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CN104062771A - Eccentric adjustment method of optical lens with submicron order control precision - Google Patents

Eccentric adjustment method of optical lens with submicron order control precision Download PDF

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CN104062771A
CN104062771A CN201410276144.XA CN201410276144A CN104062771A CN 104062771 A CN104062771 A CN 104062771A CN 201410276144 A CN201410276144 A CN 201410276144A CN 104062771 A CN104062771 A CN 104062771A
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lens
eccentricity
adjusted
eccentric
adjustment
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冯华君
王烨茹
徐之海
李奇
蒋婷婷
边美娟
陈跃庭
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Zhejiang University ZJU
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Abstract

本发明提出一种亚微米级控制精度的光学镜头镜片偏心装调方法。本发明中安放在压电陶瓷支撑座上的压电陶瓷在外加电压的控制下以亚微米的控制精度驱动镜片偏心调整钉,进而调整待调镜片的偏心位置,同时通过定中心仪旋转台的旋转和镜片表面偏心反射像测量组件的测量精确获得待调镜片的偏心位置,配合光学设计分析软件,直到待调镜片的偏心量调整到符合优化设计要求后再注胶彻底固定待调镜片。本发明提出一种采用压电陶瓷驱动精确调整光学镜头镜片偏心量的新方法,可以保证镜片偏心量的调整精度控制在亚微米的高水平,使成像镜头有更加优越的质量。

The invention proposes an eccentric adjustment method of an optical lens lens with submicron-level control accuracy. In the present invention, the piezoelectric ceramic placed on the piezoelectric ceramic support seat drives the lens eccentricity adjustment nail with sub-micron control accuracy under the control of the applied voltage, and then adjusts the eccentric position of the lens to be adjusted, and at the same time through the rotation of the centering instrument rotary table The eccentric position of the lens to be adjusted can be accurately obtained by the measurement of the rotation and lens surface eccentricity reflection image measurement components, and the optical design analysis software is used until the eccentricity of the lens to be adjusted is adjusted to meet the optimal design requirements, and then glue is injected to completely fix the lens to be adjusted. The invention proposes a new method for accurately adjusting the eccentricity of the optical lens lens driven by piezoelectric ceramics, which can ensure that the adjustment precision of the eccentricity of the lens is controlled at a high level of sub-micron, so that the imaging lens has more superior quality.

Description

亚微米级控制精度的光学镜头镜片偏心装调方法Optical lens eccentric adjustment method with sub-micron level control accuracy

技术领域 technical field

本发明属于光学仪器技术领域,是一种光学镜头组装过程中精确调整镜片之间偏心量的方法。 The invention belongs to the technical field of optical instruments, and relates to a method for accurately adjusting the eccentricity between lenses during the assembly process of optical lenses.

背景技术 Background technique

光学镜头是各种光学成像系统、监控系统中必不可少的关键部件。光学镜头的质量优劣直接影响成像系统、监控系统的性能好坏,甚至决定了成功与否。由于光学镜头在理论上必定存在各种像差缺陷,所以在光学镜头设计时往往采用较为复杂的不同形状不同材料的光学镜片组合,目的是校正光学镜头的各种像差,以期获得优质的成像质量。但设计完成到真正制造出来还有很多误差,在实际制造光学镜头的过程中难免会有各种零件制造误差、镜头装调误差等等。虽然光学镜头的镜片、镜筒、隔圈等影响光学系统成像质量的零件一般都有较高的公差要求,但即使如此,这些残留的公差还是会给整个镜头的成像质量带来影响。 Optical lens is an essential key component in various optical imaging systems and monitoring systems. The quality of the optical lens directly affects the performance of the imaging system and monitoring system, and even determines the success. Because the optical lens must have various aberration defects in theory, a more complex combination of optical lenses with different shapes and different materials is often used in the design of the optical lens. The purpose is to correct various aberrations of the optical lens in order to obtain high-quality imaging. quality. However, there are still many errors from the completion of the design to the actual manufacture. In the process of actually manufacturing optical lenses, it is inevitable that there will be various parts manufacturing errors, lens assembly errors, and so on. Although the lens, lens barrel, spacer and other parts of the optical lens that affect the imaging quality of the optical system generally have higher tolerance requirements, even so, these residual tolerances will still affect the imaging quality of the entire lens.

