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CN104316180A - Double-optical frequency comb optical imaging method based on continuous frequency stabilized laser - Google Patents

Double-optical frequency comb optical imaging method based on continuous frequency stabilized laser Download PDF

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CN104316180A
CN104316180A CN201410602780.7A CN201410602780A CN104316180A CN 104316180 A CN104316180 A CN 104316180A CN 201410602780 A CN201410602780 A CN 201410602780A CN 104316180 A CN104316180 A CN 104316180A
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白东碧
李文雪
曾和平
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Chongqing Huapu Information Technology Co ltd
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East China Normal University
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Abstract

本发明公开了一种基于连续稳频激光的双光学频率梳光学成像方法,该光学成像方法将两台光学频率梳种子源通过重复频率控制模块锁定在稳定的外界原子钟上,同时,通过连续稳频激光与两台光学频率梳种子源输出激光的相互作用,将携带有光梳频率不稳定度的电学信号提取出来,并将该信号进行射频信号功率分配与处理,其一部分直接用于反馈控制两台光学频率梳种子源的激光谐振腔特性,以稳定半导体激光器的输出载波包络相位频率,另一部分用于与双光梳成像系统产生的周期性干涉谱信号进行混频,进一步将光梳系统的频率漂移量抵消掉,从而从两个方面入手控制整个双光梳成像系统的测量精度,实现快速、超高分辨的光梳相干成像。

The invention discloses a dual optical frequency comb optical imaging method based on continuous frequency-stabilized lasers. The optical imaging method locks two optical frequency comb seed sources on a stable external atomic clock through a repetition frequency control module. The interaction between the high-frequency laser and the output laser of two optical frequency comb seed sources extracts the electrical signal carrying the frequency instability of the optical comb, and distributes and processes the power of the RF signal, and a part of it is directly used for feedback control The characteristics of the laser resonator of the two optical frequency comb seed sources are used to stabilize the output carrier envelope phase frequency of the semiconductor laser, and the other part is used to mix with the periodic interference spectrum signal generated by the dual optical comb imaging system, further combining the optical comb The frequency drift of the system is offset, so as to control the measurement accuracy of the entire dual-comb imaging system from two aspects, and realize fast and ultra-high-resolution optical comb coherent imaging.

Description

基于连续稳频激光的双光学频率梳光学成像方法Dual Optical Frequency Comb Optical Imaging Method Based on Continuous Frequency Stabilized Laser

技术领域 technical field

本发明属于超快激光技术领域,具体涉及一种基于连续稳频激光的双光学频率梳光学成像方法。 The invention belongs to the technical field of ultrafast lasers, in particular to a dual optical frequency comb optical imaging method based on continuous frequency-stabilized lasers.

背景技术 Background technique

光学显微成像技术的发展由来已久,伴随着人类对微观世界探索程度的加深而不断进步。早在公元前一世纪,人们就发现可以利用水滴观察到物体被放大后的像。传统光学成像系统的空间分辨能力受到衍射极限的限制,一般来说,光学成像系统衍射限制的空间分辨率约为探测光波长的一半,而对于小于这个成像极限值的物体细节,传统光学系统将无能为力。进入80年代,非光学类扫描探针显微术特别是原子力显微镜的出现可以将成像的分辨率推进到纳米量级的精度,但这些显微技术或者穿透深度很小,或者只能给出物体表面的信息,并在不同程度上存在系统结构复杂、成像检测环境要求苛刻等问题。随着激光技术的发展与成熟,将激光这一具有良好相干性、方向性与能量密度的工具运用于光学显微成像,可以为活体生物样品提供重要的光学信息(如偏振态、折射率、光谱等),并进行无损伤性生物活体探测。其中,近年来新兴的飞秒光学频率梳(简称光梳)可以直接作为光源,运用于非线性光学成像过程。其可用于光学成像的非线性效应很多,如:双光子吸收、二次谐波(SHG)、三次谐波(THG)、相干反斯托克斯拉曼散射(CARS)、克尔效应等。 The development of optical microscopic imaging technology has a long history, and it has been continuously improved along with the deepening of human exploration of the microcosm. As early as the first century BC, people discovered that water droplets could be used to observe the magnified image of an object. The spatial resolution of traditional optical imaging systems is limited by the diffraction limit. Generally speaking, the spatial resolution limited by the diffraction limit of optical imaging systems is about half of the wavelength of the probe light. For object details smaller than this imaging limit, traditional optical systems will powerless. In the 1980s, the emergence of non-optical scanning probe microscopy, especially atomic force microscopy, can advance the resolution of imaging to nanometer-level precision, but these microscopy techniques either have very small penetration depths, or can only give The information on the surface of the object, and to varying degrees, there are problems such as complex system structure and harsh imaging detection environment. With the development and maturity of laser technology, applying laser, a tool with good coherence, directionality and energy density, to optical microscopy imaging can provide important optical information (such as polarization state, refractive index, Spectrum, etc.), and non-destructive biological living detection. Among them, femtosecond optical frequency combs (referred to as optical combs) emerging in recent years can be directly used as light sources in nonlinear optical imaging processes. There are many nonlinear effects that can be used for optical imaging, such as: two-photon absorption, second harmonic (SHG), third harmonic (THG), coherent anti-Stokes Raman scattering (CARS), Kerr effect, etc.

另一方面,为了构建时域与频域兼具频率高稳定度的飞秒光学频率梳,需将锁模脉冲激光器的输出脉冲序列的重复频率信号(f r )与载波包络相位频率信号(f ceo )锁定,即保证频率梳的每根梳齿与梳齿的间隔稳定,且整体在频率域不发生漂移。其中,光梳的重复频率信号是可直接探测的电学信号,将其与原子钟控制的标准信号混频,并反馈控制激光器腔长,即可实现光梳重复频率锁定。但是,脉冲传播过程中由于群速度与相速度之差产生的光梳载波包络相位漂移频率的探测与控制过程较为复杂,通常需要对光梳的输出光进行功率放大与光谱展宽,再采用共线或非共线型的f-2f自参考光学系统进行光学倍频与光学合束拍频,将载波包络相位漂移频率提取出来。而上述这一过程中,不仅需要对脉冲的色散特性与偏振态进行良好的控制,而且对非线性晶体的温度、整个光学系统的相位匹配度、光路的调整精度与稳定度都提出了较高要求,这些无疑为光学频率梳技术的应用推广带来不利影响。 On the other hand, in order to construct a femtosecond optical frequency comb with high frequency stability in the time domain and frequency domain, it is necessary to combine the repetition frequency signal ( f r ) of the output pulse train of the mode-locked pulsed laser with the carrier envelope phase frequency signal ( f ceo ) locking, that is, to ensure that the interval between each tooth of the frequency comb is stable, and the whole does not drift in the frequency domain. Among them, the repetition frequency signal of the optical comb is an electrical signal that can be directly detected. By mixing it with the standard signal controlled by the atomic clock and feedback controlling the laser cavity length, the repetition frequency locking of the optical comb can be realized. However, the detection and control process of the phase drift frequency of the optical comb carrier envelope due to the difference between the group velocity and the phase velocity during the pulse propagation process is relatively complicated. Usually, it is necessary to perform power amplification and spectral broadening on the output light of the optical comb, and then use a common The linear or non-collinear f-2f self-reference optical system performs optical frequency doubling and optical beam combining beat frequency, and extracts the carrier envelope phase drift frequency. In the above-mentioned process, not only the dispersion characteristics and polarization state of the pulse need to be well controlled, but also the temperature of the nonlinear crystal, the phase matching degree of the entire optical system, and the adjustment accuracy and stability of the optical path all have higher requirements. Requirements, these will undoubtedly have a negative impact on the application and promotion of optical frequency comb technology.

