CN104295780B - Pressure-operated valve - Google Patents

Abstract

The present invention provides the pressure-operated valve of a kind of vibration action that can suppress membrane body. the multiple film metal parts (51) of pressure-operated valve (1) stacking and constitute. each of multiple film metal parts (51) has annular plate portion (53) and the teat (54) of mountain shape being connected with its inner rim. and, the movement correspondingly opening and closing of valve port (16) and the middle body (C) of the teat (54) from the nearest film metal parts (51) of this valve port (16), when valve port (16) pent valve closing, it is deformed into following shape in advance, the position corresponding with this middle body (C) of rotary movement starting position (P1) is exceeded from the middle body (C) of teat (54) of the nearest film metal parts (51A) of valve port (16) to side, rotary movement direction, and the part beyond the middle body (C) of this teat (54) is configured to the front of the position corresponding with the part beyond this middle body (C) of rotary movement starting position (P1).

Description

pressure operated valve

technical field

The present invention relates to a pressure-operated valve having a structure in which a diaphragm body is deformed by fluid pressure to open and close a valve port.

Background technique

As shown in FIG. 11 , the pressure-operated valve 801 disclosed in Patent Document 1 has: a valve seat portion 818 provided around a valve port 817; It is hemispherical and responds to the pressure acting on the surface of the board to perform flipping action in a snap-action type (slowly deformed to a certain deformation amount according to the pressure, and deforms to a specified deformation amount at once when the deformation amount exceeds the deformation amount) and has elasticity. That is, the reversing plate 823 has a spring constant (positive spring constant) in the direction of returning to the original shape before a certain amount of deformation, and becomes a spring in the direction of deforming to a predetermined amount of deformation in the direction of the reversing action when the amount of deformation exceeds the amount. constant (negative spring constant). The reversing plate 823 is arranged so as to be slightly pre-deformed so as not to perform a reversing operation within the range of a positive spring constant, and to be pressed against the valve seat. As a result, the center portion of the reversing plate 823 is pressed against the valve seat portion 818 by the elasticity of the reversing plate 823 to ensure valve shutoff performance.

According to this pressure-operated valve 801, since it is slightly deformed in advance and pressed against the valve seat to such an extent that it does not perform an inversion operation, a good snap-action operation can be realized, and a good valve that reliably and quickly switches the on-off state can be obtained. characteristic.

prior art literature

Patent Document 1: Japanese Patent Laid-Open No. 2002-71037

Contents of the invention

The problem to be solved by the invention

However, in the pressure operated valve 801 described above, since the reversing plate 823 performs the reversing operation in a snap-action manner, when the reversing plate 823 performs the reversing operation, the fluid pressure in the valve chamber containing the reversing plate 823 drops sharply. And, due to the drop of the fluid pressure, the inverting plate 823 is restored from the inverting state, and the fluid pressure in the valve chamber is increased due to the restoration, and the inverting plate 823 performs an inverting action again, so there is a problem that the inverting action and its restoring action are repeated, The flow may repeatedly increase and decrease in a short period of vibration.

Therefore, an object of the present invention is to provide a pressure-operated valve capable of suppressing the vibration operation of the diaphragm body.

Solution to the problem

The inventors of the present invention re-examined the movement of the diaphragm body and found that it is formed by laminating a plurality of thin-film metal parts that perform snap-action movement in a single state and deformed in advance to a specific Shape (deformed in advance), so that when fluid pressure is applied to the diaphragm body, the diaphragm body performs a deformation action corresponding to the pressure (also referred to as "slow-motion action"), thereby completing the present invention.

In order to solve the above-mentioned problems, the invention described in Claim 1 is a pressure-operated valve, a valve case; and a valve seat part, which is provided on the above-mentioned valve casing, and is formed with a valve port that opens and closes with the deformation of the above-mentioned diaphragm body caused by the above-mentioned fluid pressure. The above-mentioned pressure-operated valve is characterized in that the above-mentioned Each of the plurality of thin film metal parts has an annular flat plate portion, and a protruding portion integrally connected to the inner edge of the annular flat plate portion that is circular in plan view and bulges into a mountain shape in one direction, and is formed in a single state. When the entire protrusion is deformed from the initial shape toward the reverse direction opposite to the above-mentioned one direction to a shape reaching a predetermined starting position of the reverse operation, the protrusion performs a snap-action reverse operation, and the protrusions respectively face in the same direction. The above-mentioned diaphragm body is fixed to the above-mentioned valve housing in such a way that the protrusions of each of the plurality of thin-film metal parts face the side of the valve port, and the valve port is closest to the valve port. The movement of the central part of the protrusion of the thin film metal part opens and closes accordingly. When the valve is closed when the valve port is closed, it is deformed into the following shape in advance. The center of the protrusion of the thin film metal part closest to the valve port The portion is disposed at a position corresponding to the central portion of the above-mentioned inversion operation start position beyond the above-mentioned inversion operation direction side, and the portion other than the central portion of the protrusion is arranged at a portion other than the above-mentioned inversion operation start position and the central portion. The corresponding position is closer to the front.

The invention according to claim 2 is the invention according to claim 1, wherein the protrusion has a plurality of constituent parts concentrically arranged and sequentially connected in the radial direction, and each of the plurality of constituent parts is formed such that the radius The degree of curvature in the direction or the degree of inclination with respect to the annular flat plate part is different from that of the other adjacent constituent parts.

The invention according to claim 3 is the invention according to claim 2, further comprising: a valve body for opening and closing the valve port; The diaphragm body and the cylindrical valve stem of the valve body, the diameter of the end surface of the valve stem on the side of the diaphragm body is larger than the center of the protrusion of the thin film metal part of the diaphragm body that is closest to the valve port. The diameter of the above constituent parts is small.

The invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein an incompressible fluid is filled between the plurality of thin film metal members.

The invention according to claim 5 is the invention according to any one of claims 1 to 3, characterized in that one or more of the thin film metal parts remaining after removing the thin film metal part closest to the valve port from the plurality of thin film metal At least one of the thin film metal members has a through hole formed in the center of the protrusion.

The effects of the present invention are as follows.

