CN104344891A - Automatic light-intensity adjusting device for generalized ellipsometer and control method thereof - Google Patents
Automatic light-intensity adjusting device for generalized ellipsometer and control method thereof Download PDFInfo
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Abstract
本发明公开了一种广义椭偏仪光强自动调整装置及其控制方法。装置主要包括计算机、光谱仪、伺服电机控制器、直流伺服电机、增量式编码器和中性密度滤光片转盘。在广义椭偏仪硬件连接完成的情况下，根据光谱仪采集的光谱曲线是否饱和以及是否绝大部分在光谱仪线性响应区间来决定是否要转动直流伺服电机，从而带动中性密度滤波片转盘转动以切换中性密度滤波片来改变光源照射出来的光强大小。本发明可以实现对双旋转补偿器广义椭偏仪光强自动调整，且响应快速，操作简单。
The invention discloses a generalized ellipsometer light intensity automatic adjustment device and a control method thereof. The device mainly includes a computer, a spectrometer, a servo motor controller, a DC servo motor, an incremental encoder and a neutral density filter turntable. When the hardware connection of the generalized ellipsometer is completed, it is determined whether to rotate the DC servo motor according to whether the spectral curve collected by the spectrometer is saturated and whether most of it is in the linear response range of the spectrometer, so as to drive the neutral density filter turntable to switch Neutral density filters are used to change the intensity of light irradiated by the light source. The invention can realize the automatic adjustment of the light intensity of the generalized ellipsometer with double-rotating compensators, and has fast response and simple operation.
Description
Technical field
The invention belongs to the light path debugging field of broad sense ellipsometer, be specifically related to a kind of for dual rotary compensator broad sense ellipsometer light intensity automatic regulating apparatus and control method thereof.
Background technology
Based in the semiconductor nano-structure feature size fields of measurement of optical principle, ellipsometer is a kind of characteristic dimension measuring equipment the most common.It is a kind of universal optical surveying instrument utilizing polarisation of light characteristic to obtain testing sample information.Its ultimate principle is, by the polarizer, special elliptically polarized light is projected testing sample surface, by measuring the reflected light (or transmitted light) of testing sample, to obtain polarization state change (comprise amplitude ratio and phase differential) of polarized light before and after reflection (or transmission), and then therefrom extract the information of testing sample.The people such as the Collins of Pennsylvania State Univ-Univ Park USA (R.W.Collins et al., J.Opt.Soc.Am.A, Vol.16, pp.1997-2006,1999) propose dual rotary and compensate type broad sense ellipsometer measurement method, in this kind of ellipsometer structure, adopt two compensators rotated to realize the modulation and demodulation of the phase place of polarized light.In actual measurement process, it can measure spectrum scope wide, require low to environmental temperature stability, and measuring speed is fast.It can obtain normalized 4 × 4 rank Muller matrixes totally 15 parameters of tested sample in one-shot measurement simultaneously, and does not need to change measuring system configuration.Thus have a wide range of applications in semiconductor nano-structure feature size is measured.
Compensate in type broad sense ellipsometer system in dual rotary, spectrometer is used to the optical device that Measurement and analysis measures sample surfaces folded light beam.In spectrometer, the transfer principle of photodetector is: be first electric charge by photosensitive unit by converting photons, then be that voltage exports by charge conversion, namely output voltage size corresponds to measures light intensity magnitude (usually with counts counting in spectrometer).Spectrometer software kit can show be horizontal ordinate with wavelength, the Dynamic Two-dimensional figure that is ordinate with the light intensity received, can find that the light intensity at different wavelength points places is different.In some conditions, as broad sense ellipsometer will be applied in the surface measuring low reflectivity sample, so need the light source adopting light intensity larger, the light intensity at one or continuous multiple wavelength points place may cause the saturated of photodetector on spectrometer more than a maximal value, this can bring adverse influence to the observation of data and collection.Therefore certain mode must be taked to weaken the light intensity of all band (i.e. wavelength coverage 200-1200nm) wavelength as required.The method extensively adopted at present weakens light intensity with a diaphragm.
Summary of the invention
The object of the present invention is to provide a kind of light intensity automatic regulating apparatus for dual rotary compensator broad sense ellipsometer and control method thereof, the present invention can realize being weakened to the light intensity of all band wavelength the numerical value met the demands, and response fast, simple to operate.
