CN110823370A - Ultraviolet weak light detector radiation sensitivity calibration device based on photon counting method - Google Patents
Ultraviolet weak light detector radiation sensitivity calibration device based on photon counting method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
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- G01J2001/442—Single-photon detection or photon counting
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/444—Compensating; Calibrating, e.g. dark current, temperature drift, noise reduction or baseline correction; Adjusting
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Abstract
The invention belongs to the technical field of optical metering, and particularly relates to a photon counting method-based ultraviolet weak light detector radiation sensitivity calibration device, which realizes calibration of an ultraviolet weak light detector to be calibrated by adopting an ultraviolet light source, a filtering and attenuating component, a quartz lens, a grating monochromator, an integrating sphere, a micro-current meter, a standard ultraviolet photon counter and a computer. The calibration device adopts the laser-driven white light source as the ultraviolet light source, and provides the ultraviolet weak light detector radiation sensitivity calibration device based on the photon counting method, so that the accurate calibration of the ultraviolet weak light detector radiation sensitivity parameters is realized, and the calibration device has a wide application prospect.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a radiation sensitivity calibration device of an ultraviolet weak light detector based on a photon counting method.
Background
In recent years, with the development of science and technology, ultraviolet optical technology is widely applied to the fields of deep space exploration, biomedicine, plasma physics and the like. The ultraviolet detector is a core device in ultraviolet optical application, and the development of the ultraviolet detector is also paid more and more attention by countries and organizations, so that the measurement of the performance of the ultraviolet detector is very important.
The radiation sensitivity of the ultraviolet detector refers to the response capability of the detector to radiation with a specific ultraviolet wavelength, and is an important parameter reflecting the use performance of the detector. For the radiation sensitivity parameter calibration of the ultraviolet weak light detector, no unified calibration device is seen at home and abroad at present, and corresponding test devices are established by part of research institutions according to the requirements of the research institutions. However, without a uniform calibration device, the test results of the same ultraviolet detector on different devices are very easy to be different, and the performance of the detector cannot be accurately judged.
In "optical precision engineering" Vol.25, 6 th, Baidaofeng et al published the article "measurement error of ultraviolet photocathode radiation sensitivity". Two measuring methods are designed, an ultraviolet cathode radiation sensitivity measuring device is built, and the problem of measuring errors of ultraviolet cathode radiation sensitivity is discussed. One is to adopt the measuring method based on ultraviolet narrowband filter and radiation illuminometer, the measuring device is made up of ultraviolet light source (deuterium lamp/low-pressure mercury lamp + constant current stabilized voltage supply), narrowband filter, neutral density filter, testing camera bellows, direct current high-voltage power supply, micro current meter and testing clamp; the other is a measuring method based on a grating monochromator and a radiation power meter, and the measuring device comprises an ultraviolet light source (a deuterium lamp and a constant-current stabilized power supply), the grating monochromator, a conducting optical fiber, a neutral density filter, a testing camera bellows, a direct-current high-voltage power supply, a micro-current meter, a testing clamp and the like. The influence factors of the two methods for measuring the radiation sensitivity of the ultraviolet cathode are analyzed, the error conditions of the two measuring methods are compared, and the conclusion is that: the error of the ultraviolet cathode radiation sensitivity measurement result obtained by measurement by adopting the grating monochrometer and the radiation power meter is small.
However, both methods in this document have the following disadvantages:
(1) both methods mentioned herein involve constant current regulated power supplies for the UV light source to ensure stability of the light source during measurement. However, when a photon-level ultraviolet weak light detector is used for measurement, small changes of a light source can cause great influence on a measurement result, and the constant-current voltage-stabilized power supply cannot meet the requirement of the measurement result on the stability of the light source.
(2) The method mentioned in the article is suitable for measuring the radiation sensitivity of the ultraviolet photocathode, and can not realize the calibration of the radiation sensitivity parameters of the photon-level ultraviolet weak light detector. In addition, from the point of view of metrology, the reliability of the measurement results must be guaranteed. The two methods in the text only have measurement results and analysis of the results, and have no corresponding means by which the reliability of the measurement results can be proven.
