CN104576856A - Polycompound semiconductor high-efficiency light emitting module with doped multi-layered quantum wells - Google Patents
Polycompound semiconductor high-efficiency light emitting module with doped multi-layered quantum wells Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 230000004888 barrier function Effects 0.000 claims abstract description 46
- 150000001875 compounds Chemical class 0.000 claims abstract description 38
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims abstract description 19
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052733 gallium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 claims 1
- -1 aluminium indium phosphorus Chemical compound 0.000 claims 1
- 229910052698 phosphorus Inorganic materials 0.000 claims 1
- 239000011574 phosphorus Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 13
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 6
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
- H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
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Abstract
本发明提供带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区,所述有源区包括带有掺杂的多层量子阱多元化合物半导体结构,且所述多层量子阱多元化合物半导体结构具有至少一个量子阱层,其中全部或部分的垒层掺杂,阱层不掺杂;所述的多元化合物为磷化铝镓铟。在大芯片尺寸上发明结构具有较佳的亮度输出并且电压也较低。在高环境温度或高温状态下,因材料身所造成的波长红移以及亮度衰减均有所降低。
The invention provides a high-efficiency light-emitting component with doped multilayer quantum well multi-component compound semiconductor, including an active region, the active region includes a doped multi-layer quantum well multi-component compound semiconductor structure, and the multi-layer The quantum well multi-component compound semiconductor structure has at least one quantum well layer, in which all or part of the barrier layer is doped, and the well layer is not doped; the multi-component compound is aluminum gallium indium phosphide. The inventive structure has better luminance output and lower voltage at large chip sizes. In high ambient temperature or high temperature state, the wavelength red shift and brightness attenuation caused by the material itself are reduced.
Description
技术领域technical field
本发明涉及半导体发光组件技术领域,尤其是涉及带有掺杂的多层量子阱多元化合物半导体高效率发光组件。The invention relates to the technical field of semiconductor light-emitting components, in particular to a high-efficiency light-emitting component with doped multi-layer quantum well multi-component compound semiconductors.
背景技术Background technique
半导体发光二极管光源寿命长、功耗低、可靠性好,在生产和生活的许多领域得到了普遍的认可,用途广泛。目前,发光二级管的量子阱结构部分主要是多量子阱的结构设计,而量子阱在高温环境下,因材料本身会造成波长红移以及亮度衰减,这就限制了二极管的适用范围,为了扩大二极管的适用范围,有必要研发一种在高温下,能保持较高效率的半导体发光组件。Semiconductor light-emitting diode light sources have long life, low power consumption, and good reliability. They have been widely recognized in many fields of production and life, and have a wide range of uses. At present, the quantum well structure of light-emitting diodes is mainly the structural design of multiple quantum wells, and the quantum wells will cause wavelength red shift and brightness attenuation due to the material itself in a high-temperature environment, which limits the scope of application of the diode. To expand the scope of application of diodes, it is necessary to develop a semiconductor light-emitting component that can maintain high efficiency at high temperatures.
发明内容Contents of the invention
本发明要解决的问题是一种带有参杂的多层量子阱多元化合物半导体高效率发光组件,该组件降低了在高温下作业时的亮度衰减以及波长变化的问题。The problem to be solved by the present invention is a high-efficiency light-emitting component with doped multi-layer quantum well multi-component compound semiconductor, which reduces the problems of brightness attenuation and wavelength change when operating at high temperature.
为解决上述技术问题,本发明采用的技术方案是:带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区,所述有源区包括带有掺杂的多层量子阱多元化合物半导体结构,且所述多层量子阱多元化合物半导体结构具有至少一个量子阱层,其中全部或部分的垒层掺杂,阱层不掺杂;所述的多元化合物为磷铝镓铟、铝铟磷或镓铟磷中的一种。In order to solve the above technical problems, the technical solution adopted by the present invention is: a high-efficiency light-emitting component with doped multi-layer quantum well multi-component compound semiconductors, including an active region, which includes a doped multi-layer quantum well Well multi-component compound semiconductor structure, and the multi-layer quantum well multi-component compound semiconductor structure has at least one quantum well layer, wherein all or part of the barrier layer is doped, and the well layer is not doped; the multi-component compound is aluminum gallium indium phosphorus , aluminum indium phosphide or gallium indium phosphide.
优选的,所述掺杂的垒层浓度为8×1016~2×1017原子/厘米,且阱层厚度为120~170埃,垒层厚度为140~190埃,掺杂形态为P型掺杂或N型掺杂。Preferably, the concentration of the doped barrier layer is 8×1016-2×1017 atoms/cm, the thickness of the well layer is 120-170 angstroms, the thickness of the barrier layer is 140-190 angstroms, and the doping form is P-type doping or N-type doping.
