CN104317174B - A kind of rete removal device - Google Patents
A kind of rete removal device Download PDFInfo
- Publication number
- CN104317174B CN104317174B CN201410599113.8A CN201410599113A CN104317174B CN 104317174 B CN104317174 B CN 104317174B CN 201410599113 A CN201410599113 A CN 201410599113A CN 104317174 B CN104317174 B CN 104317174B
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- Prior art keywords
- rete
- removal device
- removing body
- removal
- cavity
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- 239000007788 liquid Substances 0.000 claims abstract description 52
- 230000001174 ascending effect Effects 0.000 claims abstract description 15
- 239000000463 material Substances 0.000 claims description 25
- 230000002745 absorbent Effects 0.000 claims description 18
- 239000002250 absorbent Substances 0.000 claims description 18
- 239000002699 waste material Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 abstract description 4
- 238000007790 scraping Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000002386 leaching Methods 0.000 description 4
- 230000009931 harmful effect Effects 0.000 description 3
- 238000012827 research and development Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000000740 bleeding effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Cleaning In General (AREA)
Abstract
Embodiments provide a kind of rete removal device, relate to the preparation field of display device, can realize removing the precision of rete arbitrary region, meet the different demands in explained hereafter, cost-saving and enhance productivity.This rete removal device comprises: removal unit; Drive the driver element of described removal unit movement; Control the control module of described driver element; Wherein, described removal unit comprises: cavity; Described cavity comprises an open area; Be arranged on described cavity hatch region and be parallel to the rotatable removing body of film surface; Be arranged on described inside cavity and inject the ascending pipe removing liquid to described removing body; Be arranged on the vacuum elements of described inside cavity; The exhaust tube of described vacuum elements points to described removing body.For the preparation to the rete removal device that the precision of rete arbitrary region is removed can be realized.
Description
Technical field
The present invention relates to the preparation field of display device, particularly relate to a kind of rete removal device.
Background technology
In the preparation process of display device, form the rete with predetermined pattern usually through patterning processes.Patterning processes mainly by carrying out exposure imaging to the photoresist that rete applies, obtaining the photoresist layer with specific pattern, etching the rete that photoresist layer exposes, thus making rete form predetermined pattern.
Because the exposure needs that carry out photoresist layer and mask plate carry out contraposition accurately, therefore, before photoresist layer is exposed, need on the substrate being formed with rete, pre-set the different alignment mark of multiple distributing position (workmark), because the identification of current exposure machine to alignment mark is all identified by visible ray, and most rete, such as prepare black matrix (BlackMatrix, be called for short BM) time rete be difficult to penetrate visible ray, therefore, the rete of alignment mark position is needed to get rid of, thus expose alignment mark complete exposure before contraposition work.
As shown in FIG. 1A and 1B, when alignment mark (in figure and be hereinafter all labeled as symbol " Χ ") is positioned at the general areas 02a of rete 02, namely when the both sides of rete 02 and/or surrounding, simply the both sides of rete 02 and/or surrounding can be struck off by existing scraping machine 04, to expose alignment mark Χ.
But, the scope of work of the scraping machine provided due to prior art is only limitted to both sides and/or the surrounding of rete, and the width range struck off rete is limited, as shown in Figure 2, the 02b when alignment mark Χ is positioned at rete 02 comparatively inner unconventional region, 03, the scraping machine of prior art is utilized to be difficult to remove rete 02 above the alignment mark Χ being positioned at above-mentioned unconventional area 0 2b, because the rete 02 above alignment mark Χ is difficult to remove, namely alignment mark X is difficult to come out, thus cause contraposition bad, affect follow-up exposure imaging technique, therefore, in the case can only by removing the rete in unconventional region on alignment mark manually, production efficiency is caused to decline, if do not struck off the rete be arranged on the alignment mark of unconventional region, then needing again to develop must can through the new film material of infrared light, and also need further to upgrade to the alignment system of exposure machine, increase the recognition system to infrared light, cause R&D cycle prolongation, production cost increase.
