CN104570329A - Optical deformable mirror system - Google Patents

Abstract

The invention relates to an optical deformable mirror system, which comprises a frame (1), a deformable mirror (2), an adapter (3), a clamping screw (4), a reduction mechanism (5), and a spacer (6) , adjusting screw sleeve (7), fastening screw (8), lock nut (9) and pressure plate (10). The optical deformable mirror system of the invention realizes the slight movement of the deformable mirror (2) at the contact point of the adapter (3) through the slight advance and retreat of the adapter (3) connected to the reduction mechanism (5), and the deformable mirror (2) rotates The displacement at the contact of the joint (3) is bidirectional, or convex or concave. The advantages of the invention are: firstly, using proportional components, the driving displacement of the deformable mirror is proportionally reduced; secondly, no glue is used between the components, which eliminates the drawbacks that the sensitivity and precision cannot be significantly improved due to the glue, and the front of the drive components , Retraction process, can maintain a high control accuracy.

Description

An optical deformable mirror system

technical field

The invention relates to the field of optical wavefront adjustment. In such fields, the optical wavefront requires subtle and sensitive corrections, especially for deformable mirror systems.

Background technique

The deformable mirror is an important part of light wave front adjustment, which is used to compensate the distortion of the light wave front caused by various errors in the optical system.

The basic principle is that, taking a plane wave as an example, when the light wave front reaches the working surface of the deformable mirror through the front-end optical system, due to the influence of the error of the optical system, the plane wave surface is not strictly flat, and the light rays reaching the deformable mirror (plane deformable mirror) are not Simultaneously arrives at the deforming mirror. In order to achieve the goal that the wave front is reflected by the deformable mirror and become an ideal plane, the light that first reaches the deformable mirror needs to increase the optical path, that is, the corresponding reflection point on the working surface of the deformable mirror needs to be recessed (control the reduction of the corresponding point on the working surface of the deformable mirror mechanism then retracts); in the same way, the light that finally arrives at the working surface of the deformable mirror needs to reduce the optical path, the corresponding working surface of the working surface of the deformable mirror needs to protrude, and the reduction mechanism that controls the corresponding point of the working surface of the deformable mirror is then elongated.

With the improvement of control precision, the existing deformable mirror system can no longer meet the requirements, especially for the optical system whose total wavefront error is controlled below 0.1nm. This is because, when the total error of the wavefront is below 0.1nm, the control element piezoelectric ceramics can only be used in an open-loop environment. The adhesive produces unpredictable and non-negligible deformation, which leads to the loss of practical value of the deformable mirror system.

Contents of the invention

The invention provides a deformable mirror system.

To achieve the above object, the present invention provides an optical deformable mirror system, comprising a frame, a deformable mirror, an adapter, a clamping screw, a reduction mechanism, a spacer, an adjusting screw sleeve, a fastening screw, a lock nut and a pressing plate, and the deformable mirror It is rigidly connected with the adapter; the adapter is rigidly connected with the reduction mechanism, in which the reduction mechanism has a built-in piezoelectric ceramic micro-displacement element; The fixed screw is fixed and locked by the lock nut. Among them, the deformation mirror is installed in the frame, and the pressure plate presses the deformation mirror through the spacer; the adapter and the reduction mechanism are clamped by the clamping screw; the frame is integrated with the pressure plate through screws ;

When the piezoelectric ceramic built in the reduction mechanism produces a displacement, the proportionally reduced displacement is transmitted to the piezoelectric ceramic action surface on the deformable mirror through the adapter. Due to the rigid connection, the connection between the deformable mirror and the adapter produces a controllable The micro-displacement, so as to realize the controllable deformation of the working surface of the deformable mirror, and this deformation is bidirectional.

Further, the deformable mirror is rigidly connected to the adapter, including but not limited to diffusion welding, using a chemical method to generate a connection on the joint surface of the same material, or using optical glue (that is, no glue) to make use of an ultra-smooth surface Connections produced by atomic adsorption.

Further, the rigid connection between the adapter and the reduction mechanism includes but is not limited to a threaded connection, a connection generated by static friction.

Further, the reduction mechanism has a built-in piezoelectric ceramic micro-displacement element, and the reduction mechanism reduces the displacement output by the piezoelectric ceramic in proportion to output a micro-displacement. The piezoelectric ceramic can be an open-loop piezoelectric ceramic or a closed-loop piezoelectric ceramic. ceramics.

The advantage of the present invention compared with prior art is:

(1) The system uses glue-free connection to eliminate the uncertainty caused by the deformation of the glue;

(2) The sensitivity and precision of this system can reach sub-nanometer level.

Description of drawings

Fig. 1 is a kind of optical deformable mirror system structure schematic diagram of the present invention;

FIG. 2 is a schematic diagram of the internal structure of the reduction mechanism 5 .