Disclosure of Invention
Technical problem to be solved
The technical problem to be solved by the invention is as follows: in order to solve the problems in the prior art, how to provide a radiation sensitivity calibration device for an ultraviolet weak light detector.
(II) technical scheme
In order to solve the technical problem, the invention provides a device for calibrating the radiation sensitivity of an ultraviolet weak light detector based on a photon counting method, which comprises the following components: the system comprises an ultraviolet light source 1, a filtering and attenuating component, a quartz lens 3, a grating monochromator 4, an integrating sphere 5, a micro-current meter 6, a standard ultraviolet photon counter 7 and a computer 9;
the ultraviolet light source 1, the filtering and attenuating component, the quartz lens 3, the grating monochromator 4 and the center of the integrating sphere 5 form a main optical axis of the calibrating device;
the light filtering and attenuating component is positioned between the ultraviolet light source 1 and the quartz lens 3 and comprises a light filter 2-1, an attenuating plate group 2-2 and a variable aperture diaphragm 2-3; the optical filter 2-1 is used for constraining a white light source output by the ultraviolet light source 1 to an ultraviolet band, and the attenuation sheet group 2-2 and the variable aperture diaphragm 2-3 are used for coarsely and finely adjusting the radiation intensity incident to the quartz lens 3 so as to control the ultraviolet radiation intensity incident to the standard ultraviolet photon counter 7 and the ultraviolet weak light detector 8 to be calibrated;
the quartz lens 3 converges and emits the attenuated ultraviolet light to an incident slit of a grating monochromator 4;
the grating monochromator 4 is provided with an incident slit and an emergent slit, and the ultraviolet light is decomposed into monochromatic ultraviolet light with various wavelengths by rotating the grating, so that the monochromatic ultraviolet light with the set wavelength is obtained and is output to the integrating sphere 5 through the emergent slit;
the integrating sphere 5 is used for further attenuating and homogenizing monochromatic ultraviolet light with a set wavelength, and a micro-galvanometer 6 is arranged at an outlet of the integrating sphere 5 and used for monitoring the change condition of the radiation illumination incident to a standard ultraviolet photon counter 7 or an ultraviolet weak light detector 8 to be calibrated in real time;
the standard ultraviolet photon counter 7 is used for converting the received ultraviolet radiation into photon numbers and inputting the photon numbers into the computer 9, and the computer 9 is used for calculating the ultraviolet radiation sensitivity values according to the photon numbers.
The radiation sensitivity calibration of the ultraviolet weak light detector 8 to be calibrated adopts a method of comparing with a standard ultraviolet photon counter 7, and the method specifically comprises the following steps:
step 1: a standard ultraviolet photon counter 7 is placed in a light path, and the center of a detection surface of the standard ultraviolet photon counter is aligned with a main optical axis of the calibration device;
step 2: starting an ultraviolet light source 1 and a micro-current meter 6, monitoring the reading of the micro-current meter 6, and starting a standard ultraviolet photon counter 7 after the reading is stable;
and step 3: measuring the radiation sensitivity standard value S of the standard ultraviolet photon counter 7λ: regulatingThe grating monochromator 4 outputs monochromatic ultraviolet light with specific wavelength, and the computer 9 calculates to obtain the standard value S of the ultraviolet radiation sensitivity of the standard ultraviolet photon counter 7 under the specific wavelengthλ；
And 4, step 4: moving the standard ultraviolet photon counter 7 out of the light path, moving the ultraviolet weak light detector 8 to be corrected into the light path, enabling the detection surface of the ultraviolet weak light detector to be positioned at the same position as the detection surface of the standard ultraviolet photon counter 7, and opening the ultraviolet weak light detector 8 to be corrected;
and 5: measuring the radiation sensitivity measurement S of the ultraviolet weak light detector 8 to be calibratedν: at the moment, the output wavelength of the grating monochromator 4 is not changed, and the computer 9 calculates to obtain the ultraviolet radiation sensitivity standard value S of the ultraviolet weak light detector 8 to be calibrated under the specific wavelengthν；
Step 6: calculating a correction factor c of the ultraviolet weak light detector to be corrected under the wavelength;
and 7: and (3) changing the output wavelength of the grating monochromator 4, repeating the steps 3 to 6, and calculating the radiation sensitivity correction factor of the ultraviolet weak light detector 8 to be corrected under different compensations.
