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CN104347775B - LED chip with graphical N electrode - Google Patents

LED chip with graphical N electrode Download PDF

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Publication number
CN104347775B
CN104347775B CN201410508383.3A CN201410508383A CN104347775B CN 104347775 B CN104347775 B CN 104347775B CN 201410508383 A CN201410508383 A CN 201410508383A CN 104347775 B CN104347775 B CN 104347775B
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electrode
barrier layer
led chip
graphical
central area
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CN104347775A (en
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张琼
吕孟岩
童玲
张宇
李起鸣
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Enraytek Optoelectronics Co Ltd
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Enraytek Optoelectronics Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/84Coatings, e.g. passivation layers or antireflective coatings

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Abstract

本专利发明涉及一种具有图形化N电极的LED芯片,由于LED芯片之间的边缘区域处形成有反光极弱的阻挡层,将N电极扩展至阻挡层的正上方,一方面由于N电极扩展在光极弱的阻挡层上,不影响反射镜的反射效率;另一方面扩展的N电极能够使电流分布更加均匀,提高LED芯片的发光和散热的均匀性。

This patent invention relates to an LED chip with a patterned N electrode. Since a barrier layer with extremely weak light reflection is formed at the edge area between the LED chips, the N electrode is extended to the top of the barrier layer. On the one hand, due to the expansion of the N electrode On the barrier layer with extremely weak light, it does not affect the reflection efficiency of the mirror; on the other hand, the expanded N electrode can make the current distribution more uniform, and improve the uniformity of the light emission and heat dissipation of the LED chip.

Description

具有图形化N电极的LED芯片LED chips with patterned N electrodes

技术领域technical field

本发明涉及LED制造领域,尤其涉及一种具有图形化N电极的LED芯片。The invention relates to the field of LED manufacturing, in particular to an LED chip with patterned N electrodes.

背景技术Background technique

随着LED在照明领域的逐步应用,市场对白光LED光效的要求越来越高,GaN基垂直结构LED具有良好的散热能力,能够承受大电流注入,这样一个垂直结构LED芯片可以相当于几个正装结构芯片,折合成本只有正装结构的几分之一。因此,GaN基垂直结构LED是市场所向,是半导体照明发展的必然趋势。与传统的平面结构LED相比,垂直结构LED具有许多优点:垂直结构LED两个电极分别在LED的两侧,电流几乎全部垂直流过外延层,没有横向流动的电流,电流分布均匀,产生的热量减少;采用键合与剥离的方法将导热不好的蓝宝石衬底去除,换成导电性好并且具有高热导率的衬底,可有效地散热;n-GaN层为出光面,该层具有一定的厚度,便于制作表面微结构,以提高光提取效率。总之,与传统平面结构相比,垂直结构在出光、散热等方面具有明显的优势。With the gradual application of LEDs in the field of lighting, the market has higher and higher requirements for the light efficiency of white LEDs. GaN-based vertical structure LEDs have good heat dissipation capabilities and can withstand large current injections. Such a vertical structure LED chip can be equivalent to several The conversion cost is only a fraction of the formal structure chip. Therefore, GaN-based vertical structure LEDs are the direction of the market and an inevitable trend in the development of semiconductor lighting. Compared with the traditional planar structure LED, the vertical structure LED has many advantages: the two electrodes of the vertical structure LED are on both sides of the LED, the current almost all flows vertically through the epitaxial layer, there is no lateral flow of current, the current distribution is uniform, and the resulting The heat is reduced; the sapphire substrate with poor thermal conductivity is removed by bonding and stripping, and replaced with a substrate with good electrical conductivity and high thermal conductivity, which can effectively dissipate heat; the n-GaN layer is the light-emitting surface, which has A certain thickness is convenient for making surface microstructures to improve light extraction efficiency. In short, compared with the traditional planar structure, the vertical structure has obvious advantages in light extraction and heat dissipation.

随着半导体技术的高速发展,LED的内部量子效率能达到90%以上,而外部量子效率的提高并不显著,受到诸多因素的影响,如LED结构,电极形状,电极材料,电流扩展层厚度等,成为制约LED发光效率提高的主导因素。相对于其他提高LED亮度的方法(如高反射膜,衬底剥离,表面粗化等)而言,最易操作的是对芯片的电极形状进行优化,电极形状对光输出影响很大,如果电流扩散不充分、不均匀,会导致出光减少,通过合理设计电极的形状可以提高LED的发光效率。With the rapid development of semiconductor technology, the internal quantum efficiency of LED can reach more than 90%, while the improvement of external quantum efficiency is not significant, which is affected by many factors, such as LED structure, electrode shape, electrode material, current spreading layer thickness, etc. , has become the dominant factor restricting the improvement of LED luminous efficiency. Compared with other methods to improve LED brightness (such as high reflective film, substrate peeling, surface roughening, etc.), the easiest to operate is to optimize the electrode shape of the chip, which has a great influence on the light output. If the current Insufficient and uneven diffusion will lead to a decrease in light output, and the luminous efficiency of the LED can be improved by rationally designing the shape of the electrode.