发明内容 Contents of the invention

本发明的目的是根据上述现有技术的不足之处,提供一种基于连续稳频激光的双光学频率梳光学成像方法,该光学成像方法将两台光学频率梳种子源通过重复频率控制模块锁定在稳定的外界原子钟上,同时,通过连续稳频激光与两台光学频率梳种子源输出激光的相互作用,将携带有光梳频率不稳定度的电学信号提取出来,并将该信号进行射频信号功率分配与处理,其一部分直接用于反馈控制两台光学频率梳种子源的激光谐振腔特性,以稳定半导体激光器的输出载波包络相位频率,另一部分用于与双光梳成像系统产生的周期性干涉谱信号进行混频,进一步将光梳系统的频率漂移量抵消掉,从而从两个方面入手控制整个双光梳成像系统的测量精度,实现快速、超高分辨的光梳相干成像。 The purpose of the present invention is to provide a dual optical frequency comb optical imaging method based on continuous frequency stabilized lasers according to the shortcomings of the above-mentioned prior art. The optical imaging method locks two optical frequency comb seed sources through a repetition rate control module On a stable external atomic clock, at the same time, through the interaction between the continuous frequency-stabilized laser and the output lasers of two optical frequency comb seed sources, the electrical signal carrying the frequency instability of the optical comb is extracted, and the signal is processed into a radio frequency signal. Power distribution and processing, a part of which is directly used for feedback control of the laser resonator characteristics of the two optical frequency comb seed sources to stabilize the output carrier envelope phase frequency of the semiconductor laser, and the other part is used for the period generated by the dual optical comb imaging system Frequency mixing is performed on the interferometric spectrum signal to further offset the frequency drift of the optical comb system, so as to control the measurement accuracy of the entire dual optical comb imaging system from two aspects, and realize fast and ultra-high resolution optical comb coherent imaging.

本发明目的实现由以下技术方案完成: The object of the present invention is realized by the following technical solutions:

一种基于连续稳频激光的双光学频率梳光学成像方法,涉及两台光学频率梳种子源,其特征在于所述光学成像方法包括如下步骤:将两台所述光学频率梳种子源各自的输出激光分为三路; A dual-optical frequency comb optical imaging method based on continuous frequency-stabilized lasers, involving two optical frequency comb seed sources, is characterized in that the optical imaging method includes the following steps: the respective output of the two optical frequency comb seed sources The laser is divided into three paths;

第一路,两台所述光学频率梳种子源的输出激光分别进入频率控制模块以将所述光学频率梳种子源的重复频率信号锁定在外界原子钟上; In the first way, the output lasers of the two optical frequency comb seed sources respectively enter the frequency control module to lock the repetition frequency signal of the optical frequency comb seed source on the external atomic clock;

第二路,两台所述光学频率梳种子源的输出激光与连续稳频激光发生模块的输出激光在连续激稳频激光与双光梳相互作用模块中进行拍频,产生两个频率相近的拍频信号并滤取出来做差频,得到射频信号f - ;通过射频信号功率分配与处理模块将所述射频信号f - 分为等值的三路信号f 1 f 2 f 3 信号,其中所述信号f 1 f 2 分别反馈回两台所述光学频率梳种子源中的电光调制器和半导体激光器,以稳定两台所述光学频率梳种子源输出激光的载波包络相位频率,所述信号f 3 经倍频器放大为信号nf 3 后进入样品数据采集与处理模块; In the second way, the output lasers of the two optical frequency comb seed sources and the output lasers of the continuous frequency-stabilized laser generation module are beaten in the continuous frequency-stabilized laser and the dual-comb interaction module to generate two similar frequencies. The beat frequency signal is filtered out to make a difference frequency to obtain a radio frequency signal f ; the radio frequency signal f is divided into three equivalent signals f 1 , f 2 and f 3 through the radio frequency signal power distribution and processing module, Wherein the signals f1 and f2 are respectively fed back to the electro-optical modulator and the semiconductor laser in the two optical frequency comb seed sources to stabilize the carrier envelope phase frequency of the output laser light from the two optical frequency comb seed sources, The signal f3 is amplified into a signal nf3 by a frequency multiplier and enters the sample data acquisition and processing module;

第三路,将其中第一台所述光学频率梳种子源的输出激光作为探测光入射至待测样品,将其中第二台所述光学频率梳种子源的输出激光作为参考光与所述探测光拍频以得到干涉谱信号f i ;所述干涉谱信号f i 之后进入所述样品数据采集与处理模块中与所述信号nf 3 进行混频以抵消频率不稳定度,得到光谱信号f signal ,并对所述光谱信号f signal 进行逐点还原,实现所述待测样品的光学成像。 In the third way, the output laser light of the first optical frequency comb seed source is incident on the sample to be tested as the probe light, and the output laser light of the second optical frequency comb seed source is used as the reference light to communicate with the detection light. Beat the light frequency to obtain the interference spectrum signal f i ; the interference spectrum signal f i then enters the sample data acquisition and processing module and mixes with the signal nf 3 to offset the frequency instability to obtain the spectral signal f signal , and restore the spectral signal f signal point by point to realize the optical imaging of the sample to be tested.

两台所述光学频率梳种子源的输出激光频率分别为f comb1 =nf rep +f ceo 与f comb2 =n(f rep +Δf rep )+f ceo ,其中f rep 是第一台所述光学频率梳种子源的重复频率Δf rep 是第二台所述光学频率梳种子源与第一台所述光学频率梳种子源的重复频率的微小差值,f ceo f ceo 分别表示第一台所述光学频率梳种子源与第二台所述光学频率梳种子源的载波包络相位漂移频率。 The output laser frequencies of the two optical frequency comb seed sources are respectively f comb1 =nf rep +f ceo and f comb2 =n(f rep +Δf rep )+f ceo ' , where f rep is the first optical The repetition frequency of the frequency comb seed source , Δf rep is the slight difference between the repetition frequency of the second optical frequency comb seed source and the first optical frequency comb seed source, and f ceo and f ceo ' represent the first The carrier envelope phase shift frequency of the optical frequency comb seed source of the first station and the optical frequency comb seed source of the second station.

所述连续稳频激光发生模块的输出激光是指激光频率线宽在Hz量级的单纵模激光。 The output laser of the continuous frequency-stabilized laser generating module refers to a single longitudinal mode laser with a laser frequency linewidth on the order of Hz.

所述光学频率梳种子源中的激光谐振腔内设置有电光调制器和半导体激光器;所述信号f 1 转换为直流电压后作用于所述电光调制器,改变所述电光调制器的折射率以调整所述激光谐振腔的啁啾量并补偿其腔长的失配量;所述信号f 2 反馈至所述半导体激光器,反馈控制所述半导体激光器的电流以稳固所述激光谐振腔的噪声特性。 The laser resonator in the optical frequency comb seed source is provided with an electro-optic modulator and a semiconductor laser; the signal f1 is converted into a DC voltage and acts on the electro-optic modulator to change the refractive index of the electro-optic modulator to Adjusting the chirp amount of the laser resonator and compensating the mismatch of the cavity length; the signal f2 is fed back to the semiconductor laser, and the feedback controls the current of the semiconductor laser to stabilize the noise characteristics of the laser resonator .

所述探测光的频率为f comb1 =nf rep +f ceo ,所述参考光的频率为f comb2 =n(f rep +Δf rep )+f ceo ,所述探测光与所述参考光进行拍频后得到由一系列间隔为Δf rep 的射频信号组成的所述干涉谱信号f i The frequency of the detection light is f comb1 =nf rep +f ceo , the frequency of the reference light is f comb2 =n(f rep +Δf rep )+f ceo ' , the detection light and the reference light are photographed The interference spectrum signal f i composed of a series of radio frequency signals with an interval of Δfrep is obtained after frequency .

