CN104483104A - Spectral response analysis system for photoelectric detector - Google Patents

Abstract

The invention discloses a photodetector spectral response analysis system. The photodetector spectral response analysis system includes: a controllable monochromatic light source, which is used to output a fixed-frequency monochromatic light wave in a continuously adjustable manner within a certain wavelength band; a detector room, which is used to obtain reference photodetectors and waiting Measuring the spectral response signal of the photodetector to the monochromatic light wave; and a control device for controlling the controllable monochromatic light source and the detector chamber, and receiving the spectral response signal to generate the relative spectrum of the photodetector to be measured response curve. The spectral response analysis system of the photodetector of the invention improves the design of the light source, and realizes continuous and narrow-band output of outgoing light waves within a certain band. Therefore, in the prior art solution, the technical problem of low test accuracy due to the accumulation effect caused by the wide bandwidth of the transmitted light wave is solved.

Description

A Photodetector Spectral Response Analysis System

technical field

The invention relates to the technical field of photodetectors, in particular to a photodetector spectral response analysis system.

Background technique

The spectral response (Spectral Response) reflects the relationship between the photodetector and the irradiation wavelength λ, and is a basic performance parameter of the photodetector device. As a photosensitive sensing device, the photodetector also has different response characteristics to irradiated light waves of different wavelengths λ.

For the spectral response of the image sensor, the broadband filter method is mostly used for testing at present. The light wave emitted from the irradiating light source is projected onto the photodetector under test after passing through the filter. Due to the wavelength selectivity of the filter, only the light waves within the central wavelength of the filter and within a certain bandwidth nearby can pass through. Detect the output value of the detector under the irradiation of the light wave of the above wavelength, and compare the output value of the standard detector, so as to obtain the spectral responsivity of the tested detector at this wavelength. Continuously select filters with different central wavelengths to obtain the spectral response curve of the detector within a spectral band.

The biggest disadvantage of the existing technology is that the bandwidth of the filter is relatively wide. When the irradiated light wave passes through the filter, the transmitted light wave includes not only the central wavelength of the filter, but also other nearby wavelengths. For example, the commonly used visible light filter with a center wavelength of 550nm usually has a wavelength range of ±20nm to ±100nm. Therefore, the detector output obtained by detection is the cumulative effect of light waves in this small wavelength band, so the detection accuracy is low.

In addition, in order to obtain the spectral response curve, it is necessary to continuously replace the optical filter, and constantly switch between the standard detector and the tested detector for comparison. Operational differences often result in errors in the mechanical precision of the light spot alignment, which will also cause errors in the test results.

It is therefore desirable to have a photodetector spectral response analysis system that overcomes or at least alleviates one or more of the above-mentioned deficiencies of the prior art.

Contents of the invention

The object of the present invention is to provide a photodetector spectral response analysis system to overcome or at least alleviate one or more of the above-mentioned defects of the prior art.

To achieve the above object, the present invention provides a photodetector spectral response analysis system, said photodetector spectral response analysis system comprising:

The controllable monochromatic light source is used to output monochromatic light waves with a fixed frequency in a continuously adjustable manner within a certain wavelength band;

a detector chamber, which includes at least one reference photodetector and a photodetector to be measured, the at least one reference photodetector and the photodetector to be measured are used to detect and output the spectral response signal of the monochromatic light wave; and

The control device is used to provide system power, control the controllable monochromatic light source and the detector chamber, and receive a spectral response signal to generate a relative spectral response curve of the photodetector to be tested.

Preferably, the photodetector spectral response analysis system further includes a collimating optical path, the collimating optical path is arranged between the controllable monochromatic light source and the detector chamber, and is used for monochromatic output of the controllable monochromatic light source. The divergence angle of the colored light wave can be adjusted.

Preferably, the photodetector spectral response analysis system further includes a damped vibration isolation platform as a horizontal base of the photodetector spectral response analysis system.

Preferably, the controllable monochromatic light source includes a bromine tungsten lamp and a deuterium lamp.

Preferably, the controllable monochromatic light source includes an optical chopper, which is connected to the control device, and performs chopping modulation on the incident light wave according to a set frequency, and modulates the continuous light wave into a monochromatic light wave with a fixed frequency. light waves, and output the fixed frequency to the control device for use with a lock-in amplifier in the control device.