According to the invention described in claim 1, each of the plurality of thin film metal members constituting the diaphragm body has an annular flat plate portion, and the inner edge integrally connected with the annular flat plate portion has a circular shape in plan view and is raised into a mountain in one direction. shaped protrusions. Each of the plurality of thin film metal members is formed so that, in a single state, when the entire protrusion is deformed from the initial shape toward the direction of the inversion operation opposite to the above-mentioned one direction to a shape reaching a predetermined inversion operation start position, the protrusion moves forward. Snap-action flip action. The plurality of thin film metal members are stacked on each other such that the projections face the same direction. The peripheral edge of the diaphragm body is fixed to the valve housing so that each protrusion of the plurality of thin film metal members faces the valve port side. The valve port opens and closes in accordance with the movement of the central portion of the protrusion of the thin film metal member closest to the valve port. And when the valve is closed when the valve port is closed, it is pre-deformed in such a way that the central part of the protrusion of the thin film metal member closest to the valve port is arranged to correspond to the central part beyond the inversion operation start position to the inversion operation direction side. position, and the portion other than the central portion of the protruding portion is arranged in front of the position corresponding to the portion other than the central portion of the turning operation start position.

In this way, (i) each of the plurality of thin film metal parts constituting the diaphragm body performs a snap-action action in a single state, and these plurality of thin film metal parts are stacked to form the diaphragm body. Sliding resistance is generated, (ii) and, when the valve port is closed, the central portion of the protrusion of the thin film metal member closest to the valve port is configured to exceed the pre-turning action start position, so each protrusion of the plurality of thin film metal parts The central part of the part is in a state of contact with each other, and the sliding resistance generated between the thin film metal parts is further increased, and the snap action is suppressed. Therefore, by suppressing the snap action of each of the plurality of thin film metal members, the diaphragm body becomes deformed according to the fluid pressure (slow action), so that the valve can be suppressed compared with the snap action. Sudden pressure fluctuations in the room can suppress vibration action.

(iii) In addition, since the sliding resistance between the thin film metal parts suppresses the snap action that deforms once when the pressure exceeds a predetermined value, even if the thin film metal parts are deformed to the point where each thin film metal part is in a single state, the diaphragm body deforms. Even when the snap action is performed, the spring constant of the diaphragm itself does not take a negative value, but the spring constant takes a positive value close to zero or zero. Therefore, a relatively large amount of deformation can be obtained with respect to a change in pressure. Therefore, even if the change amount of the fluid pressure is small, the diaphragm body is greatly deformed, and a relatively large flow rate can be ensured when the valve is opened.

According to the invention described in claim 2, the protrusions of the plurality of thin film metal members constituting the diaphragm body have a plurality of constituent parts arranged concentrically and sequentially connected in the radial direction, and each of these plurality of constituent parts is formed so that the radius The degree of curvature of the direction or the degree of inclination with respect to the annular flat plate portion is different from that of other adjacent components. In this way, for example, compared with a hemispherical protrusion that is curved smoothly and continuously as a whole, if each constituent part has a curved shape, the degree of curvature of each constituent part can be adjusted independently, or if each constituent part is formed in one If the shape is flat in the direction (such as the radial direction), the degree of inclination relative to the annular flat plate can be adjusted independently, thereby enabling the deformation characteristics of the protrusion composed of a plurality of constituent parts to be within a wider range. Make adjustments. Therefore, a diaphragm body having desired deformation characteristics can be easily obtained.

According to the invention described in claim 3, further comprising: a valve body that opens and closes the valve port; and a cylindrical valve stem that connects the diaphragm body and the valve body so as to open and close the valve port as the diaphragm body deforms. . In addition, the diameter of the end surface of the valve stem on the side of the diaphragm body is smaller than the diameter of the constituent part of the diaphragm body located at the center of the protrusion of the thin film metal member closest to the valve port. In this way, the second structural part located in the center of the protrusion of the thin film metal member has low rigidity and is easily deformed. Therefore, the second structural part is easily in contact with other thin film metal members, thereby increasing frictional resistance. Thereby, the snap-action operation can be further suppressed, and deformation operation (slow-action operation) according to the fluid pressure can be achieved.

According to the invention described in Claim 4, an incompressible fluid is filled between the plurality of thin film metal members. In this way, even if there is a small space between the stacked thin film metal parts, since the deformation of one thin film metal part is transmitted to the other adjacent thin film metal parts through the incompressible fluid, the opening and closing of the valve against the fluid pressure can be improved. Reactivity, so a relatively large amount of deformation can be obtained for small pressure changes.

According to the invention described in claim 5, at least one of the remaining one or more thin film metal parts after removing the thin film metal part closest to the valve port from the plurality of thin film metal parts constituting the diaphragm body is formed with a Through hole. In this way, by changing the shape and size of the through hole, or the number of thin film metal parts provided with the through hole, etc., the deformation characteristics of the diaphragm body can be adjusted in a wider range. Therefore, a diaphragm body having desired deformation characteristics can be easily obtained.

Description of drawings

Fig. 1 is a longitudinal sectional view of a pressure-operated valve according to an embodiment of the present invention.

Fig. 2 is a cross-sectional view showing the structure of the diaphragm body in Fig. 1 .

FIG. 3( a ) is a perspective view of a thin film metal member constituting the diaphragm body of FIG. 2 , and FIG. 3( b ) is a cross-sectional view along line XX of FIG. 3( a ).

Fig. 4 is a diagram schematically showing the deformed state of the protrusion when pressure is applied when the thin film metal member constituting the diaphragm body of Fig. 2 is in a single state, and Fig. 4(a) shows that the protrusion is in the initial state The figure of the initial state of the position, Fig. 4 (b) is the figure that shows the state that the whole protrusion is in the turning operation start position, Fig. 4 (c) is the figure that shows the state that the protrusion is in the turning position.

Fig. 5 is a diagram schematically showing the pre-deformation and deformation operation of the diaphragm body in Fig. 2, Fig. 5(a) is a diagram showing the state when the valve is closed, and Fig. 5(b) is a diagram showing that the entire protrusion is roughly turned over. The figure of the state of the operation start position, FIG. 5(c) is a figure which shows the state which the protrusion part is in the reversed position.

Fig. 6 is a graph schematically showing the relationship between the fluid pressure applied to the diaphragm body and the movement amount of the valve stem.

7 is a cross-sectional view showing the configuration of a modified example of the diaphragm body in FIG. 2 (a structure in which a through hole is provided in the center of the protrusion of the thin-film metal member except the thin-film metal member closest to the valve port).

Fig. 8 (a) is a cross-sectional view showing the structure of the first modified example of the thin film metal part of Fig. 3 (the structure having a concavely curved second constituent part), and Fig. 8 (b) shows the structure of the thin film metal part of Fig. 3 A cross-sectional view of the structure of the second modification (the structure having a convexly curved second component), and FIG. continuously curved hemispherical protrusion), and FIG. 8( d ) is a cross-sectional view showing the structure of a fourth modification of the thin film metal member in FIG.