Summary of the invention
Given this, be solve the problem of prior art, embodiments of the invention provide a kind of rete removal device, can realize removing the precision of rete arbitrary region, meet the different demands in explained hereafter, cost-saving and enhance productivity.
For achieving the above object, embodiments of the invention adopt following technical scheme:
Embodiments provide a kind of rete removal device, comprising: removal unit; Drive the driver element of described removal unit movement; Control the control module of described driver element; Wherein, described removal unit comprises: cavity; Described cavity comprises an open area; Be arranged on described cavity hatch region and be parallel to the rotatable removing body of film surface; Be arranged on described inside cavity and inject the ascending pipe removing liquid to described removing body; Be arranged on the vacuum elements of described inside cavity; The exhaust tube of described vacuum elements points to described removing body.
Optionally, described rete removal device also comprises the electric motor units driving described removing body to rotate.
Preferably, described removing body comprises liquid absorbent material; Wherein, described liquid absorbent material is set on the turning axle of described electric motor units.
Preferably, described removing body comprises roll shaft, is set in the liquid absorbent material on described roll shaft surface; Wherein, described liquid absorbent material at least exposes one end of described roll shaft; Described roll shaft is connected by the turning axle of travelling belt with described electric motor units.
Preferred further, described liquid absorbent material is made up of sponge.
Optionally, the quantity of described ascending pipe is two, and lays respectively at the two ends of described removing body.
Optionally, the caliber of described ascending pipe near described removing body one end is less than the caliber away from described removing body one end.
Optionally, described vacuum elements also comprises the waste collection chamber be connected with described exhaust tube.
Optionally, described driver element comprises mechanical arm.
Optionally, described control module comprises central processing unit or programmable logic controller (PLC).
Based on this, above-mentioned rete removal device provided by the invention, on the one hand, the movement of described driver element is accurately controlled by described control module, the described removal unit by described drive unit drives is made accurately to move to arbitrary overlying regions on described rete, fully to contact with the described rete in region to be removed containing the described removing body of described removal liquid further by leaching and dissolve the rete in this region, thus achieve the precision of the film material in described rete arbitrary region is removed, meet the different demands in explained hereafter, can pass through the new film material of infrared light without the need to research and development again or manually remove scraping machine of the prior art and be difficult to remove the rete in region, thus realize cost-saving and enhance productivity.
On the other hand, owing to being provided with described vacuum elements in described inside cavity, rapidly the rete removing region can be reacted with removal liquid the waste liquid generated by the suction function of bleeding of described vacuum elements to siphon away, the removal result ensureing region to be removed is totally thorough, and harmful effect is caused in other regions that there will not be chemical liquid to be splashed to rete.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The schematic diagram one that Figure 1A removes rete for the scraping machine that employing prior art provides;
The schematic diagram two that Figure 1B removes rete for the scraping machine that employing prior art provides;
The schematic diagram three that Fig. 2 removes rete for the scraping machine that employing prior art provides;
The structural representation of a kind of rete removal device that Fig. 3 provides for the embodiment of the present invention;
The cross-sectional view of removal unit in a kind of rete removal device that Fig. 4 provides for the embodiment of the present invention;
In a kind of rete removal device that Fig. 5 A provides for the embodiment of the present invention, the rotation of removing body controls schematic diagram one;
In a kind of rete removal device that Fig. 5 B provides for the embodiment of the present invention, the rotation of removing body controls schematic diagram two.
Reference numeral:
01-rete removal device; 10-removal unit; 11-cavity; 110-open area; 12-removing body; 121-liquid absorbent material; 122-roll shaft; 13-ascending pipe; 14-vacuum elements; 140-exhaust tube; 20-driver element; 30-control module; 40-electric motor units; 41-turning axle; 42-travelling belt; 02-rete to be removed; 02a-general areas; The unconventional region of 02b-; 03-scraping machine.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
Embodiments provide a kind of rete removal device 01, as shown in Figure 3, described rete removal device 01 comprises: removal unit 10; Drive the driver element 20 of described removal unit 10 movement; Control the control module 30 of described driver element 20.