优选的,所述P型掺杂的掺杂元素为Mg或Zn,所述N型掺杂的掺杂元素为Si或Te。Preferably, the doping element of the P-type doping is Mg or Zn, and the doping element of the N-type doping is Si or Te.
优选的,靠近N型限制层或靠近P型限制层的垒层或在有源区中央的垒层掺杂,总掺杂对数≦1/3总量子井对数。Preferably, the barrier layer close to the N-type confinement layer or the P-type confinement layer or the barrier layer in the center of the active region is doped, and the total doping logarithm≦1/3 of the total quantum well logarithm.
优选的,所述垒层内位于中间区域的部分掺杂,掺杂厚度为1/2~1/3垒层的厚度。Preferably, the part of the barrier layer located in the middle region is doped, and the doping thickness is 1/2˜1/3 of the thickness of the barrier layer.
本发明具有的优点和积极效果是:在大芯片尺寸上本发明结构具有较佳的亮度输出并且电压也较低。在高环境温度或高温状态下,因材料本身所造成的波长红移以及亮度衰减均有所降低。The advantages and positive effects of the present invention are: the structure of the present invention has better luminance output and lower voltage on a large chip size. In high ambient temperature or high temperature state, the wavelength red shift and brightness attenuation caused by the material itself are reduced.
附图说明Description of drawings
图1是本发明中实施例一的多层量子阱结构示意图;Fig. 1 is the schematic diagram of the multilayer quantum well structure of embodiment one among the present invention;
图2是本发明中实施例二的多层量子阱结构示意图;Fig. 2 is the schematic diagram of the multilayer quantum well structure of embodiment two in the present invention;
图3是本发明中实施例三的多层量子阱结构示意图;Fig. 3 is the schematic diagram of the multilayer quantum well structure of embodiment three in the present invention;
图4是本发明中实施例四的多层量子阱结构示意图;Fig. 4 is the schematic diagram of the multilayer quantum well structure of embodiment four in the present invention;
图5是垒层未掺杂的多层量子阱结构示意图;5 is a schematic diagram of a multilayer quantum well structure with undoped barrier layers;
图6是中间区域掺杂的垒层结构示意图;6 is a schematic diagram of a barrier layer structure doped in the middle region;
图中:100、有源区;140、阱层;150、有掺杂的垒层;160、非掺杂的垒层;170、P型限制层;180、N型限制层;190、掺杂区。In the figure: 100, active region; 140, well layer; 150, doped barrier layer; 160, non-doped barrier layer; 170, P-type confinement layer; 180, N-type confinement layer; 190, doped district.
具体实施方式Detailed ways
实施例一Embodiment one
如图1所示,带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区100,所述有源区100包括带有掺杂的多层量子阱多元化合物半导体结构,所述的多元化合物为磷化铝镓铟,所述多层量子阱多元化合物半导体结构具有12个量子阱层;垒层材料为(Al0.7Ga0.3)InP,阱层140材料为(Al0.12Ga0.88)InP,其中全部垒层均掺杂即有掺杂的垒层150,阱层140不掺杂;As shown in FIG. 1, the high-efficiency light-emitting component with doped multilayer quantum well multiple compound semiconductors includes an active region 100, and the active region 100 includes a doped multilayer quantum well multiple compound semiconductor structure, The multi-component compound is aluminum gallium indium phosphide, and the multi-layer quantum well multi-component compound semiconductor structure has 12 quantum well layers; the material of the barrier layer is (Al 0.7 Ga 0.3 )InP, and the material of the well layer 140 is (Al 0.12 Ga 0.88 ) InP, wherein all the barrier layers are doped, that is, there is a doped barrier layer 150, and the well layer 140 is not doped;
所述掺杂的垒层150掺杂浓度为1.5×1017原子/厘米,且阱层140厚度为140埃,垒层厚度为180埃,掺杂形态为P型掺杂或N型掺杂。所述P型掺杂的掺杂元素为Zn,所述N型掺杂的掺杂元素为Te。The doping concentration of the doped barrier layer 150 is 1.5×10 17 atoms/cm, the thickness of the well layer 140 is 140 Å, the thickness of the barrier layer is 180 Å, and the doping form is P-type doping or N-type doping. The doping element of the P-type doping is Zn, and the doping element of the N-type doping is Te.