本发明的优点是: The advantages of the present invention are:

1)基于具有微小重复频率差值的双光梳光学成像方法可以同时采集由粒子跃迁所产生的宽频率范围内的光谱信息与高分辨率形貌图像,其装置响应速率快,采集快速高; 1) The dual-comb optical imaging method based on a small repetition frequency difference can simultaneously collect spectral information and high-resolution topographical images in a wide frequency range generated by particle transitions, and its device has a fast response rate and high acquisition speed;

2)待测样品的所有光谱元素可以在一个光电探测器上进行同时测量,从而确保了光谱的一致性;此外,高精度光学频率梳保证了波数标度的再现性和准确性; 2) All spectral elements of the sample to be tested can be measured simultaneously on one photodetector, thus ensuring the consistency of the spectrum; in addition, the high-precision optical frequency comb ensures the reproducibility and accuracy of the wave number scale;

3)成像所需的双光学频率梳系统可以在无需精确探测脉冲载波包络相位信号的情况下,通过连续稳频激光将光梳系统的频率漂移量以电学信号的方式传递出来,并进行控制,从而较大程度上降低了光学系统的复杂性与维护难度,增强了整个光梳成像装置的紧凑性与适用性; 3) The dual optical frequency comb system required for imaging can transmit the frequency drift of the optical comb system as an electrical signal through a continuous frequency-stabilized laser without the need to accurately detect the pulse carrier envelope phase signal, and control it , thereby greatly reducing the complexity and maintenance difficulty of the optical system, and enhancing the compactness and applicability of the entire optical comb imaging device;

4)光梳与连续稳频激光产生的携带光梳特性的电学信号展现了多重利用价值:其一方面反馈控制光梳种子源激光腔的泵浦电流与腔内电光调制器,稳固光梳光源的输出激光特性,另一方面与光梳成像过程中得到的干涉谱信号做混频,进一步抵消由光梳系统的频率漂移带来的测量误差;整个成像装置从多角度入手保证了成像图谱的高精度输出; 4) The electrical signal carrying the characteristics of the optical comb generated by the optical comb and the continuous frequency-stabilized laser has multiple utilization values: on the one hand, it feeds back the pumping current of the laser cavity of the optical comb seed source and the electro-optic modulator in the cavity, and stabilizes the optical comb light source. On the other hand, it mixes with the interference spectrum signal obtained in the optical comb imaging process to further offset the measurement error caused by the frequency drift of the optical comb system; the entire imaging device ensures the accuracy of the imaging spectrum from multiple angles. High precision output;

5)光学频率梳输出激光的脉冲宽度一般在飞秒(10-15s)量级,甚至可以通过控制激光的高阶色散获得更窄的脉冲输出,这相当于提高了光学探针的精度,有利于实现超分辨光谱探测和显微成像技术; 5) The pulse width of the laser output by the optical frequency comb is generally on the order of femtoseconds (10 -15 s), and even narrower pulse output can be obtained by controlling the high-order dispersion of the laser, which is equivalent to improving the accuracy of the optical probe. Conducive to the realization of super-resolution spectral detection and microscopic imaging technology;

6)光学频率梳可以通过光子晶体光纤等元件实现频域拓展,使其输出频带具有覆盖紫外、可见与红外等较宽的范围;双光梳成像系统能够充分利用这一特点,在同一时刻使物质分子中多个分子振动模式得到共振增强,产生相应的光谱信号,因此在对生物系统和其他含有多种成份的复杂系统进行非侵入光谱识别和显微成像的过程中具有显著优势; 6) The optical frequency comb can expand the frequency domain through components such as photonic crystal fibers, so that its output frequency band can cover a wide range of ultraviolet, visible and infrared; the dual-comb imaging system can make full use of this feature and use it at the same time Multiple molecular vibration modes in a substance molecule are resonantly enhanced to generate corresponding spectral signals, so it has significant advantages in the process of non-invasive spectral identification and microscopic imaging of biological systems and other complex systems containing multiple components;

7)光学频率梳的重复频率一般在几百兆赫兹(106Hz)至几个吉赫兹(109Hz)量级,且其输出脉冲通常可以通过功率放大器达到百瓦量级的强度;具有高峰值功率和较低的单脉冲能量的超短激光脉冲能够最大限度地减小对生物样品的光致损伤,同时,高脉冲重复频率的超短脉冲激光能够有效满足成像系统中快速获取信号的需要。 7) The repetition frequency of the optical frequency comb is generally on the order of hundreds of megahertz (10 6 Hz) to several gigahertz (10 9 Hz), and its output pulse can usually reach the intensity of hundreds of watts through the power amplifier; it has Ultrashort laser pulses with high peak power and low single-pulse energy can minimize the photoinduced damage to biological samples. need.

附图说明 Description of drawings

图1为本发明实施例一中装置结构示意图; Fig. 1 is a schematic diagram of the device structure in Embodiment 1 of the present invention;

图2为本发明实施例二中用全光纤型双光梳系统进行样品扫描成像的示意图; 2 is a schematic diagram of sample scanning and imaging using an all-fiber dual-comb system in Embodiment 2 of the present invention;

图3为本发明实施例三中用半空间半光纤型双光梳系统进行相干反斯托克斯拉曼散射成像的示意图。 3 is a schematic diagram of coherent anti-Stokes Raman scattering imaging using a half-space, half-fiber dual-comb system in Embodiment 3 of the present invention.

具体实施方式 Detailed ways

以下结合附图通过实施例对本发明的特征及其它相关特征作进一步详细说明,以便于同行业技术人员的理解: The features of the present invention and other relevant features are described in further detail below in conjunction with the accompanying drawings through the embodiments, so as to facilitate the understanding of those skilled in the art:

如图1-3,图中标记1-31分别为:光学频率梳种子源1、光学频率梳种子源2、重复频率锁定模块3、连续稳频激光发生模块4、连续稳频激光与双光梳相互作用模块5、射频信号功率分配与处理模块6、倍频器7、双光学频率梳光学成像模块8、样品数据采集与处理模块9、计算机10、光纤波分复用器11、增益光纤12、光纤光隔离器13、光纤耦合输出器14、光纤偏振控制器15、光学电机延迟模块16、偏振分束器17、二向色镜18、扫描振镜19、全反镜20、显微物镜21、一维样品台22、空间带通滤波片23、腔内偏振分束器24、腔内半波片25、斜披对26、光子晶体光纤27、啁啾镜28、空间低频滤波片29、三维样品台30、空间高频滤波片31; As shown in Figure 1-3, the marks 1-31 in the figure are: optical frequency comb seed source 1, optical frequency comb seed source 2, repetition frequency locking module 3, continuous frequency stabilized laser generation module 4, continuous frequency stabilized laser and dual light Comb interaction module 5, RF signal power distribution and processing module 6, frequency multiplier 7, dual optical frequency comb optical imaging module 8, sample data acquisition and processing module 9, computer 10, optical fiber wavelength division multiplexer 11, gain fiber 12. Fiber optic isolator 13, fiber coupler 14, fiber optic polarization controller 15, optical motor delay module 16, polarization beam splitter 17, dichroic mirror 18, scanning galvanometer 19, total reflection mirror 20, microscope Objective lens 21, one-dimensional sample stage 22, spatial bandpass filter 23, intracavity polarization beam splitter 24, intracavity half-wave plate 25, oblique pair 26, photonic crystal fiber 27, chirped mirror 28, spatial low frequency filter 29. Three-dimensional sample stage 30, spatial high-frequency filter 31;

其中,LD代表半导体激光器、PZT代表压电陶瓷晶体,EOM代表电光调制器,SESAM代表半导体可饱和吸收镜; Among them, LD stands for semiconductor laser, PZT stands for piezoelectric ceramic crystal, EOM stands for electro-optic modulator, and SESAM stands for semiconductor saturable absorber mirror;

图中实线代表光传播路线,虚线代表电路传输路线。 The solid line in the figure represents the light propagation route, and the dotted line represents the circuit transmission route.

实施例一:如图1所示,本实施例具体涉及一种基于连续稳频激光的双光学频率梳光学成像方法,将双光梳种子源(即光学频率梳种子源1和光学频率梳种子源2)通过重复频率控制模块3锁定在外界稳定的原子钟上,同时,连续稳频激光与双光梳相互作用模块5将连续稳频激光发生模块4产生的连续激光与两路光学频率梳种子源(即光学频率梳种子源1和光学频率梳种子源2)的输出激光做拍频,将携带有光梳频率不稳定度的电学信号提取出来,并将该信号进行射频信号功率分配与处理,其一部分直接用于反馈控制光学频率梳种子源内的激光谐振腔特性,以稳定半导体激光器LD的输出载波包络相位频率,另一部分用于与双光学频率梳光学成像模块8产生的周期性干涉信号进行混频,进一步将双光学频率梳光学成像模块8的频率漂移量抵消掉,从而从两个方面入手控制整个双光学频率梳光学成像模块8的测量精度,实现快速、超高分辨的光梳相干成像。 Embodiment 1: As shown in Figure 1, this embodiment specifically relates to a dual-optical frequency comb optical imaging method based on continuous frequency-stabilized lasers. The source 2) is locked on the external stable atomic clock through the repetition frequency control module 3. At the same time, the continuous frequency stabilized laser and the double optical comb interaction module 5 combine the continuous laser generated by the continuous frequency stabilized laser generation module 4 with the two optical frequency comb seeds The output laser of the optical frequency comb source (namely optical frequency comb seed source 1 and optical frequency comb seed source 2) is used for beat frequency, and the electrical signal carrying the frequency instability of the optical comb is extracted, and the signal is subjected to RF signal power distribution and processing , a part of which is directly used to feedback control the characteristics of the laser resonator in the optical frequency comb seed source to stabilize the output carrier envelope phase frequency of the semiconductor laser LD, and the other part is used for periodic interference with the dual optical frequency comb optical imaging module 8 The signal is mixed to further offset the frequency drift of the dual optical frequency comb optical imaging module 8, so as to control the measurement accuracy of the entire dual optical frequency comb optical imaging module 8 from two aspects, and realize fast and ultra-high resolution optical imaging Comb coherent imaging.

