CN104576436B - Film magazine position detecting device, Transmission system and semiconductor processing equipment - Google Patents
Film magazine position detecting device, Transmission system and semiconductor processing equipment Download PDFInfo
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- CN104576436B CN104576436B CN201310475803.8A CN201310475803A CN104576436B CN 104576436 B CN104576436 B CN 104576436B CN 201310475803 A CN201310475803 A CN 201310475803A CN 104576436 B CN104576436 B CN 104576436B
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Abstract
The present invention relates to film magazine position detecting device, Transmission system and semiconductor processing equipment.The film magazine position detecting device includes state conversion unit and laser detection unit, wherein, laser detection unit is installed on outside loading chamaer room, it is used to launch laser to arranged on the indoor state conversion unit of loading chamaer, and receives the laser reflected by state conversion unit；State conversion unit is arranged in film magazine fixed plate, it, which is used to the gap between film magazine bottom surface and film magazine fixed plate being converted to it, is reflected towards the angle change of the laser of laser detection unit.Sheet above box position detection device can be detected the less gap between film magazine bottom surface and film magazine fixed plate, be accurately detected between film magazine bottom surface and film magazine fixed plate there are gap, film magazine position detecting device is had higher sensitivity.
Description
Technical field
The present invention relates to semiconductor equipment manufacturing field, and in particular, to a kind of film magazine position detecting device, Transmission system
And semiconductor processing equipment.
Background technology
In semiconductor processing equipment, chamber is loaded to load the film magazine equipped with workpiece to be machined inside it.Such as Fig. 1
It is shown, the film magazine 102 equipped with workpiece to be machined is loaded to the designated position loaded in chamber 101, arranged on transmission chamber 107
Internal manipulator 106 is by connecting transmission chamber 107 with loading the window of chamber 101 from the film magazine 102 loaded in chamber 101
Take piece, and transmit it in reaction chamber 108, carry out process, and by complete process workpiece to be machined from
Taken out in reaction chamber 108, and in the film magazine 102 being transmitted in loading chamber 101.In above process, film magazine 102 is
It is no to be loaded the success rate for directly affecting manipulator 106 to the designated position loaded in chamber 101 and taking piece and film releasing exactly.
In practical application, generally load chamber 101 on set film magazine position detecting device, to detect load chamber 101 in whether
Film magazine 102 is placed with, and detects whether film magazine 102 tilts relative to designated position, to confirm whether film magazine 102 is in loading chamaer
Designated position in room 101.
Fig. 2 is the structure diagram of existing loading chamber.Fixed as shown in Fig. 2, loading chamber 101 and being internally provided with film magazine
Plate 302, for carrying film magazine 102；The lower section of film magazine fixed plate 302 is equipped with piece box lifting device 303, to drive film magazine fixed plate
302 and the film magazine 102 that is placed in film magazine fixed plate 302 make elevating movement；Film magazine fixed plate 302 is equipped with limited block 305, is used for
The film magazine 102 being placed in film magazine fixed plate 302 is fixed on designated position.
A kind of existing film magazine position detecting device is as shown in figure 3, the film magazine position detecting device is specially to be arranged on film magazine
Sensor 304 in fixed plate 302.Its detection to 102 position of film magazine is accomplished in the following manner：When film magazine 102 is placed
When in film magazine fixed plate 302, sensor 304 is in the lower section of film magazine 102, if film magazine 102 is not tilted relative to designated position,
Then film magazine 102 is contacted with sensor 304, and sensor 304 is triggered, it, which sends, represents that film magazine 102 is accurately placed to specific bit
The signal put；If film magazine 102 is tilted relative to designated position, there are gap between film magazine 102 and film magazine fixed plate 302, when
When gap is sufficiently large, film magazine 102 is not in contact with sensor 304, and sensor 304 can not be triggered, it sends expression loading chamaer
There is no film magazine 102 or film magazine 102 to be not in the signal of designated position in room 101.
In practical applications, sheet above box position detection device is inevitably present following problems：
First, when film magazine 102 is tilted relative to designated position, and angle of inclination is smaller, film magazine 102 and film magazine fixed plate
Gap between 302 is insufficient to allow film magazine 102 to be disengaged with sensor 304, and sensor 304 still can be touched in the case
Hair, sends it and represents that film magazine 102 is accurately placed to the signal of designated position so that in the case, manipulator without
Method, which is accurately finished, takes piece and film releasing, even more so that manipulator produces collision when taking piece or film releasing between workpiece to be machined,
Workpiece to be machined is caused to be damaged.
Second, in some cases, loading the inside of chamber 101 has higher temperature, makes sensor 304 using process
In be subject to load 101 internal temperature of chamber limited；For example, exceed making for sensor 304 when loading the temperature inside chamber 101
During with temperature, sensor 304 possibly can not use or can not judge whether film magazine 102 is in designated position exactly.
Loaded third, sensor 304 is arranged on inside chamber 101, make the cable such as its signal wire and power cord needs through dress
The perisporium for carrying chamber 101 is connected to outside loading chamber 101；Also, the setting of its cable need to make it lift dress without prejudice to film magazine
303 elevating movement is put, and makes the circulation for not producing gas between the inside of loading chamber 101 and the external world.It is readily appreciated that, it is above-mentioned
Setting has higher difficulty, is not easy to set；And it is required that loading chamber 101 has the assembly precision of higher, cause its manufacture
Cost is higher.