Preferably, the controllable monochromatic light source further includes a filter wheel, and on the optical path, the filter wheel is located downstream of the optical chopper for eliminating multi-stage spectrum.

Preferably, the filter wheel is connected to the control device, and can automatically replace the filter according to the set working wavelength band of the light source.

Preferably, the detector chamber includes a diaphragm and an optical attenuator for controlling the intensity of incident light.

Preferably, the detector chamber includes a stepping motor, the stepping motor is controlled by the control device, and the automatic driving actuator switches the samples to be irradiated.

The spectral response analysis system of the photodetector of the present invention improves the design of the light source, and realizes the continuous output of outgoing light waves in a certain band. Therefore, in the prior art solution, the technical problem of low test accuracy due to the accumulation effect caused by the wide bandwidth of the transmitted light wave is solved.

Description of drawings

FIG. 1 is a schematic structural diagram of a photodetector spectral response analysis system according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of the principles of the photodetector spectral response analysis system shown in FIG. 1 .

Reference signs:

1 Controllable monochromatic light source 18 imaging concave mirror 2 Collimated light path 19 Flat reflective grating 3 detector room 31 aperture 4 control device 32 optical attenuator 5 Damping vibration isolation platform 33 half mirror 11 light source controller 34 Monitor optical path 12 Reflector 35 First Reference Detector Sample Stage 13 75W bromine tungsten lamp 36 Second Reference Detector Sample Stage 14 30W deuterium lamp 37 Photodetector sample stage to be tested 15 Optical chopper 38 Precision stepper motor 16 filter wheel 39 Precision horizontal guide rail 17 collimating concave mirror 310 Overall obscura

Detailed ways

In order to make the objectives, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described in more detail below in conjunction with the drawings in the embodiments of the present invention. In the drawings, the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The described embodiments are some, but not all, embodiments of the invention. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

The photodetector spectral response analysis system shown in FIG. 1 includes: a controllable monochromatic light source 1 , a collimated optical path 2 , a detector chamber 3 , a control device 4 , and a damping vibration isolation platform 5 .

The controllable monochromatic light source 1 is used to output a fixed-frequency monochromatic light wave whose wavelength is continuously adjustable within a certain wavelength band. The collimating optical path 2 is arranged between the controllable monochromatic light source 1 and the detector chamber 3, and is used to adjust the divergence angle of the monochromatic light wave so that the outgoing beam is a parallel and uniform beam. The detector chamber 3 is used to detect the spectral response of the reference detector and the photodetector to be tested to the monochromatic light wave. The control device 4 is used for controlling the controllable monochromatic light source 1, the collimating light path 2, and the detector chamber 3, and receiving the spectral response signal to generate a relative spectral response curve of the photodetector to be tested. The damping and vibration-isolation platform 5 is used as a system horizontal base for carrying the controllable monochromatic light source 1 and the detector chamber 3, and isolating the impact of vibration on the optical system.

The controllable monochromatic light source 1 is one of the cores of the photodetector spectral response analysis system, which includes at least one light source covering a certain irradiated light wavelength range; the design principle of the controllable monochromatic light source 1 in a specific embodiment of the present invention is as follows: Figure 2 shows. In this embodiment, the controllable monochromatic light source 1 mainly includes 9 parts: a light source controller 11, a reflector 12, a 75W bromine tungsten lamp 13, a 30W deuterium lamp 14, an optical chopper 15, a filter wheel 16, a quasi- Straight concave mirror 17, imaging concave mirror 18 and plane reflective grating 19.

The light source controller 11 is connected to the control device 4 through a power supply and a data cable, receives user data and outputs a control signal for controlling and selecting one of the 75W bromine tungsten lamp 13 and the 30W deuterium lamp 14 as a light source, and controlling the selected light source output light intensity. Specifically, the light intensity of the light source can be controlled by controlling the power supply current of the light source. The current intensity can be adjusted between the rated maximum current and the minimum operating current of the selected light source.

The wavelength range of the irradiated light output by the 75W bromine tungsten lamp 13 is in the visible light band and the near infrared band (usually 400nm to 2500nm). The output radiation wavelength range of the 30W deuterium lamp 14 is in the ultraviolet band (usually 190nm to 400nm). Both the 75W bromine tungsten lamp 13 and the 30W deuterium lamp 14 work under the control of the light source controller 11, and the wavelength of light irradiated by the above light sources can cover 190nm to 2500nm. It can be understood that the types and quantities of the light sources are not limited to the above types and quantities, and can be selected and replaced as required.