一般要求较高的镜头在结构设计时往往有一、二个偏心可调整的镜片或镜片组,在组装生产时通过对这一、二个偏心可调整的镜片或镜片组的偏心调整,以期实现误差之间的相互补偿,使整个镜头的成像质量最优。一般的偏心调整是通过调整螺钉的旋转,推动可调整镜片或镜片组完成的。由于调整螺钉是机械式的结构,调整精度一般不高,典型的如10微米、5微米。难以达到亚微米的控制精度。 Generally, lenses with higher requirements often have one or two eccentrically adjustable lenses or lens groups during structural design. During assembly and production, the eccentric adjustment of one or two eccentrically adjustable lenses or lens groups is used to achieve error correction. The mutual compensation among them makes the imaging quality of the whole lens optimal. The general eccentric adjustment is accomplished by pushing the adjustable lens or lens group through the rotation of the adjusting screw. Since the adjustment screw is a mechanical structure, the adjustment accuracy is generally not high, typically 10 microns or 5 microns. It is difficult to achieve submicron control accuracy.

现代光学系统的质量要求越来越高,对于某些特殊高精尖用途而言,几个微米的镜片偏心量造成的光学系统质量退化是不可容忍的,因此镜片偏心的精确控制与调整已经成为光学镜头制造技术的瓶颈。 The quality requirements of modern optical systems are getting higher and higher. For some special high-precision applications, the quality degradation of the optical system caused by a few microns of lens eccentricity is intolerable. Therefore, the precise control and adjustment of lens eccentricity has become a The bottleneck of optical lens manufacturing technology.

发明内容 Contents of the invention

本发明提出了一种采用压电陶瓷作为精密移动执行器件,对光学镜头的镜片偏心量进行精度为亚微米量级的精确调整,配合定中心仪和光学设计计算机分析软件,实现光学镜头中镜片偏心量精确控制,以期实现误差之间的相互补偿,使整个镜头成像质量最优化。 The present invention proposes a piezoelectric ceramic as a precision moving actuator to precisely adjust the eccentricity of the lens of the optical lens with a precision of sub-micron level, and cooperate with the centering instrument and the optical design computer analysis software to realize the lens in the optical lens The eccentricity is precisely controlled in order to achieve mutual compensation between errors and optimize the imaging quality of the entire lens.

该方法使用镜片偏心调整系统,系统由定中心仪旋转台、待组装镜头、压电陶瓷支撑座、压电陶瓷、镜片偏心调整钉、镜片表面偏心反射像测量组件组成,安放在压电陶瓷支撑座上的压电陶瓷在外加电压的控制下以亚微米的控制精度驱动镜片偏心调整钉,进而调整待调镜片的偏心位置,同时通过定中心仪旋转台的旋转和镜片表面偏心反射像测量组件的测量精确获得待调镜片的偏心位置,配合光学设计分析软件,直到待调镜片的偏心量调整到符合优化设计要求后再注胶彻底固定待调镜片。 This method uses the lens eccentricity adjustment system. The system consists of a centering instrument rotary table, a lens to be assembled, a piezoelectric ceramic support seat, a piezoelectric ceramic, a lens eccentricity adjustment nail, and a lens surface eccentric reflection image measurement component, which are placed on a piezoelectric ceramic support. Under the control of the applied voltage, the piezoelectric ceramic on the seat drives the lens eccentricity adjustment nail with sub-micron control precision, and then adjusts the eccentric position of the lens to be adjusted. Accurately obtain the eccentric position of the lens to be adjusted, and cooperate with the optical design analysis software until the eccentricity of the lens to be adjusted is adjusted to meet the requirements of the optimal design before injecting glue to completely fix the lens to be adjusted.

镜头组装过程中每一镜片的偏心量是可以通过该系统测量到的:旋转定中心仪旋转台,此时通过镜片表面偏心反射像测量组件可以逐一测量出每个镜片表面的偏心数值。根据每一镜片的测试偏心值,输入到光学设计软件,如ZEMAX软件等,以待调镜片的偏心量作为变量,优化整个镜头成像质量,得到最佳的待调镜片的偏心量值。根据这个偏心量值,通过控制本系统中的压电陶瓷的驱动电压值,实现待调镜片的偏心量调整。直到待调镜片的偏心量调整到符合优化设计要求后,再通过镜头上对应的注胶孔注胶,彻底固定待调镜片。 During the lens assembly process, the eccentricity of each lens can be measured through this system: rotate the centering instrument rotary table, at this time, the eccentric value of each lens surface can be measured one by one through the lens surface eccentric reflection image measurement component. According to the test eccentricity value of each lens, it is input into optical design software, such as ZEMAX software, etc., and the eccentricity of the lens to be adjusted is used as a variable to optimize the imaging quality of the entire lens and obtain the best eccentricity value of the lens to be adjusted. According to this eccentricity value, by controlling the driving voltage value of the piezoelectric ceramic in this system, the eccentricity adjustment of the mirror to be adjusted is realized. After the eccentricity of the lens to be adjusted is adjusted to meet the requirements of the optimal design, glue is injected through the corresponding injection hole on the lens to completely fix the lens to be adjusted.

