the vacuum absorption holes 10b of array arrangement is axially processed with circumferential direction, its side (being shown as right flank in figure) is processed with vacuum way 10a, and its inner annular chamber is then as vacuum room and installation β rotary electric machine 13; This left plate 12 and right plate 11 are respectively in circular ring structure, they are the supporting left and right sides being arranged on pick-up head cavity 10 respectively, for realizing sealing to pick-up head inside cavity, can move axially along the barrel of pick-up head cavity 10 simultaneously, their inwall also offer respectively T-slot 12b, the 11b of multiple radially directional spreding and multiple along trapezoidal thread hole 12a, 11a that thickness direction runs through; This β rotary electric machine 13 is for example fixedly mounted on the center of inside of pick-up head cavity 10 by screw, and is that pick-up head cavity 10 is provided in the driving force that β direction is rotated by shaft coupling 17; This screw mandrel Timing Belt assembly 14 integral installation is in pick-up head cavity 10 side, its role is to make right plate 11 and left plate 12 to carry out move toward one another, realize adjusting vertically pick-up head cavity 10 to work the function of adsorption area of outer surface, and control the width of absorption active section.Regulate the platy structure of dividing plate 15 T-shaped cross section in the preferred embodiment, the side of also i.e. plane tabular structure be also processed with a rectangular block perpendicular with it or be referred to as T-shaped characteristic 15a, correspondingly, T-slot 12b, 11b that left plate and right plate are offered are mutually chimeric with the T-shaped characteristic 15a of adjustment dividing plate 15, are arranged on left side plate thus by multiple adjustment dividing plate 15; In this way, by regulating the layout of dividing plate in pick-up head cavity 10 inside to these, can regulate the active section adsorption area of pick-up head chamber outer surface in circumferential direction, and then control the length of absorption active section; As shown in Fig. 6 a and Fig. 6 b, the adsorption area size of pick-up head chamber outer surface can at the enterprising Row sum-equal matrix of axial and circumferential both direction, and the gross area of active section W is changed, adapt to the flexible membrane of different size thus more neatly, and then improve pickup precision.In addition, vacuum gas-tpe fitting 16 for example can be fixedly installed in the vacuum way 11a of pick-up head cavity 10 right flank, realizes being communicated with between pick-up head cavity 10 with gas circuit allocation units 5 thus.
According to a preferred embodiment of the present invention, above-mentioned pickup unit also can be equipped with pressure sensor 18 and gravity sensor group 19.As shown in the figure, pressure sensor 18 is connected with pick device 1, for detecting the size of contact force in flexible membrane pick process by shaft coupling 17; Gravity sensor group is made up of two cover gravity sensor square crossings, is arranged on the right flank of pick-up head cavity, for detecting and feeding back the angle of pick device around X-axis, Y-axis rotation, for determining the spatial attitude of pick device and adsorbing the position of active section.
According to another preferred embodiment of the present invention, see Fig. 2-Fig. 5, comprise trapezoidal screw 14a, synchronous pulley 14b, Timing Belt 14c and knob 14d according to the custom-designed screw mandrel Timing Belt assembly 14 of the present invention, wherein synchronous pulley 14b is arranged on corresponding trapezoidal screw 14a; Several synchronous pulleys 14b couples together by Timing Belt 14c, realizes being synchronized with the movement; And the two ends of each trapezoidal screw are mounted thereto by the trapezoidal thread hole that the hand of spiral that left side plate is offered is contrary respectively; In addition, knob 14d is arranged on one of them trapezoidal screw 14a, such as by manually rotating trapezoidal screw.In this way, by rotating trapezoidal screw, left and right side plate can be made to perform relative movement along pick-up head cavity, and then in the axial direction the active section adsorption area of pick-up head chamber outer surface is regulated.
With reference to Fig. 8, show the agent structure according to the right plate 11 constructed by the preferred embodiment of the present invention.As shown in Figure 8, this right plate is processed with such as is the right T-slot 11b of the trapezoidal screwed hole 11a of dextrorotation and array, the screwed hole 11a that wherein dextrorotation is trapezoidal is matched by trapezoidal thread with trapezoidal screw 14a; Right T-slot 11b, for installing dividing plate 15, can arrange dividing plate 15 quantity and position according to the large freedom in minor affairs of requisite space.
With reference to Fig. 9, show the agent structure according to the left plate 12 constructed by the preferred embodiment of the present invention.As shown in Figure 9, this left plate 12 is processed with the left T-slot 12b of for example left-handed trapezoidal screwed hole 12a and array, wherein left-handed trapezoidal screwed hole 12a is matched by trapezoidal thread with trapezoidal screw 14a, when trapezoidal screw 14a rotates, left plate 12 and right plate 11 realize move toward one another respectively by left-handed trapezoidal thread hole 12a and dextrorotation trapezoidal thread hole 11a; Left T-slot 12b, for installing dividing plate 15, can carry out Matching installation according to the layout of right plate 11 upper spacer 15.
See Figure 11, show the agent structure of the α rotating module 2 according to the preferred embodiment of the present invention.As shown in Figure 11, this α rotating module 2 comprises α-γ and is rotationally connected seat 21, α rotary electric machine 22, key 23, α rotational support seat 24 and α β and is rotationally connected seat 25, and wherein α-γ is rotationally connected seat 21 for realizing the connection of α rotating module 2 and γ rotating module 3; α rotary electric machine 22 is arranged on α-γ and is rotationally connected on seat 21, for providing the driving force of manipulator α to rotating; α rotational support seat 24 can be distributed in the both sides of α rotary electric machine 22, is arranged on α β and is rotationally connected on seat 25, realize being connected by key 23 with α rotary electric machine 22; Alpha-beta is rotationally connected seat 25 for realizing the connection of α rotating module 2 and pickup unit 1.