The outgoing light of the light source is reflected by the reflector 12 and then changes the optical path to propagate to the optical chopper 15 .

The optical chopper 15 is also connected to the control device 4 through a cable, receives the control signal of the control device 4, and performs chopping modulation on the incident light wave according to the frequency set by the user, modulates the continuous light wave into a light wave with a fixed frequency, and converts the The fixed frequency is output to the control device 4 for use in cooperation with the lock-in amplifier in the control device 4.

The modulated light waves sequentially pass through the filter wheel 16 and the incident slit, and then enter the subsequent light splitting path. Here the filter wheel 16 is mainly used to eliminate multi-level spectrum. The filter wheel 16 is connected to the control device 4 through a data cable, and can automatically replace the filter according to the user-set light source working band output by the control device 4 . The filter wheel is a filter combination composed of different filters (with different central wavelengths and bandwidths). According to the setting of the incident light wavelength during the test, the corresponding filter can be automatically or manually selected, rotated and covered to On the clear aperture, the multi-order spectrum in the outgoing light wave is eliminated.

After passing through the filter wheel 16, the light wave enters the spectroscopic device through the incident slit. The beam splitting device adopts the classic Czerny-Turner (Czerny-Turner) optical path structure, which is composed of a collimating concave mirror 17, a plane reflection grating 19, and an imaging concave mirror 18, etc. The incident slit is located at the focal plane of the collimating concave mirror 17 , and light waves passing through the incident slit are reflected by the collimating concave surface 17 to form parallel beams and projected onto the plane reflective grating 19 . After being dispersed by the plane reflective grating 19 and reflected by the imaging concave mirror 18, the monochromatic light wave signal is finally obtained on the exit slit.

After the incident light wave passes through the spectroscopic device composed of collimating concave mirror 17, planar reflection grating 19, imaging concave mirror 18, etc., it will be decomposed into monochromatic light waves of different wavelengths and form a continuous spectrum within a certain band. The slit width of the incident slit and the exit slit is directly proportional to the spectral line width, the smaller the slit width, the smaller the spectral line width in the light wave, and the better the monochromaticity of the light wave.

The light wave signal output by the controllable monochromatic light source 1 enters the collimated optical path 2 through the exit slit. The collimating optical path 2 is mainly used to control the divergence angle of the optical signal, which is beneficial to subsequent optical path transmission. Specifically, the outgoing light beam is emitted from the outgoing slit with a certain divergence angle. When the propagation path is long, the light beam will diverge, the beam width will become larger, and the light intensity will become weaker. After adding the collimated optical path, the divergence angle can be reduced, so that within a certain optical path, the parallel and uniform beam output can be maintained, which is beneficial to the optical path transmission.

The detector chamber 3 is also the core component of the photodetector spectral response analysis system. The detector chamber 3 mainly includes: an aperture 31, an optical attenuator 32, a half mirror 33, a monitoring optical path 34, a first reference detector sample stage 35, a second reference detector sample stage 36, an optical detector to be tested Sample table 37 , precision stepping motor 38 , precision horizontal guide rail 39 , and overall dark box 310 .

Optionally, the first reference detector sample stage 35 can be a reference Si detector, and the second reference detector sample stage 36 can be a reference InGaSn detector; if the optical detector to be tested is made of semiconductor Si If it is made of InGaSn material, then compare it with the reference Si detector; if it is made of InGaSn material, then select the reference InGaSn detector as the reference object.

The overall dark box 310 provides an optical dark room for the system, and its interior is coated with a black light-absorbing material for absorbing light reflection and scattering. In addition, the integral dark box 310 provides optical and electrical installation interfaces. There is an operation door on the front of the integral obscura 310, and there is a light inside, which is used for sample loading and unloading and equipment debugging. During the test, the light and the operation door should be turned off to keep the inside of the box airtight and opaque.

After the monochromatic light wave enters the overall obscura 310 through the collimated optical path 2, it is reflected by the total mirror to change the optical path, and enters the diaphragm 31 and the optical attenuator 32 successively. The above two components are used to control the intensity of incident light.

A diaphragm is an optical element with a light hole. Generally, it is in the shape of a circular sheet with a clear aperture in the center, and the aperture size can be adjusted by the knob. The light intensity can be adjusted by zooming the clear aperture. If the clear aperture is large, the light passing through is strong, otherwise it is weak.