本发明提出一种采用压电陶瓷驱动精确调整光学镜头镜片偏心量的新方法,可以保证镜片偏心量的调整精度控制在亚微米的高水平,使成像镜头有更加优越的质量。 The invention proposes a new method for accurately adjusting the eccentricity of the optical lens lens driven by piezoelectric ceramics, which can ensure that the adjustment precision of the eccentricity of the lens is controlled at a high level of sub-micron, so that the imaging lens has more superior quality.

附图说明 Description of drawings

图1为本发明亚微米级控制精度的光学镜头镜片偏心装调方法的系统组成示意图。图中1为定中心仪旋转台;2为待组装的镜筒和镜头;3为压电陶瓷支撑座;4为压电陶瓷;5为调整钉;6为待调中心镜片;7为偏心反射像测量组件。 Fig. 1 is a schematic diagram of the system composition of the eccentric assembly and adjustment method of the optical lens lens with sub-micron level control accuracy of the present invention. In the figure, 1 is the rotating table of the centering instrument; 2 is the lens barrel and lens to be assembled; 3 is the piezoelectric ceramic support seat; 4 is the piezoelectric ceramic; 5 is the adjustment nail; 6 is the center lens to be adjusted; 7 is the eccentric reflection like measurement components.

图2为图1中A-A向视图。 Fig. 2 is a view along A-A in Fig. 1 .

图3为典型的压电陶瓷电压-位移曲线。 Figure 3 is a typical piezoelectric ceramic voltage-displacement curve.

具体实施方式 Detailed ways

以下结合附图对本发明作进一步说明。 The present invention will be further described below in conjunction with accompanying drawing.

参见图1,这种控制精度为亚微米级的光学镜头镜片偏心量调整系统由定中心仪旋转台1、待组装镜头2、压电陶瓷支撑座3、压电陶瓷4、镜片偏心调整钉5、镜片表面偏心反射像测量组件7组成。其中的控制精度为亚微米的移动量执行器件为压电陶瓷,安放在压电陶瓷支撑座上,压电陶瓷的另一端与偏心调整钉紧密相靠。压电陶瓷、支撑座和偏心调整钉各一个共三个零件组成一个方向的偏心调整执行结构。这样的偏心调整执行结构共四组对称安装在待调偏心镜片6的四个方向,见附图2,分别有左、右、上、下四组。 Referring to Figure 1, this optical lens lens eccentricity adjustment system with sub-micron level control precision consists of a centering instrument rotary table 1, a lens to be assembled 2, a piezoelectric ceramic support seat 3, a piezoelectric ceramic 4, and a lens eccentricity adjustment nail 5 1. The lens surface eccentric reflection image measurement component 7 is composed. Among them, the control accuracy is sub-micron movement actuator is piezoelectric ceramics, placed on the piezoelectric ceramic support base, the other end of the piezoelectric ceramics is closely adjacent to the eccentric adjustment nail. The piezoelectric ceramics, the supporting seat and the eccentric adjustment nail each have a total of three parts to form an eccentric adjustment execution structure in one direction. A total of four groups of such eccentric adjustment execution structures are symmetrically installed in four directions of the eccentric lens 6 to be adjusted, as shown in the accompanying drawing 2, there are respectively left, right, upper and lower groups.