Another film magazine position detecting device is as shown in figure 4, the loading chamber 101 equipped with the film magazine position detecting device exists
Its opposite both sides respectively has a transparent window（Not shown in figure）, also, the designated position of film magazine 102 is located at above-mentioned two
Between transparent window, when the film magazine 102 is accurately placed on designated position, the line between two transparent windows passes through piece
Box 102.Sheet above box position detection device is specially laser beam emitting device 406, it is with transmitting terminal and receiving terminal, the transmitting terminal
With receiving terminal outside loading chamber 101, and it is respectively arranged on the transparent window for loading 101 both sides of chamber, it is to film magazine 102
The detection of position is accomplished in the following manner：Film magazine 102 is loaded to film magazine fixed plate first, then laser beam emitting device
406 transmitting terminal launches laser beam to positioned at the receiving terminal for loading 101 opposite side of chamber；If receiving terminal receives transmitting terminal and sends
Laser beam, then sheet above box position detection device judge film magazine 102 be not in designated position or load chamber 101 in there is no piece
Box 102；If receiving terminal can not receive the laser beam that transmitting terminal is sent, sheet above box position detection device judges 102 quilt of film magazine
It is placed in designated position.
In practical applications, sheet above box position detection device is inevitably present following problems, i.e.,：Due to sheet above
Whether the laser beam that box position detection device is only sent by transmitting terminal is blocked by film magazine 102, and the position of film magazine 102 is examined
Survey, which can not detect whether film magazine 102 tilts relative to designated position exactly, so sheet above box position detects
Device, which is only capable of detecting exactly loading in chamber 101, whether there is film magazine 102, and whether film magazine 102 cannot be put exactly
Put and detected exactly on designated position.For example, when film magazine 102 is tilted relative to designated position, and film magazine 102 will be launched
When the laser beam shielding that end is sent is lived, sheet above box position detection device judges that film magazine 102 is placed on designated position；In this feelings
Under condition, manipulator is likely to successfully take piece or film releasing, results even in during taking piece or film releasing, and manipulator is with being processed
Collision is produced between workpiece, and then causes the damage of workpiece to be machined.
The content of the invention
It is contemplated that at least solve one of technical problem existing in the prior art, it is proposed that a kind of film magazine position detection
Device, Transmission system and semiconductor processing equipment, it can be produced between film magazine bottom surface and film magazine fixed plate since film magazine tilts
When raw gap is smaller, make state conversion unit be reflected towards between the laser of laser detector and laser detector have compared with
Big deviation, makes laser detector can not receive the laser reflected by state conversion unit, so that it can be accurate
There are gap between true ground detection lug cassette bottom face and film magazine fixed plate, make film magazine position detecting device that there is higher sensitivity.
A kind of film magazine position detecting device is provided to achieve the object of the present invention, it is used for detection lug cassette bottom face and support
It whether there is between the film magazine fixed plate of the film magazine since film magazine tilts the gap produced, it includes state conversion unit and swashs
Optical detecting unit, wherein the laser detection unit is installed on outside loading chamaer room, the laser detection unit is used for arranged on dress
The indoor state conversion unit transmitting laser of chamber is carried, and receives the laser reflected by the state conversion unit；If also,
The laser detection unit receives the laser reflected by the state conversion unit, represent to have in loading chamaer room film magazine and
Gap is not present between film magazine bottom surface and film magazine fixed plate；Otherwise represent there is no film magazine or film magazine bottom surface and piece in loading chamaer room
There are gap between box fixed plate；The state conversion unit is arranged in the film magazine fixed plate, the state conversion unit
The angle of the laser of the laser detection unit is reflected towards for the gap between film magazine bottom surface and film magazine fixed plate to be converted to it
Degree change.
Wherein, the state conversion unit includes lever assembly and the reflecting element being fixed thereon, and lever assembly includes rotation
Shaft, lever, jackscrew and elastomeric element, wherein the rotation axis is fixed on having of being set on the film magazine fixed plate upper surface
In the heavy platform of lateral openings；The lever is rotatably attached with the rotation axis, and the lever exists around the rotation axis
Perpendicular to the plane internal rotation of plane where the film magazine fixed plate；The bottom of the jackscrew, and the reflecting element with it is described
Lever connects, and is located at the both sides of the rotation axis respectively, or positioned at the same side of the rotation axis；The elastomeric element position
It is mutually same towards the lever and the jackscrew during for film magazine to be not present in the loading chamaer room in the heavy platform
The part of side applies upward elastic force, so that the top of the jackscrew is higher than the upper surface of the film magazine fixed plate；The reflection
Part is located at outside the lateral openings of the heavy platform.
Wherein, the laser detection unit includes transmitting terminal, receiving terminal and angle detection unit, wherein：The transmitting terminal,
For the reflection surface-emission laser towards the reflecting element corresponding thereto；The receiving terminal, for the film magazine bottom surface with
Between film magazine fixed plate there is no received during gap by the reflective surface of the reflecting element and Lai laser；The angle inspection
Survey unit, for the change at laser reflection angle and the optical path distance of setting of the receiving terminal are reflected towards according to the reflecting element come
Amplification detection amount, to calculate the angle of inclination.
Wherein, the thickness of the lever is run through in the bottom of the jackscrew, and the two is threadedly coupled；And in the heavy platform
On bottom surface, and with being provided with through hole at the corresponding position of the jackscrew, with for adjusting jackscrew for rotating the jackscrew
Passed through with the instrument of the relative position of the lever.
Wherein, transparency window is provided with the corresponding side wall of sidewall opening with the heavy platform of the loading chamber,
The transmitting terminal and receiving terminal are arranged on the outside of the transparency window.
Wherein, the laser detection unit further includes regulating device, and the regulating device is used to adjust the transmitting terminal, connect
Receiving end and the relative position of the transparency window.
Wherein, the laser detection unit includes laser reflection type sensor or laser opposite-radiation sensor.