9 is a graph showing the relationship between the amount of deformation (the amount of movement of the central portion of the protrusion) of the thin film metal member in a single state with respect to fluid pressure.

Fig. 10 is a graph showing the relationship between the movement amount of the valve stem and the fluid pressure applied to the diaphragm body.

Fig. 11 is a longitudinal sectional view of a conventional pressure-operated valve.

In the picture:

1—pressure action valve, 10—valve housing, 16—valve port, 19—valve seat, 25—valve chamber, 30—valve component, 31—valve stem, 32—ball valve (valve body), 40—coil spring, 50, 50A—diaphragm body, 51, 51A～51G—thin film metal parts, 52—incompressible fluid, 53—annular flat plate portion, 54, 54F, 54G—protruding portion, 55, 55G—first component part, 56, 56D, 56E, 56G—the second component, 57G—the third component, 58—the through hole, C—the central part of the protrusion, P0—the initial position of the protrusion, P1—the starting position of the overturning action of the protrusion , P2—the overturning position of the protrusion, Q0—the initial position of the protrusion and the position of the valve stem corresponding to the starting position of the overturning action, Q2—the position of the valve stem corresponding to the overturning position of the protrusion.

detailed description

Hereinafter, a pressure-operated valve according to an embodiment of the present invention will be described with reference to FIGS. 1 to 6 .

Fig. 1 is a longitudinal sectional view of a pressure-operated valve according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing the structure of the diaphragm body in Fig. 1 . 3( a ) is a perspective view of a thin film metal member constituting the diaphragm body of FIG. 2 , and FIG. 3( b ) is a cross-sectional view along line XX of FIG. 3( a ). Fig. 4 is a diagram schematically showing the deformed state of the protrusion when pressure is applied when the thin film metal member constituting the diaphragm body of Fig. 2 is in a single state, and Fig. 4(a) shows that the protrusion is in the initial state The figure of the initial state of the position, Fig. 4 (b) is the figure that shows the state that the whole protrusion is in the turning operation start position, Fig. 4 (c) is the figure that shows the state that the protrusion is in the turning position. Fig. 5 is a diagram schematically showing the pre-deformation and deformation operation of the diaphragm body in Fig. 2, Fig. 5(a) is a diagram showing the state when the valve is closed, and Fig. 5(b) is a diagram showing that the entire protrusion is roughly inverted The figure of the state of the operation start position, FIG. 5(c) is a figure which shows the state which the protrusion part is in the reversed position. 6 is a graph schematically showing the relationship between the fluid pressure applied to the thin film metal member and the amount of movement of the central portion of the projection of the thin film metal member. In addition, the concept of "up and down" in the following description corresponds to the up and down in FIG. 1 , and represents the relative positional relationship of each member, not the absolute positional relationship.

As shown in FIG. 1 , the pressure-operated valve 1 includes a valve housing 10 , a valve member 30 , a coil spring 40 , a diaphragm body 50 , and a stopper 60 .

The valve case 10 includes a body portion 11 and a cap portion 20 .

The main body 11 is formed into a substantially cylindrical shape using metal such as brass or stainless steel, for example, and includes a primary side joint connection hole 12, a secondary side joint connection hole 13, a valve accommodation space 14, a primary side port 15, a valve port 16, and a spring chamber 17. , the communication path 18, and the valve seat portion 19.

The primary-side joint connection hole 12 is formed to pass through the peripheral surface of the main body portion 11 . The secondary-side joint connection hole 13 is formed to pass through the lower end surface of the main body 11 in the figure. The valve accommodating space 14 is formed as a cylindrical space protruding from the upper end surface of the main body 11 in the drawing into the main body 11 . The primary side port 15 is formed to communicate with the primary side joint connection hole 12 and the lower part in the figure of the valve housing space 14 . The valve port 16 forms a lower portion in the figure that communicates with the secondary side joint connection hole 13 and the valve housing space 14 . The secondary-side joint connection hole 13 , the valve accommodation space 14 , and the valve port 16 are arranged coaxially with the main body 11 . The portion around the valve port 16 of the main body portion 11 functions as a valve seat portion 19 on which a ball valve 32 of the valve member 30 to be described later is seated and unseated. The spring chamber 17 is disposed coaxially with the valve housing space 14 so as to surround the valve housing space 14 , and is formed as a substantially cylindrical space protruding from the upper end surface of the main body 11 in the drawing into the main body 11 . In other words, the spring chamber 17 is formed as an annular deep groove around the valve accommodation space 14 . The communication path 18 is formed to communicate with the above-mentioned primary side port 15 and the spring chamber 17 .

An inlet joint 12 a is attached to the primary side joint connection hole 12 , and the inlet joint 12 a communicates with the valve accommodation space 14 through the primary side port 15 . In addition, an outlet joint 13 a is attached to the secondary side joint connection hole 13 , and the opening end of the outlet joint 13 a serving as the secondary side port on the valve port 16 side communicates with the valve housing space 14 via the valve port 16 . Thus, the fluid flowing into the main body 11 from the inlet joint 12a passes through the primary side port 15, the valve accommodation space 14, and the valve port 16 in order, and flows out from the outlet joint 13a. In addition, the primary side port 15 communicates with the spring chamber 17 via the communication path 18 . Accordingly, the fluid flowing in from the inlet joint 12 a passes through the primary side port 15 and the communication path 18 in order, and flows into the spring chamber 17 .

The cap portion 20 is made of, for example, metal such as stainless steel, and includes a substantially cylindrical peripheral wall portion 21 and a flange portion 22 integrally formed with the upper end of the peripheral wall portion 21 in the drawing. The peripheral wall portion 21 is formed in a cylindrical shape (annular shape) having substantially the same diameter as the outer diameter of the valve housing 10 , and its lower end in the figure is fixedly attached to the upper end in the figure of the main body portion 11 by brazing. By overlapping the diaphragm body 50 described later on the flange portion 22, the cap portion 20 together with the diaphragm body 50 defines a pressure chamber 23 as a closed space, and the pressure chamber 23 is connected to the valve accommodation space 14 of the main body portion 11. And the valve chamber 25 is comprised.