偏心移动量执行器件为压电陶瓷。压电陶瓷是一种高精度微位移器件。利用压电陶瓷逆压电效应,即当具有压电性质的电介质置于外电场中,由于电场作用,引起介质内部的正负电荷中心产生相对位移,而导致介质形变。能实现微米、数十微米的位移, 同时可输出较大的力,参见附图3所示,在外加电压的控制下,压电陶瓷的总长度能够发生变化,当压电陶瓷的一端固定后,另一端能实现微米、十微米级的位移,并有高达0.1微米甚至更高的位移精度。 The actuator of eccentric movement is piezoelectric ceramics. Piezoelectric ceramics are high-precision micro-displacement devices. The inverse piezoelectric effect of piezoelectric ceramics is used, that is, when a dielectric with piezoelectric properties is placed in an external electric field, due to the action of the electric field, the relative displacement of the positive and negative charge centers inside the medium is caused, resulting in deformation of the medium. It can realize the displacement of microns and tens of microns, and can output a large force at the same time. See Figure 3. Under the control of the applied voltage, the total length of the piezoelectric ceramic can change. When one end of the piezoelectric ceramic is fixed , the other end can realize the displacement of micron and ten microns, and has a displacement accuracy as high as 0.1 micron or even higher.

当待调镜片需要向右方向移动时,减小右边一组偏心调整执行结构的压电陶瓷驱动电压,压电陶瓷总长度减小,使调整钉与压电陶瓷脱离松开,调整钉失去对待调镜片的支撑;而同时增加左边一组偏心调整执行结构的压电陶瓷驱动电压,由于压电陶瓷一端的支撑座是与本系统的底座(定中心仪旋转台)固定,必然使偏心调整钉向右方向移动,待调偏心镜片就可以实现向右方向的偏心移动。 When the lens to be adjusted needs to move to the right, reduce the piezoelectric ceramic driving voltage of the right group of eccentric adjustment actuators, and the total length of the piezoelectric ceramic will be reduced, so that the adjustment nail and the piezoelectric ceramic will be separated and loosened, and the adjustment nail will lose its treatment. At the same time, increase the piezoelectric ceramic driving voltage of the left group of eccentric adjustment actuator structures. Since the support seat at one end of the piezoelectric ceramic is fixed with the base of the system (rotary table of the centering instrument), the eccentric adjustment nail must be fixed. Moving to the right, the eccentric lens to be adjusted can realize the eccentric movement to the right.

同理,可以分别实现对待调整镜片的向左、向上、向下任意方向的偏心调整。 Similarly, the eccentric adjustment of the lens to be adjusted to the left, upward, and downward in any direction can be realized respectively.

附图1中的定中心仪旋转台、镜片表面偏心反射像测量组件实际上组成了一个定中心仪,镜头组装过程中每一镜片的偏心量是可以通过该系统测量到的:旋转定中心仪旋转台,此时通过镜片表面偏心反射像测量组件可以逐一测量出每个镜片表面的偏心数值。根据每一镜片的测试偏心值,把偏心值与全部光学参数一起输入到光学设计软件,如ZEMAX软件等,以待调镜片的偏心量作为变量,优化整个镜头成像质量,得到最佳的待调镜片的偏心量值。根据这个偏心量值,通过控制本系统中的压电陶瓷的驱动电压值,实现待调镜片的偏心量调整。直到待调镜片的偏心量调整到符合优化设计要求后,再通过镜头上对应的注胶孔注胶,彻底固定待调镜片。 The rotating table of the centering instrument and the lens surface eccentric reflection image measurement component in the accompanying drawing 1 actually constitute a centering instrument, and the eccentricity of each lens during the lens assembly process can be measured through this system: the rotating centering instrument The rotating stage, at this time, the eccentric value of each lens surface can be measured one by one through the lens surface eccentric reflection image measurement component. According to the test eccentricity value of each lens, input the eccentricity value together with all optical parameters into the optical design software, such as ZEMAX software, etc., and use the eccentricity of the lens to be adjusted as a variable to optimize the imaging quality of the entire lens and obtain the best to be adjusted The eccentricity value of the lens. According to this eccentricity value, by controlling the driving voltage value of the piezoelectric ceramic in this system, the eccentricity adjustment of the mirror to be adjusted is realized. After the eccentricity of the lens to be adjusted is adjusted to meet the requirements of the optimal design, glue is injected through the corresponding injection hole on the lens to completely fix the lens to be adjusted.

本发明的镜片偏心调整方法由于采用了位移控制精度极高的压电陶瓷作为执行器件,可以实现行程为数微米、精度为亚微米级的镜片偏心调整。以期实现镜片误差之间的相互补偿,使整个镜头成像质量获得最优效果。 The lens eccentric adjustment method of the present invention uses piezoelectric ceramics with extremely high displacement control precision as an actuator, and can realize lens eccentric adjustment with a stroke of several microns and a precision of sub-micron level. In order to achieve mutual compensation between lens errors, so that the imaging quality of the entire lens can be optimal.