Explanation of reference signs:

1 is the frame; 2 is the deformation mirror; 3 is the adapter; 4 is the clamping screw; 5 is the reduction mechanism; 6 is the spacer; 7 is the adjusting screw sleeve; 8 is the fastening screw; platen.

Specific implementation

The technical solution will be further described below through the accompanying drawings and embodiments.

Example 1

Figure 1 is a schematic diagram of the structure of the deformable mirror system. An optical deformable mirror system of the present invention comprises: a frame 1, a deformable mirror 2, an adapter 3, a clamping screw 4, a reduction mechanism 5, a spacer 6, an adjusting screw sleeve 7, a fastening screw 8, a lock nut 9 and Platen 10.

The working principle is that the deformable mirror 2 is installed in the frame 1, and the pressure plate 10 presses the deformable mirror 2 through the spacer 6; the adapter 3 is rigidly connected with the deformable mirror 2, and the adapter 3 and the reduction mechanism 5 are clamped by the clamping screw 4; The initial position of the reduction mechanism 5 is adjusted by the adjusting screw sleeve 7, fixed by the fastening screw 8, and locked by the lock nut 9; the frame 2 is integrated with the pressure plate 1 by screws (not shown in the figure).

When the piezoelectric ceramic (shown in Fig. 2 ) built in the reduction mechanism 5 is displaced, the proportionally reduced displacement is transmitted to the piezoelectric ceramic active surface on the deformable mirror 2 through the adapter 3, and because it is rigidly connected, the deformable mirror Controllable micro-displacement is generated at the connection part between the upper part and the adapter 3, so as to realize the controllable deformation of the working surface of the deformable mirror, and the deformation is bidirectional.

Example 2

An optical deformable mirror system of the present invention has the same basic structure as that of Embodiment 1, wherein the deformable mirror 2 is rigidly connected to the adapter 3, including but not limited to diffusion welding, which is formed by chemical methods on the joint surface of the same material. The connection produced by the chemical compound, or the connection produced by atomic adsorption using the ultra-smooth surface using optical glue (ie, glue-free).

The rigid connection between the adapter 3 and the reduction mechanism 5 includes, but is not limited to, a threaded connection, a connection generated by static friction.

The reduction mechanism 5 has a built-in piezoelectric ceramic micro-displacement element, and the reduction mechanism reduces the output displacement of the piezoelectric ceramic proportionally to output a micro-displacement. The piezoelectric ceramic can be an open-loop piezoelectric ceramic or a closed-loop piezoelectric ceramic.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution rather than limit it. Those skilled in the art should understand that the technical solution of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solution of the present invention.

Claims (4)

1. An optical deformable mirror system is characterized in that, comprises frame (1), deformable mirror (2), adapter (3), clamping screw (4), reduction mechanism (5), spacer (6), Adjusting screw sleeve (7), fastening screw (8), lock nut (9) and pressure plate (10), deformation mirror (2) and adapter (3) realize rigid connection; adapter (3) and reducing mechanism ( 5) Rigid connection is realized, wherein, the reduction mechanism (5) has a built-in piezoelectric ceramic micro-displacement element; The sleeve (7) is adjusted, fixed by the fastening screw (8), and locked by the lock nut (9), wherein the deformable mirror (2) is installed in the frame (1), and the pressure plate (10) passes through the spacer (6 ) to compress the deformable mirror (2); the adapter (3) and the reducing mechanism (5) are clamped by the clamping screw (4); the frame (1) is integrated with the pressure plate (10) by the screw; When the piezoelectric ceramic built in the reduction mechanism (5) produces a displacement, the proportionally reduced displacement is transmitted to the piezoelectric ceramic active surface on the deformable mirror (2) through the adapter (3). Due to the rigid connection, the deformable mirror A controllable micro-displacement is generated at the connection part between the upper part and the adapter (3), thereby realizing the controllable deformation of the working surface of the deformable mirror, and the deformation is bidirectional. 2. The optical deformable mirror system according to claim 1, characterized in that, the deformable mirror (2) is rigidly connected to the adapter (3), including but not limited to diffusion welding, by chemically combining the same material Connections produced by surface-forming compounds, or connections produced by atomic adsorption using photoresists (ie, glue-free) using ultra-smooth surfaces. 3. The optical deformable mirror system according to claim 1, characterized in that, the rigid connection between the adapter (3) and the reduction mechanism (5) includes but not limited to threaded connection, and the connection generated by static friction. 4. optical deformable mirror system as claimed in claim 1, is characterized in that, described reducing mechanism (5), is built-in with piezoelectric ceramic micro-displacement element, and reducing mechanism reduces the displacement of piezoelectric ceramic output proportionally, and output micro Displacement, the piezoelectric ceramics may be open-loop piezoelectric ceramics or closed-loop piezoelectric ceramics.