The valve member 30 has a valve stem 31 each made of metal such as stainless steel, a ball valve 32 as a valve body, and a spring bracket 33 . The valve stem 31 is formed in a cylindrical shape having an outer diameter substantially equal to an inner diameter of the valve accommodation space 14 of the valve casing 10 . The valve stem 31 is accommodated in the valve accommodation space 14 so as to be slidably movable in the vertical direction in the figure (that is, the axial direction of the main body). The upper end surface of the stem 31 in the figure is in press contact with a diaphragm body 50 (specifically, a second component portion 56 of the protrusion 54 of the thin film metal member 51 constituting the diaphragm body 50 ) to be described later. In the present embodiment, the diameter of the end surface is smaller than the diameter of the second constituent portion 56 that is in press contact with it. The ball valve 32 is formed in a spherical shape, and is fixedly attached to the lower end of the valve rod 31 in the figure. The ball valve 32 moves up and down in the drawing together with the valve stem 31 , and is seated and detached from the valve seat portion 19 of the valve housing 10 to open and close the valve port 16 . The spring holder 33 is formed in an annular shape having the same inner diameter as the outer diameter of the valve stem 31 , and is fixedly attached to the upper part of the valve stem 31 in the drawing in a flange shape.

The coil spring 40 is housed in the spring chamber 17 of the valve housing 10 coaxially with the spring chamber 17 . The coil spring 40 is arranged in a compressed state between the main body 11 (the bottom surface of the spring chamber 17 ) of the valve housing 10 and the spring holder 33 of the valve member 30 . The coil spring 40 presses the upper end of the valve rod 31 in the drawing toward a second component portion 56 (central portion C) of the diaphragm body 50 described later. As a result, the valve stem 31 moves vertically in the figure following the deformation of the diaphragm body 50 , and the ball valve 32 is detached and seated with respect to the valve seat portion 19 as a result. That is, the stem 31 connects the diaphragm body 50 and the ball valve 32 so as to open and close the valve port 16 as the diaphragm body 50 deforms.

The diaphragm body 50 is constituted, for example, by stacking a plurality of thin-film metal members 51 made of metal such as stainless steel and having a circular shape in plan view and having elasticity. The diaphragm body 50 is formed by laminating a plurality of thin film metal members 51 to have approximately the same diameter as the outer diameter of the cap 20 , and is disposed so that its peripheral edge overlaps with the flange 22 of the cap 20 to close the view of the cap 20 . Opening on the upper side. The diaphragm body 50 defines the pressure chamber 23 as a closed space together with the cap portion 20 . The pressure chamber 23 is connected to the valve housing space 14 via the spring chamber 17 of the valve housing 10 , the communication passage 18 and the primary side port 15 in a state where the valve rod 31 of the valve member 30 is housed in the valve housing space 14 . In addition, the diaphragm body 50 presses the ball valve 32 to the valve seat portion 19 through the valve rod 31 by its elastic force when the valve is closed. The details of the diaphragm body 50 will be described later.

The stopper 60 is formed, for example, using metal such as stainless steel, and formed into a circular flat plate having substantially the same diameter as the diaphragm body 50 in plan view. The stopper 60 is disposed so as to overlap the upper side of the diaphragm body 50 in the figure, and prevents excessive deformation of the diaphragm body 50 . In addition, a through hole 61 is formed in the center portion of the stopper 60 .

The flange portion 22 of the cap portion 20 of the valve housing 10 , the diaphragm body 50 , and the peripheral edge portions of the stopper 60 are integrally fixed to each other by welding.

With the above configuration, the pressure-operated valve 1 flows into the refrigerant (fluid) such as CFC such as R410A from the inlet joint 12a, and the refrigerant passes through the primary side port 15, the communication passage 18, the spring chamber 17, and the pressure chamber 23 to the diaphragm. The sheet 50 applies pressure.

When the pressure of the refrigerant (fluid pressure) is lower than the preset pressure, the diaphragm body 50 does not deform to the side of the turning direction (upper in the figure), but the diaphragm body 50 passes through the valve. The rod 31 presses the ball valve 32 against the valve seat portion 19 to be in a valve closed state in which the valve port is closed. At this time, the refrigerant flowing in from the inlet joint 12a flows into the valve accommodation space 14 from the primary side port 15, but in the valve closed state, the ball valve 32 closes the valve port 16, and the refrigerant does not flow to the outlet joint 13a.

On the other hand, the pressure of the refrigerant becomes higher, and if it reaches a predetermined pressure or more, the diaphragm body 50 is deformed in the reverse direction, and the valve stem 31 and the ball valve 32 follow the direction of the diaphragm body 50 due to the elastic force of the coil spring 40 . Transform and move. Thereby, the valve port 16 is opened, and it becomes a valve open state.

Next, the structure of the diaphragm body 50 will be described in detail.

As shown in Fig. 2 and Fig. 3(a) and (b), the diaphragm body 50 is constituted by laminating a plurality of circular thin film metal parts 51 made of metal such as stainless steel, and among the plurality of thin film metal parts 51 The space between them is filled with a non-compressible fluid 52 such as relatively high-viscosity oil. In FIG. 2 , the space between the plurality of thin film metal members 51 is shown relatively wide for convenience of description, but in an actual structure, it is a minute space smaller than the thickness of the thin film metal member 51 .

Each of the plurality of thin film metal members 51 is formed in the same shape. Equipped with: an annular flat plate portion 53 in plan view; The protruding portion 54 is raised into a mountain shape. The protrusion 54 is formed in a substantially hemispherical shape in an unstressed initial shape. In addition, the protruding portion 54 includes: an annular first structural portion 55 integrally connected to the annular flat plate portion 53 ; and a second circular structural portion 56 integrally connected to the inner edge of the first structural portion 55 . . The first configuration part 55 and the second configuration part 56 are concentrically arranged and sequentially connected in the radial direction. The first constituent portion 55 is formed to be convexly curved outward in the circumferential and radial directions thereof. The second constituent portion 56 is formed in a circular flat plate shape. That is, the second configuration portion 56 is formed so that the degree of curvature in the radial direction is different from that of the first configuration portion 55 , and the degree of inclination with respect to the annular flat plate portion 53 is also different. Each of the plurality of thin film metal members 51 is arranged so that the protrusion 54 protrudes toward the valve seat portion 19 (that is, the valve port 16) of the main body 11, and the protrusions 54 are not fixed to each other while being stacked on each other, and the annular flat plate portion 53 are attached to the cap portion 20 of the valve casing 10 in a state of being fixed and integrated with each other.

The thin film metal member 51 is formed so that the protrusion 54 performs a snap-type inversion operation (operation in which the direction of protrusion is inverted) in a single state (one-sheet state). 4 (a) to (c) schematically show the flipping action of the snap-action type. That is, the thin film metal member 51 is configured so that when a force is gradually applied to the entire protrusion 54, the protrusion 54 faces from the initial shape ( FIG. Deformation (deformed so that the amount of protrusion decreases) in the direction of the overturning action (upper in the figure), and when the entire protrusion 54 is deformed to a shape that reaches the predetermined overturning action start position P1 (FIG. 4(b)), it is performed at once. Flip action, deformation to flip position P2 (Fig. 4(c)).