如图1所示,两台光学频率梳种子源1和2均为由半导体激光器LD泵浦的脉冲激光发生源,其激光谐振腔内需具有可调节腔长的压电陶瓷晶体PZT与可控制色散特性的电光调制器EOM。两台光学频率梳种子源1、2输出激光的中心波长决定于激光谐振腔内的增益介质,可根据待测样品基本光学响应特性选择合适的种子源系统。 As shown in Figure 1, the two optical frequency comb seed sources 1 and 2 are both pulsed laser sources pumped by semiconductor laser LD, and the laser resonator needs to have piezoelectric ceramic crystal PZT with adjustable cavity length and controllable dispersion Characteristics of electro-optical modulator EOM. The central wavelength of the laser output from the two optical frequency comb seed sources 1 and 2 is determined by the gain medium in the laser resonator, and the appropriate seed source system can be selected according to the basic optical response characteristics of the sample to be tested.

如图1所示,为满足系统双光梳相干光学成像的要求,需使两台光学频率梳种子源1、2输出脉冲的重复频率信号具有微小差值,该差值一般在百KHz至Hz量级。 As shown in Figure 1, in order to meet the requirements of the system’s dual-comb coherent optical imaging, it is necessary to make the repetition frequency signals of the output pulses of the two optical frequency comb seed sources 1 and 2 have a small difference, which is generally in the range of 100 KHz to Hz order of magnitude.

如图1所示,重复频率锁定模块3具有将两个光学频率梳种子源1、2输出重复频率信号分别精密锁定的两套独立锁相环电路,其各自的工作过程为:将由光电探测器探测到光梳重复频率信号通过与外界原子钟触发的标准信号做混频,得到误差信号,并经过放大后反馈控制光梳种子源内的压电陶瓷晶体PZT,从而锁定激光谐振腔的腔长,从而控制每一台光学频率梳种子源1、2输出脉冲在时间域上的稳定性。 As shown in Figure 1, the repetition frequency locking module 3 has two sets of independent phase-locked loop circuits that precisely lock the output repetition frequency signals of the two optical frequency comb seed sources 1 and 2 respectively. The detected repetition frequency signal of the optical comb is mixed with the standard signal triggered by the external atomic clock to obtain an error signal, which is amplified and fed back to control the piezoelectric ceramic crystal PZT in the optical comb seed source, thereby locking the cavity length of the laser resonator, thereby Control the stability of the output pulses of each optical frequency comb seed source 1 and 2 in the time domain.

如图1所示,连续稳频激光发生模块4为整个双光梳系统提供了频率域的稳定标准,其输出激光通过与两台光学频率梳种子源1、2输出光进行拍频而获得光梳的频率漂移信息。在实际测量过程中,需根据光学频率梳输出光特性来合理选择连续稳频激光的输出波长并控制其偏振态,以获得高信噪比的射频信号来控制整个成像系统。此处连续稳频激光是指激光频率线宽在Hz量级的单纵模激光,其发生装置(即连续稳频激光发生模块4)一般由普通连续激光器配合法布里-珀罗腔(F-P腔),并利用增益曲线,以原子本身跃迁中心频率为参考频率构成的激光稳频系统。同时,需要采用诸如恒温、膨胀系数匹配、防震、密封、稳定电源等措施进行激光的被动式稳频,进一步保证连续激光的频率稳定性,使其成为双光梳系统的频率标准。 As shown in Figure 1, the continuous frequency-stabilized laser generator module 4 provides a stable standard in the frequency domain for the entire dual optical comb system, and its output laser light is obtained by beating the output light of two optical frequency comb seed sources 1 and 2. Comb frequency drift information. In the actual measurement process, it is necessary to reasonably select the output wavelength of the continuous frequency stabilized laser and control its polarization state according to the output light characteristics of the optical frequency comb, so as to obtain a high signal-to-noise ratio radio frequency signal to control the entire imaging system. The continuous frequency stabilized laser here refers to the single longitudinal mode laser with a laser frequency linewidth in the order of Hz, and its generator (i.e. the continuous frequency stabilized laser generation module 4) generally consists of an ordinary continuous laser combined with a Fabry-Perot cavity (F-P cavity), and use the gain curve to form a laser frequency stabilization system with the transition center frequency of the atom itself as the reference frequency. At the same time, it is necessary to adopt measures such as constant temperature, expansion coefficient matching, shockproof, sealing, and stable power supply to carry out passive frequency stabilization of the laser to further ensure the frequency stability of the continuous laser, making it the frequency standard of the dual optical comb system.

如图1所示,连续稳频激光与双光梳相互作用模块5是两台光学频率梳种子源1、2的输出激光与连续稳频激光这三路光信号进行相干拍频,并获得携带有光学频率梳载波包络相位漂移信息的射频信号的光电结合装置。其包括两套独立的光梳与连续激光拍频所需的光学元件与拍频信号滤取与差频所需的电学元件。其主要功能是将分束得到的两台光学频率梳种子源1、2的输出激光分别与连续稳频激光做拍频,并滤取两台光梳中位于同一位置的光梳梳齿与连续稳频激光产生的两个拍频信号做混频,得到的差频信号f - 用作射频信号功率分配与处理。由于连续稳频激光提供了可靠的频率标准,且两个光学频率梳种子源1、2的重复频率已得到精密控制,故所得到的f - 信号即反应了双光学频率梳系统由于载波包络相位漂移所引起的频率不稳定性,亦即光梳的载波包络相位漂移频率以射频信号的形式传递出来。 As shown in Figure 1, the continuous frequency stabilized laser and dual optical comb interaction module 5 is the output laser of two optical frequency comb seed sources 1 and 2 and the three optical signals of the continuous frequency stabilized laser for coherent beat frequency, and obtains the carried An optoelectronic combination device for radio frequency signals with phase shift information of the carrier envelope of an optical frequency comb. It includes two sets of independent optical combs and optical components required for continuous laser beat frequency and electrical components required for beat frequency signal filtering and difference frequency. Its main function is to beat the output lasers of the two optical frequency comb seed sources 1 and 2 obtained by beam splitting with the continuous frequency-stabilized laser respectively, and filter the comb teeth and continuous The two beat frequency signals generated by the frequency-stabilized laser are mixed, and the obtained difference frequency signal f - is used for power distribution and processing of radio frequency signals. Since the continuous frequency-stabilized laser provides a reliable frequency standard, and the repetition frequency of the two optical frequency comb seed sources 1 and 2 has been precisely controlled, the f - signal obtained reflects the carrier envelope of the dual optical frequency comb system. The frequency instability caused by phase drift, that is, the carrier envelope phase drift frequency of the optical comb is transmitted in the form of radio frequency signals.

如图1所示,射频信号功率分配与处理模块6由电子功率分配器构成,需根据射频信号的数值合理选择分频器的带宽,以满足系统的高速响应,抑制附加噪声。本方法中将输入的射频信号分成三路。 As shown in Figure 1, the radio frequency signal power distribution and processing module 6 is composed of an electronic power divider, and the bandwidth of the frequency divider needs to be reasonably selected according to the value of the radio frequency signal to meet the high-speed response of the system and suppress additional noise. In this method, the input radio frequency signal is divided into three paths.

如图1所示,射频信号功率分配与处理模块6产生的三路信号中,一路用于反馈控制两台光学频率梳种子源1、2的泵浦激光器(即半导体激光器LD),一路用于反馈控制两台光学频率梳种子源1、2激光谐振腔内部的电光调制器EOM,一路用于与采集到的样品信号混频,从多方面入手控制整个测量装置内的频率稳定度。 As shown in Figure 1, among the three signals generated by the RF signal power distribution and processing module 6, one is used for feedback control of the pump lasers (i.e. semiconductor laser LD) of the two optical frequency comb seed sources 1 and 2, and the other is used for Feedback controls the electro-optic modulator EOM inside the two optical frequency comb seed sources 1 and 2, one of which is used to mix with the collected sample signal, and controls the frequency stability of the entire measurement device from multiple aspects.