理论上,在离电极越远的地方,电流越小,亮度越低。对于现有垂直电极结构技术,传统认为电极形状为“十”字形或“米”字形状的LED芯片的I-V性能最好。但“十”字形或“米”字形电极在芯片中心部分,由于电极比较集中,电流也相对比较集中,这样导致LED电流分布不够均匀,尤其是到台面的边缘部分,电流分布极不均匀,使得边缘部分的亮度很小。在中心圆形电极周围及插指附近,电流拥挤,在芯片边缘部分,电流小。电流趋势从中间到边缘越来越小,亮度也是越来越弱。In theory, the farther away from the electrode, the smaller the current and the lower the brightness. For the existing vertical electrode structure technology, it is traditionally believed that the I-V performance of LED chips with electrode shapes in the shape of "ten" or "m" is the best. However, the "ten" or "m"-shaped electrodes are in the center of the chip. Since the electrodes are relatively concentrated, the current is also relatively concentrated, which leads to uneven distribution of LED current, especially to the edge of the table. The current distribution is extremely uneven, making The brightness of the edge part is very small. Around the central circular electrode and near the fingers, the current is crowded, and at the edge of the chip, the current is small. The current trend is getting smaller and smaller from the middle to the edge, and the brightness is getting weaker and weaker.

一般在制作垂直结构LED时,通常使用金属银作为反射镜,但是由于Ag的易扩散,会制作一层阻挡层(barrier)包裹住反射镜,每一个芯片周围会有大概5μm~10μm区域没有反射层(如图1),在图1中,反射镜20被阻挡层10包围,由于反射镜20用于反射光线,而阻挡层10由于材料限制,反射光线极弱,导致该区域反射光线会有很大部分损失,而在蒸镀上一般的“十”字形或“米”字形N电极后,此区域电流分布也不均匀,对出光贡献也大大减小。Generally, when making vertical structure LEDs, metal silver is usually used as the reflector, but due to the easy diffusion of Ag, a barrier layer (barrier) will be made to wrap the reflector, and there will be about 5 μm to 10 μm around each chip without reflection layer (as shown in Figure 1), in Figure 1, reflector 20 is surrounded by barrier layer 10, because reflector 20 is used for reflecting light, and barrier layer 10 is due to material limitation, and reflected light is extremely weak, causes this region to reflect light A large part of the loss, and after the general "ten" or "m" shaped N electrode is evaporated, the current distribution in this area is not uniform, and the contribution to light emission is also greatly reduced.

发明内容Contents of the invention

本发明的目的在于提供一种具有图形化N电极的LED芯片,能够利用边缘阻挡层反光弱的缺陷,在其上方形成N电极,使电流分布更加均匀,提高发光效率。The purpose of the present invention is to provide an LED chip with a patterned N electrode, which can utilize the defect of weak light reflection of the edge barrier layer to form an N electrode on it, so as to make the current distribution more uniform and improve the luminous efficiency.

为了实现上述目的,本发明提出了一种具有图形化N电极的LED芯片,包括:反射镜、阻挡层、外延层及N电极,所述反射镜形成于所述阻挡层内并暴露出反射镜的一表面,所述外延层形成于所述反射镜及阻挡层的表面上,所述N电极形成于所述外延层的表面,所述N电极包括中心区域和插指,一部分插指形成在所述阻挡层正上方的外延层表面,所述插指全部或者部分覆盖在所述阻挡层的正上方,所述插指与所述中心区域相连。In order to achieve the above object, the present invention proposes a LED chip with a patterned N electrode, including: a reflector, a barrier layer, an epitaxial layer and an N electrode, the reflector is formed in the barrier layer and exposes the reflector The epitaxial layer is formed on the surface of the mirror and the barrier layer, the N electrode is formed on the surface of the epitaxial layer, the N electrode includes a central region and fingers, and a part of the fingers are formed on On the surface of the epitaxial layer directly above the barrier layer, the insert fingers completely or partially cover directly above the barrier layer, and the insert fingers are connected to the central region.