As another technical solution, the present invention also provides a kind of Transmission system, it includes reaction chamber, load chamber and
Transmission chamber, wherein, the transmission chamber respectively with the reaction chamber and load chamber, to transmit between
Workpiece to be machined；The loading chamber is used to loading and accommodating in technique film magazine, and is provided with the loading chamber
Film magazine position detecting device, whether there is between the film magazine fixed plate of detection lug cassette bottom face and the support film magazine due to piece
Box tilts the gap produced, also, the film magazine position detecting device is using sheet above box position provided by the invention detection dress
Put.
Wherein, the quantity at least two of the film magazine position detecting device, at least two film magazines position detection dress
Put for whether there is gap between different position difference detection lug cassette bottom faces and film magazine fixed plate.
Wherein, the horizontal cross-section of the film magazine fixed plate is square, and the quantity of the film magazine position detecting device is
Two, and the lever assembly of the two is distributed relative to the upper surface of the film magazine fixed plate in diagonal.
As another technical solution, the present invention also provides a kind of semiconductor processing equipment, it includes being used for transmission and is added
The Transmission system of work workpiece, also, the Transmission system uses above-mentioned Transmission system provided by the invention.
The invention has the advantages that：
Film magazine position detecting device provided by the invention is received in its laser detection unit to be reflected by state conversion unit
And come laser when determine between film magazine bottom surface and film magazine fixed plate be not present due to film magazine tilt and produce gap；Swash at it
Optical detecting unit is determined between film magazine bottom surface and film magazine fixed plate when not receiving the laser reflected by state conversion unit
In the presence of the gap for being tilted and being produced due to film magazine；In above process, if there are gap between film magazine bottom surface and film magazine fixed plate,
Gap between film magazine bottom surface and film magazine fixed plate is converted to the angle change of its own by state conversion unit, and its own
The incidence angle of the laser of laser detection unit directive state conversion unit is decreased or increased in angle change, correspondingly, by state
The angle of reflection that converting unit is reflected towards the laser of laser detection unit is decreased or increased, and incidence angle and angle of reflection are decreased or increased
Numerical value be equal to state conversion unit angle change numerical value so that state conversion unit is reflected towards laser detection unit
The angle that deviates of laser and laser detection unit be twice of state conversion unit angle change so that in film magazine bottom surface
When gap between film magazine fixed plate is smaller, by the laser and the angle of laser detection unit deviation of state conversion unit reflection
It is larger, correspondingly, distance of the laser on the side wall for loading chamber between the flare and laser detection unit that are formed compared with
Greatly, laser detection unit is made to receive the laser reflected by state conversion unit, so that provided by the invention
Box position detection device can be between film magazine bottom surface and film magazine fixed plate due to film magazine tilt and produce gap it is smaller when,
Exactly between detection lug cassette bottom face and film magazine fixed plate there are gap, there is film magazine position detecting device higher sensitive
Degree.
Transmission system provided by the invention, it, can be in piece by using film magazine position detecting device provided by the invention
Between cassette bottom face and film magazine fixed plate due to film magazine tilts and produces gap it is smaller when, detection lug cassette bottom face and piece exactly
There are gap between box fixed plate, so as to prevent manipulator between film magazine bottom surface and film magazine fixed plate there are during gap into
Row takes piece or film releasing, avoids the collision between resulting manipulator and workpiece to be machined, or even the damage of workpiece to be machined.
Semiconductor processing equipment provided by the invention, it, can be in film magazine by using Transmission system provided by the invention
Between bottom surface and film magazine fixed plate due to film magazine tilts and produces gap it is smaller when, detection lug cassette bottom face and film magazine exactly
There are gap between fixed plate, so as to prevent manipulator, there are carried out during gap between film magazine bottom surface and film magazine fixed plate
Piece or film releasing are taken, avoids the collision between resulting manipulator and workpiece to be machined, or even the damage of workpiece to be machined.
Brief description of the drawings
Fig. 1 is the structure diagram of existing semiconductor processing equipment；
Fig. 2 is the structure diagram of existing loading chamber；
Fig. 3 is the structure diagram of the existing film magazine position detecting device being installed in film magazine fixed plate；
Fig. 4 is the structure diagram of the existing film magazine position detecting device for being installed on and loading exterior thereto；
Fig. 5 is the structure diagram for the film magazine position detecting device that first embodiment of the invention provides；
Fig. 6 is the principle schematic of film magazine position detecting device shown in Fig. 5；
Fig. 7 is located at signal during rotation axis both sides for jackscrew in film magazine position detecting device shown in Fig. 5 respectively with reflecting element
Figure；
Fig. 8 is the structure diagram for the film magazine position detecting device that second embodiment of the invention provides；
Fig. 9 is the internal structure schematic diagram that chamber is loaded in the Transmission system that the embodiment of the present invention provides；And
Figure 10 is the corresponding film magazine state of testing result that two film magazine position detecting devices in chamber are loaded shown in Fig. 9
Table.
Embodiment
To make those skilled in the art more fully understand technical scheme, come below in conjunction with the accompanying drawings to the present invention
Film magazine position detecting device, Transmission system and the semiconductor processing equipment of offer are described in detail.
Fig. 5 is refer to, Fig. 5 is the structure diagram for the film magazine position detecting device that first embodiment of the invention provides.Piece
Box position detection device, which is used to detect between 50 bottom surface of film magazine and the film magazine fixed plate 55 for supporting film magazine 50, whether there is due to piece
The gap that box 50 is tilted and produced, it includes state conversion unit and laser detection unit.Wherein, laser detection unit is installed on
Outside loading chamaer room, it is used to launch laser to arranged on the indoor state conversion unit of loading chamaer, and receives by state conversion unit
The laser of reflection；Also, if laser detection unit receives the laser reflected by state conversion unit, represent to load
Have in chamber and gap is not present between film magazine 50 and 50 bottom surface of film magazine and film magazine fixed plate 55, otherwise represent do not have in loading chamaer room
There are gap between film magazine 50 or 50 bottom surface of film magazine and film magazine fixed plate 55；State conversion unit is arranged at film magazine fixed plate 55
Interior, it, which is used to the gap between 50 bottom surface of film magazine and film magazine fixed plate 55 being converted to it, is reflected towards the laser of laser detection unit
Angle change.