如图1所示,由于光学频率梳种子源与连续稳频激光相互作用产生的射频信号频段不一定与光学频率梳光学成像模块8产生的干涉谱信号在同一频段,故需使用倍频器将上述功分得到的信号之一倍频,使其能够与干涉谱信号做混频,刚好抵消掉光梳系统的频率不稳定度。 As shown in Figure 1, since the frequency band of the radio frequency signal generated by the interaction between the optical frequency comb seed source and the continuous frequency-stabilized laser is not necessarily in the same frequency band as the interference spectrum signal generated by the optical frequency comb optical imaging module 8, it is necessary to use a frequency doubler to One of the signals obtained from the above power division is frequency-multiplied so that it can be mixed with the interference spectrum signal, which just offsets the frequency instability of the optical comb system.

如图1所示,双光学频率梳光学成像模块8将两台光学频率梳种子源1、2中的一路光作为探测光,另一路光作为参考光进行样品形貌探测,可根据探测方法的不同搭建结构不同的探测装置,以使样品的光学信息得以充分激发。 As shown in Figure 1, the dual optical frequency comb optical imaging module 8 uses one path of light in the two optical frequency comb seed sources 1 and 2 as the detection light, and the other path of light as the reference light to detect the sample shape, which can be determined according to the detection method. Different detection devices with different construction structures can fully stimulate the optical information of the sample.

如图1所示,样品数据采集与处理模块9包括平衡探测装置、数据采集卡与弱信号分析器等元件,将样品逐点扫描过程中得到的大量数据提取出来,获得干涉谱信号,此干涉谱信号经过进一步的噪声处理,得到最终的光谱信号,再将此信号还原成样品形貌信息,实现双光梳光谱成像。 As shown in Figure 1, the sample data acquisition and processing module 9 includes components such as a balance detection device, a data acquisition card, and a weak signal analyzer, and extracts a large amount of data obtained during the point-by-point scanning of the sample to obtain an interference spectrum signal. The spectral signal is subjected to further noise processing to obtain the final spectral signal, and then the signal is restored to sample morphology information to realize dual-comb spectral imaging.

如图1所示,计算机10可以配合完成数据处理过程的程序运行,并可以通过编程将成像过程实现为可视化,从而光梳成像的实时监测,保障系统的高速有效运转。 As shown in FIG. 1 , the computer 10 can cooperate with the program to complete the data processing process, and can visualize the imaging process through programming, so that the real-time monitoring of optical comb imaging can ensure the high-speed and effective operation of the system.

如图1所示,本实施例中基于连续稳频激光的双光学频率梳光学成像法具体步骤如下: As shown in Figure 1, the specific steps of the dual optical frequency comb optical imaging method based on continuous frequency-stabilized laser in this embodiment are as follows:

首先,调节两个光学频率梳种子源1、2处于良好的自启动锁模状态,并将其各自的输出激光分为三束,其中一部分经过光电探测器进入重复频率锁定模块3,通过基于锁相环的电子伺服反馈系统将光梳的重复频率信号精密锁定在外界原子钟上,另一部分分束得到的光梳激光用来与连续稳频激光相互作用,最后一部分分束得到的光梳激光用来产生光梳成像信号。两个具有微小重复频率差的光学频率梳种子源1、2的输出频率分别为f comb1 =nf rep +f ceo f comb2 =n(f rep +Δf rep )+f ceo ,其中,f rep 是光学频率梳种子源1的重复频率,Δf rep 是所述光学频率梳种子源2与光学频率梳种子源1的重复频率的微小差值,f ceo f ceo 是未经锁定的光频频率。 First, the two optical frequency comb seed sources 1 and 2 are adjusted to be in a good self-starting mode-locking state, and their respective output lasers are divided into three beams, and a part of them enters the repetition frequency locking module 3 through the photodetector. The electronic servo feedback system of the phase loop precisely locks the repetition frequency signal of the optical comb on the external atomic clock, and the other part of the beam-split optical comb laser is used to interact with the continuous frequency-stabilized laser, and the last part of the beam-split optical comb laser is used to to generate optical comb imaging signals. The output frequencies of the two optical frequency comb seed sources 1 and 2 with a small repetition frequency difference are f comb1 =nf rep +f ceo and f comb2 =n(f rep +Δf rep )+f ceo ' respectively, where f rep is the repetition frequency of the optical frequency comb seed source 1, Δfrep is the slight difference between the repetition frequency of the optical frequency comb seed source 2 and the optical frequency comb seed source 1, f ceo and f ceo ' are the unlocked optical frequencies frequency.

其次,连续稳频激光与两台光学频率梳种子源1、2的输出光经过连续稳频激光与双光梳相互作用模块5相干拍频,将位于同一位置的光梳梳齿与连续激光产生的两个频率相近的拍频信号滤取出来做差频,得到射频信号f - ,该信号反应了上述f ceo f ceo 的漂移度,并将难以测量的光学频率转化为便于操作的电学频率。通过射频信号功率分配与处理模块6将f - 信号分为等值的三路f 1 f 2  f 3 信号,来分别控制光梳种子源腔内电光调制器EOM、半导体激光器LD电流与成像系统探测得到的样品光谱信号。 Secondly, the continuous frequency-stabilized laser and the output light of the two optical frequency comb seed sources 1 and 2 are coherently beat by the continuous frequency-stabilized laser and the dual-comb interaction module 5, and the comb teeth of the optical comb and the continuous laser at the same position are generated The two beat frequency signals with similar frequencies are filtered out to make the difference frequency, and the radio frequency signal f - is obtained, which reflects the drift degree of the above f ceo and f ceo ' , and converts the difficult-to-measure optical frequency into an easy-to-operate electrical frequency. The f - signal is divided into three equal-value f 1 , f 2 and f 3 signals by the radio frequency signal power distribution and processing module 6 to control the electro-optic modulator EOM in the cavity of the optical comb seed source, the current and imaging of the semiconductor laser LD The system detects the obtained sample spectral signal.

同时,光学频率梳种子源1、2的另一部分输出光进入双光学频率梳光学成像模块8中进行样品探测,合理控制光学频率梳种子源1、2输出激光的啁啾特性、光谱覆盖范围、峰值功率与偏振态等因素,使待测样品的光学特性得以充分激发,通过机械扫描振镜或样品台的精密转动,完成样品的逐点测量过程,得到样品的干涉谱信号f i At the same time, another part of the output light from the optical frequency comb seed sources 1 and 2 enters the dual optical frequency comb optical imaging module 8 for sample detection, and reasonably controls the chirp characteristics, spectral coverage and spectral coverage of the optical frequency comb seed sources 1 and 2 output lasers. Factors such as peak power and polarization state fully excite the optical properties of the sample to be measured. Through the precise rotation of the mechanical scanning galvanometer or the sample stage, the point-by-point measurement process of the sample is completed, and the interference spectrum signal f i of the sample is obtained.

最后,将经过倍频器7产生的nf 3 信号与f i 信号做混频,进一步抵消由双光梳未锁定的载波包络相位频率给测量带来的误差,得到最终的信号f signal 进行逐点还原,通过计算机显示,实现待测样品的快速、高分辨率光学成像。 Finally, the nf 3 signal generated by the frequency multiplier 7 is mixed with the f i signal to further offset the error caused by the carrier envelope phase frequency unlocked by the dual optical comb to the measurement, and the final signal f signal is obtained for step-by-step Point restoration, through computer display, realizes fast and high-resolution optical imaging of the sample to be tested.

  the

实施例二:如图2所示为采用偏振旋转锁模式全光纤激光器作为光学频率梳种子源,进行双光梳样品扫描成像的示意图,具体步骤如下: Embodiment 2: As shown in Figure 2, it is a schematic diagram of using a polarization rotation-locked mode all-fiber laser as an optical frequency comb seed source to perform scanning imaging of a dual-comb sample, and the specific steps are as follows:

(1)两台光学频率梳种子源1、2均采用全光纤型采用结构,用980nm半导体激光器LD作为泵浦源,通过光纤波分复用器11进入激光谐振腔内,单模的掺镱增益光纤12作为增益介质,光纤隔离器13保证激光的单向运转,压电陶瓷晶体PZT缠绕于腔内单模光纤上,电光调制器EOM采用光纤式相位和强度调制器;调整腔内的光纤偏振控制器15,使激光器达到稳定锁模状态;锁模脉冲激光通过光纤耦合输出器14输出。 (1) The two optical frequency comb seed sources 1 and 2 both adopt an all-fiber structure, use a 980nm semiconductor laser LD as a pump source, enter the laser cavity through a fiber wavelength division multiplexer 11, and single-mode ytterbium-doped The gain fiber 12 is used as the gain medium, the fiber isolator 13 ensures the one-way operation of the laser, the piezoelectric ceramic crystal PZT is wound on the single-mode fiber in the cavity, and the electro-optic modulator EOM adopts a fiber-optic phase and intensity modulator; The polarization controller 15 makes the laser reach a stable mode-locked state; the mode-locked pulse laser is output through the fiber coupler 14 .