A kind of light intensity automatic regulating apparatus for broad sense ellipsometer provided by the invention, it is characterized in that, this device comprises computing machine, spectrometer, servomotor controller, incremental encoder, DC servo motor and neutral density filter rotating disk;
Incremental encoder is arranged in DC servo motor; Neutral density filter rotating disk comprises the light hole neutral density filter different with multi-disc transmittance; Neutral density filter rotating disk is rotatably arranged on DC servo motor end face; DC servo motor is connected with computing machine by servomotor controller; Incremental encoder is connected with servomotor controller; Spectrometer is connected with computing machine by USB port;
Computing machine, for controlling the work of spectrometer, controls the motion of DC servo motor by servomotor controller; According to spectrometer collection to the whether saturated and curve of spectrum of the curve of spectrum whether determine whether rotating DC servo motor in spectrometer linear response interval, thus drive described neutral density filter plate dial rotation to switch neutral density filter plate to change light source irradiation light intensity magnitude out.
The control method of above-mentioned light intensity automatic regulating apparatus provided by the invention, comprises the steps:
1st step computing machine drives DC servo motor to return logic zero-bit by servomotor controller, the logic zero-bit of DC servo motor be configured such that light beam of light source just in time from the light hole of neutral density filter rotating disk through;
2nd step utilizes spectrometer to carry out spectrum data gathering according to the parameter arranged, and obtains the curve of spectrum, returns to computing machine by spectrometer;
3rd step computing machine judges that whether the curve of spectrum is saturated; If the curve of spectrum is unsaturated, proceed to the 5th step; If the curve of spectrum is saturated, then enter the 4th step;
4th step computing machine by servomotor controller drive DC servo motor turn to next neutral density filter place, even if light beam of light source by this neutral density filter to weaken light intensity, proceed to the 2nd step afterwards;
5th step judges the curve of spectrum, and whether major part is interval in linear response, if so, enters the 6th step, otherwise, proceed to the 4th step;
6th step does not need to weaken light intensity by neutral density filter, terminates adjustment.
Compare with the self-adjusting device of existing broad sense ellipsometer light intensity, light intensity automatic regulating apparatus provided by the invention with to the automatic control of DC servo motor for core, by determining whether DC servo motor will be rotated respective angles to realize the switching of neutral density filter to the analysis of spectrometer collection data, the light intensity magnitude that can realize spectrometer surface is received is the most reasonable, namely can not supersaturation also can not be too small and cannot analyze due to light intensity, better meet the linear response of spectrometer simultaneously.
This light intensity automatic regulating apparatus automatic response process speed is fast, precision is high, show excellent measuring repeatability and stability simultaneously, and compact overall structure, method of operating is simple, it is convenient to realize, and automatically to control and fields of measurement has wide application prospects at broad sense ellipsometer.
Accompanying drawing explanation
Fig. 1 is optical gauge light intensity automatic adjustment system structural representation;
Fig. 2 is neutral density filter turntable structure schematic diagram;
Fig. 3 is that dual rotary compensates type broad sense ellipsometer hardware connection structure schematic diagram;
Fig. 4 is control method schematic flow sheet provided by the invention;
The unsaturation curve of spectrum that Fig. 5 obtains after being spectrometer collection analysis;
The saturated light spectral curve that Fig. 6 obtains after being spectrometer collection analysis;
Fig. 7 is the curve of spectrum of a major part in linear response interval.
Embodiment
Although a diaphragm can be adopted at present to weaken light source intensity, but the effect that generally diaphragm weakens light intensity is only directed to a smaller range of wavelengths, as independent ultraviolet band, visible waveband or infrared band, and often can not reach requirement for all band required by broad sense ellipsometer; And diaphragm is with manually controlling in most cases, control accuracy is not very high, dumb yet.Utilize the neutral density filter having different transmitance, then be equipped with the device automatically controlled, just can meet the demands well.