An optical attenuator is an optical component with a fixed attenuation ratio.

Through the above two components, the light intensity of the incident light is attenuated mainly according to needs, so as to prevent the light intensity from being too strong, so that the photogenerated electrons of the photodetector are always in a saturated state.

The attenuated monochromatic light beam passes through the half mirror 33, and the transmitted light beam is directly projected onto the sample stage. The sample stage includes: a first reference detector sample stage 35 , a second reference detector sample stage 36 , and an optical detector sample stage 37 to be tested. It should be pointed out that the reference detector is selected according to the material characteristics of the photodetector to be tested and the detected wavelength band.

In the present invention, the measured data is the relative spectral response, that is, under the same light intensity and monochromatic light wave irradiation of the same wavelength, the output signal of the photodetector under test and the reference photodetector (note: it needs to be verified and calibrated by the national standard organization) , have accurately obtained its absolute spectral response curve) and compare the output signals to obtain its relative value. Therefore, when testing, it is necessary to select a reference photodetector according to the material characteristics of the photoelectric sensor to be tested (such as Si detector, InGaSn detector), and then under the same conditions, successively irradiate the reference detector and the detector to be tested. to obtain its relative value.

For example, if the optical detector sample stage 37 to be tested is a Si-based photodetector, it is compared with a standard reference Si detector; similarly, if it is an InGaSn-based photodetector, it is compared with a standard reference InGaSn detector. It should also be pointed out that the standard reference photodetector device is not limited to the above-mentioned materials and types, and can be selected according to needs, but all need to be calibrated in advance. The photodetector samples are all clamped on the sample stage, installed on the precision horizontal guide rail 39, controlled by the precision stepping motor 38, and can be electrically controlled to move back and forth in the horizontal direction. In the vertical direction, manually operate the coarse/fine adjustment knob to adjust the height of the sample.

Optical alignment is required prior to testing. Open the operating door of the detector room and the lighting inside the box. Ambient light and monochromatic light spots are reflected by the reflective surface of the half-mirror and enter the monitoring light path. The monitoring optical path includes a CCD camera and lens assembly, which collects spot and sample images in real time, which can be output to the collection control device for real-time display through data cables. According to the real-time image, the user can control the motor to move in the horizontal direction, and manually adjust the vertical height, so that the monochromatic light spot is vertically projected onto the photodetector and covers the photosensitive area of the photodetector. After the height adjustment is completed, lock the adjustment knob, close the lighting inside the box and the operation door. Once the optical alignment is completed, the horizontal distance L between the reference detector sample stage and the tested detector sample stage is determined. If the step size of the precision stepping motor is m, the number of motor steps n is calculated by the following formula:

n=L/m.

During the test, the stepper motor is operated by the control device to realize the reciprocating movement of the distance L in the horizontal direction, and realize the switching of the irradiated samples, so as to obtain the following data:

The current output I _{s_light} (λ) of the photodetector to be tested under the condition of illumination, the current output I _{s_dark} (λ) of the photodetector to be tested under the condition of no illumination, the current output I _{r_light} ( λ) and the current output I _{r_dark} (λ) of the reference photodetector in the absence of light.

The photodetector spectral response analysis system of the present invention integrates an electronically controlled sample stage and an optical monitoring system to realize sample switching and electronically controlled focusing, thereby reducing mechanical precision errors caused by manual operations and their adverse effects on test results.

The control device 4 is used for controlling the controllable monochromatic light source 1, the collimating light path 2, and the detector chamber 3, and receiving the spectral response signal to generate a relative spectral response curve of the photodetector to be tested. In one embodiment, the control device 4 is realized in the form of a control cabinet, which is composed of a regulated power supply module, a lock-in amplifier, and an industrial computer. The stabilized power supply module supplies power to the controllable monochromatic light source 1 , the detector chamber 3 and each component in the control device 4 . The lock-in amplifier collects the photogenerated current output of the reference photodetector and the photogenerated current of the photodetector to be tested. It should refer to the optical chopper signal for phase locking and signal amplification. The collected and digitized results are submitted to the industrial computer for conversion and curve drawing. At the same time, the industrial computer is connected with the controllable monochromatic light source and various components in the detector chamber through UART, USB, Ethernet and other interfaces. Send control signals and receive image data. And provide a user interface for system parameter setting, data display, chart drawing, etc.