实施例二Embodiment two
如图2所示,带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区100,所述有源区100包括带有掺杂的多层量子阱多元化合物半导体结构,所述的多元化合物为磷化铝镓铟,所述多层量子阱多元化合物半导体结构具有12个量子阱层;垒层材料为(Al0.7Ga0.3)InP,阱层140材料为(Al0.12Ga0.88)InP,其中部分垒层掺杂,阱层不掺杂;掺杂区域为靠近N型限制层的垒层,总掺杂对数为4个。As shown in FIG. 2, the high-efficiency light-emitting component with doped multilayer quantum well multiple compound semiconductors includes an active region 100, and the active region 100 includes a doped multilayer quantum well multiple compound semiconductor structure, The multi-component compound is aluminum gallium indium phosphide, and the multi-layer quantum well multi-component compound semiconductor structure has 12 quantum well layers; the material of the barrier layer is (Al 0.7 Ga 0.3 )InP, and the material of the well layer 140 is (Al 0.12 Ga 0.88 ) InP, in which part of the barrier layer is doped, and the well layer is not doped; the doped region is the barrier layer close to the N-type confinement layer, and the total number of doping pairs is 4.
所述掺杂的垒层150掺杂浓度为1.5×1017原子/厘米,且阱层140厚度为140埃,掺杂的垒层150以及非掺杂的垒层160的厚度均为180埃,掺杂形态为P型掺杂或N型掺杂。所述P型掺杂的掺杂元素为Zn,所述N型掺杂的掺杂元素为Te。The doping concentration of the doped barrier layer 150 is 1.5×10 17 atoms/cm, and the thickness of the well layer 140 is 140 Å, and the thickness of the doped barrier layer 150 and the non-doped barrier layer 160 are both 180 Å, The doping form is P-type doping or N-type doping. The doping element of the P-type doping is Zn, and the doping element of the N-type doping is Te.
实施例三Embodiment Three
如图3所示,带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区100,所述有源区100包括带有掺杂的多层量子阱多元化合物半导体结构,所述的多元化合物为磷化铝镓铟,所述多层量子阱多元化合物半导体结构具有12个量子阱层;垒层材料为(Al0.7Ga0.3)InP,阱层140材料为(Al0.12Ga0.88)InP,其中全部垒层均掺杂,阱层140不掺杂;但每个垒层内位于中间区域的部分掺杂,如图6所示,且掺杂区190的厚度为1/3垒层的厚度。As shown in FIG. 3 , the high-efficiency light-emitting component with doped multilayer quantum well multiple compound semiconductor includes an active region 100, and the active region 100 includes a doped multilayer quantum well multiple compound semiconductor structure, The multi-component compound is aluminum gallium indium phosphide, and the multi-layer quantum well multi-component compound semiconductor structure has 12 quantum well layers; the material of the barrier layer is (Al 0.7 Ga 0.3 )InP, and the material of the well layer 140 is (Al 0.12 Ga 0.88 ) InP, wherein all the barrier layers are doped, and the well layer 140 is not doped; but the part of each barrier layer located in the middle region is doped, as shown in FIG. 6, and the thickness of the doped region 190 is 1/3 The thickness of the barrier layer.
所述掺杂的垒层150浓度为1.5×1017原子/厘米,且阱层140厚度为140埃,垒层厚度为180埃,掺杂形态为P型掺杂或N型掺杂。所述P型掺杂的掺杂元素为Zn,所述N型掺杂的掺杂元素为Te。The concentration of the doped barrier layer 150 is 1.5×10 17 atoms/cm, the thickness of the well layer 140 is 140 Å, the thickness of the barrier layer is 180 Å, and the doping form is P-type doping or N-type doping. The doping element of the P-type doping is Zn, and the doping element of the N-type doping is Te.
实施例四Embodiment four
如图4所示,带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区100,所述有源区100包括带有掺杂的多层量子阱多元化合物半导体结构,所述的多元化合物为磷化铝镓铟,所述多层量子阱多元化合物半导体结构具有12个量子阱层;垒层材料为(Al0.7Ga0.3)InP,阱层140材料为(Al0.12Ga0.88)InP,其中部分垒层掺杂,阱层140不掺杂;掺杂区域为靠近N型限制层的垒层,总掺杂对数为4个。且掺杂的垒层150内位于中间区域的部分掺杂,如图6所示,掺杂区9的厚度为1/3垒层的厚度。所述掺杂的垒层150的掺杂浓度为1.5×1017原子/厘米,且阱层140厚度为140埃,垒层厚度为180埃,掺杂形态为P型掺杂或N型掺杂。所述P型掺杂的掺杂元素为Zn,所述N型掺杂的掺杂元素为Te。As shown in FIG. 4 , the high-efficiency light-emitting component with doped multilayer quantum well multiple compound semiconductors includes an active region 100, and the active region 100 includes a doped multilayer quantum well multiple compound semiconductor structure, The multi-component compound is aluminum gallium indium phosphide, and the multi-layer quantum well multi-component compound semiconductor structure has 12 quantum well layers; the material of the barrier layer is (Al 0.7 Ga 0.3 )InP, and the material of the well layer 140 is (Al 0.12 Ga 0.88 ) InP, in which part of the barrier layer is doped, and the well layer 140 is not doped; the doped region is the barrier layer close to the N-type confinement layer, and the total number of doping pairs is 4. And the part of the doped barrier layer 150 located in the middle region is doped, as shown in FIG. 6 , the thickness of the doped region 9 is 1/3 of the thickness of the barrier layer. The doping concentration of the doped barrier layer 150 is 1.5×10 17 atoms/cm, the thickness of the well layer 140 is 140 angstroms, the thickness of the barrier layer is 180 angstroms, and the doping form is P-type doping or N-type doping . The doping element of the P-type doping is Zn, and the doping element of the N-type doping is Te.