See Figure 11, show the agent structure of the γ rotating module 3 according to the preferred embodiment of the present invention.As shown in Figure 11, this γ rotating module 3 comprises γ and rotates mount pad 31 and γ rotary electric machine 32, and wherein γ rotary electric machine 32 is arranged on γ rotation mount pad 31, for providing the driving force of manipulator γ to rotating; γ rotates mount pad 31 for realizing the connection of γ rotating module 3 and XYZ tri-axle translation module 4.
See Figure 11 and Figure 12, show the agent structure of the gas circuit distributor 5 according to the preferred embodiment of the present invention.As shown in fig. 11 and fig, this gas circuit distributor 5 comprises packaging type magnetic valve 51 and air pressure sensor 52, wherein packaging type magnetic valve 51 is made up of multiple magnetic valve, for controlling the switch of pick-up head cavity 10 each vacuum air-channel inner, air pressure sensor 52 and magnetic valve have identical number, each air pressure sensor 52 is for detecting the vacuum size of the inner single vacuum air-channel of corresponding pick-up head cavity 10, for confirming whether effective vacuum is set up, in the preferred embodiment, pick-up head cavity 10 inside has 6 vacuum air-channels, 6 magnetic valves are comprised altogether in packaging type magnetic valve 51, each vacuum air-channel of pick-up head cavity 10 is furnished with corresponding magnetic valve and air pressure sensor 52, the delivery outlet of each air pressure sensor 52 and vacuum gas-tpe fitting 16 one_to_one corresponding on pick device 1 simultaneously, 16a mouth as corresponding in 52a mouth, the corresponding 16b mouth of 52b mouth etc., as shown in figure 13, vacuum inputs from IN mouth, export from OUT mouth, it is inner that vacuum can arrive pick-up head cavity 10 via each vacuum air-channel, corresponding magnetic valve and air pressure sensor 52 control the switch of vacuum air-channel and detect vacuum size.
See Figure 11, show the agent structure of the vision positioning device 6 according to the preferred embodiment of the present invention.As shown in Figure 11, this vision positioning device comprises ccd sensor 61, laser displacement sensor 62 and sensor stand 63, wherein ccd sensor 61 is arranged on the side of sensor stand 63, by detecting the position of determination flexible membrane in edge on XY direction of flexible membrane; Laser displacement sensor 62 is arranged on the opposite side of sensor stand 63, by the Z-direction position of laser ranging determination flexible membrane relative to pick device 1; Both have cooperatively interacted to the location of flexible membrane; Sensor stand 63 is realizing, outside the support to ccd sensor 61 and laser displacement sensor 62, rotating mount pad 31 simultaneously realized by screw affixed with γ.
Below by the course of work of specific explanations according to above-mentioned manipulator of the present invention.
First, before flexible membrane absorption migration, according to the layout of size adjustment pick-up head cavity 10 internal partition 15 of flexible membrane and the spacing of right plate 11 and left plate 12, the adsorption area of pickup unit 1 to be adjusted with this, makes absorption active section size adapt to the size of flexible membrane.Then pickup unit 1 is made to mediate, by regulating the α of α rotating module 2 to the β of rotational freedom, pickup unit 1 to rotational freedom, the γ of γ rotating module 3 to X, the Y of rotational freedom and XYZ module 4, Z-direction three translational degree of freedom, make the position alignment of pickup unit 1 and flexible membrane.
Then, vision positioning device 6 detects the position of determination flexible membrane in edge on XY direction of flexible membrane by ccd sensor 61; Detected by laser displacement sensor 62 and determine the Z-direction position of flexible membrane relative to pick device 1, both have cooperatively interacted to the location of flexible membrane.Then regulate the Z-direction free degree of XYZ tri-axle translation module 4, drive pickup unit 1 to drop to suitable operating position, gravity sensor group 19 detects the position that feedback pick device 1 adsorbs active section.Compare by the position of the position of flexible membrane and pickup unit 1 being adsorbed active section the site error drawing both, adjust spatial attitude and absorption active section position by α, β of pick device 1 to rotational freedom, ensure accurately to pick up.
Then, as shown in exemplary in Figure 13, the vacuum air-channel that packaging type magnetic valve 51 controls absorption active section is opened, under the air pressure sensor 52 of correspondence detects the effective situation of confirmation vacuum, β starts to drive pickup unit 1 to carry out β to rotary motion to rotary electric machine 13, its absorption active section by flexible membrane absorption pickup, finally makes flexible membrane entirety be adsorbed on the external surface work section of pick-up head cavity 10 along cambered surface.Afterwards, β stops driving to rotary electric machine 13, and the β of pickup unit stops to rotary motion.After utilizing XYZ tri-axle translation module 4 that flexible membrane is transferred to assigned address, β continues to drive to rotary electric machine 13, and make absorption active section aim at flexible membrane placement location, then pick device 1 limit rotates, vacuum is closed in gas circuit distributor 5 frontier juncture, and flexible membrane is placed into assigned address the most at last.
In flexible membrane transfer process, between pickup and resting period, the size of the contact force of pressure sensor 18 moment detection feedback suffered by flexible membrane.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
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| CN105711099A (en) * | 2016-03-28 | 2016-06-29 | 华中科技大学 | System and method for multistation cooperation preparation of flexible electronics |
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| CN106625621A (en) * | 2016-12-21 | 2017-05-10 | 华中科技大学 | Manipulator for transferring flexible film in curved surface based on stretching and conformal principle |
| CN108297085A (en) * | 2018-03-30 | 2018-07-20 | 华中科技大学 | A method of it being accurately positioned the Multi-freedom-degreemanipulator manipulator of transfer and its carries charging tray |
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