Wherein, in the step 6,
when the radiation sensitivity standard value of the standard ultraviolet photon counter 7 and the radiation sensitivity measured value of the ultraviolet weak light detector 8 to be calibrated are measured under different wavelengths, a method of obtaining an average value by multiple times of measurement is adopted to improve the measurement precision, and the measurement times when the standard value and the measured value are obtained are kept consistent.
In the radiation sensitivity parameter calibration process, the attenuation sheet group 2-2 and the variable aperture diaphragm 2-3 are adjusted according to the measurement ranges of the standard ultraviolet photon counter 7 and the ultraviolet weak light detector 8 to be calibrated.
Wherein, the ultraviolet light source 1 adopts a laser-driven white light source.
The laser of the ultraviolet light source 1 drives the white light source, the coverage spectrum range of the white light source is 170 nm-2100 nm, and the white light source has stable output in an ultraviolet band.
Wherein the attenuation coefficient of the attenuation sheet group 2-2 ranges from 0.1 to 4.0.
The grating monochromator 4 comprises 150mm, 300mm and 500mm of selectable focal lengths, the resolution is 0.1nm, and the wavelength accuracy is +/-0.2 nm.
Wherein the integrating sphere 5 has a diameter of 200mm and an opening diameter of 20 mm.
(III) advantageous effects
Compared with the prior art, the invention has the following beneficial effects:
(1) aiming at the 1 st point defect in the prior art, the invention adopts a laser-driven white light source with higher stability as an ultraviolet light source to realize the calibration of the radiation sensitivity parameters of the ultraviolet weak light detector.
Specifically, xenon is used as a main carrier for light emitted by the laser-driven white light source, the laser-driven white light source is used as an ultraviolet light source, the traditional deuterium lamp and constant-current voltage-stabilized power supply mode is replaced, the output stability is higher, and the requirement on the stability of the measurement result is met in the radiation sensitivity calibration of the photon-level ultraviolet weak light detector.
(2) Aiming at the 2 nd defect in the prior art, the invention adopts a standard ultraviolet photon counter to realize the comparison and measurement of the radiation sensitivity of the ultraviolet weak light detector, constructs the ultraviolet weak light detector radiation sensitivity calibration device based on a photon counting method, and can realize the calibration of the photon-level weak ultraviolet weak light detector radiation sensitivity.
Drawings
FIG. 1 is a schematic diagram of a radiation sensitivity calibration device of an ultraviolet weak light detector based on a photon counting method.
Detailed Description
In order to make the objects, contents, and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
In order to solve the above technical problem, the present invention provides a device for calibrating radiation sensitivity of a weak ultraviolet light detector based on a photon counting method, as shown in fig. 1, the device comprises: the system comprises an ultraviolet light source 1, a filtering and attenuating component, a quartz lens 3, a grating monochromator 4, an integrating sphere 5, a micro-current meter 6, a standard ultraviolet photon counter 7 and a computer 9;
the ultraviolet light source 1, the filtering and attenuating component, the quartz lens 3, the grating monochromator 4 and the center of the integrating sphere 5 form a main optical axis of the calibrating device;
the light filtering and attenuating component is positioned between the ultraviolet light source 1 and the quartz lens 3 and comprises a light filter 2-1, an attenuating plate group 2-2 and a variable aperture diaphragm 2-3; the optical filter 2-1 is used for constraining a white light source output by the ultraviolet light source 1 to an ultraviolet band, and the attenuation sheet group 2-2 and the variable aperture diaphragm 2-3 are used for coarsely and finely adjusting the radiation intensity incident to the quartz lens 3 so as to control the ultraviolet radiation intensity incident to the standard ultraviolet photon counter 7 and the ultraviolet weak light detector 8 to be calibrated;
the quartz lens 3 converges and emits the attenuated ultraviolet light to an incident slit of a grating monochromator 4;
the grating monochromator 4 is provided with an incident slit and an emergent slit, and the ultraviolet light is decomposed into monochromatic ultraviolet light with various wavelengths by rotating the grating, so that the monochromatic ultraviolet light with the set wavelength is obtained and is output to the integrating sphere 5 through the emergent slit;
the integrating sphere 5 is used for further attenuating and homogenizing monochromatic ultraviolet light with a set wavelength, and a micro-galvanometer 6 is arranged at an outlet of the integrating sphere 5 and used for monitoring the change condition of the radiation illumination incident to a standard ultraviolet photon counter 7 or an ultraviolet weak light detector 8 to be calibrated in real time;
the standard ultraviolet photon counter 7 is used for converting the received ultraviolet radiation into photon numbers and inputting the photon numbers into the computer 9, and the computer 9 is used for calculating the ultraviolet radiation sensitivity values according to the photon numbers.