Wherein, as shown in Figure 4, described removal unit 10 comprises: cavity 11; Described cavity 11 comprises an open area 110; Be arranged on described cavity 11 open area 110 and be parallel to the rotatable removing body 12 on rete 02 surface; Be arranged on described cavity 11 inside and inject the ascending pipe 13 removing liquid to described removing body 12; Be arranged on the vacuum elements 14 of described cavity 11 inside; The exhaust tube 140 of described vacuum elements 14 points to described removing body 12.
It should be noted that, the first, when needing to remove the rete in arbitrary region on described rete 02, accurately control the movement of described driver element 20 by described control module 30, the removal technique of rete is carried out in the top making the described removal unit 10 driven by described driver element 20 accurately move to region to be removed.
Here, described control module 30 and described driver element 20 are not construed as limiting, only need accurate control that can realize the movement of described removal unit 10.
Wherein, described driver element 20 can be such as the devices such as mechanical arm; Described control module 30 can be such as central processing unit (CentralProcessingUnit is called for short CPU) or programmable logic controller (PLC) (ProgrammableLogicController is called for short PLC).
The second, described removal liquid refers to solubilized or reacts with rete 02 to be removed, thus removes the solution of rete 02, and such as, when rete 02 to be removed is for forming photoresist or black matrix material, described removal liquid can be acids or organic solvent etc.
Here, the described removing body 12 of leaching containing described removal liquid is by constantly rotating, rete 02 in region to be removed is in contact with it and is dissolved erasing by described removal liquid, and the waste liquid being dissolved with rete can impact the rete reserve area of described rete 02 area peripheral edge to be removed, therefore, namely the effect being arranged on the described vacuum elements 14 of described cavity 11 inside is siphoned away by waste liquid rapidly by described exhaust tube 140, ensure that the removal result in region to be removed is totally thorough, and harmful effect is caused in other regions that there will not be chemical liquid to be splashed to rete.
Three, those skilled in the art are to be understood that, the shape of described cavity 11 and the distribution situation of inner each assembly is only schematically provided in Fig. 4, the present invention is not limited thereto, wherein, the concrete distributing position of each assembly of described cavity 11 inside can adjust flexibly, can inject to described removing body 12 fully to make described ascending pipe 13 and remove liquid, described vacuum elements 14 as far as possible fully by waste liquid sucking-off totally; Wherein, as long as the described open area 110 of described cavity 11 ensures that described removing body 12 can fully rotate in open area 110, can contact with rete to be removed to make it and removal of rete acted on.
The above-mentioned rete removal device 01 that the embodiment of the present invention provides, described rete removal device 01 comprises: removal unit 10; Drive the driver element 20 of described removal unit 10 movement; Control the control module 30 of described driver element 20.Wherein, described removal unit 10 comprises: cavity 11; Described cavity 11 comprises an open area 110; Be arranged on described cavity 11 open area 110 and be parallel to the rotatable removing body 12 on rete 02 surface; Be arranged on described cavity 11 inside and inject the ascending pipe 13 removing liquid to described removing body 12; Be arranged on the vacuum elements 14 of described cavity 11 inside; The exhaust tube 140 of described vacuum elements 14 points to described removing body 12.
Based on this, above-mentioned rete removal device 01 provided by the invention, on the one hand, the movement of described driver element 20 is accurately controlled by described control module 30, the described removal unit 10 driven by described driver element 20 is made accurately to move to arbitrary overlying regions on described rete 02, fully to contact with the described rete 02 in region to be removed containing the described removing body 12 of described removal liquid further by leaching and dissolve the rete in this region, thus achieve the precision of the film material in described rete 02 arbitrary region is removed, meet the different demands in explained hereafter, can pass through the new film material of infrared light without the need to research and development again or manually remove scraping machine of the prior art and be difficult to remove the rete in region, thus realize cost-saving and enhance productivity.
On the other hand, owing to being provided with described vacuum elements 14 in described cavity 11 inside, rapidly the rete 02 removing region can be reacted with removal liquid the waste liquid generated by the suction function of bleeding of described vacuum elements 14 to siphon away, the removal result ensureing region to be removed is totally thorough, and harmful effect is caused in other regions that there will not be chemical liquid to be splashed to rete.