Specifically, state conversion unit includes lever assembly 51 and the reflecting element 52 being fixed thereon；Wherein, lever assembly
51 angle change for the gap between 50 bottom surface of film magazine and film magazine fixed plate 55 to be converted to reflecting element 52；Lever assembly 51
Including rotation axis 510, lever 511, jackscrew 512 and elastomeric element 513；Wherein rotation axis 510 is fixed in film magazine fixed plate 55
In the heavy platform with lateral openings set on surface；Lever 511 is rotatably attached with rotation axis 510, and lever 511 surrounds
Rotation axis 510 is in the plane internal rotation perpendicular to 55 place plane of film magazine fixed plate；The bottom of jackscrew 512, and reflecting element 52
It is connected with lever 511, and is located at the both sides of rotation axis 510 respectively；Elastomeric element 513 is located in above-mentioned heavy platform, for loading
When film magazine 50 is not present in chamber, towards the elastic force upward with the part application of 512 phase the same side of jackscrew of lever 511, so that
The top of jackscrew 512 is higher than the upper surface of film magazine fixed plate 55；So that the top of jackscrew 512 is placed in loading chamber in film magazine 50
Bottom surface when internal with film magazine 50 is in contact；Reflecting element 52 is used for the laser of laser detection unit directive state conversion unit is anti-
Directive laser detection unit, and reflecting element 52 is located at outside the lateral openings of above-mentioned heavy platform.In the present embodiment, elastomeric element
513 be spring.
Laser detection unit includes transmitting terminal 53 and receiving terminal 54；Wherein, transmitting terminal 53 is used for anti-towards corresponding thereto
Penetrate the reflection surface-emission laser of part 52；When receiving terminal 54 is used to gap be not present between 50 bottom surface of film magazine and film magazine fixed plate 55
Receive by the reflective surface of reflecting element 52 and Lai laser.In the present embodiment, laser detection unit is laser opposite-radiation
Sensor, its transmitting terminal 53 and receiving terminal 54 are vertically arranged at intervals, also, receiving terminal 54 is located at the top of transmitting terminal 53.
In the present embodiment, as shown in figure 5, being provided with the side wall for loading chamber corresponding with the lateral openings of heavy platform
Bright window, transmitting terminal 53 and receiving terminal 54 are arranged at the outside of transparency window.
50 bottom surface of film magazine position detecting device detection film magazine provided below first embodiment of the invention is fixed with film magazine
It whether there is between plate 55 since the principle in the gap that film magazine 50 is tilted and produced is described in detail.
Please in the lump referring to Fig. 5 and Fig. 6, in the present embodiment, load when film magazine 50 is not present in chamber, the top of jackscrew 512
End higher than film magazine fixed plate 55 upper surface so that when film magazine 50 is positioned in film magazine fixed plate 55, no matter the bottom of film magazine 50
Whether there is gap between face and film magazine fixed plate 55, the top of jackscrew 512 under the action of elastomeric element 513 all the time with film magazine
50 bottom surface is in contact.
In above process, if gap is not present between 50 bottom surface of film magazine and film magazine fixed plate 55, transmitting terminal 53 is to reflection
The reflection surface launching light beam 506 of part 52, as being reflected on reflecting surface of the incident beam through reflecting element 52, it is reflected the light beam 506
Light beam 507 is reflected onto receiving terminal 54, and flare 508 is formed at receiving terminal 54, and receiving end 54 receives, the inspection of piece box position
Survey device, which determines therefrom that, is not present gap between the bottom surface of film magazine 50 and film magazine fixed plate 55.
Conversely, in above process, if there are gap between 50 bottom surface of film magazine and film magazine fixed plate 55, it is readily appreciated that, this
When, during compared to gap being not present between the bottom surface of film magazine 50 and film magazine fixed plate 55, jackscrew 512 move up it is certain away from
From, so that its top is in contact with the bottom surface of film magazine 50, and in the process, lever 511 and reflecting element 52 are then with jackscrew 512
Movement have rotated certain angle, using the angle as Δ.At this time, reflection surface launching light beam 506 of the transmitting terminal 53 to reflecting element 52,
After the reflective surface of reflecting element 52, the reflected beams 507 ' form flare 508 ' on the side wall for loading chamber；Upper
During stating, since the rotation angle of reflecting element 52 is Δ, the incidence angle of light beam 506 and the angle of reflection of the reflected beams 507 ' reduce
Δ, so that its reflected beams 507 ' deviates with receiving terminal 54, and the angle deviateed is 2 Δs.
In practical applications, if the gap between the bottom surface of film magazine 50 and film magazine fixed plate 55 is smaller, angle delta also can
It is smaller, and after the reflection of the reflecting surface of reflecting element 52, the reflected beams 507 ' deviate from larger angle with receiving terminal 54, instead
Penetrate between hot spot 508 ' and receiving terminal 54 and also offset from larger distance, cause receiving terminal 54 can not receive by reflecting element 52
Reflective surface and come laser so that film magazine position detecting device provided in this embodiment can the bottom surface of film magazine 50 with
When gap between film magazine fixed plate 55 is smaller, detect exactly between existing between the bottom surface of film magazine 50 and film magazine fixed plate 55
Gap, so as to improve the detection sensitivity of film magazine position detecting device.