The radiation sensitivity calibration of the ultraviolet weak light detector 8 to be calibrated adopts a method of comparing with a standard ultraviolet photon counter 7, and the method specifically comprises the following steps:
step 1: a standard ultraviolet photon counter 7 is placed in a light path, and the center of a detection surface of the standard ultraviolet photon counter is aligned with a main optical axis of the calibration device;
step 2: starting an ultraviolet light source 1 and a micro-current meter 6, monitoring the reading of the micro-current meter 6, and starting a standard ultraviolet photon counter 7 after the reading is stable;
and step 3: measuring the radiation sensitivity standard value S of the standard ultraviolet photon counter 7λ: adjusting the grating monochromator 4 to output monochromatic ultraviolet light with a specific wavelength, and calculating by the computer 9 to obtain the standard value S of the ultraviolet radiation sensitivity of the standard ultraviolet photon counter 7 under the specific wavelengthλ；
And 4, step 4: moving the standard ultraviolet photon counter 7 out of the light path, moving the ultraviolet weak light detector 8 to be corrected into the light path, enabling the detection surface of the ultraviolet weak light detector to be positioned at the same position as the detection surface of the standard ultraviolet photon counter 7, and opening the ultraviolet weak light detector 8 to be corrected;
and 5: measuring the radiation sensitivity measurement S of the ultraviolet weak light detector 8 to be calibratedν: at the moment, the output wavelength of the grating monochromator 4 is not changed, and the computer 9 calculates to obtain the ultraviolet radiation sensitivity standard value S of the ultraviolet weak light detector 8 to be calibrated under the specific wavelengthν；
Step 6: calculating a correction factor c of the ultraviolet weak light detector to be corrected under the wavelength;
and 7: and (3) changing the output wavelength of the grating monochromator 4, repeating the steps 3 to 6, and calculating the radiation sensitivity correction factor of the ultraviolet weak light detector 8 to be corrected under different compensations.
Wherein, in the step 6,
when the radiation sensitivity standard value of the standard ultraviolet photon counter 7 and the radiation sensitivity measured value of the ultraviolet weak light detector 8 to be calibrated are measured under different wavelengths, a method of obtaining an average value by multiple times of measurement is adopted to improve the measurement precision, and the measurement times when the standard value and the measured value are obtained are kept consistent.
In the radiation sensitivity parameter calibration process, the attenuation sheet group 2-2 and the variable aperture diaphragm 2-3 are adjusted according to the measurement ranges of the standard ultraviolet photon counter 7 and the ultraviolet weak light detector 8 to be calibrated.
Wherein, the ultraviolet light source 1 adopts a laser-driven white light source.
The laser of the ultraviolet light source 1 drives the white light source, the coverage spectrum range of the white light source is 170 nm-2100 nm, and the white light source has stable output in an ultraviolet band.
Wherein the attenuation coefficient of the attenuation sheet group 2-2 ranges from 0.1 to 4.0.