进一步的,所述外延层包括依次形成的P-GaN、量子阱和N-GaN,所述P-GaN形成在所述反射镜及阻挡层的表面上,所述N电极形成于所述N-GaN的表面。Further, the epitaxial layer includes P-GaN, quantum wells and N-GaN formed in sequence, the P-GaN is formed on the surface of the mirror and the barrier layer, and the N electrode is formed on the N- GaN surface.

进一步的,所述插指为长条形,沿着所述中心区域呈点对称排列。Further, the insert fingers are elongated and arranged point-symmetrically along the central area.

进一步的,所述插指形成田字形或八边形。Further, the insertion fingers form a square or an octagon.

进一步的,所述插指的宽度范围是3μm~10μm。Further, the width range of the insert fingers is 3 μm˜10 μm.

进一步的,所述中心区域为圆形或多边形。Further, the central area is circular or polygonal.

进一步的,所述中心区域为圆形时,所述中心区域的直径范围是50μm-120μm;所述中心区域为多边形时,所述中心区域的边长范围是30μm-100μm。Further, when the central region is circular, the diameter of the central region ranges from 50 μm to 120 μm; when the central region is polygonal, the side length of the central region ranges from 30 μm to 100 μm.

进一步的,所述N电极的材质为Cr、Al、Ti、Pt、Au的一种或多种。Further, the material of the N electrode is one or more of Cr, Al, Ti, Pt, Au.

与现有技术相比,本发明的有益效果主要体现在:由于LED芯片之间的边缘区域处形成有反光极弱的阻挡层,将N电极扩展至阻挡层的正上方,一方面由于N电极扩展在反光极弱的阻挡层上,不影响反射镜的反射效率;另一方面扩展的N电极能够使电流分布更加均匀,提高LED芯片的发光和散热的均匀性。Compared with the prior art, the beneficial effects of the present invention are mainly reflected in: since the barrier layer with extremely weak light reflection is formed at the edge area between the LED chips, the N electrode is extended to the top of the barrier layer, on the one hand, because the N electrode The expansion on the barrier layer with extremely weak reflection does not affect the reflection efficiency of the mirror; on the other hand, the expanded N electrode can make the current distribution more uniform and improve the uniformity of the LED chip's light emission and heat dissipation.

附图说明Description of drawings

图1为现有技术中阻挡层包围反射镜的结构示意图;FIG. 1 is a schematic structural view of a barrier layer surrounding a reflector in the prior art;

图2为本发明第一实施例中LED芯片的N电极的俯视图;2 is a top view of the N electrode of the LED chip in the first embodiment of the present invention;

图3为沿图2中A-A’向的剖面示意图;Fig. 3 is a schematic sectional view along A-A' in Fig. 2;

图4为本发明第二实施例中LED芯片的N电极的俯视图。Fig. 4 is a top view of the N electrode of the LED chip in the second embodiment of the present invention.

具体实施方式detailed description

下面将结合示意图对本发明的具有图形化N电极的LED芯片进行更详细的描述,其中表示了本发明的优选实施例,应该理解本领域技术人员可以修改在此描述的本发明,而仍然实现本发明的有利效果。因此,下列描述应当被理解为对于本领域技术人员的广泛知道,而并不作为对本发明的限制。The LED chip with patterned N electrodes of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is represented, and it should be understood that those skilled in the art can modify the present invention described here and still implement the present invention. Beneficial effects of the invention. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

为了清楚,不描述实际实施例的全部特征。在下列描述中,不详细描述公知的功能和结构,因为它们会使本发明由于不必要的细节而混乱。应当认为在任何实际实施例的开发中,必须做出大量实施细节以实现开发者的特定目标,例如按照有关系统或有关商业的限制,由一个实施例改变为另一个实施例。另外,应当认为这种开发工作可能是复杂和耗费时间的,但是对于本领域技术人员来说仅仅是常规工作。In the interest of clarity, not all features of an actual implementation are described. In the following description, well-known functions and constructions are not described in detail since they would obscure the invention with unnecessary detail. It should be appreciated that in the development of any actual embodiment, numerous implementation details must be worked out to achieve the developer's specific goals, such as changing from one embodiment to another in accordance with system-related or business-related constraints. Additionally, it should be recognized that such a development effort might be complex and time consuming, but would nevertheless be merely a routine undertaking for those skilled in the art.

在下列段落中参照附图以举例方式更具体地描述本发明。根据下面说明和权利要求书,本发明的优点和特征将更清楚。需说明的是,附图均采用非常简化的形式且均使用非精准的比例,仅用以方便、明晰地辅助说明本发明实施例的目的。In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.