Specifically, following setting is made in the present embodiment：It is not present between the bottom surface of film magazine 50 and film magazine fixed plate 55
During gap, the reflecting surface of reflecting element 52 and the angle of vertical direction are α；With lever 511 and the connecting portion and rotation axis of jackscrew 512
The distance between 510 be L；H is in gap between the bottom surface of film magazine 50 and the upper surface of film magazine fixed plate 55；With transmitting terminal 53
The distance between receiving terminal 54 is H；Using the horizontal distance between the reflecting surface of transmitting terminal 53 and reflecting element 52 as S；With reflection
The distance between hot spot 508 ' and receiving terminal 54 are δ.In the present embodiment,
δ=H-S*tan(2α-2Δ) （1）
Wherein, H=S*tan2 α,（2）
According to formula（2）Understand,
In formula（3）In, since Δ is smaller, soSuch formula（3）It can simplify
For：
According to formula（4）Understand,
It is readily appreciated that, in specific setting in the present embodiment, connecting portion and the rotation of lever 511 and jackscrew 512 is set
The distance between axis 510 L is smaller, sets the horizontal distance S between transmitting terminal 53 and the reflecting surface of reflecting element 52 larger, sets piece
When gap being not present between the bottom surface of box 50 and film magazine fixed plate 55, the reflecting surface of reflecting element 52 and the angle of vertical direction are α
Larger, during so that the gap between the bottom surface of film magazine 50 and film magazine fixed plate 55 is smaller, flare 508 ' deviates receiving terminal
54 distance remain able to make receiving terminal 54 can not receive by the reflective surface of reflecting element 52 and Lai laser, and then make this
The film magazine position detecting device that embodiment provides, which can be accurately detected between the bottom surface of film magazine 50 and film magazine fixed plate 55, to be deposited
In gap.
Can be in the bottom surface of film magazine 50 and piece below by film magazine position detecting device provided in this embodiment is illustrated
Gap between box fixed plate 55 is accurately detected between the bottom surface of film magazine 50 and film magazine fixed plate 55 that there are gap when smaller.
For example, using common laser-correlation sensor as laser detection unit, the light receiving window of its receiving terminal is a diameter of
6.5mm, its transmitting terminal launch a diameter of 2mm of light beam.In practical applications, following design parameters are respectively set to：α=
12 °, S=120mm, L=20mm, h=0.5mm, by bringing above-mentioned parameter into formula（4）, it is known that H=53.4mm, δ=7mm；
Obviously, flare 508 ' deviates the distance of receiving terminal 7mm, it is sufficient to so that it goes out light receiving window from light receiving window central offset, so that
Prevent receiving terminal 54 from receive by the reflective surface of reflecting element 52 and Lai laser, provided in this embodiment box position
Detection device can determine therefrom that there are gap between the bottom surface of film magazine 50 and film magazine fixed plate 55.As described above, even if
Using common laser-correlation sensor, film magazine position detecting device provided in this embodiment can still be accurately detected film magazine
Less gap between 50 bottom surface and film magazine fixed plate 55, and the light receiving window diameter of the receiving terminal 54 when laser detection unit
During smaller, film magazine position detecting device provided in this embodiment can more delicately detect that the bottom surface of film magazine 50 and film magazine are fixed
The inclination of smaller between plate 55.
Sent out in conclusion film magazine position detecting device provided in this embodiment is received in its receiving terminal 54 by transmitting terminal 53
Penetrate, and by the reflective surface of reflecting element 52 and Lai laser when determine not deposit between the bottom surface of film magazine 50 and film magazine fixed plate 55
In gap；Do not receive in its receiving terminal 54 and launched by transmitting terminal 53, and by the reflective surface of reflecting element 52 and Lai laser
When determine that there are gap between the bottom surface of film magazine 50 and film magazine fixed plate 55；In above process, if the bottom surface of film magazine 50 and piece
There are gap, lever assembly 51 between box fixed plate 55 to be converted to the gap between the bottom surface of film magazine 50 and film magazine fixed plate 55
The angle change of reflecting element 52, and the angle change of reflecting element 52 subtracts the incidence angle of the laser of the reflecting surface of directive reflecting element 52
It is small, correspondingly, reduced from the angle of reflection of reflective surface to the laser of receiving terminal 54 of reflecting element 52, and incidence angle and angle of reflection
The numerical value of reduction is equal to the numerical value of the angle change of reflecting element 52 so that reflecting element 52 be reflected towards the laser of receiving terminal 54 with
The angle that receiving terminal 54 deviates is twice of 52 angle change of reflecting element, so that in the bottom surface of film magazine 50 and film magazine fixed plate
It is larger by the laser and angle that receiving terminal 54 deviates of the reflective surface of reflecting element 52 when gap between 55 is smaller, accordingly
Ground, the flare 508 ' and the distance between receiving terminal 54 which forms on the side wall for loading chamber are larger, make reception
End 54 can not receive by the reflective surface of reflecting element 52 and Lai laser so that film magazine position detection provided by the invention
Device can be between the bottom surface of film magazine 50 and film magazine fixed plate 55 gap it is smaller when, be accurately detected the bottom surface of film magazine 50
There are gap between film magazine fixed plate 55, make film magazine position detecting device that there is higher sensitivity,
In the present embodiment, it is using between the bottom surface of film magazine position detecting device detection film magazine 50 and film magazine fixed plate 55
It is no there are before gap, it is necessary to be calibrated to film magazine position detecting device；Specifically, the lower section of film magazine fixed plate 55 is equipped with lifting
Device, the film magazine to drive film magazine fixed plate 55 and be fixed in film magazine fixed plate 55 are risen or fallen to designated position, just
In reflection surface-emission laser of the transmitting terminal 53 to reflecting element 52；The thickness of lever 511, and the two spiral shell are run through in the bottom of jackscrew 512
Line connects；Also, on the bottom surface of heavy platform, with being provided with through hole at 512 corresponding position of jackscrew, with for allen wrench
The through hole being arranged on heavy platform bottom surface is passed through Deng instrument, by rotating jackscrew 512, the opposite position of adjustment jackscrew 512 and lever 511
Put, and then adjust the angle of reflecting element 52, when making to be not present gap between the bottom surface of film magazine 50 and film magazine fixed plate 55, reflecting element
52 reflecting surface can be by the laser reflection that transmitting terminal 53 is launched to receiving terminal 54.