The grating monochromator 4 comprises 150mm, 300mm and 500mm of selectable focal lengths, the resolution is 0.1nm, and the wavelength accuracy is +/-0.2 nm.
Wherein the integrating sphere 5 has a diameter of 200mm and an opening diameter of 20 mm.
Example 1
In this embodiment, as shown in fig. 1, the apparatus for calibrating radiation sensitivity of a weak ultraviolet light detector based on a photon counting method includes: the device comprises an ultraviolet light source 1, a filtering and attenuating component, a quartz lens 3, a grating monochromator 4, an integrating sphere 5, a micro-current meter 6, a standard ultraviolet photon counter 7, an ultraviolet weak light detector 8 to be calibrated and a computer 9.
The center of the ultraviolet light source 1, the filtering and attenuating component, the quartz lens 3, the grating monochromator 4 and the integrating sphere 5 form a main optical axis of the calibration device;
the ultraviolet light source 1 adopts EQ-99X-CAL-NA type laser to drive a white light source, the coverage spectrum range is (170-2100) nm, the output light stability is within 1% in 10000 hours, and stable output is achieved in an ultraviolet band.
The light filtering and attenuating assembly is positioned between the laser driving white light source 1 and the quartz lens 3 and comprises a light filter 2-1, an attenuating plate group 2-2 and a variable aperture diaphragm 2-3, the light filter 2-1 restricts the laser driving white light source to an ultraviolet band, and the attenuating plate group 2-2 and the variable aperture diaphragm 2-3 perform coarse adjustment and fine adjustment on the radiation intensity incident to the quartz lens so as to control the ultraviolet radiation intensity incident to the standard ultraviolet photon counter 7 and the ultraviolet weak light detector 8 to be calibrated. The attenuation coefficient of the attenuation sheet group 2-2 is from 0.1 to 4.0.
The quartz lens 3 converges and emits the attenuated ultraviolet light to the incident slit 4-1 of the grating monochromator 4.
The grating monochromator 4 is provided with an incident slit 4-1 and an emergent slit 4-2, ultraviolet light is decomposed into monochromatic ultraviolet light with various wavelengths by rotating the grating, and the monochromatic ultraviolet light with the specified wavelength is output to the integrating sphere 5 through the emergent slit 4-2; the grating monochromator 4 is selected from various focal lengths with model number Omni-lambda, 150mm, 300mm, 500mm and the like, the resolution is 0.1nm, and the wavelength accuracy is +/-0.2 nm.
The integrating sphere 5 is used for further attenuating and homogenizing the monochromatic ultraviolet light; the diameter is 200mm, and the diameter of the opening is designed to be 20 mm.
The micro-current meter 6 is arranged at the outlet of the integrating sphere 5 and used for monitoring the change condition of the radiation illumination incident to the standard ultraviolet photon counter 7 or the ultraviolet weak light detector 8 to be calibrated in real time, the power output range of the micro-current meter 6 is-1000V-0V, the current detection precision is 0.01nA, and the current test repeatability is better than 3%.
The standard ultraviolet photon counter 7 converts the received ultraviolet radiation into photon number and inputs the photon number to the computer 9, and the computer 9 software calculates the ultraviolet radiation sensitivity value according to the photon number.