(2)在重复频率锁定模块3中,将由光电探测器探测到的光梳重复频率信号通过与外界原子钟触发的标准信号做混频,得到误差信号进行放大,反馈控制光学频率梳种子源1、2内的压电陶瓷晶体PZT,从而锁定每一台光学频率梳种子源输出脉冲在时间域上的稳定性。 (2) In the repetition frequency locking module 3, the optical comb repetition frequency signal detected by the photodetector is mixed with the standard signal triggered by the external atomic clock to obtain an error signal for amplification, and the feedback control optical frequency comb seed source 1, 2 piezoelectric ceramic crystal PZT, so as to lock the stability of the output pulse of each optical frequency comb seed source in the time domain.

(3)基于光学频率梳种子源1、2的全光纤特性,连续稳频激光与双光梳相互作用模块5的光学部分也可以采用全光纤式,合理选择光学耦合器、光纤带通滤波器的中心波长,使获得的拍频信号具有较高的信噪比;电学部分需选择两个通频带宽在±10MHz以下的带通滤波器将频率相近的两个拍频信号滤取出来,再通过混频器进行混频,取其差频信号f - 作为系统的反馈控制射频信号。 (3) Based on the all-fiber characteristics of the optical frequency comb seed sources 1 and 2, the optical part of the continuous frequency-stabilized laser and the dual-comb interaction module 5 can also use an all-fiber type, and a reasonable selection of optical couplers and optical fiber bandpass filters center wavelength, so that the obtained beat frequency signal has a higher signal-to-noise ratio; the electrical part needs to select two bandpass filters with a passband bandwidth below ±10MHz to filter out two beat frequency signals with similar frequencies, and then The frequency is mixed by a mixer, and the difference frequency signal f - is taken as the feedback control radio frequency signal of the system.

(4)两台光梳的部分输出激光通过各自相应波段的准直器将光纤光转化为空间光,将光学频率梳种子源1的输出光作为探测光,光学频率梳种子源2的输出光作为参考光进行双光梳相干成像探测。 (4) Part of the output laser light of the two optical combs is converted into a spatial light through the collimator of the corresponding band, and the output light of the optical frequency comb seed source 1 is used as the detection light, and the output light of the optical frequency comb seed source 2 is As a reference light for dual-comb coherent imaging detection.

(5)光学频率梳种子源1的输出光首先通过一个由高反镜构成的光学电机延迟模块16,该模块的作用是调整探测光在从输出端口到待测样品再到进入探测器的过程中与参考光所走的空间光程的长度,即保证在到达样品数据采集与处理模块9中的平衡探测器时,两路激光所经历的光程一致,以保证信号光与参考光可以实现拍频。 (5) The output light of the optical frequency comb seed source 1 first passes through an optical motor delay module 16 composed of a high reflection mirror. The function of this module is to adjust the process of the probe light from the output port to the sample to be tested and then to the detector The length of the spatial optical path taken by the middle and reference light, that is, to ensure that when reaching the balance detector in the sample data acquisition and processing module 9, the optical paths experienced by the two laser beams are consistent, so as to ensure that the signal light and the reference light can realize beat frequency.

(6)作为参考光的光学频率梳种子源2的输出激光通过偏振分束器17分为两束,一束通过二向色镜18与探测光一同入射样品,另一束直接进入探测器,参考激光在成像过程中可以作为泵浦光源激发样品的分子跃迁,使成像过程中的非线性效应得以顺利完成,另一方面可以在探测过程中为得到的干涉谱信号提供统一化标准,增强测量结果的协调性与可信度。 (6) The output laser light of the optical frequency comb seed source 2 used as reference light is divided into two beams by the polarization beam splitter 17, one beam enters the sample together with the probe light through the dichroic mirror 18, and the other beam directly enters the detector, The reference laser can be used as a pump light source to excite the molecular transition of the sample during the imaging process, so that the nonlinear effect in the imaging process can be successfully completed. On the other hand, it can provide a unified standard for the obtained interference spectrum signal during the detection process and enhance the measurement. Consistency and credibility of results.

(7)经过二向色镜18合束的参考激光与探测激光首先入射至扫描振镜19,经全反镜20反射后再通过显微物镜组21对放置于一维样品台22上的样品进行光梳光谱成像探测。通过扫描振镜19的移动扫描,获取样品三维成像图中x轴与y轴的构建,并使样品在每一点,通过光学频率梳进行深度测量,即获得三维成像图中的z轴信息。 (7) The reference laser beam and probe laser beam combined by the dichroic mirror 18 are first incident on the scanning galvanometer 19, reflected by the total reflection mirror 20, and then passed through the microscope objective lens group 21 to pair the sample placed on the one-dimensional sample stage 22 Perform optical comb spectral imaging detection. Through the moving scanning of the scanning galvanometer 19, the construction of the x-axis and y-axis in the three-dimensional imaging diagram of the sample is obtained, and the depth measurement of the sample is performed through the optical frequency comb at each point, that is, the z-axis information in the three-dimensional imaging diagram is obtained.

(8)经过样品后的激光通过空间带通滤波片23,滤除掉探测过程中与信号无关的杂散光,提高干涉谱信号的信噪比。 (8) After passing through the sample, the laser light passes through the spatial bandpass filter 23 to filter out stray light irrelevant to the signal during the detection process and improve the signal-to-noise ratio of the interference spectrum signal.

(9)在样品数据采集与处理模块9中,将经过光学滤波的探测光与参考光进行平衡探测,并用相应的高速数据采集卡进行数据采集,得到的干涉谱信号f i 与通过倍频器7产生的携带光梳频率抖动的射频信号nf 3 做混频,以进一步控制光梳系统的相位误差,得到具有样品光学信息的信号f signal 。通过计算机10完成对f signal 信号的还原与呈现,以实现高分辨率的逐点式双光梳光谱信息测量与样品光学成像。 (9) In the sample data acquisition and processing module 9, the optically filtered probe light and reference light are detected in balance, and the corresponding high-speed data acquisition card is used for data acquisition, and the obtained interference spectrum signal f i is compared with the frequency multiplier 7. The generated radio frequency signal nf 3 carrying the frequency jitter of the optical comb is mixed to further control the phase error of the optical comb system to obtain a signal f signal with optical information of the sample. The restoration and presentation of the f signal is completed by the computer 10, so as to realize high-resolution point-by-point double-comb spectral information measurement and sample optical imaging.

  the

实施例三:如图3所示为基于SESAM的半空间半光纤型激光器作为光学频率梳种子源,进行双光梳相干反斯托克斯拉曼散射成像的示意图,具体步骤如下: Embodiment three: as shown in Figure 3, a half-space half-fiber laser based on SESAM is used as an optical frequency comb seed source to perform a schematic diagram of dual-comb coherent anti-Stokes Raman scattering imaging, and the specific steps are as follows:

(1)两台光学频率梳种子源1、2均采用全光纤型采用结构,用980nm半导体激光器LD作为泵浦源,通过光纤波分复用器11进入激光谐振腔内,增益光纤12作为增益介质,光纤隔离器13保证激光的单向运转,压电陶瓷晶体PZT缠绕于腔内单模光纤上。 (1) The two optical frequency comb seed sources 1 and 2 both adopt an all-fiber structure, use a 980nm semiconductor laser LD as a pump source, enter the laser cavity through a fiber wavelength division multiplexer 11, and use a gain fiber 12 as a gain medium, the fiber isolator 13 ensures the one-way operation of the laser, and the piezoelectric ceramic crystal PZT is wound on the single-mode fiber in the cavity.