On the basis of the above, described rete removal device 01 also comprises the electric motor units 40 driving described removing body 12 to rotate.Wherein, described electric motor units can be such as motor (motor) etc.
Concrete, described electric motor units 40 can adopt the rotation of removing body 12 described in following driven in two modes:
Mode one, as shown in Figure 5A, described removing body 12 comprises liquid absorbent material 121; Wherein, described liquid absorbent material 121 is set on the turning axle 41 of described electric motor units 40.
Like this, when described electric motor units 40, such as, when being motor operations, the rotation of described liquid absorbent material 121 can be realized by the rotation of its turning axle 41.
Wherein, described liquid absorbent material 121 refers to the structure can soaked containing liquid, and can be such as the structure having sponge material to form, concrete shape be not construed as limiting, and is preferably the right cylinder of hollow, so as be set on described turning axle 41.
Mode two, as shown in Figure 5 B, described removing body 12 comprises roll shaft 122, is set in the liquid absorbent material 121 on described roll shaft 122 surface; Wherein, described liquid absorbent material 121 at least exposes one end of described roll shaft 122; Described roll shaft 122 is connected with the turning axle 41 of described electric motor units 40 by travelling belt 42.
Like this, when described electric motor units 40 works, rotated by the roll shaft 122 rotarily driven on described travelling belt 42 other end of the turning axle 41 of described travelling belt 42 one end, thus achieve the rotation of described removing body 12.
Wherein, described liquid absorbent material 121 refers to the structure can soaked containing liquid, and can be such as the structure having sponge material to form, concrete shape be not construed as limiting, and is preferably the right cylinder of hollow, so as be set on described roll shaft 122.
On the basis of the above, shown in figure 4, soak containing described removal liquid fully to make described removing body 12, leaching in described some regions of removing body 12 is there will not be not soak containing described removal liquid in other regions containing described removal liquid, thus cause and remove bad to the rete 02 in region to be removed, preferably, the quantity of described ascending pipe 13 is two, and lays respectively at the two ends of described removing body 12.
Further, in order to avoid described ascending pipe 13 drops onto rete 02 surface not needing to remove when described removing body 12 injects described removal liquid, preferably, the caliber of described ascending pipe 13 near described removing body 12 one end is less than the caliber away from described removing body 12 one end.
Like this, on the one hand, the caliber near described removing body 12 one end is avoided making a slip of the tongue large due to caliber compared with I and causes extra removal drop to fall not need rete 02 surface of removing; On the other hand, because the caliber of described ascending pipe 13 near described removing body 12 one end is less than the caliber away from described removing body 12 one end, pipe diameter determing up big and down small like this can control a flow velocity for the removal liquid flowed out from described ascending pipe 13 better, thus makes described removal liquid be injected into described removing body 12 more equably.
On the basis of the above, described vacuum elements 14 also can comprise the waste collection chamber be connected with described exhaust tube 140, to collect described rete by reacted waste liquid, focuses on after hours at described rete removal device 01 to waste liquid.
It should be noted that, institute of the present invention drawings attached is the simple schematic diagram of above-mentioned rete removal device, only for the clear this programme that describes embodies the structure relevant to inventive point, the structure irrelevant with inventive point for other is existing structure, in the accompanying drawings not embodiment or only realizational portion.
The above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; change can be expected easily or replace, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of described claim.
Claims (10)
1. a rete removal device, is characterized in that, comprising: removal unit; Drive the driver element of described removal unit movement; Control the control module of described driver element, described control module moves to the top in rete region to be removed to carry out the removal technique of described rete for making the described removal unit by described drive unit drives; Wherein, described removal unit comprises:
Cavity; Described cavity comprises an open area;
Be arranged on the open area of described cavity and be parallel to the rotatable removing body of film surface;
Be arranged on the inside of described cavity and inject the ascending pipe removing liquid to described removing body;
Be arranged on the vacuum elements of the inside of described cavity; The exhaust tube of described vacuum elements points to described removing body, and described vacuum elements reacts for the described rete removing described removal liquid and described region to be removed the waste liquid generated.