The method for calibrating the radiation sensitivity of the ultraviolet weak light detector 8 to be calibrated and comparing the radiation sensitivity with a standard ultraviolet photon counter 7 comprises the following specific steps:
step 1: a standard ultraviolet photon counter 7 is placed in a light path, and the center of a detection surface of the standard ultraviolet photon counter is aligned with a main optical axis of the calibration device;
step 2: starting an ultraviolet light source 1 and a micro-current meter 6, and monitoring the reading of the micro-current meter until the reading is stable;
and step 3: measuring the radiation sensitivity standard value of the standard ultraviolet photon counter 7: adjusting an attenuation sheet group 2-2 and a variable aperture diaphragm 2-3 according to the measurement ranges of a standard ultraviolet photon counter 7 and an ultraviolet weak light detector 8 to be calibrated, adjusting a grating monochromator 4 to output monochromatic ultraviolet light with a specific wavelength, and calculating by software to obtain an ultraviolet radiation sensitivity standard value of the standard ultraviolet photon counter 7 at the wavelength by adopting a method of measuring for multiple times and averaging;
and 4, step 4: moving the standard ultraviolet photon counter 7 out of the light path, moving the ultraviolet weak light detector 8 to be corrected into the light path, enabling the detection surface of the ultraviolet weak light detector to be positioned at the same position as the detection surface of the standard ultraviolet photon counter 7, and opening the ultraviolet weak light detector 8 to be corrected;
and 5: measuring the radiation sensitivity measured value of the ultraviolet weak light detector 8 to be calibrated: at the moment, the output wavelength of the grating monochromator is unchanged, the measurement times are consistent with the standard value of the radiation sensitivity of the measurement standard ultraviolet photon counter 7, and the standard value of the ultraviolet radiation sensitivity of the ultraviolet weak light detector 8 to be calibrated under the wavelength is obtained through software calculation;
step 6: calculating a correction factor of the ultraviolet weak light detector 8 to be corrected under the wavelength;
and 7: and (3) changing the output wavelength of the grating monochromator 4, repeating the steps 3-6, and calculating the radiation sensitivity correction factor of the ultraviolet weak light detector 8 to be corrected under different compensations.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.
Claims (10)
1. A radiation sensitivity calibration device of an ultraviolet weak light detector based on a photon counting method is characterized by comprising the following components: the system comprises an ultraviolet light source (1), a filtering and attenuating component, a quartz lens (3), a grating monochromator (4), an integrating sphere (5), a micro-current meter (6), a standard ultraviolet photon counter (7) and a computer (9);
the center of the ultraviolet light source (1), the light filtering and attenuating component, the quartz lens (3), the grating monochromator (4) and the integrating sphere (5) form a main optical axis of the calibration device;
the light filtering and attenuating assembly is positioned between the ultraviolet light source (1) and the quartz lens (3), and comprises a light filter (2-1), an attenuating plate group (2-2) and a variable aperture diaphragm (2-3); the optical filter (2-1) is used for restricting a white light source output by the ultraviolet light source (1) to an ultraviolet band, and the attenuation sheet group (2-2) and the variable aperture diaphragm (2-3) are used for roughly adjusting and finely adjusting the radiation intensity incident to the quartz lens (3) so as to control the ultraviolet radiation intensity incident to the standard ultraviolet photon counter (7) and the ultraviolet weak light detector (8) to be corrected;
the quartz lens (3) converges the attenuated ultraviolet light and transmits the converged ultraviolet light to the grating monochromator (4) to transmit the converged ultraviolet light to the incident slit;
the grating monochromator (4) is provided with an incident slit and an emergent slit, and ultraviolet light is decomposed into monochromatic ultraviolet light with various wavelengths by rotating the grating, so that the monochromatic ultraviolet light with the set wavelength is obtained and is output to the integrating sphere (5) through the emergent slit;
the integrating sphere (5) is used for further attenuating and homogenizing monochromatic ultraviolet light with a set wavelength, and a micro-current meter (6) is arranged at the outlet of the integrating sphere (5) and used for monitoring the change condition of the radiation illumination incident to a standard ultraviolet photon counter (7) or an ultraviolet weak light detector (8) to be calibrated in real time;
the standard ultraviolet photon counter (7) is used for converting the received ultraviolet radiation into photon numbers and inputting the photon numbers into the computer (9), and the computer (9) is used for calculating the ultraviolet radiation sensitivity values according to the photon numbers.