General non-adjustable neutral density filter is divided into absorption-type and reflection-type (or metal mold), can be used for Attenuated laser and other light signals.Absorption-type optical filter can reduce retroreflection, by reducing reflection loss further at optical filter plated surface anti-reflection film.The optical density (OD) of standard absorption type neutral density filter between 0.1 to 0.6, and the optical density (OD) being coated with anti-reflection film model be one of 0.3,1.0 and two kind of rete scope be 2.0.Reflection-type filter substrate adopts BK7 or UV fused quartz.Ultraviolet-grade fused silica is suitable for ultraviolet spectral range most.Transformational relation between optical density (OD) OD and transmissivity T is such as formula shown in (1).
OD=log
10(1/T) or T=10
-OD(1)
General spectrometer is 0 ~ 65535counts for the responding range of the light intensity received, as the QE65Pro spectrometer of Ocean Optics company used in example, and generally the existing adjustment for light intensity just makes light intensity magnitude be in this interval of 0 ~ 65535counts.But this but have ignored the problem of the linear response of photodetector in spectrometer, namely photon is converted to the linear of light intensity (counts) by detector.Because the photodetector of most spectrometer is not whole response, interval is all very linear, the just middle part met the demands, if the good interval of QE65Pro spectrometer linear response is 5000 ~ 40000counts, so we should make light intensity magnitude drop on this interval as far as possible when automatically adjusting light intensity magnitude, instead of 0 general thought ~ 65535counts.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.It should be noted that at this, the explanation for these embodiments understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1, computing machine 1, spectrometer 2, servomotor controller 3, incremental encoder 4, DC servo motor 5 and neutral density filter rotating disk 6 is at least comprised in the light intensity automatic regulating apparatus that example of the present invention provides.
Incremental encoder 4 is arranged in DC servo motor 5; As shown in Figure 2; neutral density filter rotating disk 6 comprises a light hole 7 neutral density filter different with three transmittances; namely transmittance to be neutral density filter 8, the transmittance of 80% be 50% neutral density filter 9 and transmittance be the neutral density filter 10 of 30% (herein for convenience of description; only adopt three neutral density filters, neutral density filter rotating disk 6 is installed any multi-disc neutral density filter also within scope).
Neutral density filter rotating disk 6 is arranged on DC servo motor 5 end face; DC servo motor 5 is connected with computing machine 1 by servomotor controller 3; Incremental encoder 4 is connected with servomotor controller 3; Spectrometer 2 is connected with computing machine 1 by USB port.
Computing machine 1, for controlling the work of spectrometer 2, controls the motion of DC servo motor 5 by servomotor controller 3; Whether the whether saturated and curve of spectrum of the curve of spectrum collected according to spectrometer 2 determines whether rotating DC servo motor 5 in spectrometer linear response interval, thus drives neutral density filter plate rotating disk 6 to rotate to switch neutral density filter plate to change light source irradiation light intensity magnitude out.
The functional module that citing below illustrates computing machine 1 is formed.
DC servo motor control module and spectrometer control module is provided with in computing machine 1; Wherein, DC servo motor control module mainly completes the setting of DC servo motor 5 kinematic parameter and the control of the corresponding run action of DC servo motor 5, can receive the return message from servomotor controller 3 simultaneously; Spectrometer control module is mainly used in the control to the setting of spectrometer 2 parameter and spectrometer 2 basic act after DC servo motor 5 runs to ad-hoc location, receives simultaneously and stores the spectroscopic data that spectrometer 2 gathers.
In computing machine, the course of work of each module is as follows:
(1) DC servo motor control module completes the setting of DC servo motor 5 kinematic parameter, and by servomotor controller 3 operate DC servo motor 5 get back to zero-bit (light beam of light source just in time from light hole 7 through, namely light beam is without neutral density filter 8,9 or 10).
(2) configuration of the systematic parameter to spectrometer 2 is completed by spectrometer control module.
(3) DC servo motor 5 and spectrometer 2 is stopped respectively by DC servo motor control module and spectrometer control module.
The detailed operation process of apparatus of the present invention is as follows:
The first step, completes the connection that dual rotary compensates the hardware device of type broad sense ellipsometer light intensity automatic regulating apparatus.
(1.1) complete computing machine 1 to be connected with spectrometer 2, the normal of servomotor controller 3, wherein spectrometer 2 is connected by standard USB data line with computing machine 1; After DC servo motor 5 is connected with servomotor controller 3, servomotor controller 3 is also connected with computing machine 1 by standard network data line.