Such a snap-action inversion operation of the thin film metal member 51 is performed along with the deformation of the protrusion 54 . That is, if a positive spring constant is set from the initial position P0 to the inversion operation start position P1, if the protrusion 54 is deformed beyond the inversion operation start position P1, the value of the spring constant is inverted to become a negative spring constant, and the inversion operation is performed. until flipping position P2.

A plurality of thin film metal members 51 are stacked one on top of another, and the ring-shaped flat plate portions 53 are fixed to each other with the incompressible fluid 52 filled therebetween, thereby being integrated into the diaphragm body 50 . In this embodiment, the diaphragm body 50 is formed by laminating two thin-film metal members.

The operation of the diaphragm body 50 will be described with reference to FIG. 5 . In Fig. 5, the thin film metal member 51 (that is, the thin film metal member 51 closest to the valve port 16) in contact with the valve stem 31 is represented by symbol 51A, and other thin film metal members stacked on the thin film metal member 51A are represented by symbol 51B. Part 51.

The diaphragm body 50 is arranged in a pre-deformed state when the valve is closed. Specifically, as schematically shown in FIG. 5( a ), the ring-shaped flat plate portion 53 is fixed to the cap portion 20 in a state where the protruding portion 54 is deformed so that the ball valve 32 is seated on the valve seat. When the valve of the thin film metal member 51A is closed, the central portion C of the protruding portion 54 of the thin film metal member 51A is arranged to correspond to the central portion C beyond the inverting operation start position P1 of the thin film metal member 51A to the side in the turning direction (upper in the figure). Moreover, the portion other than the central portion C of the protruding portion 54 is arranged closer to the front (downward in the figure) than the position corresponding to the portion other than the central portion C of the inversion operation start position P1. Along with the deformation of the thin film metal member 51A, the other thin film metal member 51B stacked thereon is also in a deformed state. In this state, since the thin film metal member 51A performs an inversion operation when the entire protrusion 54 reaches the inversion operation start position P1, only the central part C is disposed beyond the inversion operation start position P1 and does not perform an inversion operation. The same applies to the other thin film metal members 51B.

In the present embodiment, the central portion C of the protrusion 54 of the thin film metal member 51A is configured to coincide with the second constituent portion 56 of the protrusion 54 . Needless to say, it is not limited thereto, and the size of the central portion C is about 1/5 to 1/2 from the center of the protrusion 54 to the radius of the protrusion, depending on the structure of the pressure-operated valve, pressure characteristics, etc. It is set appropriately within the range so that the function and effect as a diaphragm body for opening and closing the valve port 16 can be exerted.

And, when the valve is closed as shown in FIG. 5(a), the valve stem 31 is at the position Q0, and if the fluid pressure applied to the diaphragm body 50 gradually rises from this state, the protrusion 54 of the thin film metal member 51A will Parts other than the central portion C are gradually deformed toward the inversion operation start position P1, but the central portion C remains at this position, and the valve stem 31 does not move and stays at the position Q0. Then, as shown in FIG. 5( b ), when the entire protrusion 54 substantially reaches the inversion operation start position P1 , the entire protrusion 54 including the central portion C starts to deform toward the inversion operation direction. At this time, since the other thin-film metal member 51B is stacked on the thin-film metal member 51A, sliding resistance is generated between them, and as described above, the thin-film metal member 51A is strongly pressed against the other thin-film metal member 51A due to deformation in advance. The metal member 51B further increases the sliding resistance. Therefore, the snap-action movement of each of the thin film metal members 51A, 51B is suppressed by the sliding resistance so as not to change to the inverted position P2 all at once, but to deform according to pressure changes. In addition, since the snap action is suppressed by the sliding resistance between the thin film metal members 51A and 51B, the diaphragm body is deformed to the extent that snap action would be performed if the thin film metal members were in a single state. Next, the spring constant of the diaphragm body itself will not become a negative value (the direction to be deformed in the direction of the flipping action), and the spring constant will become a value of 0 or close to 0 (the direction to return to the original shape). Therefore, it becomes a slow-motion type operation in which the amount of deformation relative to the pressure change is relatively large. Therefore, the valve stem 31 also moves following it, and as shown in FIG. 5( c ), when the thin film metal member 51A is deformed to the inverted position P2, the valve stem 31 reaches the position Q2. In the above description, the deformation operation has been mainly focused on the thin film metal member 51A. However, with the deformation of the thin film metal member 51A, other thin film metal members 51B laminated on the thin film metal member 51A are also deformed in the same manner.

Fig. 6 schematically shows the movement amount of the valve stem relative to the fluid pressure (that is, the displacement of the thin film metal member 51A) in each structure of the above-mentioned slow-action structure and the conventional snap-action structure. Deformation amount of central part C) graph.

Diaphragm body 50 is a conventional structure that performs quick-acting reversing action without pre-deformation as described above. As shown by the dotted line in FIG. It is at a position lower than the above-mentioned position Q0 (a position farther from the position Q2). When the fluid pressure gradually increases from this state, the diaphragm body 50 gradually deforms according to the fluid pressure, and the valve stem 31 gradually moves toward the position Q2. And, when the predetermined pressure A1 is reached, the diaphragm body 50 performs a snap-action inverting action, and the valve stem 31 moves to the position Q2 at once. Therefore, the pressure in the valve chamber 25 fluctuates abruptly, and an oscillating operation occurs.

On the other hand, in the structure of the present embodiment in which the diaphragm body 50 is pre-deformed as described above to perform a slow-motion action, as shown by the solid line in FIG. Down, the valve stem 31 is at the above-mentioned position Q0. If the fluid pressure gradually increases from this state, only the parts other than the central part C of the protrusions 54 of the plurality of thin film metal parts 51 constituting the diaphragm body 50 are mainly deformed, the position of the central part C does not change, and the valve stem 31 is still in position Q0. Then, when a predetermined pressure A2 lower than the above-mentioned pressure A1 is reached, the entire protrusion 54 substantially reaches the inversion operation start position P1, and performs a slow-motion inversion operation with a relatively large deformation amount corresponding to the pressure, and the valve stem 31 and the Fluid pressure moves accordingly to position Q2. Therefore, the pressure in the valve chamber 25 does not fluctuate rapidly, and vibration operation can be suppressed.