2. The ultraviolet weak light detector radiation sensitivity calibration device based on the photon counting method as claimed in claim 1, characterized in that the radiation sensitivity calibration of the ultraviolet weak light detector (8) to be calibrated adopts a method of comparing with a standard ultraviolet photon counter (7), and the specific steps are as follows:
step 1: a standard ultraviolet photon counter (7) is placed in a light path, and the center of a detection surface of the standard ultraviolet photon counter is aligned with a main optical axis of the calibration device;
step 2: starting an ultraviolet light source (1) and a micro-current meter (6), monitoring the reading of the micro-current meter (6), and starting a standard ultraviolet photon counter (7) after the reading is stable;
and step 3: measuring the radiation sensitivity standard value S of a standard ultraviolet photon counter (7)λ: the grating monochromator (4) is adjusted to output monochromatic ultraviolet light with specific wavelength, and the computer (9) calculates to obtain the standard value S of the ultraviolet radiation sensitivity of the standard ultraviolet photon counter (7) under the specific wavelengthλ；
And 4, step 4: moving the standard ultraviolet photon counter (7) out of the light path, moving the ultraviolet weak light detector (8) to be corrected into the light path, enabling the detection surface of the ultraviolet weak light detector to be positioned at the same position as the detection surface of the standard ultraviolet photon counter (7), and opening the ultraviolet weak light detector (8) to be corrected;
and 5: measuring the radiation sensitivity measurement S of the UV weak light detector (8) to be calibratedν: at the moment, the output wavelength of the grating monochromator (4) is not changed, and the computer (9) calculates to obtain the ultraviolet radiation sensitivity standard value S of the ultraviolet weak light detector (8) to be calibrated under the specific wavelengthν；
Step 6: calculating a correction factor c of the ultraviolet weak light detector to be corrected under the wavelength;
and 7: changing the output wavelength of the grating monochromator (4), repeating the steps 3-6, and calculating the radiation sensitivity correction factor of the ultraviolet weak light detector (8) to be corrected under different compensations.
3. The apparatus for calibrating radiation sensitivity of a weak ultraviolet light detector based on photon counting according to claim 1, wherein in the step 6,
4. the apparatus for calibrating radiation sensitivity of a weak ultraviolet photodetector based on photon counting according to claim 1, wherein when the standard value of radiation sensitivity of the standard ultraviolet photon counter (7) and the measured value of radiation sensitivity of the weak ultraviolet photodetector (8) to be calibrated are measured at different wavelengths, the method of obtaining the average value by multiple measurements is adopted to improve the measurement accuracy, and the number of measurements when the standard value and the measured value are obtained is kept consistent.
5. The ultraviolet weak light detector radiation sensitivity calibration device based on the photon counting method as claimed in claim 1, characterized in that in the radiation sensitivity parameter calibration process, the attenuation sheet group (2-2) and the variable aperture diaphragm (2-3) are adjusted according to the measurement ranges of the standard ultraviolet photon counter (7) and the ultraviolet weak light detector (8) to be calibrated.
6. The apparatus for calibrating radiation sensitivity of a weak ultraviolet light detector based on photon counting method according to claim 1, wherein the ultraviolet light source (1) adopts a laser-driven white light source.
7. The apparatus for calibrating radiation sensitivity of a weak ultraviolet photodetector based on photon counting according to claim 6, wherein the laser of the ultraviolet light source (1) drives a white light source which can cover a spectral range of 170nm to 2100nm and has stable output in the ultraviolet band.
8. The apparatus for calibrating radiation sensitivity of a weak ultraviolet photodetector based on photon counting according to claim 1, wherein the attenuation coefficient of said attenuation sheet group (2-2) ranges from 0.1 up to 4.0.
9. The apparatus for calibrating radiation sensitivity of a weak ultraviolet photodetector based on photon counting according to claim 1, wherein the grating monochromator (4) comprises a plurality of focal lengths of 150mm, 300mm and 500mm, the resolution is 0.1nm, and the wavelength accuracy is ± 0.2 nm.
10. The apparatus for calibrating radiation sensitivity of a weak ultraviolet photodetector based on a photon counting method according to claim 1, wherein the integrating sphere (5) has a diameter of 200mm and an opening diameter of 20 mm.
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| CN114383723A (en) * | 2022-01-15 | 2022-04-22 | 上海市计量测试技术研究院 | A kind of LED ultraviolet radiation standard source and its control method |
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