(1.2) complete (1.1) afterwards dual rotary compensate type broad sense ellipsometer light intensity automatic regulating apparatus hardware device and connect and complete.Then neutral density filter rotating disk 6 is needed to be installed in DC servo motor 5.
(1.3) the hardware one-piece construction figure after having connected as shown in Figure 3.Wherein, incremental encoder 4, owing to being the inside being arranged on DC servo motor 5, figure does not mark out; The connection that light source 11, spectrometer play inclined arm 12 and analyzing arm 13 belongs to the basic connection of ellipsometer structure, does not elaborate at this.
Second step, uses the dual rotary connected to compensate type broad sense ellipsometer light intensity automatic regulating apparatus and starts a spectrum data gathering job, and carry out the adjustment of DC servo motor 5 according to the spectroscopic data collected.The control operation flow process of computing machine as shown in Figure 4.
(2.1) on computer 1 by the correlation parameter of servomotor controller 3 configuring direct current servomotor 5, the velocity of rotation of DC servo motor 5, acceleration, retarded velocity is comprised, each angle (90 °) of rotating; Configure the correlation parameter of spectrometer 2 on computer 1, comprise spectrometer integral time and sampling number.
(2.2) computing machine 1 drives DC servo motor 5 times logic zero-bits by servomotor controller 3, returned the positional information of DC servo motor 5 by incremental encoder 4.The logic zero-bit of DC servo motor 5 be configured such that light beam of light source just in time from the light hole 7 of neutral density filter rotating disk 6 through, namely light beam is without neutral density filter 8,9 and 10.
(2.3) open spectrometer 2, that carries out spectroscopic data according to the parameter set before collects the curve of spectrum, returns to computing machine 1 and record by spectrometer 2.
(2.4) judge that whether the curve of spectrum is saturated, if the curve of spectrum unsaturated (the undersaturated curve of spectrum as shown in Figure 5), enter step (2.5), otherwise proceed to step (2.6);
(2.5) after the curve of spectrum is unsaturated, whether major part is interval in linear response to carry out judging the curve of spectrum, if so, proceeds to step (2.7), otherwise, enter step (2.6);
The concrete operation repeatedly regulated is the same judges whether saturated process.Article one, the curve of spectrum of major part in linear response interval as shown in Figure 7.
Example of the present invention adopt following standard to judge the curve of spectrum major part is interval in linear response, namely minimum light intensity is at more than 5000counts, and the curve of spectrum spike of 80% is no more than 40000counts.
(2.6) if the curve of spectrum is saturated (one the saturated curve of spectrum as shown in Figure 6, the saturation count of general spectrometer is about 65535, namely light intensity exceed this value will be saturated), then prove that the light intensity of light source has exceeded its measurement threshold value when arriving on spectrometer 2, so computing machine needs to drive DC servo motor 5 to rotate by servomotor controller 3, light beam of light source needs to weaken light intensity by neutral density filter 8,9 or 10.Concrete operations are for drive DC servo motor 5 to turn to next neutral density filter by computing machine 1 servomotor controller 3, even if light beam of light source is the neutral density filter 8 of 80% by transmissivity T, make the light intensity decreasing of light source be original 80%.Repeat step (2.3) afterwards again, to carry out in (2.4) whether saturated judgement again, if still saturated, then continue to drive DC servo motor 5 to turn to next neutral density filter place, even if light beam of light source is the neutral density filter 9 of 50% by transmissivity T, the light intensity decreasing of light source is made to be original 50%.Repeat step (2.3) afterwards again, to carry out in (2.4) whether saturated judgement again, if still saturated, then continue to drive DC servo motor 5 to turn to next neutral density filter place, even if light beam of light source is the neutral density filter 10 of 30% by transmissivity T, the light intensity decreasing of light source is made to be original 30%.The final curve of spectrum that measurement obtains a unsaturation, meets the demands on spectrometer 2.
(2.7) curve of spectrum major part is interval in linear response, prove that the light intensity of light source does not exceed its measurement threshold value when arriving on spectrometer 2, so computing machine need not drive DC servo motor 5 to rotate by servomotor controller 3, light beam of light source does not need to weaken light intensity by neutral density filter 8,9 or 10, terminates.