In the present embodiment, laser detection unit further includes regulating device, which is used to adjust 53 He of transmitting terminal
The relative position of receiving terminal 54 and transparency window.
It should be noted that in the present embodiment, laser detection unit includes laser opposite-radiation sensor, but the present invention is simultaneously
Not limited to this, in practical applications, above-mentioned laser detection unit can also include laser reflection type sensor, in the case,
The transmitting terminal 53 and receiving terminal 54 of laser detection unit are in same position, it is readily appreciated that, at this time, the angle of reflecting element 52 makes hair
The laser vertical of reflection surface launching of the end 53 to reflecting element 52 is penetrated in the reflecting surface of reflecting element 52.
It should also be noted that, in the present embodiment, laser detection unit includes transmitting terminal 53 and receiving terminal 54, but this hair
Bright to be not limited to this, in practical applications, laser detection unit can also include angle detection unit, it is used for according to reflecting element
52 optical path distances for being reflected towards change and the setting of the angle of reflection of the laser of receiving terminal 54 carry out amplification detection amount, with according to above-mentioned public affairs
Formula（4）The angle change of reflecting element 52 is calculated, and and then calculates the gap between 50 bottom surface of film magazine and film magazine fixed plate 55.
It should also be noted that, in the present embodiment, jackscrew 512 and reflecting element 52 are located at the both sides of rotation axis 510 respectively,
But the present invention is not limited thereto, in practical applications, jackscrew 512 and reflecting element 52 are also in the same side of rotation axis 510,
As shown in fig. 7, in the case, elastomeric element 513 need to drive jackscrew 512, lever 511 and reflecting element 52 at the same time around rotation axis
510 rotate, although this causes elastomeric element 513 to have the elastic force of bigger, it still can meet the needs of the present invention.
It should also be noted that, in the present embodiment, transmitting terminal 53 is vertically arranged at intervals with receiving terminal 54, and is connect
Receiving end 54 is located at the top of transmitting terminal 53, but the present invention is not limited thereto, and in practical applications, transmitting terminal 53 may be alternatively located at receiving terminal
54 tops, in the case, there are during gap between the bottom surface of film magazine 50 and film magazine fixed plate 55, transmitting terminal 53 is launched to reflection
The incidence angle increase of the incident beam 506 of the reflecting surface of part 52, correspondingly, the angle of reflection increase of the reflected beams 507 ', but reflect
The angle that light beam 507 ' deviates with receiving terminal 54 is similarly twice of 52 angle change of reflecting element, it has no effect on 54 nothing of receiving terminal
The laser that method receives the reflection surface launching of reflecting element 52 and comes.In addition, in practical applications, transmitting terminal 53 and receiving terminal 54
It is not limited to vertically set, between its position relationship need to only be not present between the bottom surface of film magazine 50 and film magazine fixed plate 55
During gap, enable the laser that transmitting terminal 53 is launched via the reflective surface of reflecting element 52 to receiving terminal 54.
Fig. 8 is refer to, Fig. 8 is the structure diagram for the film magazine position detecting device that second embodiment of the invention provides.
In the present embodiment, film magazine position detecting device equally includes state conversion unit and laser detection unit, due to its structure and work(
It can have a detailed description in the above-described first embodiment, details are not described herein.
Only the difference of the present embodiment and first embodiment is described in detail below.In the present embodiment, reflect
Part 52 ' includes the first reflecting element 521 and at least one second reflecting element 522, wherein, the first reflecting element 521 is fixed with lever 511
Connection, the second reflecting element 522, which is arranged on, loads chamber interior；First reflecting element 521 and the second reflecting element 522 are in film magazine 50
When gap being not present between bottom surface and film magazine fixed plate 55, make the laser that transmitting terminal 53 is launched in the first reflecting element 521 and second
Reflected between reflecting element 522, and receiving terminal 54 is reflexed to by the first reflecting element 521 or the second reflecting element 522.
Specifically, in the present embodiment, the first reflecting element 521 acts on identical with the reflecting element 52 in first embodiment,
There are during gap between the bottom surface of film magazine 50 and film magazine fixed plate 55, the first reflecting element 521 rotates by a certain angle with lever, with this
Angle is Δ；The angle change of first reflecting element 521 makes the incidence angle of the incident beam of the first reflecting element of directive 521 reduce or increase
Δ is decreased or increased in big Δ, correspondingly, the angle of reflection of the reflected beams, so that bottom surface of the reflected beams compared to film magazine 50 and piece
The reflected beams when gap being not present between box fixed plate 55 deviate from 2 Δs；Second reflecting element 522 is used for the first reflecting element
The laser that 521 reflective surface goes out is reflected towards the reflecting surface of the first reflecting element 521 again, makes the reflection of the first reflecting element 521
Multiple reflections are carried out in face of laser.