The damping vibration isolation platform 5 is used as the horizontal base of the whole system. The damping vibration isolation platform 5 provides a horizontal reference and a fixed mechanism for installation, and isolates and reduces the impact of vibration on system testing.

The technical solution of the present invention brings the following beneficial effects. The wavelength of the light source is continuously optional, and the bandwidth of the monochromatic light is small. Using a variety of light sources and spectroscopic devices, a continuous wave spectrum distribution in the wavelength range from 190nm to 2500nm has been obtained, the center wavelength accuracy can reach ±0.25nm, and the resolution can reach 0.4nm, which is far superior to the monochromatic filter test scheme. .

The sample to be tested is clamped on the sample stage, and can be reciprocated in the horizontal dimension by a precision stepping motor and an actuator. During the test, the sample to be irradiated can be automatically switched, replacing manual operation, and the execution efficiency and accuracy are greatly improved.

The data acquisition results are displayed and calculated in real time, and the parameter curves are drawn in real time. The calculation results and curve distribution can be obtained after the band scanning is completed, and the analysis efficiency is greatly improved.

It should be pointed out that the wavelength, power, quantity and other parameters of the light source in the controllable monochromatic light source 1 can be selected according to the test needs. For example, when testing infrared photodetectors, the infrared band light source is selected. Standard reference photodetectors are not limited to the above materials and types, and can be selected according to the test wavelength band and detector material, but all need to be calibrated in advance. The data interaction between the power supply/control module and the user's PC in the system can be realized through interfaces such as UART/USB/Ethernet/optical fiber.

The test principle of the photodetector spectral response analysis system of the present invention is as follows. The photodetector device produces a current output I(λ) under the irradiation of light waves with a wavelength of λ and an illumination intensity of E(λ), then the absolute spectral response s(λ) at this time is:

$\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; I</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}{\mathrm{<span\; class="notranslate">\; E.</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}$

In the actual test, in order to test accurately, the output I _dark (λ) of the photodetector under the condition of no light is often collected once, and the output I _light (λ) under the condition of light is collected again, and the difference between the two is used △I(λ )=I _light (λ)-I _dark (λ) as the actual effective output.

$\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; \&Delta;I</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}{\mathrm{<span\; class="notranslate">\; E.</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}<span\; class="notranslate">\; =</span>\frac{{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; the\; light</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; dark</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}{\mathrm{<span\; class="notranslate">\; E.</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}$

For convenience, the absolute spectral response is often normalized:

$\mathrm{<span\; class="notranslate">\; S</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>\frac{\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}{{\mathrm{<span\; class="notranslate">\; the\; s</span>}}_{\mathrm{<span\; class="notranslate">\; max</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}<span\; class="notranslate">\; =</span>\mathrm{<span\; class="notranslate">\; \&kappa;</span>}<span\; class="notranslate">\; \&Center\; Dot;</span>\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>$

in $\mathrm{\&kappa;}=\frac{1}{{\mathrm{the\; s}}_{\max }\left(\mathrm{\&lambda;}\right)},$

For the reference photodetector (note: it needs to be calibrated by a national special measurement unit in advance to obtain its spectral response curve), its absolute spectral response curve can be expressed as:

S _r (λ) = κ _r s _r (λ),

For the photodetector to be tested, its absolute spectral response curve can be expressed as:

S _s (λ) = κ _s s _s (λ),

Then we can know:

$S_{\mathrm{the\; s}}\left(\mathrm{\&lambda;}\right)=\frac{{\mathrm{\&kappa;}}_{\mathrm{the\; s}}\&CenterDot;{\mathrm{the\; s}}_{\mathrm{the\; s}}\left(\mathrm{\&lambda;}\right)}{{\mathrm{\&kappa;}}_r\&CenterDot;{\mathrm{the\; s}}_r\left(\mathrm{\&lambda;}\right)}\&Center\; Dot;S_r\left(\mathrm{\&lambda;}\right)$ or