As described above, the pressure-operated valve 1 of the present embodiment includes: the valve casing 10; and a valve seat 19, which is provided on the valve housing 10 and forms a valve port 16 that opens and closes with the deformation of the diaphragm body 50 caused by fluid pressure. Each of the plurality of thin-film metal members 51 constituting the diaphragm body 50 has an annular flat plate portion 53 and a protruding portion integrally connected to the inner edge of the annular flat plate portion 53 that is circular in plan view and bulges like a mountain in one direction. 54, formed in a single state, when the protrusion 54 as a whole is deformed from the initial shape toward the reverse direction opposite to the above-mentioned one direction to the shape that reaches the predetermined reverse operation start position P1, the protrusion 54 performs a snap action. The protrusions 54 are stacked on top of each other so as to face in the same direction during the reversing operation. The diaphragm body 50 is fixed to the valve casing 10 with the peripheral edge of the diaphragm body 50 facing the valve port 16 side with each protrusion 54 of the plurality of thin film metal members 51 facing the valve port 16. The valve port 16 and the film closest to the valve port 16 The movement of the central portion C of the protrusion 54 of the metal member 51A opens and closes accordingly. In addition, when the valve port 16 is closed and the valve is closed, it is deformed in advance so that the central part C of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 is disposed beyond the inversion operation start position P1 to the inversion operation direction side. The position corresponding to the central portion C, and the portion other than the central portion C of the protrusion 54 is arranged in front of the position corresponding to the portion other than the central portion C of the inversion operation start position P1.

In addition, each protrusion 54 of the plurality of thin film metal members 51 has a first constituent part 55 and a second constituent part 56 arranged concentrically and sequentially connected in the radial direction, and these first constituent parts 55 and second constituent parts 56 It is formed so that the degree of curvature in the radial direction or the degree of inclination with respect to the annular flat plate portion 53 is different from that of other adjacent components.

In addition, a ball valve 32 that opens and closes the valve port 16; and a cylindrical valve rod 31 that connects the diaphragm body 50 and the ball valve 32 so as to open and close the valve port 16 as the diaphragm body 50 deforms, The diameter of the end surface of the stem 31 on the side of the diaphragm body 50 is smaller than the diameter of the second component part 56 of the diaphragm body 50 located at the center of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 .

In addition, an incompressible fluid 52 is filled between the plurality of thin film metal members 51 .

As described above, according to the present embodiment, each of the plurality of thin film metal members 51 constituting the diaphragm body 50 has an annular flat plate portion 53 , and the inner edge of the annular flat plate portion 53 is integrally connected to the circular shape in plan view and faces one. The direction bulges into a mountain-shaped protrusion 54 . Each of the plurality of thin film metal members 51 is formed so that, in a single state, when the entire protrusion 54 is deformed from the initial shape toward the direction of the inversion operation opposite to the above-mentioned one direction to a shape reaching a predetermined inversion operation start position P1, this The protruding portion 54 performs a snap-action flipping action. The plurality of thin film metal members 51 are stacked on top of each other so that the protrusions 54 each face the same direction. In the diaphragm body 50 , the peripheral edge of the diaphragm body 50 is fixed to the valve casing 10 so that each protrusion 54 of the plurality of thin film metal members 51 faces the valve port 16 side. The valve port 16 opens and closes in accordance with the movement of the central portion C of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 . In addition, when the valve port 16 is closed, it is pre-deformed in such a way that the central portion C of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 is arranged beyond the inversion operation start position P1 to the inversion operation direction side. The position corresponding to the central portion C, and the portion other than the central portion C of the protrusion 54 is arranged in front of the position corresponding to the portion other than the central portion C of the inversion operation start position P1.

In this way, (i) each of the plurality of thin film metal members 51 constituting the diaphragm body 50 performs a snap-action operation in a single state, and these plurality of thin film metal members 51 are stacked to constitute the diaphragm body 50, so when deformed, Sliding resistance is generated between the thin film metal members 51, and (ii) when the valve port 16 is closed, the central portion C of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 is arranged beyond the pre-turning operation start position P1, therefore, the central portions C of the protrusions 54 of the plurality of thin film metal members 51 are in contact with each other, and the sliding resistance generated between the thin film metal members 51 is further increased, thereby suppressing the snap action. Therefore, by suppressing the snap action of each of the plurality of thin film metal members 51, the diaphragm body 50 becomes deformed according to the fluid pressure (slow action), so it can be compared with the snap action. Sudden pressure fluctuations in the valve chamber 25 are suppressed, thereby suppressing the vibration operation.

(iii) In addition, since the sliding resistance between the thin film metal members 51 suppresses the snap-action operation in which deformation occurs at once when the pressure exceeds a predetermined value, a relatively large amount of deformation can be obtained with respect to changes in pressure. Therefore, even if the change amount of the fluid pressure is small, the diaphragm body 50 is greatly deformed, so that a relatively large flow rate can be ensured when the valve is opened.

In addition, the protrusions 54 of the plurality of thin film metal members 51 constituting the diaphragm body 50 have a first constituent part 55 and a second constituent part 56 arranged concentrically and sequentially connected in the radial direction. These first constituent parts 55 and Each of the second constituent parts 56 is formed so that the degree of curvature in the radial direction or the degree of inclination relative to the annular flat plate part 53 is different from that of other adjacent constituent parts. In this way, compared with, for example, a hemispherical protrusion or the like whose entirety is smoothly and continuously curved, for example, if each constituent part is in a curved shape, the degree of curvature of each constituent part can be independently adjusted, or if each constituent part is in a If the shape is flat in one direction (such as the radial direction), the degree of inclination relative to the annular flat plate can be adjusted independently, thereby, the protrusion 54 formed by the first constituent part 55 and the second constituent part 56 can be adjusted. The deformation properties are adjusted over a larger range. Therefore, it is possible to easily obtain the diaphragm body 50 with desired deformation characteristics.

In addition, a ball valve 32 that opens and closes the valve port 16 , and a cylindrical valve stem 31 that connects the diaphragm body 50 and the ball valve 32 so that the valve port 16 is opened and closed as the diaphragm body 50 deforms. Furthermore, the diameter of the end surface of the stem 31 on the side of the diaphragm body 50 is smaller than the diameter of the second component part 56 of the diaphragm body 50 located at the center of the protrusion 54 of the thin film metal member 51A closest to the valve port 16 . In this way, the second constituent part 56 located at the center of the protrusion 54 of the thin film metal member 51 is easily deformed due to its low rigidity, so that the second constituent part 56 is easily in contact with other thin film metal members 51, so that the frictional resistance can be increased. . Thereby, the snap-action operation can be further suppressed, and deformation operation (slow-action operation) according to the fluid pressure can be achieved.