Claims (3)

1. the optical lens eccentricity of glasses lens Method of Adjustment of submicron order control accuracy, it is characterized in that: the method is used eccentricity of glasses lens adjustment System, by centerscope universal stage (1), camera lens to be assembled (2), piezoelectric ceramics supporting seat (3), piezoelectric ceramics (4), eccentricity of glasses lens adjustment nail (5), the eccentric reflection image of lens surface is measured assembly (7) composition, be placed in the control accuracy with sub-micron under piezoelectric ceramics (4) the alive control outside on piezoelectric ceramics supporting seat (3) and drive eccentricity of glasses lens adjustment nail (5), and then adjust the eccentric position of eyeglass to be adjusted (6), the measurement of simultaneously measuring assembly (7) by rotation and the eccentric reflection image of lens surface of centerscope universal stage (1) accurately obtains the eccentric position of eyeglass to be adjusted (6), coordinate optical design analysis software, until wait the offset of adjusting eyeglass (6) adjust to meet optimal design and require after thoroughly fixing eyeglass to be adjusted (6) of injecting glue again.
2. optical lens eccentricity of glasses lens Method of Adjustment according to claim 1, is characterized in that: piezoelectric ceramics (4), supporting seat (3) and eccentric adjust nail (5) each one the bias of a direction of totally three part compositions adjust execution architecture; Totally four groups of symmetries of such bias adjustment execution architecture is arranged on the four direction for the treatment of eccentric eyeglass.
3. optical lens eccentricity of glasses lens Method of Adjustment according to claim 1, it is characterized in that: the eccentricity values of measuring one by one each lens surface by the eccentric reflection image measurement assembly of lens surface (7), according to the test eccentricity values of each eyeglass, eccentricity values is input to together with whole optical parameter to optical design software, using the offset of eyeglass to be adjusted (6) as variable, optimize whole lens imaging quality, obtain the eccentric value of best eyeglass to be adjusted (6), according to this eccentric value, by controlling the driving voltage value of piezoelectric ceramics (4), realize the offset adjustment of eyeglass to be adjusted (6).
CN201410276144.XA 2014-06-19 2014-06-19 Eccentric adjustment method of optical lens with submicron order control precision Pending CN104062771A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109343189A (en) * 2018-11-21 2019-02-15 北京遥感设备研究所 A conformal optical head cover bonding device and assembling method
CN110531531A (en) * 2019-09-27 2019-12-03 昆明北方红外技术股份有限公司 The Method of Adjustment of Cassegrain optical system primary and secondary reflecting mirror
CN113290378A (en) * 2021-04-15 2021-08-24 西安理工大学 Roundness adjusting device of precise arc guide rail based on piezoelectric ceramics

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60150016A (en) * 1984-01-17 1985-08-07 Ricoh Co Ltd Adjusting and assembling device for lens system
US5521764A (en) * 1994-01-14 1996-05-28 Jenoptik Gmbh Device for lateral adjustment of lenses in a high-performance lens system
CN203502681U (en) * 2013-10-21 2014-03-26 中国科学院西安光学精密机械研究所 Cylindrical mirror assembly gluing equipment
CN103713370A (en) * 2012-10-09 2014-04-09 南京理工大学 Method for installing and adjusting near infrared large-sized long focal length lens by use of three-coordinate measuring instrument

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60150016A (en) * 1984-01-17 1985-08-07 Ricoh Co Ltd Adjusting and assembling device for lens system
US5521764A (en) * 1994-01-14 1996-05-28 Jenoptik Gmbh Device for lateral adjustment of lenses in a high-performance lens system
CN103713370A (en) * 2012-10-09 2014-04-09 南京理工大学 Method for installing and adjusting near infrared large-sized long focal length lens by use of three-coordinate measuring instrument
CN203502681U (en) * 2013-10-21 2014-03-26 中国科学院西安光学精密机械研究所 Cylindrical mirror assembly gluing equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109343189A (en) * 2018-11-21 2019-02-15 北京遥感设备研究所 A conformal optical head cover bonding device and assembling method
CN110531531A (en) * 2019-09-27 2019-12-03 昆明北方红外技术股份有限公司 The Method of Adjustment of Cassegrain optical system primary and secondary reflecting mirror
CN113290378A (en) * 2021-04-15 2021-08-24 西安理工大学 Roundness adjusting device of precise arc guide rail based on piezoelectric ceramics

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Application publication date: 20140924