Film magazine position detecting device provided in this embodiment, it is by setting at least one second reflecting element 522, to incite somebody to action
The laser that the reflective surface of first reflecting element 521 goes out is reflected towards the reflecting surface of the first reflecting element 521 again, so that transmitting terminal
53 laser sent are finally reflected through 521 multiple reflections of the first reflecting element by the first reflecting element 521 or the second reflecting element 522
To receiving terminal 54, in the case, the first reflecting element 521 often reflects once, and the laser and receiving terminal 54 of directive receiving terminal 54 are inclined
From angle just increase and be twice so that film magazine position detecting device can be between the bottom surface of film magazine 50 and film magazine fixed plate 55
Gap smaller when, be accurately detected between the bottom surface of film magazine 50 and film magazine fixed plate 55 there are gap, make piece box position examine
The sensitivity for surveying device further improves.
As another technical solution, the embodiment of the present invention also provides a kind of Transmission system, it includes reaction chamber, dress
Carry chamber and transmission chamber, wherein, transmission chamber respectively with reaction chamber and loading chamber, to transmit between
Workpiece to be machined；Load chamber to be used to loading and accommodating in technique film magazine, and piece box position is provided with chamber is loaded
Detection device, whether there is between detection lug cassette bottom face and film magazine fixed plate due to the gap that film magazine tilts and produces；And
And film magazine position detecting device uses the film magazine position detecting device that the above embodiment of the present invention provides.
In the present embodiment, load and at least two film magazine position detecting devices are provided with the film magazine fixed plate of chamber, should
At least two film magazine position detecting devices are used to whether there is between different position detection film magazine bottom surfaces and film magazine fixed plate
Gap；So set can between film magazine bottom surface and film magazine fixed plate there are during gap, more accurately detection lug cassette bottom face with
It whether there is gap between film magazine fixed plate.
Specifically, as shown in figure 9, the horizontal cross-section of film magazine fixed plate is square, two film magazine position detections are set thereon
Device（A、B）, and two film magazine position detecting devices（A、B）Lever assembly relative to the upper surface of film magazine fixed plate in diagonal
Line is distributed.In practical applications, the lower right corner of the upper surface of film magazine fixed plate in Fig. 9, piece are in film magazine position detecting device A
Box position detection device B is in Fig. 9 exemplified by the upper left corner of the upper surface of film magazine fixed plate, as shown in Figure 10, passes through two pieces
Box position detection device（A、B）Incline direction of the film magazine bottom surface relative to film magazine fixed plate can be judged exactly；Specifically, when
Film magazine position detecting device A, which is detected, is not present gap, film magazine position between its position film magazine bottom surface and film magazine fixed plate
Put detection device B and detect that there are during gap between its position film magazine bottom surface and film magazine fixed plate, it may be determined that film magazine
To the right or turn forward；When film magazine position detecting device A is detected between its position film magazine bottom surface and film magazine fixed plate
There are gap, film magazine position detecting device B is detected be not present between its position film magazine bottom surface and film magazine fixed plate between
During gap, it may be determined that film magazine to the left or tilts backwards；When film magazine position detecting device A and film magazine position detecting device B are detected
To when gap being not present between its position film magazine bottom surface and film magazine fixed plate, it may be determined that film magazine bottom surface is fixed with film magazine
Gap is not present between plate；When film magazine position detecting device A and film magazine position detecting device B are not detected by its position
There are during gap between film magazine bottom surface and film magazine fixed plate, it may be determined that loads in chamber and film magazine is not present.
Transmission system provided in this embodiment, its film magazine position detection provided by using the above embodiment of the present invention fill
Put, when gap that can be between film magazine bottom surface and film magazine fixed plate is smaller, detection lug cassette bottom face and film magazine fixed plate exactly
Between there are gap, so as to prevent manipulator from carrying out taking piece or film releasing when film magazine is tilted relative to film magazine fixed plate, keep away
Exempt from the collision between resulting manipulator and workpiece to be machined, or even the damage of workpiece to be machined.
As another technical solution, the embodiment of the present invention also provides a kind of semiconductor processing equipment, it includes being used for
The Transmission system of workpiece to be machined is transmitted, which employs the Transmission system of the above embodiment of the present invention offer.
Semiconductor processing equipment provided in this embodiment, its transmission system provided by using the above embodiment of the present invention
System, when gap that can be between film magazine bottom surface and film magazine fixed plate is smaller, detection lug cassette bottom face and film magazine fixed plate exactly
Between there are gap, so as to prevent manipulator from carrying out taking piece or film releasing when film magazine is tilted relative to film magazine fixed plate, keep away
Exempt from the collision between resulting manipulator and workpiece to be machined, or even the damage of workpiece to be machined.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, but the present invention is not limited thereto.For those skilled in the art, the essence of the present invention is not being departed from
In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (11)
1. a kind of film magazine position detecting device, its be used between the film magazine fixed plate of detection lug cassette bottom face and the support film magazine be
It is no to exist since film magazine tilts the gap produced, it is characterised in that the film magazine position detecting device includes state conversion unit
With laser detection unit, wherein
The laser detection unit is installed on outside loading chamaer room, and the laser detection unit is used for arranged on the indoor shape of loading chamaer
State converting unit launches laser, and receives the laser reflected by the state conversion unit；If the also, laser detection
Unit receives the laser reflected by the state conversion unit, represents there is film magazine and film magazine bottom surface and piece in loading chamaer room
Gap is not present between box fixed plate；Otherwise represent do not have in loading chamaer room between film magazine or film magazine bottom surface and film magazine fixed plate
There are gap；
The state conversion unit is arranged in the film magazine fixed plate, and the state conversion unit is used for film magazine bottom surface and piece
Gap between box fixed plate is converted to it and is reflected towards the angle change of the laser of the laser detection unit；
The state conversion unit includes lever assembly and the reflecting element being fixed thereon；
The laser detection unit includes transmitting terminal and receiving terminal, the transmitting terminal, for the reflection of direction corresponding thereto
The reflection surface-emission laser of part；The receiving terminal, during for gap to be not present between the film magazine bottom surface and film magazine fixed plate
Receive by the reflective surface of the reflecting element and Lai laser.