对照组control group
带有掺杂的多层量子阱多元化合物半导体高效率发光组件,包括有源区100,所述有源区100包括带有掺杂的多层量子阱多元化合物半导体结构,所述的多元化合物为磷化铝镓铟,所述多层量子阱多元化合物半导体结构具有12个量子阱层;垒层材料为(Al0.7Ga0.3)InP,阱层140材料为(Al0.12Ga0.88)InP,其中垒层与阱层140均不掺杂,且阱层140厚度为140埃,垒层厚度为180埃。A high-efficiency light-emitting component with doped multilayer quantum well multi-component compound semiconductor, including an active region 100, the active region 100 includes a doped multi-layer quantum well multi-component compound semiconductor structure, and the multi-component compound is Aluminum gallium indium phosphide, the multi-layer quantum well multi-component compound semiconductor structure has 12 quantum well layers; the material of the barrier layer is (Al 0.7 Ga 0.3 ) InP, and the material of the well layer 140 is (Al 0.12 Ga 0.88 ) InP, where the barrier layer Neither the layer nor the well layer 140 is doped, and the thickness of the well layer 140 is 140 angstroms, and the thickness of the barrier layer is 180 angstroms.
取具有实施例一~实施例四以及对照组的多层量子阱半导体发光组件进行检测,可以得出:Taking the multilayer quantum well semiconductor light-emitting components with Embodiment 1 to Embodiment 4 and the control group for detection, it can be concluded that:
a.大尺寸即42mil下可以看出本发明的结构较对照组的结构有较好的亮度输出,约增加30%,并且电压较低0.03V;a. It can be seen that the structure of the present invention has a better brightness output than the structure of the control group at a large size of 42mil, which is about 30% higher, and the voltage is lower by 0.03V;
b.在小尺寸即12mil下可以看出本发明的结构在高环境温度下亮度衰减较较对照组的结构少10%,并且波长红移现象较对照组少1.2纳米。b. At a small size of 12 mil, it can be seen that the brightness attenuation of the structure of the present invention is 10% less than that of the control group at high ambient temperature, and the wavelength red shift is 1.2 nanometers less than that of the control group.
以上对本发明的实施例进行了详细说明,但所述内容仅为本发明的较佳实施例,不能被认为用于限定本发明的实施范围。凡依本发明范围所作的均等变化与改进等,均应仍归属于本专利涵盖范围之内。The embodiments of the present invention have been described in detail above, but the content described is only a preferred embodiment of the present invention, and cannot be considered as limiting the implementation scope of the present invention. All equivalent changes and improvements made according to the scope of the present invention should still belong to the scope of this patent.
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CN107481664A (en) * | 2017-09-28 | 2017-12-15 | 京东方科技集团股份有限公司 | Display panel, driving method thereof, and display device |
CN113410348A (en) * | 2021-06-15 | 2021-09-17 | 厦门士兰明镓化合物半导体有限公司 | Deep ultraviolet light-emitting element and preparation method thereof |
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WO2016119534A1 (en) * | 2015-01-30 | 2016-08-04 | 天津三安光电有限公司 | Poly-compound semiconductor light-emitting component with doped multilayer quantum wells |
CN107481664A (en) * | 2017-09-28 | 2017-12-15 | 京东方科技集团股份有限公司 | Display panel, driving method thereof, and display device |
CN113410348A (en) * | 2021-06-15 | 2021-09-17 | 厦门士兰明镓化合物半导体有限公司 | Deep ultraviolet light-emitting element and preparation method thereof |
CN113410348B (en) * | 2021-06-15 | 2022-11-18 | 厦门士兰明镓化合物半导体有限公司 | Deep ultraviolet light-emitting element and preparation method thereof |
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