(2)基于激光谐振腔的半空间半光纤特点,腔内偏振分束器24配合腔内半波片25的使用,使从偏振分束器24输出的部分激光作为光学频率梳种子源1、2的输出端口,另一部分激光通过自由空间电光调制器EOM,再经过斜披对,入射至半导体可饱和吸收镜SESAM,其中斜披对的作用是调整激光谐振腔的色散特性,使其输出超短脉冲。合理选择半导体可饱和吸收镜SESAM响应波段与调制深度,使激光谐振腔达到稳定的锁模状态。 (2) Based on the half-space and half-fiber characteristics of the laser resonator, the intracavity polarization beam splitter 24 is used in conjunction with the intracavity half-wave plate 25, so that part of the laser output from the polarization beam splitter 24 is used as the optical frequency comb seed source 1, 2, the other part of the laser light passes through the free-space electro-optic modulator EOM, and then passes through the oblique pair, and then enters the semiconductor saturable absorbing mirror SESAM. short pulse. Reasonable selection of the semiconductor saturable absorber mirror SESAM response band and modulation depth enables the laser resonator to achieve a stable mode-locked state.

(3)由于两台光学频率梳种子源1、2均呈现空间光输出状态,故使用相应波段的分束器将光梳光分束。对每台光学频率梳种子源而言,其输出激光至少分为三束,一束用来入射至重复频率锁定模块3,一束用来进入连续稳频激光与双光梳相互作用模块5与连续稳频激光发生相互作用,另外一束用作光梳成像。 (3) Since the two optical frequency comb seed sources 1 and 2 are both in the state of spatial light output, the beam splitter of the corresponding wavelength band is used to split the optical comb light. For each optical frequency comb seed source, its output laser is divided into at least three beams, one beam is used to enter the repetition frequency locking module 3, and the other beam is used to enter the continuous frequency-stabilized laser and the dual optical comb interaction module 5 and The continuous frequency-stabilized lasers interact, and the other beam is used as an optical comb for imaging.

(4)在重复频率锁定模块3中,将由光电探测器探测到的光梳重复频率信号通过与外界原子钟触发的标准信号做混频,得到误差信号进行放大,反馈控制光梳种子源内的压电陶瓷晶体PZT,从而锁定每一台光学频率梳输出脉冲在时间域上的稳定性。 (4) In the repetition frequency locking module 3, the repetition frequency signal of the optical comb detected by the photodetector is mixed with the standard signal triggered by the external atomic clock, and the error signal is obtained for amplification, and the feedback controls the piezoelectricity in the optical comb seed source. The ceramic crystal PZT locks the stability of the output pulse of each optical frequency comb in the time domain.

(4)基于本实施例中光梳种子源的空间光输出特点,连续稳频激光与双光梳相互作用模块5的光学部分也可以采用空间形式,其包括合束片、光栅、小孔光阑、汇聚透镜与光电探测器等元件,调整各个元件的俯仰角度,使获得的拍频信号具有较高的信噪比;电学部分需选择两个通频带宽在±10MHz以下的带通滤波器将频率相近的两根拍频信号滤取出来,再通过混频器进行混频,取其差频信号f - 作为系统的反馈控制射频信号。 (4) Based on the spatial light output characteristics of the optical comb seed source in this embodiment, the optical part of the continuous frequency-stabilized laser and the dual optical comb interaction module 5 can also adopt a spatial form, which includes beam combining sheets, gratings, and pinhole light Adjust the pitch angle of each component, so that the obtained beat frequency signal has a higher signal-to-noise ratio; the electrical part needs to select two band-pass filters with a passband bandwidth below ±10MHz The two beat frequency signals with similar frequencies are filtered out, and then mixed by a mixer, and the difference frequency signal f - is taken as the feedback control radio frequency signal of the system.

(5)通过光子晶体光纤27将光学频率梳种子源1的输出激光光谱范围展宽,合理控制输入光子晶体光纤的激光的偏振态、峰值功率、脉冲宽度等参数,使得从光子晶体光纤27输出的激光获得频谱范围覆盖可见至红外的较宽范围。飞秒脉冲激光泵浦光子晶体光纤27产生超连续光谱激光输出作为泵浦光源,可以实现具有较宽的可同时探测光谱范围的宽带CARS 光谱探测和显微成像技术。 (5) Broaden the spectral range of the output laser from the optical frequency comb seed source 1 through the photonic crystal fiber 27, reasonably control the polarization state, peak power, pulse width and other parameters of the laser input into the photonic crystal fiber, so that the output from the photonic crystal fiber 27 Lasers obtain a spectral range covering a wide range from the visible to the infrared. The femtosecond pulse laser pumps the photonic crystal fiber 27 to generate a supercontinuum laser output as a pump light source, which can realize broadband CARS spectral detection and microscopic imaging technology with a wide and simultaneous detection spectral range.

(6)将由光学频率梳种子源1分束得到的部分激光与由光学频率梳种子源2分束得到的部分激光一同入射进行双光梳相干成像探测。两路激光通过空间的二向色镜18合束,在空间达到光场的重叠,同向传播。 (6) Part of the laser beam split by the optical frequency comb seed source 1 and part of the laser beam split by the optical frequency comb seed source 2 are incident together for dual-comb coherent imaging detection. The two laser beams are combined by the dichroic mirror 18 in the space, and the light fields are overlapped in the space, and propagate in the same direction.

(7)经过二向色镜18合束的两路光梳激光经全反镜20反射后首先入射至啁啾镜组28,将光梳的输出激光进行进一步的色散管理,补偿由激光谐振腔及光梳功率放大器、光子晶体光纤所产生的二阶色散及高阶色散,使激光达到超窄脉冲的输出状态,满足高分辨率光梳成像的要求。 (7) After being reflected by the total reflection mirror 20, the two-way optical comb laser beams combined by the dichroic mirror 18 are first incident on the chirped mirror group 28, and the output laser light of the optical comb is further managed for dispersion, and the compensation is made by the laser resonator And the second-order dispersion and higher-order dispersion produced by the optical comb power amplifier and photonic crystal fiber, so that the laser can reach the output state of ultra-narrow pulse, which meets the requirements of high-resolution optical comb imaging.

(8)在双光梳相干反斯托克斯拉曼散射成像的过程中,泵浦光与由泵浦光频率与样品拉曼频移之差而成的斯托克斯光(探测光)借助结合相位匹配技术被混频,激光通过三阶非线性极化率同介质相互作用产生频率上移的振荡偏振,发出相干反斯托克斯拉曼散射信号。故从啁啾镜28输出的激光首先经过空间低频滤波片29,将光学频率梳较复杂的光谱成分中用于信号探测的部分激光滤取出来,并通过显微物镜21对放置于三维样品台30上的样品进行探测,经过样品后的激光通过空间高频滤波片31,获得待探测的频率上移的相干反斯托克斯拉曼散射信号。 (8) In the process of dual-comb coherent anti-Stokes Raman scattering imaging, the pump light and the Stokes light (probe light) formed by the difference between the frequency of the pump light and the Raman frequency shift of the sample The laser is frequency-mixed by combining the phase-matching technology, and the laser interacts with the medium through the third-order nonlinear susceptibility to generate an oscillation polarization with a frequency shift, and emits a coherent anti-Stokes Raman scattering signal. Therefore, the laser output from the chirped mirror 28 first passes through the spatial low-frequency filter 29 to filter out part of the laser light used for signal detection in the more complex spectral components of the optical frequency comb, and place it on the three-dimensional sample stage through the pair of microscope objective lenses 21 The sample on 30 is detected, and the laser light passing through the sample passes through the spatial high-frequency filter 31 to obtain the coherent anti-Stokes Raman scattering signal shifted up in frequency to be detected.

(9)在双光梳光学成像过程中,通过三维样品台30的三维空间移动,完成对样品的逐点扫描,整个样品扫描过程中由四波混频产生的所有反斯托克斯辐射进行强度叠加,构成了干涉谱信号f i (9) During the dual-comb optical imaging process, the three-dimensional space movement of the three-dimensional sample stage 30 is used to complete the point-by-point scanning of the sample, and all the anti-Stokes radiation generated by four-wave mixing is used during the entire sample scanning process. The intensities are superimposed to form the interference spectrum signal f i .