2. film magazine position detecting device according to claim 1, it is characterised in that lever assembly include rotation axis, lever,
Jackscrew and elastomeric element, wherein
The rotation axis is fixed in the heavy platform with lateral openings set on the film magazine fixed plate upper surface；
The lever is rotatably attached with the rotation axis, and the lever surrounds the rotation axis perpendicular to the film magazine
The plane internal rotation of plane where fixed plate；
The bottom of the jackscrew, and the reflecting element are connected with the lever, and are located at the both sides of the rotation axis respectively, or
Person is located at the same side of the rotation axis；
The elastomeric element is located in the heavy platform, during for film magazine to be not present in the loading chamaer room, towards the lever
Apply upward elastic force with the part of described jackscrew phase the same side so that the top of the jackscrew is higher than the film magazine fixed plate
Upper surface；
The reflecting element is located at outside the lateral openings of the heavy platform.
3. film magazine position detecting device according to claim 2, it is characterised in that the laser detection unit further includes angle
Spend detection unit, the angle detection unit, for being reflected towards according to the reflecting element laser reflection angle of the receiving terminal
The optical path distance of change and setting carrys out amplification detection amount, to calculate the angle of inclination.
4. film magazine position detecting device according to claim 2, it is characterised in that the thick stick is run through in the bottom of the jackscrew
The thickness of bar, and the two is threadedly coupled；And
On the bottom surface of the heavy platform, and with being provided with through hole at the corresponding position of the jackscrew, with for for rotating
State jackscrew and passed through to adjust jackscrew and the instrument of the relative position of the lever.
5. film magazine position detecting device according to claim 3, it is characterised in that in sinking with described for the loading chamber
Transparency window is provided with the corresponding side wall of sidewall opening of platform, the transmitting terminal and receiving terminal are arranged on the outer of the transparency window
Side.
6. film magazine position detecting device according to claim 5, it is characterised in that the laser detection unit further includes tune
Regulating device, the regulating device are used to adjust the transmitting terminal, the relative position of receiving terminal and the transparency window.
7. film magazine position detecting device according to claim 1, it is characterised in that the laser detection unit includes laser
Reflection sensor or laser opposite-radiation sensor.
8. a kind of Transmission system, including reaction chamber, load chamber and transmission chamber, wherein, the transmission chamber respectively with institute
State reaction chamber and load chamber, to transmit workpiece to be machined between；It is described loading chamber be used for load and
Film magazine is accommodated in technique, and film magazine position detecting device is provided with the loading chamber, to detection lug cassette bottom face
It whether there is between film magazine fixed plate with supporting the film magazine since film magazine tilts the gap produced, it is characterised in that described
Film magazine position detecting device is using the film magazine position detecting device described in claim 1-7 any one.
9. Transmission system according to claim 8, it is characterised in that the quantity of the film magazine position detecting device is at least
Two, at least two film magazines position detecting device is used for from different position difference detection lug cassette bottom faces and film magazine fixed plate
Between whether there is gap.
10. Transmission system according to claim 9, it is characterised in that the horizontal cross-section of the film magazine fixed plate to be square,
And
The quantity of the film magazine position detecting device is two, and the lever assembly of the two is relative to the upper of the film magazine fixed plate
Surface is distributed in diagonal.
11. a kind of semiconductor processing equipment, including it is used for transmission the Transmission system of workpiece to be machined, it is characterised in that the biography
Defeated system is using the Transmission system described in claim 8-10 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310475803.8A CN104576436B (en) | 2013-10-12 | 2013-10-12 | Film magazine position detecting device, Transmission system and semiconductor processing equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310475803.8A CN104576436B (en) | 2013-10-12 | 2013-10-12 | Film magazine position detecting device, Transmission system and semiconductor processing equipment |
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| CN104576436A CN104576436A (en) | 2015-04-29 |
| CN104576436B true CN104576436B (en) | 2018-05-08 |
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| CN106711063B (en) * | 2015-11-18 | 2019-07-05 | 北京北方华创微电子装备有限公司 | Cooling chamber and semiconductor processing equipment |
| CN110231000B (en) * | 2019-06-20 | 2023-12-15 | 中北大学 | Hole detection method |
| KR102342270B1 (en) * | 2021-06-03 | 2021-12-22 | 정병철 | Measurement method for calibration of semiconductor wafers using a measuring device |
| CN114937626B (en) * | 2022-07-26 | 2022-09-27 | 江苏邑文微电子科技有限公司 | Wafer cassette vacuum loading device |
| CN118149768B (en) * | 2024-05-09 | 2024-08-27 | 河北海贝斯科技有限公司 | Sensor for detecting balance state |
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|---|---|---|---|---|
| US6060721A (en) * | 1998-05-06 | 2000-05-09 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for detecting correct positioning of a wafer cassette |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09115988A (en) * | 1995-10-24 | 1997-05-02 | Toshiba Mach Co Ltd | Method and apparatus for detecting cassette |
| JP4893414B2 (en) * | 2007-03-29 | 2012-03-07 | 信越半導体株式会社 | Mounting table leveling method and mounting table leveling device |
| TWI330707B (en) * | 2008-08-27 | 2010-09-21 | Gudeng Prec Industral Co Ltd | A system for measuring the vertical distance between the thin substrates |
| CN101673699B (en) * | 2009-09-03 | 2011-05-11 | 东莞宏威数码机械有限公司 | Substrate box carrying platform |
| CN102768975B (en) * | 2011-05-05 | 2014-12-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Cassette positioning mechanism and chamber device with same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US6060721A (en) * | 1998-05-06 | 2000-05-09 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for detecting correct positioning of a wafer cassette |
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