2. rete removal device according to claim 1, is characterized in that, described rete removal device also comprises the electric motor units driving described removing body to rotate.
3. rete removal device according to claim 2, is characterized in that, described removing body comprises liquid absorbent material;
Wherein, described liquid absorbent material is set on the turning axle of described electric motor units.
4. rete removal device according to claim 2, is characterized in that, described removing body comprises roll shaft, is set in the liquid absorbent material on described roll shaft surface;
Wherein, described liquid absorbent material at least exposes one end of described roll shaft;
Described roll shaft is connected by the turning axle of travelling belt with described electric motor units.
5. the rete removal device according to claim 3 or 4, is characterized in that, described liquid absorbent material is made up of sponge.
6. rete removal device according to claim 1, is characterized in that, the quantity of described ascending pipe is two, and lays respectively at the two ends of described removing body.
7. rete removal device according to claim 1, is characterized in that, the caliber of described ascending pipe near described removing body one end is less than the caliber away from described removing body one end.
8. rete removal device according to claim 1, is characterized in that, described vacuum elements also comprises the waste collection chamber be connected with described exhaust tube.
9. rete removal device according to claim 1, is characterized in that, described driver element comprises mechanical arm.
10. rete removal device according to claim 1, is characterized in that, described control module comprises central processing unit or programmable logic controller (PLC).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410599113.8A CN104317174B (en) | 2014-10-30 | 2014-10-30 | A kind of rete removal device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410599113.8A CN104317174B (en) | 2014-10-30 | 2014-10-30 | A kind of rete removal device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104317174A CN104317174A (en) | 2015-01-28 |
| CN104317174B true CN104317174B (en) | 2016-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410599113.8A Expired - Fee Related CN104317174B (en) | 2014-10-30 | 2014-10-30 | A kind of rete removal device |
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| Country | Link |
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| CN (1) | CN104317174B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107797316A (en) * | 2017-11-08 | 2018-03-13 | 昆山龙腾光电有限公司 | Drip the preparation method of sour device, drop acid board and touching display screen |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103028583A (en) * | 2011-09-28 | 2013-04-10 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN103526205A (en) * | 2013-10-18 | 2014-01-22 | 上海和辉光电有限公司 | Wet etching device |
| CN203474894U (en) * | 2013-09-12 | 2014-03-12 | 宇宙电路板设备(深圳)有限公司 | Etching absorbing knife |
| CN104089809A (en) * | 2014-06-24 | 2014-10-08 | 京东方科技集团股份有限公司 | Film layer removal device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0792686A (en) * | 1993-09-22 | 1995-04-07 | Iwasaki Electric Co Ltd | Platemaking machine |
| JPH08269741A (en) * | 1995-03-30 | 1996-10-15 | Toppan Printing Co Ltd | Etching parts manufacturing method |
| JP3120425B2 (en) * | 1998-05-25 | 2000-12-25 | 旭サナック株式会社 | Resist stripping method and apparatus |
| JP4357225B2 (en) * | 2003-07-24 | 2009-11-04 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| JP4638402B2 (en) * | 2006-10-30 | 2011-02-23 | 大日本スクリーン製造株式会社 | Two-fluid nozzle, and substrate processing apparatus and substrate processing method using the same |
-
2014
- 2014-10-30 CN CN201410599113.8A patent/CN104317174B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103028583A (en) * | 2011-09-28 | 2013-04-10 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN203474894U (en) * | 2013-09-12 | 2014-03-12 | 宇宙电路板设备(深圳)有限公司 | Etching absorbing knife |
| CN103526205A (en) * | 2013-10-18 | 2014-01-22 | 上海和辉光电有限公司 | Wet etching device |
| CN104089809A (en) * | 2014-06-24 | 2014-10-08 | 京东方科技集团股份有限公司 | Film layer removal device |
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| Publication number | Publication date |
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| CN104317174A (en) | 2015-01-28 |
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