(10)在样品数据采集与处理模块9中,将上述的周期性干涉信号f i 经过相应的高速数据采集卡进行数据采集,并通过倍频器7产生的携带光梳频率抖动的射频信号nf 3 做混频,以进一步控制光梳系统的相位误差,得到具有样品光学信息的信号f signal 。通过计算机10完成对f signal 信号的还原与呈现,以实现逐点式双光梳相干反斯托克斯拉曼散射成像。本实施例中的方法不仅可以用来获得高分辨率分子振动光谱及成像,还可以进行样品的温度及浓度测试。 (10) In the sample data acquisition and processing module 9, the above-mentioned periodic interference signal f i is collected through the corresponding high-speed data acquisition card, and the radio frequency signal nf carrying the frequency jitter of the optical comb generated by the frequency multiplier 7 3 Do frequency mixing to further control the phase error of the optical comb system to obtain a signal f signal with optical information of the sample. The restoration and presentation of the f signal is completed by the computer 10, so as to realize point-by-point double-comb coherent anti-Stokes Raman scattering imaging. The method in this embodiment can not only be used to obtain high-resolution molecular vibrational spectroscopy and imaging, but also can be used to test the temperature and concentration of samples.

Claims (5)

1. the two optical frequency com optical imaging methods based on continuous Frequency Stabilized Lasers, relate to two optical frequency com seed sources, it is characterized in that described optical imaging method comprises the steps: two described optical frequency com seed sources Output of laser to be separately divided into three tunnels;
The first via, the Output of laser of two described optical frequency com seed sources enter respectively frequency control module with by the repetition frequency semaphore lock of described optical frequency com seed source on extraneous atomic clock;
Second tunnel, the Output of laser of two described optical frequency com seed sources and the Output of laser of continuous Frequency Stabilized Lasers generation module are combed in interaction module at continuous sharp Frequency Stabilized Lasers and two light and are carried out beat frequency, produce the close beat signal of two frequencies and leaching out does difference frequency, obtain radiofrequency signal f - ; Distributed described radiofrequency signal with processing module by RF signal power f - be divided into three equivalent road signals f 1 , f 2 with f 3 signal, wherein said signal f 1 with f 2 feed back to the electrooptic modulator in two described optical frequency com seed sources and semiconductor laser respectively, to stablize the carrier envelope phase frequency of two described optical frequency com seed source Output of lasers, described signal f 3 signal is enlarged into through frequency multiplier nf 3 after enter sample data Acquire and process module;
3rd tunnel, is incident to testing sample using the Output of laser of wherein optical frequency com seed source described in First as detection light, using the Output of laser of wherein second described optical frequency com seed source as with reference to light with described detection photo-beat frequency to obtain interference spectum signal f i ; Described interference spectum signal f i enter afterwards in described sample data Acquire and process module with described signal nf 3 carry out mixing to offset frequency instability, obtain spectral signal f signal , and to described spectral signal f signal carry out pointwise reduction, realize the optical imagery of described testing sample.
2. a kind of two optical frequency com optical imaging methods based on continuous Frequency Stabilized Lasers according to claim 1, is characterized in that the Output of laser frequency of two described optical frequency com seed sources is respectively f comb1 =nf rep + f ceo with f comb2 =n (f rep + Δ f rep )+f ceo ' , wherein f rep it is the repetition frequency of optical frequency com seed source described in First, Δ f rep the small difference of the repetition frequency of optical frequency com seed source described in second described optical frequency com seed source and First, f ceo with f ceo ' represent the carrier envelope phase drift frequency of optical frequency com seed source and second described optical frequency com seed source described in First respectively.
3. a kind of two optical frequency com optical imaging methods based on continuous Frequency Stabilized Lasers according to claim 1, is characterized in that the Output of laser of described continuous Frequency Stabilized Lasers generation module refers to the single longitudinal mode laser of laser frequency live width in Hz magnitude.
4. a kind of two optical frequency com optical imaging methods based on continuous Frequency Stabilized Lasers according to claim 1, is characterized in that being provided with electrooptic modulator and semiconductor laser in the laserresonator in described optical frequency com seed source; Described signal f 1 act on described electrooptic modulator after being converted to DC voltage, change the refractive index of described electrooptic modulator to adjust the chirp value of described laserresonator and to compensate the long amount of mismatch in its chamber; Described signal f 2 feed back to described semiconductor laser, the electric current of semiconductor laser described in FEEDBACK CONTROL is with the noisiness of firm described laserresonator.
5. a kind of two optical frequency com optical imaging methods based on continuous Frequency Stabilized Lasers according to claim 1, is characterized in that the frequency of described detection light is f comb1 =nf rep + f ceo , the frequency of described reference light is f comb2 =n (f rep + Δ f rep )+f ceo ' , obtain after described detection light and described reference light carry out beat frequency being spaced apart Δ f by a series of rep radiofrequency signal composition described interference spectum signal f i .
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Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0474264A2 (en) * 1991-04-24 1992-03-11 Kaman Aerospace Corporation Spectrally dispersive imaging Lidar method and apparatus
JPH08101066A (en) * 1994-09-30 1996-04-16 Anritsu Corp Optical spectrum measuring apparatus
US5835199A (en) * 1996-05-17 1998-11-10 Coherent Technologies Fiber-based ladar transceiver for range/doppler imaging with frequency comb generator
EP1541981A1 (en) * 2003-12-11 2005-06-15 Agilent Technologies Inc. (a Delaware Corporation) Spectral phase measurement using phase-diverse coherent optical spectrum analyzer
CN101442176A (en) * 2008-11-25 2009-05-27 华东师范大学 Method for generating ultraviolet optical frequency comb drive source
US20120081694A1 (en) * 2009-03-06 2012-04-05 Imra America, Inc. Optical scanning and imaging systems based on dual pulsed laser systems
CN102576971A (en) * 2009-10-02 2012-07-11 Imra美国公司 Optical signal processing with modelocked lasers
CN102967274A (en) * 2012-11-14 2013-03-13 广东汉唐量子光电科技有限公司 A method for measuring the surface topography of an object
CN103344623A (en) * 2013-06-25 2013-10-09 上海朗研光电科技有限公司 Coherent anti-stokes raman scattering optical comb spectrum detection method for improving precision
CN103794980A (en) * 2014-01-27 2014-05-14 华东师范大学 Method and device for measuring light frequency through high-power optical fiber optics frequency comb
CN103712689B (en) * 2014-01-02 2015-07-01 上海朗研光电科技有限公司 Continuous laser device spectral line width measurement device based on optical frequency comb

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0474264A2 (en) * 1991-04-24 1992-03-11 Kaman Aerospace Corporation Spectrally dispersive imaging Lidar method and apparatus
JPH08101066A (en) * 1994-09-30 1996-04-16 Anritsu Corp Optical spectrum measuring apparatus
US5835199A (en) * 1996-05-17 1998-11-10 Coherent Technologies Fiber-based ladar transceiver for range/doppler imaging with frequency comb generator
EP1541981A1 (en) * 2003-12-11 2005-06-15 Agilent Technologies Inc. (a Delaware Corporation) Spectral phase measurement using phase-diverse coherent optical spectrum analyzer
CN101442176A (en) * 2008-11-25 2009-05-27 华东师范大学 Method for generating ultraviolet optical frequency comb drive source
US20120081694A1 (en) * 2009-03-06 2012-04-05 Imra America, Inc. Optical scanning and imaging systems based on dual pulsed laser systems
CN102576971A (en) * 2009-10-02 2012-07-11 Imra美国公司 Optical signal processing with modelocked lasers
CN102967274A (en) * 2012-11-14 2013-03-13 广东汉唐量子光电科技有限公司 A method for measuring the surface topography of an object
CN103344623A (en) * 2013-06-25 2013-10-09 上海朗研光电科技有限公司 Coherent anti-stokes raman scattering optical comb spectrum detection method for improving precision
CN103712689B (en) * 2014-01-02 2015-07-01 上海朗研光电科技有限公司 Continuous laser device spectral line width measurement device based on optical frequency comb
CN103794980A (en) * 2014-01-27 2014-05-14 华东师范大学 Method and device for measuring light frequency through high-power optical fiber optics frequency comb

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