实施例一Embodiment one

请参考图2和图3,在本实施例中,提出了一种具有图形化N电极的LED芯片,包括:反射镜110、阻挡层100、外延层及N电极300,所述反射镜110形成于所述阻挡层100内并暴露出反射镜110的一表面,所述外延层形成于所述反射镜110及阻挡层100的表面上,所述N电极300形成于所述外延层的表面,所述N电极300包括中心区域310和插指320,一部分插指320形成在所述阻挡层100正上方的外延层表面,所述插指320全部或者部分覆盖在所述阻挡层100正上方外延层的表面,所述插指320与所述中心区域310相连。Please refer to FIG. 2 and FIG. 3. In this embodiment, a LED chip with a patterned N electrode is proposed, including: a reflector 110, a barrier layer 100, an epitaxial layer, and an N electrode 300. The reflector 110 forms In the barrier layer 100 and exposing a surface of the mirror 110, the epitaxial layer is formed on the surface of the mirror 110 and the barrier layer 100, and the N electrode 300 is formed on the surface of the epitaxial layer, The N-electrode 300 includes a central region 310 and an insertion finger 320 , a part of the insertion finger 320 is formed on the surface of the epitaxial layer directly above the barrier layer 100 , and the insertion finger 320 completely or partially covers the epitaxial layer directly above the barrier layer 100 layer, the fingers 320 are connected to the central region 310 .

具体的,请参考图3,所述外延层包括依次形成的P-GaN210、量子阱220和N-GaN230,所述P-GaN210形成在所述反射镜110及阻挡层100的表面上,所述N电极300形成于所述N-GaN230的表面,其中,图2中并未示出具体的外延层。Specifically, please refer to FIG. 3, the epitaxial layer includes P-GaN210, quantum well 220 and N-GaN230 formed in sequence, the P-GaN210 is formed on the surface of the mirror 110 and the barrier layer 100, the The N electrode 300 is formed on the surface of the N-GaN 230 , wherein the specific epitaxial layer is not shown in FIG. 2 .

在本实施例中,所述插指320为长条形,沿着所述中心区域310呈点对称排列,即所述插指320形成田字形,具有一定直角,所述插指320的宽度范围是3μm~10μm,例如是5μm,由于阻挡层100的宽度通常为5μm~10μm,插指320可以全部或者部分覆盖在阻挡层100的正上方,这个可以根据工艺的需求来决定。In this embodiment, the insert fingers 320 are strip-shaped and arranged point-symmetrically along the central area 310, that is, the insert fingers 320 form a square shape with a certain right angle, and the width range of the insert fingers 320 is 3 μm to 10 μm, for example 5 μm, since the barrier layer 100 usually has a width of 5 μm to 10 μm, the interposer 320 can completely or partially cover the barrier layer 100 , which can be determined according to the requirements of the process.

在本实施例中,所述中心区域310为圆形,中心区域310的直径范围是50μm-120μm,例如是100μm;所述N电极的材质为Cr、Al、Ti、Pt、Au或类似金属的一种或多种。In this embodiment, the central region 310 is circular, and the diameter of the central region 310 ranges from 50 μm to 120 μm, such as 100 μm; the material of the N electrode is Cr, Al, Ti, Pt, Au or similar metals one or more.

在本实施例中,由于N电极包括插指320,能够使电流在N-GaN面分布的更加均匀,提高发光和发热,增加LED芯片的发光效率,此外,由于插指320形成在反光极弱的阻挡层100的正上方,不会遮挡较多的反射镜110的反射效率。In this embodiment, because the N electrode includes the fingers 320, the current can be distributed more uniformly on the N-GaN surface, the light emission and heat generation can be improved, and the luminous efficiency of the LED chip can be increased. Directly above the barrier layer 100 , the reflective efficiency of the mirror 110 will not be blocked more.

实施例二Embodiment two

在本实施例中,提出的具有图形化N电极的LED芯片是对实施例一的改进,不同之处在于,N电极300的插指320的形状为八边形,另一不同之处在与中心区域310的多边形,所述中心区域的边长范围是30μm-100μm,例如是60μm。其余均与实施例一相同,在此不作赘述,具体的可以参考实施例一。In this embodiment, the proposed LED chip with a patterned N electrode is an improvement on Embodiment 1, the difference lies in that the shape of the finger 320 of the N electrode 300 is octagonal, and another difference is that it is different from the The central area 310 is polygonal, and the side length of the central area is in the range of 30 μm-100 μm, for example, 60 μm. The rest are the same as those in Embodiment 1, and will not be repeated here. For details, please refer to Embodiment 1.