${\mathrm{<span\; class="notranslate">\; S</span>}}_{\mathrm{<span\; class="notranslate">\; the\; s</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; =</span>{\mathrm{<span\; class="notranslate">\; \&kappa;</span>}}_{\mathrm{<span\; class="notranslate">\; c</span>}}<span\; class="notranslate">\; \&Center\; Dot;</span>\frac{{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; \_</span>\mathrm{<span\; class="notranslate">\; the\; light</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; the\; s</span>}<span\; class="notranslate">\; \_</span>\mathrm{<span\; class="notranslate">\; dark</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}{{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; \_</span>\mathrm{<span\; class="notranslate">\; the\; light</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span><span\; class="notranslate">\; -</span>{\mathrm{<span\; class="notranslate">\; I</span>}}_{\mathrm{<span\; class="notranslate">\; r</span>}<span\; class="notranslate">\; \_</span>\mathrm{<span\; class="notranslate">\; dark</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>}<span\; class="notranslate">\; \&Center\; Dot;</span>{\mathrm{<span\; class="notranslate">\; S</span>}}_{\mathrm{<span\; class="notranslate">\; r</span>}}<span\; class="notranslate">\; (</span>\mathrm{<span\; class="notranslate">\; \&lambda;</span>}<span\; class="notranslate">\; )</span>$

in While the S _r (λ) of the reference photodetector is known, the photodetector to be tested can be obtained by measuring I _{s_light} (λ), I _{s_dark} (λ), I _{r_light} (λ), and I _{r_dark} (λ). relative spectral response curve.

Finally, it should be pointed out that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit them. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: they can still modify the technical solutions described in the aforementioned embodiments, or perform equivalent replacements for some of the technical features; and these The modification or replacement does not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims (10)

1. a photo detector spectral response analysis system to be measured, is characterized in that, comprising:

Controlled monochromatic source (1), for exporting the monochromatic optical wave of fixed frequency in certain wave band in continuously adjustable mode;

Probe chamber (3), it comprises at least one reference light electric explorer and photodetector to be measured, and at least one reference light electric explorer described and photodetector to be measured are for detecting the spectral response signal of described monochromatic optical wave and exporting; And

Control device (4), for controlling described controlled monochromatic source (1) and probe chamber (3), and receives described spectral response signal, to generate the relative spectral response curve of photodetector to be measured.

2. photo detector spectral response analysis system as claimed in claim 1, it is characterized in that, comprise collimated light path (2) further, described collimated light path (2) is arranged between controlled monochromatic source (1) and probe chamber (3), and the angle of divergence for the monochromatic optical wave exported described controlled monochromatic source (1) adjusts.

3. photo detector spectral response analysis system as claimed in claim 1, it is characterized in that, comprise damping isolation platform (5) further, it is as horizontal base station, for carrying described controlled monochromatic source (1) and probe chamber (3).

4. photo detector spectral response analysis system as claimed in claim 1, it is characterized in that, described controlled monochromatic source (1) comprises at least one light source.

5. photo detector spectral response analysis system as claimed in claim 4, it is characterized in that, described controlled monochromatic source (1) comprises optical chopper (15), described optical chopper (15) is connected with control device (4), and according to the setpoint frequency that described control device (4) exports, chopping modulation is carried out to the light wave that at least one light source described exports, continuous light wave is modulated to the monochromatic optical wave of fixed frequency, and export described fixed frequency to control device (4), for with the lock-in amplifier in described control device (4) with the use of.

6. photo detector spectral response analysis system as claimed in claim 5, it is characterized in that, described controlled monochromatic source (1) comprises filter wheel sheet (16) further, in light path, filter wheel sheet (16) is positioned at the downstream of optical chopper (15), for eliminating multiple order spectrum; The light source works wave band of its setting that can export in control device (4), changes optical filter automatically.

7. photo detector spectral response analysis system as claimed in claim 6, it is characterized in that, described controlled monochromatic source (1) comprises light-dividing device further, its light wave for light source is launched, resolve into the monochromatic optical wave of different wave length, and form the continuous spectrum in certain wave band.

8. photo detector spectral response analysis system as claimed in claim 1, it is characterized in that, described probe chamber (3) also comprises diaphragm (31) and optical attenuator (32), for carrying out incident light intensity control.

9. photo detector spectral response analysis system as claimed in claim 8, it is characterized in that, described probe chamber (3) also comprises stepper motor, and described stepper motor is controlled by described control device (4), and automatically drives topworks to switch illuminated sample.

10. photo detector spectral response analysis system as claimed in claim 1, it is characterized in that, when testing, described control device (4) controls described probe chamber (3) and obtains current output value without reference light electric explorer and photodetector to be measured under the current output value of reference light electric explorer and photodetector to be measured under light conditions and described monochromatic optical wave light conditions.