Above-mentioned steps is only for a kind of neutral density filter arranged distribution.For the broad sense ellipsometer of other neutral density filter arranged distribution modes, this light intensity automatic adjusting method and device are applicable equally.
The present invention is not only confined to above-mentioned embodiment; persons skilled in the art are according to content disclosed by the invention; other multiple embodiment can be adopted to implement the present invention; therefore; every employing project organization of the present invention and thinking; do the design that some simply change or change, all fall into the scope of protection of the invention.
Claims (5)
1. for a light intensity automatic regulating apparatus for broad sense ellipsometer, it is characterized in that, this device comprises computing machine, spectrometer, servomotor controller, incremental encoder, DC servo motor and neutral density filter rotating disk;
Incremental encoder is arranged in DC servo motor; Neutral density filter rotating disk comprises the light hole neutral density filter different with multi-disc transmittance; Neutral density filter rotating disk is rotatably arranged on DC servo motor end face; DC servo motor is connected with computing machine by servomotor controller; Incremental encoder is connected with servomotor controller; Spectrometer is connected with computing machine by USB port;
Computing machine, for controlling the work of spectrometer, controls the motion of DC servo motor by servomotor controller; According to spectrometer collection to the whether saturated and curve of spectrum of the curve of spectrum whether determine whether rotating DC servo motor in spectrometer linear response interval, thus drive described neutral density filter plate dial rotation to switch neutral density filter plate to change light source irradiation light intensity magnitude out.
2. light intensity automatic regulating apparatus according to claim 1, is characterized in that, is provided with DC servo motor control module and spectrometer control module in described computing machine; Wherein, DC servo motor control module, for the control of the corresponding run action of setting and DC servo motor that completes DC servo motor kinematic parameter, receives the return message from servomotor controller simultaneously; Spectrometer control module is used for the control to the setting of spectrometer parameter and spectrometer basic act after DC servo motor runs to ad-hoc location, receives simultaneously and stores the spectroscopic data that spectrometer gathers.
3. light intensity automatic regulating apparatus according to claim 1, is characterized in that, described neutral density filter is three, and the transmittance of three neutral density filters is for being respectively 80%, 50% and 30%.
4. a control method for light intensity automatic regulating apparatus described in claim 1, comprises the steps:
1st step computing machine drives DC servo motor to return logic zero-bit by servomotor controller, the logic zero-bit of DC servo motor be configured such that light beam of light source just in time from the light hole of neutral density filter rotating disk through;
2nd step utilizes spectrometer to carry out spectrum data gathering according to the parameter arranged, and obtains the curve of spectrum, returns to computing machine by spectrometer;
3rd step computing machine judges that whether the curve of spectrum is saturated; If the curve of spectrum is unsaturated, proceed to the 5th step; If the curve of spectrum is saturated, then enter the 4th step;
4th step computing machine by servomotor controller drive DC servo motor turn to next neutral density filter place, even if light beam of light source by this neutral density filter to weaken light intensity, proceed to the 2nd step afterwards;
5th step judges the curve of spectrum, and whether major part is interval in linear response, if so, enters the 6th step, otherwise, proceed to the 4th step;
6th EOS adjustment.
5. control method according to claim 4, is characterized in that, in the 5th step, describedly judge the curve of spectrum major part is interval in linear response, refer to that minimum light intensity is at more than 5000counts, the curve of spectrum spike of 80% is no more than 40000counts.
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| CN106200686A (en) * | 2015-05-04 | 2016-12-07 | 宝山钢铁股份有限公司 | X fluorescence spectrometer analyzing crystal adjusting apparatus and method is fixed for Wavelength dispersion type |
| CN109269638A (en) * | 2018-09-04 | 2019-01-25 | 京东方科技集团股份有限公司 | Optical sensor mould group and its working method |
| CN114675361A (en) * | 2022-02-18 | 2022-06-28 | 武汉颐光科技有限公司 | Optical filter and optical filtering device |
| CN117451084A (en) * | 2023-12-25 | 2024-01-26 | 科沃斯家用机器人有限公司 | Code wheel and optical coding device |
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