由于实施例一中的插指320为田字形,其拐角处有90°,造成该处的电流分布较为密集,使该区域附近的电流分布不均匀,一定程度上影响了发光的效率。因此,请参考图4(图4中也为示出具体的外延层),在本实施例中,将插指320由实施例一中的田字形修改为八边形,能够解决拐角处电流密集的现象,且减少遮挡的发光面积,使电流在N-GaN面分布的更加均匀,进一步的提高了发光效率。此外,一部分插指320依旧形成在不反射光的阻挡层100上,并未占用较多的反射镜100的反射面积。Since the insertion finger 320 in the first embodiment is in the shape of a square with a corner of 90°, the current distribution at this location is relatively dense, making the current distribution near this area uneven, which affects the luminous efficiency to a certain extent. Therefore, please refer to FIG. 4 (the specific epitaxial layer is also not shown in FIG. 4 ), in this embodiment, the insertion finger 320 is modified from the square shape in Embodiment 1 to an octagon, which can solve the current density at the corner. phenomenon, and reduce the blocked light-emitting area, so that the current distribution on the N-GaN surface is more uniform, and the luminous efficiency is further improved. In addition, a part of the fingers 320 are still formed on the blocking layer 100 that does not reflect light, and do not occupy much of the reflection area of the mirror 100 .

综上,在本发明实施例提供的具有图形化N电极的LED芯片中,由于LED芯片之间的边缘区域处形成有反光极弱的阻挡层,将N电极扩展至阻挡层的正上方,一方面由于N电极扩展在反光极弱的阻挡层上,不影响反射镜的反射效率;另一方面扩展的N电极能够使电流分布更加均匀,提高LED芯片的发光和散热的均匀性。To sum up, in the LED chips with patterned N electrodes provided by the embodiments of the present invention, since a barrier layer with extremely weak light reflection is formed at the edge region between LED chips, the N electrodes are extended to directly above the barrier layer. On the one hand, because the N electrode is extended on the barrier layer with extremely weak light reflection, it does not affect the reflection efficiency of the mirror; on the other hand, the extended N electrode can make the current distribution more uniform, and improve the uniformity of the LED chip's light emission and heat dissipation.

上述仅为本发明的优选实施例而已,并不对本发明起到任何限制作用。任何所属技术领域的技术人员,在不脱离本发明的技术方案的范围内,对本发明揭露的技术方案和技术内容做任何形式的等同替换或修改等变动,均属未脱离本发明的技术方案的内容,仍属于本发明的保护范围之内。The foregoing are only preferred embodiments of the present invention, and do not limit the present invention in any way. Any person skilled in the technical field, without departing from the scope of the technical solution of the present invention, makes any form of equivalent replacement or modification to the technical solution and technical content disclosed in the present invention, which does not depart from the technical solution of the present invention. The content still belongs to the protection scope of the present invention.

Claims (6)

1. a kind of LED chip with graphical N electrode, it is characterised in that including:Speculum, barrier layer, epitaxial layer and N electricity Pole, the speculum is formed in the barrier layer and exposes a surface of speculum, and the epitaxial layer is formed at described anti- On the surface for penetrating mirror and barrier layer, the N electrode is formed at the surface of the epitaxial layer, the N electrode include central area and Insert and refer to, the slotting finger-type of a part is into the epi-layer surface directly over the barrier layer, and the slotting finger is covered in whole or in part The surface of epitaxial layer directly over the barrier layer, the slotting finger is connected with the central area, and the slotting finger-type is into octagon.
2. there is the LED chip of graphical N electrode as claimed in claim 1, it is characterised in that the epitaxial layer is included successively P-GaN, SQW and the N-GaN of formation, the P-GaN formation is on the surface on the speculum and barrier layer, the N electrode It is formed at the surface of the N-GaN.
3. there is the LED chip of graphical N electrode as claimed in claim 1, it is characterised in that the width range of the slotting finger It is 3 μm~10 μm.
4. there is the LED chip of graphical N electrode as claimed in claim 1, it is characterised in that the central area is circle Or polygon.
5. there is the LED chip of graphical N electrode as claimed in claim 4, it is characterised in that the central area is circle When, the diameter range of the central area is 50 μm -120 μm;When the central area is polygon, the side of the central area Long scope is 30 μm -100 μm.
6. there is the LED chip of graphical N electrode as claimed in claim 1, it is characterised in that the material of the N electrode is Cr, Al, Ti, Pt, Au one or more.
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CN106972089B (en) * 2017-04-14 2023-09-22 华南理工大学 Straw-shaped N electrode and vertical structure LED chip
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