In addition, an incompressible fluid 52 is filled between the plurality of thin film metal members 51 . In this way, even if there is a small space between the stacked thin film metal members 51, since the deformation of one thin film metal member 51 is transmitted to the other adjacent thin film metal members 51 through the incompressible fluid 52, the resistance to fluid pressure can be improved. Responsiveness of valve opening and closing, so a relatively large amount of deformation can be obtained for small pressure changes.

As mentioned above, the present invention has been described by taking the preferred embodiment as an example, but the pressure-operated valve of the present invention is not limited to the structure of the above-mentioned embodiment.

For example, in the above-mentioned embodiment, the plurality of thin film metal members 51 constituting the diaphragm body 50 are each formed in the same shape, but the present invention is not limited thereto. For example, it is also possible to make a diaphragm body 50A of the following structure, that is, as shown in FIG. The plurality of thin film metal members 51C other than the nearest thin film metal member 51A have a through hole 58 in the center. In other words, at least one of the thin film metal members 51C remaining after removing the thin film metal member 51A closest to the valve port 16 from the plurality of thin film metal members 51 may have the through hole 58 formed in the center of the protrusion 54 . In this way, by changing the shape and size of the through hole 58 or the number of thin film metal members 51 provided with the through hole 58 , the deformation characteristic of the diaphragm body 50A can be adjusted in a wider range. Therefore, a diaphragm body having desired deformation characteristics can be easily obtained.

In addition, in the above-mentioned embodiment, the diaphragm body 50 is constituted by laminating two thin film metal members 51 (51A, 51B), but the present invention is not limited thereto, and may be constituted by laminating three or more thin film metal members 51 . In addition, the diaphragm body 50 is configured such that the incompressible fluid 52 is filled between the plurality of thin film metal members 51 , but the invention is not limited thereto, and the incompressible fluid 52 may be omitted.

In addition, in the above-mentioned embodiment, as shown in FIG. 3 , the protrusion 54 of the thin film metal member 51 has a structure including a ring-shaped first component part 55 and a circular plate-shaped second component part 56, but it is not limited to here. For example, as shown in FIG. 8(a), it may also be made into a thin film metal member 51D having a second constituent portion 56D formed in a concave shape with respect to the first constituent portion 55, or as shown in FIG. 8(b), The thin-film metal member 51E has a convex-shaped second constituent portion 56E that is less curved (increased curvature) than the first constituent portion 55 . Alternatively, as shown in FIG. 8( c ), a thin film metal member 51F having a hemispherical protrusion 54F curved smoothly and continuously as a whole may be used. Alternatively, as shown in FIG. 8( d ), a thin-film metal member 51G having a protruding portion 54G having a first constituent portion 55G, a second constituting portion 55G, and a second constituting portion 55G arranged concentrically and connected sequentially in the radial direction may also be used. The configuration portion 56G and the third configuration portion 57G, the first configuration portion 55G, the second configuration portion 56G, and the third configuration portion 57G are formed gradually in the radial direction, and are formed to be adjacent to each other with respect to the degree of inclination of the annular flat plate portion 53 . The other components are different. That is, as long as the purpose of the present invention is not violated, the thin film metal part constituting the diaphragm body may also be formed in that its projections have a plurality of constituent parts concentrically arranged and sequentially connected in the radial direction, and each of the plurality of constituent parts is formed as , the degree of curvature in the radial direction or the degree of inclination with respect to the annular flat plate portion is different from that of other adjacent components. Alternatively, the protruding portion may be formed in a shape that curves smoothly and continuously as a whole.

In addition, in the above-mentioned embodiment, the valve port 16 is opened and closed indirectly through the valve member 30 which is linked with the diaphragm body 50 which is deformed by the fluid pressure in the valve chamber 25 and which move, but not limited to. For example, like the structure of the conventional pressure-operated valve in FIG. 11, the diaphragm body may be directly pressed against the valve seat, and the valve port may be directly opened and closed by deformation of the diaphragm body.

In addition, the above-mentioned embodiment shows only the typical aspect of this invention, and this invention is not limited to embodiment. That is, those skilled in the art can make various modifications and implement them in a range not departing from the gist of the present invention based on conventionally known findings. As long as the structure of the pressure-operated valve of the present invention is still provided through this deformation, it goes without saying that it is also included in the scope of the present invention.

Next, in order to confirm the effects of the present invention, the inventors of the present invention produced Examples 1 and 2 and Comparative Examples 1 and 2 with different pre-deformation amounts for the above-mentioned pressure-operated valve 1, and each of Examples 1, 2 and In Comparative Examples 1 and 2, an experiment was carried out to confirm the amount of movement of the stem 31 (that is, the amount of deformation of the diaphragm body 50 ) with respect to the pressure applied to the diaphragm body 50 .

First, the specific structure of the thin film metal member 51 used in Examples 1 and 2 and Comparative Examples 1 and 2 will be described. The thin film metal member 51 is punched out of a stainless steel plate into a circular plate with a diameter of 20 mm, and the center of the circular plate is forged into a substantially hemispherical shape to have the shape shown in FIGS. 3( a ) and ( b ). The thin film metal member 51 has: an annular flat plate portion 53 with an outer diameter (D1) of 20 mm and an inner diameter (D2) of 14 mm; The portion 54 is formed to have a thickness (T) of 0.15 mm. The protruding portion 54 of the thin film metal member 51 has: an outer diameter (D2) of 14 mm and an inner diameter (D3) of 4 mm; For the constituent portion 56 , the forged height of the protrusion 54 from the annular flat plate portion 53 (height H from the annular flat plate portion 53 to the second constituent portion 56 ) was set to 0.84 mm.

FIG. 9 is a graph showing the relationship between the amount of deformation and the pressure in the single state of the thin film metal member 51 . In the figure, the range of the amount of deformation that performs the snap-action flipping action is within the dotted line frame, which is 0.22 in the thin film metal member 51 (the graph of the solid line (Examples 1, 2, Comparative Examples 1, 2)). mm～0.65mm. In addition, as a reference, regarding the thin-film metal member 51 having the above-mentioned structure, only the thin-film metal member after changing the forged height (H) to 0.71 mm or 0.64 mm (the graph of the single-dot chain line (reference example 1), and the dotted line The graph (Reference Example 2)) shows the graph. In Reference Example 1, the above-mentioned range is 0.18 mm to 0.60 mm, and in Reference Example 2, it is 0.21 mm to 0.75 mm.

(Example 1)

The diaphragm body 50 is produced by stacking two above-mentioned thin film metal parts 51 and filling incompressible fluid 52 between them. The center part C of the thin film metal part 51A closest to the valve port 16 in the diaphragm body 50 is The pressure-operated valve 1 obtained by assembling the diaphragm body 50 was produced so that the pre-deformation amount was 0.37 mm, and this was referred to as Example 1. (That is, the pre-deformation amount is set within the range of deformation amount (0.22 mm to 0.65 mm) for performing the above-mentioned snap-action overturning operation.)

(Example 2)

In Example 1, except that the pre-deformation amount of the central portion C of the thin film metal member 51A in the diaphragm body 50 was 0.57 mm, it was produced with the same structure as in Example 1, and this was referred to as Example 2. (That is, the pre-deformation amount is set within the range of deformation amount (0.22 mm to 0.65 mm) for performing the above-mentioned snap-action overturning operation.)

(comparative example 1)

In Example 1, except that the pre-deformation amount of the central part C of the thin film metal member 51A in the diaphragm body 50 was 0.18 mm, it was produced with the same structure as in Example 1, and this was referred to as Comparative Example 1. (That is, the pre-deformation amount is outside the range (0.22 mm to 0.65 mm) of the deformation amount for performing the above-mentioned snap-action overturning operation.)

(comparative example 2)

In Embodiment 1, except that the pre-deformation amount of the central part C of the thin film metal member 51A in the diaphragm body 50 is 0.00 mm (no pre-deformation), it is produced with the same structure as in Embodiment 1, which is used as Comparative example 2. (That is, the pre-deformation amount is outside the range (0.22 mm to 0.65 mm) of the deformation amount for performing the above-mentioned snap-action overturning operation.)

(Measuring the amount of movement of the valve stem)

In the above-mentioned pressure operated valves 1 of Examples 1 and 2 and Comparative Examples 1 and 2, the amount of movement of the valve stem 31 relative to the pressure of the fluid flowing in from the inlet joint 12a is measured and determined based on the following criteria.

○...A part in the graph that does not change parallel to the vertical axis does not perform snap action.

×... There is a portion in the graph that changes parallel to the vertical axis, and a snap-action operation is performed.

10 is a graph showing the measurement results of the movement amount of the valve stem with respect to the fluid pressure in Examples 1 and 2 and Comparative Examples 1 and 2. FIG. The determination results in Examples 1 and 2 and Comparative Examples 1 and 2 are shown below.

Example 1...○

Example 2...○

Comparative example 1...×

Comparative example 2...×

In Examples 1 and 2, no snap action is performed, and it can be seen from the graph of FIG. 10 that the amount of movement of the stem 31 , that is, the amount of deformation of the diaphragm body 50 changes according to the pressure. That is, a slow-motion motion is performed. On the other hand, in Comparative Examples 1 and 2, the snap action is performed, and it can also be seen from the graph of FIG. parallel to the axial direction) changes. That is, snap action is performed.

From this, it can be seen that, in Examples 1 and 2, since the valve rod 31 moves in accordance with the fluid pressure, there is no sudden increase or decrease in the flow rate, and the vibration operation can be suppressed. On the other hand, it can be seen that in Comparative Examples 1 and 2, the valve rod 31 moves largely under a predetermined fluid pressure, so that a sudden increase and decrease of the flow rate occurs, and an oscillating operation occurs.

Thus, it can be seen from the actual operation results that the present invention has the effect of suppressing the vibration operation caused by the repeated increase and decrease of the flow rate.

Claims (5)

1. a pressure-operated valve, possesses: valve casing; Membrane body, it divides valve chamber together with above-mentioned valve casing, and the multiple elastic film metal parts deformed because of the fluid pressure in this valve chamber by stacking and constitute; And seat portion, it is located at above-mentioned valve casing, and is formed with the deformation of the above-mentioned membrane body caused with above-mentioned fluid pressure and the valve port of opening and closing, and above-mentioned pressure-operated valve is characterised by,

Each of above-mentioned multiple film metal parts has annular plate portion and the rounded shape of vertical view being connected integratedly with the inner edge in this annular plate portion and the teat bulging into mountain shape to a direction, be formed as under free state, when above-mentioned teat entirety is from original shape towards the rotary movement Direction distortion in opposite direction with said one to the shape of the rotary movement starting position of arrival regulation, this teat carries out the rotary movement of snap-type, and above-mentioned teat is to be respectively facing the mutual stacking of unidirectional mode

Above-mentioned membrane body to make each teat of above-mentioned multiple film metal parts, in the way of above-mentioned valve port side, the periphery of this membrane body are fixed on above-mentioned valve casing,

The movement correspondingly opening and closing of above-mentioned valve port and the middle body of the teat from the nearest above-mentioned film metal parts of this valve port,

When the pent valve closing of above-mentioned valve port, it is deformed into following shape in advance, middle body from the teat of the nearest above-mentioned film metal parts of above-mentioned valve port is configured to exceed the position corresponding with this middle body of above-mentioned rotary movement starting position to side, above-mentioned rotary movement direction, and being partly arranged at the position corresponding with the part beyond this middle body than above-mentioned rotary movement starting position more by front beyond the middle body of this teat.

2. pressure-operated valve according to claim 1, it is characterised in that

Above-mentioned teat possesses the multiple composition parts configuring with same heart shaped and being sequentially connected with in the radial direction,

Each of above-mentioned multiple composition part is formed as, the degree of crook of radial direction or mutually different with other adjacent above-mentioned composition parts relative to the inclined degree in above-mentioned annular plate portion.

3. pressure-operated valve according to claim 2, it is characterised in that

It is also equipped with: above-mentioned valve port is carried out the valve body of opening and closing;And

The columned valve rod of this membrane body and above-mentioned valve body is linked in the way of the above-mentioned valve port of opening and closing by the deformation with above-mentioned membrane body,

The diameter of the above-mentioned composition part that the diameter of the end face on the above-mentioned diaphragm side of above-mentioned valve rod is positioned off the central authorities of the teat of the nearest above-mentioned film metal parts of above-mentioned valve port than above-mentioned membrane body is little.

4. the pressure-operated valve according to any one of claims 1 to 3, it is characterised in that

It is filled with incompressible fluid between above-mentioned multiple film metal parts.

5. the pressure-operated valve according to any one of claims 1 to 3, it is characterised in that

What at least one removing remaining one or more above-mentioned film metal parts after the nearest above-mentioned film metal parts of above-mentioned valve port from above-mentioned multiple film metal parts stated teat thereon has been centrally formed through hole.